A chip micro defect bright spot detection device

Abstract

The present invention relates to the field of microscopic detection technology, and discloses a chip microscopic defect bright spot detection device, including an operating table, a detection component, the detection component including a mounting frame, the mounting frame is slidably mounted on the operating table, a light blocking plate is mounted on the mounting frame, a ball slider is slidably mounted on the mounting frame, a microscope is mounted on the ball slider, a small screw is rotatably mounted on the mounting frame, a hand wheel is connected to the front end of the small screw, a large screw is rotatably mounted on the operating table, and a rotating wheel is connected to the left end of the large screw. Through the setting of the detection component, the staff can adjust the microscope in four directions in the horizontal direction by turning the hand wheel and the rotating wheel, so that the microscope can detect multiple chips on the tray from different angles, thereby improving the flexibility of the microscope, and multiple chips can be detected at one time, thereby improving the detection efficiency.

Description

Technical Field

[0001] The present invention relates to the field of microscopic detection technology, in particular to a chip microscopic defect bright spot detection device. Background Art

[0002] With the continuous development of science and technology, the quality and performance of chips, as an indispensable core component in modern electronic devices, have an increasingly significant impact on the entire device. And tiny defects on the surface of the chip, even tiny flaws that are difficult to detect with the naked eye, may have a significant impact on the working performance and stability of the chip. Therefore, efficient and accurate visual inspection of tiny defects on the chip surface has become an important part of the chip manufacturing process. Visual inspection of tiny defects on the chip surface mainly relies on advanced machine vision technology and image processing algorithms. These technologies can scan and analyze the chip surface with high precision and high speed, so as to find those tiny defects that are difficult to detect with the naked eye. The machine vision system first captures images of the chip surface through a high-resolution camera, and then uses image processing algorithms to preprocess, extract features and identify defects on these images.

[0003] Chinese patent publication number CN 108872240 A discloses "a micro defect detection device and detection method, microscope", including: a detection component, a marking component, and a conversion component; wherein the detection component and the marking component are both arranged on the conversion component; the conversion component is connected to the microscope; the detection component has a first viewing area for detecting the position where micro defects exist on the display panel; the conversion component is used to rotate the marking component to the first viewing area where the micro defects exist when the detection component detects the position where the micro defects exist; the marking component has a second viewing area for determining the position where the micro defects exist in the first viewing area where the micro defects exist, and marking the position; the area of ​​the second viewing area is smaller than that of the first viewing area, which can solve the problem of inaccurate marking of existing micro defect parts.

[0004] During the conception process, the applicant searched a large number of patent documents on the patent network. For example, China Patent Publication No. CN108872240 A discloses "a micro defect detection device and detection method, a microscope". During use, since each detection requires manual placement of the chip to be detected, and the number of chips detected at a time is small, when more chips need to be detected, it takes a long time, resulting in low work efficiency. In addition, since the detection device is not easy to move, the flexibility of the device is poor when detecting the chip, which affects the detection efficiency. Therefore, a chip micro defect bright spot detection device is proposed to solve the above-mentioned problems. Summary of the invention

[0005] 1. Technical issues to be resolved

[0006] In view of the deficiencies in the prior art, the present invention provides a chip micro defect bright spot detection device, which solves the problem that during use, the chip to be detected needs to be placed manually for each detection, and the number of chips detected at one time is small. When more chips need to be detected, it takes a long time, resulting in low work efficiency. In addition, since the detection device is not easy to move, the flexibility of the device is poor when detecting the chip, thus affecting the detection efficiency.

[0007] (II) Technical solution

[0008] To achieve the above object, the present invention provides the following technical solution: a chip micro defect bright spot detection device, comprising:

[0009] Operation table;

[0010] Inspection components, used to detect microscopic defects on chips;

[0011] A conveying device, used for conveying the chip to be tested;

[0012] A centering device, used to center the chip to be tested;

[0013] A display is installed on the operating table, the detection component is arranged on the operating table, the conveying device is arranged on the operating table, and the centering device is arranged on the operating table.

