A multi-modal reconfigurable control method and device for a micro-nano robot cluster based on coupling field

Abstract

The present invention relates to the field of micro-nanorobotics, and in particular, to a coupled-field-based multimodal reconfigurable control method and device for a micro-nanorobotic cluster. The method comprises a magnetic field generating component, an ultrasonic field generating component, and a microscope for observation. The magnetic field generating component comprises a uniaxial Helmholtz coil, and the ultrasonic field generating component comprises a circular ultrasonic transducer, a circular silicon wafer, a polyimide patch, and a glass sheet. The method includes the following steps: S1. Preparing a micro-nanorobotic device, which is a magnetic microsphere composed of ferric oxide coated with silicon dioxide; S2. Under the coupling of an ultrasonic and magnetic field, suspending the micro-nanorobotic device within a cluster area to form a cluster; S3. Adjusting the characteristic parameter combination of the magnetic and ultrasonic fields to achieve multimodal and reconfigurable control of the boundaries, morphology, and number of the micro-nanorobotic cluster. The present invention enables regulation of the boundaries, morphology, and number of the micro-nanorobotic cluster.

Description

Technical Field

[0001] The present invention relates to the field of micro-nano robots, and in particular to a method and device for multi-modal reconfigurable control of a micro-nano robot cluster based on a coupling field. Background Art

[0002] A micro-nano robot is a tiny functional device or apparatus with a size between micrometers and nanometers that can convert other forms of energy, such as chemical energy, light energy, electrical energy, magnetic energy, and ultrasonic energy, into mechanical energy for its own motion and complete complex tasks in a tiny space. As one of the cutting-edge research areas of micro-nanotechnology, micro-nano robots have the advantages of small size, light weight, and a high thrust-to-weight ratio. They have significant application prospects in sensing and detection, micro-nano manufacturing, biomedicine, and other fields. However, due to the limitations of the size and structure of the micro-nano robot itself, the movement and load capacity of the micro-nano robot unit are very limited, the range of action is narrow, and the effect of action is poor, which greatly restricts the application of micro-nano robots in micro-nano sensing, micro-nano surgery, and treatment.

[0003] Swarm behavior is widely present in biological, physical, and artificial systems. Compared to individual entities, swarms exhibit greater intelligence and flexibility. For example, biological swarms can autonomously perform complex movements such as formation, formation transitions, and obstacle avoidance. However, the swarm behavior of existing micro-nano robots is mostly achieved and controlled through a single external physical field. This single control method has poor controllability and is difficult to meet the multimodal and reconfigurable control requirements of micro-nano robot swarms in complex environments. This greatly limits the application of micro-nano robot swarms in fields such as biomedicine, environmental protection, and micro-nano sensing. Therefore, there is an urgent need to propose a micro-nano robot swarm control method based on coupled fields and a control device that meets the control requirements of micro-nano robot swarms under coupled fields. This method can overcome the limitations of existing micro-nano robots in swarm control and achieve flexible, multimodal, and reconfigurable control of micro-nano robot swarms. Summary of the Invention

[0004] The purpose of the present invention is to provide a multimodal reconfigurable control method of a micro-nano robot cluster based on a coupling field, and to provide a micro-nano robot cluster control device based on a coupling field, which can realize the regulation of the boundaries, shape and number of the micro-nano robot cluster.

[0005] The purpose of the present invention is achieved through the following technical solutions:

[0006] A multimodal reconfigurable control device for a micro-nano robot cluster based on a coupled field is characterized by comprising a magnetic field generating component, an ultrasonic field generating component and a microscope for observation. The magnetic field generating component comprises a uniaxial Helmholtz coil, a signal generator generates a sinusoidal wave signal, which is amplified by a power amplifier and then input into the uniaxial Helmholtz coil as a signal source to generate a unidirectional uniform oscillating magnetic field. The ultrasonic field generating component comprises a circular ultrasonic transducer, a circular silicon wafer, a polyimide patch and a glass sheet. The polyimide patch is used to construct a micro-nano robot cluster area. A signal generator generates a sinusoidal wave signal which is amplified by a power amplifier and then input into the circular ultrasonic transducer as a signal source. The circular ultrasonic transducer converts the input electrical signal into mechanical vibration, which propagates along the circular silicon wafer into the micro-nano robot cluster area in the form of a planar ultrasonic wave. Under the reflection of the glass sheet, an ultrasonic standing wave field is formed in the micro-nano robot cluster area.

