A satellite-ground coordinated regional greenhouse gas monitoring system

Abstract

The present invention relates to the technical field of carbon dioxide concentration monitoring, specifically a satellite-ground coordinated regional greenhouse gas monitoring system, the system comprising: a satellite subsystem, a ground hardware subsystem, a communication subsystem and a monitoring service subsystem; satellite remote sensing data is obtained through the satellite subsystem, and the satellite remote sensing data includes atmospheric environment data and pollution source data of fixed point sources; ground sensor data is obtained using the ground hardware subsystem, and the ground hardware subsystem includes a sensor device, and an optimal chip structure is set in the sensor device; the communication subsystem receives satellite remote sensing data and ground sensor data, processes the satellite remote sensing data and the ground sensor data, and outputs greenhouse gas analysis results of fixed point sources; the monitoring service subsystem receives greenhouse gas analysis results, and analyzes the overall carbon dioxide emission level of the monitoring area in combination with greenhouse gas analysis technology. The present invention develops, displays and manages an intelligent visualization platform for integrated air-ground-air carbon monitoring.

Description

Technical Field

[0001] The present invention relates to the technical field of carbon dioxide concentration monitoring, and in particular to a satellite-ground coordinated regional greenhouse gas monitoring system. Background Art

[0002] As the global climate change problem becomes increasingly serious, greenhouse gas emission monitoring has become the focus of international attention. In order to accurately assess greenhouse gas emissions, an efficient monitoring system needs to be established. Traditional ground monitoring sensors are mainly divided into solid electrolyte, capacitive, optical fiber, infrared absorption and other types. Among them, infrared carbon dioxide sensors are the current mainstream type. They absorb infrared radiation of a specific band through carbon dioxide, and then measure the carbon dioxide content in the gas according to the strength of the absorbed radiation energy. Although the accuracy is high, it is limited by factors such as satellite orbits and resolution, and there are certain limitations. Therefore, it is of great significance to combine ground monitoring and satellite remote sensing to carry out coordinated monitoring of greenhouse gases.

[0003] In the current carbon emission material detection system, it mainly relies on single satellite observation data or ground observation data for comparative analysis, which leads to some obvious problems. First, the single positioning data source makes the monitoring results unstable and unable to provide accurate carbon emission data. Secondly, there is a lack of deep fusion and collaborative inversion research on multi-source satellite data and ground observation data, and there are limitations in the dynamic visualization and management of detection results.

[0004] In order to solve the above problems, it is necessary to combine satellite monitoring data and ground verification equipment, develop targeted monitoring devices to monitor and verify carbon dioxide, monitor carbon dioxide from fixed point sources or specific areas, and compare and analyze with satellite remote sensing data to verify the accuracy of satellite monitoring results. In addition, it is necessary to carry out deep fusion and collaborative inversion research on multi-source data to improve the stability and accuracy of monitoring results, further improve the dynamic visualization display and management system of carbon emission data, and provide more reliable data support for responding to climate change. Summary of the invention

[0005] In view of the shortcomings of the existing methods and the needs of practical applications, in order to match the satellite data, targeted ground hardware equipment is configured, and the equipment is used to monitor the carbon dioxide emissions of fixed point sources, and the satellite remote sensing data is verified on the spot to ensure the accuracy and reliability of the monitoring results, and further realize the real-time monitoring of greenhouse gas concentrations and the dynamic visualization display and management of the inversion results. On the one hand, the present invention provides a satellite-ground coordinated regional greenhouse gas monitoring system, which includes: a satellite subsystem, a ground hardware subsystem, a communication subsystem and a monitoring service subsystem; the satellite remote sensing data is obtained through the satellite subsystem, and the satellite remote sensing data includes the atmospheric environment data and pollution source data of the fixed point source; the ground sensing data is obtained by using the ground hardware subsystem, and the ground hardware subsystem includes a sensor device, and the optimal chip structure is set in the sensor device; the communication subsystem receives the satellite remote sensing data and the ground sensing data, processes the satellite remote sensing data and the ground sensing data, and outputs the greenhouse gas analysis results of the fixed point source; the monitoring service subsystem receives the greenhouse gas analysis results, and analyzes the overall carbon dioxide emission level in the monitoring area in combination with the greenhouse gas analysis technology. The present invention can realize comprehensive monitoring of fixed point source data through satellite remote sensing data obtained by the satellite subsystem and ground sensing data obtained by the ground hardware subsystem, which helps to more accurately understand the carbon emissions of fixed point sources and provide scientific basis and technical support for climate change research and management.

[0006] Optionally, the obtaining of ground sensing data by using the ground hardware subsystem includes: setting a temperature sensor, a humidity sensor, an atmospheric pressure sensor, a wind speed sensor and a wind direction sensor in the ground hardware subsystem, and obtaining ground sensing data by using the temperature sensor, the humidity sensor, the atmospheric pressure sensor, the wind speed sensor and the wind direction sensor. The present invention sets a variety of sensors in the ground hardware subsystem, which can significantly improve the monitoring capability and application scope of the system, reduce the impact of a single sensor failure on the overall monitoring results, and improve the stability of the entire system.

[0007] Optionally, setting the optimal chip structure in the sensor device includes: establishing a MEMS carbon dioxide sensor model based on the infrared spectrum mechanism and the medium transduction equation. The MEMS carbon dioxide sensor model established based on the infrared spectrum mechanism and the medium transduction equation of the present invention can more accurately simulate and predict the performance of the sensor, thereby improving the detection accuracy.

[0008] Optionally, setting the optimal chip structure in the sensor device includes: using the MEMS carbon dioxide sensor model to analyze the MEMS light source to obtain a light source analysis result. The present invention analyzes the MEMS light source to more accurately understand the characteristics of the light source, which helps to improve the accuracy of carbon dioxide detection results and reduce the error coefficient of the monitoring system.

[0009] Optionally, setting the optimal chip structure in the sensor device includes: introducing an optical power absorption model and an attenuation coefficient absorption model to obtain power analysis results and attenuation coefficient analysis results; and determining the simulation direction of the sensor core chip in combination with the light source analysis results, the power analysis results, and the attenuation coefficient analysis results. The present invention can more accurately simulate and predict the working state and performance of the sensor through the optical power absorption model and the attenuation coefficient absorption model, which helps to optimize the design of the sensor core chip and improve the detection accuracy and stability of related equipment.

