Method of processing a flexible pressure sensor interlocking sensitive layer and flexible pressure sensor

Abstract

The application provides a method for processing a flexible pressure sensor interlocking sensitive layer, comprising the following steps: (1) dispersing high-conductivity carbon-based nanomaterials in PDMS at different proportions to prepare conductive composite materials with different mechanical and electrical properties; (2) using three-dimensional modeling to simulate the sensitive layer of a flexible pressure sensor in the form of a snap fastener, wherein the sensitive layer of the flexible pressure sensor in the form of a snap fastener comprises a male layer and a female layer, and the opposite sides of the male layer and the female layer respectively comprise a convex array and a concave array; (3) using variable incidence angle laser processing to process the conductive composite material to obtain the sensitive layer of the flexible pressure sensor in the form of a snap fastener modeled in step 2; (4) respectively preparing an electrode layer on the back of the male layer and the female layer of the sensitive layer of the flexible pressure sensor in the form of a snap fastener, and performing alignment and pre-pressing assembly on the convex array of the male layer and the concave array of the female layer to form mechanical interlocking. The application also provides a flexible pressure sensor prepared by the above method.

Description

Technical Field

[0001] This invention belongs to the technical fields of flexible electronics and laser micro-nano fabrication, and particularly relates to a method for fabricating an interlocking sensitive layer for a flexible pressure sensor. Background Technology

[0002] With the convergence and rapid development of technologies such as the Internet of Things, artificial intelligence, and big data, flexible electronic devices have demonstrated significant advantages in wearable devices, human-computer interaction, health monitoring, and motion capture due to their unique strengths. Flexible electronic devices are also gradually becoming more integrated, intelligent, and miniaturized, possessing characteristics such as flexibility, portability, and wearability, making them suitable for application in various complex environments to acquire and convert environmental information. Currently, the demand for flexible electronic devices that can accommodate curved surfaces or even deformable surfaces is increasing, such as flexible heat pipes, smart bracelets, flexible sensors, and flexible pulse oximeters.

[0003] Flexible pressure sensors convert external forces into easily acquireable signals, typically including resistive, capacitive, piezoelectric, and optical types. Compared to other sensor types, capacitive flexible pressure sensors offer significant advantages such as high sensitivity, low power consumption, and fast response. They are widely used in surgical instruments, health monitoring, human-machine interfaces, and wearable devices. These applications typically cover pressure ranges from micro-pressure to low-pressure to high-pressure. Crucially, sensor stability is essential for commercialization; therefore, there is a pressing need to develop flexible capacitive pressure sensors with high stability and high sensitivity across diverse pressure ranges.

[0004] To address the aforementioned issues, some inventions have improved the stability of flexible capacitive pressure sensors through sealing, conductive tape bonding, and other methods. However, the effectiveness and long-term stability of these methods are difficult to guarantee. Other inventions have enhanced the sensitivity of flexible capacitive pressure sensors by fabricating arrays of microneedles, micropillars, and micropyramids using traditional laser processing, molding, or photolithography. However, these methods are typically limited by their processing characteristics, making it impossible to quickly and directly fabricate negative taper structures, and the processing technology is complex. Accordingly, there is a technical need in this field to develop a flexible capacitive pressure sensor with high stability and a fast and simple manufacturing method, along with its fabrication method. Summary of the Invention

[0005] To address the aforementioned problems or improvement needs of existing technologies, this invention provides a method for processing an interlocking sensitive layer for a flexible pressure sensor. First, carbon-based nanomaterials are uniformly dispersed in PDMS using a latex film-forming method to regulate the mechanical and electrical properties of the composite material. Simultaneously, a snap-button-like mechanical interlocking microstructure is designed, cleverly combining the design's snap-button-like mechanical interlocking microstructure with the characteristics of free processing using laser positive and negative tapers at varying incident angles. This avoids the complex micro / nano manufacturing process of flexible sensors, thereby achieving rapid manufacturing of a highly stable flexible capacitive sensor.

[0006] To achieve the above objectives, the present invention provides a method for processing an interlocking sensitive layer of a flexible pressure sensor, comprising the following steps:

[0007] (1) Disperse highly conductive carbon nanomaterials in PDMS in different proportions to prepare conductive composite materials with different mechanical and electrical properties;

[0008] (2) The sensitive layer of the flexible pressure sensor that mimics a snap button is constructed using three-dimensional modeling. The sensitive layer of the flexible pressure sensor that mimics a snap button includes a male layer and a female layer. The opposite sides of the male layer and the female layer respectively include a protrusion array and a pit array.