[0014] Preferably, the detection component includes a mounting frame, the mounting frame is slidably mounted on the operating table, a light baffle is installed on the mounting frame, a ball slider is slidably mounted on the mounting frame, a microscope is mounted on the ball slider, a small screw is rotatably mounted on the mounting frame, a handwheel is connected to the front end of the small screw, a large screw is rotatably mounted on the operating table, and a rotating wheel is connected to the left end of the large screw.

[0015] Preferably, the ball slider is slidably connected to the threaded groove on the surface of the small screw rod through the ball, the mounting frame is slidably connected to the threaded groove on the surface of the large screw rod through the ball, and a signal line is provided on the microscope, and the signal line is connected to the display.

[0016] Preferably, a sliding frame is slidably mounted on the mounting frame, two universal joints are respectively mounted on both ends of the sliding frame, and the two universal joints are respectively connected to two spotlights.

[0017] Preferably, the conveying device includes a rotating shaft, which is rotatably mounted on the inner wall of the operating table, and a driven shaft is also mounted on the inner wall of the operating table. A conveyor belt is sleeved on the rotating shaft and the driven shaft, two ratchets are respectively connected to the two ends of the rotating shaft, and a ball screw is connected to the ratchet. Two ball cylinders are slidably mounted on the inner wall of the operating table, and two resistance rods are connected to the bottom of the mounting frame. Two inclined plane frames are mounted on the inner wall of the operating table, and two inclined plane blocks are respectively slidably connected to the two inclined plane frames, and a counterweight block is connected to the bottom of the inclined plane block.

[0018] Preferably, the two ball screws are respectively located on the motion trajectories of the two ball cylinders, the two inclined blocks are respectively located on the motion trajectories of the two interference rods, four rebounders are installed on the inner wall of the operating table, and the ends of the four rebounders away from the conveyor belt are respectively connected to the two ball cylinders, a plurality of trays are placed on the conveyor belt, and a guide plate is installed on the left side of the operating table.

[0019] Preferably, a scraper is installed on the inner wall of the operating table, two ends of the scraper are respectively connected to two connecting blocks, a plurality of spring plates are installed on the connecting blocks, two paddles are respectively installed on the two counterweight blocks, and the plurality of spring plates are located on the movement trajectory of the paddles.

[0020] Preferably, the centering device includes two push rods, both of which are slidably mounted on the inner wall of the operating table, the push rods are connected to sliding rods, the sliding rods are slidably mounted on the inner wall of the operating table, one end of the sliding rod away from the push rods is hinged with a connecting rod, one end of the connecting rod away from the sliding rod is hinged with a fork frame, and two clamping wheels are mounted on the fork frame through torsion springs.

[0021] Preferably, two guide wheels are arranged on the clamping wheel, the sliding rod is located on the movement track of the mounting frame, the two fork frames are both slidably mounted on the inner wall of the operating table, the two fork frames are both connected to the operating table through springs, and the two fork frames are arranged in a mirror image.

[0022] (III) Beneficial effects

[0023] Compared with the prior art, the present invention provides a chip micro defect bright spot detection device, which has the following beneficial effects:

[0024] 1. The chip micro defect bright spot detection equipment, through the setting of the detection component, allows the staff to adjust the microscope in four directions in the horizontal direction by turning the hand wheel and the rotating wheel, so that the microscope can detect multiple chips on the tray from different angles, which improves the flexibility of the microscope, and can detect multiple chips at a time, thereby improving the detection efficiency; through the cooperation of the sliding frame, the universal joint, and the spotlight, the spotlight can move synchronously with the movement of the microscope, avoiding the uneven illumination of the chips on the tray when the microscope is moving, thereby affecting the detection, and the setting of the universal joint allows the staff to adjust the angle of the spotlight according to different chip specifications, thereby enhancing the adaptability of the spotlight illumination.

