A cleaning device and a cleaning method for a device

Abstract

The present invention discloses a cleaning device and a cleaning method for a device; the cleaning device comprises: a frame, a liquid storage tank arranged on the frame, a heater, a sprayer, a separation tank and a cleaning mechanism, the heater is connected to the liquid storage tank, the sprayer is connected to the heater, a placement tray for placing materials is provided in the cleaning mechanism, the sprayer extends into the cleaning mechanism, the separation tank is connected to the cleaning mechanism, the liquid storage tank is used to load a detergent, the detergent is heated by the heater and then cleans the material along the sprayer, and the separation tank is used to separate dirt from the detergent after cleaning. The present invention extends the sprayer into the cleaning mechanism, the separation tank is connected to the cleaning mechanism, the liquid storage tank is used to load a detergent, the detergent is heated by the heater and then cleans the material along the sprayer, and the separation tank is used to separate dirt from the detergent after cleaning, that is, jet cleaning is adopted, which can well solve the problem of cleaning micro-cracks of materials, and is environmentally friendly and efficient.

Description

[0001] This application claims the Chinese priority of patent application number 202311395983.9. Technical Field

[0002] The present invention relates to the technical field of device cleaning, and in particular to a cleaning device and a device cleaning method. Background Art

[0003] With the rapid development of integrated circuits, there are more and more high-density forms and the emergence of miniaturization, which brings great challenges to the cleaning and drying of micro-slits or lower spacing. Mainstream detergents and pure water have a greater surface tension than micro-slits, resulting in poor cleaning. In addition, water will be hydroxylated during the drying process, affecting the reliability of the product. Summary of the invention

[0004] The purpose of the present invention is to overcome the deficiencies of the prior art and provide a cleaning device and a cleaning method for a device.

[0005] In order to solve the above technical problems, the present invention adopts the following technical solutions:

[0006] In the first aspect, an embodiment of the present invention provides a cleaning device, comprising: a frame, a liquid storage tank arranged on the frame, a heater, a sprayer, a separation tank and a cleaning mechanism, the heater is connected to the liquid storage tank, the sprayer is connected to the heater, a placement tray for placing materials is provided in the cleaning mechanism, the sprayer extends into the cleaning mechanism, the separation tank is connected to the cleaning mechanism, the liquid storage tank is used to load a detergent, the detergent is heated by the heater and then cleans the material along the sprayer, and the separation tank is used to separate dirt from the detergent after cleaning.

[0007] In a specific embodiment, a booster pump is connected between the liquid storage tank and the heater, and a solvent box for containing a co-solvent is provided on the frame. The cleaning agent flowing out of the liquid storage tank is mixed with the co-solvent in a pipeline and then flows into the booster pump.

[0008] In a specific embodiment, the cleaning mechanism includes a cleaning tank, the placement tray is arranged inside the cleaning tank, the sprayer extends into the cleaning tank, and an ultrasonic generator is also arranged in the cleaning tank, and the ultrasonic generator is located above the sprayer.

[0009] In a specific embodiment, the cleaning mechanism includes a base plate, a cover body, a shell, a driving assembly and a lifting assembly. A cleaning seat is provided inside the shell, the storage tray is provided inside the cleaning seat, the driving assembly and the lifting assembly are installed on the base plate, the cover body is transmission-connected to the lifting assembly, the shell is rotationally connected to the driving assembly, the cover body cooperates with the shell to form a cleaning chamber, the sprayer extends into the cover body, the cleaning seat is provided with a fluid guide groove corresponding to the sprayer, and the fluid guide groove is provided with a liquid outlet hole connected to the separation tank.

[0010] In a specific embodiment, the number of the sprayers and the fluid guide grooves is even and evenly distributed, the sprayer is an oblique spray, and the cleaning agent sprayed from the sprayer flows toward the opposite fluid guide groove.

[0011] In a specific embodiment, when the material is placed on the placement tray, the distance between the upper surface of the material and the top wall of the cover body is less than 3 mm.

[0012] In a specific embodiment, the cleaning mechanism further includes a rotary motor, and the rotary motor is transmission-connected to the storage tray.

[0013] In a specific embodiment, a condenser is further provided on the frame, and the condenser is connected to the separation tank and the liquid storage tank. The gas generated by the dirt separation in the separation tank flows into the liquid storage tank after being condensed by the condenser.

