Polishing head self-dressing controllable ultraviolet light assisted optical component polishing device and method

Abstract

The application provides a polishing device and method for polishing optical parts with controllable ultraviolet light, wherein the polishing device comprises a polishing head, a polishing head driving device, a workpiece driving device, a liquid supply device, a controllable ultraviolet light generating device, a polishing head trimming block and a polishing liquid storage pool; the controllable ultraviolet light generating device is arranged on the polishing rod and moves along with the polishing rod during processing, and the ultraviolet light irradiation range can be adjusted, so that the ultraviolet light can always irradiate the processing area. During the polishing process, the workpiece is modified through the chemical action of the ultraviolet light, a catalyst and an oxidant, the photochemical modification action and the mechanical removal of the abrasive on the oxide layer are alternately performed, and the local and overall high-efficiency and high-quality polishing of the workpiece is realized; in addition, the polishing device is also provided with the polishing head trimming block, so that the polishing head can be self-trimmed, and the service life of the polishing head is prolonged; the polishing device can realize the high-efficiency and high-quality processing of large-diameter aspheric optical parts.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of ultra-precision polishing, in particular to a polishing head self-dressing controllable ultraviolet light assisted optical component polishing device and method. BACKGROUND

[0002] In recent years, driven by the demand of national major optical engineering, substantial progress has been made in the equipment and process of large-aperture aspheric surface batch manufacturing. The precision polishing process is the most critical link in the batch manufacturing process chain of high-precision large-aperture aspheric surface, and its efficiency is an important indicator of the batch manufacturing capacity of large-aperture aspheric surface elements. However, the current research on automatic polishing technology for large-aperture aspheric optical components is still relatively weak. The machining of complex surfaces mainly relies on magnetorheological polishing method, stress disc polishing technology and ion beam shaping technology, etc. However, due to contact collision, local energy aggregation, poor curve adaptability and other reasons, it is easy to cause the appearance of micro-pit phenomenon on the surface of the polished part, which is difficult to meet the requirements of precision machining, and there are problems such as high cost.

[0003] Ultraviolet light assisted polishing technology is a new method of optical component machining for hard and brittle difficult-to-machine materials such as fused quartz glass, ultra-low expansion glass, microcrystalline glass and silicon carbide proposed in recent years. It is through the conversion of accelerators and oxidants under ultraviolet light irradiation to produce strong oxidizing substances, which react with the surface of the workpiece to improve the polishing efficiency. Ultraviolet light assisted polishing technology has potential application value in large-aperture aspheric optical components, but there is no suitable curved surface polishing method that can be combined with ultraviolet light assisted technology. SUMMARY

[0004] In order to overcome the deficiencies in the prior art, the present application provides a polishing head self-dressing controllable ultraviolet light assisted polishing device for optical components and a polishing method realized by using the device. In the present application, the ultraviolet light irradiates the catalyst and oxidant in the polishing liquid, realizes the efficient oxidation of the surface of the workpiece to be machined, and the photochemical modification and mechanical removal of the oxidized layer by abrasive particles are alternately carried out during the machining process, which can realize the local or full surface high-efficiency and high-quality polishing of the optical workpiece, overcome the problems of high cost, low machining efficiency and poor machining uniformity existing in the traditional polishing method, break the limitation of machining size, and realize the local or full surface machining of complex curves.

[0005] The present application provides the following technical solutions:

