Micro-nano energy device functional layer charge visualization and standardized quantitative device and method

Abstract

The application discloses a micro-nano energy device functional layer charge visualization and standardized quantification device and method, wherein a sample table is used for placing a micro-nano energy device functional layer; an active electrostatic probe and an electrostatic potentiometer are connected to realize potential measurement of the micro-nano energy device functional layer; a motion path controller is used for controlling a double-shaft servo motor to drive the active electrostatic probe to move along the surface of the micro-nano energy device functional layer; an oscilloscope is used for recording the measured potential distribution data and the reference signal of the motion path control; and an upper computer is used for extracting effective potential distribution data based on the reference signal, converting the effective potential distribution data into a potential distribution matrix, decoupling the internal relationship between the potential and the charge to obtain a transfer matrix, and obtaining the charge distribution and the charge amount of the micro-nano energy device functional layer through the potential distribution matrix and the transfer matrix. The application can realize characterization of the micro-nano energy device functional layer, such as the friction nanogenerator, the piezoelectric nanogenerator and the like, charge distribution characteristics, transport behavior and the like.

Description

Technical Field

[0001] This invention relates to the field of material dielectric property characterization technology, and in particular to a device and method for visualizing and standardizing the quantitative charge of functional layers in micro / nano energy devices. Background Technology

[0002] Micro-nano energy devices, represented by triboelectric nanogenerators, piezoelectric nanogenerators, and thermoelectric nanogenerators, have been widely used in many fields in recent years. The charge density of the functional layers of the devices (such as triboelectric layers, piezoelectric layers, and thermoelectric layers) essentially determines their output energy efficiency. Understanding the charge characteristics of the functional layers can guide the development of high-performance devices.

[0003] Characterizing charge directly by visual means remains challenging. Nanoscale research primarily utilizes Kelvin probe force microscopy, based on atomic force microscopy. At the macroscopic scale, surface charge distribution can be measured using methods such as dust mapping and the Pockels effect. However, dust mapping destroys the original charge distribution and cannot quantify charge density; the Pockels effect requires a certain level of sample transparency. Therefore, there is an urgent need for novel, non-destructive charge characterization devices and methods. Summary of the Invention

[0004] The present invention aims to at least partially solve one of the technical problems in the related art. To this end, the first objective of the present invention is to provide a device for visualizing and standardizing the quantitative distribution of the functional layer charge of micro-nano energy devices, which can characterize the charge distribution characteristics and transport behavior of the functional layer of micro-nano energy devices such as triboelectric nanogenerators and piezoelectric nanogenerators.

[0005] The second objective of this invention is to provide a method for visualizing and standardizing the quantitative analysis of the charge in the functional layers of micro / nano energy devices.

[0006] A third objective of this invention is to provide a computer-readable storage medium.

[0007] The fourth object of the present invention is to provide a charge measuring device.

[0008] To achieve the above objectives, the present invention is implemented through the following technical solution:

[0009] A device for visualizing and standardizing the charge of functional layers in micro / nano energy devices includes:

[0010] A sample stage is used to place the sample to be tested, which is a functional layer of a micro-nano energy device.

[0011] An active electrostatic probe and an electrostatic potentiometer are connected to each other and are used to measure the potential of the functional layer of a micro / nano energy device.

[0012] A dual-axis servo motor and a motion path controller are provided. The dual-axis servo motor is connected to the active electrostatic probe, and the motion path controller is connected to the dual-axis servo motor. The motion path controller is used to control the dual-axis servo motor to drive the active electrostatic probe to move along the surface of the functional layer of the micro-nano energy device, so as to realize the measurement of potential distribution in different regions.

[0013] An oscilloscope is connected to the electrostatic potentiometer and the motion path controller respectively, and is used to record the measured potential distribution data and the reference signal for motion path control;

[0014] The host computer, connected to the oscilloscope, is used to extract effective potential distribution data based on the reference signal of motion path control and convert it into a potential distribution matrix. It also uses charge visualization and standardized quantitative methods to decouple the intrinsic relationship between potential and charge, obtain the transfer matrix, and obtain the charge distribution and charge quantity of the functional layer of the micro-nano energy device through the potential distribution matrix and the transfer matrix.