[0014] In a specific embodiment, the separation tank is also connected to the solvent box, and the auxiliary solvent generated by the dirt separation in the separation tank flows into the solvent box.

[0015] The cleaning equipment of the present invention has the following beneficial effects compared with the prior art: the heater is connected to the liquid storage tank, the sprayer is connected to the heater, a placement tray for placing materials is provided in the cleaning mechanism, the sprayer extends into the cleaning mechanism, the separation tank is connected to the cleaning mechanism, the liquid storage tank is used to load the detergent, the detergent is heated by the heater and then cleans the material along the sprayer, and the separation tank is used to separate dirt from the detergent after cleaning, that is, jet cleaning is adopted, which can well solve the problem of cleaning micro-cracks of materials, and is environmentally friendly and efficient.

[0016] In a second aspect, an embodiment of the present invention provides a device cleaning method, using the above-mentioned cleaning device, comprising the following steps:

[0017] Add detergent to the reservoir;

[0018] Start the heater, sprayer, separation tank and cleaning mechanism to clean the device;

[0019] Separate the cleaned detergent from the dirt.

[0020] The device cleaning method of the present invention has the following beneficial effects compared with the prior art: by adding a cleaning agent into a liquid storage tank, then starting a heater, a sprayer, a separation tank and a cleaning mechanism to clean the device, and then separating dirt from the cleaning agent after cleaning, that is, using jet cleaning, the problem of cleaning micro-cracks of the device can be well solved, which is environmentally friendly and efficient.

[0021] The present invention is further described below in conjunction with the accompanying drawings and specific embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0023] Figure 1 A three-dimensional schematic diagram of a first embodiment of a cleaning device provided by the present invention;

[0024] Figure 2 A schematic diagram of a block application of a cleaning device according to a first embodiment of the present invention;

[0025] Figure 3 A schematic diagram of the structure of a cleaning mechanism in a first embodiment of a cleaning device provided by the present invention;

[0026] Figure 4 A schematic diagram of the structure of the cleaning mechanism in the second embodiment of the cleaning device provided by the present invention;

[0027] Figure 5 The present invention provides Figure 4 A cross-sectional schematic diagram of

[0028] Figure 6 The present invention provides Figure 4 Internal schematic diagram of

[0029] Figure 7 A schematic diagram of the structure of the liquid storage tank provided by the present invention;

[0030] Figure 8 A schematic diagram of the structure of the separation tank provided by the present invention;

[0031] Fig. 9 A schematic diagram of the structure of a condenser provided by the present invention;

[0032] Fig.10 A schematic diagram of the structure of the solvent box provided by the present invention;

[0033] Fig.11A schematic flow chart of a device cleaning method provided by the present invention. DETAILED DESCRIPTION

[0034] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0035] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present invention.

[0036] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0037] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0038] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be connected, detachably connected, or integrated; it can be mechanically connected or electrically connected; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0039] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0040] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms should not be understood as necessarily referring to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification.

[0041] See also Figures 1 to 10 As shown, the present invention discloses a specific embodiment of a cleaning device, comprising: a frame 10, a liquid storage tank 20 arranged on the frame 10, a heater 30, a sprayer 40, a separation tank 50 and a cleaning mechanism 60, the heater 30 is connected to the liquid storage tank 20, the sprayer 40 is connected to the heater 30, a placement tray 70 for placing materials is provided in the cleaning mechanism 60, the sprayer 40 extends into the cleaning mechanism 60, the separation tank 50 is connected to the cleaning mechanism 60, the liquid storage tank 20 is used to load a detergent, the detergent is heated by the heater 30, and then cleans the material along the sprayer 40, and the separation tank 50 is used to separate dirt from the cleaned detergent.

[0042] Specifically, the heater 30 is connected to the liquid storage tank 20 through a pipeline, the sprayer 40 is connected to the heater 30 through a pipeline, the sprayer 40 is composed of a plurality of nozzles and pipelines, the nozzles are located inside the cleaning mechanism 60, the storage tray 70 is located below the sprayer 40, and a valve is also provided between the sprayer 40 and the heater 30 to play a switch role, the separation tank 50 is connected to the cleaning mechanism 60 through a pipeline, the liquid storage tank 20 is filled with a detergent, and after the detergent is heated by the heater 30, the sprayer 40 sprays the material along the pipeline, and the separation tank 50 separates the dirt from the detergent after cleaning, that is, the jet cleaning is adopted, which can well solve the problem of cleaning the micro-cracks of the material, and is environmentally friendly and efficient. Preferably, the material is a device; the storage tray 70 is a turntable.