[0009] (3) The conductive composite material is processed by laser with a variable incident angle to obtain the sensitive layer of the snap-button-like flexible pressure sensor modeled in step 2.

[0010] (4) An electrode layer is prepared on the back of the male layer and the female layer of the sensitive layer of the flexible pressure sensor that resembles a snap button, and the spherical protrusion array of the male layer and the pit array of the female layer are aligned and pre-pressed to form a mechanical interlock.

[0011] In a preferred embodiment: Step 1 employs a latex film-forming method, which includes three steps: uniform stirring and mixing, heating and stirring to volatilize, and heating and curing.

[0012] In a preferred embodiment: the mechanical and electrical properties refer to the dielectric constant, resistance, and Young's modulus of the conductive composite material.

[0013] In a preferred embodiment: a conductive composite material (1) with a fixed thickness and a large Young's modulus and a conductive composite material (2) with a high dielectric constant and a small Young's modulus are prepared according to the method of step (1).

[0014] In a preferred embodiment: the array of protrusions is a spherical protrusion, and the array of pits includes spheres and frustums.

[0015] In a preferred embodiment: the structure at the included angle of the protrusion array is a cylinder, and the structure at the included angle of the pit array is a circular hole corresponding to the cylinder.

[0016] In a preferred embodiment, the dimensions of the cylinder and the circular hole are much larger than the array size.

[0017] In a preferred embodiment: step (3) specifically includes the following steps:

[0018] (31) Place the conductive composite material on the variable incident angle laser processing platform, input the three-dimensional model designed in step (2), and process the protrusion array by controlling the positive incident angle of the laser and adjusting the laser processing parameters to obtain the common layer of the sensitive layer of the snap button-like flexible pressure sensor.

[0019] (32) Place another conductive composite material on the laser processing platform with variable incident angle, input the three-dimensional model designed in step (2), and process the pit array by adjusting the negative incident angle of the laser and adjusting the laser processing parameters to obtain the parent layer of the sensitive layer of the flexible pressure sensor that resembles a snap button.

[0020] In a preferred embodiment: step (4) specifically includes the following steps:

[0021] (41) Prepare a conductive composite material with low resistance according to the method of step (1);

[0022] (42) The conductive composite material is coated on the back of the male and female layers and then dried and cured.

[0023] (43) Using pre-pressure, the male layer with a larger Young's modulus and the female layer with a smaller Young's modulus are aligned and pre-pressed to form a mechanical interlock, thus forming a contact-stable sensitive layer.

[0024] The present invention also provides a flexible pressure sensor, which is manufactured using the method described above for processing the interlocking sensitive layer of a flexible pressure sensor.

[0025] Compared with the prior art, the technical solution of the present invention has the following beneficial effects:

[0026] (1) By using the latex film-forming method, high-conductivity carbon nanomaterials of different proportions are dispersed in PDMS. The nanomaterials in the prepared composite material can be uniformly dispersed to avoid clustering, thereby ensuring the stable electrical properties of the composite material.

[0027] (2) The sensitive layer of the snap-button-like flexible pressure sensor includes a male layer and a female layer. The male layer mainly includes a protrusion array, and the female layer mainly includes a pit array. The male layer and the female layer can be aligned and pre-pressed by pressing to form a mechanical interlock and a contact-stable sensitive layer to achieve high stability of the sensor.

[0028] (3) The composite material of the male layer has a large Young's modulus, and the composite material of the female layer has a high dielectric constant and a small Young's modulus. The two materials of the sensitive layer have different hardness, which facilitates alignment and pre-compression assembly and improves the compressibility of the flexible sensor, thereby improving the stability and range of the flexible sensor.

[0029] (4) The protrusions of the male layer array structure are spherical protrusions, and the pits of the female layer array structure include spheres and frustums. The spherical protrusions and spherical pits facilitate the alignment and pre-compression assembly of the male and female layers, while the frustum pits can change the air gap during compression, thereby further improving the sensitivity and range of the flexible pressure sensor.

[0030] (5) The structure at the included angle of the male layer array structure is a cylinder, and the structure at the included angle of the female layer array structure is a circular hole, thereby solving the problem that the male and female layers are not easy to align and pre-press for assembly.

