A seed crystal inspection machine
By designing a seed crystal inspection machine with a rotating fixture, inspection components, and loading/unloading components, the problem of existing equipment being unable to accurately detect internal defects in seed crystals has been solved. This enables accurate detection of internal microcracks, length, taper, and diameter in seed crystals, as well as the recognition of end character information.
Patent Information
- Application Number
- CN202311809285.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-26
- Publication Date
- 2026-01-30
- Estimated Expiration
- 2043-12-26
AI Technical Summary
Existing seed crystal testing equipment cannot accurately detect internal microcracks, length, taper, and diameter of seed crystals, and cannot identify character information at the ends of seed crystals.
A seed crystal inspection machine was designed, comprising a rotating fixture, a detection component, an identification component, and a loading and unloading component. The rotating fixture drives the seed crystal to rotate at a uniform speed, the detection component identifies hidden cracks and dimensions, the identification component identifies character information, and the loading and unloading component realizes automated loading and unloading.
It enables precise detection of internal microcracks, length, taper, and diameter of seed crystals, identifies character information at the ends of seed crystals, and marks defective seed crystals to ensure the continuity and accuracy of detection.
Smart Images

Figure CN117619745B_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of seed crystal inspection technology, and in particular to a seed crystal inspection machine. Background Technology
[0002] As a third-generation semiconductor material, seed crystals have advantages such as high thermal conductivity, high breakdown field strength, high saturated electron drift velocity, and high bonding energy. Their excellent performance can meet the new requirements of modern electronic technology for high temperature, high frequency, high power, high voltage, and radiation resistance, making them one of the most promising materials in the field of semiconductor materials. However, there are usually many microcracks inside the seed crystal that are not visible to the naked eye, which affect the subsequent performance of the seed crystal.
[0003] Chinese patent CN211503937U, entitled "A Seed Crystal Detection Device and Seed Crystal Detection System", improves the accuracy of detection by setting up two seed crystal detection devices provided in the above embodiments of this utility model, which can directly determine whether the seed crystal is qualified by whether it can be inserted into the two seed crystal detection devices.
[0004] The prior art of the aforementioned patents typically has the following drawbacks in inspecting seed crystals: First, the prior art can only check whether the external dimensions of the seed crystal are up to standard, and the detection is subject to error, failing to accurately detect information such as the length, taper, and diameter of the seed crystal; second, the prior art can only check the external dimensions when inspecting seed crystals, failing to accurately identify hidden cracks inside the seed crystal; therefore, there is room for improvement in the existing seed crystal inspection equipment. Summary of the Invention
[0005] In order to accurately and automatically detect and identify hidden cracks, as well as the dimensions of length, taper, and diameter inside seed crystals, this application provides a seed crystal inspection machine.
[0006] The seed crystal inspection machine provided in this application adopts the following technical solution:
[0007] A seed crystal inspection machine includes a frame with a frame-type structure. A cooling fan is installed at the upper end of the frame, and a touch screen all-in-one machine is installed on the front upper side of the frame. From left to right, indicator lights, an emergency stop button, and a touch button are sequentially installed on the front lower side of the frame. A mounting platform is installed at the lower end of the frame. A rotating fixture is installed at the middle upper part of the mounting platform, used to rotate the seed crystal at a uniform speed. A detection component is installed at the rear upper part of the mounting platform, used to identify microcracks inside the seed crystal and its length, taper, and diameter. An identification component is installed at the middle left side of the mounting platform, used to identify character information at the end of the seed crystal. A loading and unloading component is installed at the front upper part of the mounting platform, used to automatically collect inspected seed crystals and place uninspected seed crystals in the middle of the rotating fixture.
