A device and method for recovering waste liquid from electronic-grade hydrofluoric acid.

Abstract

This invention discloses a waste liquid recovery device and method for electronic-grade hydrofluoric acid, relating to the field of electronic-grade hydrofluoric acid production technology. It includes a filtration mechanism and a discharge valve installed on one side of the bottom of the filtration mechanism. A recovery drying mechanism is provided on one side of the filtration mechanism, and a drying box is provided on the outside of the recovery drying mechanism. The filtration mechanism includes a filter box, inside which a first filter support and a second filter support are symmetrically installed. A cleaning sliding frame is fixedly installed on the top of both the first and second filter supports. A first motor cover is fixedly installed on one side of the top of the cleaning sliding frame. By rotating the filter screen, the sediment on the rotating filter screen can be cleaned, causing the sediment to move towards the guide plate at the bottom of the first filter support through the swinging motion, thereby facilitating preliminary cleaning of the rotating filter screen and improving its filtration effect.

Description

Technical Field

[0001] This invention relates to the field of electronic-grade hydrofluoric acid production technology, specifically to a waste liquid recovery device and method for electronic-grade hydrofluoric acid. Background Technology

[0002] Hydrofluoric acid is an aqueous solution of hydrogen fluoride gas. It is a clear, colorless, fuming, corrosive liquid with a strong, pungent odor. Hydrofluoric acid is a weak acid with extremely strong corrosiveness, capable of severely corroding metals, glass, and silicon-containing materials. In the laboratory, it is generally prepared using fluorite (whose main component is calcium fluoride) and concentrated sulfuric acid. It needs to be sealed in plastic bottles and stored in a cool place. During the preparation of hydrofluoric acid, condensed tail gas is generated. The tail gas is washed with pure water and then washed again with calcium hydroxide as an alkali. A small amount of hydrogen fluoride in the tail gas reacts with calcium hydroxide to form calcium fluoride precipitate. Because calcium hydroxide is strongly alkaline, it is impossible to manually remove the calcium fluoride precipitate, resulting in waste of calcium hydroxide and increasing the raw material cost in the production process of hydrofluoric acid.

[0003] Publication No. CN 116173574 B discloses a waste liquid recycling and reuse device for the preparation of electronic-grade hydrofluoric acid. This device filters calcium fluoride from calcium hydroxide waste liquid using a filter screen, thus achieving effective filtration of the waste liquid and improving the device's effectiveness in waste liquid treatment. It also automates waste liquid treatment, increasing treatment efficiency. Gravity causes uncondensed calcium fluoride to fall onto a tray, which then collects it into a collection chamber, effectively solving the problem of automatic calcium fluoride collection. This improves the device's effectiveness in waste liquid treatment and ensures efficient calcium fluoride collection. A swing rod is used for fixing... The shaft swings around a central point, and the swing rod drives the striking head to beat the filter screen. This causes the calcium fluoride residue on the filter screen to be knocked into the collection chamber, preventing calcium fluoride from condensing on the filter screen and clogging it. It also improves the effectiveness of calcium fluoride collection, enhances the cleaning quality in the waste liquid treatment process, and ensures timely recovery of precipitates after waste liquid treatment. After entering the collection chamber, the calcium fluoride flows through the collection port into an external recovery device. The recovered calcium fluoride can also be used in other fields, improving the recycling rate of the device's production process. However, the above patent still has the following problems in actual use:

[0004] Although this waste liquid recycling and reuse device for electronic-grade hydrofluoric acid preparation can filter waste liquid to obtain calcium fluoride precipitate, the filter screen has a fixed pore size, while the precipitate size varies. During filtration, some precipitate will pass through the filter screen, affecting the filtration effect. While tapping the filter screen facilitates the recovery of the filtered precipitate, repeated tapping can damage the screen and easily cause clogging, hindering rapid cleaning and affecting subsequent filtration.