[0043] In one embodiment, a booster pump 80 is further connected between the liquid storage tank 20 and the heater 30 .

[0044] Specifically, one end of the booster pump 80 is connected to the liquid storage tank 20 through a pipeline, and the other end is connected to the heater 30 through a pipeline. The booster pump 80 has the effect of pressurizing the detergent so that the detergent reaches a supercritical fluid state. The supercritical fluid has the characteristics of low viscosity, small surface tension, and high solubility. It then acts on the surface of the device through a nozzle, which has a better effect on cleaning the micro-cracks of the device.

[0045] Specifically, the state in which the pressure and temperature of a substance simultaneously exceed its critical pressure (Pc) and critical temperature (Tc), or in other words, the state in which the relative pressure (P / Pc) and relative temperature (T / Tc) of a substance are both greater than 1 is called the supercritical state of the substance. The supercritical state is a special fluid that has great compressibility near the critical point. By increasing the pressure appropriately, its density can be close to that of a general liquid, so it has a good ability to dissolve other substances. For example, n-alkanes can be dissolved in supercritical water. On the other hand, the viscosity of the supercritical state is only 1 / 12 to 1 / 4 of that of a general liquid, but its diffusion coefficient is 7 to 24 times greater than that of a general liquid, close to that of a gas.

[0046] Preferably, the air pressure of the booster pump 80 is 10 MPa.

[0047] In one embodiment, an ultrasonic jet valve is also connected between the booster pump 80 and the heater 30. The ultrasonic jet valve generates high-frequency vibrations in the cleaning agent through the action of ultrasonic waves, turning the liquid into tiny mist particles. Such mist particles have a larger surface area and higher activity, can better cover and penetrate the surface of the device, and improve the contact efficiency between the cleaning agent and the device; in addition, the ultrasonic jet valve can also improve the uniformity of the distribution of the cleaning agent, avoid unevenness of the cleaning agent during the spraying process, and ensure that the cleaning agent can be evenly sprayed on the entire device surface.

[0048] In one embodiment, a solvent tank 90 for containing a solvent aid is further disposed on the frame 10 , and the cleaning agent and the solvent aid flowing out of the liquid storage tank 90 are mixed in a pipeline and then flow into the booster pump 80 .

[0049] Specifically, the cleaning agent and the co-solvent are mixed in the pipeline and flow into the booster pump 80, and then are pressurized and heated, and finally act on the surface of the device through a nozzle to achieve cleaning. The co-solvent helps to dissolve impurities or oil stains on the device to improve the cleaning effect. In addition, by mixing the co-solvent with the cleaning agent, a more dissolving mixed solvent can be formed. Such a mixed solvent can better dissolve and remove dirt or grease on the surface of the device and improve the cleaning effect.

[0050] Preferably, the co-solvent is composed of alcohol, isopropanol or an organic solvent, which can improve the solubility and removal ability of the cleaning agent, thereby helping to remove difficult-to-dissolve dirt or grease during the cleaning process; taking alcohol as an example, it is a volatile organic solvent with good solubility and permeability. After adding alcohol, it can promote the diffusion and penetration of cleaning agent molecules, dissolve difficult-to-clean dirt or grease, and achieve better cleaning effect; and isopropanol is a weakly polar organic solvent, which can increase the interaction force of the cleaning agent by generating hydrogen bonds with the device surface, thereby improving the cleaning effect.

[0051] See also Figures 1 to 3 In the first embodiment shown, the cleaning mechanism 60 includes a cleaning tank 61, the placement tray 70 is arranged inside the cleaning tank 61, the sprayer 40 extends into the cleaning tank 61, and an ultrasonic generator 100 is also provided in the cleaning tank 61, and the ultrasonic generator 100 is located above the sprayer 40.

