Charged particle spectrometer and data analysis method
By designing a charged particle spectrometer and utilizing a multilayer scintillation fiber array and a nonlinear regression method, the problems of low dynamic range and spatial resolution in existing technologies have been solved, achieving high-precision online detection of charged particle beams and three-dimensional energy spectrum analysis.
Patent Information
- Application Number
- CN202311700796.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-12
- Publication Date
- 2026-08-25
- Estimated Expiration
- 2043-12-12
AI Technical Summary
Existing charged particle data analysis equipment and methods suffer from low dynamic range or low spatial resolution, making it impossible to achieve high-precision online detection and spatial diagnosis of charged particle beams.
A charged particle spectrometer was designed, which uses a multi-layer scintillation fiber array for spatial resolution. Visible light signals are collected in the X and Y directions by orthogonally arranged scintillation fiber arrays and converted into electrical signals or image signals by a detection component. The spectrum is then interpreted using a nonlinear regression method to achieve three-dimensional energy spectrum detection.
It achieves high-precision online detection and spatial diagnosis of charged particle beams, and can obtain three-dimensional charged particle energy spectra, thus improving detection accuracy.
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Figure CN117687074B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to a charged particle spectrometer and a data analysis method, belonging to the field of particle measurement technology. Background Technology
[0002] Laser proton accelerators are a new type of accelerator whose physical mechanism is based on the strong charge separation field formed by the interaction of ultrashort, ultra-intense lasers with solids to accelerate protons. To study the characteristics of this type of proton source, direct diagnosis of the proton beam is essential.
[0003] For charged particle data analysis, commonly used diagnostic methods include RCF stack detectors, Thomson proton spectrometers, and solid track detectors. However, RCF stack detectors are single-use and are often used for offline detection. Their performance in online detection is poor. During data analysis, the vacuum environment inside the laser accelerator must be disrupted to remove the RCF stack and use a scanner for analysis. The Thomson proton spectrometer can perform online diagnostics of the proton beam, but it does not have the ability to spatially resolve the proton beam. Solid track detectors can perform online detection, but they lack spatial resolution.
[0004] Scintillators, especially plastic scintillators, offer a range of advantages, including low cost, high mechanical strength, and good vacuum performance. Furthermore, they can convert radiation information into fluorescence information for online transmission, making the scintillator family highly favored in the field of radiation detectors. Currently, scintillator-based spectrometers exist, but they still suffer from several drawbacks, such as low dynamic range or low spatial resolution.
[0005] For the reasons mentioned above, it is necessary to further study charged particle data analysis equipment and methods in order to solve the aforementioned problems. Summary of the Invention
[0006] To overcome the above problems, the inventors conducted in-depth research and designed a charged particle spectrometer, including a radiation-sensitive component and a detection component. The radiation-sensitive component includes a multilayer scintillation fiber array, each layer of the scintillation fiber array comprising multiple scintillation fibers. Adjacent scintillation fiber arrays are arranged orthogonally to each other, so that the scintillation fibers are set in the X and Y directions respectively; The detection component is used to convert the visible light emitted by the scintillation fiber into electrical signals or image signals.
[0007] In a preferred embodiment, in each layer of the scintillation fiber array, multiple scintillation fibers are arranged in a row, with adjacent scintillation fibers parallel to each other and the same distance between adjacent scintillation fibers.
[0008] In a preferred embodiment, the detection component has two parts, which respectively detect the X-direction scintillation fiber and the Y-direction scintillation fiber.
[0009] In a preferred embodiment, a mounting bracket with a cavity is also included for housing radiation-sensitive components. A charged particle beam injection window is provided in the Z direction of the cavity. Photon channels are provided in the X and Y directions of the cavity for optical fibers to pass through in order to connect to the detection components.
[0010] In a preferred embodiment, a probe holder is provided on the mounting frame for fixing the probe assembly. The distance between the probe holder and the cavity is adjustable to adjust the field of view of the imaging unit.
[0011] The present invention also provides a charged particle data analysis method, which uses a charged particle beam to irradiate a radiation-sensitive component to obtain images in the X and Y directions; Based on X-direction imaging and Y-direction imaging, spectral analysis is performed separately to obtain the two-dimensional charged particle beam energy spectrum in the X-direction and the two-dimensional charged particle beam energy spectrum in the Y-direction. The two-dimensional charged particle beam energy spectra in the X-direction and the Y-direction are combined to obtain the three-dimensional charged particle energy spectrum.