[0008] Furthermore, the rotary fixture includes a connecting frame, a bracket, a connecting rod, rollers, a motor, and a belt. The connecting frame is installed in the middle of the upper end of the mounting platform. Brackets are evenly installed on the upper end of the connecting frame. Connecting rods are installed between the inner sides of the brackets. Rollers are installed between two opposing connecting rods via bearings. A rotation detection station is provided between the rollers. A motor is installed on the bracket via a motor mount. Guide wheels are installed on the output shaft of the motor and at the ends of the rollers. A belt is installed between the guide wheels.
[0009] Furthermore, the detection assembly includes a baffle frame, a Z-axis mechanism, a connecting plate, an infrared camera, a rotary motor, a dimensional detection camera, an infrared light source, and a lower plane light source. The baffle frame is installed on the upper rear side of the mounting platform, the Z-axis mechanism is installed on the upper front side of the baffle frame, and the connecting plate is installed on the front front of the Z-axis mechanism. The Z-axis mechanism is used to drive the connecting plate to adjust up and down. An infrared camera is installed on the left front side of the connecting plate, and a rotary motor for driving the angle adjustment of the infrared camera is installed on the connecting plate. A dimensional detection camera is installed on the right front side of the connecting plate. An infrared light source that moves horizontally along the Y-axis and a lower plane light source that moves horizontally along the X-axis are respectively installed on the connecting frame.
[0010] Furthermore, the identification component includes a mounting frame and an end-face identification camera. The mounting frame is installed in the middle of the left side of the mounting platform. The mounting frame has a U-shaped structure and the end-face identification camera is mounted on the mounting frame and arranged coaxially with the center of the seed crystal located at the detection station.
[0011] Furthermore, the loading and unloading assembly includes a mounting base, a loading mechanism, a mounting frame, a material handling mechanism, a material lifting mechanism, and a guide plate. The mounting frame has a mounting base installed at its front end, and an opening slot is provided at the front end of the mounting base. The loading mechanism is installed in the opening slot. Mounting frames are symmetrically installed on the upper end of the mounting base. Material handling mechanisms are installed between the mounting frames. A guide plate is provided below the material handling mechanisms and is installed in the middle of the upper end of the mounting base. Material lifting mechanisms are symmetrically installed on the rear side of the mounting base. Slots are symmetrically provided on the mounting frame, and the material lifting mechanism cooperates with the slots.
[0012] Furthermore, the feeding mechanism includes a rectangular frame, a feeding cylinder, and a lifting frame. The rectangular frame is installed in the opening slot, and through holes are evenly arranged on the rectangular frame. The feeding cylinder is installed in the through holes, and the lifting frame is installed at the upper end of the feeding cylinder. The upper end of the lifting frame is provided with a backward-inclined arc-shaped groove.
[0013] Furthermore, the material handling mechanism includes a connecting bracket, a drive cylinder, a U-shaped frame, a return spring, a handling frame, a sliding frame, and a guide groove. The mounting bracket is equipped with a connecting bracket, and drive cylinders are symmetrically mounted on the front end of the connecting bracket. A U-shaped frame is provided on the rear side of the connecting bracket. The mounting bracket is provided with a sliding groove that cooperates with the U-shaped frame. A return spring is installed between the U-shaped frame and the connecting bracket. The handling frames are symmetrically mounted inside the U-shaped frame. The handling frames are connected to the side wall of the U-shaped frame through a locking frame. A sliding frame is provided between the handling frames. Arc-shaped grooves are provided on both the upper and lower sides of the sliding frame. Guide grooves are evenly provided on the side wall of the handling frame. The sliding frame is connected to the guide groove through a guide rod.
[0014] Furthermore, the guide groove has a parallelogram structure, and limiting components are symmetrically installed inside the guide groove, with the limiting components respectively located at the acute angles of the parallelogram.
[0015] Furthermore, the limiting member is a flip plate, which is used to limit the sliding frame to move counterclockwise inside the guide groove via the guide rod.
[0016] Furthermore, the material ejection mechanism includes a horizontal plate, a material ejection cylinder, and an ejection frame. The horizontal plate is provided in the slot and is mounted on the mounting base. The horizontal plate has a mounting hole and the material ejection cylinder is installed in the mounting hole. The ejection frame is installed at the top of the material ejection cylinder and has an arc-shaped upper end.
