A heating purging device

Abstract

A kind of heating purging device, using multiple flanges to fix nested installation exhaust gas inlet pipe and outlet pipe, overall design installation, compact structure, save space, using flange to connect exhaust gas inlet pipe and outlet pipe into the gas conveying pipeline between gas suction pump and tail gas treatment setting, without additional adding matching pipeline, save cost, reduce operation difficulty.Multiple heating elements and gas heating space are set to heat purging gas, improve heating efficiency and heating reliability, make purging gas in gas heating space from bottom to top around heating element fully spiral around, maximum increase the length of gas flow path, make purging gas more fully contact with heating element, fully exert the heating efficiency of heating element, make purging gas be fully and evenly heated by heating element.Using the annular gap formed between exhaust gas inlet pipe and outlet pipe as the channel for purging gas to enter outlet pipe, no heat loss, high efficiency, purging gas enters outlet pipe along annular gap, make the inlet direction of purging gas consistent with the inlet direction of exhaust gas from gas suction pump, avoid gas disturbance each other, further improve purging efficiency, annular gap forms negative pressure generator, exhaust gas from gas suction pump is quickly sucked into outlet pipe under the action of negative pressure suction, greatly improve the gas flow rate, prevent dust accumulation on pipe wall, enhance the purging cleaning effect.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor device manufacturing, and in particular to a heating and purging device suitable for semiconductor devices. BACKGROUND

[0002] In the semiconductor manufacturing process, reaction gas is introduced into the reaction chamber of the etching device and the deposition device to process the substrate. After the process is completed, the exhaust pump is used to exhaust the reaction waste gas from the reaction chamber, and the exhaust gas pipeline is used to introduce the exhaust gas into the exhaust treatment device. The reaction waste gas reacts with water and oxygen in the exhaust pipeline to form solid compound dust. The trace amount of water and solid dust remaining in the exhaust pipeline deposits on the pipe wall. As the deposits gradually accumulate, the pipe diameter becomes narrow, reducing the gas delivery efficiency. In severe cases, it can even cause blockage and cause downtime failure.

[0003] Currently, a hot air gun is connected to the exhaust pipeline to use heated non-active gas to purge the interior of the exhaust pipeline to remove the trace amount of water and solid dust remaining in the exhaust pipeline. Since the outlet pipe of the hot air gun is connected to the exhaust pipeline perpendicularly, and the outlet pipe of the hot air gun has a small diameter, the purging effect is poor. In addition, a special adapter pipeline is needed to connect the outlet pipe of the hot air gun to the exhaust pipeline, increasing the complexity of the operation and the cost. The outlet pipe of the hot air gun is long and thin, which can easily cause heat loss during the gas purging process, reducing the purging efficiency and reliability.

[0004] The statements herein merely provide background technology related to the present application, and do not necessarily constitute the prior art. SUMMARY

[0005] The purpose of the present application is to provide a heating and purging device with compact structure, saving space, saving cost, reducing operation difficulty, improving heating efficiency and reliability, improving purging efficiency, and enhancing purging cleaning effect.

[0006] In order to achieve the above purpose, the present application provides a heating and purging device, comprising: a main heating structure, and a waste gas inlet pipe, a purging gas inlet pipe and an outlet pipe connected to the main heating structure respectively;

[0007] The main heating structure comprises an outer pipe fixedly connected at both ends by a first flange and a second flange, and a third flange arranged in the outer pipe, wherein a gas transmission space is formed between the first flange and the third flange;

[0008] The gas outlet pipe is fixedly connected to the second flange plate and the third flange plate through the first mounting hole on the second flange plate and the second mounting hole on the third flange plate, and the gas outlet end of the gas outlet pipe is connected to the tail gas treatment equipment through a pipeline;