[0012] In a preferred embodiment, the spectral interpretation includes the following steps: S1. Establish a response matrix, which is used to describe the degree of influence of charged particle beams of different energies on scintillation fibers at different locations; S2. Perform irradiation simulation to obtain the scintillation fiber luminescence at different depths in charged particle beam imaging; S3. Obtain the angle weight matrix, which is used to describe the location of the scintillation fiber that can be covered by rays at different angles; S4. Obtain the scattering angle based on the imaging. The cutoff energy corresponding to the terminal scintillation fiber excited by a beam of charged particles; S5. Using the mean square error between the number of luminous particles emitted by each layer of scintillation fiber in the response matrix and the number of luminous particles emitted by each layer of scintillation fiber in the actual imaging as the loss function, a nonlinear regression method is employed to obtain the scattering angle of the charged particle beam in the actual imaging. Energy; S6. Repeat S3~S5 to obtain the energy corresponding to all scattering angles, thereby obtaining the energy of the entire charged particle beam.
[0013] In a preferred embodiment, in S1, the response matrix is obtained by irradiating a radiation-sensitive component through a narrow slit using a charged particle source.
[0014] In a preferred embodiment, in S4, the scattering angle is obtained based on the angle weight matrix. By imaging, the cutoff energy of the light-emitting fiber at the very end of the intersecting beams of charged particles is obtained.
[0015] In a preferred embodiment, in S5, in the nonlinear regression, the Boltzmann distribution iteration is preferentially used to obtain the function zeros. When the Boltzmann distribution iteration fails to converge, the exponential distribution iteration is used. When the exponential distribution iteration fails to converge, the double exponential distribution iteration is used. When the double exponential distribution iteration fails to converge, the nearest neighbor interpolation is used to obtain the function zeros, thereby obtaining the charged particle beam energy.
[0016] The beneficial effects of this invention include: (1) Spatial diagnosis of charged particle beams was achieved; (2) Realize online detection of charged particle beams; (3) High detection accuracy. Attached Figure Description
[0017] Figure 1 This illustration shows a schematic diagram of a scintillation fiber array structure in a radiation-sensitive component of a charged particle spectrometer according to a preferred embodiment of the present invention. Figure 2 This diagram illustrates a schematic of the structure of a radiation-sensitive component of a charged particle spectrometer according to a preferred embodiment of the present invention. Figure 3 This diagram illustrates a schematic of a charged particle spectrometer mounting structure according to a preferred embodiment of the present invention. Figure 4 This diagram illustrates a schematic of a charged particle spectrometer mounting structure according to a preferred embodiment of the present invention. Figure 5 A schematic diagram of the structure of a radiation-sensitive component irradiated through a narrow slit in a charged particle data analysis method according to a preferred embodiment of the present invention is shown. Figure 6 A schematic diagram of the irradiation simulation process in a charged particle data analysis method according to a preferred embodiment of the present invention is shown. Figure 7 A schematic diagram of the two-dimensional spectral resolution results obtained in Example 1 is shown.
[0018] Figure label: 1-Radiation-sensitive components; 11-Scintillating fiber array; 101-Scintillating fiber; 3-Fixed bracket; 31-Cavity; 32 - Charged particle beam inflow window; 33-Photon Channel; 34 - Detector mounting bracket. Detailed Implementation
[0019] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments. Through these descriptions, the features and advantages of the present invention will become clearer and more apparent.
[0020] The term “exemplary” as used herein means “serving as an example, embodiment, or illustration.” Any embodiment illustrated herein as “exemplary” is not necessarily to be construed as superior to or better than other embodiments. Although various aspects of embodiments are shown in the accompanying drawings, the drawings are not necessarily drawn to scale unless specifically indicated otherwise.
[0021] In this invention, to facilitate the description of relative orientation relationships, the three axes in the spatial rectangular coordinate system are labeled as the X, Y, and Z directions.
[0022] This invention provides a charged particle spectrometer, including a radiation-sensitive component 1 and a detection component. The radiation-sensitive component 1 includes a multilayer scintillation fiber array 11, such as Figure 1 As shown, each layer of the scintillation fiber array includes multiple scintillation fibers 101. Adjacent scintillation fiber arrays 11 are arranged orthogonally to each other, such as Figure 2 As shown, the scintillation fiber is configured to be set in the X and Y directions, respectively; The detection component is used to convert the visible light emitted by the scintillation fiber into electrical signals or image signals.