[0007] Furthermore, to ensure the formation of an ultrasonic standing wave field within the micro-nano robot cluster area, the thickness of the polyimide patch used is 250 μm, corresponding to half the wavelength of the ultrasonic wave.

[0008] A multi-modal reconfigurable control method for a micro-nano robot cluster based on a coupling field comprises the following steps:

[0009] S1. Prepare a micro-nano robot, wherein the micro-nano robot is a magnetic microsphere of ferric oxide coated with silicon dioxide;

[0010] S2. Under the coupling of ultrasonic and magnetic fields, the micro-nano robots are suspended in the cluster area and form a cluster;

[0011] S3. Adjust the characteristic parameter combination of the magnetic field and ultrasonic field to achieve multimodal and reconfigurable control of the boundaries, shape and number of the micro-nano robot cluster.

[0012] Furthermore, the specific method of the micro-nano robot cluster boundary control is:

[0013] a1. A 3MHz, 10V sinusoidal wave signal amplified twice is introduced into the circular ultrasonic transducer, activating the ultrasonic field generating component. An ultrasonic standing wave field is formed within the micro-nano robot cluster area. Under the influence of the acoustic field, the micro-nano robots levitate within the cluster area and form a cluster with a circular boundary.

[0014] a2. A 10Hz, 4V sinusoidal signal amplified four times by a power amplifier is fed into the uniaxial Helmholtz coil, activating the magnetic field generating component. A uniform oscillating magnetic field with a frequency of 10Hz, perpendicular to the plane of the cluster, is formed within the micro-nano robot cluster. The boundary of the micro-nano robot cluster changes from a circle to a gear shape under the action of the magnetic field.

[0015] a3. Increase the oscillation frequency of the oscillating magnetic field from 10 Hz to 30 Hz, and the boundary of the micro-nano robot cluster will change from a gear shape to a circle.

[0016] Furthermore, the boundary of the micro-nano robot cluster is controlled by controlling the relative magnitudes of the ultrasonic field and the magnetic field.

[0017] Furthermore, when the ultrasonic field amplitude is increased and the magnetic field amplitude is decreased, the boundary of the micro-nano robot cluster will appear circular; when the magnetic field amplitude is increased and the ultrasonic field amplitude is decreased, the boundary of the micro-nano robot cluster will change from a circle to a gear shape.

[0018] Furthermore, by controlling the characteristic parameters of the magnetic field, the boundary characteristic parameters of the micro-nano robot cluster can be controlled; that is, by controlling the magnetic field strength and magnetic field frequency, the tooth height and envelope area of ​​the micro-nano robot cluster can be controlled.

[0019] Furthermore, when the applied magnetic field intensity is increased, the height of the gear-shaped boundary of the micro-nano robot cluster body will increase, while the envelope area of ​​the boundary will decrease; when the applied magnetic field frequency is adjusted within the range of 0-10Hz, the height of the gear-shaped boundary of the micro-nano robot cluster body increases with the increase of the magnetic field frequency, while the envelope area of ​​the gear-shaped boundary of the micro-nano robot cluster body decreases with the increase of the magnetic field frequency; when the applied magnetic field frequency is adjusted within the range of 10-30Hz, the height of the gear-shaped boundary of the micro-nano robot cluster body decreases with the increase of the magnetic field frequency, while the envelope area of ​​the gear-shaped boundary of the micro-nano robot cluster body increases with the increase of the magnetic field frequency.

[0020] Furthermore, the specific method of controlling the morphology of the micro-nano robot cluster is as follows:

[0021] b1. Adjust the polyimide patch in the ultrasonic field generating component to different shapes;

[0022] b2. A 3 MHz, 10 V sine wave signal amplified twice is introduced into the circular ultrasonic transducer, and the ultrasonic field generating component is activated;

[0023] b3. Since the shape of the polyimide patch affects the lateral propagation of ultrasound within the micro-nano robot cluster area, and thus affects the sound pressure distribution within the ultrasonic field, the reversible and reconfigurable transformation of the micro-nano robot cluster between different forms is achieved.

[0024] Furthermore, the specific method for controlling the number of micro-nano robot clusters is:

[0025] c1. A 3MHz, 10V sine wave signal amplified twice is fed into the circular ultrasonic transducer, and the ultrasonic field generating component is activated. Under the influence of the acoustic field, the micro-nano robots levitate within the cluster area and form a cluster.

