A detection device and detection method for processing ultra-long coils for semiconductors

Abstract

The present invention discloses a detection device and a detection method for processing an extra-long coil for semiconductors, which relates to the technical field of extra-long coil detection, and includes a base, a detection box assembly and a cover assembly. Support seats are arranged on both sides of the outside of the base, and a first hydraulic cylinder is arranged on the side of the support seat close to the vertical center line of the base, and the output end of the first hydraulic cylinder is connected to a suction machine and a gas transmission machine. The first docking seat of the present invention docks with the extra-long coil, which allows gas to enter the extra-long coil, so that the inside of the box is in a low-pressure state at this time. By injecting air into the extra-long coil, if the extra-long coil to be detected has a damage problem, the gas in the extra-long coil will quickly gush out of the extra-long coil due to the pressure difference between the inside and outside of the extra-long coil, so that the water body has submerged the extra-long coil, and the rapidly gushing gas will generate a large number of bubbles, and the large number of bubbles generated will be captured by the camera. In this way, the device can quickly detect whether the extra-long coil has a damage problem.

Description

Technical Field

[0001] The present invention relates to the technical field of super-long coil detection, and in particular to a detection device and a detection method for super-long coil processing for semiconductors. Background Art

[0002] Extra-long coils are a common piping structure, mainly used for fluid transmission and storage. Extra-long coils are usually composed of one or more circular curved pipe sections. This structure can improve the flexibility and seismic resistance of the pipeline and facilitate installation and layout. In addition, extra-long coils are widely used in various piping systems such as refrigeration and heating in the semiconductor industry. They can be used to connect equipment, change the direction of pipelines, and supplement thermal expansion and contraction. After the extra-long coils are processed, they usually need to be tested for their mechanical properties, wall thickness, and damage.

[0003] The common extra-long coil processing inspection devices on the market usually need to be divided into different steps and processes when conducting inspections on mechanical properties, wall thickness, and damage conditions, which seriously affects the inspection efficiency of extra-long coils. In addition, if the inspection steps for extra-long coils are unreasonable, for example, the mechanical properties are tested after the damage and wall thickness inspections are completed, the extra-long coils will be deformed during the mechanical properties test, and the thinner wall thickness will be damaged due to the deformation force, and the damage caused in this step cannot be detected, which will cause inspection loopholes.

[0004] Therefore, in view of this, the existing structure and defects are studied and improved, and a detection device and detection method for ultra-long coil processing for semiconductors are proposed. Summary of the invention

[0005] The object of the present invention is to provide a detection device and a detection method for processing ultra-long coils for semiconductors to solve the problems raised in the above-mentioned background technology.

[0006] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a detection device for processing ultra-long coils for semiconductors, comprising a base, a detection box assembly and a cover assembly, support seats are provided on both sides of the outside of the base, and a first hydraulic cylinder is placed on the side of the support seat close to the vertical center line of the base, the output end of the first hydraulic cylinder is connected to a suction machine and a gas supply machine, and the outer ends of the suction machine and the gas supply machine are connected to a docking pipe, an extension seat is provided on the outer side of the top of the support seat, and a second hydraulic cylinder is connected to the outer side of the bottom of the extension seat, the output end of the second hydraulic cylinder is connected to the detection box assembly, and the detection box assembly comprises a box body, a first docking port, a second docking port, a first connecting pipe, a first gas control box, a first docking seat, a second connecting pipe, a third connecting pipe, a second gas control box, A ventilation pipe, a fourth connecting pipe, a rotating disk and a second docking seat, a first docking port is opened on the inner side of the left portion of the box body, and a second docking port is opened on the inner side of the right portion of the box body, the outer end of the first docking port is connected to the first connecting pipe, and the end of the first connecting pipe is connected to the first air control box, a first docking seat is provided on the first air control box close to the inside of the box body, and a second connecting pipe is connected between the first air control box and the second docking port, a third connecting pipe is connected to the outer end of the second docking port, and the end of the third connecting pipe is connected to the second air control box, the second air control box is connected to the ventilation pipe on the side close to the inside of the box body, and a fourth connecting pipe is connected between the second air control box and the first docking port, a rotating disk is arranged inside the box body, and a second docking seat is provided on the outer end of the rotating disk.

[0007] Furthermore, the outer contour size of the docking pipe matches the inner contour size of the first docking port and the second docking port, and the docking pipe at the outer end of the suction machine and the docking pipe at the outer end of the gas transmission machine are located at the same height.