[0052] Specifically, the ultrasonic generator 100 is fixed to the upper end of the cleaning tank 61 and is located above the sprayer 40. The ultrasonic wave generated by the ultrasonic generator 100 and the cleaning agent sprayed by the sprayer 40 form an ultrasonic jet to clean the device, that is, the ultrasonic generator 100 can generate a high-frequency ultrasonic signal, and the ultrasonic signal can form tiny bubbles, thereby forming a destructive pressure wave in the cleaning agent, further strengthening the force between the cleaning agent and the device surface, thereby better removing the dirt or grease that is difficult to clean, and achieving a better cleaning effect. In other embodiments, the ultrasonic generator 100 can also be a megasonic generator.

[0053] In one embodiment, a material inlet and outlet 611 is provided on one side of the cleaning tank 61 to facilitate placing or removing the device from the cleaning tank 61. A gate is also provided at the position of the material inlet and outlet 611 of the cleaning tank 61 to close the material inlet and outlet 611 to form a closed cleaning environment.

[0054] See also Figures 4 to 6 The second embodiment shown in the figure is different from the first embodiment only in that the cleaning mechanism 60 is different. The cleaning mechanism 60 includes a bottom plate 62, a cover 63, a shell 64, a driving assembly 65 and a lifting assembly 66. A cleaning seat 67 is provided inside the shell 64, and the storage tray 70 is provided inside the cleaning seat 67. The driving assembly 65 and the lifting assembly 66 are installed on the bottom plate 62. The cover 63 is connected to the lifting assembly 66 in a transmission manner. The shell 64 is rotatably connected to the driving assembly 65. The cover 63 cooperates with the shell 64 to form a cleaning chamber. The sprayer 40 extends into the cover 63. The cleaning seat 67 is provided with a fluid guide groove 671 corresponding to the sprayer 40. The fluid guide groove 671 is provided with a liquid outlet hole (not shown in the figure) connected to the separation tank 50.

[0055] Specifically, the storage tray 70 is in the shape of a round boss, and the cover body 63 and the shell 64 are combined to form a complete cleaning chamber, which can effectively control and manage the liquid level and flow during the cleaning process to avoid overflow and waste. In addition, the sprayer 40 extends into the cover body 63, and the device is placed on the storage tray 70, so that the device can be conveniently sprayed and cleaned in the cleaning chamber for cleaning operations. In addition, a fluid guide groove 671 corresponding to the sprayer 40 is provided on the inner side of the cleaning seat 67, which can guide and control the fluid to prevent leakage and waste of the detergent. At the same time, the liquid outlet of the fluid guide groove 671 can be connected to the separation tank 50, which is convenient for the timely discharge and treatment of the detergent, thereby keeping the cleaning chamber clean and hygienic.

[0056] In one embodiment, the number of the sprayers 40 and the fluid guide grooves 671 is even and evenly distributed, the sprayers 40 are oblique sprays, and the cleaning agent sprayed from the sprayers 40 flows toward the opposite fluid guide grooves 671 .

[0057] Specifically, by evenly distributing the number of the sprayers 40 and the fluid guide grooves 671, it can be ensured that the cleaning agent fully covers the surface of the device to be cleaned. Each combination of the sprayer 40 and the fluid guide groove 671 can provide a certain amount of cleaning agent spray and guiding effect, thereby increasing the contact area between the cleaning agent and the device surface and improving the cleaning effect. In addition, the sprayer 40 adopts an oblique spray design, which allows the cleaning agent to spray onto the device surface at a certain angle. This oblique spray can help the cleaning agent better penetrate dirt or grease and perform a more comprehensive cleaning of the device surface, especially for uneven or difficult-to-reach areas. In addition, when the cleaning agent sprayed from the sprayer 40 is guided into the fluid guide groove 671, the cleaning agent will flow toward the opposite fluid guide groove 671. This design can increase the flow path of the cleaning agent in the cleaning chamber, ensuring that the cleaning agent can evenly cover the entire cleaning chamber and the surface of the device, thereby improving the cleaning effect.

[0058] Preferably, the cover 63 and the cleaning seat 67 are both circular in shape, and the number of the sprayers 40 and the fluid guide grooves 671 is 4, which can provide uniform spray and guiding effects. The circular structure can ensure that the sprayers 40 and the fluid guide grooves 671 are evenly distributed around, and the cleaning agent can fully cover the surface of the device to be cleaned. In addition, the four sprayers 40 and the four fluid guide grooves 671 can increase the spray and guiding effects of the cleaning agent. Each combination of the sprayer 40 and the fluid guide groove 671 can provide a certain spray and guiding effect of the cleaning agent, thereby increasing the contact area between the cleaning agent and the device surface and improving the cleaning effect. In addition, since the sprayers 40 and the fluid guide grooves 671 are evenly distributed on the circular structure, the cleaning agent can be evenly sprayed to the surface of the device, and through the guidance of the fluid guide grooves 671, the cleaning agent flows along a predetermined path, which can ensure that the cleaning agent fully covers the entire cleaning chamber and the surface of the device, thereby improving the cleaning effect.