[0005] This invention proposes a waste liquid recovery device and method for electronic-grade hydrofluoric acid, in order to solve the problems mentioned above. Summary of the Invention

[0006] The purpose of this invention is to provide a waste liquid recovery device and method for electronic-grade hydrofluoric acid, to solve the problem that although the waste liquid recovery and reuse device for electronic-grade hydrofluoric acid preparation mentioned in the background art can use a filter screen to filter the waste liquid and obtain calcium fluoride precipitate, the size of the filter screen pores is fixed while the size of the precipitate is different. During the filtration of the precipitate, some precipitate will pass through the filter screen, thus affecting the filtration effect. At the same time, tapping the filter screen is convenient for recovering the filtered precipitate, but continuous tapping of the filter screen will damage the filter screen and the filter screen is prone to clogging, which cannot achieve rapid cleaning of the filter screen and thus affects the subsequent filtration of the filter screen.

[0007] To achieve the above objectives, the present invention provides the following technical solution: a waste liquid recovery device and method for electronic grade hydrofluoric acid, comprising a filtration mechanism and a discharge valve installed on one side of the bottom of the filtration mechanism;

[0008] A recycling and drying mechanism is provided on one side of the filtration mechanism, and a drying box is provided on the outside of the recycling and drying mechanism.

[0009] Also includes:

[0010] The filtration mechanism includes a filter box, inside which a first filter bracket and a second filter bracket are symmetrically installed, and a cleaning sliding bracket is fixedly installed on the top of each of the first filter bracket and the second filter bracket.

[0011] The cleaning sliding frame has a first motor cover fixedly installed on one side of its top, and a cleaning motor is fixedly installed on one side of the inside of the first motor cover.

[0012] The output end of the cleaning motor is fixedly connected to a first sprocket drive assembly, and a bevel gear drive assembly is symmetrically connected to one side of the first sprocket drive assembly at the top.

[0013] A reciprocating rotating disk is fixedly installed at the bottom of the bevel gear transmission assembly. A mounting block is rotatably connected to one side of the bottom of the reciprocating rotating disk. A reciprocating connecting rope is fixedly connected to the bottom of the mounting block. A meshing rack is fixedly connected to the end of the reciprocating connecting rope. A connecting spring is fixedly connected to the end of the meshing rack. One side of the connecting spring is fixedly installed inside the first filter bracket. The meshing rack is slidably connected to the first filter bracket.

[0014] By adopting the above technical solution, the cleaning motor drives the first sprocket transmission assembly and the bevel gear transmission assembly to rotate, which in turn drives the reciprocating rotating disk and the mounting block to rotate. The mounting block pulls the reciprocating connecting rope and the meshing rack to move inside the first filter bracket, and the reciprocating motion of the meshing rack is realized under the action of the connecting spring.

[0015] The bottom of the meshing rack is meshed with several meshing gears, and a reciprocating rotating rod is fixedly connected to the inner side of the meshing gears. The reciprocating rotating rod is rotatably connected to the first filter bracket, and a rotating filter screen plate is fixedly installed on the outer side of the reciprocating rotating rod. A cleaning needle is fixedly installed on one side of the end of the rotating filter screen plate.

[0016] By adopting the above technical solution, the rotation of the reciprocating rotating rod and the rotating filter plate is realized by utilizing the meshing connection between the meshing gear and the meshing rack. The oscillation of the rotating filter plate can clean the sediment on the rotating filter plate, and the sediment moves towards the guide plate at the bottom of the first filter support by oscillation, which facilitates the initial cleaning of the rotating filter plate, improves the filtration effect of the rotating filter plate, and avoids the phenomenon of sediment actively clogging the rotating filter plate.

[0017] The cleaning sliding frame is symmetrically rotatably connected to a cleaning threaded rod, which is fixedly connected to the first sprocket drive assembly. The outer sides of the two cleaning threaded rods are threadedly connected to cleaning threaded sleeves. The tops of the two cleaning threaded sleeves are fixedly connected to a cleaning bracket, and the bottom of the cleaning bracket is fixedly installed with a cleaning brush.

[0018] By adopting the above technical solution, the first sprocket transmission assembly drives the cleaning threaded rod to rotate, which causes the cleaning threaded sleeve to drive the cleaning bracket and cleaning brush to slide on the top of the rotating filter plate. The spring at the bottom of the cleaning bracket makes the cleaning brush fit against the surface of the rotating filter plate, which facilitates the cleaning of the sediment on the surface of the rotating filter plate.

[0019] The second filter support is fixedly installed inside the second filter support, the first filter support and the second filter support are fixedly installed at the ends of the guide plate, the discharge valve is fixedly installed on the bottom side of the filter box, the liquid inlet pipe is fixedly installed on the top of the filter box, and the first support leg is fixedly installed around the bottom of the filter box.