[0025] 2. The chip micro defect bright spot detection equipment, through the setting of the conveying device, enables the conveyor belt to transport the inspected tray to the guide plate, and transports the trays to be inspected to the bottom of the microscope in turn, reducing the operation of the staff to manually place the chips to be inspected, simplifying the staff's operation process, and thus improving work efficiency; through the cooperation of the scraper, connecting block, spring, and paddle, the scraper can continuously clean the conveyor belt, and the scraper can shake off the dust attached to its surface by vibration, ensuring its own cleanliness, and avoiding the conveyor belt after long-term use, the surface of the conveyor belt is attached with a lot of dust and contaminating the trays and chips above it.

[0026] 3. The chip micro defect bright spot detection equipment, through the setting of the centering device, enables two fork frames to drive four clamping wheels to center the pallet to be inspected, so as to avoid the pallet from being skewed when placed, thereby affecting subsequent inspections. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 This is a schematic diagram of the overall structure of a chip micro defect bright spot detection device proposed by the present invention;

[0028] Figure 2 This is a schematic diagram of the structure of a detection component of a chip micro defect bright spot detection device proposed by the present invention;

[0029] Figure 3 This is a schematic diagram of the structure of a spotlight for chip micro defect bright spot detection equipment proposed by the present invention;

[0030] Figure 4 This is a schematic diagram of the structure of a conveying device for chip micro defect bright spot detection equipment proposed by the present invention;

[0031] Figure 5 This is a schematic diagram of the structure of a conveyor belt of a chip micro defect bright spot detection device proposed by the present invention;

[0032] Figure 6A chip micro defect bright spot detection device proposed by the present invention Figure 5 The intention of amplification is at A;

[0033] Figure 7 This is a schematic diagram of the structure of a scraper for a chip micro defect bright spot detection device proposed by the present invention;

[0034] Figure 8 This is a structural schematic diagram of a centering device for chip micro defect bright spot detection equipment proposed by the present invention;

[0035] Fig. 9 A chip micro defect bright spot detection device proposed by the present invention Figure 8 The intention is to enlarge the B area.

[0036] In the figure: 1, operating table; 2, display; 3, tray; 4, detection component; 41, mounting frame; 42, light shield; 43, microscope; 44, ball slider; 45, small screw; 46, hand wheel; 47, large screw; 48, rotating wheel; 49, sliding frame; 410, universal joint; 411, spotlight; 5, conveying device; 51, rotating shaft; 52, driven shaft; 53, conveyor belt; 54. Ratchet; 55. Ball screw; 56. Ball cylinder; 57. Inclined block; 58. Resistance rod; 59. Inclined frame; 510. Counterweight; 511. Rebounder; 512. Scraper; 513. Connecting block; 514. Shrapnel; 515. Pick; 516. Guide plate; 6. Centering device; 61. Push rod; 62. Sliding rod; 63. Connecting rod; 64. Fork frame; 65. Clamp wheel. DETAILED DESCRIPTION