[0017] In the above technical solution, the seed crystal inspection machine provided by the present invention, through the cooperation of a rotating fixture and a detection component, can detect hidden cracks in seed crystals at any angle. The identification component can identify the character information at the end of the seed crystal, and thus mark the seed crystals with defects. The feeding mechanism pushes the seed crystal upward into the pick-and-place mechanism, which drives the seed crystal to be gradually conveyed to the right. The guide plate can guide the seed crystal, and the guide plate is a flexible and retractable structure to prevent damage to the seed crystal during the feeding process. When the seed crystal is conveyed to the rotating detection station to the right, the feeding mechanism first pushes the seed crystal after inspection upward, and the pick-and-place mechanism can collect the inspected seed crystal and push the uninspected seed crystal to the rotating detection station to ensure that the seed crystal can be continuously inspected. Attached Figure Description
[0018] The present invention will be further described below with reference to the accompanying drawings and embodiments.
[0019] Figure 1 This is a three-dimensional structural diagram of this application.
[0020] Figure 2 This is a three-dimensional structural diagram of the mounting frame, rotating fixture, detection component, identification component and loading / unloading component of this application.
[0021] Figure 3 This application Figure 2 A schematic diagram of the cross-sectional structure.
[0022] Figure 4 This is a three-dimensional structural diagram of the mounting platform, rotating fixture, detection component, and identification component of this application.
[0023] Figure 5 This is a three-dimensional structural diagram of the detection component of this application.
[0024] Figure 6 This is a three-dimensional structural diagram of the mounting platform, rotating fixture, and identification components of this application.
[0025] Figure 7 This is a three-dimensional structural diagram of the loading and unloading assembly of this application.
[0026] Figure 8 This is a cross-sectional structural diagram of the loading and unloading assembly of this application.
[0027] Figure 9 This is a three-dimensional structural diagram of the mounting frame and the material handling mechanism of this application.
[0028] Figure 10 This is a cross-sectional structural diagram of the loading and unloading assembly of this application.
[0029] Figure 11 This is a cross-sectional structural diagram of the U-shaped frame, pick-and-place frame, guide groove and limiting member of this application.
[0030] Explanation of reference numerals in the attached drawings: 1. Frame; 11. Touch screen all-in-one machine; 12. Indicator light; 13. Emergency stop button; 14. Touch button; 2. Mounting platform; 3. Rotary fixture; 31. Connecting frame; 32. Bracket; 33. Connecting rod; 34. Roller; 35. Motor; 36. Belt; 4. Detection component; 41. Baffle frame; 42. Z-axis mechanism; 43. Connecting plate; 44. Infrared camera; 45. Rotary motor; 46. Dimensional detection camera; 47. Infrared light source; 48. Lower plane light source; 5. Recognition component; 51. Fixing frame 52. End face recognition camera; 6. Loading and unloading assembly; 61. Mounting base; 62. Loading mechanism; 621. Rectangular frame; 622. Loading cylinder; 623. Lifting frame; 63. Mounting frame; 64. Picking and unloading mechanism; 641. Connecting bracket; 642. Drive cylinder; 643. U-shaped frame; 644. Return spring; 645. Picking and unloading frame; 646. Sliding frame; 647. Guide groove; 648. Limiting component; 65. Ejecting mechanism; 651. Horizontal plate; 652. Ejecting cylinder; 653. Ejection frame; 66. Guide plate. Detailed Implementation
[0031] To enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings.