[0008] Furthermore, the first docking port is connected to the first air control box through a first connecting pipe, and the first docking seats are distributed in an array at the outer end of the first air control box.

[0009] Furthermore, the first pair of ports is connected to the second gas control box via a fourth connecting pipe, and the second gas control box is connected to the second pair of ports via a third connecting pipe.

[0010] Furthermore, the positions of the first docking seat and the second docking seat correspond one to one, and the first docking seat and the second docking seat are used to fix the extra-long coil.

[0011] Furthermore, the second docking seat rotates with the rotating disk, and the second docking seat is located at the edge of the rotating disk.

[0012] Furthermore, a cover body assembly is provided at the top of the extension seat, and the cover body assembly includes a support plate, a third hydraulic cylinder, a box cover, a water inlet and a camera. The third hydraulic cylinder is placed at the bottom end of the support plate, and the output end of the third hydraulic cylinder is connected to the box cover. A water inlet is opened at the middle end of the box cover, and a camera is provided at the bottom of the box cover.

[0013] Furthermore, the outer contour of the box cover matches the inner contour of the box body, and the box cover is butted against the box body so that the box body is in a sealed state.

[0014] Furthermore, the water inlet is connected to the interior of the box body through the box cover, and the box cover and the rear camera of the box body are located inside the box body.

[0015] Furthermore, a method for detecting the processing of an extra-long coil for semiconductors is applied to the detection device for the processing of an extra-long coil for semiconductors, and comprises the following steps: S1: a worker places the extra-long coil inside a box body, and docks the head and tail of the extra-long coil with a first docking seat and a second docking seat respectively, and drives the box cover to move downward by operating the third hydraulic cylinder, so that the box cover can be combined with the box body as a whole, and the worker opens the water inlet to inject clean water into the box body, and after the clean water completely covers the extra-long coil, the worker closes the water inlet to make the inside of the box body in a completely sealed state, and the second hydraulic cylinder operates to drive the box body to move downward, and after the box body moves to a designated position, the first hydraulic cylinder operates to drive the suction machine and the gas transmission machine to move, so that the docking pipe can be docked with the first docking port and the second docking port;

[0016] S2: The electric control valves inside the first connecting pipe and the third connecting pipe are closed, and the electric control valve inside the fourth connecting pipe is opened, so that the suction machine can be connected with the second gas control box through the docking pipe, the first docking port, and the fourth connecting pipe. At this time, the suction machine works, so that the suction force can enter the box through the second gas control box and the ventilation pipe. Through the suction of the suction machine, a negative pressure can be formed inside the box. After the suction of the suction machine is completed, the electric control valve inside the second connecting pipe is opened. At this time, the gas transmission machine works, and the gas can be transmitted through the second docking port, the second connecting pipe, and the first gas control box to the first docking seat to perform damage detection of the extra-long coil;

[0017] S3: The second docking seat can drive the extra-long coil to generate displacement force by rotating the rotating disk. At this time, the other end of the extra-long coil is connected with the first docking seat, and the first docking seat is in a fixed state. At this time, a displacement force is applied to one end of the extra-long coil to realize the mechanical property test of the extra-long coil;

[0018] S4: The third connecting pipe is connected to the second air control box, and the second air control box is closed and connected to the first air control box. At the same time, the first port is connected to the first air control box through the first connecting pipe, and the first air control box is closed and connected to the second connecting pipe. At this time, the gas transmission machine works and can input the gas into the box through the ventilation pipe, which makes the air pressure inside the box rise, and the suction machine works and can transmit the suction force to the inside of the extra-long coil to realize the wall thickness detection of the extra-long coil.