[0031] (6) The variable incident angle laser processing is a new type of micro-nano processing method. By controlling the beam deflection and scanning, the laser processing focal deflection is realized, thereby achieving the purpose of free processing of positive and negative taper, which solves the problem that traditional material removal processing cannot achieve negative taper processing.

[0032] (7) The design of the mechanical interlocking snap-button double-layer sensitive structure includes positive and negative taper structure. Traditional material processing cannot directly achieve one-time molding processing. It is cleverly combined with the new micro-nano processing method of variable incident angle laser processing to achieve fast and high-quality processing. The rough microstructure of the protrusion and pit surface after laser processing effectively improves the sensitivity of the flexible pressure sensor, thus achieving the effect of killing two birds with one stone.

[0033] (8) This manufacturing method is highly flexible and can achieve rapid mass production, which has high commercial application value. In addition, the ethanol, PDMS and carbon nanomaterials used in the latex film forming method of this manufacturing method are all non-toxic and harmless materials, which greatly protects the safety of the environment, manufacturing personnel and users. Attached Figure Description

[0034] Figure 1 This is a schematic diagram of a method for processing an interlocking sensitive layer of a flexible pressure sensor according to the present invention;

[0035] Figure 2 This is a schematic diagram of the process for preparing composite materials using the latex film-forming method of the present invention;

[0036] Figure 3 This is a schematic diagram of the flexible pressure sensor that mimics the snap button of the present invention;

[0037] Figure 4 This is a 3D diagram and cross-sectional view of a snap-button array layer structure.

[0038] Figure 5 This is a 3D diagram and cross-sectional view of the snap-on array parent layer structure.

[0039] Figure 6 Schematic diagram of laser processing of positive and negative taper structures with variable incident angle;

[0040] Figure label:

[0041] 1-Conductive composite material with high Young's modulus; 2-Conductive composite material with high dielectric constant and low Young's modulus; 3-Main layer; 4-Main layer; 5-Variable incident angle five-axis laser processing platform; 6-Conductive composite material / electrode with low resistance.

[0042] 31-Spherical protrusion, 32-Cylinder.

[0043] 41-Dent, 42-Round hole.

[0044] 411-Ball, 412-Frustum. Detailed Implementation

[0045] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0046] In the description of this invention, it should be noted that the terms "upper," "lower," "inner," "outer," "top / bottom," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0047] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installed", "equipped", "sleeved / connected", "connected", etc., should be interpreted broadly. For example, "connection" can be a wall-mounted connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. For those skilled in the art, the specific meaning of the above terms in this invention can be understood according to the specific circumstances.

[0048] refer to Figures 1-5 This embodiment provides a method for processing an interlocking sensitive layer of a flexible pressure sensor using laser processing at a variable incident angle. The manufacturing method mainly includes the preparation of conductive composite materials, design of a mechanically interlocking snap-button-like sensitive layer, laser processing of the mechanically interlocking snap-button-like microstructure using laser processing at a variable incident angle, assembly of the highly stable flexible pressure sensor sensitive layer, and manufacture of the electrode layer. Specifically, the preparation method mainly includes the following steps:

[0049] Step 1: Conductive composite materials are prepared by uniformly dispersing highly conductive carbon nanomaterials in PDMS in different proportions using a latex film-forming method. The conductive composite materials have different mechanical and electrical properties.

[0050] Specifically, the latex film-forming method includes fully dispersing highly conductive carbon-based nanomaterials and PDMS in a solvent, comprising three steps: uniform stirring and mixing, heating and stirring for volatilization, and heating and curing.

[0051] Specifically, the conductive composite material has different carbon-based nanomaterial contents, and the dielectric constant, resistance, and Young's modulus of the conductive composite material can be adjusted by controlling the carbon-based nanomaterial content.

[0052] Specifically, the method of step (1) involves preparing a conductive composite material 1 with a fixed thickness and a large Young's modulus, and a conductive composite material 2 with a high dielectric constant and a small Young's modulus, which facilitates assembly after processing.

[0053] Step 2: Design the sensitive layer of the snap-button-like flexible pressure sensor using 3D modeling. The sensitive layer of the snap-button-like flexible pressure sensor includes a male layer and a female layer. The male layer contains an array of protrusions, and the female layer contains an array of recesses.