[0015] Preferably, the motion path controller is used to control the dual-axis servo motor to achieve precise control of the horizontal and vertical axis scanning paths and scanning rate parameters.

[0016] Preferably, the motion path controller is further configured to acquire the dimensions of the sample to be tested and control the motion mode according to the dimensions of the sample to be tested, so as to control the motion trajectory of the dual-axis servo motor. The motion mode includes a center point mode and a curve S-shaped mode.

[0017] Preferably, when the host computer obtains the transfer matrix by decoupling the intrinsic relationship between potential and charge through charge visualization and standardized quantitative methods, it is specifically used for:

[0018] A simulated charge is set up, wherein the simulated charge is a charge spot or a charge cluster;

[0019] Solve for the potential distribution generated by the simulated charge;

[0020] Using the solved potential distribution as input, the corresponding charge distribution is obtained by solving the transfer matrix obtained through the decoupling of the proposed charge visualization and standardized quantitative method.

[0021] By comparing the error between the calculated charge distribution and the simulated charge distribution, and when the error is less than the preset value, it is determined that the computational accuracy of the proposed charge visualization and standardized quantitative method meets the preset requirements. Here, the computational accuracy meeting the preset requirements means that the transfer matrix obtained by decoupling meets the preset requirements.

[0022] Preferably, the host computer is used to decouple and obtain the transfer matrix, and is also used to divide the spatial surface of the functional layer of the micro-nano energy device into multiple grids so that the potential and charge in the grids are uniformly distributed. It is also used to introduce a hybrid iterative algorithm with Tikhonov regularization to solve the problem that the matrix dimension increases exponentially due to the large number of grids, which leads to the unsuitability of matrix inversion.

[0023] Preferably, when the host computer introduces the hybrid iterative algorithm with Tikhonov regularization, it is specifically used for:

[0024] Establish a charge inversion constraint criterion based on standard Tikhonov regularization;

[0025] Generalized cross-validation is used to select regularization parameters, and the iteration stopping condition is determined to terminate the algorithm.

[0026] Preferably, the movement speed of the dual-axis servo motor is 0.2-1 mm / s.

[0027] To achieve the above objectives, a second aspect of the present invention provides a method for visualizing and standardizing the charge of the functional layer of micro / nano energy devices based on the aforementioned device for visualizing and standardizing the charge of the functional layer of micro / nano energy devices, comprising:

[0028] The surface of the functional layer of micro-nano energy devices is scanned using a device for visualizing and standardizing the charge of the functional layer to obtain the potential distribution, and the potential distribution matrix is ​​then written.

[0029] The intrinsic relationship between potential and charge is decoupled using charge visualization and standardized quantitative methods to obtain the transfer matrix;

[0030] The charge distribution and charge quantity of the functional layer of the micro / nano energy device are obtained by solving the input potential distribution matrix using the transfer matrix obtained through decoupling of charge visualization and standardized quantitative methods.

[0031] To achieve the above objectives, a third aspect of the present invention provides a computer-readable storage medium having a computer program stored thereon, wherein when the computer program is executed by a processor, it implements the above-described method for visualizing and standardizing the charge of the functional layer of micro / nano energy devices.

[0032] To achieve the above objectives, a fourth aspect of the present invention provides a charge measurement device, including a memory, a processor, and a computer program stored in the memory and executable on the processor. When the processor executes the computer program, it implements the above-described method for visualizing and standardizing the charge of the functional layer of micro / nano energy devices.

[0033] This invention has at least the following technical effects:

[0034] This invention utilizes a device for visualizing and standardizing the charge distribution in the functional layer of micro / nano energy devices to scan the surface of the functional layer, obtain the potential distribution, and construct the potential distribution matrix. Then, by using a charge visualization and standardization method, the intrinsic relationship between potential and charge is decoupled to obtain a transfer matrix. Finally, the input potential distribution matrix is ​​solved using the transfer matrix obtained through this decoupling method, yielding the charge distribution and charge quantity of the functional layer of the micro / nano energy device. Therefore, this invention can accurately obtain the distribution patterns and evolution characteristics of charge in the functional layer of micro / nano energy devices such as triboelectric nanogenerators and piezoelectric nanogenerators, overcoming the shortcomings of traditional methods such as Kelvin probe microscopy, dust mapping, and the Pockels effect.