[0019] The present invention provides a detection device and a detection method for processing an ultra-long coil for semiconductors, which have the following beneficial effects:

[0020] 1. After the butt joint of the butt joint of the present invention is completed, the electric control valves inside the first connecting pipe and the third connecting pipe are closed, and the electric control valve inside the fourth connecting pipe is opened, so that the suction machine can be connected with the second gas control box through the butt joint, the first butt joint, and the fourth connecting pipe. At this time, the suction machine is working, so that the suction force can enter the box through the second gas control box and the ventilation pipe. Through the suction of the suction machine, a negative pressure can be formed inside the box. After the suction of the suction machine is completed, the electric control valve inside the second connecting pipe is opened. At this time, the gas transmission machine is working, and the gas can be transmitted to the first butt joint through the second butt joint, the second connecting pipe, and the first gas control box. Because the first butt joint is connected to the extra-long coil, the gas can enter the extra-long coil. In the long coil, the inside of the box is in a low pressure state at this time. By injecting air into the extra-long coil, if the extra-long coil to be tested has a damage problem, the gas in the extra-long coil will quickly gush out of the extra-long coil due to the pressure difference between the inside and outside of the extra-long coil. At this time, the water body has submerged the extra-long coil, and the rapidly gushing gas will produce a large number of bubbles, and the large number of bubbles produced will be captured by the camera. In this way, the equipment can quickly detect whether the extra-long coil has a damage problem, and the method of generating a pressure difference and transmitting gas to the inside of the extra-long coil can increase the amount of bubbles generated at the damaged part of the extra-long coil, which can avoid the situation that the damaged point of the extra-long coil is small and the bubbles are small and cannot be effectively identified by the camera.

[0021] 2. The present invention can make the second docking seat drive the extra-long coil to generate a displacement force by rotating the rotating disk. At this time, the other end of the extra-long coil is connected to the first docking seat, and the first docking seat is in a fixed state. At this time, a displacement force is applied to one end of the extra-long coil, so that the mechanical property test of the extra-long coil can be realized. After applying the specified force, the rotating disk removes the rotating force. If the extra-long coil can rebound after bending, it means that the mechanical property test of the extra-long coil is qualified. The first docking seat and the second docking seat can fix and ventilate the extra-long coil when the extra-long coil is damaged. When the mechanical property test of the extra-long coil is carried out, the first docking seat can fix one end of the extra-long coil, and the second docking seat can bend one end of the extra-long coil. Through this design, the mechanical property and damage detection of the extra-long coil can be realized without replacing parts and moving the extra-long coil. This can avoid frequent replacement of detection equipment during the detection of the extra-long coil, thereby greatly improving the detection efficiency of the extra-long coil.

[0022] 3. The extra-long coil of the present invention will be twisted when the mechanical properties are tested. During the twisting process, if the extra-long coil has a problem of too thin wall thickness, the twisting will cause cracks or fissures to appear in the places where the wall thickness is too thin. After the extra-long coil has completed the mechanical properties test, the third connecting pipe is connected to the second air control box, and the second air control box is closed and connected to the first air control box. At the same time, the first port is connected to the first air control box through the first connecting pipe, and the first air control box is closed and connected to the second connecting pipe. At this time, the gas transmission machine works and can input gas into the box through the ventilation pipe, which makes the air pressure inside the box rise. Rise, and the suction machine works, which can transmit the suction force to the inside of the extra-long coil. At this time, if the wall thickness of the extra-long coil is too thin and cracks or splits appear, the liquid inside the box will enter the extra-long coil due to the air pressure difference and suction. At this time, the staff only needs to observe whether the suction machine sucks out water to determine whether the extra-long coil has cracks or splits. Through this design, the equipment can perform damage, mechanical properties and wall thickness tests on the extra-long coil during a single test of the extra-long coil without replacing the detection components, which further improves the detection efficiency and convenience of the extra-long coil. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic diagram of the overall three-dimensional structure of a detection device for processing an ultra-long coil for semiconductors according to the present invention;

[0024] Figure 2 This is a schematic diagram of the butt-joint pipe structure of a detection device for processing ultra-long coiled pipes for semiconductors according to the present invention;

[0025] Figure 3 This is a front perspective structural diagram of a housing of a detection device for processing ultra-long coiled pipes for semiconductors according to the present invention;

[0026] Figure 4 It is a schematic diagram of the three-dimensional structure of the rear view of the box of the detection device for processing ultra-long coils for semiconductors of the present invention;

[0027] Figure 5 This is a schematic cross-sectional structure diagram of a housing of a detection device for processing ultra-long coiled pipes for semiconductors according to the present invention;

[0028] Figure 6 The present invention is a schematic structural diagram of a cover assembly of a detection device for processing ultra-long coils for semiconductors.