[0054] Specifically, a male layer 3 and a female layer 4 simulating a snap button are created using 3D modeling software.

[0055] Specifically, the array of protrusions is a spherical protrusion, and the array of pits includes spheres 411 and frustums 412.

[0056] Specifically, the structure at the included angle of the male layer 3 is a cylinder 32, and the structure at the included angle of the female layer 4 is a circular hole 42, which is used for assembly and positioning.

[0057] Specifically, the dimensions of the cylinder 32 and the circular hole 42 are much larger than the array size.

[0058] Step 3: Using a variable incident angle laser, positive and negative tapered structures can be freely processed to fabricate the conductive composite material and manufacture the array structures of the male layer 3 and the female layer 4 respectively. The surfaces of the protrusion array and the pit array are relatively rough to improve the sensitivity of the sensor.

[0059] Specifically, it mainly includes the following steps:

[0060] (31) Place the prepared conductive composite material 1 on the surface of the variable incident angle laser processing platform 5, input the three-dimensional model designed in step (2), and directly and quickly process the spherical protrusion array by controlling the positive incident angle of the laser and adjusting the laser processing parameters to complete the protrusion array structure processing of the common layer 3.

[0061] (32) The conductive composite material 2 is placed on the surface of the variable incident angle laser processing platform 5. The three-dimensional model designed in step (2) is input. By adjusting the negative incident angle of the laser and adjusting the laser processing parameters, the sphere and frustum pit array is directly and quickly processed to complete the pit array structure processing of the parent layer 4.

[0062] Specifically, the surfaces of the male layer 3 and the female layer 4 after laser processing are rough and easily deformed under low pressure.

[0063] Step 4: Prepare an electrode layer on the back of the male layer 3 and the female layer 4 of the sensitive layer of the snap-button-like flexible pressure sensor, and align and pre-press the spherical protrusion array of the male layer 3 and the pit array of the female layer 4 with pre-pressure to form a mechanical interlock, thereby forming a contact-stable sensitive layer to improve the stability of the sensor.

[0064] Specifically, it mainly includes the following steps:

[0065] (41) Prepare a conductive composite material 6 with low resistance according to the method of step (1);

[0066] (42) The conductive composite material 6 is coated on the back of the male layer 3 and the female layer 4, and then dried and cured.

[0067] (43) By using pre-pressure, the male layer 3 with a larger Young's modulus and the female layer 4 with a smaller Young's modulus are assembled to form a mechanical interlock, thereby achieving high stability of the flexible pressure sensor.

[0068] This invention provides a highly stable flexible pressure sensor, which is manufactured using the method described above for processing highly stable flexible pressure sensors using laser processing with a variable incident angle.

[0069] Specifically, the spherical protrusions in the male layer 3 have a radius of 100 μm and a height of 160 μm; the spherical pits in the female layer 4 have a radius of 110 μm and a height of 170 μm, the upper surface of the frustum has a radius of 90 μm, the lower surface has a radius of 110 μm and a height of 80 μm.

[0070] The present invention will be further described in detail with reference to two specific embodiments.

[0071] Example 1

[0072] The method for processing the interlocking sensitive layer of a flexible pressure sensor using laser with variable incident angle mainly includes the following steps:

[0073] (S1) Pour 5g of PDMS prepolymer into a beaker and add 150mL of ethanol. In another beaker, add 0.25g of multi-walled carbon nanotubes and 150mL of ethanol. Place the two beakers in an ultrasonic water bath and sonicate for 2 hours. Stir them with a magnetic stirrer at 400r / min for 5 hours. Pour the mixture from the two beakers into the same beaker and stir and evaporate at 400r / min in an environment of 70℃. Prepare another mixture of 0.3g of multi-walled carbon nanotubes by following the same steps.

[0074] (S2) After the ethanol has completely evaporated, add 0.5g of PDMS curing agent to two beakers with different contents of multi-walled carbon nanotubes and stir them thoroughly. Pour them into 500μm thick metal templates and then put them into a vacuum chamber to evacuate for 15 minutes and maintain negative pressure for 30 minutes to fully remove air bubbles.

[0075] (S3) A mixture with a high content of multi-walled carbon nanotubes was placed on a heating plate at 80°C and dried for 8 hours to prepare a conductive composite material with a high Young's modulus. A mixture with a low content of multi-walled carbon nanotubes was placed on a heating plate at 65°C and dried for 6 hours to prepare a conductive composite material with a high dielectric constant and a low Young's modulus.