[0010] Optionally, setting the optimal chip structure in the sensor device includes: simulating the sensor three-dimensional structure according to the simulation direction and using simulation software to obtain a simulation analysis result of the three-dimensional structure; and determining the optimal structure of the sensor core chip based on the simulation analysis result. The present invention can more accurately simulate and predict the working state and performance of the sensor core chip through three-dimensional structure simulation, which helps to design the optimal structure and improve the performance and practicality of the greenhouse gas monitoring system.

[0011] Optionally, the setting of the optimal chip structure in the sensor device includes: obtaining an optimal core chip of the sensor based on the optimal structure; and the optimal core chip is set inside the sensor device. The present invention sets the optimal core chip inside the sensor device, which can significantly improve the performance and stability of the sensor, promote the progress and innovation of related technologies, reduce costs and extend service life.

[0012] Optionally, the setting of the optimal chip structure in the sensor device includes: optimizing the design of the perception layer module for the temperature sensor, the humidity sensor, the atmospheric pressure sensor, the wind speed sensor and the wind direction sensor based on the optimal core chip. The present invention optimizes the design of the perception layer module based on the optimal core chip, which can improve the perception accuracy of parameters such as temperature, humidity, atmospheric pressure, wind speed and wind direction, thereby improving the detection accuracy of the entire sensor system.

[0013] Optionally, the ground hardware subsystem further includes: a data storage device, a wireless communication device and a hardware main control device; the data storage device is electrically connected to the hardware main control device and the sensor device respectively; the wireless communication device is communicatively connected to the hardware main control device and the sensor device respectively. The data storage device of the present invention can be used to store and back up data collected by the sensor to ensure the integrity and security of the data. At the same time, the hardware main control device can process and analyze the data.

[0014] Optionally, the monitoring service subsystem receives the greenhouse gas analysis result and analyzes the overall carbon dioxide emission level of the monitoring area in combination with the greenhouse gas analysis technology, including:

[0015] The monitoring service subsystem is combined with greenhouse gas analysis technology, and the greenhouse gas analysis technology includes the Internet of Things, cloud computing, artificial intelligence, and AI big data analysis; the greenhouse gas analysis results are evaluated based on the monitoring service subsystem and the greenhouse gas analysis technology to obtain the carbon dioxide emissions in the monitoring area; and the overall carbon dioxide emission level in the monitoring area is analyzed based on the carbon dioxide emissions. The present invention combines greenhouse gas analysis technology to monitor and manage greenhouse gas emission data, which can improve monitoring and management efficiency, reduce detection economic costs, promote technological innovation, and enhance decision support. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a flow chart of the satellite-ground coordinated regional greenhouse gas monitoring system of the present invention;

[0017] Figure 2 This is a schematic diagram of the structure of the bridge-type single light source "X"-shaped four-arm support suspended in the air of the present invention;

[0018] Figure 3 It is a structural schematic diagram of the satellite-ground coordinated regional greenhouse gas monitoring system of the present invention. DETAILED DESCRIPTION

[0019] The specific embodiments of the present invention will be described in detail below. It should be noted that the embodiments described herein are only for illustration and are not intended to limit the present invention. In the following description, a large number of specific details are set forth in order to provide a thorough understanding of the present invention. However, it is obvious to those of ordinary skill in the art that these specific details do not need to be adopted to implement the present invention. In other examples, in order to avoid confusing the present invention, known circuits, software or methods are not specifically described.

[0020] Throughout the specification, references to "one embodiment," "an embodiment," "an example," or "an example" mean that a particular feature, structure, or characteristic described in conjunction with the embodiment or example is included in at least one embodiment of the present invention. Therefore, the phrases "in one embodiment," "in an embodiment," "an example," or "an example" appearing in various places throughout the specification do not necessarily all refer to the same embodiment or example. In addition, particular features, structures, or characteristics may be combined in one or more embodiments or examples in any suitable combination and / or subcombination. In addition, it should be understood by those of ordinary skill in the art that the figures provided herein are for illustrative purposes and that the figures are not necessarily drawn to scale.

[0021] See also Figure 1 In order to cooperate with the actual operation of my country's carbon monitoring and assessment pilot work, it is necessary to build a complete carbon monitoring network system, based on the integrated monitoring means of the sky and the ground, to realize the greenhouse gas monitoring of atmospheric pollution sources and typical ecosystems, and to dynamically visualize and manage the inversion results, so as to provide a scientific basis for the formulation of carbon emission policies. The present invention provides a satellite-ground coordinated regional greenhouse gas monitoring system, which includes the following steps:

[0022] The satellite-ground coordinated regional greenhouse gas monitoring system of the present invention is provided with: a satellite subsystem, a ground hardware subsystem, a communication subsystem and a monitoring service subsystem. This system has comprehensive monitoring capabilities, can transmit data in real time, integrate and analyze data, improve data monitoring efficiency, promote the innovation of carbon emission detection technology, and effectively supplement the monitoring network to verify the monitoring results of satellite data.

[0023] S1. Use the satellite subsystem to obtain satellite remote sensing data. Satellite remote sensing data includes atmospheric environment data and pollution source data of fixed point sources. The specific setting steps and implementation contents are as follows:

[0024] In this embodiment, the reflected light and scattered light from different objects can be obtained by imaging the earth's surface in space through a multi-spectral camera carried by a satellite. The above light contains the spectral characteristics of the object. When sunlight shines on the target object, the reflected light contains its corresponding spectral characteristics, which are collected by the optical lens and converted into electronic signals by the satellite detector.

[0025] After being compressed and modulated, the relevant digital signals will be transmitted to the satellite subsystem on the ground. However, they will be affected by many factors during the transmission process, including but not limited to atmospheric absorption, scattering and turbulence, optical lens distortion, modulation transfer function, noise, stray light and bit errors. In order to ensure the accuracy and reliability of satellite monitoring data, the satellite subsystem will complete a series of data preprocessing steps, including but not limited to signal demodulation, data decompression, relative radiation correction, atmospheric correction, image restoration and geometric correction.