[0009] The gas inlet end of the exhaust gas inlet pipe is connected to the gas outlet of the exhaust pump of the semiconductor processing equipment through a pipeline, the gas outlet end of the exhaust gas inlet pipe extends into the gas inlet end of the gas outlet pipe after passing through the third mounting hole on the first flange plate, the exhaust gas inlet pipe is fixedly connected to the first flange plate, the outer diameter of the exhaust gas inlet pipe is smaller than the inner diameter of the gas outlet pipe, and an annular gap is formed between the gas outlet end of the exhaust gas inlet pipe and the gas inlet end of the gas outlet pipe;

[0010] A plurality of isolation sheets are arranged in the main body heating structure, the isolation sheets are arranged circumferentially between the second flange plate and the third flange plate, two adjacent isolation sheets, together with the outer wall of the gas outlet pipe, the inner wall of the outer pipe, the lower surface of the third flange plate and the upper surface of the second flange plate, jointly form a gas heating space or a gas diffusion space, and the gas heating space is arranged adjacent to the gas diffusion space;

[0011] The gas inlet end of the purge gas inlet pipe is connected to a purge gas source through a pipeline, and the gas outlet end of the purge gas inlet pipe is in communication with the gas heating space through the connecting hole on the second flange plate;

[0012] A heating element is arranged in the gas heating space;

[0013] A plurality of first air holes are arranged on the isolation sheet, and the first air holes are in communication with the gas heating space and the gas diffusion space;

[0014] A plurality of second air holes are arranged on the third flange plate, the second air holes are located at the gas diffusion space, and the second air holes are in communication with the gas diffusion space and the gas transmission space.

[0015] The outer diameter of the exhaust gas inlet pipe is 0.2mm-0.3mm smaller than the inner diameter of the gas outlet pipe, and the length of the exhaust gas inlet pipe extending into the gas outlet pipe is 3mm-4mm.

[0016] The distance between the first air hole and the lower surface of the third flange plate is 2mm-5mm.

[0017] The distance between the lower surface of the first flange plate and the upper surface of the third flange plate is 2mm-5mm.

[0018] The number of the isolation sheets is even.

[0019] The gas heating space is symmetrically arranged.

[0020] The space volume of the gas heating space is greater than the space volume of the gas diffusion space.

[0021] The heating element is arranged at the central axis position of the gas heating space, the heating element extends from the lower surface of the third flange plate to the upper surface of the second flange plate, and the gas outlet end of the purge gas inlet pipe is arranged at the edge of the gas heating space.

[0022] The gas outlet end of the gas outlet pipe is connected to the pipeline in communication with the tail gas treatment equipment through a first flange, and the gas inlet end of the exhaust gas inlet pipe is connected to the pipeline in communication with the exhaust pump through a second flange.

[0023] The heating purge device further comprises a temperature sensor arranged in the gas transmission space.

[0024] The present application adopts a plurality of flange plates to fix the nested installation of the exhaust gas inlet pipe and the gas outlet pipe, the overall design installation is compact in structure, saves space, adopts the flange to connect the exhaust gas inlet pipe and the gas outlet pipe into the gas conveying pipeline between the exhaust pump and the tail gas treatment device, without adding additional matching pipeline, saves the cost, and reduces the operation difficulty. A plurality of heating elements and gas heating spaces are arranged to heat the purge gas, which improves the heating efficiency and heating reliability, so that the purge gas fully revolves around the heating elements from bottom to top in the gas heating space, maximizes the length of the gas flow path, makes the purge gas more fully contact with the heating elements, fully utilizes the heating effect of the heating elements, and makes the purge gas be fully and uniformly heated by the heating elements. The annular gap formed between the exhaust gas inlet pipe and the gas outlet pipe is used as the channel for the purge gas to enter the gas outlet pipe, without heat loss, high efficiency, the purge gas enters the gas outlet pipe along the annular gap, so that the gas inlet direction of the purge gas is consistent with the gas inlet direction of the exhaust gas from the exhaust pump, avoids the disturbance of the gases to each other, further improves the purging efficiency, and the annular gap forms a negative pressure generator, the exhaust gas from the exhaust pump is quickly sucked into the gas outlet pipe under the suction of the negative pressure, greatly improves the gas flow rate, prevents dust from accumulating on the pipe wall, and enhances the purging and cleaning effect. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 is a perspective structural schematic diagram of a heating purge device provided by the present application.