[0006] The polishing head self-trimming controllable ultraviolet light assisted polishing device of optical parts comprises a polishing head, a polishing head driving device, a workpiece driving device, a liquid supply device, a controllable ultraviolet light generating device, a polishing head trimming block and a polishing liquid storage tank; the workpiece driving device comprises a driver and a workpiece clamp; the driver is arranged at the bottom of the workpiece clamp and can drive the workpiece clamp to rotate; the workpiece driving device is arranged at the bottom of the polishing liquid storage tank; the polishing head driving device is arranged above the workpiece clamp and can adjust the position and posture; the polishing head driving device comprises a polishing rod which can be driven to rotate by a power element; the polishing head is arranged on the polishing rod; the controllable ultraviolet light generating device is arranged on the polishing rod and can control the irradiation range of ultraviolet light by adjusting the controllable ultraviolet light generating device; the polishing head trimming block is arranged on the side of the workpiece driving device; the liquid supply device comprises a peristaltic pump and a liquid delivery tube; the outlet of the liquid delivery tube is arranged above the polishing head trimming block; and the outlet of the peristaltic pump is connected with the inlet of the liquid delivery tube.

[0007] Compared with the prior art, the polishing device has the following beneficial technical effects: 1) in the polishing device, the controllable ultraviolet light generating device is arranged on the polishing rod and moves with the polishing rod during processing, and the irradiation range of ultraviolet light can be adjusted, so that the ultraviolet light can always irradiate the processing area, and the polishing processing of the complex curved surface of the optical part or the local or full surface of the optical part can be realized; 2) the polishing head trimming block is arranged, so that the self-trimming of the polishing head is realized, the service life of the polishing head is prolonged, and the polishing efficiency of the polishing head on the workpiece is improved.

[0008] Further, in the aforementioned polishing head self-trimming controllable ultraviolet light assisted polishing device of optical parts, the polishing head is in a disc structure and comprises a flexible fixed abrasive layer, an adhesive layer and a rigid layer; the fixed abrasive layer is connected with the rigid layer through the adhesive layer; the rigid layer is provided with a polishing head assembly hole; and the polishing head is connected and fixed with the polishing rod through the polishing head assembly hole. The flexible polishing head is adopted, the workpiece and the polishing head can be well attached, the stress uniformity is good, the processing damage is small, and the flexible polishing head has a relatively wide application prospect. Preferably, the flexible fixed abrasive layer comprises an embryo and a flexible grinding layer covering the surface of the embryo; the flexible grinding layer is composed of a flexible fiber base material with pores and a viscoelastic material with non-Newtonian fluid characteristics filled in the pores; and the viscoelastic material contains abrasive grains. During polishing, the shear action formed by the relative movement between the polishing head and the workpiece can make the viscoelastic material produce rheological effect, present instantaneous swelling and solidification effect, enhance the holding action of the abrasive grains and the pressure between the fixed abrasive and the workpiece, and thus improve the polishing efficiency.

[0009] Further, in the aforementioned polishing head self-dressing controllable ultraviolet light assisted polishing device for optical components, the controllable ultraviolet light generating device comprises a rib-type support, the rib-type support comprises a movable ring seat and a retractable strip-shaped lamp holder, the movable ring seat is in sliding connection with the polishing rod and can slide up and down, the up-and-down sliding of the movable ring seat can realize the contraction or expansion of the retractable strip-shaped lamp holder; the polishing rod is provided with an electric drive assembly capable of driving the movable ring seat; the outer end of the retractable strip-shaped lamp holder is provided with an ultraviolet lamp. Thus, the electric drive assembly can be used to drive the rib-type support to contract or expand, so as to adjust the irradiation range of the ultraviolet light and make the ultraviolet light always irradiate on the surface to be processed.

[0010] Further, in the aforementioned polishing head self-dressing controllable ultraviolet light assisted polishing device for optical components, the polishing head dressing block is provided with a dressing surface, the dressing surface is in the shape of a concave sphere, a group of annular grooves are distributed in the form of concentric circles on the dressing surface, and a diamond particle layer is fixed on the non-groove part of the dressing surface. The diamond particle layer can make the abrasive grains in the polishing head, which are flattened due to polishing of the workpiece, be sharpened again, so as to improve the service life of the polishing head; the annular grooves are used to slow down the flow speed of the polishing liquid, so that the polishing head is fully contacted with the polishing liquid and the dressing effect is improved. In the implementation of the present application, the cross section of the annular groove can be semicircular, triangular or square; the distance between adjacent annular grooves is 2-5 mm. Preferably, the granularity of the diamond in the diamond particle layer is 0.05-50 μm.