[0020] By adopting the above technical solution, when the cleaning brush moves upward, the cleaning tool on one side of the rotating filter plate cleans the sediment adhering inside the cleaning brush, thereby improving the service life of the cleaning brush and further improving the filtration effect of the rotating filter plate. By setting a second filter, the waste liquid can be filtered in a secondary manner, thus improving the filtration effect of the waste liquid.

[0021] Preferably, the recycling and drying mechanism includes a drying support, a collection trough is fixedly installed at the bottom of the drying support, a drain pipe is fixedly installed at the bottom of the collection trough, second support legs are fixedly installed around the bottom of the collection trough, and conveyor motors are symmetrically installed on the back of the drying support.

[0022] By adopting the above technical solution, the precipitate after preliminary filtration can be dried by setting up a drying rack, and the waste liquid can be collected by a collection tank.

[0023] Preferably, the output end of the conveying motor is fixedly connected to a second sprocket drive assembly, the inside of the second sprocket drive assembly is symmetrically meshed with a conveying roller, one side of the second sprocket drive assembly is meshed with a third sprocket drive assembly, and the outside of the conveying roller is driven by a permeable conveyor belt.

[0024] By adopting the above technical solution, the conveyor motor drives the second sprocket transmission assembly and the conveyor roller to rotate, and the characteristics of the transmission connection between the conveyor roller and the permeable conveyor belt are used to transport the filtered impurities.

[0025] Preferably, the third sprocket drive assembly has symmetrically arranged vibrating rods on both sides inside, and vibrating cams are symmetrically arranged at both ends of the vibrating rods. The vibrating cams are in close contact with the permeable conveyor belt. The drying box is symmetrically installed on both sides of the drying support. A drying air duct is fixedly connected to the top of the drying box, and a drying air knife is fixedly connected between the two drying air ducts.

[0026] By adopting the above technical solution, the second sprocket drive assembly drives the third sprocket drive assembly and the vibrating rod to rotate, which in turn drives the vibrating cam to rotate. Utilizing the structural characteristics of the vibrating cam, it continuously taps the bottom of the permeable conveyor belt, facilitating the separation of sediment and waste liquid. At the same time, the vibration facilitates the all-round drying of the sediment. Hot air generated by the drying chamber is used to dry the sediment through the drying air duct and drying air knife, thus obtaining dry calcium fluoride precipitate.

[0027] Preferably, the drying bracket is fixedly installed on one side of the filter box, and mounting holes are symmetrically opened on one side of the drying bracket, and discharge pipes are symmetrically installed on the side of the drying bracket away from the mounting holes.

[0028] By adopting the above technical solution, the installation holes facilitate the installation of the filter box and the drying bracket, and the discharge pipe facilitates the discharge of the sediment after drying.

[0029] Compared with the prior art, the beneficial effects of the present invention are as follows: This electronic-grade hydrofluoric acid waste liquid recovery device and method, by rotating the filter screen plate, can clean the precipitate on the rotating filter screen plate, causing the precipitate to move towards the guide plate at the bottom of the first filter support through the swinging motion, thereby facilitating the initial cleaning of the rotating filter screen plate and improving its filtration effect. Hot air generated by the drying chamber is used to dry the precipitate through the drying duct and drying air knife, facilitating the obtaining of dry calcium fluoride precipitate. The specific details are as follows:

[0030] 1. By setting up a filtration mechanism, the cleaning motor can drive the first sprocket transmission assembly and the bevel gear transmission assembly to rotate. The bevel gear transmission assembly then drives the reciprocating rotating disk and the mounting block to rotate. The mounting block pulls the reciprocating connecting rope and the meshing rack inside the first filter bracket. Under the action of the connecting spring, the meshing rack reciprocates. Utilizing the meshing connection between the gear and the rack, the reciprocating rotating rod and the rotating filter screen plate rotate. The oscillation of the rotating filter screen plate cleans the sediment on it, causing the sediment to move towards the guide plate at the bottom of the first filter bracket, thus facilitating initial cleaning of the rotating filter screen plate and improving the rotation efficiency. The filter plate's filtration effect is enhanced to prevent sediment from clogging the rotating filter plate. Simultaneously, the first sprocket drive assembly rotates the cleaning threaded rod, causing the cleaning threaded sleeve to slide along the top of the rotating filter plate along the cleaning bracket and cleaning brush. A spring at the bottom of the cleaning bracket keeps the cleaning brush in contact with the surface of the rotating filter plate, facilitating the cleaning of sediment and directing impurities to the guide plate. As the cleaning brush moves upward, the cleaning brush on one side of the rotating filter plate cleans any sediment adhering to the inside of the cleaning brush, extending its lifespan and further improving the filtration effect of the rotating filter plate. A second filter screen allows for secondary filtration of the waste liquid, further enhancing its filtration efficiency.