[0037] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0038] Example 1

[0039] See also Figure 1-Figure 3A chip micro defect bright spot detection device comprises: an operating table 1, on which a display 2 is installed; a detection component 4, which is used to perform micro defect detection on the chip; the detection component 4 is arranged on the operating table 1, and the detection component 4 comprises a mounting frame 41, which is slidably mounted on the operating table 1, on which a light blocking plate 42 is installed, on which a ball slider 44 is slidably mounted on the mounting frame 41, on which a microscope 43 is installed, on which a small lead screw 45 is rotatably mounted, and a hand wheel 46 is connected to the front end of the small lead screw 45, on which a large lead screw 47 is rotatably mounted on the operating table 1, and a rotating wheel 48 is connected to the left end of the large lead screw 47, and the ball slider 44 is slidably connected to the threaded groove on the surface of the small lead screw 45 through a ball, and the mounting The frame 41 is slidably connected to the threaded groove on the surface of the large screw rod 47 through the ball bearing. A signal line is set on the microscope 43, and the signal line is connected to the display 2. When the staff rotates the hand wheel 46, the hand wheel 46 drives the small screw rod 45 to rotate, and the small screw rod 45 drives the ball slider 44 to move in the horizontal direction through the ball bearing. When the ball slider 44 moves, it drives the microscope 43 to move. When the staff rotates the rotating wheel 48, the rotating wheel 48 drives the large screw rod 47 to rotate. The large screw rod 47 drives the mounting frame 41 to move in the horizontal direction through the ball bearing. When the mounting frame 41 moves, it drives the microscope 43 to move through the ball slider 44, thereby realizing that the staff can adjust the microscope 43 in four directions in the horizontal direction through the hand wheel 46 and the rotating wheel 48.

[0040] For further information, see Figure 3 A sliding frame 49 is slidably mounted on the mounting frame 41, and two universal joints 410 are respectively mounted on both ends of the sliding frame 49. The two universal joints 410 are respectively connected to two spotlights 411. When the microscope 43 moves, the microscope 43 drives the two universal joints 410 to move synchronously through the sliding frame 49, and the two universal joints 410 respectively drive the two spotlights 411 to move synchronously, so that the two spotlights 411 can keep irradiating the chips on the tray 3.

[0041] By setting up the detection component 4, the staff can adjust the microscope 43 in four directions in the horizontal direction by turning the hand wheel 46 and the rotating wheel 48, so that the microscope 43 can detect multiple chips on the tray 3 from different angles, thereby improving the flexibility of the microscope 43 and detecting multiple chips at one time, thereby improving the detection efficiency; by the cooperation of the sliding frame 49, the universal joint 410, and the spotlight 411, the spotlight 411 can move synchronously with the movement of the microscope 43, thereby avoiding uneven illumination of the chips on the tray 3 when the microscope 43 moves, thereby affecting the detection, and the setting of the universal joint 410 allows the staff to adjust the angle of the spotlight 411 according to different chip specifications, thereby enhancing the adaptability of the illumination of the spotlight 411.

[0042] In this embodiment, the conveying device 5 is used to convey the chip to be detected.

[0043] See also Figure 4-Figure 6 The conveying device 5 is arranged on the operating table 1. The conveying device 5 includes a rotating shaft 51, which is rotatably mounted on the inner wall of the operating table 1. A driven shaft 52 is also installed on the inner wall of the operating table 1. A conveying belt 53 is sleeved on the rotating shaft 51 and the driven shaft 52. Two ratchets 54 are respectively connected to the two ends of the rotating shaft 51. A ball screw 55 is connected to the ratchet 54. The thread directions of the two ball screws 55 are opposite. The ratchet 54 can only drive the rotating shaft 51 to rotate in one direction. Two ball cylinders 56 are slidably mounted on the inner wall of the operating table 1. Two abutment rods 58 are connected to the bottom of the mounting frame 41. Two inclined plane frames 59 are installed on the inner wall of the operating table 1. Two inclined plane frames 59 are respectively slidably connected to two inclined planes. The surface block 57, the bottom of the inclined surface block 57 is connected with a counterweight block 510, the two ball screws 55 are respectively located on the movement tracks of the two ball cylinders 56, and the two inclined surface blocks 57 are respectively located on the movement tracks of the two interference rods 58. After the staff detects a tray 3 from right to left, the mounting frame 41 drives the two interference rods 58 to move to the two inclined surface blocks 57 through the adjustment of the staff. When the interference rod 58 contacts the inclined surface block 57, the interference rod 58 pushes the inclined surface block 57 to the left, and the inclined surface block 57 slides on the inclined surface frame 59 while pushing the ball cylinder 56 in the direction close to the ratchet 54. During the movement of the ball cylinder 56, it contacts the ball screw 55 and drives the ball screw through the ball 55 is rotated, four rebounders 511 are installed on the inner wall of the operating table 1, and the ends of the four rebounders 511 away from the conveyor belt 53 are respectively connected to two ball rollers 56. A plurality of trays 3 are placed on the conveyor belt 53. The staff puts the chips to be tested on the plurality of trays 3 in advance, and then puts the plurality of trays 3 on the conveyor belt 53 in order. The first tray 3 to be tested is placed under the microscope 43, and the remaining trays 3 are placed on the right of the first tray 3 in turn. The staff detects the chips on the lower tray 3 through the microscope 43. A guide plate 516 is installed on the left side of the operating table 1. The two ball screws 55 drive the rotating shaft 51 to rotate through the two ratchet wheels 54. The rotating shaft 51 drives the conveyor belt 53 and the driven shaft 52 to rotate. When the conveyor belt 53 rotates, it drives the multiple trays 3 above it to move a distance to the left, so that one of the trays 3 to be inspected is located under the microscope 43, and the tray 3 that has been inspected slides onto the guide plate 516. The tray 3 slides to the next process through the guide plate 516. At this time, the staff adjusts the mounting frame 41 to the right through the rotating wheel 48 to start a new round of inspection. When the mounting frame 41 drives the two resistance rods 58 to break away from the contact with the two inclined blocks 57, the two inclined blocks 57 are reset by the gravity of the two counterweights 510, and the two ball cylinders 56 are reset by the elastic force of the four rebounders 511.

