A wind knife for quickly drying flower baskets and silicon wafers

Abstract

The present invention relates to the technical field of silicon wafer drying, and discloses a wind knife for quickly drying a flower basket and silicon wafers, comprising: a wind knife body, which is arranged on one side of the flower basket, and a plurality of silicon wafers are carried in the flower basket. The airflow formed by the wind knife body is parallel to the silicon wafers and passes between two adjacent silicon wafers; the wind knife body is arranged on a carrier, and a detection unit for detecting the direction of the airflow is provided on the wind knife body. When the direction of the airflow formed by the wind knife body deviates, the control unit controls the driving unit to adjust the position of the wind knife body on the carrier so that the formed airflow is parallel to the silicon wafers. A high-speed airflow is blown vertically downward by the wind knife body. When the high-speed airflow passes between two silicon wafers, the liquid on the silicon wafers can be taken away. The high-speed airflow is parallel to the silicon wafers, which can reduce the impact force on the silicon wafers and prevent damage to the silicon wafers. Since the airflow speed is increased, the temperature of the airflow can be normal temperature or a temperature lower than that of drying to prevent the high temperature from increasing the stress of the silicon wafers.

Description

Technical Field

[0001] The invention relates to the technical field of silicon wafer drying, and more particularly to an air knife for rapidly drying flower baskets and silicon wafers. Background Art

[0002] In the photovoltaic industry, flower baskets are the most common carriers in the production of photovoltaic cell process sections. They are used to carry silicon wafers and complete the conversion, cleaning, and drying processes of silicon wafers. Flower baskets are transferred between various process equipment through chain conveyor equipment. After arriving at the designated workstation, the robot grabs the flower basket according to the instructions and puts it into the equipment for processing.

[0003] In the prior art, the drying speed of the flower basket and silicon wafer is relatively slow. In order to increase the drying speed, hot air or drying process is usually used. However, hot air will cause great stress on the silicon wafer during the drying process, affecting the production quality of photovoltaic cells.

[0004] Therefore, it is necessary to provide an air knife for quickly drying flower baskets and silicon wafers to at least partially solve the problems existing in the prior art. Summary of the invention

[0005] A series of simplified concepts are introduced in the Summary of the Invention, which will be further described in detail in the Detailed Description of the Invention. The Summary of the Invention does not mean to attempt to define the key features and essential technical features of the claimed technical solution, nor does it mean to attempt to determine the scope of protection of the claimed technical solution.

[0006] In order to at least partially solve the above-mentioned problems, the present invention provides a wind knife for quickly drying a flower basket and silicon wafers, comprising: a wind knife body, which is arranged on one side of the flower basket, and a plurality of silicon wafers are carried in the flower basket. The airflow formed by the wind knife body is parallel to the silicon wafers and passes between two adjacent silicon wafers; the wind knife body is arranged on a carrier frame, and a detection part for detecting the direction of the airflow is provided on the wind knife body. When the direction of the airflow formed by the wind knife body deviates, the control part controls the driving part to adjust the position of the wind knife body on the carrier frame so that the formed airflow is parallel to the silicon wafers.

[0007] Preferably, the airflow formed by the wind knife body is flat, the thickness of the flat airflow is less than or equal to the gap distance between two adjacent silicon wafers, and the width of the flat airflow is greater than or equal to the width of the flower basket.

[0008] Preferably, the wind knife body includes: a first plate body and a second plate body connected to each other, a sealing gasket is arranged between the first plate body and the second plate body; an air inlet groove and an air guide groove are arranged inside the first plate body, an air inlet cavity connected to an air source is formed between the air inlet groove and the side wall of the second plate body, an air guide cavity is formed between the air guide groove and the side wall of the second plate body, and a flat first air outlet is formed at one end of the air guide cavity away from the air inlet cavity.

[0009] Preferably, the wind knife body includes: a first shell and a second shell arranged inside the first shell, two air guide channels are formed between the two outer side walls of the second shell and the first shell, and an air inlet channel connected to the air source is formed between the top side of the second shell and the first shell; an air outlet mechanism is movably provided in the second shell, one end of the air outlet mechanism is connected to the second shell, and the other end extends to the outside of the second shell; when the air outlet mechanism is in an extended state, its air outlet channel is connected to the air guide channel, and the air flow is blown out from the air outlet channel to form a flat air flow; when the air outlet mechanism is in a retracted state, its air outlet channel is not connected to the air guide channel, and the air flow is blown out from the air guide channel.

