Electroplating machine hanger inner and outer cover blow-drying device

Abstract

The application discloses a drying device for inner and outer covers of a hanger of an electroplating machine and relates to the technical field of gold bump packaging of driving chips. The drying device comprises a mounting base, a drying box is arranged at the top of the mounting base, an inner cover drying mechanism and an outer cover drying mechanism are arranged in the drying box, and the inner cover drying mechanism and the outer cover drying mechanism are vertically distributed. The inner and outer covers are uniformly rotated by the inner cover drying mechanism and the outer cover drying mechanism, nitrogen is blown out to dry the placed inner and outer covers, no water is left on the inner and outer covers during electroplating, and the yield of products is improved.

Description

Technical Field

[0001] This invention relates to the field of driver chip gold bump packaging technology, specifically to a drying device for the inner and outer covers of an electroplating machine hanger. Background Technology

[0002] The manufacturing process of gold bumps for driver chips includes the following steps: sputtering, photoresist coating, exposure, development, gold electroplating, photoresist removal, plasma treatment and gold etching, and titanium tungsten etching. Among these steps, gold electroplating involves depositing gold bumps with a height of 10-15 micrometers on the photoresist window area of ​​the wafer. The wafer to be electroplated in the next step needs to be fixed on a rack platform, and the inner and outer covers of the rack are used to fix and seal the wafer to prevent it from falling or leaking plating solution from the back of the wafer, which could lead to wafer abnormalities. After the wafer is electroplated, it will undergo processes such as soaking and rinsing, and finally the wafer will be manually removed.

[0003] The inner and outer covers are wet after soaking and rinsing, making them susceptible to contamination from airborne microparticles. Furthermore, the water used in the wet process is not very clean. When the chip is installed onto the next wafer, the contaminated water from the inner and outer covers will drip onto the wafer, affecting chip yield. Summary of the Invention

[0004] The purpose of this invention is to provide a drying device for the inner and outer covers of an electroplating machine rack, which dries the inner and outer covers after electroplating and solves the problem of contaminating the next wafer.

[0005] The objective of this invention can be achieved through the following technical solutions:

[0006] The electroplating machine hanger inner and outer cover drying device includes a mounting base, a drying box is provided on the top of the mounting base, and an inner cover drying mechanism and an outer cover drying mechanism are provided inside the drying box, and the inner cover drying mechanism and the outer cover drying mechanism are vertically distributed vertically.

[0007] The inner cover drying mechanism includes a first drive assembly and multiple sets of first auxiliary assemblies installed on the drying box. Multiple sets of first auxiliary assemblies are engaged with the first drive assembly to hold multiple inner covers. The drying box is equipped with a first air blowing system, which includes an air blowing assembly one and an air blowing assembly two. Both air blowing assembly one and air blowing assembly two are arranged around the inner cover. Multiple first separation plates are fitted in cooperation with the first air blowing system. A first water collection box is provided below the inner cover.

[0008] Multiple first separation plates separate adjacent inner covers to prevent moisture from affecting each other.

[0009] As a further embodiment of the present invention: the drying box includes a side plate base and a side baffle, a back plate is connected to the back of the side plate base and the side baffle, and a top plate is connected to the top. The side plate base, the side baffle, the back plate, the top plate and the mounting base constitute a drying chamber, and a partition is provided in the drying chamber.

[0010] As a further aspect of the present invention: the outer cover drying mechanism includes a second driving component and multiple sets of second auxiliary components mounted on the drying box. The multiple sets of second auxiliary components cooperate with the second driving component to snap onto multiple outer covers. The drying box is also provided with a second air blowing system, which includes air blowing component three and air blowing component four, both of which are arranged around the outer cover. A second water collection box is provided below the outer cover. The second auxiliary components and the second air blowing system cooperate to sleeve multiple second separation plates.

[0011] As a further embodiment of the present invention: the third air blowing component has the same structure as the first air blowing component, and the fourth air blowing component has the same structure as the second air blowing component.