[0032] Please see Figure 1-11 This invention provides a seed crystal inspection machine, comprising a frame 1 with a frame structure, a cooling fan installed at the upper end of the frame 1, a touch screen all-in-one machine 11 installed at the front upper end of the frame 1, and an indicator light 12, an emergency stop button 13, and a touch button 14 installed sequentially from left to right at the front lower end of the frame 1; a mounting platform 2 installed at the lower end of the frame 1; a rotating fixture 3 installed at the middle upper end of the mounting platform 2, used to drive the seed crystal to rotate at a uniform speed; a detection component 4 installed at the rear upper end of the mounting platform 2, used to identify hidden cracks inside the seed crystal as well as the dimensions of its length, taper, and diameter; an identification component 5 installed at the middle left side of the mounting platform 2, used to identify character information at the end of the seed crystal; and a loading and unloading component 6 installed at the front upper end of the mounting platform 2, used to automatically collect the inspected seed crystals and place the uninspected seed crystals in the middle of the rotating fixture 3.
[0033] In the above technical solution, the seed crystal is manually placed on the loading and unloading assembly 6. The loading and unloading assembly 6 feeds the seed crystal into the upper end of the rotating fixture 3. The rotating fixture 3 drives the seed crystal to rotate at a uniform speed. The detection assembly 4 can detect the hidden cracks inside the seed crystal as well as the dimensions of its length, taper and diameter. The identification assembly 5 identifies the character information at the end of the seed crystal so as to accurately mark the seed crystal after detection. The loading and unloading assembly 6 can realize the function of automatically loading and unloading the seed crystal.
[0034] It should be noted that the cooling fan serves to dissipate heat, the touch screen all-in-one machine 11 facilitates the display, observation, and statistics of the seed crystals after testing, the indicator light 12 displays the status of the seed crystals during the testing process, the emergency stop button 13 can terminate the testing in case of an unexpected situation, and the touch button 14 is used for manual pressing at the start of the inspection.
[0035] See Figures 4-6 As shown, in this preferred embodiment, the rotary fixture 3 includes a connecting frame 31, a bracket 32, a connecting rod 33, a roller 34, a motor 35, and a belt 36. The connecting frame 31 is installed in the middle of the upper end of the mounting platform 2. The bracket 32 is evenly installed on the upper end of the connecting frame 31. The connecting rod 33 is installed between the inner sides of the bracket 32. The roller 34 is installed between two oppositely arranged connecting rods 33 through a bearing. A rotation detection station is provided between the rollers 34. The motor 35 is installed on the bracket 32 through a motor mount. Guide wheels are installed on the output shaft of the motor 35 and the end of the roller 34. The belt 36 is installed between the guide wheels.
[0036] In the above technical solution, when the seed crystal is placed between two rollers 34, the motor 35 drives the rollers 34 to rotate at a constant speed through the belt 36. The rollers 34 are made of rubber, and the rollers 34 can drive the seed crystal to rotate synchronously, so as to facilitate accurate inspection of the seed crystal.
[0037] See Figure 5 As shown, in this preferred embodiment, the detection component 4 includes a baffle frame 41, a Z-axis mechanism 42, a connecting plate 43, an infrared camera 44, a rotary motor 45, a size detection camera 46, an infrared light source 47, and a lower plane light source 48. The baffle frame 41 is installed on the upper rear side of the mounting platform 2. The Z-axis mechanism 42 is installed on the upper front side of the baffle frame 41. The connecting plate 43 is installed on the front front of the Z-axis mechanism 42. The Z-axis mechanism 42 is used to drive the connecting plate 43 to adjust up and down. The infrared camera 44 is installed on the left front side of the connecting plate 43. The rotary motor 45 is installed on the connecting plate 43 to drive the angle adjustment of the infrared camera 44. The size detection camera 46 is installed on the right front side of the connecting plate 43. The infrared light source 47, which moves horizontally along the Y-axis, and the lower plane light source 48, which moves horizontally along the X-axis, are respectively installed on the connecting frame 31.
[0038] In the above technical solution, the rotary motor 45 can drive the infrared camera 44 to adjust the angle. The infrared camera 44 and the size detection camera 46 work together to accurately take pictures of the seed crystal. By recognizing the pictures by the computer, the minute hidden cracks inside the seed crystal, as well as defects such as size and taper, can be identified.