[0023] More preferably, in each layer of scintillation fiber array, multiple scintillation fibers are arranged in a row, adjacent scintillation fibers are parallel to each other, and the distance between adjacent scintillation fibers is the same.
[0024] According to the present invention, the detection component has two parts, which respectively detect the X-direction scintillation fiber and the Y-direction scintillation fiber.
[0025] Charged particle beams can excite scintillation fibers to generate visible light, such as a typical charged particle beam—a proton beam. By collecting the visible light excited by radiation-sensitive components, the spatial distribution information of the energy deposition of the charged particle beam can be obtained, thereby reconstructing the energy and spatial distribution information of the charged particle beam.
[0026] It is readily understood by those skilled in the art that a beam of charged particles with a certain energy has a relatively definite range. Therefore, scintillation fiber arrays at different depths represent different charged particle energy thresholds. In other words, as long as a layer of the scintillation fiber array emits light, the charged particles have at least reached a certain definite energy. Then, based on the number of emitted particles per layer of the scintillation fiber array in the X direction, the divergence angle of the charged particle source relative to the XOZ plane is determined; based on the number of emitted particles per layer of the scintillation fiber array in the Y direction, the divergence angle of the charged particle source relative to the YOZ plane is determined.
[0027] Furthermore, the number of layers in the scintillation fiber array can be changed, which will change the energy range of the spectrometer. The number and length of the fibers in the scintillation fiber array can also be changed. Preferably, the lengths of adjacent layers of the scintillation fiber array are the same.
[0028] For example, the scintillation fiber array is 60 mm long and has 120 fibers.
[0029] According to the present invention, the detection component has an imaging unit, such as a CCD camera.
[0030] According to the present invention, scintillation fiber is used instead of scintillation light body, and a scintillation fiber array is set up with each other orthogonally arranged, thereby realizing the separate collection of visible light excited by charged particle beam in the X and Y directions, thereby realizing two-dimensional spectral interpretation on the XOZ plane and YOZ plane, and then realizing three-dimensional energy spectrum detection of charged particle beam through the two two-dimensional plane spectral interpretation results.
[0031] In a preferred embodiment, in the radiation-sensitive component 1, the different scintillation optical fibers 101 are fixed together by an adhesive. The adhesive is any kind of light-absorbing adhesive material, for example, cast from black epoxy resin, which has properties such as light absorption, radiation resistance, and high viscosity, and can be used in a vacuum.
[0032] Furthermore, the radiation-sensitive component 1 is connected to the detection component via an optical fiber, providing a propagation path for the excited visible light. Preferably, the optical fiber has a shielding cover on the outside to prevent interference from stray light in the environment.
[0033] In a preferred embodiment, such as Figure 3 , 4 As shown, the charged particle spectrometer also includes a mounting frame 3, which has a cavity 31 for housing radiation-sensitive components. A charged particle beam injection window 32 is provided in the Z direction of the cavity 31. Photonic channels 33 are provided in the X and Y directions of the cavity 31 for optical fibers to pass through in order to connect the detection components. The outer shell of the photonic channel acts as a shield.
[0034] A detection mounting bracket 34 is provided on the mounting bracket 3 for fixing the detection component.
[0035] In a preferred embodiment, the distance between the detection fixture 34 and the cavity 31 is adjustable to adjust the field of view of the imaging unit.
[0036] More preferably, the detector mounting bracket 34 has a slide rail between it and the cavity 31. The slide rail is located on the outside of the photon channel 33, and the detector mounting bracket 34 can slide along the slide rail to adjust the field of view.
[0037] The charged particle beam inlet window 32 can be circular or square, as long as it can achieve the incident of the charged particle beam.
[0038] In a preferred embodiment, the mounting bracket 3 is made of a metal material such as aluminum alloy, which can shield against strong electromagnetic pulses in the operating environment and ensure the normal operation of the spectrometer.
[0039] Traditional accelerators produce proton beams that are quasi-monoenergetic beams with a Gaussian distribution, characterized by low emittance and relatively uniform beam uniformity. For such charged particle beams, single-dimensional resolution is sufficient to characterize them to a certain extent. However, proton beams obtained by novel laser ablation methods exhibit greater divergence and are not uniform, rendering traditional charged particle data analysis methods inapplicable.