[0011] For the method, the present application provides the following technical scheme:

[0012] The polishing head self-dressing controllable ultraviolet light assisted polishing method for optical components is realized by using the aforementioned polishing head self-dressing controllable ultraviolet light assisted polishing device for optical components of the present application. In polishing, the workpiece to be processed is fixed on the workpiece clamp, and the polishing head is installed on the polishing rod; the position of the polishing head driving device is adjusted to move the polishing head to the vicinity of the polishing head dressing block and start the liquid supply device to transport clean water or polishing liquid to the polishing head dressing block; at the same time, the polishing head driving device is started to make the polishing head begin to rotate, the polishing head is moved to be in contact with the polishing head dressing block, and self-dressing is realized; after the self-dressing of the polishing head is completed, the polishing head is moved to the designated processing position, and the workpiece driving device is started to polish the workpiece; in the polishing process, the liquid supply device transports the polishing liquid to the polishing head dressing block, the polishing liquid flows from the polishing head dressing block to the surface of the workpiece, the controllable ultraviolet light generating device emits ultraviolet light, the polishing liquid contains an oxidizing agent and a catalyst, under the irradiation of the ultraviolet light, the catalyst generates electron-hole pairs, and the oxidizing agent in the polishing liquid generates active free radical strong oxidizing substances, which jointly act to form an oxide layer on the surface of the workpiece; the polishing head removes the oxide layer in the contact area with the workpiece, and polishing is realized. - + ) pairs, and the oxidizing agent in the polishing liquid generates active free radical strong oxidizing substances, which jointly act to form an oxide layer on the surface of the workpiece; the polishing head removes the oxide layer in the contact area with the workpiece, and polishing is realized.​

[0013] Compared with the prior art, the method of the present application utilizes photochemical reaction to generate an oxidation layer on the surface of the optical part which is easier to remove, thereby improving polishing efficiency; in addition, the method of the present application is implemented by using a polishing head self-trimming controllable ultraviolet light assisted optical part polishing device, the irradiation range of the ultraviolet light is controllable, and polishing of a complex curved surface locally or the whole surface can be realized; before polishing starts, the polishing head is trimmed first, which is conducive to improving the polishing effect.

[0014] As an optimization, in the aforementioned polishing head self-trimming controllable ultraviolet light assisted optical part polishing method, the catalyst in the polishing liquid can be one or more of TiO2, ZnO, SnO2, ZrO2 and CdS.

[0015] As an optimization, in the aforementioned polishing head self-trimming controllable ultraviolet light assisted optical part polishing method, the oxidizing agent in the polishing liquid can be one or more of H2O2, KMnO4, TiO2, Fe(NO3)3, K3Fe(CN)6, KIO3 and Cu(NO3)2. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 is a schematic diagram of the polishing head self-trimming controllable ultraviolet light assisted polishing device and method of the optical part of the present application;

[0017] Figure 2 is a schematic diagram of the polishing head structure of the present application;

[0018] Figure 3 is an enlarged view of the details of the polishing head when polishing;

[0019] Figure 4 is a schematic diagram of the controllable ultraviolet light generating device in the embodiment of the present application;

[0020] Figure 5 is a schematic diagram of the polishing head trimming block structure and an enlarged view of the trimming surface in the embodiment of the present application;

[0021] Figure 6 is the surface detection result before workpiece machining in the embodiment of the present application;

[0022] Figure 7 is the surface detection result after workpiece machining in the embodiment of the present application.