[0031] 2. By setting up a recycling and drying mechanism, not only can the conveyor motor drive the second sprocket transmission assembly and the conveyor roller to rotate, but also the transmission connection between the conveyor roller and the permeable conveyor belt can be used to transport the filtered impurities. The second sprocket transmission assembly drives the third sprocket transmission assembly and the vibrating rod to rotate, which in turn drives the vibrating cam to rotate. Utilizing the structural characteristics of the vibrating cam, it continuously taps the bottom of the permeable conveyor belt, facilitating the separation of sediment and waste liquid. At the same time, the vibration facilitates the all-round drying of the sediment. Hot air generated by the drying chamber is used to dry the sediment through the drying air duct and drying air knife, making it easy to obtain dry calcium fluoride precipitate. Attached Figure Description

[0032] Figure 1 This is a schematic diagram of the overall three-dimensional structure of the present invention;

[0033] Figure 2 This is a three-dimensional cross-sectional structural diagram of the filtration mechanism in this invention;

[0034] Figure 3 This is a three-dimensional structural diagram of the first filter support in this invention;

[0035] Figure 4 This is a three-dimensional structural diagram of the reciprocating rotating rod in this invention;

[0036] Figure 5 This is a three-dimensional structural diagram of the bevel gear transmission assembly in this invention;

[0037] Figure 6 This is a three-dimensional structural diagram of the rotating filter plate in this invention;

[0038] Figure 7 This is a schematic diagram of the three-dimensional structure of the cleaning brush in this invention;

[0039] Figure 8 This is a three-dimensional structural diagram of the recycling and drying mechanism in this invention;

[0040] Figure 9 This is a three-dimensional structural diagram of the permeable conveyor belt and drying air knife in this invention;

[0041] Figure 10 This is a schematic diagram of the three-dimensional structure of the vibration cam in this invention.

[0042] In the diagram: 1. Filtering mechanism; 101. Filter box; 102. First filter support; 103. Cleaning sliding frame; 104. First motor cover; 105. Cleaning motor; 106. First sprocket drive assembly; 107. Bevel gear drive assembly; 108. Reciprocating rotating disk; 109. Mounting block; 110. Reciprocating connecting rope; 111. Meshing rack; 112. Connecting spring; 113. Meshing gear; 114. Reciprocating rotating rod; 115. Rotating filter screen; 116. Cleaning needle; 117. Cleaning threaded rod; 118. Cleaning threaded sleeve; 119. Cleaning support; 120. Cleaning brush; 121. 122. Second filter support; 123. Second filter screen; 124. Guide plate; 125. Discharge valve; 126. Liquid inlet pipe; 127. First support leg; 2. Recycling and drying mechanism; 201. Drying support; 202. Collection tank; 203. Drain pipe; 204. Second support leg; 205. Conveyor motor; 206. Second sprocket drive assembly; 207. Conveyor roller; 208. Third sprocket drive assembly; 209. Water-permeable conveyor belt; 210. Vibrating rotor; 211. Vibrating cam; 212. Drying box; 213. Drying air duct; 214. Drying air knife; 215. Mounting hole; 216. Discharge pipe. Detailed Implementation