[0039] In the implementation of the above embodiments, the infrared camera 44 and the infrared light source 47 work together to take a fixed shot of 1 / 12 of the seed crystal each time. After taking the shot, the seed crystal is rotated 30° and taken another fixed shot. This action is repeated 11 times, and 12 pictures are taken for each seed crystal. The size detection camera 46 and the lower plane light source 48 work together to move and take pictures, taking 6 pictures. The overlap area between the two pictures is 3mm. By recognizing the pictures by the computer, the minute hidden cracks inside the seed crystal and defects such as size and taper can be identified, thereby determining whether the seed crystal meets the usage requirements.
[0040] See Figure 6 As shown, as a preferred technical solution of this embodiment, the identification component 5 includes a fixing frame 51 and an end face identification camera 52. The fixing frame 51 is installed in the middle of the left side of the mounting platform 2. The fixing frame 51 has a U-shaped structure. The end face identification camera 52 is installed on the fixing frame 51 and arranged coaxially with the center of the seed crystal located at the detection station.
[0041] In the above technical solution, the end face recognition camera 52 can recognize the character information on the end of the seed crystal. The character information on the end of each seed crystal is different. If the detected seed crystal has a defect, the seed crystal with the defect is automatically marked for subsequent classification of the seed crystal.
[0042] See Figures 7-8 As shown, in this preferred embodiment, the loading and unloading assembly 6 includes a mounting base 61, a loading mechanism 62, a mounting frame 63, a material handling mechanism 64, a material lifting mechanism 65, and a guide plate 66. The mounting base 61 is mounted on the front end of the mounting frame 2. The front end of the mounting base 61 is provided with an opening groove, and the loading mechanism 62 is installed in the opening groove. The mounting frame 63 is symmetrically mounted on the upper end of the mounting base 61. The material handling mechanism 64 is installed between the mounting frames 63. The guide plate 66 is provided below the material handling mechanism 64 and is installed in the middle of the upper end of the mounting base 61. The material lifting mechanism 65 is symmetrically mounted on the rear side of the mounting base 61. The mounting frame 2 is symmetrically provided with slots, and the material lifting mechanism 65 cooperates with the slots.
[0043] In the above technical solution, the seed crystal is manually placed on the upper end of the feeding mechanism 62. The feeding mechanism 62 pushes the seed crystal upward into the pick-and-place mechanism 64. The pick-and-place mechanism 64 drives the seed crystal to be gradually conveyed to the right. The guide plate 66 can guide the seed crystal. At the same time, the guide plate 66 is a flexible and retractable structure to prevent the seed crystal from being damaged during the feeding process. When the seed crystal is conveyed to the right to the rotary detection station, the ejector mechanism 65 first pushes the seed crystal that has been tested upward. At the same time, the pick-and-place mechanism 64 can collect the tested seed crystal and push the untested seed crystal to the rotary detection station to ensure that the seed crystal can be continuously tested.
[0044] See Figure 8 As shown, as a preferred technical solution of this embodiment, the feeding mechanism 62 includes a rectangular frame 621, a feeding cylinder 622, and a lifting frame 623. The rectangular frame 621 is installed in the opening slot. Through holes are evenly arranged on the rectangular frame 621. The feeding cylinder 622 is installed in the through holes. The lifting frame 623 is installed on the upper end of the feeding cylinder 622. The upper end of the lifting frame 623 is provided with a rearwardly inclined arc-shaped groove.
[0045] In the above technical solution, the seed crystal is placed manually inside the arc-shaped groove on the lifting frame 623, and the feeding cylinder 622 moves upward to lift the seed crystal upward. The picking and unloading mechanism 64 can then accurately collect the seed crystal, so as to facilitate the feeding of the seed crystal one by one.