[0023] The marks in the drawing are: 1-polishing head; 101-flexible fixed abrasive layer; 102-adhesive layer; 103-rigid layer; 104-polishing head assembly hole; 2-polishing head driving device; 201-polishing rod; 3-workpiece driving device; 301-driver; 302-workpiece clamp; 4-liquid supply device; 401-peristaltic pump; 402-liquid delivery tube; 5-controllable ultraviolet light generating device; 501-moving ring seat; 502-retractable strip lamp holder; 503-ultraviolet lamp; 6-polishing head dressing block; 601-dressing surface; 6011-annular groove; 6012-diamond particle layer; 7-polishing liquid storage tank; 8-workpiece; 9-polishing liquid; 10-oxidation layer. DETAILED DESCRIPTION

[0024] The technical solutions of the present application are further specifically described below by specific examples, but not as the basis for limiting the present application. In the following examples, the contents not specifically described all belong to the technical common sense in the art.

[0025] Example (see Figures 1-7 ):

[0026] In this embodiment, the polishing head self-dressing controllable ultraviolet light assisted optical part polishing device, the optical part polishing device includes a polishing head 1, a polishing head driving device 2, a workpiece driving device 3, a liquid supply device 4, a controllable ultraviolet light generating device 5, a polishing head dressing block 6 and a polishing liquid storage tank 7; the workpiece driving device 3 includes a driver 301 and a workpiece clamp 302; the driver 301 is arranged at the bottom of the workpiece clamp 302 and can drive the workpiece clamp 302 to rotate, and the workpiece driving device 3 is arranged at the bottom of the polishing liquid storage tank 7; the polishing head driving device 2 is arranged above the workpiece clamp 302 and can adjust the position and attitude; the polishing head driving device 2 includes a polishing rod 201, which can be driven to rotate by a power element; the polishing head 1 is arranged on the polishing rod 201; the controllable ultraviolet light generating device 5 is arranged on the polishing rod 201 and can control the irradiation range of ultraviolet light by adjusting the controllable ultraviolet light generating device 5; the polishing head dressing block 6 is arranged on the side of the workpiece driving device 3; the liquid supply device 4 includes a peristaltic pump 401 and a liquid delivery tube 402, the outlet of the liquid delivery tube 402 is arranged above the polishing head dressing block 6, and the outlet of the peristaltic pump 401 is connected with the inlet of the liquid delivery tube 402. During polishing, the polishing head 1 is first dressed, and after dressing is completed, the polishing head 1 is controlled to move to the machining area for polishing machining. During polishing, the controllable ultraviolet light generating device 5 irradiates the surface of the workpiece to be machined to cause photochemical reaction and generate an oxidation layer which is easy to remove, thereby realizing efficient polishing.

[0027] In the embodiment, the polishing head 1 is in a disc structure, comprising a flexible fixed abrasive layer 101, an adhesive layer 102 and a rigid layer 103; the fixed abrasive layer 101 is connected with the rigid layer 103 through the adhesive layer 102; the rigid layer 103 is provided with a polishing head assembly hole 104; the polishing head 1 is connected and fixed with the polishing rod 201 through the polishing head assembly hole 104.

[0028] In the embodiment, the flexible fixed abrasive layer 101 comprises an embryo and a flexible grinding layer covering the surface of the embryo, the flexible grinding layer is composed of a flexible fiber substrate with pores and a viscoelastic material with non-Newtonian fluid characteristics filled in the pores; the viscoelastic material contains abrasive grains.

[0029] In the embodiment, the preparation method of the flexible fixed abrasive layer 101 comprises the following steps:

[0030] 1) After 80g of high molecular polymer material (specifically, glyceryl tripropyl borate polyester in the embodiment), 15g of diamond abrasive grains with a particle size of 3.0 μm and 5g of sodium dodecyl benzene sulfonate are uniformly mechanically stirred, the mixture is heated in an oven at 150°C for 1.5h to obtain a viscoelastic material with non-Newtonian fluid characteristics;

[0031] 2) The polyurethane binder and the curing agent are uniformly mixed at a ratio of 9:1 to form a viscous mixture, the viscous mixture is loaded into the abrasive tool, heated and pressurized under a hot press, and the embryo is obtained after standing for 24h; the polyamide fiber is uniformly mixed with the curing agent and covered on the embryo to form a fiber substrate with a pore structure after curing; the pore part of the fiber substrate is filled with the viscoelastic material with non-Newtonian fluid characteristics prepared in step 1) to obtain the polishing head.