[0012] As a further aspect of the present invention: the first drive assembly includes a first drive motor and a first drive shaft, a first drive cylinder is sleeved on the first drive shaft, a first drive wheel is connected to one end of the first drive shaft, and the first drive wheel is connected to the output shaft of the first drive motor via a first drive belt; the second drive assembly includes a second drive motor and a second drive shaft, a second drive cylinder is sleeved on the second drive shaft, a second drive wheel is connected to one end of the second drive shaft, and the second drive wheel is connected to the output shaft of the second drive motor via a second drive belt.

[0013] As a further aspect of the present invention: the first auxiliary component includes a first rotating shaft, on which a plurality of first driven idler wheels are mounted at equal intervals in the transverse direction; the second auxiliary component includes a second auxiliary component, on which a plurality of second driven idler wheels are mounted at equal intervals in the transverse direction.

[0014] As a further aspect of the present invention: the air blowing assembly includes an air blowing main pipe, which is connected to a plurality of universal nozzles. One end of the air blowing main pipe is connected to a connecting pipe, which is connected to an external nitrogen source.

[0015] As a further embodiment of the present invention: the first separation plate is symmetrically provided with blocking parts on the front and rear sides, the first separation plate is provided with water-gathering grooves in the middle, the bottom of the first separation plate is provided with an assembly groove adapted to the first drive cylinder, and the second separation plate has the same structure as the first separation plate.

[0016] As a further aspect of the present invention: the air blowing assembly 2 includes an air blowing main pipe 2, which is provided with a plurality of universal nozzles 2. One side of the air blowing main pipe 2 is connected to a connecting pipe 2, and the other end of the connecting pipe 2 is connected to an external nitrogen source. The air blowing main pipe 2 is provided with sleeve grooves at equal intervals, and a plurality of lateral blowing rings are sleeved in the sleeve grooves. The sleeve grooves of the air blowing main pipe 2 are provided with air outlets, and the lateral blowing rings are provided with a plurality of air blowing holes. The diameters of the plurality of air blowing holes increase sequentially and correspond to the positions of the air outlets.

[0017] As a further aspect of the present invention: the lateral blowing ring has an annular blowing groove on one side of the blowing hole.

[0018] The beneficial effects of this invention are:

[0019] 1. The present invention places the inner and outer covers removed after electroplating in a drying device. The inner and outer covers are rotated at a uniform speed by the inner and outer cover drying mechanism and nitrogen gas is blown out to dry the inner and outer covers, so that there is no water residue on the inner and outer covers during electroplating, thereby improving the product yield.

[0020] 2. The present invention provides a first separation plate and a second separation plate to block the gap between two adjacent inner and outer covers, so that the water vapor blown out by nitrogen during the drying process of each inner and outer cover will not affect each other, and the water vapor carried out can be collected and flowed down in the water collection grooves of the first and second separation plates, and flow into the first and second water collection boxes, thus preventing the blown-out nitrogen from carrying it again and affecting the drying process.

[0021] 3. The present invention provides an annular air-blowing groove on one side of the air-blowing hole of the lateral blowing ring, which corresponds to the side of the inner or outer cover. By blowing air to dry the side away from the universal nozzle, the drying efficiency is effectively improved. Attached Figure Description

[0022] The invention will now be further described with reference to the accompanying drawings.

[0023] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0024] Figure 2 This is a schematic diagram of the cross-sectional structure of the side plate base of the present invention;

[0025] Figure 3 This is a schematic diagram of the internal structure of the drying box of the present invention;

[0026] Figure 4 This is a schematic diagram of the first separation plate structure of the present invention;

[0027] Figure 5 This is a schematic diagram of the inner cover drying mechanism of the present invention;

[0028] Figure 6 This is a schematic diagram of the outer cover drying mechanism of the present invention;

[0029] Figure 7 This is a schematic diagram of the internal structure of the second air blowing component of the present invention;

[0030] Figure 8 This is a schematic diagram showing the corresponding positions of the air blowing component 2 and the inner cover of the present invention;

[0031] Figure 9This is a schematic diagram showing the corresponding positions of the air blowing component four and the outer cover of the present invention.