[0026] Furthermore, in the present embodiment, satellite remote sensing data can provide information about atmospheric environmental data and pollution source data of fixed point sources. Data on atmospheric environmental quality, pollutant emissions, air pollution index, etc. can be obtained through satellite remote sensing technology, based on which the environmental conditions of the detection area can be better understood. The satellite remote sensing data of fixed point sources are analyzed to monitor the pollutant emissions of fixed point sources, including but not limited to industrial waste gas, automobile exhaust, and biological waste gas from fixed point sources. At the same time, the distribution, quantity, type, and other information of pollution sources in the monitoring area can also be understood through satellite remote sensing data, which helps to better understand the environmental conditions, thereby effectively verifying the data accuracy of the monitoring area to formulate more scientific environmental protection measures.

[0027] Based on this satellite subsystem, high-quality satellite remote sensing data can be provided, providing a reliable data information source for the ground hardware subsystem and monitoring service subsystem, thereby realizing comprehensive monitoring and accurate analysis of greenhouse gases.

[0028] In this embodiment, obtaining satellite remote sensing data through an existing satellite system is only an optional implementation mode of the present invention. In one or some other embodiments, the data collection method can be adjusted according to data requirements and actual meteorological conditions to obtain more accurate and reliable satellite remote sensing data, thereby providing a basis for subsequent data analysis and verification, and ensuring the practical feasibility of the satellite-ground coordinated regional greenhouse gas monitoring system.

[0029] S2. Obtain ground sensor data using the ground hardware subsystem. The ground hardware subsystem includes a sensor device, and an optimal chip structure is set in the sensor device. The specific setting steps and implementation contents are as follows:

[0030] In this embodiment, the sensor device is installed in a suitable location and manner according to the on-site conditions of the monitoring area or fixed point source to ensure that the relevant sensors can accurately monitor the required ground data, including but not limited to environmental parameters such as temperature, humidity, pressure, and light. In order to achieve efficient data collection and processing, improve the accuracy and efficiency of data collection, and reduce the complexity of data processing, the optimal chip structure is set inside each sensor device.

[0031] First, a temperature sensor, a humidity sensor, an atmospheric pressure sensor, a wind speed sensor, and a wind direction sensor are set in the ground hardware subsystem, and the ground sensing data are obtained by using the temperature sensor, humidity sensor, atmospheric pressure sensor, wind speed sensor, and wind direction sensor. The specific implementation contents are as follows:

[0032] In order to accurately measure and monitor key parameters such as ground temperature, humidity, air pressure, wind speed and wind direction, the ground sensor data is acquired in real time through the above-mentioned sensor ground hardware subsystem, providing a basis for subsequent data processing and analysis. Ground sensor data is of great significance for understanding ground environmental conditions, predicting weather changes, and evaluating climate change.

[0033] In addition, in order to ensure the accuracy and reliability of sensor data in the ground hardware subsystem, a series of calibration and maintenance work is required for the ground hardware subsystem, including but not limited to regular inspection of the performance of each sensor, calibration of sensor readings, and parameter adjustment and routine maintenance as needed.

[0034] Through the temperature sensors, humidity sensors, atmospheric pressure sensors, wind speed sensors and wind direction sensors in the ground hardware subsystem, comprehensive and accurate ground environmental data can be obtained, which is conducive to the scientific verification of subsequent satellite data monitoring results.

[0035] Secondly, a MEMS carbon dioxide sensor model is established based on the infrared spectrum mechanism and the medium transduction equation. The specific implementation contents are as follows:

[0036] In order to more accurately monitor the carbon dioxide concentration at a fixed point, a MEMS carbon dioxide sensor model is established in this embodiment based on the infrared spectroscopy mechanism and the dielectric transduction equation. The above model uses infrared spectroscopy technology to measure the light absorption characteristics at a specific wavelength to infer the carbon dioxide concentration. At the same time, the transduction part of the sensor is optimized in combination with the dielectric transduction equation, thereby improving the sensitivity and accuracy of detection.

[0037] Based on the existing theoretical research, the infrared spectroscopy mechanism and the medium transduction equation are studied in depth to provide theoretical support for the establishment of the MEMS carbon dioxide sensor model. Using mathematical and physical knowledge, the MEMS carbon dioxide sensor model is constructed so that the model uses infrared spectroscopy technology to accurately measure the carbon dioxide concentration and combines the medium transduction equation to optimize the performance of the sensor. Further simulation verification of the model is required. In the embodiment, the accuracy and effectiveness of the model are verified by computer simulation technology, and the model is adjusted and optimized as necessary according to the verification results.

[0038] Furthermore, in order to ensure the practical performance of the MEMS carbon dioxide sensor model, carbon dioxide sensor samples in the monitoring area are randomly selected, and tests are carried out in the actual environment to collect data to verify the practicality of the model. The experimental test data are analyzed to find out the shortcomings or defects of the model, and corresponding optimization and improvement are carried out.

[0039] Then, the MEMS carbon dioxide sensor model is used to analyze the MEMS light source to obtain the light source analysis results. The specific implementation content is as follows:

[0040] According to the requirements of the carbon dioxide sensor model, the appropriate light source type is selected, including but not limited to LED, laser, etc. In addition, the appropriate light source wavelength, power and other parameters will be set according to the model conditions to ensure the matching degree between the MEMS light source and the sensor model. The specific parameter information and simulation information of the MEMS light source can be found in Table 1. The parameters of the MEMS light source are input into the MEMS carbon dioxide sensor model for simulation analysis, and the analysis results of the MEMS light source can be obtained.

[0041] Table 1

[0042]

[0043]

[0044] Parameter table of MEMS light source

[0045] Subsequently, the optical power absorption model and the attenuation coefficient absorption model are introduced to obtain the power analysis results and the attenuation coefficient analysis results. The simulation direction of the sensor core chip is determined by combining the light source analysis results, the power analysis results and the attenuation coefficient analysis results. The specific implementation contents are as follows:

[0046] The optical power absorption model is established based on the optical principle and the working mechanism of the sensor. The optical power absorption model can describe the absorption of light emitted by the light source when passing through the medium, providing a basis for subsequent data calculation and accuracy analysis. The parameters of the MEMS light source are input into the optical power absorption model, and the optical power analysis results are obtained through simulation calculation. Based on this result, the power distribution and changes of the light source can be reflected, which helps to optimize the energy utilization of the sensor.