[0032] In the embodiment, the controllable ultraviolet light generating device 5 comprises a rib-type support, the rib-type support comprises a movable ring seat 501 and a retractable strip-shaped lamp holder 502, the movable ring seat 501 is in sliding connection with the polishing rod 201 and can slide up and down, the retractable strip-shaped lamp holder 502 can be retracted or expanded by the up and down sliding of the movable ring seat 501; the polishing rod 201 is provided with an electric drive assembly capable of driving the movable ring seat 501; the outer end of the retractable strip-shaped lamp holder 502 is provided with an ultraviolet lamp 503. Specifically, the upper end of the retractable strip-shaped lamp holder 502 is hinged to the polishing rod 201, the retractable strip-shaped lamp holder 502 is connected with the movable ring seat 501 through a support rod 504, the lower end of the support rod 504 is hinged to the movable ring seat 501, and the upper end of the support rod 504 is connected with the retractable strip-shaped lamp holder 502 through a sliding pair; the electric drive assembly comprises a motor 505 and a gear mechanism fixed on the polishing rod 201, and a screw rod 506 provided on the movable ring seat 501 through a rotary pair; the screw rods 506 are arranged in groups and distributed circumferentially along the polishing rod 201, and each screw rod 506 is provided with a three-stage gear 507 through a helical pair; the three-stage gear 507 is engaged with a two-stage gear 508 provided on the polishing rod 201, and the motor 505 is in transmission connection with the two-stage gear 508 through a one-stage gear 509. After the motor 505 is started, power is transmitted to the three-stage gear 507 through the one-stage gear 509 and the two-stage gear 508, the three-stage gear 507 drives the screw rod 506 to rise or fall through the helical pair, so as to achieve the purpose of rising or falling of the movable ring seat 501.

[0033] In the embodiment, the polishing head trimming block 6 is provided with a trimming surface 601, the trimming surface 601 is in the shape of an inwardly recessed sphere, a group of annular grooves 6011 are distributed in the shape of concentric circles on the trimming surface 601, and a diamond particle layer 6012 is fixed on the groove-free part of the trimming surface 601.

[0034] In this embodiment, the cross section of the annular groove 6011 is triangular; the distance between adjacent annular grooves 6011 is 5 mm; the size of the diamond particles in the diamond particle layer 6012 is 1 μm. In this embodiment, the method for polishing the surface of the optical part is as follows: the workpiece to be processed 8 is fixed on the workpiece clamp 302, and the polishing head 1 is installed on the polishing rod 201; the position of the polishing head driving device 2 is adjusted so that the polishing head 1 moves to the vicinity of the polishing head dressing block 6 and the liquid supply device 4 is started to supply clean water to the polishing head dressing block 6, at the same time, the polishing head driving device 2 is started to make the polishing head 1 begin to rotate, the polishing head 1 is moved to adhere to the polishing head dressing block 6 to realize self-dressing; after the self-dressing of the polishing head 1 is completed (5 min), the polishing head 1 is moved to the designated processing position, and the workpiece driving device 3 is started to polish the workpiece 8; during the polishing process, the liquid supply device 4 supplies the polishing liquid to the polishing head dressing block 6, the polishing liquid flows from the polishing head dressing block 6 to the surface of the workpiece 8, the controllable ultraviolet light generating device 5 emits ultraviolet light, the polishing liquid 9 contains an oxidizing agent and a catalyst (in this embodiment, the catalyst is ZrO2, and the oxidizing agent is H2O2), under the irradiation of the ultraviolet light, the catalyst undergoes energy level transition to generate electrons e - - holes h + The oxidizing agent in the polishing liquid 9 generates strong oxidizing substances of active free radicals, and the two work together to form an oxidation layer 10 on the surface of the workpiece 8; the polishing head 1 removes the oxidation layer 10 in the contact area with the workpiece 8 to achieve polishing. During the polishing process, the polishing head 1 moves on the surface to be processed of the workpiece 8 (optical glass), at the same time, the irradiation range of the controllable ultraviolet light generating device 5 is controlled to be always within the surface to be processed (waste of ultraviolet light resources, to ensure the efficiency of photochemical reaction), to achieve the purpose of polishing the surface to be processed. Referring to Figure 6 and Figure 7 After processing, the surface roughness Ra of the workpiece 8 is reduced from 350 nm to 82 nm.