[0046] See Figures 9-10 As shown, in a preferred embodiment, the material handling mechanism 64 includes a connecting bracket 641, a drive cylinder 642, a U-shaped frame 643, a return spring 644, a handling frame 645, a sliding frame 646, and a guide groove 647. The mounting frame 63 supports the connecting bracket 641. The drive cylinder 642 is symmetrically mounted on the front end of the connecting bracket 641. A U-shaped frame 643 is provided on the rear side of the connecting bracket 641. The mounting frame 63 is provided with a sliding groove that cooperates with the U-shaped frame 643. A return spring 644 is installed between the frame 643 and the connecting bracket 641. A pick-up and place frame 645 is symmetrically installed inside the U-shaped frame 643. The pick-up and place frame 645 has evenly distributed collection grooves at its upper and lower ends. The pick-up and place frame 645 is connected to the side wall of the U-shaped frame 643 through a locking frame. A sliding frame 646 is provided between the pick-up and place frames 645. The sliding frame 646 has arc-shaped grooves on both its upper and lower sides. Guide grooves 647 are evenly distributed on the side wall of the pick-up and place frame 645. The sliding frame 646 is connected to the guide grooves 647 through guide rods.
[0047] In the above technical solution, when the seed crystal is being fed, the drive cylinder 642 drives the sliding frame 646 to pull forward to the front end, and the feeding mechanism 62 pushes the seed crystal to the lower end of the sliding frame 646. When the drive cylinder 642 drives the sliding frame 646 to move backward, the pick-and-place frame 645 moves synchronously with the sliding frame 646. The pick-and-place frame 645 has a short stroke. When the pick-and-place frame 645 stops moving, the sliding frame 646 continues to move backward. At this time, the sliding frame 646 moves downward along the guide groove 647. When the sliding frame 646 moves to the right, it first presses the seed crystal. Then, the sliding frame 646 drives the seed crystal from the collection groove at the lower end of the pick-and-place frame 645 to another collection groove. That is, the sliding frame 646 can push the seed crystal into the rotary detection station by pushing backward once.
[0048] When picking up the material, the top material mechanism 65 first lifts up the seed crystal after testing. When the pick-up and place frame 645 moves to directly below the seed crystal, the top material mechanism 65 resets, and the seed crystal after testing falls onto the upper end of the pick-up and place frame 645. When the drive cylinder 642 drives the sliding frame 646 to pull back, the sliding frame 646 moves upward to lift up the seed crystal, so that the seed crystal after testing can move from back to front on the pick-up and place frame 645.
[0049] See Figure 10 As shown, in this preferred embodiment, the guide groove 647 has a parallelogram structure, and limiting members 648 are symmetrically installed inside the guide groove 647. The limiting members 648 are respectively located at the acute angles of the parallelogram.
[0050] In the above technical solution, when the sliding frame 646 moves downward along the guide groove 647, the sliding frame 646 will squeeze the seed crystal, so that the seed crystal can be separated from the collection groove at the lower end of the pick-and-place frame 645. When the sliding frame 646 moves horizontally backward along the guide groove 647, the sliding frame 646 will drive the seed crystal to move backward a certain distance, and at the same time push the seed crystal on the last side to the detection station. When the sliding frame 646 moves upward along the guide groove 647, the sliding frame 646 can lift the seed crystal at the upper end of the pick-and-place frame 645. When the sliding frame 646 drives the seed crystal to move forward a certain distance, the sliding frame 646 can transport the seed crystal at the upper end of the pick-and-place frame 645 forward a certain distance, thereby realizing the function of collecting the seed crystals one by one after the detection is completed.
[0051] See Figure 11 As shown, in this preferred embodiment, the limiting member 648 is a flip plate, which is used to limit the sliding frame 646 to move counterclockwise inside the guide groove 647 via the guide rod.
[0052] In the above technical solution, the flip plate plays a limiting role. When the guide rod moves counterclockwise inside the guide groove 647, the limiting member 648 is squeezed and flipped. When the guide rod moves clockwise inside the guide groove 647, the limiting member 648 is squeezed and does not rotate.