[0032] In the diagram: 1. Mounting base; 2. Drying chamber; 21. Side plate base; 22. Back plate; 23. Side baffle; 24. Top plate; 25. Partition; 3. Inner cover drying mechanism; 31. First drive assembly; 311. First drive motor; 312. First drive shaft; 313. First drive cylinder; 314. First drive wheel; 315. First drive belt; 32. First auxiliary assembly; 321. First rotating shaft; 322. First driven idler wheel; 33. First air blowing system; 331. Air blowing assembly one; 3311. Air blowing main pipe one; 3312. Universal nozzle one; 3313. Connecting pipe one; 332. Air blowing assembly two; 3321. Air blowing main pipe two; 3322. Universal nozzle two; 3323. Connecting pipe two; 3324. Lateral blowing ring; 3325. Air blowing hole; 3326. Air blowing groove; 3327. Air outlet; 34. First separation plate; 341. Blocking part; 342. Water collecting groove; 343. Assembly groove; 35. First water collection box; 4. Outer cover drying mechanism; 41. Second drive assembly; 411. Second drive motor; 412. Second drive shaft; 413. Second drive cylinder; 414. Second drive wheel; 415. Second drive belt; 42. Second auxiliary assembly; 421. Second rotating shaft; 422. Second driven idler wheel; 43. Second air blowing system; 431. Air blowing assembly three; 432. Air blowing assembly four; 44. Second separation plate; 45. Second water collection box; 100. Inner cover; 200. Outer cover. Detailed Implementation

[0033] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0034] The present invention is as follows Figures 1-9 As shown, a drying device for the inner and outer covers of an electroplating machine rack is designed. The inner and outer covers removed after electroplating are placed in the drying device. The inner and outer covers are rotated at a uniform speed by the inner cover drying mechanism 3 and the outer cover drying mechanism 4. Nitrogen gas is blown out to dry the inner cover 100 and the outer cover 200, so that there is no water residue on the inner cover 100 and the outer cover 200 during electroplating, thereby improving the product yield.

[0035] Example 1

[0036] like Figure 1As shown, the drying device includes a mounting base 1 fixed on the production line. A drying chamber 2 is provided on the top of the mounting base 1. An inner cover drying mechanism 3 and an outer cover drying mechanism 4 are provided inside the drying chamber 2. The inner cover drying mechanism 3 and the outer cover drying mechanism 4 are vertically distributed. The inner cover drying mechanism 3 processes the inner cover 100, and the outer cover drying mechanism 4 processes the outer cover 200, so that there is no water residue on the inner cover 100 and the outer cover 200 after processing, thereby improving the yield of chip electroplating.

[0037] Further such as Figure 2 and Figure 3 As shown, the drying chamber 2 includes a side plate base 21 and a side baffle 23 connected to both sides of the top surface of the mounting base 1. A back plate 22 is connected to the back of the side plate base 21 and the side baffle 23, and a top plate 24 is connected to the top. A partition 25 is provided in the drying chamber formed by the side plate base 21, the side baffle 23, the back plate 22, the top plate 24 and the mounting base 1. The inner cover drying mechanism 3 and the outer cover drying mechanism 4 are connected to the partition 25.

[0038] Further, such as Figure 3 As shown, the inner cover drying mechanism 3 includes a first drive assembly 31 mounted on the drying chamber 2, and multiple sets of first auxiliary assemblies 32 are rotatably arranged on the drying chamber 2. The multiple sets of first auxiliary assemblies 32 cooperate with the first drive assembly 31 to engage multiple inner covers 100. The multiple first auxiliary assemblies 32 are arranged around the inner cover 100 and are coaxial with the inner cover 100. Furthermore, the drying chamber 2 is also provided with a first air blowing system 33 for air blowing and drying. The first air blowing system 33 includes an air blowing assembly 331 and an air blowing assembly 332. The air blowing assembly 331 and the air blowing assembly 332 are arranged around the inner cover 100 and are staggered with the multiple sets of first auxiliary assemblies 32. A first water collection box 35 is provided below the inner cover 100 for collecting the blown water.