[0035] The general description of the invention involved in the present application and the description of the specific embodiments should not be understood as a limitation on the technical solutions of the invention. Based on the disclosure of the present application, those skilled in the art can add, reduce or combine the disclosed technical features in the general description or / and the embodiments without violating the elements of the invention involved, to form other technical solutions within the scope of protection of the present application.

Claims

1. A polishing head self-dressing controllable ultraviolet light assisted optical element polishing device, characterized in that: The optical element polishing device comprises a polishing head (1), a polishing head driving device (2), a workpiece driving device (3), a liquid supply device (4), a controllable ultraviolet light generating device (5), a polishing head dressing block (6) and a polishing liquid storage tank (7); the workpiece driving device (3) comprises a driver (301) and a workpiece clamp (302); the driver (301) is arranged at the bottom of the workpiece clamp (302) and can drive the workpiece clamp (302) to rotate; the workpiece driving device (3) is arranged at the bottom of the polishing liquid storage tank (7); the polishing head driving device (2) is arranged above the workpiece clamp (302) and can adjust the position and posture; the polishing head driving device (2) comprises a polishing rod (201), which can be driven to rotate by a power element; the polishing head (1) is arranged on the polishing rod (201); the controllable ultraviolet light generating device (5) is arranged on the polishing rod (201) and can control the irradiation range of ultraviolet light by adjusting the controllable ultraviolet light generating device (5); the polishing head dressing block (6) is arranged on the side of the workpiece driving device (3); the liquid supply device (4) comprises a peristaltic pump (401) and a liquid delivery pipe (402); the outlet of the liquid delivery pipe (402) is arranged above the polishing head dressing block (6); the outlet of the peristaltic pump (401) is connected with the inlet of the liquid delivery pipe (402); The controllable ultraviolet light generating device (5) comprises a rib-type support, the rib-type support comprises a movable ring seat (501) and a retractable strip-shaped lamp holder (502), the movable ring seat (501) is in sliding connection with the polishing rod (201) and can slide up and down, the up-and-down sliding of the movable ring seat (501) can realize the contraction or expansion of the retractable strip-shaped lamp holder (502); the polishing rod (201) is provided with an electric drive assembly capable of driving the movable ring seat (501); the outer end of the retractable strip-shaped lamp holder (502) is provided with an ultraviolet lamp (503); the upper end of the retractable strip-shaped lamp holder (502) is hinged with the polishing rod (201); the retractable strip-shaped lamp holder (502) is connected with the movable ring seat (501) through a support rod (504), the lower end of the support rod (504) is hinged with the movable ring seat (501), and the upper end of the support rod (504) is connected with the retractable strip-shaped lamp holder (502) through a sliding pair; the electric drive assembly comprises a motor (505) and a gear mechanism fixed on the polishing rod (201), and a screw rod (506) arranged on the movable ring seat (501) through a rotary pair; the screw rods (506) are arranged in groups and distributed circumferentially along the polishing rod (201), and each screw rod (506) is provided with a three-stage gear (507) through a helical pair; the three-stage gear (507) is in meshing connection with a two-stage gear (508) arranged on the polishing rod (201); the motor (505) is in transmission connection with the two-stage gear (508) through a one-stage gear (509).