[0026] Figure 2 is Figure 1 a side view cross-sectional view.

[0027] Figure 3 is Figure 1 a top view cross-sectional view.

[0028] Figure 4 is a schematic diagram of the flow direction of the purge gas.

[0029] Figure 5 is a schematic diagram of the flow direction of the purge gas.

[0030] Figure 6 is a schematic diagram of the flow direction of the purge gas. Figure 2 is a schematic diagram of the flow direction of the purge gas.

[0031] Figure 7 is a schematic diagram of the flow direction of the purge gas. DETAILED DESCRIPTION

[0032] The preferred embodiments of the present application are described below in detail according to Figures 1 to 7 , and the preferred embodiments of the present application are described in detail below.

[0033] As shown in Figure 1 and Figure 2 , the present application provides a heating and purging device, comprising a main heating structure 1, and a waste gas inlet pipe 2, a purge gas inlet pipe 3 and an outlet pipe 4 connected to the main heating structure 1 respectively, the waste gas inlet pipe 2 is connected to the outlet of the exhaust pump of the semiconductor processing equipment through a pipeline, and the waste gas from the exhaust pump is introduced into the heating and purging device, the purge gas inlet pipe 3 is connected to the purge gas source through a pipeline, and the purge gas from the purge gas source is introduced into the heating and purging device, and the outlet pipe 4 is connected to the exhaust treatment equipment through a pipeline, and the waste gas and the purge gas heated by the heating and purging device are introduced into the pipeline connected to the exhaust treatment equipment together, and the inner wall of the pipeline is cleaned by the high-temperature and high-pressure purge gas.

[0034] The main body heating structure 1 comprises: an outer pipe 7 fixedly connected by a first flange plate 5 and a second flange plate 6 at both ends, a third flange plate 8 arranged in the outer pipe 7, the third flange plate 8 being fixedly arranged on the inner wall of the outer pipe 7, and a gas transmission space 103 formed between the first flange plate 5 and the third flange plate 8. The second flange plate 6 is provided with a first mounting hole 601, and the third flange plate 8 is provided with a second mounting hole 801, the inner diameter of the first mounting hole 601 and the inner diameter of the second mounting hole 801 are equal to the outer diameter of the gas outlet pipe 4, the gas inlet end of the gas outlet pipe 4 passes through the first mounting hole 601 of the second flange plate 6 and the second mounting hole 801 of the third flange plate 8 in sequence, and the gas outlet pipe 4 is fixedly connected by the second flange plate 6 and the third flange plate 8. The gas outlet end of the gas outlet pipe 4 is connected to the pipeline in communication with the tail gas treatment device through a first flange 401. The second flange plate 6 is provided with a connecting hole (not shown in the figure), and the purge gas inlet pipe 3 is fixedly connected through the connecting hole. The first flange plate 5 is provided with a third mounting hole 501, the inner diameter of the third mounting hole 501 is equal to the outer diameter of the waste gas inlet pipe 2, the outer diameter of the waste gas inlet pipe 2 is smaller than the inner diameter of the gas outlet pipe 4, the gas inlet end of the waste gas inlet pipe 2 is connected to the pipeline in communication with the gas suction pump through a second flange 201, and the gas outlet end of the waste gas inlet pipe 2 extends into the gas inlet end of the gas outlet pipe 4 after passing through the third mounting hole 501 of the first flange plate 5, and the waste gas inlet pipe 2 is fixedly connected by the first flange plate 5. An annular gap 11 is formed between the gas outlet end of the waste gas inlet pipe 2 and the gas inlet end of the gas outlet pipe 4. Three flange plates are used to fixedly nest the waste gas inlet pipe 2 and the gas outlet pipe 4, the overall design is compact in structure and saves space, the flange is used to connect the waste gas inlet pipe 2 and the gas outlet pipe 4 to the gas conveying pipeline between the gas suction pump and the tail gas treatment device, without the need for additional matching pipeline, thereby saving cost and reducing operation difficulty.