[0059] In one embodiment, when the material is placed on the placing tray 70 , the distance between the upper surface of the material and the top wall of the cover 63 is less than 3 mm.

[0060] Specifically, when the distance between the upper surface of the device and the top wall of the cover 63 is less than 3 mm, the cleaning agent sprayed out by the sprayer 40 is squeezed so that most of the fluid passes through the micro-slit of the device itself, rather than through the gap between the cover 63 and the device, thereby improving the cleaning effect. In addition, since the distance between the upper surface of the device and the top wall of the cover 63 is less than 3 mm, the cleaning agent can more easily cover the surface of the device, especially for the concave or uneven parts of the device surface, it can be cleaned more evenly, thereby improving the cleaning effect. In addition, when the distance between the upper surface of the device and the top wall of the cover 63 is less than 3 mm, the overflow and waste of the cleaning agent caused by the inconsistent height of the device can be reduced, which can save the use of the cleaning agent and reduce the impact on the environment. In addition, when the distance between the upper surface of the device and the top wall of the cover 63 is less than 3 mm, it can be ensured that the cleaning agent fully flows in the cleaning chamber, and the cleaning agent can flow smoothly to every corner, thereby more thoroughly cleaning the device surface.

[0061] In one embodiment, the driving assembly 65 includes a driving motor 651 and a transmission gear 652. The shell 64 is connected to a rack 641 corresponding to the transmission gear 652. The transmission gear 652 and the rack 641 are meshed and transmitted to rotate the shell 64. The outer periphery of the cover body 63 is provided with a locking block 631, and the inner periphery of the shell 64 is provided with a locking cavity corresponding to the locking block 631 (not shown in the figure). The locking block 631 and the locking cavity cooperate to form a locking structure, which is similar to the structure of a pressure cooker.

[0062] Specifically, through the design of the locking structure, it can be ensured that when cleaning the device, the fit between the cover 63 and the shell 64 is more secure, reducing the risk of accidental opening, thereby improving operational safety. In addition, due to the design of the locking structure, it can be ensured that the sealing between the cover 63 and the shell 64 is better, preventing the detergent from leaking or foreign impurities from entering, thereby improving the cleaning efficiency. When it is necessary to take out the material, it is only necessary to drive the motor 651 to drive the transmission gear 652 to rotate, and the transmission gear 652 then drives the rack 641 to rotate, so that the shell 64 and the cover 63 are unlocked, that is, the locking block 631 is disengaged from the locking cavity, and then the lifting assembly 66 drives the cover 63 to rise, so that the cover 63 and the shell 64 can be easily separated, and then the device can be taken out. In addition, the locking structure can reduce the wear between the cover 63 and the shell 64, thereby extending the service life of the cleaning mechanism 60.

[0063] In this embodiment, the storage tray 70 and the cleaning seat 67 are an integrally formed structure or a separate structure, which can be set according to actual needs and is not specifically set here.

[0064] In one embodiment, the bottom of the housing 64 is also provided with a plurality of supporting feet (not shown in the figure), and the supporting feet are slidably connected to the bottom plate 62. By sliding the supporting feet to the bottom plate 62, a stable support can be provided for the housing 64, so that the device will not shake or tilt during the cleaning process, thereby improving the cleaning stability and safety. In addition, by providing the supporting feet, the weight of the housing 64 can be evenly distributed to the plurality of supporting feet, so that the pressure on a single supporting foot can be reduced, the deformation and wear of the bottom plate 62 can be reduced, and the service life of the cleaning mechanism 60 can be extended.

[0065] In one embodiment, there are two groups of lifting assemblies 66, which are respectively located on both sides of the cover body 63. The lifting assemblies 66 include a fixed seat 661, a lifting cylinder 662 and a connecting plate 663; the fixed seat 661 is installed on the base plate 62, the lifting cylinder 662 is installed on the fixed seat 661, one end of the connecting plate 663 is connected to the telescopic end of the lifting cylinder 662, and the other end is connected to the cover body 63. When the lifting cylinder 662 is working, it drives the cover body 63 to rise and fall, so that the cover body 63 and the shell 64 are closed or separated.