[0040] Furthermore, traditional methods for analyzing charged particle data are mostly one-dimensional spectral analysis methods, which only achieve the detection of cutoff energy, cannot measure the energy corresponding to different angles, and do not have spatial resolution capabilities.
[0041] The present invention also discloses a charged particle data analysis method, which uses a charged particle beam to irradiate a radiation-sensitive component to obtain images in the X and Y directions; Based on X-direction imaging and Y-direction imaging, spectral analysis is performed separately to obtain the two-dimensional charged particle beam energy spectrum in the X-direction and the two-dimensional charged particle beam energy spectrum in the Y-direction. The two-dimensional charged particle beam energy spectra in the X-direction and the Y-direction are combined to obtain the three-dimensional charged particle energy spectrum.
[0042] The radiation-sensitive component includes a multilayer scintillation fiber array, each layer of the scintillation fiber array including multiple scintillation fibers 101, and adjacent layers of scintillation fiber arrays 11 are arranged orthogonally to each other, such that the scintillation fibers are respectively set in the X direction and the Y direction.
[0043] In this invention, the spectrum interpretation includes the following steps: S1. Establish a response matrix, which is used to describe the degree of influence of charged particle beams of different energies on scintillation fibers at different locations; S2. Perform irradiation simulation to obtain the scintillation fiber luminescence at different depths in charged particle beam imaging; S3. Obtain the angle weight matrix, which is used to describe the location of the scintillation fiber that can be covered by rays at different angles; S4. Obtain the scattering angle based on the imaging. The cutoff energy corresponding to the terminal scintillation fiber excited by a beam of charged particles; S5. Using the mean square error between the number of luminous particles emitted by each layer of scintillation fiber in the response matrix and the number of luminous particles emitted by each layer of scintillation fiber in the actual imaging as the loss function, a nonlinear regression method is employed to obtain the scattering angle of the charged particle beam in the actual imaging. Energy; S6. Repeat S3~S5 to obtain the energy corresponding to all scattering angles, thereby obtaining the energy of the entire charged particle beam.
[0044] According to the present invention, in S1, the process of establishing the response matrix is similar to the method of establishing the response matrix in traditional charged particle data analysis methods. The difference is that, in the present invention, the response matrix is obtained by irradiating a radiation-sensitive component through a narrow slit using a charged particle source, such as... Figure 5 As shown.
[0045] Traditional methods for analyzing charged particle data involve corresponding matrices, but point sources are typically used to obtain the response matrix. In this invention, slit collimation is used to limit the irradiation length along the fiber direction, thereby accurately determining the irradiation length along the fiber direction.
[0046] Furthermore, in this invention, a charged particle source with a large angle is used to ensure that the entire cross-section of the radiation-sensitive component can be covered behind the slit.
[0047] Furthermore, the response matrix is established using charged particle sources with known energies, and even further, multiple proton sources are used. Preferably, the energy interval between the multiple proton sources is 1-100 MeV with a step size of 0.1 MeV.
[0048] According to the present invention, the unit dimension of the response matrix is: photon / number of charged particles per unit solid angle.
[0049] In S2, the irradiation simulation was conducted using a charged particle source that was collimated by a slit into a fan shape. Irradiation simulation is used to simulate the detection of charged particle sources during experiments, and a charged particle source conforming to an exponential distribution is set up for simulation.
[0050] In a preferred embodiment, the fan-shaped section formed after collimation by the slit is symmetrically divided into two parts, and one part is used for processing, such as... Figure 6 As shown.
[0051] According to the present invention, in S3, for any scattering angle, the intersection of the charged particle beam at that scattering angle with different scintillation fibers is determined by geometric relationship. If they intersect, the value is assigned to 1; otherwise, the value is assigned to 0, thereby obtaining the angle weight matrix for different scattering angles.
[0052] In S4, the scattering angle is obtained based on the angle weight matrix. By imaging an intersecting beam of charged particles in a scintillation fiber, the cutoff energy of the light-emitting fiber at its very end is obtained. Specifically, the response matrix is used to find the responses of charged particle sources of various energies to the optical fiber at a specific location and its neighboring optical fibers at the same angle. By observing the responses of charged particles from low-energy to high-energy sources, if a charged particle source of a certain energy has a fluorescent response to this optical fiber but no response to its neighboring optical fibers, then the energy of that charged particle source is the scattering angle. Cutoff energy of charged particle beam .
[0053] The scattering angle The angle between the charged particle beam and the Z-axis direction is denoted as .