[0035] As shown in Figure 1 and Figure 3 The main body heating structure 1 further comprises a plurality of isolation sheets 9, the number of the isolation sheets 9 is even, the isolation sheets 9 are arranged between the second flange plate 6 and the third flange plate 8, as shown in Figure 3 The isolation sheets 9 are distributed in the circumferential direction, adjacent two isolation sheets 9 and the outer wall of the gas outlet pipe 4, the inner wall of the outer pipe 7, the lower surface of the third flange plate 8 and the upper surface of the second flange plate 6 together form a gas heating space 101 or a gas diffusion space 102, and the gas heating space 101 and the gas diffusion space 102 are arranged adjacently.

[0036] As shown in Figure 1 and Figure 3As shown, the gas heating space 101 is provided with a heating element 10, and the purge gas inlet pipe 3 also communicates with the gas heating space 101, and the purge gas entering the gas heating space 101 is heated by the heating element 10. In this embodiment, the first flange plate 5 and the third flange plate 8 are both provided with mounting holes, the heating element 10 is sequentially inserted into the mounting holes on the first flange plate 5 and the third flange plate 8, and then extends into the gas heating space 101, the heating element 10 is fixed on the top of the first flange plate 5 by fasteners, and the power supply and signal lines of the heating element 10 are led out of the main body heating structure 1, and the main body heating part of the heating element 10 extends to the bottom of the gas heating space 101, that is, the heating element 10 is close to the second flange plate 6, so that the heating element 10 can uniformly heat the entire gas heating space 101. As shown in the figure, Figure 2 As shown, the isolation sheet 9 is provided with a plurality of first air holes 901, and the first air holes 901 communicate the gas heating space 101 and the gas diffusion space 102, and the distance between the first air holes 901 and the lower surface of the third flange plate 8 can be set to 2mm-5mm, and the first air holes 901 are arranged close to the third flange plate 8, so that the purge gas entering the gas heating space 101 can be fully heated by the heating element 10 before entering the gas diffusion space 102 through the first air holes 901. As shown in the figure, Figure 3 As shown, the third flange plate 8 is provided with a plurality of second air holes 802, and the second air holes 802 are located at the gas diffusion space 102, and the second air holes 802 communicate the gas diffusion space 102 and the gas transmission space 103 between the first flange plate 5 and the third flange plate 8 (as shown in the figure) Figure 1 and Figure 4 As shown).

[0037] In this embodiment, the distance between the lower surface of the first flange plate 5 and the upper surface of the third flange plate 8 can be set to 2mm-5mm, and the third flange plate 8 is arranged close to the first flange plate 5, so as to expand the height of the gas heating space 101 as much as possible, and make the capacity of the gas heating space 101 reach the maximum as much as possible, so as to improve the heating efficiency, and at the same time, reduce the capacity of the gas transmission space 103 between the first flange plate 5 and the third flange plate 8 as much as possible, and reduce the heat loss of the purge gas when passing through the gas transmission space 103.