[0076] (S4) Using 3D modeling software such as SolidWorks and UG, the male and female layers of the sensitive layer of the flexible pressure sensor, which resembles a snap button, are designed. The male layer array structure has a spherical protrusion radius of 100μm and a height of 160μm; the female layer array structure has a spherical pit radius of 110μm and a height of 170μm, a circular platform with an upper surface radius of 90μm, a lower surface radius of 110μm, and a height of 80μm; the four cylinders at the included angle of the male layer array structure have a diameter of 500μm and a height of 200μm; the four circular holes at the included angle of the female layer array structure have a diameter of 550μm and a depth of 250μm, which facilitates positioning during alignment and pre-pressure assembly.

[0077] (S5) Manually write the laser processing path program for the above-mentioned common layer microstructure array and parent layer in the variable incident angle laser processing software.

[0078] (S6) Select appropriate parameters such as laser power, frequency, scanning speed and beam tilt angle. The beam tilt angle of the position with larger negative taper is set to -8°. Use a coaxial air blowing device to ensure processing quality and finally complete the processing of the parent layer and mother layer array microstructure.

[0079] (S6) Based on the positioning structure of the four corners of the male and female layers, press evenly by hand to complete the assembly of the double-layer mechanical interlocking microstructure.

[0080] (S7) Using the same steps as in (S1), prepare a 0.35g high conductivity composite material, add 0.5g of PDMS curing agent and mix thoroughly to use as the electrode material for the flexible sensor.

[0081] (S8) Electrode materials were coated on both sides of the double-layer mechanical interlocking microstructure using a 100-mesh screen printing plate and then rapidly suspended and dried at 80°C.

[0082] (S9) The electrodes are led out using copper wires, and highly conductive carbon slurry is used as the connecting material. The organic solvent of the carbon slurry is volatilized at 100°C.

[0083] (S10) Polyimide tape is used to wrap and encapsulate the sensor, creating a highly stable double-layer mechanically interlocked microstructure flexible pressure sensor.

[0084] Example 2

[0085] The method for processing the interlocking sensitive layer of a flexible pressure sensor using laser with variable incident angle mainly includes the following steps:

[0086] (1) Take 5g of PDMS prepolymer and pour it into a beaker, and add 150mL of ethanol. In another beaker, add 5wt% carbon black and 150mL of ethanol. Place the two beakers in an ultrasonic water bath and sonicate for 2h. Stir them with a magnetic stirrer at 400r / min for 5h. Pour the mixture from the two beakers into the same beaker and stir and volatilize at 400r / min in an environment of 70℃. Prepare another mixture of 8wt% carbon black by following the same steps.

[0087] (2) After the ethanol has completely evaporated, add 0.5g of PDMS curing agent to two beakers with different carbon black contents and stir them thoroughly. Pour them into 500μm thick metal templates and then put them into a vacuum chamber to evacuate for 15 minutes and maintain negative pressure for 30 minutes to remove bubbles.

[0088] (3) The mixture with high carbon black content was placed on a heating plate at 80°C and dried for 8 hours to prepare a conductive composite material with high Young's modulus. The mixture with low carbon black content was placed on a heating plate at 65°C and dried for 6 hours to prepare a conductive composite material with high dielectric constant and low Young's modulus.

[0089] (4) The male and female layers of the sensitive layer of the flexible pressure sensor, which resembles a snap button, are designed using 3D modeling software such as SolidWorks and UG. The male layer array structure has a spherical protrusion radius of 100μm and a height of 160μm. The female layer array structure has a spherical pit radius of 110μm and a height of 170μm. The upper surface radius of the circular platform is 90μm, the lower surface radius is 110μm, and the height is 80μm. The diameter of the four cylinders at the included angle of the male layer array structure is 500μm and the height is 200μm. The diameter of the four circular holes at the included angle of the female layer array structure is 550μm and the depth is 250μm, which facilitates positioning during alignment and pre-pressure assembly.

[0090] (5) Manually write the laser processing path program for the above-mentioned common layer microstructure array and parent layer in the variable incident angle laser processing software.

[0091] (6) Select appropriate laser power, frequency, scanning speed and beam tilt angle, etc. The beam tilt angle of the position with larger negative taper is set to -8°. Use a coaxial air blowing device to ensure processing quality and finally complete the processing of the microstructure of the parent layer and the array of the parent layer.