[0043] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0044] Please see Figure 1-10This invention provides a technical solution: a waste liquid recovery device and method for electronic-grade hydrofluoric acid, comprising a filtration mechanism 1 and a discharge valve 124 installed on one side of the bottom of the filtration mechanism 1. A recovery drying mechanism 2 is provided on one side of the filtration mechanism 1, and a drying box 212 is provided on the outside of the recovery drying mechanism 2. The filtration mechanism 1 includes a filter box 101, and a first filter support 102 and a second filter support 121 are symmetrically installed inside the filter box 101. A cleaning sliding frame 103 is fixedly installed on the top of both the first filter support 102 and the second filter support 121. The top side of the cleaning sliding frame 103 is... A first motor cover 104 is fixedly installed. A cleaning motor 105 is fixedly installed inside one side of the first motor cover 104. The output end of the cleaning motor 105 is fixedly connected to a first sprocket drive assembly 106. A bevel gear drive assembly 107 is symmetrically connected to one side of the top of the first sprocket drive assembly 106. A reciprocating rotating disk 108 is fixedly installed at the bottom of the bevel gear drive assembly 107. A mounting block 109 is rotatably connected to one side of the bottom of the reciprocating rotating disk 108. A reciprocating connecting rope 110 is fixedly connected to the bottom of the mounting block 109. A meshing rack 111 is fixedly connected to the end of the reciprocating connecting rope 110. A connecting spring 112 is fixedly connected to the end of the rack 111. One side of the connecting spring 112 is fixedly installed inside the first filter bracket 102. The rack 111 is slidably connected to the first filter bracket 102. Several meshing gears 113 are meshed at the bottom of the rack 111. A reciprocating rotating rod 114 is fixedly connected to the inner side of the meshing gears 113. The reciprocating rotating rod 114 is rotatably connected to the first filter bracket 102. A rotating filter screen 115 is fixedly installed on the outer side of the reciprocating rotating rod 114. By setting the filter mechanism 1, the first sprocket transmission assembly 10 can be driven by the cleaning motor 105. The rotation of the bevel gear transmission assembly 107 causes the bevel gear transmission assembly 107 to drive the reciprocating rotating disk 108 and the mounting block 109 to rotate. The mounting block 109 pulls the reciprocating connecting rope 110 and the meshing rack 111 to move inside the first filter bracket 102. Under the action of the connecting spring 112, the reciprocating motion of the meshing rack 111 is realized. Utilizing the meshing connection between the meshing gear 113 and the meshing rack 111, the rotation of the reciprocating rotating rod 114 and the rotating filter screen 115 is realized. By swinging the rotating filter screen 115, the sediment on the rotating filter screen 115 can be cleaned.

[0045] A cleaning needle 116 is fixedly installed on one side of the end of the rotating filter screen 115. A cleaning threaded rod 117 is symmetrically rotatably connected inside the cleaning sliding frame 103. The cleaning threaded rod 117 is fixedly connected to the first sprocket drive assembly 106. Cleaning threaded sleeves 118 are threadedly connected to the outer sides of the two cleaning threaded rods 117. A cleaning bracket 119 is fixedly connected to the top of the two cleaning threaded sleeves 118. A cleaning brush 120 is fixedly installed at the bottom of the cleaning bracket 119. A second filter screen 122 is fixedly installed inside the second filter bracket 121. Guide plates 123 are fixedly installed at the ends of the first filter bracket 102 and the second filter bracket 121. A discharge valve 124 is fixedly installed on one side of the bottom of the filter box 101. An inlet pipe 125 is fixedly installed on the top of the filter box 101. First support legs 126 are fixedly installed around the bottom of the filter box 101. By swinging, the sediment moves towards the guide plate 123 at the bottom of the first filter bracket 102, thereby... The rotating filter plate 115 is initially cleaned to improve its filtration efficiency and prevent sediment buildup that could clog it. Simultaneously, the first sprocket drive assembly 106 rotates the cleaning threaded rod 117, causing the cleaning threaded sleeve 118 to slide along the top of the rotating filter plate 115, along with the cleaning bracket 119 and cleaning brush 120. A spring at the bottom of the cleaning bracket 119 keeps the cleaning brush 120 in contact with the surface of the rotating filter plate 115, facilitating the removal of sediment and directing impurities to the guide plate 123. As the cleaning brush 120 moves upward, cleaning needles 116 on one side of the rotating filter plate 115 clean the sediment adhering to the inside of the brush, extending its lifespan and further improving the filtration efficiency. The addition of a second filter plate 122 enables secondary filtration of the waste liquid, further enhancing its filtration effectiveness.