[0039] The outer cover drying mechanism 4 includes a second drive assembly 41 mounted on the drying box 2, and multiple sets of second auxiliary assemblies 42 are rotatably arranged on the drying box 2. The second auxiliary assemblies 42 cooperate with the second drive assembly 41 to snap onto multiple outer covers 200. The multiple sets of second auxiliary assemblies 42 are arranged around the outer covers 200 and are coaxial with the outer covers 200. A second air blowing system 43 is also provided on the drying box 2. The second air blowing system 43 includes air blowing assembly three 431 and air blowing assembly four 432, both of which are arranged around the outer covers 200 and are staggered with the multiple sets of second auxiliary assemblies 42. A second water collection box 45 is provided below the outer cover 200 to collect the water blown out from the outer cover 200.

[0040] The structure of the third blowing assembly 431 is completely identical to that of the first blowing assembly 331, and the structure of the fourth blowing assembly 432 is completely identical to that of the second blowing assembly 332.

[0041] The inner cover 100 and the outer cover 200 are driven to rotate at a constant speed by the first driving component 31 and the second driving component 41 respectively. Nitrogen gas is blown out of the inner cover 100 and the outer cover 200 by the first blowing system 33 and the second blowing system 43 respectively, and the inner cover 100 and the outer cover 200 are dried.

[0042] Further nitrogen, including hot nitrogen, accelerates the drying process.

[0043] Example 2

[0044] like Figures 3-6 As shown, the first drive assembly 31 includes a first drive motor 311 fixed to the upper end of the partition 25 and a first drive shaft 312 rotating on the side plate base 21 and the side baffle 23. A first drive cylinder 313 is sleeved on the first drive shaft 312, and a first drive wheel 314 is connected to one end of the first drive shaft 312 that extends into the side plate base 21. The first drive wheel 314 is connected to the output shaft of the first drive motor 311 through a first drive belt 315.

[0045] The side plate base 21 has an installation cavity inside, and the installation cavity facing the first drive motor 311 passes through the installation space formed by the partition 25 and the back plate 22. The first drive belt 315 and the first drive wheel 314 are both located in the installation cavity, and the first drive motor 311 is located in the installation space.

[0046] The further first auxiliary component 32 includes a first rotating shaft 321 that rotates on the side plate base 21 and the side baffle 23. A plurality of first driven idler wheels 322 are installed laterally at equal intervals on the first rotating shaft 321. The number of first driven idler wheels 322 is equal to the number of the 100 inner covers installed.

[0047] Among them, such as Figure 5 As shown, the first auxiliary component 32 is configured in two groups, and the included angle between the two groups of the first auxiliary component 32 around the axis of the inner cover 100 is less than 180 degrees (the included angle is expressed as follows). Figure 5 (From the bottom first auxiliary component 32 to the top first auxiliary component 32 clockwise) so that the opening for placing the inner cover 100 can be easily inserted.

[0048] The further air blowing assembly 331 and air blowing assembly 332 have the same structure. Air blowing assembly 331 includes an air blowing main pipe 3311 installed between the side plate base 21 and the side baffle 23. The air blowing main pipe 3311 is connected to a plurality of universal nozzles 3312 on one side of the inner cover 100. The plurality of universal nozzles 3312 correspond one-to-one with the plurality of inner covers 100 and are located on the left side of the inner cover 100 (as shown in the figure). Figure 5From a basic perspective, the blowing pipe 3311 is connected to a connecting pipe 3313 at one end, which is connected to an external nitrogen source. By connecting the nitrogen source, nitrogen is sprayed from multiple universal nozzles 3312 to dry the inner cover 100 at the corresponding position.