[0053] See Figure 10 As shown, as a preferred technical solution of this embodiment, the top material mechanism 65 includes a horizontal plate 651, a top material cylinder 652, and a top ejector 653. The horizontal plate 651 is provided in the slot and is mounted on the mounting base 61. The horizontal plate 651 is provided with a mounting hole and the top material cylinder 652 is installed in the mounting hole. The top of the top material cylinder 652 is mounted with the top ejector 653, and the upper end of the top ejector 653 has an arc-shaped structure.
[0054] In the above technical solution, after the seed crystal is detected, the top material cylinder 652 drives the ejector frame 653 to move upward, so that the seed crystal can be lifted. When the pick-and-place frame 645 moves to below the seed crystal, the top material cylinder 652 drives the ejector frame 653 to reset, so as to avoid interference caused by the pick-and-place frame 645 continuing to move.
[0055] The foregoing has only described certain exemplary embodiments of the present invention by way of illustration. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the foregoing drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.
Claims
1. A seed inspection machine characterized by, Include: Rack (1), which is in a frame type structure, the upper end of the rack (1) is installed with a cooling fan, the front side of the upper end of the rack (1) is installed with a touch all-in-one machine (11), the front side of the lower end of the rack (1) is installed with an indicator light (12), an emergency stop button (13) and a touch button (14) from left to right in turn; The installation platform (2) is installed at the lower end of the rack (1) inside; The rotating jig (3) is installed at the upper end of the installation platform (2), and the rotating jig (3) is used to drive the seed crystal to rotate uniformly; The detection assembly (4) is installed at the upper end of the installation platform (2) rear side, and the detection assembly (4) is used to identify the internal hidden crack of the seed crystal and the size of the length, taper and diameter; The identification assembly (5) is installed at the left side of the installation platform (2), and the identification assembly (5) is used to identify the character information of the seed crystal end; The feeding and discharging assembly (6) is installed at the upper end of the installation platform (2) front side, and the feeding and discharging assembly (6) is used to automatically collect the detected seed crystal and place the undetected seed crystal in the middle of the rotating jig (3); The feeding and discharging assembly (6) includes a mounting seat (61), a feeding mechanism (62), a mounting frame (63), a taking and placing mechanism (64), a lifting mechanism (65) and a guide plate (66), the mounting seat (61) is installed at the front end of the installation platform (2), the front end of the mounting seat (61) is provided with an open slot, the open slot is installed with the feeding mechanism (62), the mounting seat (61) is installed with the mounting frame (63) on the upper end, the taking and placing mechanism (64) is installed between the mounting frames (63), the guide plate (66) is installed on the upper end of the mounting seat (61), the lifting mechanism (65) is installed on the rear side of the mounting seat (61), the installation platform (2) is provided with a clamping groove on the upper side, and the lifting mechanism (65) is matched with the clamping groove; The guide plate (66) can guide the seed crystal, and the guide plate (66) is a flexible telescopic structure; The feeding mechanism (62) includes a rectangular frame (621), a feeding cylinder (622) and a lifting frame (623), the rectangular frame (621) is installed in the open slot, the rectangular frame (621) is uniformly provided with a through hole, the feeding cylinder (622) is installed in the through hole, the lifting frame (623) is installed on the upper end of the feeding cylinder (622), and the lifting frame (623) is provided with an arc slot inclined backward on the upper end; The taking and placing mechanism (64) comprises a connecting support (641), a driving cylinder (642), a U-shaped support (643), a reset spring (644), a taking and placing support (645), a sliding support (646) and a guide groove (647), the mounting support (63) is provided with the connecting support (641), the driving cylinder (642) is symmetrically arranged at the front end of the connecting support (641), when the seed crystal is fed, the driving cylinder (642) drives the sliding support (646) to pull the frontmost end forward, the U-shaped support (643) is