[0038] As shown in the figure, Figure 4As shown, the purge gas inlet pipe 3 introduces the purge gas (generally nitrogen N2) from a purge gas source (not shown in the figure) into the gas heating space 101 from the bottom, and the introduced purge gas has a predetermined pressure (0.4Mpa-0.6Mpa) and a predetermined flow rate (20LPM-30LPM), so as to ensure that the purge gas can have enough power to spiral from the bottom to the top of the gas heating space 101, as shown by the red arrow, and the purge gas spirals around the heating element 10 in the gas heating space 101, increasing the length of the gas flow path, so that the purge gas can stay in the gas heating space 101 for a longer time, so as to make the purge gas contact the heating element 10 more fully, fully exert the heating effect of the heating element 10, and make the purge gas be heated fully and uniformly by the heating element 10. Finally, the high-pressure and high-temperature purge gas enters the gas diffusion space 102 through the first air hole 901 on the isolation sheet 9, then enters the space between the first flange plate 5 and the third flange plate 8 through the second air hole 802 on the second flange plate 8, and finally enters the outlet pipe 4 through the annular gap 11 between the waste gas inlet pipe 2 and the outlet pipe 4, and then enters the pipeline connected to the tail gas treatment equipment, so as to realize the purge and cleaning of the inner wall of the pipeline. In order to accurately control the heating temperature of the purge gas, as shown in Figure 1 and Figure 2 In this embodiment, a temperature sensor 12 is arranged to detect the temperature, and a mounting hole is arranged on the first flange plate 5. After the temperature sensor 12 is inserted into the gas transmission space 103 between the first flange plate 5 and the third flange plate 8 through the mounting hole on the first flange plate 5, the temperature sensor 12 is fixed on the top of the first flange plate 5 by a fastener. Because the purge gas after heating is finally located in the space between the first flange plate 5 and the third flange plate 8 before entering the outlet pipe 4 through the annular gap 11 between the waste gas inlet pipe 2 and the outlet pipe 4, the sensing head of the temperature sensor 12 is arranged in the gas transmission space 103 between the first flange plate 5 and the third flange plate 8, so that the temperature data of the purge gas entering the outlet pipe 4 can be obtained most accurately, and the heating power of the heating element 10 can be adjusted in time according to the obtained temperature data, so as to obtain the best purge effect.

[0039] As shown in Figure 5As shown, according to the Venturi principle, the annular gap 11 formed between the outlet end of the exhaust gas inlet pipe 2 and the inlet end of the outlet pipe 4 creates a negative pressure generator. The high-pressure, high-heat purging gas from the gas heating space 101 passes through the gas diffusion space 102 and the gas transmission space 103 in sequence, and finally enters the outlet pipe 4 (red arrow) through the annular gap 11. A negative pressure environment is generated at the outlet end of the exhaust gas inlet pipe 2. The exhaust gas from the vacuum pump is quickly sucked into the outlet pipe 4 (green arrow) under the suction of the negative pressure, which greatly increases the gas flow rate and prevents dust from accumulating on the pipe wall. The purging gas enters the outlet pipe 4 along the annular gap 11, making the inlet direction of the purging gas consistent with the inlet direction of the exhaust gas from the vacuum pump, avoiding mutual disturbance of the gases, further improving the purging efficiency and enhancing the purging cleaning effect.

[0040] like Figure 6 As shown, in this embodiment, the outer diameter of the exhaust gas inlet pipe 2 is 0.2mm to 0.3mm smaller than the inner diameter of the exhaust gas outlet pipe 4, thereby making the width of the annular gap 11 0.2mm to 0.3mm. At the same time, the length of the exhaust gas inlet pipe 2 extending into the exhaust gas outlet pipe 4 is 3mm to 4mm, thereby making the height of the annular gap 11 3mm to 4mm. By reasonably setting the width and height of the annular gap 11, the effect of the negative pressure generator is optimized.