2. The self-dressing controllable ultraviolet light assisted polishing device for polishing head of optical parts according to claim 1, characterized in that: The polishing head (1) is in a disc structure, comprising a flexible fixed abrasive layer (101), an adhesive layer (102) and a rigid layer (103); the fixed abrasive layer (101) is connected with the rigid layer (103) through the adhesive layer (102); the rigid layer (103) is provided with a polishing head assembly hole (104); the polishing head (1) is connected and fixed with the polishing rod (201) through the polishing head assembly hole (104).

3. The self-dressing controllable ultraviolet light assisted polishing device of the polishing head of optical components according to claim 2, characterized in that: The flexible fixed abrasive layer (101) comprises an embryo and a flexible grinding layer covering the surface of the embryo, the flexible grinding layer is composed of a flexible fiber substrate with pores and a viscoelastic material with non-Newtonian fluid characteristics filled in the pores; the viscoelastic material contains abrasive grains.

4. The self-dressing controllable ultraviolet light assisted polishing device for polishing head of optical parts according to claim 1, characterized in that: The polishing head dressing block (6) is provided with a dressing surface (601), the dressing surface (601) is in a concave spherical shape, the dressing surface (601) is provided with a group of annular grooves (6011) distributed in a concentric circle shape, and the non-groove part of the dressing surface (601) is consolidated with a diamond particle layer (6012).

5. The self-dressing controllable ultraviolet light assisted polishing device of the polishing head of optical components according to claim 4, characterized in that: The cross section of the annular groove (6011) is in a semicircular shape, a triangular shape or a square shape; the distance between adjacent annular grooves (6011) is 2-5mm.

6. The self-dressing controllable ultraviolet light assisted polishing device of the polishing head of optical components according to claim 4, characterized in that: The granularity of the diamond in the diamond particle layer (6012) is 0.05-50μm.

7. A method of polishing optical elements with self-dressing controllable UV assisted polishing head, characterized in that: The method is implemented by using the polishing head self-dressing controllable ultraviolet light assisted optical part polishing device of claim 1; When polishing, the workpiece (8) to be processed is fixed on the workpiece clamp (302), and the polishing head (1) is installed on the polishing rod (201); the position of the polishing head driving device (2) is adjusted to move the polishing head (1) to the vicinity of the polishing head dressing block (6) and start the liquid supply device (4) to deliver clean water or polishing liquid to the polishing head dressing block (6), at the same time, the polishing head driving device (2) is started to make the polishing head (1) start to rotate, the polishing head (1) is moved to adhere to the polishing head dressing block (6) to realize self-dressing; after the self-dressing of the polishing head (1) is completed, the polishing head (1) is moved to the designated processing position, and the workpiece driving device (3) is started to polish the workpiece (8); during the polishing process, the liquid supply device (4) delivers the polishing liquid to the polishing head dressing block (6), the polishing liquid flows from the polishing head dressing block (6) to the surface of the workpiece (8), the controllable ultraviolet light generating device (5) emits ultraviolet light, the polishing liquid (9) contains an oxidizing agent and a catalyst, under the irradiation of the ultraviolet light, the catalyst undergoes energy level transition to generate electron (e - )-hole (h + ) pairs, and the oxidizing agent in the polishing liquid (9) generates active free radical strong oxidizing substances, both of which act together to form an oxidation layer (10) on the surface of the workpiece (8); the polishing head (1) removes the oxidation layer in the contact area with the workpiece (8) to realize polishing.

8. The method of claim 7, wherein the polishing head is self-dressing. The catalyst in the polishing liquid (9) is one or more of TiO2, ZnO, SnO2, ZrO2 and CdS.

9. The method of claim 8, wherein the polishing head is self-dressing. The oxidant in the polishing liquid (9) is one or more of H2O2, KMnO4, TiO2, Fe(NO3)3, K3Fe(CN)6, KIO3 and Cu(NO3)2.

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