[0044] For further information, see Figure 7 A scraper 512 is installed on the inner wall of the operating table 1. Two connecting blocks 513 are respectively connected at both ends of the scraper 512. A plurality of spring pieces 514 are installed on the connecting blocks 513. Two paddles 515 are respectively installed on the two counterweight blocks 510. The plurality of spring pieces 514 are located on the movement trajectory of the paddles 515. When the conveyor belt 53 rotates, the scraper 512 below it cleans the surface of the conveyor belt 53. When the two counterweight blocks 510 move, the two counterweight blocks 510 respectively drive the two paddles 515 to move. When the two paddles 515 move, they respectively pry the plurality of spring pieces 514 on the two connecting blocks 513, thereby causing the two connecting blocks 513 to vibrate. The two connecting blocks 513 drive the scraper 512 to vibrate, and the scraper 512 shakes off the dust attached to its surface through vibration.

[0045] By setting up the conveying device 5, the conveyor belt 53 can convey the inspected tray 3 to the guide plate 516, and convey the tray 3 to be inspected to the bottom of the microscope 43 in turn, thereby reducing the operation of the staff manually placing the chips to be inspected, simplifying the operation process of the staff, and thus improving the work efficiency; through the cooperation of the scraper 512, the connecting block 513, the spring 514, and the paddle 515, the scraper 512 can continuously clean the conveyor belt 53, and the scraper 512 can shake off the dust attached to its surface by vibration, thereby ensuring its own cleanliness and preventing the conveyor belt 53 from being attached to a lot of dust on the surface after long-term use, thereby contaminating the tray 3 and the chip above it.

[0046] In this embodiment, the centering device 6 is used to center the chip to be tested.