[0041] like Figure 7As shown, in one embodiment of the present application, four isolation sheets 9 are arranged to form two gas heating spaces 101 and two gas diffusion spaces 102, the two gas heating spaces 101 are symmetrically arranged, and the gas heating spaces 101 are flanked by the gas diffusion spaces 102. One heating element 10 is arranged in each of the gas heating spaces 101, and the heating element 10 is arranged at the central axis of the gas heating space 101, so that the heat radiation distance to the surroundings is almost equal, so as to better achieve uniform heating. The outlet end of the purge gas inlet pipe 3 is arranged at the edge of the gas heating space 101, so that the purge gas entering the gas heating space 101 from the purge gas inlet pipe 3 can fully spiral around the heating element 10, increasing the length of the gas flow path, so that the purge gas can be more fully contacted with the heating element 10, so that the purge gas can be fully and uniformly heated by the heating element 10. The symmetrically arranged two gas heating spaces 101 improve the heating efficiency and heating reliability. In this embodiment, the circumferential angle of the gas heating space 101 is set to 120°, and correspondingly, the circumferential angle of the gas diffusion space 102 is set to 60°, the distribution range of the gas heating space 101 is greater than that of the gas diffusion space 102, preferably, the space volume of the gas heating space 101 is set to twice that of the gas diffusion space 102, which is beneficial to improve the heating efficiency, and to improve the speed of the heated purge gas entering the annular gap 11 through the gas diffusion space 102, reducing the heat loss of the purge gas when passing through the gas diffusion space 102.

[0042] The application adopts multiple flanges to fix the nested installation of the exhaust gas inlet pipe and the exhaust gas outlet pipe, the overall design and installation are compact in structure and save space (the original size and shape size is 257*157*70, and the present shape size is 197*143*121), the flange is used to connect the exhaust gas inlet pipe and the exhaust gas outlet pipe into the gas conveying pipeline between the exhaust pump and the tail gas treatment device, without adding additional connecting pipeline, the cost is saved, and the operation difficulty is reduced. Multiple heating elements and gas heating spaces are arranged to heat the purge gas, the heating efficiency and heating reliability are improved, the purge gas is fully spiraled around the heating elements from bottom to top in the gas heating space, the length of the gas flow path is maximized, the purge gas is more fully contacted with the heating elements, the heating efficiency of the heating elements is fully utilized, and the purge gas is fully and uniformly heated by the heating elements. The annular gap formed between the exhaust gas inlet pipe and the exhaust gas outlet pipe is used as a channel for the purge gas to enter the exhaust gas outlet pipe, there is no heat loss, the efficiency is high, the purge gas enters the exhaust gas outlet pipe along the annular gap, the inlet direction of the purge gas is consistent with the inlet direction of the exhaust gas from the exhaust pump, the mutual disturbance of the gases is avoided, the purge efficiency is further improved, the annular gap forms a negative pressure generator, the exhaust gas from the exhaust pump is quickly sucked into the exhaust gas outlet pipe under the suction of the negative pressure, the gas flow rate is greatly improved, the dust accumulation on the pipe wall is prevented, and the purge cleaning effect is enhanced.

[0043] It should be noted that in the embodiments of the present application, the orientations or positional relationships indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the embodiments, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0044] In the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection", "fixing" and the like should be understood broadly, for example, it can be fixed connection, or detachable connection, or integrated; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meanings of the above terms in the present application can be understood according to the specific circumstances.

[0045] It should be understood that the terms "comprises" and / or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof.

[0046] It should also be understood that the terms used in the specification and the following claims are intended to describe certain embodiments and do not limit the present application. As used in this specification and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.

[0047] It should further be understood that the term "and / or" as used in the specification and the following claims indicates any combination of one or more of the associated listed items and all possible combinations of those items.

[0048] As used in this specification and the appended claims, the term "if" can be interpreted as meaning "when," or "once," or "in response to determining," or "in response to detecting," as appropriate, depending on the context. Similarly, the phrase "if determined" or "if detected [the described condition or event]" can be interpreted as meaning "once determined" or "in response to determining" or "once detected [the described condition or event]" or "in response to detecting [the described condition or event]," as appropriate, depending on the context.