[0029] In the figure: 1, base; 2, support seat; 3, first hydraulic cylinder; 4, suction machine; 5, gas transmission machine; 6, docking pipe; 7, extension seat; 8, second hydraulic cylinder; 9, detection box assembly; 901, box body; 902, first docking port; 903, second docking port; 904, first connecting pipe; 905, first air control box; 906, first docking seat; 907, second connecting pipe; 908, third connecting pipe; 909, second air control box; 910, ventilation pipe; 911, fourth connecting pipe; 912, rotating disk; 913, second docking seat; 10, cover assembly; 1001, support plate; 1002, third hydraulic cylinder; 1003, box cover; 1004, water inlet; 1005, camera. DETAILED DESCRIPTION

[0030] See also Figures 1 to 6The present invention provides a technical solution: a detection device and a detection method for processing an ultra-long coil for semiconductors, comprising a base 1, a detection box assembly 9 and a cover assembly 10, support seats 2 are arranged on both sides of the outside of the base 1, and a first hydraulic cylinder 3 is arranged on the side of the support seat 2 close to the vertical center line of the base 1, the output end of the first hydraulic cylinder 3 is connected to a suction machine 4 and a gas transmission machine 5, and the outer ends of the suction machine 4 and the gas transmission machine 5 are connected to a docking pipe 6, an extension seat 7 is arranged on the top outer side of the support seat 2, and a second hydraulic cylinder 8 is connected to the bottom outer side of the extension seat 7, and the output end of the second hydraulic cylinder 8 is connected to the detection box assembly 9, the detection box assembly 9 comprises a box body 901, a first docking port 902, a second docking port 903, a first connecting pipe 904, a first gas control box 905, a first docking seat 906, a second connecting pipe 907, a third connecting pipe 908, a second gas control box 909, a vent pipe 910, a fourth connecting pipe 911, a rotating disk 912 and a second A docking seat 913 is provided on the inner side of the left portion of the box body 901, and a second docking port 903 is provided on the inner side of the right portion of the box body 901. The outer end of the first docking port 902 is connected to a first connecting pipe 904, and the end of the first connecting pipe 904 is connected to a first air control box 905. A first docking seat 906 is provided on the side of the first air control box 905 close to the inside of the box body 901, and a second air control box 905 is connected to the second docking port 903. A connecting pipe 907, the outer end of the second docking port 903 is connected to a third connecting pipe 908, and the end of the third connecting pipe 908 is connected to a second air control box 909, the second air control box 909 is connected to a ventilation pipe 910 on the side close to the inside of the box body 901, and a fourth connecting pipe 911 is connected between the second air control box 909 and the first docking port 902, a rotating disk 912 is arranged inside the box body 901, and a second docking seat 913 is provided at the outer end of the rotating disk 912.

[0031] See also Figures 1 to 6, the outer contour size of the docking pipe 6 matches the inner contour size of the first docking port 902 and the second docking port 903, and the docking pipe 6 at the outer end of the suction machine 4 is at the same height as the docking pipe 6 at the outer end of the gas transmission machine 5, the first docking port 902 is connected to the first gas control box 905 through the first connecting pipe 904, and the first docking seat 906 is distributed in an array at the outer end of the first gas control box 905, the first docking port 902 is connected to the second gas control box 909 through the fourth connecting pipe 911, and the second gas control box 909 is connected to the second docking port 903 through the third connecting pipe 908, the positions of the first docking seat 906 and the second docking seat 913 correspond one to one, and the first docking seat 906 and the second docking seat 913 are used to fix the extra-long coil, the second docking seat 913 rotates with the rotating disk 912, and the second docking seat 913 is located At the edge of the rotating disk 912, a cover assembly 10 is arranged on the top of the extension seat 7, and the cover assembly 10 includes a support plate 1001, a third hydraulic cylinder 1002, a box cover 1003, a water inlet 1004 and a camera 1005. The third hydraulic cylinder 1002 is arranged at the bottom end of the support plate 1001, and the output end of the third hydraulic cylinder 1002 is connected to the box cover 1003, the middle end of the box cover 1003 is provided with a water inlet 1004, and the bottom of the box cover 1003 is provided with a camera 1005, the outer contour size of the box cover 1003 matches the inner contour of the box body 901, and the box cover 1003 is connected to the box body 901 so that the box body 901 is in a sealed state, the water inlet 1004 passes through the box cover 1003 and is connected to the inside of the box body 901, and the box cover 1003 and the box body 901 are connected. The camera 1005 is located inside the box body 901;