[0010] Preferably, the air outlet mechanism includes: a fixed frame arranged on the inner side of the second shell, a V-shaped plate is slidably provided in the fixed frame, an air outlet shell that moves synchronously with the V-shaped plate is sleeved on the outer side of the V-shaped plate, a flat second air outlet is formed at one end of the air outlet shell away from the fixed frame, and an air outlet channel is formed between the two outer side walls of the V-shaped plate and the air outlet shell; a drive assembly is connected to the side of the V-shaped plate away from the air outlet shell, and the other end of the drive assembly passes through the fixed frame and is connected to the second shell.

[0011] Preferably, a first pressure sensor for detecting the outlet air pressure is provided on the outer wall of the V-shaped plate. If the first pressure sensor detects that the outlet air pressure is greater than a preset pressure value within a set time period, the control unit controls the drive assembly to switch the outlet mechanism from an extended state to a retracted state, so that the air flow is blown out from the air guide channel.

[0012] Preferably, the wind knife body is symmetrically provided with bearing shafts at both ends in the length direction thereof, and a fixing cylinder is rotatably connected to the outer side of the bearing shaft, and the fixing cylinder is connected to the bearing frame through a fixing rod.

[0013] Preferably, the detection unit includes: a plurality of protrusions uniformly arranged along the circumferential direction on the outside of the load-bearing shaft, a second pressure sensor is arranged on the protrusions, an elastic sleeve is sleeved on the outside of the plurality of protrusions, the second pressure sensor is arranged between the elastic sleeve and the protrusions, a rigid sleeve is sleeved on the outside of the elastic sleeve, and the rigid sleeve is rotatably connected in the fixed cylinder.

[0014] Preferably, the number of the bumps is at least eight; the control unit stores a setting range corresponding to the second pressure sensor on each bump, and the setting range is a pressure range formed by the pressure values ​​obtained multiple times by the second pressure sensor when the airflow formed by the wind knife body is parallel to the silicon wafer and the airflow passes through the gap between the two silicon wafers.

[0015] Preferably, the judgment criterion for the deviation of the airflow direction formed by the wind knife body is that on a load-bearing shaft, if the pressure values ​​detected by at least two asymmetrically arranged second pressure sensors exceed their corresponding set ranges, then the airflow direction formed by the wind knife body deviates.

[0016] Compared with the prior art, the present invention has at least the following beneficial effects:

[0017] The wind knife for quickly drying the flower basket and silicon wafers of the present invention blows out a high-speed airflow vertically downward through the wind knife body. When the high-speed airflow passes between two silicon wafers, the liquid on the silicon wafers can be taken away. In addition, the high-speed airflow is parallel to the silicon wafers, which can reduce the impact force on the silicon wafers and prevent damage to the silicon wafers.

[0018] As the air flow speed is increased, the air flow temperature can be room temperature or lower than that of drying to prevent high temperature from increasing the stress of the silicon wafer, ensuring the drying effect while reducing the impact on the silicon wafer;

[0019] A detection unit for detecting the airflow direction formed by the air knife body is provided to monitor the air knife body in real time. When the airflow direction deviates, timely adjustments are made to ensure the drying effect.

[0020] The air knife for quickly drying flower baskets and silicon wafers described in the present invention, and other advantages, objectives and features of the present invention will be reflected in part through the following description, and in part will be understood by technicians in this field through research and practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0022] Figure 1 It is a schematic structural diagram of a first type of air knife body, silicon wafers and flower basket in the air knife for quickly drying flower baskets and silicon wafers of the present invention;

[0023] Figure 2 It is a structural schematic diagram of a second type of air knife body, silicon wafers and flower basket in the air knife for quickly drying flower baskets and silicon wafers of the present invention;

[0024] Figure 3It is a schematic diagram of the three-dimensional structure of the air knife body and the flower basket in the air knife for quickly drying the flower basket and silicon wafers of the present invention;

[0025] Figure 4 This is a schematic diagram of the internal structure of the first type of air knife body in the air knife for quickly drying flower baskets and silicon wafers of the present invention;

[0026] Figure 5 This is a schematic diagram of the exploded structure of the first type of air knife body in the air knife for quickly drying flower baskets and silicon wafers of the present invention;