[0047] In order to more accurately describe the attenuation of light during transmission, the attenuation coefficient absorption model is introduced. This model comprehensively considers the influence of light source, medium and other environmental factors on light attenuation, providing guarantee for accurate measurement. The parameters of MEMS light source and related environmental factors are input into the attenuation coefficient absorption model, and the analysis results of the attenuation coefficient are obtained through simulation calculation, which can reflect the transmission efficiency and stability of light and help optimize the detection accuracy of the sensor.

[0048] Combining the optical power analysis results and the attenuation coefficient analysis results, a comprehensive evaluation of the performance of the MEMS light source can provide a more comprehensive understanding of the performance capabilities of the MEMS light source and provide theoretical support for optimizing the sensor. Furthermore, the method of obtaining light source information in this embodiment is only an optional implementation of the present invention. In one or some other embodiments, the light source analysis method can be modified according to the light source conditions and data characteristics. The light source analysis method can be optimized for specific application scenarios and needs, which can improve the working efficiency and response speed of the sensor and enhance the overall performance.

[0049] The light source analysis results, power analysis results and attenuation coefficient analysis results are sorted out to clarify the value range and change trend of each parameter. Then the sorted results are compared and analyzed to find out the mutual influence relationship and key factors among the three, which helps to gain a deeper understanding of the interaction mechanism between the light source and the sensor.

[0050] According to the comparative analysis results, combined with the actual application needs and performance requirements, the simulation direction of the sensor core chip is determined. The above simulation direction should focus on key factors such as improving sensor performance, including but not limited to improving detection accuracy, reducing noise, and reducing error coefficient.

[0051] In order to ensure the practicality and feasibility of the simulation direction, a simulation model of the sensor core chip can also be established according to the simulation direction. The above model can simulate the key links such as the working principle of the chip, optical signal transmission and processing process, and the actual light source parameters, power parameters and attenuation coefficient parameters are input into the simulation model. A series of simulation experiments are carried out, and the experimental simulation data are analyzed and compared to verify the accuracy and effectiveness of the simulation model.

[0052] According to the simulation experiment results, the sensor core chip in the ground hardware subsystem is optimized and upgraded. In addition, the chip structure needs to be reasonably adjusted and upgraded according to actual conditions to achieve the best performance of the chip.

[0053] Furthermore, in this embodiment, the simulation direction of the sensor core chip is determined by combining the light source analysis results, power analysis results and attenuation coefficient analysis results, which can better understand the working principle and performance of the sensor, and provide strong support for optimizing the sensor design. In one or some other embodiments, the chip structure can be optimized according to the detection requirements and sensor operation conditions, thereby improving the practical performance of the sensor device and reducing costs, so that the sensor can better meet various needs in practical applications and improve the stability and actual performance of the overall system.

[0054] Finally, according to the simulation direction and using simulation software, the three-dimensional structure of the sensor is simulated to obtain the simulation analysis results of the three-dimensional structure; based on the simulation analysis results, the optimal structure of the sensor core chip is determined, and the specific implementation content is as follows:

[0055] In this embodiment, COMSOL simulation software is used to carry out light-heat-electricity simulation in the three-dimensional structure of the sensor, which is also the core link of the optimal design of the sensor device. Specifically, three structures, namely, bridge-type single light source, bridge-type light source array and plate-type single light source, are modeled and analyzed respectively. The performance of each sensor in the ground hardware subsystem can be predicted, and the structure of different sensor devices can be optimized accordingly, thereby obtaining the optimal structure of the chip, improving the working performance of the sensor device, and providing in-situ model support for chip processing.

[0056] In an optional embodiment, suitable simulation software is selected, and COMSOL multi-physics field simulation software is selected in a further embodiment. The above software can simulate and analyze the three-dimensional structure of the sensor in multiple physical fields such as light, heat, and electricity, and can be applied to various needs of actual application scenarios. Then, according to the design scheme of the sensor core chip, a specific chip three-dimensional model is established through the simulation software, and the actual structure and working principle of the chip are reflected based on the model, mainly including key parts such as light source, lens, and detector.

[0057] Furthermore, according to the light source analysis results, power analysis results and attenuation coefficient analysis results, appropriate simulation parameters are set, including but not limited to light source wavelength, power, detector responsivity, etc. The above parameters will directly affect the accuracy of the simulation results.

[0058] In order to ensure that each sensor can collect effective monitoring data, a simulation experiment will be carried out, that is, the simulation software will be simulated to conduct a series of simulation experiments, and the simulation parameters will be continuously adjusted to simulate the performance of the sensor under different conditions, and the simulation data under different conditions will be recorded. The simulation results under different conditions will be analyzed, including the responsiveness, signal-to-noise ratio, dynamic range and other performance indicators of each sensor. By comparing the simulation results under different structures, the optimal structure of the sensor core chip is determined. The above chip structure can achieve the best performance of the equipment and meet the actual application needs. Furthermore, the key parts of the chip structure can be adjusted in detail to improve the overall performance of the sensor.

[0059] Furthermore, based on the above optimal structure, the optimal core chip of the sensor is obtained, and the optimal core chip is set inside the sensor device. The specific implementation content is as follows:

[0060] After the optimization design of the sensor core chip is completed, the actual production of the optimal chip will be carried out. In order to further verify the effectiveness of the chip structure design, this embodiment conducts comprehensive testing on the optimal chip sample and collects actual application data. The above actual data can deeply analyze the performance of the chip in the actual environment, and make necessary adjustments and optimizations to the chip according to actual needs and application data, which can not only reduce the chip development cost and shorten the development cycle, but also provide reliable support for the actual processing of the chip.

[0061] In an optional embodiment, as the demand for miniaturized and integrated sensors grows, the design requirements for miniaturized infrared CO2 gas sensors are also becoming increasingly demanding. Figure 2 The bridge-type single light source "X"-shaped four-arm suspended new structure in this embodiment is designed to solve the shortcomings of traditional sensors in miniaturization, low power consumption, and rapid response, and provide new possibilities for the future development of micro gas sensor technology.

[0062] The structural design features are as follows: The above structure adopts a unique bridge design, combined with an "X"-shaped four-arm support, to achieve a suspended structure, which not only enhances the stability of the structure, but also improves the heat concentration and light energy utilization. In addition, the structure also has a smaller light source area, making it easier to integrate with other microsystems, and through the coupled simulation of light-heat-electric multi-physics fields, the structure is deeply analyzed and optimized, which can comprehensively consider various physical effects and provide strong support for finding the optimal structural solution.