[0026] c2. Adjust the frequency of the sinusoidal wave signal input to the circular ultrasonic transducer to 2 MHz, and two micro-nano robot clusters will be formed in the micro-nano robot cluster area;

[0027] c3. Adjust the frequency of the sinusoidal wave signal input to the circular ultrasonic transducer to 5 MHz. Three micro-nano robot clusters will be formed in the micro-nano robot cluster area. By controlling the frequency of the input sinusoidal wave signal, the number of micro-nano robot clusters can be reversibly controlled.

[0028] Beneficial effects of the present invention:

[0029] The method of controlling the micro-nano robot cluster through the coupling field of magnetic field and ultrasonic field can be applied to magnetic micro-nano robots of various sizes, shapes and materials, and has a wide range of adaptability; by adjusting the characteristic parameters of the magnetic field and ultrasonic field, multimodal and reconfigurable control of characteristic parameters such as the boundary, shape and number of the micro-nano robot cluster can be achieved; compared with the method of controlling the micro-nano robot cluster using a single physical field, the method of using the coupling field for control has the advantages of more adjustable parameters, a wide adjustable range, and strong control flexibility; by pre-programming the characteristic parameters of the coupling field, the micro-nano robot cluster can be automated and remotely wirelessly controlled, which is convenient to control and does not require human intervention, greatly saving manpower and material resources. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 This is a scanning electron microscope image of a magnetic micro-nano robot;

[0031] Figure 2 This is the overall composition diagram of the micro-nano robot cluster control device;

[0032] Figure 3 This is a diagram of the boundary experiment of micro-nano robot cluster controlled by coupling field;

[0033] Figure 4 Boundary data diagram of micro-nano robot cluster controlled by coupling field;

[0034] Figure 5 This is the experimental diagram of coupling field control of micro-nano robot cluster morphology;

[0035] Figure 6 Experimental diagram of controlling the number of micro-nano robot clusters using coupling fields.

[0036] In the picture:

[0037] 1-Microscope; 2-Glass slide; 3-Polyimide patch; 4-Circular silicon wafer; 5-Circular ultrasonic transducer; 6-Single-axis Helmholtz coil; 7-Micro-nano robot cluster area. DETAILED DESCRIPTION

[0038] like Figure 2 As shown in the figure, a multi-modal reconfigurable control device for a micro-nano robot cluster based on a coupling field is described in detail:

[0039] A coupled-field-based multimodal reconfigurable control device for a micro-nanorobotic swarm includes a magnetic field generating component and an ultrasonic field generating component, and is observed using an upright microscope 1. A single-axis Helmholtz coil 6 serves as the magnetic field generating component of the swarm control device. A signal generator generates a 10Hz, 4V sinusoidal signal. After being amplified fourfold by a power amplifier, the signal is input into the single-axis Helmholtz coil 6 as a signal source, generating a unidirectional uniform oscillating magnetic field. The generated uniform oscillating magnetic field has a maximum magnetic field intensity of approximately 3.71mT. The ultrasonic field generating component consists of a circular ultrasonic transducer 5, a circular silicon wafer 4, a polyimide patch 3, and a glass wafer 2. The circular ultrasonic transducer 5 is made of lead zirconate titanate and has a resonant frequency of 3MHz. A 3MHz, 10V sinusoidal signal is generated by a signal generator, amplified twofold by a power amplifier, and then input into the circular ultrasonic transducer 5 as a signal source. Based on the inverse piezoelectric effect, the circular ultrasonic transducer 5 converts the input electrical signal into mechanical vibrations, which propagate as planar ultrasonic waves along the circular silicon wafer 4 and into the micro-nanorobotic cluster region 7. Reflected by the glass sheet 2, an ultrasonic standing wave field forms within the micro-nanorobotic cluster region 7. The polyimide patch 3 is used to construct the micro-nanorobotic cluster region 7. To ensure the formation of the ultrasonic standing wave field within the micro-nanorobotic cluster region 7, the polyimide patch 3 has a thickness of 250 μm, corresponding to half the wavelength of ultrasonic waves.

[0040] Further, the micro-nano robot is described in detail:

[0041] The micro-nano robot is a magnetic microsphere of ferric oxide coated with silicon dioxide, with a diameter of 8 microns, which can be obtained through commercial channels. The scanning electron microscope image of the magnetic micro-nano robot is as follows: Figure 1 As shown in Figure 2 . Because the micro-nano robot is composed of ferric oxide, which is paramagnetic, it can respond to the external magnetic field when it is applied. Furthermore, when an ultrasonic pressure gradient is generated within the space where the micro-nano robot resides, the micro-nano robot can also respond to the external ultrasonic field.