arranged at the rear side of the connecting support (641), the mounting support (63) is provided with a sliding groove matched with the U-shaped support (643), the reset spring (644) is arranged between the U-shaped support (643) and the connecting support (641), the U-shaped support (643) is symmetrically provided with the taking and placing support (645), the taking and placing support (645) is connected with the side wall of the U-shaped support (643) through a locking support, the sliding support (646) is arranged between the taking and placing supports (645), the sliding support (646) is provided with arc-shaped grooves on the upper side and the lower side, the guide grooves (647) are uniformly arranged on the side walls of the taking and placing supports (645), and the sliding support (646) is connected with the guide grooves (647) through guide rods; The guide groove (647) is in a parallelogram structure, limit pieces (648) are symmetrically arranged in the guide groove (647), and the limit pieces (648) are arranged at acute angles of the parallelogram, respectively; The limit piece (648) is a turnover plate, and the turnover plate is used for limiting the counterclockwise movement of the sliding support (646) in the guide groove (647) through the guide rod; The ejection mechanism (65) comprises a horizontal plate (651), an ejection cylinder (652) and an ejection support (653), the horizontal plate (651) is arranged in the clamping groove, the horizontal plate (651) is arranged on the mounting seat (61), the horizontal plate (651) is provided with a mounting hole, the ejection cylinder (652) is arranged in the mounting hole, the top end of the ejection cylinder (652) is provided with the ejection support (653), and the top end of the ejection support (653) is in an arc structure.
2. A seed inspection machine according to claim 1, characterized in that: The rotating jig (3) comprises a connecting frame (31), a support (32), a connecting rod (33), a roller (34), a motor (35) and a belt (36), the connecting frame (31) is arranged at the middle part of the upper end of the mounting rack (2), the supports (32) are uniformly arranged at the upper end of the connecting frame (31), the connecting rods (33) are arranged between the inner sides of the supports (32), the rollers (34) are arranged between the two oppositely arranged connecting rods (33) through bearings, a rotating detection station is arranged between the rollers (34), the motor (35) is arranged on the motor base arranged on the support (32), guide wheels are arranged on the output shaft of the motor (35) and the end part of the roller (34), and the belt (36) is arranged between the guide wheels.
3. A seed inspection machine according to claim 2, wherein: The detection assembly (4) comprises a baffle frame (41), a Z-axis mechanism (42), a connecting plate (43), an infrared camera (44), a rotary motor (45), a size detection camera (46), an infrared light source (47) and a lower plane light source (48), the baffle frame (41) is installed on the rear side of the upper end of the mounting rack (2), the Z-axis mechanism (42) is installed on the upper side of the front end of the baffle frame (41), the connecting plate (43) is installed on the front end of the Z-axis mechanism (42), the Z-axis mechanism (42) is used for driving the connecting plate (43) to adjust up and down, the infrared camera (44) is installed on the left side of the front end of the connecting plate (43), the rotary motor (45) for driving the infrared camera (44) to adjust the angle is installed on the connecting plate (43), the size detection camera (46) is installed on the right side of the front end of the connecting plate (43), the infrared light source (47) moving along the Y-axis horizontally and the lower plane light source (48) moving along the X-axis horizontally are installed on the connecting frame (31).
4. A seed inspection machine according to claim 3, wherein: The identification assembly (5) comprises a fixed frame (51) and an end face identification camera (52), the fixed frame (51) is installed on the middle part of the left side of the mounting rack (2), the fixed frame (51) is in a U-shaped structure, and the end face identification camera (52) coaxially arranged with the center of the seed crystal in the detection station is installed on the fixed frame (51).
Citation Information
Patent Citations
Seed crystal detection device and seed crystal detection system
CN211503937U
Tooling equipment convenient for testing silicon single crystal parameters
CN210639241U
Crystal orientation measuring device for seed crystal detection
CN214039939U
Single crystal silicon rod crack detection equipment
CN219657520U