[0063] In order to prove that the above structure has good performance in miniaturization, low power consumption, fast response, etc., experimental analysis is carried out. In an optional embodiment, the temperature distribution in the heating zone of the above structure is uniform, the heat dissipation is low, and the heat is concentrated. At an operating temperature of 407°C, the heating power consumption is 38mw and the thermal response time is 20ms.

[0064] With the in-depth research and experimental verification of the new bridge-type single light source "X"-shaped four-arm support suspended structure, its potential application value in the field of miniaturized infrared CO2 gas sensors has been widely used in other similar types of gas sensors, optoelectronic devices and other fields, contributing to the further development of sensor technology.

[0065] In the optimal chip manufacturing process of this embodiment, deep reactive ion etching technology is used to achieve a major breakthrough in silicon etching technology. Compared with traditional wet etching technology, the DRIE technology of this embodiment has higher etching accuracy and controllability, providing a more advanced process means for MEMS sensor manufacturing.

[0066] Deep reactive ion etching technology can be used to process a variety of materials, such as polysilicon, silicon nitride, silicon dioxide films, etc., demonstrating the wide applicability and flexibility of DRIE technology in material processing. In addition, DRIE technology can achieve an etching depth of hundreds of microns and provide excellent etching effects. Even when the opening is very small, it can still maintain a high aspect ratio and side wall steepness, which helps to manufacture high-performance micro devices. The shape, size and structure of the etching can be precisely controlled, thereby realizing customized micro device manufacturing to meet different application requirements.

[0067] The deep reactive ion etching technology adopts the BOSCH process. By fully and alternately introducing relevant substances into the reaction chamber, efficient deep reactive ion etching is achieved. The alternating introduction method can ensure the stability and accuracy of etching, and also improve the etching rate and aspect ratio. The specific implementation contents are as follows:

[0068]

[0069]

[0070]

[0071]

[0072] Si+F - →SiF x ⑤

[0073] C4 F8 and SF6 are used as passivation gas and etching gas respectively. The first step of the passivation process is shown in reaction equations ① and ②. C4 F8 gas is introduced, and C4 F8 decomposes into ions in the plasma state. base, Base and active F - Base, where Motowa The base reacts with the silicon surface to form a nCF2 polymer passivation film, which effectively prevents the reaction gas from reacting with the side wall, thereby reducing side etching. In the second step of the etching process, as shown in reaction formulas ③④⑤, SF6 gas is introduced to increase the dissociation of F ions. - The passivation film is etched away by reacting with nCF2 and generating volatile gas CF2, and then the silicon substrate is etched. Furthermore, the silicon wafer used in this technical process is a single-sided polished N-type <100> The crystal orientation is 6-inch silicon wafer, the substrate resistivity is 5 to 30Ω.cm, the etching depth is 350um, and the deep groove angle is 86.842°.

[0074] MEMS deep reactive ion etching (DRIE) technology is used to realize the structure of high-precision sensor chips on silicon substrates. Compared with traditional wet etching technology, DRIE technology shows higher etching accuracy and better sidewall steepness. The above vertical deep etching method not only improves the etching depth and aspect ratio, but also significantly reduces the chip size, bringing higher sensitivity and response speed to the optimal sensor chip. At the same time, the chip size is reduced, so that the self-heating efficiency of the chip is further improved, thereby reducing heat dissipation and increasing the emissivity.

[0075] In addition, DRIE technology has better material selectivity and etching control capabilities, so it can process a variety of materials, and can precisely control the shape, size and structure during the etching process. This technology makes the production of sensor chips more flexible and controllable, providing strong support for the manufacture of high-performance and high-reliability sensors.

[0076] In this embodiment, in order to solve the problem of insufficient density of sensor chip coating, ALD and CVD composite coating technology is proposed. ALD and PVD composite coating process are collectively used to develop Pt nano metal heating layer, and high-purity Pt material is used to complete the coating process of light source circuit on silicon substrate, and ALD is used to realize material atomic layer deposition to improve the density of film layer. This technology can realize high density process of film layer, with thickness of 350nm, line width of 800nm, and temperature coefficient of 2500ppm / K. In addition, a three-stage heating method is adopted to accelerate the infrared radiation rate from the inside to the outside, which is 45.6% higher than the self-heating efficiency of traditional process.

[0077] Furthermore, ALD and CVD composite coating technology can be applied to various related fields that require high-density coating, including but not limited to sensor manufacturing, optical devices, microelectronics, etc. Compared with traditional coating technology, the above technology has higher self-heating efficiency, better temperature coefficient and better film density, which can greatly improve detection efficiency and product performance.

[0078] Based on the optimal core chip and related technologies, the perception layer module of temperature sensor, humidity sensor, atmospheric pressure sensor, wind speed sensor and wind direction sensor is optimized and designed. The specific implementation contents are as follows:

[0079] The optimal core chip that has been manufactured will be used to further optimize the design of the perception layer modules of the temperature sensor, humidity sensor, atmospheric pressure sensor, wind speed sensor and wind direction sensor. For the temperature sensor, its sensitive materials and circuit design will be optimized to improve its response speed and accuracy; for the humidity sensor, attention will be paid to the selection and preparation process of its humidity sensitive materials to improve its humidity detection sensitivity and linearity; for the atmospheric pressure sensor, the air chamber structure and pressure sensing element of the sensor will be optimized to improve its pressure detection accuracy and stability; for the wind speed sensor and wind direction sensor, its structural design and measurement algorithm will be optimized to improve its measurement accuracy and response speed of wind speed and wind direction. In addition, the effective integration of different sensors and core chips will be considered to achieve efficient operation of the overall system.

[0080] In this embodiment, a combination of simulation analysis and experimental verification is used to ensure the effectiveness of the optimized design of each sensor module. At the same time, the coordination between the modules is emphasized to ensure that the entire perception layer can achieve efficient and accurate perception functions.

[0081] The sensor optimization design method in this embodiment is only an optional implementation of the present invention. In one or some other embodiments, the device optimization method can be replaced according to actual needs and specific structures of the equipment. The sensor optimization design method is highly flexible and manufacturable, which helps to improve sensor performance, reduce economic costs and shorten development cycles.