[0032] The specific operation is as follows: the staff places the extra-long coil that has been processed and needs to be tested inside the box 901, and docks the head and tail of the extra-long coil with the first docking seat 906 and the second docking seat 913 respectively, so that the extra-long coil can be placed in the equipment. After the extra-long coil is installed, the third hydraulic cylinder 1002 works to drive the box cover 1003 to move downward, so that the box cover 1003 can be combined with the box 901 as a whole. At this time, the staff opens the water inlet 1004 to inject clean water into the box 901. After the clean water completely covers the extra-long coil, the staff closes the water inlet 1004. At this time, the interior of the box 901 will be in a completely sealed state. At this time, the second hydraulic cylinder 8 works to drive the box 901 to move downward, and the box 901 After moving to the designated position, the first hydraulic cylinder 3 works, driving the suction machine 4 and the gas transmission machine 5 to move, so that the docking pipe 6 can be docked with the first docking port 902 and the second docking port 903. After the docking pipe 6 is docked, the electric control valves inside the first connecting pipe 904 and the third connecting pipe 908 are closed, and the electric control valve inside the fourth connecting pipe 911 is opened, so that the suction machine 4 can be connected with the second air control box 909 through the docking pipe 6, the first docking port 902, and the fourth connecting pipe 911. At this time, the suction machine 4 works, which allows the suction force to enter the inside of the box body 901 through the second air control box 909 and the ventilation pipe 910. Through the suction of the suction machine 4, a negative pressure can be formed inside the box body 901. After the suction of the suction machine 4 is completed, the second connecting pipe 9 07, the electric control valve inside is opened, and the gas transmission machine 5 works at this time, and can transmit the gas to the first docking seat 906 through the second docking port 903, the second connecting pipe 907, and the first gas control box 905. Because the first docking seat 906 is docked with the extra-long coil, the gas can enter the extra-long coil. Therefore, the inside of the box body 901 is in a low-pressure state at this time. By injecting air into the extra-long coil, if the extra-long coil to be tested has a damage problem, the gas in the extra-long coil will quickly gush out of the extra-long coil due to the pressure difference between the inside and outside of the extra-long coil. At this time, the water body has submerged the extra-long coil, and the quickly gushing gas will produce a large number of bubbles, which will be captured by the camera 1005. In this way, the equipment can quickly detect whether the extra-long coil has a damage problem. The problem is solved by generating an air pressure difference and transmitting air to the inside of the extra-long coil, which can increase the amount of bubbles generated at the damaged part of the extra-long coil. This can avoid the situation where the damaged point of the extra-long coil is small and the bubbles generated are small and cannot be effectively identified by the camera 1005. After the damage detection of the extra-long coil is completed, the second docking seat 913 can drive the extra-long coil to generate a displacement force by rotating the rotating disk 912. At this time, the other end of the extra-long coil is connected to the first docking seat 906, and the first docking seat 906 is in a fixed state. At this time, a displacement force is applied to one end of the extra-long coil, which can realize the mechanical property test of the extra-long coil. After applying the specified force, the rotating disk 912 removes the rotating force. If the extra-long coil can rebound after bending, it means that the mechanical property test of the extra-long coil is qualified.The first docking seat 906 and the second docking seat 913 can fix and ventilate the extra-long coil when detecting damage to the extra-long coil, and when the extra-long coil is subjected to a mechanical property test, the first docking seat 906 can fix one end of the extra-long coil, and the second docking seat 913 can bend one end of the extra-long coil. Through this design, the mechanical property and damage detection of the extra-long coil can be achieved without replacing parts and moving the extra-long coil. This can avoid frequent replacement of detection equipment during the detection process of the extra-long coil, thereby greatly improving the detection efficiency of the extra-long coil. The extra-long coil will itself be twisted when the mechanical property test is carried out. During the twisting process, if the extra-long coil has a problem of too thin wall thickness, the twisting will cause cracks or fissures to appear in places where the wall thickness is too thin. After the extra-long coil completes the mechanical property test, the third connecting pipe 908 is connected to the second air control box 909, and the second air control box 909 is closed to the first air control box. The first air control box 905 is connected, and the first interface 902 is connected to the first air control box 905 through the first connecting pipe 904. The first air control box 905 closes the connection with the second connecting pipe 907. At this time, the gas transmission machine 5 works and can input the gas into the box body 901 through the ventilation pipe 910, which makes the air pressure inside the box body 901 rise. The suction machine 4 works and can transmit the suction force to the inside of the extra-long coil. At this time, if the wall thickness of the extra-long coil is too thin and cracks or fissures occur, the liquid inside the box body 901 will enter the extra-long coil due to the air pressure difference and suction. At this time, the staff only needs to observe whether the suction machine 4 sucks out water to determine whether the extra-long coil has cracks or fissures. Through this design, the equipment can perform damage, mechanical properties and wall thickness tests on the extra-long coil in a single test of the extra-long coil without replacing the detection components, which further improves the detection efficiency and convenience of the extra-long coil.