[0046] The recycling and drying mechanism 2 includes a drying support 201. A collection trough 202 is fixedly installed at the bottom of the drying support 201. A drain pipe 203 is fixedly installed at the bottom of the collection trough 202. Second support legs 204 are fixedly installed around the bottom of the collection trough 202. A conveyor motor 205 is symmetrically installed on the back of the drying support 201. A second sprocket drive assembly 206 is fixedly connected to the output end of the conveyor motor 205. A conveyor roller 207 is symmetrically meshed inside the second sprocket drive assembly 206. A third sprocket drive assembly 208 is meshed on one side of the second sprocket drive assembly 206. A permeable conveyor belt 209 is driven to the outside of the conveyor roller 207. By setting up the recycling and drying mechanism 2, the second sprocket drive assembly 206 and the conveyor roller 207 can be driven to rotate by the conveyor motor 205. The filtered impurities can be conveyed by utilizing the transmission connection between the conveyor roller 207 and the permeable conveyor belt 209.

[0047] The third sprocket drive assembly 208 has symmetrically arranged vibrating rods 210 on both sides inside. Vibrating cams 211 are symmetrically arranged at both ends of the vibrating rods 210. The vibrating cams 211 are in close contact with the permeable conveyor belt 209. Drying boxes 212 are symmetrically installed on both sides of the drying support 201. A drying air duct 213 is fixedly connected to the top of the drying box 212. A drying air knife 214 is fixedly connected between the two drying air ducts 213. The drying support 201 is fixedly installed on one side of the filter box 101. Mounting holes 215 are symmetrically opened on one side of the drying support 201. A discharge pipe 216 is symmetrically installed on the side away from the mounting hole 215. The second sprocket drive assembly 206 drives the third sprocket drive assembly 208 and the vibrating rod 210 to rotate, which in turn drives the vibrating cam 211 to rotate. Utilizing the structural characteristics of the vibrating cam 211, the bottom of the permeable conveyor belt 209 is continuously struck, which facilitates the separation of sediment and waste liquid. At the same time, the vibration facilitates the all-round drying of the sediment. Hot air generated by the drying box 212 is used to dry the sediment through the drying air pipe 213 and the drying air knife 214, which facilitates the obtaining of dry calcium fluoride precipitate.

[0048] Working principle: Before using this electronic-grade hydrofluoric acid waste liquid recovery device and method, it is necessary to check the overall condition of the device to ensure it can operate normally. Figure 1 - Figure 10 As shown, firstly, waste liquid is discharged into the filter box 101 through the inlet pipe 125. Preliminary filtration of the waste liquid is performed using the rotating filter screen 115. Then, the cleaning motor 105 is started, driving the first sprocket transmission assembly 106 and the bevel gear transmission assembly 107 to rotate. The bevel gear transmission assembly 107 drives the reciprocating rotating disk 108 and the mounting block 109 to rotate. The mounting block 109 pulls the reciprocating connecting rope 110 and the meshing rack 111 to move inside the first filter bracket 102. Under the action of the connecting spring 112, the reciprocating rack 111 moves back and forth. The reciprocating motion utilizes the meshing connection between the meshing gear 113 and the meshing rack 111 to achieve the rotation of the reciprocating rotating rod 114 and the rotating filter plate 115. By swinging the rotating filter plate 115, the sediment on the rotating filter plate 115 can be cleaned, and the sediment moves towards the guide plate 123 at the bottom of the first filter support 102 through the swinging motion. This facilitates the initial cleaning of the rotating filter plate 115, improves the filtration effect of the rotating filter plate 115, and avoids the phenomenon of sediment actively clogging the rotating filter plate 115.

[0049] Secondly, the first sprocket drive assembly 106 drives the cleaning threaded rod 117 to rotate, causing the cleaning threaded sleeve 118 to drive the cleaning bracket 119 and the cleaning brush 120 to slide on the top of the rotating filter plate 115. The spring at the bottom of the cleaning bracket 119 makes the cleaning brush 120 fit against the surface of the rotating filter plate 115, which facilitates the cleaning of the sediment on the surface of the rotating filter plate 115 and cleans the impurities to the guide plate 123. When the cleaning brush 120 moves upward, the cleaning needle 116 on one side of the rotating filter plate 115 cleans the sediment adhering to the inside of the cleaning brush 120, improves the service life of the cleaning brush 120, and further improves the filtration effect of the rotating filter plate 115. By setting the second filter screen 122, the waste liquid can be filtered in a secondary manner, which improves the filtration effect of the waste liquid.