[0054] Traditional charged particle data analysis methods can generally only achieve one-dimensional spectral decomposition of energy levels and cannot obtain the relationship between energy and angle. In this invention, the relationship between angle and energy is established through irradiation simulation and angle weight matrix, thereby decomposing the two-dimensional energy spectrum into several one-dimensional energy spectra, and thus realizing the detection of the two-dimensional energy spectrum.
[0055] According to the present invention, in S5, the loss function is expressed as:
[0056] in, This represents the convolution of the assumed energy spectrum distribution with the response matrix along the path. The mean square error function between the number of light emitted by the angular scintillation fiber and the actual number of light emitted. This represents the hypothetical energy spectrum distribution. yes The angle represents the parameter space of the assumed undetermined coefficients of the energy spectrum, and the exponential distribution represents the parameter space. , Indicates direct receipt from The number of scintillating optical fibers that emit light when irradiated by a beam of charged particles at an angle. Indicates from A pair of charged particles with an angle and energy of E The fluorescence response of the i-th fiber in the optical fiber. Then it means In the first optical fiber, The number of scintillation fluorescence generated by the irradiation of a fiber by charged particles.
[0057] The assumed energy spectrum distribution is usually an exponential distribution, Maxwell distribution, or other similar distributions, which can be selected by those skilled in the art based on experience.
[0058] Furthermore, when performing computer calculations, the integral form in the above equation needs to be discretized:
[0059] in, The step size represents the energy spectrum, and k indicates that the continuous energy spectrum is divided into k intervals with an interval of 0.1 MeV. Among them, the parameter space to be determined Initially, a random value is assigned, and the algorithm gradually converges through iteration. It was obtained from the simulation in S2. It was detected.
[0060] Where k depends on 0.1 + 0.9 According to the present invention, the specific process of the nonlinear regression method is not limited, and any method such as the least squares method or the Newton iteration method can be used.
[0061] Preferably, in S5, in the nonlinear regression, the Boltzmann distribution iteration is preferentially used to obtain the function zero. When the Boltzmann distribution iteration fails to converge, the exponential distribution iteration is used to obtain the function zero. When the exponential distribution iteration fails to converge, the double exponential distribution iteration is used to obtain the function zero. When the double exponential distribution iteration fails to converge, the nearest neighbor interpolation is used to obtain the function zero, thereby obtaining the charged particle beam energy.
[0062] In a preferred embodiment, in S6, the energy corresponding to all scattering angles is obtained starting from 0° with an angle step size of 0.1°. Example
[0063] Example 1 Proton data analysis was performed on a 90MeV standard proton beam. A charged particle beam was used to irradiate a radiation-sensitive component. Images in the X and Y directions were acquired using a CCD camera and displayed on a computer. Based on X-direction imaging and Y-direction imaging, spectral analysis is performed separately to obtain the two-dimensional proton beam energy spectrum in the X-direction and the two-dimensional proton beam energy spectrum in the Y-direction. The two-dimensional proton beam energy spectra in the X-direction and the Y-direction are combined to obtain the three-dimensional proton energy spectrum.
[0064] The radiation-sensitive component includes a multilayer scintillation fiber array, each layer of which includes multiple scintillation fibers. Adjacent layers of scintillation fiber arrays are arranged orthogonally to each other, such that the scintillation fibers are respectively set in the X and Y directions.
[0065] The spectrum interpretation includes the following steps: S1. Establish a response matrix, which is used to describe the degree of influence of different energy proton beams on scintillation fibers at different locations; S2. Perform irradiation simulation to obtain the luminescence of scintillation fiber at different depths in proton beam imaging; S3. Obtain the angle weight matrix, which is used to describe the location of the scintillation fiber that can be covered by rays at different angles; S4. Obtain the scattering angle based on the imaging. The cutoff energy corresponding to the terminal scintillation fiber excited by a proton beam; S5. Using the mean square error between the number of luminous particles emitted by each scintillation fiber in the response matrix and the number of luminous particles emitted by each scintillation fiber in the actual imaging as the loss function, a nonlinear regression method is employed to obtain the proton beam scattering angle in the actual imaging. Energy; S6. Repeat S3~S5 to obtain the energy corresponding to all scattering angles, thereby obtaining the energy of the entire proton beam.
[0066] In S5, the loss function is expressed as:
[0067] In S5, the loss function is expressed as:
[0068] In S6, the energy corresponding to all scattering angles is obtained starting from 0° with an angle step size of 0.1°.