[0049] Further, such as Figure 3 and Figure 4 As shown, a first separation plate 34 is provided on the right side of each inner cover 100. The first separation plate 34 has symmetrical blocking parts 341 on its front and rear sides to prevent the blown water vapor from spreading outward. A water-gathering groove 342 is arranged longitudinally and transversely in the middle of the first separation plate 34, and an assembly groove 343 adapted to the first drive cylinder 313 is opened at the bottom of the first separation plate 34 to avoid affecting the rotation of the first drive cylinder 313. The first rotating shaft 321 and the air blowing main pipe 3311 are both arranged through the first separation plate 34, and the first rotating shaft 321 and the first separation plate 34 are rotatably connected. The first separation plate 34 blocks the two adjacent inner covers 100, so that the water vapor blown out by nitrogen during the air drying of each inner cover 100 will not affect each other, and the water vapor carried out can be collected in the water-gathering groove 342 of the first separation plate 34 and flow down into the first water collection box 35, so as to prevent the blown nitrogen from carrying it again and affecting the air drying.

[0050] Similarly, Figure 6 As shown, the second drive assembly 41 includes a second drive motor 411 mounted on the lower end of the partition 25 and a second drive shaft 412 rotating on the side plate base 21 and the side baffle 23. A second drive cylinder 413 is sleeved on the second drive shaft 412, and a second drive wheel 414 is connected to one side of the second drive shaft 412 into the mounting cavity of the side plate base 21. The second drive wheel 414 is connected to the output shaft of the second drive motor 411 through a second drive belt 415. The second drive belt 415 and the second drive wheel 414 are both located in the mounting cavity, and the second drive motor 411 is located in the mounting space.

[0051] The further second auxiliary component 42 includes a rotatably configured second rotating shaft 421, on which a plurality of second driven idler wheels 422 are installed laterally at equal intervals. The plurality of second driven idler wheels 422 cooperate with the second drive cylinder 413 to engage with the outer cover 200. The number of second driven idler wheels 422 is equal to the number of outer cover 200.

[0052] And as Figure 6 As shown, the second auxiliary component 42 is configured as two groups, and the included angle between the two groups of second auxiliary components 42 is the same as the included angle between the two groups of first auxiliary components 32.

[0053] The second separation plate 44 has the same structure as the first separation plate 34 and is also set on the right side of each outer cover 200. The second separation plate 44 blocks the gap between two adjacent outer covers 200, so that the water vapor blown out by nitrogen during the drying process of each outer cover 200 will not affect each other. Moreover, the water vapor carried out can be collected and flowed down in the water collection groove 342 of the second separation plate 44 and into the second water collection box 45, so as to prevent the blown-out nitrogen from carrying it again and affecting the drying process.

[0054] Example 3

[0055] like Figures 7-9 As shown, the second air blowing assembly 332 differs in structure from the first air blowing assembly 331. The second air blowing assembly 332 includes a second air blowing main pipe 3321, which is installed between the side plate base 21 and the side baffle 23. Multiple sets of universal nozzles 3322 are evenly spaced on the second air blowing main pipe 3321 corresponding to one side of the inner cover 100 or the outer cover 200, and the universal nozzles 3322 are located on the right side of the inner cover 100 or the outer cover 200. Figure 8 From a basic perspective, one side of the blowing main pipe 2 3321 is connected to the connecting pipe 2 3323, which passes through the side plate base 21 and is connected to the external nitrogen source.