[0066] Specifically, since different devices require different cleaning heights, the lifting assembly 66 can help adjust the cleaning height of the cleaning chamber, that is, by controlling the operation of the lifting cylinder 662, the height of the cover 63 can be adjusted to accommodate devices of different heights. In addition, the number of lifting assemblies 66 is 2 groups, and they are located on both sides of the cover 63, which can ensure the balance and stability of the cover 63 during the lifting process, avoid tilting or shaking, etc., thereby improving the cleaning efficiency and stability.

[0067] In one embodiment, the cleaning mechanism 60 further includes a rotary motor 68 , and the rotary motor 68 is transmission-connected to the storage tray 70 .

[0068] Specifically, the rotating motor 68 is located below the cleaning tank 61 or the bottom plate 62, and the rotating motor 68 extends into the cleaning tank 61 or the housing 64 through a rotating shaft and is connected to the storage tray 70, so that the rotating motor 68 drives the storage tray 70 to rotate, so as to achieve 360-degree cleaning of the device without dead angles. In addition, while the device is being cleaned, the storage tray 70 carries the device and rotates 360 degrees to achieve dehydration and drying. In addition, different storage trays 70 can be replaced for different product types to adapt to different application scenarios.

[0069] In the second embodiment, since the rotary motor 68 drives the placement tray 70 to rotate, that is, only one sprayer 40 is turned on, the purpose of cleaning the device can also be achieved.

[0070] Preferably, the storage tray 70 is provided with a mounting groove for placing components to form a fixed structure so that the components will not fall off when the storage tray 70 rotates.

[0071] In one embodiment, a condenser 110 is further provided on the frame 10 , and the condenser 110 is connected to the separation tank 50 and the liquid storage tank 20 . The gas generated by the separation of dirt in the separation tank 50 flows into the liquid storage tank 20 after being condensed by the condenser 110 .

[0072] Specifically, the cleaning agent is liquid carbon dioxide. A pressure reducing valve is also provided between the separation tank 50 and the cleaning tank 61. The cleaning agent after cleaning is decompressed by the pressure reducing valve and flows into the separation tank 50. The separation tank 50 separates the dirt from the cleaning agent to produce carbon dioxide gas, a solvent and dirt. The carbon dioxide gas enters the condenser 110 through a pipeline. The condenser 110 condenses the carbon dioxide gas to obtain carbon dioxide liquid, and then the carbon dioxide liquid flows back to the liquid storage tank 20 through a pipeline to form a cycle. In addition, the dirt is discharged to a designated area through a pipeline for collection.

[0073] Specifically, the separation tank 50 can be understood as a pressure reducing tank, and the cleaning tank 61 is in a supercritical state (pressure greater than 80 kg, temperature greater than 32°C). By reducing the pressure in the separation tank 50, the use pressure is reduced, the supercritical state becomes a gaseous state, and the dirt and co-solvent are separated from the supercritical carbon dioxide.

[0074] In one embodiment, the separation tank 50 is also connected to the solvent box 90 , and the auxiliary solvent generated by the dirt separation in the separation tank 50 flows into the solvent box 90 .

[0075] Specifically, the auxiliary solvent generated by the separation tank 50 after the cleaning agent is separated from the dirt flows back to the solvent tank 90 through the pipeline to be circulated.

[0076] Specifically, the structures and working modes of the heater 30, the separation tank 50 and the condenser 110 adopt the existing public technology and will not be elaborated in detail here.

[0077] See also Fig.11 As shown, an embodiment of the present invention provides a device cleaning method, using the above-mentioned cleaning device, comprising the following steps:

[0078] S1, adding detergent to the liquid storage tank;

[0079] Specifically, before step S1, the process also includes: placing the device into a cleaning mechanism and fixing it, and then closing the gate to form a closed cleaning environment.

[0080] S2, start the heater, sprayer, separation tank and cleaning mechanism to clean the device;

[0081] Specifically, the heater, sprayer, ultrasonic generator, separation tank and cleaning mechanism are turned on, and then cleaning begins. The pressurized carbon dioxide / water reaches a supercritical state and then acts on the device surface through a nozzle. After cleaning, the fluid enters the separation tank through a pressure reducing valve and a pipeline.