[0082] Furthermore, in this embodiment, the ground hardware subsystem also includes a data storage device, a wireless communication device and a hardware main control device. The ground hardware subsystem is an important part of the entire system, which is responsible for the stable interaction of ground equipment, and realizes the functions of collecting, receiving, processing and storing ground monitoring data, as well as sending control instructions. Among them, the data storage device is used to store a large amount of data, including but not limited to the perception data transmitted from the sensor core chip, the status information of the system operation and the working conditions of the sensor device, etc. The data storage device has efficient data reading and writing capabilities and reliable storage capabilities to ensure the integrity and accuracy of ground sensor data. On the other hand, the wireless communication device is conducive to realizing wireless communication with satellites, drones or other ground equipment, including but not limited to the sending and receiving of data. The wireless communication device has high-speed and stable data transmission capabilities to ensure the real-time and credibility of relevant data.

[0083] As the core of the ground hardware subsystem, the hardware master control device is responsible for the control and management of the entire subsystem. It processes and analyzes the perception data transmitted by the sensor core chip and sends corresponding control instructions based on the analysis results. At the same time, the hardware master control device is also responsible for interacting with the host computer software to upload data and receive instructions.

[0084] In this embodiment, the ground hardware subsystem works together through functional modules such as data storage, wireless communication and hardware master control to realize functions such as processing, analysis and storage of perception data acquired by the sensor core chip. At the same time, corresponding control instructions are sent according to actual needs and system status, which helps to improve the practical performance and stability of the satellite-ground coordinated regional greenhouse gas monitoring system, and provides strong support for the intelligence and automation of ground equipment.

[0085] Furthermore, the data storage device is electrically connected to the hardware main control device and the sensor device. In order to achieve efficient processing and complete storage of monitoring data from different sources, as well as centralized management and control of hardware, the data storage device is connected to the hardware main control device via a high-speed data bus to ensure that the sensed data can be stored in the data storage device in real time and quickly, thereby improving the efficiency and stability of data transmission and reducing the possibility of data loss and delay.

[0086] At the same time, the sensor device and the hardware main control device are also electrically connected through a specific interface, so that the hardware main control device can centrally control and manage each sensor device, realize unified data collection, processing and transmission, improve the integration and maintainability of the entire system, and make the satellite-ground coordinated regional greenhouse gas monitoring system more stable and reliable.

[0087] In this embodiment, the communication between the data storage device and the hardware main control device and the sensor device is achieved through electrical connection to further improve the performance and stability of the entire system. This is only an optional condition of the present invention. In one or some other embodiments, the ground hardware subsystem can be optimized and modified according to the monitoring requirements and device conditions, which helps to ensure the accuracy and completeness of the data and provide strong support for the intelligence and automation of ground equipment.

[0088] Then the communication connection between the wireless communication device and the hardware main control device and the sensor device further enhances the communication capability of the system. The above connection mode enables the hardware main control device and the sensor device to exchange data and transmit instructions through the wireless communication device, realizing the functions of remote control and data sharing.

[0089] Specifically, the wireless communication device is connected to the hardware master control device through a wireless communication protocol, so that the hardware master control device can receive the monitoring data of the sensor device in real time and send control instructions to the sensor device, thereby improving the flexibility and scalability of the system and enabling the ground equipment to better adapt to different application scenarios.

[0090] At the same time, the wireless communication device and the sensor device are also connected through a specific interface to ensure that the sensor device sends the perception data to the wireless communication device for transmission, so that the sensor device can send data to the ground equipment in real time and receive control instructions from the ground equipment.

[0091] In this embodiment, the communication connection between the wireless communication device and the hardware main control device and the sensor device further improves the communication capability and scalability of the entire system, helps to ensure the real-time and accuracy of the data, and provides strong support for the remote control and intelligence of ground equipment.

[0092] S3. The communication subsystem receives satellite remote sensing data and ground sensing data, processes the satellite remote sensing data and ground sensing data, and outputs the greenhouse gas analysis results of fixed point sources. The specific implementation contents are as follows:

[0093] In this embodiment, the communication subsystem will simultaneously receive satellite remote sensing data and ground sensing data and assemble a greenhouse gas data set for monitoring the area, then process the data set and finally output the greenhouse gas analysis results of the fixed point source.

[0094] The communication subsystem receives satellite remote sensing data and ground sensor data through wireless communication devices. The above data include but are not limited to environmental parameters such as temperature, humidity, air pressure, wind speed, wind direction, and spectral information of the target object; after receiving the data, the relevant data set is formed, and the communication subsystem performs intelligent preprocessing on the data set, including denoising, filtering, correction and other processing steps to improve the accuracy and reliability of the data set.

[0095] Based on the pre-processed data set, the communication subsystem analyzes and organizes the data, extracting key information about greenhouse gases, including but not limited to gas concentrations, identification of emission sources, and detailed data organization. After a series of processing steps, the communication subsystem can accurately present the greenhouse gas analysis results of fixed point sources.

[0096] The output forms of the analysis results are various, including not only the pollution source location diagram of the fixed point source and the carbon emission concentration curve diagram, but also the ground sensor data is compared with the satellite remote sensing data to generate a comparison diagram. In order to more intuitively understand the carbon dioxide change trend in the monitored area, a carbon dioxide change trend diagram is also provided. In this embodiment, various charts and schematic diagrams are used to make the greenhouse gas analysis results of the fixed point source more intuitive and easy to understand, which helps to quickly obtain key information and better understand the environmental data and meteorological change trends, which is conducive to the monitoring of fixed pollution sources and the verification of satellite data monitoring results.

[0097] Furthermore, the greenhouse gas detection system analysis and control strategy can be preset according to the feedback information control of the communication subsystem, which is conducive to sending control instructions to the hardware main control device to adjust the environmental parameters of the greenhouse or perform corresponding operations.

[0098] The processing steps of the communication subsystem on satellite remote sensing data and ground sensor data in the embodiment are only an optional condition of the present invention. In one or some other embodiments, the ground communication subsystem can be adjusted according to the monitoring and analysis requirements and verification conditions, which helps to improve the accuracy and reliability of greenhouse gas monitoring and provide technical support for the inversion and verification of satellite data of greenhouse gases.