[0069] The results obtained from two-dimensional spectral analysis are as follows Figure 7 As shown.
[0070] The final energy spectrum obtained by spectral analysis was compared with the standard energy spectrum, and the relative error was less than 0.3%.
[0071] In the description of this invention, it should be noted that the terms "upper," "lower," "inner," "outer," "front," and "rear," etc., indicate the orientation or positional relationship based on the orientation or positional relationship in the working state of this invention, and are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention. Furthermore, the terms "first," "second," "third," and "fourth" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.
[0072] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.
[0073] The present invention has been described above with reference to preferred embodiments; however, these embodiments are merely exemplary and illustrative. Various substitutions and modifications can be made to the present invention based on these embodiments, all of which fall within the scope of protection of the present invention.
Claims
1. A method for analyzing charged particle data, using a charged particle spectrometer, characterized in that, The charged particle spectrometer includes a radiation-sensitive component (1) and a detection component. The radiation-sensitive component includes a multilayer scintillation fiber array (11), each layer of the scintillation fiber array (11) including multiple scintillation fibers (101). The adjacent scintillation fiber arrays (11) are arranged orthogonally to each other, so that the scintillation fiber (101) is set in the X direction and the Y direction respectively; The detection component is used to convert the visible light after the scintillation fiber (101) is excited into an electrical signal or an image signal; The charged particle data analysis method uses a charged particle beam to irradiate a radiation-sensitive component to obtain images in the X and Y directions; Based on the imaging in the X and Y directions, the spectra are deciphered separately to obtain the two-dimensional charged particle beam energy spectrum in the X and Y directions. The two-dimensional charged particle beam energy spectra in the X and Y directions are then combined to obtain the three-dimensional charged particle energy spectrum. The spectrum interpretation includes the following steps: S1. Establish a response matrix, which is used to describe the degree of influence of charged particle beams of different energies on scintillation fibers at different locations; S2. Perform irradiation simulation to obtain the scintillation fiber luminescence at different depths in charged particle beam imaging; S3. Obtain the angle weight matrix, which is used to describe the location of the scintillation fiber that can be covered by rays at different angles; S4. Obtain the scattering angle based on the angle weight matrix. By imaging, the cutoff energy of the light-emitting fiber at the very end of the intersecting beams of charged particles is obtained. S5. Using the mean square error between the number of luminous particles emitted by each layer of scintillation fiber in the response matrix and the number of luminous particles emitted by each layer of scintillation fiber in the actual imaging as the loss function, a nonlinear regression method is employed to obtain the scattering angle of the charged particle beam in the actual imaging. Energy; S6. Repeat S3~S5 to obtain the energy corresponding to all scattering angles, thereby obtaining the energy of the entire charged particle beam.
2. The charged particle data analysis method according to claim 1, characterized in that, In S1, the response matrix is obtained by irradiating the radiation-sensitive component through a narrow slit with a charged particle source.
3. The charged particle data analysis method according to claim 1, characterized in that, In S5, in nonlinear regression, Boltzmann distribution iteration is used first to obtain the function zeros. When Boltzmann distribution iteration fails to converge, exponential distribution iteration is used. When exponential distribution iteration fails to converge, double exponential distribution iteration is used. When double exponential distribution iteration fails to converge, nearest neighbor interpolation is used to obtain the function zeros, thereby obtaining the charged particle beam energy.
4. The charged particle data analysis method according to claim 1, characterized in that, In each layer of scintillation fiber array (11), multiple scintillation fibers (101) are arranged in a row, adjacent scintillation fibers (101) are parallel to each other, and the distance between adjacent scintillation fibers (101) is the same.
5. The charged particle data analysis method according to claim 1, characterized in that, The detection component has two parts, which are used to detect the X-direction scintillation fiber and the Y-direction scintillation fiber, respectively.
6. The charged particle data analysis method according to claim 1, characterized in that, It also includes a mounting bracket (3) having a cavity (31) for housing radiation-sensitive components. A charged particle beam injection window is provided in the Z direction of the cavity (31). Photonic channels are provided in the X and Y directions of the cavity (31) for optical fibers to pass through in order to connect the detection components.
7. The charged particle data analysis method according to claim 1, characterized in that, A detection mounting bracket is provided on the mounting bracket (3) for fixing the detection component. The distance between the detection mounting bracket and the cavity (31) is adjustable to adjust the field of view of the imaging unit.