[0042] Furthermore, a multi-modal reconfigurable control method for a micro-nano robot cluster based on coupling fields is described in detail:

[0043] A multimodal and reconfigurable control method for a micro-nano robot cluster based on the coupling field of a magnetic field and an ultrasonic field can realize the control of the boundary, shape and number of the micro-nano robot cluster.

[0044] The specific method of micro-nano robot cluster boundary control is:

[0045] a1. A 3 MHz, 10 V sine wave signal amplified twice is fed into the circular ultrasonic transducer 5, activating the ultrasonic field generating component. An ultrasonic standing wave field is formed within the micro-nano robot cluster area 7. Under the influence of the acoustic field, the micro-nano robots levitate within the cluster area and form a cluster with a circular boundary.

[0046] a2. A 10 Hz, 4 V sinusoidal signal amplified four times by a power amplifier is fed into the uniaxial Helmholtz coil 6, activating the magnetic field generating component. A uniform oscillating magnetic field with a frequency of 10 Hz, perpendicular to the plane of the cluster, is formed within the micro-nano robot cluster area 7. The boundary of the micro-nano robot cluster changes from a circle to a gear shape under the action of the magnetic field.

[0047] a3. Increase the oscillation frequency of the oscillating magnetic field from 10 Hz to 30 Hz, and the boundary of the micro-nano robot cluster will change from a gear shape to a circle.

[0048] Furthermore, in addition to controlling the frequency of the magnetic field, controlling the relative magnitude of the ultrasonic field and the magnetic field amplitude can also achieve control of the boundaries of the micro-nano robot cluster, such as Figure 3 As shown;

[0049] The specific control method is as follows: when the ultrasonic field amplitude is increased and the magnetic field amplitude is decreased, the micro-nano robot cluster boundary will take on a circular shape; when the magnetic field amplitude is increased and the ultrasonic field amplitude is decreased, the micro-nano robot cluster boundary will change from a circle to a gear shape. In summary, by adjusting the characteristic parameters of the applied ultrasonic and magnetic fields, the micro-nano robot cluster boundary can be reconfigured between a circle and a gear shape.

[0050] Furthermore, by controlling the characteristic parameters of the magnetic field, the boundary characteristic parameters of the micro-nano robot cluster can be controlled, such as Figure 4 As shown;

[0051] The specific control method is as follows: when the applied magnetic field intensity is increased, the height of the gear-shaped boundary of the micro-nano robot cluster increases, while the envelope area of ​​the boundary decreases. When the applied magnetic field frequency is adjusted within the range of 0-10Hz, the height of the gear-shaped boundary of the micro-nano robot cluster increases with the increase of the magnetic field frequency, while the envelope area of ​​the gear-shaped boundary of the micro-nano robot cluster decreases with the increase of the magnetic field frequency. When the applied magnetic field frequency is adjusted within the range of 10-30Hz, the height of the gear-shaped boundary of the micro-nano robot cluster decreases with the increase of the magnetic field frequency, while the envelope area of ​​the gear-shaped boundary of the micro-nano robot cluster increases with the increase of the magnetic field frequency.

[0052] like Figure 5 As shown in Figure 2, the specific method for controlling the morphology of a micro-nano robot cluster is as follows:

[0053] b1. Adjust the polyimide patch 3 in the ultrasonic field generating component to different shapes, such as square, triangle, crescent, bow tie, etc.;

[0054] b2. A 3 MHz, 10 V sine wave signal amplified twice is fed into the circular ultrasonic transducer 5, and the ultrasonic field generating component is activated;

[0055] b3. Since the shape of the polyimide patch 3 affects the lateral propagation of ultrasound in the micro-nano robot cluster area 7, and thus affects the sound pressure distribution in the ultrasonic field, the reversible and reconfigurable transformation of the micro-nano robot cluster between different shapes such as square, triangle, crescent, bow tie, etc. is achieved.

[0056] like Figure 6 As shown in Figure 2, the specific method for controlling the number of micro-nano robot clusters is:

[0057] c1. A 3 MHz, 10 V sine wave signal amplified twice is fed into the circular ultrasonic transducer 5, and the ultrasonic field generating component is activated. Under the action of the acoustic field, the micro-nano robots levitate within the cluster area and form a cluster.