[0035] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0036] Figure 1 This is a schematic diagram of the structure of the micro / nano energy device functional layer charge visualization and standardized quantitative device according to an embodiment of the present invention.

[0037] Figure 2 This is a schematic diagram of the specific structure of the device for visualizing and standardizing the charge of the functional layer of micro-nano energy devices according to an embodiment of the present invention.

[0038] Figure 3 This is a schematic diagram of the surface potential distribution according to an embodiment of the present invention.

[0039] Figure 4 This is a schematic diagram of a hybrid iterative algorithm based on Tikhonov regularization according to an embodiment of the present invention.

[0040] Figure 5 This is a schematic diagram of the surface charge distribution results according to an embodiment of the present invention.

[0041] Figure 6 This is a flowchart illustrating the method for visualizing and standardizing the quantitative charge of the functional layer of micro / nano energy devices according to an embodiment of the present invention. Detailed Implementation

[0042] The following describes this embodiment in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the invention, and should not be construed as limiting the invention.

[0043] The following description, with reference to the accompanying drawings, describes a device and method for visualizing and standardizing the charge of the functional layer of a micro / nano energy device.

[0044] Figure 1 This is a schematic diagram of the structure of the micro / nano energy device functional layer charge visualization and standardized quantitative device according to an embodiment of the present invention. Figure 2 This is a schematic diagram of the specific structure of the device for visualizing and standardizing the charge of the functional layer of micro / nano energy devices according to an embodiment of the present invention. Figure 1 and 2 As shown, the device for visualizing and standardizing the charge of the functional layer of the micro / nano energy device includes a sample stage, an active electrostatic probe, an electrostatic potentiometer, a dual-axis servo motor, a motion path controller, an oscilloscope, and a host computer. The system includes a sample stage for placing the sample to be tested, which is the functional layer of a micro / nano energy device. This functional layer includes a mechanical-to-electrical energy conversion layer and a thermal-to-electrical energy conversion layer. An active electrostatic probe and a potentiometer are connected to measure the potential of the functional layer. A dual-axis servo motor and a motion path controller are connected to the active electrostatic probe and the motion path controller, respectively. The motion path controller controls the active electrostatic probe to move along the surface of the functional layer, enabling the measurement of potential distribution in different areas. An oscilloscope is connected to both the potentiometer and the motion path controller, recording the measured potential distribution data and the reference signal for motion path control. A host computer is connected to the oscilloscope. Based on the reference signal for motion path control, the host computer uses MATLAB (simulation software) and a data extraction algorithm to extract effective potential distribution data, converting it into a potential distribution matrix. It also uses charge visualization and standardized quantitative methods to decouple the intrinsic relationship between potential and charge, obtaining a transfer matrix. Finally, the potential distribution matrix and transfer matrix are used to obtain the charge distribution and charge quantity of the functional layer of the micro / nano energy device.

[0045] Specifically, an active electrostatic probe and an electrostatic potentiometer are connected via signal lines to measure the potential of the functional layer of the micro / nano energy device. The sample stage is used to place the sample to be tested, i.e., the functional layer of the micro / nano energy device. The dual-axis servo motor and motion path controller are used to precisely control parameters such as the scanning path and scanning rate of the x-axis and y-axis (horizontal and vertical axes). Driven by the dual-axis servo motor, the active electrostatic probe can move along the surface of the functional layer of the micro / nano energy device to measure the potential distribution in different regions. The signal output terminal of the electrostatic potentiometer and the reference signal for motion path control are respectively connected to two signal acquisition ports of the oscilloscope to realize real-time recording of the electrostatic probe measurement data and the motion path of the dual-axis servo motor.

[0046] It should be noted that the device also includes a height adjustment unit, which can adjust the height of the active electrostatic probe. During the measurement process, the distance between the active electrostatic probe and the sample to be measured is 1 to 5 mm. Figure 2 In this process, the scanning path can be controlled by the x-axis stepper motor and the y-axis stepper motor.

[0047] In one embodiment of the present invention, the motion path controller is further configured to acquire the size of the sample to be tested and control the motion mode according to the size of the sample to be tested, so as to control the motion trajectory of the dual-axis servo motor. The motion mode includes a center point mode and a curve S-shaped mode.