[0082] S3, separating dirt from the cleaned detergent.

[0083] Specifically, the separation tank separates the fluid and dirt, and the carbon dioxide gas enters the condenser for recovery and returns to the liquid storage tank, and the co-solvent flows back to the solvent tank through the pipeline to form a cycle. During the cycle, the valve of the solvent tank is opened to mix the co-solvent into the circulating fluid to achieve a stronger cleaning effect. After the cleaning is completed, the heater, sprayer, ultrasonic generator and cleaning mechanism are turned off, the device is taken out, and then a new device is put in, and the above cleaning process is repeated.

[0084] Preferably, the device is a circuit board or a wafer.

[0085] The device cleaning method of the present invention adds a cleaning agent into a liquid storage tank, then starts a heater, a sprayer, a separation tank and a cleaning mechanism to clean the device, and then separates dirt from the cleaning agent after cleaning. This method can well solve the problem of cleaning and drying micro-cracks of the device, is environmentally friendly and efficient, and can remove particles down to the nanometer level.

[0086] The above embodiments are preferred implementation schemes of the present invention. In addition, the present invention may also be implemented in other ways. Any obvious replacement without departing from the concept of the present technical solution is within the protection scope of the present invention.

Claims

1. A cleaning device, characterized in that: include: A frame, a liquid storage tank, a heater, a sprayer, a separation tank and a cleaning mechanism arranged on the frame, the heater is connected to the liquid storage tank, the sprayer is connected to the heater, a placement tray for placing materials is provided in the cleaning mechanism, the sprayer extends into the cleaning mechanism, the separation tank is connected to the cleaning mechanism, the liquid storage tank is used to load detergent, the detergent is heated by the heater and then cleans the materials along the sprayer, and the separation tank is used to separate dirt from the detergent after cleaning; the cleaning mechanism includes a bottom plate, a cover body, a shell, a driving assembly and a lifting assembly, a cleaning seat is provided inside the shell, the placement tray is provided inside the cleaning seat, The driving assembly and the lifting assembly are installed on the bottom plate, the cover body is transmission-connected to the lifting assembly, the shell is rotationally connected to the driving assembly, the cover body cooperates with the shell to form a cleaning chamber, the sprayer extends into the cover body, the cleaning seat is provided with a fluid guide groove corresponding to the sprayer, and the fluid guide groove is provided with a liquid outlet connected to the separation tank; the number of the sprayers and the fluid guide grooves is even and evenly distributed, the sprayer is an oblique spray, and the detergent sprayed from the sprayer flows to the opposite fluid guide groove; when the material is placed on the placement tray, the distance between the upper surface of the material and the top wall of the cover body is less than 3mm; Among them, when the distance between the upper surface of the device and the top wall of the cover body is less than 3mm, the cleaning agent sprayed from the sprayer is squeezed so that most of the fluid passes through the micro-slits of the device itself rather than through the gap between the cover body and the device; in addition, since the distance between the upper surface of the device and the top wall of the cover body is less than 3mm, the cleaning agent can cover the surface of the device, and the concave or uneven parts of the device surface can be cleaned evenly to improve the cleaning effect.

2. The cleaning device according to claim 1, characterized in that: A booster pump is also connected between the liquid storage tank and the heater, and a solvent box for containing a co-solvent is also provided on the frame. The cleaning agent flowing out of the liquid storage tank is mixed with the co-solvent in a pipeline and then flows into the booster pump.

3. The cleaning device according to claim 1, characterized in that: The cleaning mechanism further comprises a rotating motor, which is transmission-connected to the storage tray.

4. A cleaning device according to claim 1, characterized in that: The frame is also provided with a condenser, which is connected to the separation tank and the liquid storage tank. The gas generated by the dirt separation in the separation tank flows into the liquid storage tank after being condensed by the condenser.

5. The cleaning device according to claim 2, characterized in that: The separation tank is also connected to the solvent box, and the auxiliary solvent generated by the dirt separation of the separation tank flows into the solvent box.

6. A device cleaning method, characterized in that: The cleaning device according to any one of claims 1 to 5 comprises the following steps: Add detergent to the reservoir; Start the heater, sprayer, separation tank and cleaning mechanism to clean the device; Separate the cleaned detergent from the dirt.

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