[0050] Finally, the conveyor motor 205 drives the second sprocket drive assembly 206 and the conveyor roller 207 to rotate. Utilizing the transmission connection between the conveyor roller 207 and the permeable conveyor belt 209, the filtered impurities are conveyed. The second sprocket drive assembly 206 drives the third sprocket drive assembly 208 and the vibrating rod 210 to rotate, causing the vibrating rod 210 to drive the vibrating cam 211 to rotate. Utilizing the structural characteristics of the vibrating cam 211, it continuously taps the bottom of the permeable conveyor belt 209, facilitating the separation of sediment and waste liquid. At the same time, the vibration facilitates the all-round drying of the sediment. Hot air generated by the drying chamber 212 is used to dry the sediment through the drying air duct 213 and the drying air knife 214, thus obtaining dry calcium fluoride precipitate.

[0051] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A waste liquid recovery device for electronic grade hydrofluoric acid, comprising a filtration mechanism (1) and a discharge valve (124) installed on one side of the bottom of the filtration mechanism (1). A recycling and drying mechanism (2) is provided on one side of the filtration mechanism (1), and a drying box (212) is provided on the outside of the recycling and drying mechanism (2). Its features are, Also includes: The filtration mechanism (1) includes a filter box (101), and a first filter bracket (102) and a second filter bracket (121) are symmetrically installed inside the filter box (101). A cleaning sliding frame (103) is fixedly installed on the top of the first filter bracket (102) and the second filter bracket (121). Among them, a first motor cover (104) is fixedly installed on one side of the top of the cleaning sliding frame (103), and a cleaning motor (105) is fixedly installed on one side of the inside of the first motor cover (104). Among them, the output end of the cleaning motor (105) is fixedly connected to the first sprocket drive assembly (106), and the top of the first sprocket drive assembly (106) is symmetrically connected to the bevel gear drive assembly (107). The bottom of the bevel gear transmission assembly (107) is fixedly mounted with a reciprocating rotary disk (108). A mounting block (109) is rotatably connected to one side of the bottom of the reciprocating rotary disk (108). A reciprocating connecting rope (110) is fixedly connected to the bottom of the mounting block (109). A meshing rack (111) is fixedly connected to the end of the reciprocating connecting rope (110). A connecting spring (112) is fixedly connected to the end of the meshing rack (111). One side of the connecting spring (112) is fixedly mounted inside the first filter bracket (102). The meshing rack (111) is slidably connected to the first filter bracket (102). The bottom of the meshing rack (111) is meshed with several meshing gears (113). A reciprocating rotating rod (114) is fixedly connected to the inner side of the meshing gears (113). The reciprocating rotating rod (114) is rotatably connected to the first filter bracket (102). A rotating filter screen plate (115) is fixedly installed on the outer side of the reciprocating rotating rod (114). A cleaning needle (116) is fixedly installed on one side of the end of the rotating filter screen plate (115). The cleaning sliding frame (103) is symmetrically rotatably connected to a cleaning threaded rod (117). The cleaning threaded rod (117) is fixedly connected to the first sprocket drive assembly (106). The outer sides of the two cleaning threaded rods (117) are threadedly connected to cleaning threaded sleeves (118). The tops of the two cleaning threaded sleeves (118) are fixedly connected to a cleaning bracket (119). The bottom of the cleaning bracket (119) is fixedly installed with a cleaning brush (120). The second filter support (121) is fixedly installed with a second filter screen (122). The first filter support (102) and the second filter support (121) are fixedly installed with guide plates (123). The discharge valve (124) is fixedly installed on one side of the bottom of the filter box (101). The top of the filter box (101) is fixedly installed with an inlet pipe (125). The bottom of the filter box (101) is fixedly installed with first support legs (126).

2. The waste liquid recovery device for electronic-grade hydrofluoric acid according to claim 1, characterized in that: The recycling and drying mechanism (2) includes a drying support (201), a collection trough (202) is fixedly installed at the bottom of the drying support (201), a drain pipe (203) is fixedly installed at the bottom of the collection trough (202), a second support leg (204) is fixedly installed around the bottom of the collection trough (202), and a conveyor motor (205) is symmetrically installed on the back of the drying support (201).