[0058] c2. Adjust the frequency of the sinusoidal wave signal input to the circular ultrasonic transducer 5 to 2 MHz, and two micro-nano robot clusters will be formed in the micro-nano robot cluster area;

[0059] c3. Adjust the frequency of the sinusoidal wave signal input to the circular ultrasonic transducer 5 to 5 MHz. Three micro-nano robot clusters will be formed in the micro-nano robot cluster area. By controlling the frequency of the input sinusoidal wave signal, the number of micro-nano robot clusters can be reversibly controlled.

[0060] In summary, by pre-programming the magnetic field and ultrasonic field characteristic parameters of the micro-nano robot cluster control device, the automatic and wireless remote control of the micro-nano robot cluster boundary, shape and number can be achieved.

[0061] The basic principles of the present invention are:

[0062] The micro-nano robot is a spherical micro-nano robot made of silicon dioxide coated with ferric oxide, which can be obtained commercially. The micro-nano robot has paramagnetism and can respond to external magnetic and ultrasonic field stimulation.

[0063] The multimodal, reconfigurable control method for a micro-nanorobotic cluster is achieved through the coupled regulation of magnetic and ultrasonic fields. First, under the coupled effects of the ultrasonic and magnetic fields, the micro-nanorobotics levitate within a cluster area and form a cluster. Second, the amplitude and frequency of the alternating current signals input to the magnetic and ultrasonic field generating components are adjusted to control the characteristic parameter combination of the magnetic and ultrasonic fields generated by the devices. Ultimately, multimodal and reconfigurable control of the boundaries, morphology, and number of the micro-nanorobotic cluster is achieved.

[0064] The micro-nanorobotic cluster control device based on magnetic field and ultrasonic field coupling consists of two components: a magnetic field generating component and an ultrasonic field generating component. Observation is performed using a microscope 1. The magnetic field generating component is a uniaxial Helmholtz coil 6. A signal generator generates a sinusoidal signal, which is amplified by a power amplifier and then input into the uniaxial Helmholtz coil 6 as a signal source. The uniaxial Helmholtz coil 6 generates a spatially oscillating magnetic field perpendicular to the plane of the micro-nanorobotic cluster. The ultrasonic field generating component consists of a circular ultrasonic transducer 5, a circular silicon wafer 4, a polyimide patch 3, and a glass sheet 2. The signal generator generates a sinusoidal signal, which is amplified by a power amplifier and then input into the ultrasonic transducer as a signal source. The polyimide patch 3 is used to construct the micro-nanorobotic cluster area 7. The circular ultrasonic transducer 5 converts the input high-frequency electrical signal into mechanical vibrations, which propagate as planar ultrasonic waves along the circular silicon wafer 4 into the micro-nanorobotic cluster area 7. Reflected by the glass sheet 2, an ultrasonic standing wave field is formed within the micro-nanorobotic cluster area 7.