[0099] S4. The monitoring service subsystem receives the greenhouse gas analysis results and analyzes the overall carbon dioxide emission level in the monitoring area in combination with greenhouse gas analysis technology. The specific steps and implementation contents are as follows:

[0100] The monitoring service subsystem is combined with greenhouse gas analysis technology, which includes the Internet of Things, cloud computing, artificial intelligence, and AI big data analysis. The greenhouse gas analysis results are then evaluated based on the monitoring service subsystem and greenhouse gas analysis technology to obtain the carbon dioxide emissions in the monitored area.

[0101] The monitoring service subsystem utilizes greenhouse gas analysis technology, and the technology integrates the technical capabilities of the Internet of Things, cloud computing, artificial intelligence and AI big data analysis. Based on this, the satellite-ground collaborative regional greenhouse gas monitoring system can effectively monitor and analyze greenhouse gas-related information, especially the carbon dioxide emissions in the monitoring area or fixed point sources.

[0102] After receiving the greenhouse gas analysis results, schematic diagrams and comparison tables output by the communication subsystem, the monitoring subsystem performs in-depth processing and analysis through the cloud computing platform and related technologies, thereby extracting important information such as gas emissions, emission sources and fixed pollution in the monitoring area or fixed point sources.

[0103] In an optional embodiment, an ecosystem inversion model is further set up in the monitoring service subsystem, and the monitoring service subsystem uses greenhouse gas analysis results, greenhouse gas analysis technology and the ecosystem inversion model to analyze the overall carbon dioxide emission level in the monitoring area.

[0104] As the concentration of greenhouse gases in the monitoring area and fixed point sources increases, the level of carbon dioxide emissions is also a key monitoring indicator. The monitoring service subsystem can accurately evaluate and predict the level of carbon dioxide emissions in the monitoring area and fixed point sources through the ecosystem inversion model.

[0105] In this embodiment, the ecosystem inversion model can use historical data for data simulation, and then invert the past carbon dioxide emission levels of the monitoring area or fixed point source. By analyzing historical meteorological, environmental, economic and social activity data, the historical carbon dioxide emissions can be estimated, and the historical emission trends of the monitoring area or fixed point source can be understood, thereby calibrating and verifying the accuracy of emission detection devices and equipment.

[0106] Based on the inversion model, the future level of carbon dioxide emissions can be predicted. Based on the results of greenhouse gas analysis, satellite monitoring data and ground sensor data, the inversion model can estimate the carbon dioxide emissions in the future, which is helpful for monitoring the atmospheric ambient air, fixed pollution sources and carbon dioxide concentration of fixed point sources. In addition, the satellite remote sensing data of the satellite subsystem can be inspected and analyzed to fully understand and evaluate the carbon emissions and provide support for subsequent emission reduction strategies.

[0107] The above-mentioned monitoring subsystem has a certain degree of accuracy and reliability. The monitoring subsystem uses advanced greenhouse gas analysis technology to continuously pay attention to and analyze the monitoring results. It also provides a reliable technical basis for subsequent analysis of gas emissions, emission sources, etc. through continuous optimization of algorithms and calibration technology.

[0108] The monitoring subsystem combines Internet of Things technology and cloud computing platform to further realize real-time transmission and processing of analysis results. At the same time, it integrates artificial intelligence and AI big data analysis technology to conduct dynamic data monitoring and trend forecasts of substances such as carbon dioxide, and can provide timely feedback and organize carbon emission situations.

[0109] The monitoring subsystem also uses cloud computing platforms and related technologies to present new information in the form of more intuitive and easy-to-understand charts and data, and can transmit relevant data information to the Web interface, mobile applications and work display screens. It can view, query and interact with relevant information of fixed point sources in real time, which is conducive to the comprehensive understanding, management and verification of greenhouse gas emission data.

[0110] Furthermore, this monitoring subsystem has certain security and privacy protection functions. During data transmission and processing, the monitoring subsystem takes strict security measures to ensure the confidentiality and integrity of the data. At the same time, through data encryption, access control and other means, the security and confidentiality of relevant privacy and data are guaranteed.

[0111] Finally, the comprehensive application monitoring service subsystem based on advanced technology can conduct a comprehensive evaluation of greenhouse gas analysis results, obtain detailed information on carbon dioxide emissions in the monitored area, and provide a scientific basis for formulating emission reduction strategies and measures.

[0112] Based on the above analysis of carbon dioxide emissions in the monitoring area, the overall carbon dioxide emission level is analyzed, and the specific implementation contents are as follows:

[0113] After completing the design of the satellite-ground integrated carbon monitoring intelligent visualization platform, the greenhouse gas concentration can be monitored in real time, and the relevant inversion results can be presented in a dynamic visualization manner, thereby realizing the monitoring and management of visualized data. In this embodiment, the dynamic visualization method includes but is not limited to: charts, spatial distribution diagrams, and data dynamic animations, etc.

[0114] The charts include bar charts, pie charts, column charts, line charts, etc., which can intuitively display the distribution, changes and relationships of data; spatial distribution diagrams combine emission data with geographic location information through geographic information systems, and display the distribution of emission sources, spatial changes in emissions, etc. in the form of maps; data dynamic animations can indicate the size or changes of data through the depth or heat of color, and thus intuitively display the spatial distribution and density of data. They can also display the change process of data through animation, which is conducive to understanding the dynamic characteristics and trends of data. In addition, for multi-dimensional data, data cubes or pivot tables can be used to display the different dimensions and summary information of data.

[0115] The above visualization method can be used to quickly understand the distribution and changing trends of carbon emissions, which is conducive to the interaction of greenhouse gas system visualization data. By in-depth observation of the data, potential emission problems can be discovered and corresponding environmental governance measures can be taken. By automating and simplifying the carbon emission monitoring and management process, efficiency can be improved and management costs can be reduced.

[0116] The monitoring subsystem aggregates and organizes the carbon dioxide emission data, including but not limited to the emission data, timestamp, geographic location and other information of each monitoring point, so as to ensure the integrity and accuracy of the monitoring area data. Furthermore, the monitoring area can be divided into several sub-areas according to actual needs and monitoring scope, and the baseline emission level of each area can be set, where the baseline emission level can be set according to historical data, industry standards and regional differences to ensure the rationality and accuracy of the analysis.