3. The waste liquid recovery device for electronic-grade hydrofluoric acid according to claim 2, characterized in that: The output end of the conveying motor (205) is fixedly connected to a second sprocket drive assembly (206). The second sprocket drive assembly (206) is symmetrically meshed with a conveying roller (207) inside. The second sprocket drive assembly (206) is meshed with a third sprocket drive assembly (208) on one side. The conveying roller (207) is driven by a permeable conveyor belt (209) on the outside.

4. The waste liquid recovery device for electronic-grade hydrofluoric acid according to claim 3, characterized in that: The third sprocket drive assembly (208) has symmetrically arranged vibrating rods (210) on both sides inside. Vibrating cams (211) are symmetrically arranged at both ends of the vibrating rods (210). The vibrating cams (211) are in close contact with the permeable conveyor belt (209). The drying box (212) is symmetrically installed on both sides of the drying support (201). The top of the drying box (212) is fixedly connected to the drying air duct (213). A drying air knife (214) is fixedly connected between the two drying air ducts (213).

5. The waste liquid recovery device for electronic-grade hydrofluoric acid according to claim 4, characterized in that: The drying bracket (201) is fixedly installed on one side of the filter box (101). The drying bracket (201) has symmetrically opened mounting holes (215) on one side. The drying bracket (201) has symmetrically installed discharge pipes (216) on the side away from the mounting holes (215).

6. A method for recovering waste liquid from electronic-grade hydrofluoric acid using a waste liquid recovery device as described in claim 5, wherein the processing steps are as follows: Step 1: Discharge the waste liquid into the filter box (101) through the inlet pipe (125). Use the rotating filter screen (115) to perform preliminary filtration of the waste liquid. Start the cleaning motor (105) to drive the first sprocket transmission assembly (106) and the bevel gear transmission assembly (107) to rotate. The bevel gear transmission assembly (107) drives the reciprocating rotating disk (108) and the mounting block (109) to rotate. The mounting block (109) pulls the reciprocating connecting rope (110) and the meshing rack (111) to move inside the first filter bracket (102). Under the action of the connecting spring (112), the meshing rack (111) is engaged. The reciprocating motion of the rotating rod (114) and the rotating filter plate (115) is achieved by utilizing the meshing connection between the meshing gear (113) and the meshing rack (111). Through the swinging motion of the rotating filter plate (115), the sediment on the rotating filter plate (115) can be cleaned. The sediment moves towards the guide plate (123) at the bottom of the first filter support (102) by swinging motion, which facilitates the initial cleaning of the rotating filter plate (115), improves the filtration effect of the rotating filter plate (115), and avoids the phenomenon of sediment actively clogging the rotating filter plate (115). Step 2: The first sprocket drive assembly (106) drives the cleaning threaded rod (117) to rotate, so that the cleaning threaded sleeve (118) drives the cleaning bracket (119) and the cleaning brush (120) to slide on the top of the rotating filter plate (115). The spring at the bottom of the cleaning bracket (119) makes the cleaning brush (120) fit against the surface of the rotating filter plate (115), which facilitates the cleaning of the sediment on the surface of the rotating filter plate (115) and the impurities are cleaned to the guide plate (123). When the cleaning brush (120) moves upward, the cleaning needle (116) on one side of the rotating filter plate (115) cleans the sediment adhering to the inside of the cleaning brush (120), improves the service life of the cleaning brush (120), and further improves the filtration effect of the rotating filter plate (115). By setting the second filter (122), the waste liquid can be filtered twice, and the filtration effect of the waste liquid can be improved. Step 3: The conveyor motor (205) drives the second sprocket drive assembly (206) and the conveyor roller (207) to rotate. The conveyor roller (207) and the permeable conveyor belt (209) are connected to the conveyor to transport the filtered impurities. The second sprocket drive assembly (206) drives the third sprocket drive assembly (208) and the vibrating rod (210) to rotate. The vibrating rod (210) drives the vibrating cam (211) to rotate. The vibrating cam (211) continuously taps the bottom of the permeable conveyor belt (209) to facilitate the separation of sediment and waste liquid. At the same time, the vibration facilitates the drying of the sediment in all directions. The hot air generated by the drying box (212) is dried through the drying air pipe (213) and the drying air knife (214) to dry the sediment, so as to obtain dry calcium fluoride precipitate.

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