[0048] Specifically, the motion trajectory of the dual-axis servo motor can be adjusted according to the sample size, and the motion mode can be selected as center point mode or curve S-shaped mode, with the preferred motion speed being 0.2-1mm / s.

[0049] For example, the surface potential distribution of a triboelectric layer containing protrusions of different sizes was measured. During the measurement, the active electrostatic probe was 2 mm away from the sample, and the dual-axis servo motor moved in an S-shaped curve at a speed of 0.5 mm / s. For the potential and reference signal data recorded by the oscilloscope, MATLAB was used to extract the effective potential distribution data using a data extraction algorithm. The effective data between the reference signals was extracted and converted into a distribution matrix of the potential of the sample under test, which was then plotted. Figure 3 The surface potential distribution is shown.

[0050] In one embodiment of the present invention, to decouple and obtain the transfer matrix, the host computer further divides the surface of the functional layer of the micro / nano energy device into multiple grids to ensure a uniform distribution of potential and charge within the grids. It also introduces a hybrid iterative algorithm with Tikhonov regularization to address the problem of matrix inversion ill-adaptability caused by a large number of grids leading to a significant increase in matrix dimension. Specifically, when introducing the hybrid iterative algorithm with Tikhonov regularization, the host computer establishes a charge inversion constraint criterion based on standard Tikhonov regularization; selects regularization parameters using generalized cross-validation; and determines the iteration stopping condition to terminate the algorithm.

[0051] Figure 4 A flowchart of the charge visualization and standardized quantitative method proposed in this embodiment is provided, the main purpose of which is to solve the transfer matrix between potential and charge. Using the finite element method, the surface of the functional layer of a micro / nano energy device can be divided into n grid cells, and when n is sufficiently large, the potential and charge within the grid can be considered uniformly distributed. To address the problem of matrix inversion being unsuitable due to the exponential increase in matrix dimension caused by a large number of grid cells, a hybrid iterative algorithm based on Tikhonov regularization can be used to achieve visualization and standardized quantitative analysis of charge distribution. The main steps of the Tikhonov regularized hybrid iterative algorithm are: first, establishing a charge inversion constraint criterion based on standard Tikhonov regularization; second, performing singular value decomposition and using generalized cross-validation to calculate the regularization parameters; and finally, determining a reasonable iteration stopping condition to terminate the algorithm based on measurement needs.

[0052] In one embodiment of the present invention, when the host computer decouples the intrinsic relationship between potential and charge using a charge visualization and standardized quantitative method to obtain the transfer matrix, the specific steps are as follows: A simulated charge is set, which is either a charge spot or a charge cluster; the potential distribution generated by the simulated charge is solved; using the solved potential distribution as input, the corresponding charge distribution is obtained by solving the transfer matrix obtained through the proposed charge visualization and standardized quantitative method; the error between the solved charge distribution and the simulated charge distribution is compared, and if the error is less than a preset value, the computational accuracy of the proposed charge visualization and standardized quantitative method is determined to meet a preset requirement, wherein the computational accuracy meeting the preset requirement indicates that the decoupled transfer matrix meets the preset requirement.

[0053] Specifically, firstly, a simulated charge, such as a charge spot or charge cluster, is artificially set up, and the potential distribution generated by this simulated charge is solved using the AC-DC (simulation module) of COMSOL (simulation software); secondly, the solved potential distribution is used as input, and the proposed charge visualization and standardized quantitative method is used to solve the charge distribution; finally, the error between the solved charge distribution and the artificially set simulated charge distribution is compared. When the error is less than 5%, i.e., the preset value, it is determined that the computational accuracy of the proposed method meets the requirements, i.e., the transfer matrix meets the preset requirements.

[0054] In this embodiment, the host computer can utilize the proposed charge visualization and standardized quantification method, taking the measured surface potential as input, to solve for and obtain the charge distribution, charge quantity, and other characteristics of the triboelectric layer, i.e., the functional layer of the micro / nano energy device, thereby achieving visualization and standardized quantification of the surface charge distribution. Figure 5 As shown.