[0117] Based on the key information received by the monitoring subsystem, such as gas emissions, main emission sources and environmental data, the carbon dioxide emission level of each sub-region is calculated, and the changing trend of emission levels, spatial distribution and correlation with local economic, industrial and other factors are analyzed.

[0118] The carbon dioxide emission level of each sub-area is then compared with the set benchmark emission level and satellite remote sensing data. Based on the comparison results, the accuracy and credibility of the satellite remote sensing data collected by the satellite subsystem can be verified. On the other hand, it can be evaluated whether the monitored area or fixed point source meets the expected environmental goals or emission standards. For the sub-areas that exceed the benchmark, their emission sources, emissions and potential influencing factors can be further analyzed, and corresponding control and emission reduction recommendations can be put forward.

[0119] Verifying the analysis results with the satellite data monitoring results can verify the accuracy and reliability of the monitoring subsystem and satellite data monitoring results. If the data of the two are consistent or the difference is within an acceptable range, it means that the satellite data monitoring results have a certain degree of credibility and can provide an accurate basis for carbon emission management. On the other hand, combining technologies such as geographic information systems (GIS) to track and locate the location of emission sources can help to better understand the emission sources and distribution of pollutants, provide support for pollution control and environmental supervision, and then compare and integrate the analysis results of the carbon dioxide emission monitoring subsystem, satellite data monitoring results and actual data information, thereby promoting the comprehensive application of multi-source data, providing more comprehensive and multi-dimensional data support for carbon emission management, and improving the scientificity and accuracy of decision-making.

[0120] In this embodiment, the analysis results of the monitoring service subsystem in the satellite-ground coordinated regional greenhouse gas monitoring system are verified with the satellite data monitoring results, which can improve the accuracy and reliability of the carbon emission data analysis results, facilitate the discovery of abnormal emissions, promote multi-source data fusion, and strengthen regional greenhouse gas emission reduction supervision.

[0121] Furthermore, the method of comparing and verifying the system analysis results and satellite remote sensing data in this embodiment is only an optional condition of the present invention. In one or some other embodiments, the satellite data verification method can be replaced according to environmental conditions and material emissions, so as to better adapt to various environmental conditions and emissions, which helps to expand the application scope of the system and improve the practicality of the satellite-ground coordinated regional greenhouse gas monitoring system.

[0122] See also Figure 3In an optional embodiment, the present invention further provides a satellite-ground coordinated regional greenhouse gas monitoring system, the system comprising a chip control subsystem and an initiation subsystem, and executing the specific steps of the digital electronic detonator initiation control system and related embodiments provided by the present invention. The satellite-ground coordinated regional greenhouse gas monitoring system of the present invention has a complete structure, objective stability, and can efficiently execute the specific steps of the digital electronic detonator initiation control system of the present invention, thereby improving the overall applicability and practical application capability of the present invention.

[0123] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein by equivalents. These modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention, and they should all be included in the scope of the claims and specification of the present invention.

Claims

1. A satellite-ground coordinated regional greenhouse gas monitoring system, characterized in that: The satellite-ground coordinated regional greenhouse gas monitoring system includes: a satellite subsystem, a ground hardware subsystem, a communication subsystem and a monitoring service subsystem; Acquiring satellite remote sensing data through the satellite subsystem, wherein the satellite remote sensing data includes atmospheric environment data and pollution source data of fixed point sources; Acquiring ground sensing data using the ground hardware subsystem, wherein the ground hardware subsystem includes a sensor device, and an optimal chip structure is arranged in the sensor device; The communication subsystem receives the satellite remote sensing data and the ground sensing data, processes the satellite remote sensing data and the ground sensing data, and outputs a greenhouse gas analysis result of a fixed point source; The monitoring service subsystem receives the greenhouse gas analysis results and analyzes the overall carbon dioxide emission level in the monitoring area in combination with the greenhouse gas analysis technology; The obtaining of ground sensing data by using the ground hardware subsystem comprises: A temperature sensor, a humidity sensor, an atmospheric pressure sensor, a wind speed sensor and a wind direction sensor are arranged in the ground hardware subsystem, and ground sensing data is obtained by using the temperature sensor, the humidity sensor, the atmospheric pressure sensor, the wind speed sensor and the wind direction sensor; The setting of the optimal chip structure in the sensor device includes: According to the infrared spectrum mechanism and medium energy conversion equation MEMS CO2 sensor model; Using the MEMS Carbon dioxide sensor model analysis MEMS Light source, to obtain light source analysis results; The optical power absorption model and the attenuation coefficient absorption model are introduced to obtain the power analysis results and the attenuation coefficient analysis results; Determine the simulation direction of the sensor core chip by combining the light source analysis result, the power analysis result and the attenuation coefficient analysis result; According to the simulation direction and using simulation software, the three-dimensional structure of the sensor is simulated to obtain a simulation analysis result of the three-dimensional structure; Determining the optimal structure of the sensor core chip based on the simulation analysis results; Obtaining an optimal core chip of the sensor based on the optimal structure; The optimal core chip is arranged inside the sensor device; Based on the optimal core chip, the perception layer module design of the temperature sensor, humidity sensor, atmospheric pressure sensor, wind speed sensor and wind direction sensor is optimized.

2. The satellite-ground coordinated regional greenhouse gas monitoring system according to claim 1 is characterized in that: The ground hardware subsystem also includes: a data storage device, a wireless communication device and a hardware main control device; The data storage device is electrically connected to the hardware main control device and the sensor device respectively; The wireless communication device is communicatively connected to the hardware main control device and the sensor device respectively.

3. The satellite-ground coordinated regional greenhouse gas monitoring system according to claim 1 is characterized in that: The monitoring service subsystem receives the greenhouse gas analysis results and analyzes the overall carbon dioxide emission level of the monitoring area in combination with the greenhouse gas analysis technology, including: The monitoring service subsystem is combined with greenhouse gas analysis technology, which includes the Internet of Things, cloud computing, artificial intelligence, AI Big data analysis; Evaluate the greenhouse gas analysis results based on the monitoring service subsystem and the greenhouse gas analysis technology to obtain the carbon dioxide emissions in the monitoring area; The overall carbon dioxide emission level in the monitored area is analyzed based on the carbon dioxide emission situation.

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