[0033] In summary, when using the detection device and method for processing super-long coils for semiconductors, the staff first places the processed super-long coils that need to be tested inside the box 901, and docks the head and tail of the super-long coils with the first docking seat 906 and the second docking seat 913 respectively, so that the super-long coils can be placed in the equipment. After the super-long coils are installed, the third hydraulic cylinder 1002 works to drive the box cover 1003 to move downward, so that the box cover 1003 can be aligned with the box 901. The box 901 is combined into one, and the staff opens the water inlet 1004 to inject clean water into the box 901. After the clean water completely covers the extra-long coil, the staff closes the water inlet 1004. At this time, the inside of the box 901 is in a completely sealed state. At this time, the second hydraulic cylinder 8 works to drive the box 901 to move downward. After the box 901 moves to the designated position, the first hydraulic cylinder 3 works to drive the suction machine 4 and the gas transmission machine 5 to move, so that the docking pipe 6 can be docked with the first docking port 902 and the second docking port 903;

[0034] Then, after the docking of the docking tube 6 is completed, the electric control valves inside the first connecting tube 904 and the third connecting tube 908 are closed, and the electric control valve inside the fourth connecting tube 911 is opened, so that the suction machine 4 can be connected with the second air control box 909 through the docking tube 6, the first docking port 902, and the fourth connecting tube 911. At this time, the suction machine 4 is working, which allows the suction force to enter the inside of the box body 901 through the second air control box 909 and the ventilation pipe 910. Through the suction of the suction machine 4, a negative pressure can be formed inside the box body 901. After the suction of the suction machine 4 is completed, the electric control valve inside the second connecting tube 907 is opened. At this time, the gas transmission machine 5 is working, and the gas can be transmitted to the inside of the first docking seat 906 through the second docking port 903, the second connecting tube 907, and the first air control box 905. 06 is docked with the extra-long coil, which allows gas to enter the extra-long coil. At this time, the inside of the box 901 is in a low-pressure state. By injecting air into the extra-long coil, if the extra-long coil to be detected has a damage problem, the gas in the extra-long coil will quickly gush out of the extra-long coil due to the pressure difference between the inside and outside of the extra-long coil. At this time, the water body has submerged the extra-long coil, and the quickly gushing gas will generate a large number of bubbles, which will be captured by the camera 1005. In this way, the device can quickly detect whether the extra-long coil has a damage problem. By generating a pressure difference and transmitting gas to the inside of the extra-long coil, the amount of bubbles generated at the damaged part of the extra-long coil can be increased, which can avoid the situation that the damaged point of the extra-long coil is small and the bubbles generated are small and cannot be effectively identified by the camera 1005.

[0035] Then, after the damage detection of the extra-long coil is completed, the rotating disk 912 rotates, so that the second docking seat 913 can drive the extra-long coil to generate a displacement force. At this time, the other end of the extra-long coil is connected to the first docking seat 906, and the first docking seat 906 is in a fixed state. At this time, a displacement force is applied to one end of the extra-long coil to realize the mechanical property test of the extra-long coil. After applying the specified force, the rotating disk 912 removes the rotating force. If the extra-long coil can rebound after bending, it means that the mechanical property test of the extra-long coil is qualified, and the first docking seat 906 and The second docking seat 913 can fix and ventilate the extra-long coil when the extra-long coil is tested for damage. When the extra-long coil is tested for mechanical properties, the first docking seat 906 can fix one end of the extra-long coil, while the second docking seat 913 can bend one end of the extra-long coil. This design enables the mechanical properties and damage detection of the extra-long coil to be achieved without replacing parts and moving the extra-long coil. This can avoid frequent replacement of the detection equipment during the detection of the extra-long coil, thereby greatly improving the detection efficiency of the extra-long coil.