[0055] Furthermore, the present invention also provides a method for visualizing and standardizing the charge of the functional layer of micro-nano energy devices based on the above-mentioned device for visualizing and standardizing the charge of the functional layer of micro-nano energy devices. Figure 6 This is a flowchart illustrating a method for visualizing and standardizing the quantification of functional layer charges in micro / nano energy devices according to an embodiment of the present invention. Figure 6 As shown, the method includes:

[0056] Step S1: Scan the surface of the functional layer of the micro-nano energy device using a device for visualizing and standardizing the charge of the functional layer of the micro-nano energy device to obtain the potential distribution and write the potential distribution matrix.

[0057] Step S2: Decouple the intrinsic relationship between potential and charge through charge visualization and standardized quantitative methods to obtain the transfer matrix.

[0058] Step S3: Using the transfer matrix obtained by decoupling charge visualization and standardized quantitative methods, the input potential distribution matrix is ​​solved to obtain the charge distribution and charge quantity of the functional layer of the micro / nano energy device.

[0059] Specifically, after preparing the sample to be tested, a device for visualizing and standardizing the charge distribution of the functional layer of a micro / nano energy device is used to scan the surface potential distribution of the functional layer, obtain the potential distribution, and write the matrix. Then, the intrinsic relationship between potential and charge is decoupled by the host computer in the device, and the transfer matrix is ​​obtained, resulting in a charge visualization and standardization method. Finally, using the proposed charge visualization and standardization method, with the measured surface potential as input, the charge distribution, charge quantity, and other characteristics of the functional layer of the micro / nano energy device can be obtained by solving the problem.

[0060] Furthermore, the present invention also provides a computer-readable storage medium storing a computer program thereon, which, when executed by a processor, can realize the above-mentioned method for visualizing and standardizing the charge of the functional layer of micro-nano energy devices.

[0061] Furthermore, the present invention also provides a charge measurement device, including a memory, a processor, and a computer program stored in the memory and executable on the processor. When the processor executes the computer program, it can realize the above-mentioned method for visualizing and standardizing the charge of the functional layer of micro-nano energy devices.

[0062] In summary, this invention uses a device for visualizing and standardizing the charge distribution of functional layers in micro / nano energy devices to scan the surface of these functional layers, obtaining the potential distribution and constructing the potential distribution matrix. Then, by using a charge visualization and standardization method, the intrinsic relationship between potential and charge is decoupled to obtain the transfer matrix. Finally, the input potential distribution matrix is ​​solved using the transfer matrix obtained through this decoupling process, yielding the charge distribution and charge quantity of the functional layers of the micro / nano energy devices. Therefore, this invention can accurately obtain the distribution patterns and evolution characteristics of charge in the functional layers of micro / nano energy devices such as triboelectric nanogenerators and piezoelectric nanogenerators, overcoming the shortcomings of traditional methods such as Kelvin probe microscopy, dust mapping, and the Pockels effect.

[0063] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0064] Although the present invention has been described in detail through the preferred embodiments above, it should be understood that the above description should not be considered as a limitation of the present invention. Various modifications and substitutions to the present invention will be apparent to those skilled in the art after reading the above description. Therefore, the scope of protection of the present invention should be defined by the appended claims.

Claims

1. A device for visualizing and standardizing the quantitative charge of the functional layer of micro / nano energy devices, characterized in that, include: A sample stage is used to place the sample to be tested, which is a functional layer of a micro-nano energy device. An active electrostatic probe and an electrostatic potentiometer are connected to each other and are used to measure the potential of the functional layer of a micro / nano energy device. A dual-axis servo motor and a motion path controller are provided. The dual-axis servo motor is connected to the active electrostatic probe, and the motion path controller is connected to the dual-axis servo motor. The motion path controller is used to control the dual-axis servo motor to drive the active electrostatic probe to move along the surface of the functional layer of the micro-nano energy device, so as to realize the measurement of potential distribution in different regions. An oscilloscope is connected to the electrostatic potentiometer and the motion path controller respectively, and is used to record the measured potential distribution data and the reference signal for motion path control; The host computer, connected to the oscilloscope, is used to extract effective potential distribution data based on the reference signal of motion path control and convert it into a potential distribution matrix. It also uses charge visualization and standardized quantitative methods to decouple the intrinsic relationship between potential and charge, obtain the transfer matrix, and obtain the charge distribution and charge quantity of the functional layer of the micro-nano energy device through the potential distribution matrix and the transfer matrix. The host computer, through charge visualization and standardized quantitative methods, decouples the intrinsic relationship between potential and charge to obtain the transfer matrix. Specifically, this involves: setting up a simulated charge, which is either a charge spot or a charge cluster; solving for the potential distribution generated by the simulated charge; using the solved potential distribution as input, solving for the corresponding charge distribution using the transfer matrix obtained through the proposed charge visualization and standardized quantitative methods; comparing the error between the solved charge distribution and the simulated charge distribution, and determining that the computational accuracy of the proposed charge visualization and standardized quantitative methods meets preset requirements when the error is less than a preset value. Here, meeting the preset accuracy means that the decoupled transfer matrix meets the preset requirements. The host computer is used to decouple and obtain the transfer matrix, and is also used to divide the spatial surface of the functional layer of the micro-nano energy device into multiple grids so that the potential and charge in the grid are uniformly distributed. It is also used to introduce a hybrid iterative algorithm with Tikhonov regularization to solve the problem that the matrix dimension increases exponentially due to the large number of grids, which leads to the unsuitability of matrix inversion.