[0047] See also Figure 8-Figure 9The centering device 6 is arranged on the operating table 1. The centering device 6 includes two push rods 61. The two push rods 61 are both slidably mounted on the inner wall of the operating table 1. The push rods 61 are connected with a slide rod 62. The slide rod 62 is slidably mounted on the inner wall of the operating table 1. The end of the slide rod 62 away from the push rod 61 is hinged with a connecting rod 63. The end of the connecting rod 63 away from the slide rod 62 is hinged with a fork frame 64. Two clamping wheels 65 are installed on the fork frame 64 through a torsion spring. Two guide wheels are arranged on the clamping wheel 65. The slide rod 62 is located on the movement trajectory of the mounting frame 41. The two fork frames 64 are both slidably mounted on the inner wall of the operating table 1. The two fork frames 64 are connected to the operating table 1 through springs. The two fork frames 64 are mirror-imaged. When the mounting frame 41 moves to the right, the mounting frame 41 contacts the two push rods 61 and pushes the two push rods 61 to the right. The two push rods 61 drive the two slide rods 62 to move to the right. The two slide rods 62 drive the two fork frames 64 to move toward the conveyor belt 53 through the two connecting rods 63 respectively. The two fork frames 64 drive the four clamping wheels (65) to move toward the conveyor belt 53 respectively. The four clamping wheels 65 apply thrust to the four corners of the pallet 3 through the guide wheels above them, so as to center the pallet 3. When the mounting frame 41 is not in contact with the push rods 61, the fork frames 64 are reset by the elastic force of the spring. When the fork frames 64 are reset, they drive the connecting rods 63, the slide rods 62 and the push rods 61 to reset.

[0048] By setting the centering device 6, the two fork frames 64 drive the four clamping wheels 65 to center the pallet 3 to be inspected, so as to avoid the pallet 3 from being skewed when placed, thereby affecting subsequent inspection.

[0049] Working principle: the staff places the chips to be tested on multiple trays 3 in advance, and then places the multiple trays 3 on the conveyor belt 53 in order. The first tray 3 to be tested is placed below the microscope 43, and the remaining trays 3 are placed on the right side of the first tray 3 in turn. The staff uses the microscope 43 to test the chips on the lower tray 3. The microscope 43 can transmit the test image to the display 2 for display, which is convenient for the staff to observe. When the staff turns the hand wheel 46, the hand wheel 46 drives the small screw rod 45 to rotate, and the small screw rod 45 drives the ball slider 44 to move horizontally through the ball, and the ball slider 44 drives the microscope 43 to move when it moves. When the staff turns the rotating wheel 48, the rotating wheel 48 drives the large screw rod 47 to rotate, and the large screw rod 47 drives the mounting frame 41 to move horizontally through the ball, and the mounting frame 41 moves when it moves. The microscope 43 is driven to move through the ball slider 44, thereby realizing that the staff can use the hand wheel 46 and the rotating wheel 48 to adjust the microscope 43 in four directions in the horizontal direction. The staff can adjust the position of the microscope 43 to detect from the right side to the left side of the tray 3 in turn. When the microscope 43 moves, the microscope 43 drives the two universal joints 410 to move synchronously through the sliding frame 49, and the two universal joints 410 respectively drive the two spotlights 411 to move synchronously, so that the two spotlights 411 can keep irradiating the chips on the tray 3. The setting of the light shield 42 can prevent the room light from interfering with the chip detection process. Through the setting of the detection component 4, the staff can adjust the microscope 43 in four directions in the horizontal direction by turning the hand wheel 46 and the rotating wheel 48, so that the microscope 43 can detect multiple chips on the tray 3 from different angles. The chip can be tested, which improves the flexibility of the microscope 43 and can test multiple chips at a time, thereby improving the detection efficiency; through the cooperation of the sliding frame 49, the universal joint 410, and the spotlight 411, the spotlight 411 can move synchronously with the movement of the microscope 43, thereby avoiding uneven illumination of the chips on the tray 3 when the microscope 43 is moving, thereby affecting the detection, and the setting of the universal joint 410 allows the staff to adjust the angle of the spotlight 411 according to different chip specifications, thereby enhancing the adaptability of the illumination of the spotlight 411.