[0056] Further such as Figure 7 As shown, the second air blowing main pipe 3321 has equally spaced connecting grooves. These grooves are located between two adjacent universal nozzles 3322 and correspond to the axial surface of the inner cover 100 or the outer cover 200. Multiple lateral blowing rings 3324 are fitted into these grooves. The lateral blowing rings 3324 are rotatably fitted onto the second air blowing main pipe 3321 and positioned by pins. Air outlets 3327 are provided in the connecting grooves of the second air blowing main pipe 3321 corresponding to the positions of the inner cover 100 or the outer cover 200. Multiple air blowing holes 3325 are provided on the lateral blowing rings 3324. The diameters of the multiple air blowing holes 3325 increase sequentially and correspond to the positions of the air outlets 3327. Furthermore, the lateral blowing ring 3324 has an annular blowing groove 3326 on one side of the blowing hole 3325. This blowing groove 3326 corresponds to the side position of the inner cover 100 or the outer cover 200 (this side is the side away from the universal nozzle 3322). By blowing air to dry the side away from the universal nozzle 3322, the drying efficiency is effectively improved (including the water vapor blown away from the universal nozzle 3322 and the part that is splashed by the impact of the first separation plate 34 or the second separation plate 44, as well as the part that was originally attached). Moreover, by adjusting the size of the blowing hole 3325, the nitrogen flow rate can be flexibly adjusted to further optimize the drying effect.

[0057] Example 4

[0058] The method of using the air-drying device is as follows: Place the inner cover 100 and the outer cover 200 in the corresponding inner cover air-drying mechanism 3 and the outer cover air-drying mechanism 4, respectively. Start the first drive motor 311 and the second drive motor 411 to drive the first drive shaft 312 and the second drive shaft 412 to rotate, which in turn drives the first drive cylinder 313 and the second drive cylinder 413 to rotate. The first drive cylinder 313, in conjunction with the first driven idler wheel 322, drives the inner cover 100 to rotate at a constant speed. The second drive cylinder 413, in conjunction with the second driven idler wheel 422, drives the outer cover 200 to rotate at a constant speed. Simultaneously connect the nitrogen source of the first air-blowing system 33 and the second air-blowing system 43 to air-dry the inner cover 100 and the outer cover 200 (wherein the air-blowing hole 3325 is selected and set before processing).

[0059] Example 5

[0060] To further conserve nitrogen, valves are installed in universal nozzle 1 (3312) and universal nozzle 2 (3322), and sensors are placed at the positions of inner cover 100 or outer cover 200. When inner cover 100 or outer cover 200 is placed in the corresponding position, the corresponding universal nozzle 1 (3312) or universal nozzle 2 (3322) blows out nitrogen. After it is removed, the corresponding universal nozzle 1 (3312) or universal nozzle 2 (3322) closes and stops blowing out nitrogen, thus conserving nitrogen and saving costs.

[0061] In the description of this invention, it should be understood that the terms "upper," "lower," "left," and "right," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or a specific orientational structure and operation. Therefore, they should not be construed as limitations on the invention. Furthermore, "first" and "second" are only for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "multiple" means two or more.

[0062] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0063] The foregoing has provided a detailed description of one embodiment of the present invention, but this description is merely a preferred embodiment and should not be construed as limiting the scope of the invention. All equivalent variations and modifications made within the scope of the claims of this invention should still fall within the patent coverage of this invention.

Claims

1. A drying device for the inner and outer covers of an electroplating machine hanger, characterized in that, Includes a mounting base (1), a drying box (2) is provided on the top of the mounting base (1), and an inner cover drying mechanism (3) and an outer cover drying mechanism (4) are provided inside the drying box (2), and the inner cover drying mechanism (3) and the outer cover drying mechanism (4) are vertically distributed up and down; The inner cover drying mechanism (3) includes a first drive assembly (31) and multiple sets of first auxiliary assemblies (32) installed on the drying box (2). Multiple sets of first auxiliary assemblies (32) are engaged with the first drive assembly (31) to attach multiple inner covers (100). The drying box (2) is provided with a first air blowing system (33). The first air blowing system (33) includes an air blowing assembly one (331) and an air blowing assembly two (332). Both air blowing assembly one (331) and air blowing assembly two (332) are arranged around the inner cover (100). Multiple first separation plates (34) are fitted together with the first air blowing system (33). A first water collection box (35) is provided below the inner cover (100). Multiple first separation plates (34) separate adjacent inner covers (100) to prevent water vapor from affecting each other; The outer cover drying mechanism (4) includes a second drive assembly (41) and multiple sets of second auxiliary assemblies (42) installed on the drying box (2). Multiple sets of second auxiliary assemblies (42) are engaged with the second drive assembly (41) to attach multiple outer covers (200). The drying box (2) is also provided with a second air blowing system (43). The second air blowing system (43) includes air blowing assembly three (431) and air blowing assembly four (432), both of which are arranged around the outer cover (200). A second water collection box (45) is provided below the outer cover (200). Multiple second separation plates (44) are fitted together with the second auxiliary assembly (42) and the second air blowing system (43) to separate two adjacent outer covers (200). The first auxiliary component (32) includes a first rotating shaft (321), on which a plurality of first driven idler wheels (322) are installed at equal intervals in the transverse direction; the second auxiliary component (42) includes a second rotating shaft (421), on which a plurality of second driven idler wheels (422) are installed at equal intervals in the transverse direction.