[0036] Finally, the extra-long coil will be twisted when the mechanical properties are tested. During the twisting process, if the extra-long coil has a problem of too thin wall thickness, the twisting will cause cracks or breaks to appear in the places where the wall thickness is too thin. After the extra-long coil completes the mechanical properties test, the third connecting pipe 908 is connected to the second air control box 909, and the second air control box 909 is closed to the first air control box 905. At the same time, the first connecting port 902 is connected to the first air control box 905 through the first connecting pipe 904, and the first air control box 905 is closed to the second connecting pipe 907. At this time, the gas transmission machine 5 works and can input the gas into the box body 901 through the ventilation pipe 910. This causes the air pressure inside the box 901 to rise, and the suction machine 4 works, which can transmit the suction force to the inside of the extra-long coil. At this time, if the extra-long coil has cracks or breaks due to thin walls, the liquid inside the box 901 will enter the extra-long coil due to the air pressure difference and suction. At this time, the staff only needs to observe whether the suction machine 4 sucks out water to determine whether the extra-long coil has cracks or breaks. Through this design, the equipment can perform damage, mechanical property and wall thickness tests on the extra-long coil during a single test of the extra-long coil without replacing the detection components, which further improves the detection efficiency and convenience of the extra-long coil.

[0037] The embodiments of the present invention are given for the purpose of illustration and description, and are not intended to be exhaustive or to limit the invention to the disclosed forms. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments are selected and described in order to better illustrate the principles and practical applications of the present invention and to enable those of ordinary skill in the art to understand the present invention and thereby design various embodiments with various modifications suitable for specific uses.

Claims

1. A detection device for processing ultra-long coils for semiconductors, characterized in that: The invention comprises a base (1), a detection box assembly (9) and a cover assembly (10), wherein support seats (2) are arranged on both sides of the outside of the base (1), and a first hydraulic cylinder (3) is arranged on the side of the support seat (2) close to the vertical center line of the base (1), the output end of the first hydraulic cylinder (3) is connected to a suction machine (4) and a gas transmission machine (5), and the outer ends of the suction machine (4) and the gas transmission machine (5) are connected to a docking pipe (6), an extension seat (7) is arranged on the outer side of the top of the support seat (2), and a second hydraulic cylinder (8) is connected to the outer side of the bottom of the extension seat (7), and the output end of the second hydraulic cylinder (8) is connected to the detection box assembly (9), and the detection box assembly (9) comprises a box body (901), a first docking port (902), A second docking port (903), a first connecting pipe (904), a first air control box (905), a first docking seat (906), a second connecting pipe (907), a third connecting pipe (908), a second air control box (909), a vent pipe (910), a fourth connecting pipe (911), a rotating disk (912) and a second docking seat (913); a first docking port (902) is provided on the inner side of the left portion of the box body (901), and a second docking port (903) is provided on the inner side of the right portion of the box body (901); an outer end of the first docking port (902) is connected to a first connecting pipe (904), and an end of the first connecting pipe (904) is connected to a first air control box (905); the first air control box (905) is close to the box body; A first docking seat (906) is provided on one side of the interior of the housing (901), and a second connecting pipe (907) is connected between the first air control box (905) and the second docking port (903), the outer end of the second docking port (903) is connected to a third connecting pipe (908), and the end of the third connecting pipe (908) is connected to a second air control box (909), a ventilation pipe (910) is connected to the second air control box (909) near the interior of the housing (901), and a fourth connecting pipe (911) is connected between the second air control box (909) and the first docking port (902), a rotating disk (912) is arranged inside the housing (901), and a second docking seat (913) is provided at the outer end of the rotating disk (912), The second docking seat (913) rotates with the rotating disk (912), and the second docking seat (913) is located at the edge of the rotating disk (912). A cover assembly (10) is arranged at the top end of the extension seat (7), and the cover assembly (10) comprises a support plate (1001), a third hydraulic cylinder (1002), a box cover (1003), a water inlet (1004) and a camera (1005). The third hydraulic cylinder (1002) is arranged at the bottom end of the support plate (1001), and the output end of the third hydraulic cylinder (1002) is connected to the box cover (1003). The middle end of the box cover (1003) is provided with a water inlet (1004), and the bottom of the box cover (1003) is provided with a camera (1005).