[0092] (7) Based on the positioning structure of the four corners of the male and female layers, press evenly by hand to complete the assembly of the double-layer mechanical interlocking microstructure.

[0093] (8) Brush the highly conductive carbon paste onto the thermoplastic polyurethane elastic film, and quickly place the double-layer sensitive layer in the middle of the film. Place it on a heating plate at 70°C and apply a small pressure to complete the bonding of the electrode and the sensitive layer.

[0094] (9) The electrodes are led out using copper wires, and the edges of the thermoplastic polyurethane elastomer rubber are sealed using a heat sealing machine to create a high-stability double-layer mechanically interlocked microstructure flexible pressure sensor.

[0095] The above description is merely a preferred embodiment of the present invention, but the design concept of the present invention is not limited thereto. Any non-substantial modifications made to the present invention by those skilled in the art within the scope of the technology disclosed in the present invention using this concept shall be deemed as an infringement of the protection scope of the present invention.

Claims

1. A method for processing an interlocking sensitive layer of a flexible pressure sensor, characterized in that... Includes the following steps: (1) Disperse highly conductive carbon nanomaterials in PDMS in different proportions to prepare conductive composite materials with different mechanical and electrical properties; (2) The sensitive layer of the flexible pressure sensor that mimics a snap button is constructed using three-dimensional modeling. The sensitive layer of the flexible pressure sensor that mimics a snap button includes a male layer and a female layer. The opposite sides of the male layer and the female layer respectively include a protrusion array and a pit array. (3) The conductive composite material is processed by laser with a variable incident angle to obtain the sensitive layer of the snap-button-like flexible pressure sensor modeled in step 2. (4) An electrode layer is prepared on the back of the male layer and the female layer of the sensitive layer of the flexible pressure sensor that resembles a snap button, and the spherical protrusion array of the male layer and the pit array of the female layer are aligned and pre-pressed to form a mechanical interlock. The protrusion array is a spherical protrusion, and the pit array includes spheres and frustums; the structure at the included angle of the protrusion array is a cylinder, and the structure at the included angle of the pit array is a circular hole corresponding to the cylinder; the size of the cylinder and the circular hole is much larger than the array size.

2. The method for processing the interlocking sensitive layer of a flexible pressure sensor as described in claim 1, characterized in that: Step 1 uses a latex film-forming method, which includes three steps: uniform mixing, heating and stirring to volatilize, and heating to cure.

3. The method for processing the interlocking sensitive layer of a flexible pressure sensor as described in claim 1, characterized in that: The mechanical and electrical properties refer to the dielectric constant, resistance, and Young's modulus of the conductive composite material.

4. The method for processing the interlocking sensitive layer of a flexible pressure sensor as described in claim 3, characterized in that: Conductive composite materials with high Young's modulus and conductive composite materials with high dielectric constant and low Young's modulus are prepared according to the method in step (1).

5. The method for processing the interlocking sensitive layer of a flexible pressure sensor as described in claim 1, characterized in that: Step (3) specifically includes the following steps: (31) Place the conductive composite material on the laser processing platform with variable incident angle, input the three-dimensional model designed in step (2), and process the protrusion array by controlling the positive incident angle of the laser and adjusting the laser processing parameters to obtain the common layer of the sensitive layer of the flexible pressure sensor that resembles a snap button. (32) Place another conductive composite material on the laser processing platform with variable incident angle, input the three-dimensional model designed in step (2), and process the pit array by adjusting the negative incident angle of the laser and adjusting the laser processing parameters to obtain the parent layer of the sensitive layer of the flexible pressure sensor that resembles a snap button.

6. The method for processing the interlocking sensitive layer of a flexible pressure sensor as described in claim 1, characterized in that: Step (4) specifically includes the following steps: (41) Prepare a conductive composite material according to the method in step (1); (42) The conductive composite material is coated on the back of the male and female layers and then dried and cured. (43) Using pre-pressure, the male layer with a larger Young's modulus and the female layer with a smaller Young's modulus are aligned and pre-pressed to form a mechanical interlock, thus forming a sensitive layer with stable contact.

7. A flexible pressure sensor, characterized in that: It is manufactured using the method for processing the interlocking sensitive layer of the flexible pressure sensor as described in any one of claims 1-6.

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