2. The electroplating machine hanger inner and outer cover drying device according to claim 1, characterized in that, The drying box (2) includes a side plate base (21) and a side baffle (23). The back of the side plate base (21) and the side baffle (23) are connected to a back plate (22), and the top is connected to a top plate (24). The side plate base (21), the side baffle (23), the back plate (22), the top plate (24) and the mounting base (1) constitute the drying chamber. A partition (25) is provided in the drying chamber.

3. The electroplating machine hanger inner and outer cover drying device according to claim 1, characterized in that, The structure of the third blowing assembly (431) is the same as that of the first blowing assembly (331), and the structure of the fourth blowing assembly (432) is the same as that of the second blowing assembly (332).

4. The electroplating machine hanger inner and outer cover drying device according to claim 1, characterized in that, The first drive assembly (31) includes a first drive motor (311) and a first drive shaft (312). A first drive cylinder (313) is sleeved on the first drive shaft (312). A first drive wheel (314) is connected to one end of the first drive shaft (312). The first drive wheel (314) is connected to the output shaft of the first drive motor (311) via a first drive belt (315). The second drive assembly (41) includes a second drive motor (411) and a second drive shaft (412). A second drive cylinder (413) is sleeved on the second drive shaft (412). A second drive wheel (414) is connected to one end of the second drive shaft (412). The second drive wheel (414) is connected to the output shaft of the second drive motor (411) via a second drive belt (415).

5. The electroplating machine hanger inner and outer cover drying device according to claim 3, characterized in that, The blowing assembly 1 (331) includes a blowing main pipe 1 (3311), which is connected to multiple universal nozzles 1 (3312). One end of the blowing main pipe 1 (3311) is connected to a connecting pipe 1 (3313), and the connecting pipe 1 (3313) is connected to an external nitrogen source.

6. The electroplating machine hanger inner and outer cover drying device according to claim 4, characterized in that, The first separation plate (34) has symmetrical blocking parts (341) on both the front and rear sides, and a water-gathering groove (342) is arranged longitudinally and transversely in the middle of the first separation plate (34). The bottom of the first separation plate (34) has an assembly groove (343) that is compatible with the first drive cylinder (313), and the second separation plate (44) has the same structure as the first separation plate (34).

7. The electroplating machine hanger inner and outer cover drying device according to claim 3, characterized in that, The second air blowing assembly (332) includes a second air blowing main pipe (3321), which is provided with multiple universal nozzles (3322). One side of the second air blowing main pipe (3321) is connected to a connecting pipe (3323), and the other end of the connecting pipe (3323) is connected to an external nitrogen source. The second air blowing main pipe (3321) is provided with slotted grooves at equal intervals, and multiple side blowing rings (3324) are fitted in the slots. The slots of the second air blowing main pipe (3321) are provided with air outlets (3327), and the side blowing rings (3324) are provided with multiple air blowing holes (3325). The diameters of the multiple air blowing holes (3325) increase sequentially and correspond to the positions of the air outlets (3327).

8. The electroplating machine hanger inner and outer cover drying device according to claim 7, characterized in that, The side blowing ring (3324) has an annular blowing groove (3326) on one side of the blowing hole (3325).

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