[0049] Although the present application has been described in detail through the preferred embodiments, it should be recognized that the description is not to be considered limiting. It is obvious that the described embodiments are only a part of the embodiments of the present application, but not all the embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present application without creative labor fall within the scope of the present application. After reading the above, various modifications and substitutions of the present application will be apparent to those skilled in the art. Therefore, the scope of the present application should be defined by the appended claims.

Claims

1. A heating purging device, characterized by, The main body heating structure and the exhaust gas inlet pipe, the purge gas inlet pipe and the outlet pipe connected with the main body heating structure respectively are included. The main body heating structure includes an outer pipe fixedly connected by a first flange and a second flange at both ends, and a third flange arranged in the outer pipe, and a gas transmission space is formed between the first flange and the third flange. The inlet end of the outlet pipe passes through a first mounting hole on the second flange and a second mounting hole on the third flange in sequence, and the outlet pipe is fixedly connected by the second flange and the third flange, and the outlet end of the outlet pipe is connected to the tail gas treatment equipment by a pipeline. The inlet end of the exhaust gas inlet pipe is connected to the outlet of the exhaust pump of the semiconductor processing equipment by a pipeline, and the outlet end of the exhaust gas inlet pipe extends into the inlet end of the outlet pipe after passing through a third mounting hole on the first flange, and the exhaust gas inlet pipe is fixedly connected by the first flange, and the outer diameter of the exhaust gas inlet pipe is smaller than the inner diameter of the outlet pipe, and an annular gap is formed between the outlet end of the exhaust gas inlet pipe and the inlet end of the outlet pipe to form a negative pressure generator. A plurality of isolation sheets are arranged in the main body heating structure, and the isolation sheets are circumferentially arranged between the second flange and the third flange, and two adjacent isolation sheets, together with the outer wall of the outlet pipe, the inner wall of the outer pipe, the lower surface of the third flange and the upper surface of the second flange, form a gas heating space or a gas diffusion space, and the gas heating space and the gas diffusion space are arranged adjacently. The inlet end of the purge gas inlet pipe is connected to a purge gas source by a pipeline, and the outlet end of the purge gas inlet pipe is in communication with the gas heating space through a connecting hole on the second flange. A heating element is arranged in the gas heating space. A plurality of first air holes are arranged on the isolation sheet, and the first air holes are in communication with the gas heating space and the gas diffusion space. A plurality of second air holes are arranged on the third flange, and the second air holes are located at the gas diffusion space, and the second air holes are in communication with the gas diffusion space and the gas transmission space.

2. The heating purge apparatus of claim 1, wherein, The outer diameter of the exhaust gas inlet pipe is 0.2mm-0.3mm smaller than the inner diameter of the outlet pipe, and the length of the exhaust gas inlet pipe extending into the outlet pipe is 3mm-4mm.

3. The heating purge apparatus of claim 1, wherein, The distance between the first air hole and the lower surface of the third flange is 2mm-5mm.

4. The heating purge apparatus of claim 1, wherein, The distance between the lower surface of the first flange and the upper surface of the third flange is 2mm-5mm.

5. The heating purge apparatus of claim 1, wherein, The number of isolation sheets is even.

6. The heating purge apparatus of claim 5, wherein, The gas heating space is symmetrically arranged.

7. The heating purge apparatus of claim 6, wherein, The space volume of the gas heating space is larger than that of the gas diffusion space.

8. The heating purge apparatus of claim 1, wherein, The heating element is arranged at the central axis position of the gas heating space, the heating element extends from the lower surface of the third flange to the upper surface of the second flange, and the outlet end of the purge gas inlet pipe is arranged at the edge of the gas heating space.

9. The heating purge apparatus of claim 1, wherein, The gas outlet end of the gas outlet pipe is connected to a pipeline in communication with the tail gas treatment equipment through a first flange, and the gas inlet end of the waste gas inlet pipe is connected to a pipeline in communication with the air extraction pump through a second flange.

10. The heating purge apparatus of claim 1, wherein, The heating and purging device further comprises a temperature sensor arranged in the gas transmission space.

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