[0050] After the staff has inspected a tray 3 from right to left, the mounting frame 41 drives the two abutment rods 58 to move to the two inclined plane blocks 57 through the staff's adjustment. When the abutment rod 58 contacts the inclined plane block 57, the abutment rod 58 pushes the inclined plane block 57 to the left. The inclined plane block 57 slides on the inclined plane frame 59 and pushes the ball cylinder 56 toward the ratchet 54. During the movement of the ball cylinder 56, it contacts the ball screw 55 and drives the ball screw 55 to rotate through the ball. Since the thread directions of the two ball screws 55 are opposite, the two ball screws 55 drive the rotating shaft 51 to rotate through the two ratchets 54, and the rotating shaft 51 drives the conveyor belt 53 and the driven shaft 52. When the conveyor belt 53 rotates, it drives the multiple trays 3 above it to move a distance to the left, so that one of the trays 3 to be inspected is located under the microscope 43, and the tray 3 that has been inspected slides onto the guide plate 516. The tray 3 slides to the next process through the guide plate 516. At this time, the staff adjusts the mounting frame 41 to the right through the rotating wheel 48 to start a new round of inspection. When the mounting frame 41 drives the two resistance rods 58 to break away from the contact with the two inclined blocks 57, the two inclined blocks 57 are reset by the gravity of the two counterweights 510, and the two ball cylinders 56 are reset by the elastic force of the four rebounders 511. When the ball cylinder 56 is reset, it drives the ball The screw rod 55 rotates, and since the ratchet wheel 54 can only drive the rotating shaft 51 to rotate in one direction, when the ball screw 55 drives the ratchet wheel 54 to reset, the rotating shaft 51 is not affected; when the conveyor belt 53 rotates, the scraper 512 below it cleans the surface of the conveyor belt 53, and when the two counterweight blocks 510 move, the two counterweight blocks 510 respectively drive the two paddles 515 to move, and when the two paddles 515 move, they respectively pry the multiple springs 514 on the two connecting blocks 513, so that the two connecting blocks 513 vibrate, and the two connecting blocks 513 drive the scraper 512 to vibrate, and the scraper 512 shakes off the dust attached to its surface through the vibration; through the design of the conveying device 5 The arrangement enables the conveyor belt 53 to transport the inspected tray 3 to the guide plate 516, and transport the tray 3 to be inspected to the bottom of the microscope 43 in turn, reducing the operation of the staff manually placing the chips to be inspected, simplifying the staff's operation process, and thus improving work efficiency; through the cooperation of the scraper 512, the connecting block 513, the spring 514, and the paddle 515, the scraper 512 can continuously clean the conveyor belt 53, and the scraper 512 can shake off the dust attached to its surface by vibration, thereby ensuring its own cleanliness and preventing the conveyor belt 53 from being attached to a lot of dust on the surface after long-term use, thereby contaminating the tray 3 and chips above it.

[0051] When the mounting frame 41 moves to the right, the mounting frame 41 will contact the two push rods 61 and push the two push rods 61 to the right, and the two push rods 61 drive the two slide bars 62 to move to the right, and the two slide bars 62 respectively drive the two fork frames 64 to move in the direction close to the conveyor belt 53 through the two connecting rods 63, and the two fork frames 64 respectively drive the four clamping wheels (65) to move in the direction close to the conveyor belt 53, and the four clamping wheels 65 apply thrust to the four corners of the pallet 3 through the guide wheels above them, so as to center the pallet 3. When the mounting frame 41 is not in contact with the push rod 61, the fork frame 64 is reset by the elastic force of the spring, and the fork frame 64 resets while driving the connecting rod 63, the slide bar 62, and the push rod 61 to reset. Through the setting of the centering device 6, the two fork frames 64 drive the four clamping wheels 65 to center the pallet 3 to be inspected, so as to avoid the pallet 3 from being skewed when placed, thereby affecting subsequent inspection.