2. The detection device for processing an ultra-long coil for semiconductor according to claim 1, characterized in that: The outer contour dimensions of the butt joint (6) match the inner contour dimensions of the first butt joint (902) and the second butt joint (903), and the butt joint (6) at the outer end of the suction machine (4) and the butt joint (6) at the outer end of the gas transmission machine (5) are located at the same height.

3. The detection device for processing an ultra-long coil for semiconductor according to claim 1, characterized in that: The first docking port (902) is connected to the first air control box (905) via a first connecting pipe (904), and the first docking seats (906) are distributed in an array at the outer end of the first air control box (905).

4. The detection device for processing an ultra-long coil for semiconductor according to claim 1, characterized in that: The first pair of ports (902) is connected to the second gas control box (909) via a fourth connecting pipe (911), and the second gas control box (909) is connected to the second pair of ports (903) via a third connecting pipe (908).

5. The detection device for processing an ultra-long coil for semiconductor according to claim 1, characterized in that: The positions of the first docking seat (906) and the second docking seat (913) correspond one to one, and the first docking seat (906) and the second docking seat (913) are used to fix the extra-long coil.

6. The detection device for processing an ultra-long coil for semiconductor according to claim 5, characterized in that: The outer contour of the box cover (1003) matches the inner contour of the box body (901), and the box cover (1003) is butted against the box body (901) so that the box body (901) is in a sealed state.

7. The detection device for processing an ultra-long coil for semiconductor according to claim 6, characterized in that: The water inlet (1004) passes through the box cover (1003) and is connected to the interior of the box body (901), and the box cover (1003) and the rear camera (1005) of the box body (901) are located inside the box body (901).

8. A method for detecting the processing of an ultra-long coiled tube for semiconductors, applied to a device for detecting the processing of an ultra-long coiled tube for semiconductors as claimed in any one of claims 1 to 7, characterized in that: The following steps are involved: S1: The staff places the extra-long coil inside the box (901), and docks the head and tail of the extra-long coil with the first docking seat (906) and the second docking seat (913) respectively. The third hydraulic cylinder (1002) operates to drive the box cover (1003) to move downward, so that the box cover (1003) can be combined with the box (901) as a whole. The staff opens the water inlet (1004) to inject clean water into the box (901). After the clean water completely covers the extra-long coil, the staff closes the water inlet (1004) to make the inside of the box (901) in a completely sealed state. The second hydraulic cylinder (8) operates to drive the box (901) to move downward. After the box (901) moves to the designated position, the first hydraulic cylinder (3) operates to drive the suction machine (4) and the gas transmission machine (5) to move, so that the docking pipe (6) can be docked with the first docking port (902) and the second docking port (903). S2: the electric control valves inside the first connecting pipe (904) and the third connecting pipe (908) are closed, and the electric control valve inside the fourth connecting pipe (911) is opened, so that the suction machine (4) can be connected to the second air control box (909) through the docking pipe (6), the first docking port (902), and the fourth connecting pipe (911). At this time, the suction machine (4) is working, so that the suction force can enter the inside of the box (901) through the second air control box (909) and the ventilation pipe (910). Through the suction of the suction machine (4), a negative pressure can be formed inside the box (901). After the suction of the suction machine (4) is completed, the electric control valve inside the second connecting pipe (907) is opened. At this time, the gas transmission machine (5) is working, and the gas can be transmitted to the inside of the first docking seat (906) through the second docking port (903), the second connecting pipe (907), and the first air control box (905) to perform damage detection of the extra-long coil; S3: By rotating the rotating disk (912), the second docking seat (913) can drive the extra-long coil to generate a displacement force. At this time, the other end of the extra-long coil is connected to the first docking seat (906), and the first docking seat (906) is in a fixed state. At this time, a displacement force is applied to one end of the extra-long coil to achieve mechanical property testing of the extra-long coil; S4: The third connecting pipe (908) is connected to the second air control box (909), and the second air control box (909) is closed to the connection with the first air control box (905). At the same time, the first connecting port (902) is connected to the first air control box (905) through the first connecting pipe (904), and the first air control box (905) is closed to the connection with the second connecting pipe (907). At this time, the gas transmission machine (5) works and can input the gas into the box body (901) through the ventilation pipe (910), so that the air pressure inside the box body (901) will increase, and the suction machine (4) works and can transmit the suction force to the inside of the extra-long coil to realize the wall thickness detection of the extra-long coil.

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