Claims

1. A multimodal reconfigurable control method for a micro-nano robot cluster based on coupling fields, characterized by: The invention relates to a multi-modal reconfigurable control device for a micro-nano robot cluster based on a coupling field, wherein the device comprises a magnetic field generating component, an ultrasonic field generating component and a microscope (1) for observation, wherein the magnetic field generating component comprises a single-axis Helmholtz coil (6), a signal generator generates a sine wave signal, and after the signal is amplified by a power amplifier, the signal is input into the single-axis Helmholtz coil (6) as a signal source to generate a unidirectional uniform oscillating magnetic field; the ultrasonic field generating component comprises a circular ultrasonic transducer (5), a circular silicon wafer (4), a polyimide A polyimide patch (3) and a glass sheet (2), wherein the polyimide patch (3) is used to construct a micro-nano robot cluster region (7), wherein a sine wave signal is generated by a signal generator and amplified by a power amplifier, and then input into a circular ultrasonic transducer (5) as a signal source, wherein the circular ultrasonic transducer (5) converts the input electrical signal into mechanical vibration, which propagates along the circular silicon sheet (4) into the micro-nano robot cluster region (7) in the form of a planar ultrasonic wave, and forms an ultrasonic standing wave field in the micro-nano robot cluster region (7) under the reflection effect of the glass sheet (2); The following steps are involved: S1. Prepare a micro-nano robot, wherein the micro-nano robot is a magnetic microsphere of ferric oxide coated with silicon dioxide; S2. Under the coupling effect of the ultrasonic field and the magnetic field, the micro-nano robots are suspended in the cluster area and form a cluster; S3. Adjust the characteristic parameter combination of the magnetic field and ultrasonic field to achieve multimodal and reconfigurable control of the boundary, shape and number of the micro-nano robot cluster; The specific method of the micro-nano robot cluster boundary control is: a1. A 3 MHz, 10 V sine wave signal amplified twice is fed into the circular ultrasonic transducer (5), the ultrasonic field generating component is activated, and an ultrasonic standing wave field is formed in the micro-nano robot cluster area (7). Under the action of the acoustic field, the micro-nano robots are suspended in the cluster area and form a cluster body with a circular boundary; a2. A 10 Hz, 4 V sinusoidal signal amplified 4 times by a power amplifier is fed into the uniaxial Helmholtz coil (6). The magnetic field generating component is activated, and a uniform oscillating magnetic field with a frequency of 10 Hz perpendicular to the plane of the cluster is formed in the micro-nano robot cluster area (7). The boundary of the micro-nano robot cluster changes from a circle to a gear shape under the action of the magnetic field. a3. Increase the oscillation frequency of the oscillating magnetic field from 10 Hz to 30 Hz, and the boundary of the micro-nano robot cluster will change from a gear shape to a circle; The boundary of the micro-nano robot cluster can be controlled by controlling the relative magnitude of the ultrasonic field and the magnetic field. When the ultrasonic field amplitude is increased and the magnetic field amplitude is decreased, the boundary of the micro-nano robot cluster will become circular; when the magnetic field amplitude is increased and the ultrasonic field amplitude is decreased, the boundary of the micro-nano robot cluster will change from a circle to a gear shape.

2. The device according to claim 1, characterized in that: In order to ensure the formation of an ultrasonic standing wave field in the micro-nano robot cluster area (7), the thickness of the polyimide patch (3) used is 250 μm, corresponding to half the wavelength of the ultrasonic wave.

3. The method according to claim 1, wherein: By controlling the magnetic field intensity and frequency, the tooth height and envelope area of ​​the micro-nano robot cluster can be controlled.

4. The method according to claim 3, wherein: When the applied magnetic field intensity is increased, the tooth height of the gear-shaped boundary of the micro-nano robot cluster body will increase, while the envelope area of ​​the boundary will decrease; when the applied magnetic field frequency is adjusted within the range of 0-10Hz, the tooth height of the gear-shaped boundary of the micro-nano robot cluster body increases with the increase of the magnetic field frequency, while the envelope area of ​​the gear-shaped boundary of the micro-nano robot cluster body decreases with the increase of the magnetic field frequency; when the applied magnetic field frequency is adjusted within the range of 10-30Hz, the tooth height of the gear-shaped boundary of the micro-nano robot cluster body decreases with the increase of the magnetic field frequency, while the envelope area of ​​the gear-shaped boundary of the micro-nano robot cluster body increases with the increase of the magnetic field frequency.

5. The method according to claim 1, wherein: The specific method for controlling the morphology of the micro-nano robot cluster is as follows: b1. Adjusting the polyimide patch (3) in the ultrasonic field generating component to a different shape; b2. A 3 MHz, 10 V sine wave signal amplified by 2 times is fed into the circular ultrasonic transducer (5), and the ultrasonic field generating component is activated; b3. Since the shape of the polyimide patch (3) affects the lateral propagation of ultrasound within the micro-nano robot cluster region (7), and thus affects the sound pressure distribution within the ultrasound field, the reversible and reconfigurable transformation of the micro-nano robot cluster between different forms is achieved.

6. The method according to claim 1, wherein: The specific method for controlling the number of micro-nano robot clusters is: c1. A 3 MHz, 10 V sine wave signal amplified twice is fed into the circular ultrasonic transducer (5), and the ultrasonic field generating component is activated. Under the action of the acoustic field, the micro-nano robot suspends in the cluster area and forms a cluster; c2. The frequency of the sinusoidal wave signal input to the circular ultrasonic transducer (5) is adjusted to 2 MHz, and two micro-nano robot clusters are formed in the micro-nano robot cluster area; c3. The frequency of the sinusoidal wave signal input to the circular ultrasonic transducer (5) is adjusted to 5 MHz. Three micro-nano robot clusters will be formed in the micro-nano robot cluster area. By controlling the frequency of the input sinusoidal wave signal, the number of micro-nano robot clusters can be reversibly controlled.

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