[0052] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

Claims

1. A chip micro defect bright spot detection device, characterized in that: include: Operation table (1); A detection component (4), used for performing microscopic defect detection on the chip; A conveying device (5), used for conveying the chip to be tested; A centering device (6), used for centering the chip to be tested; The operating table (1) is provided with a display (2), the detection component (4) is arranged on the operating table (1), the conveying device (5) is arranged on the operating table (1), and the centering device (6) is arranged on the operating table (1); The detection assembly (4) comprises a mounting frame (41), the mounting frame (41) is slidably mounted on the operating table (1), a light blocking plate (42) is mounted on the mounting frame (41), a ball slider (44) is slidably mounted on the mounting frame (41), a microscope (43) is mounted on the ball slider (44), a small screw rod (45) is rotatably mounted on the mounting frame (41), a front end of the small screw rod (45) is connected to a hand wheel (46), a large screw rod (47) is rotatably mounted on the operating table (1), and a rotating wheel (48) is connected to the left end of the large screw rod (47); The ball slider (44) is slidably connected to the thread groove on the surface of the small screw rod (45) through the ball, the mounting frame (41) is slidably connected to the thread groove on the surface of the large screw rod (47) through the ball, and a signal line is provided on the microscope (43), and the signal line is connected to the display (2); The conveying device (5) comprises a rotating shaft (51), the rotating shaft (51) is rotatably mounted on the inner wall of the operating platform (1), the inner wall of the operating platform (1) is also mounted with a driven shaft (52), a conveying belt (53) is sleeved on the rotating shaft (51) and the driven shaft (52), two ratchet wheels (54) are respectively connected to the two ends of the rotating shaft (51), a ball screw (55) is connected to the ratchet wheel (54), two ball cylinders (56) are slidably mounted on the inner wall of the operating platform (1), two abutment rods (58) are connected to the bottom of the mounting frame (41), two inclined plane frames (59) are mounted on the inner wall of the operating platform (1), two inclined plane blocks (57) are respectively slidably connected to the two inclined plane frames (59), and a counterweight block (510) is connected to the bottom of the inclined plane block (57); The two ball screws (55) are respectively located on the movement tracks of the two ball cylinders (56), the two inclined blocks (57) are respectively located on the movement tracks of the two abutment rods (58), four rebounders (511) are installed on the inner wall of the operating table (1), and the ends of the four rebounders (511) away from the conveyor belt (53) are respectively connected to the two ball cylinders (56), a plurality of trays (3) are placed on the conveyor belt (53), and a guide plate (516) is installed on the left side of the operating table (1).

2. The chip micro defect bright spot detection device according to claim 1, characterized in that: A sliding frame (49) is slidably mounted on the mounting frame (41), two universal joints (410) are respectively mounted on both ends of the sliding frame (49), and the two universal joints (410) are respectively connected to two spotlights (411).

3. The chip micro defect bright spot detection device according to claim 2, characterized in that: A scraper (512) is installed on the inner wall of the operating table (1), two connecting blocks (513) are respectively connected to the two ends of the scraper (512), a plurality of spring pieces 514 (514) are installed on the connecting blocks (513), two paddles (515) are respectively installed on the two counterweight blocks (510), and the plurality of spring pieces (514) are located on the movement track of the paddles (515).

4. The chip micro defect bright spot detection device according to claim 3, characterized in that: The centering device (6) comprises two push rods (61), both of which are slidably mounted on the inner wall of the operating table (1), the push rods (61) are connected to a sliding rod (62), the sliding rod (62) is slidably mounted on the inner wall of the operating table (1), one end of the sliding rod (62) away from the push rod (61) is hinged with a connecting rod (63), and one end of the connecting rod (63) away from the sliding rod (62) is hinged with a fork frame (64), and two clamping wheels (65) are mounted on the fork frame (64) via a torsion spring.

5. The chip micro defect bright spot detection device according to claim 4, characterized in that: The clamping wheel (65) is provided with two guide wheels, the sliding rod (62) is located on the movement track of the mounting frame (41), the two fork frames (64) are both slidably mounted on the inner wall of the operating table (1), the two fork frames (64) are both connected to the operating table (1) through springs, and the two fork frames (64) are arranged in a mirror image.

Images