2. The device for visualizing and standardizing the charge of the functional layer of micro / nano energy devices as described in claim 1, characterized in that, The motion path controller is used to control the dual-axis servo motor to achieve precise control of the horizontal and vertical axis scanning paths and scanning rate parameters.

3. The device for visualizing and standardizing the charge of the functional layer of micro / nano energy devices as described in claim 1, characterized in that, The motion path controller is also used to acquire the size of the sample to be tested and control the motion mode according to the size of the sample to be tested, so as to control the motion trajectory of the dual-axis servo motor. The motion mode includes center point mode and curve S-shaped mode.

4. The device for visualizing and standardizing the charge of the functional layer of micro / nano energy devices as described in claim 1, characterized in that, When the host computer introduces the hybrid iterative algorithm with Tikhonov regularization, it is specifically used for: Establish a charge inversion constraint criterion based on standard Tikhonov regularization; Generalized cross-validation is used to select regularization parameters, and the iteration stopping condition is determined to terminate the algorithm.

5. The device for visualizing and standardizing the charge of the functional layer of micro / nano energy devices as described in any one of claims 1-3, characterized in that, The movement speed of the dual-axis servo motor is 0.2-1 mm / s.

6. A method for visualizing and standardizing the charge of functional layers in micro / nano energy devices based on the device for visualizing and standardizing the charge of functional layers in micro / nano energy devices as described in any one of claims 1-5, characterized in that, include: The surface of the functional layer of micro-nano energy devices is scanned using a device for visualizing and standardizing the charge of the functional layer to obtain the potential distribution, and the potential distribution matrix is ​​then written. The proposed charge visualization and standardized quantitative method decouples the intrinsic relationship between potential and charge to obtain a transfer matrix. Specifically, this involves: setting up a simulated charge, which can be a charge spot or a charge cluster; solving for the potential distribution generated by the simulated charge; dividing the functional layer surface of the micro / nano energy device into multiple grids to ensure a uniform distribution of potential and charge within the grids; introducing a Tikhonov regularized hybrid iterative algorithm to address the problem of matrix inversion unsuitability caused by a large number of grids leading to a significant increase in matrix dimension; using the solved potential distribution as input, solving for the corresponding charge distribution using the transfer matrix obtained through the proposed charge visualization and standardized quantitative method; comparing the error between the solved charge distribution and the simulated charge distribution; and determining that the computational accuracy of the proposed charge visualization and standardized quantitative method meets a preset requirement when the error is less than a preset value. Here, meeting the preset accuracy requirement indicates that the decoupled transfer matrix meets the preset requirement. The charge distribution and charge quantity of the functional layer of the micro / nano energy device are obtained by solving the input potential distribution matrix using the transfer matrix obtained through decoupling of charge visualization and standardized quantitative methods.

7. A computer-readable storage medium having a computer program stored thereon, characterized in that, When the computer program is executed by the processor, it implements the method for visualizing and standardizing the charge of the functional layer of micro / nano energy devices as described in claim 6.

8. A charge measuring device, comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, characterized in that, When the processor executes the computer program, it implements the method for visualizing and standardizing the charge of the functional layer of micro / nano energy devices as described in claim 6.

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