[0027] Figure 6 It is a structural schematic diagram of the second type of air knife body in the air knife for quickly drying flower baskets and silicon wafers of the present invention when the air outlet mechanism is in an extended state;

[0028] Figure 7 It is a structural schematic diagram of the second type of air knife body in the air knife for quickly drying flower baskets and silicon wafers of the present invention when the air outlet mechanism is in a contracted state;

[0029] Figure 8 It is a structural schematic diagram of the wind knife main body and the supporting frame in the wind knife for quickly drying flower baskets and silicon wafers of the present invention;

[0030] Fig. 9 This is a schematic diagram of the internal structure of the detection part of the air knife for quickly drying flower baskets and silicon wafers according to the present invention;

[0031] Fig.10 It is a schematic diagram of the internal structure of the detection part when the airflow in the air knife for quickly drying the flower basket and silicon wafers of the present invention deviates;

[0032] Fig.11 The present invention is a schematic structural diagram of a flower basket, silicon wafers and a cover body in the wind knife for quickly drying a flower basket and silicon wafers. DETAILED DESCRIPTION

[0033] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments so that those skilled in the art can implement the invention with reference to the description.

[0034] It should be understood that the terms such as “having”, “including” and “comprising” used herein do not exclude the existence or addition of one or more other elements or combinations thereof.

[0035] like Figure 1-Figure 3As shown, the present invention provides a wind knife for quickly drying a flower basket and silicon wafers, comprising: a wind knife body 3, which is arranged on one side of a flower basket 1, and a plurality of silicon wafers 2 are carried in the flower basket 1, and the airflow formed by the wind knife body 3 is parallel to the silicon wafers 2 and passes between two adjacent silicon wafers 2; the wind knife body 3 is arranged on a supporting frame 6, and a detection part for detecting the direction of the airflow is provided on the wind knife body 3. When the direction of the airflow formed by the wind knife body 3 deviates, the control part controls the driving part to adjust the position of the wind knife body 3 on the supporting frame 6, so that the formed airflow is parallel to the silicon wafers 2.

[0036] Since the flower basket 1 can be transferred between various process equipments through the chain conveying equipment, the flower basket 1 can be blown dry during the conveying process; that is, a carrier frame 6 is arranged above the flower basket 1, and the wind knife body 3 is arranged on the carrier frame 6, and the wind knife body 3 can be arranged in multiple numbers; as the flower basket 1 is conveyed forward, the wind knife body 3 blows out a high-speed airflow vertically downward, and when the high-speed airflow passes between two silicon wafers 2, the liquid on the silicon wafer 2 can be taken away, and the high-speed airflow is parallel to the silicon wafer 2, which can reduce the impact force on the silicon wafer 2 and prevent the silicon wafer 2 from being damaged;

[0037] Furthermore, in order to ensure the drying effect, the airflow should be kept vertical. If the airflow direction is tilted, the airflow speed reaching the bottom of the silicon wafer 2 will be greatly reduced, or there will be no airflow passing under the silicon wafer 2, and the tilted high-speed airflow may also cause damage to the silicon wafer 2; therefore, a detection unit is provided for detecting the airflow direction formed by the wind knife body 3 to monitor the wind knife body 3 in real time, and when the airflow direction deviates, timely adjustments are made to ensure the drying effect.

[0038] Among them, the detection part can be a laser detector for detecting the position of the wind knife body 3, which is arranged on the wind knife body 3, and is used to detect the parallelism between a certain plane (for example, the top surface) of the wind knife body 3 and the top surface of the flower basket 1, and monitor the parallelism in real time to see if the standard is met. If the standard is met, there is no need to adjust the position of the wind knife body 3. If the standard is not met, the control unit controls the driving unit to adjust the position of the wind knife body 3 on the carrier 6 so that the formed airflow is parallel to the silicon wafer 2.

[0039] Through the above design, the wind knife body 3 can form a high-speed airflow parallel to the silicon wafer 2 to dry the silicon wafer 2, and can ensure that the direction of the airflow will not cause damage to the silicon wafer 2. In addition, since the airflow speed is increased, the temperature of the airflow can be room temperature or a temperature lower than that of drying to prevent high temperature from increasing the stress of the silicon wafer 2, thereby ensuring the drying effect while reducing the impact on the silicon wafer 2.

[0040] like Figure 1-Figure 3As shown, further, the airflow formed by the wind knife body 3 is flat, the thickness of the flat airflow is less than or equal to the gap distance between two adjacent silicon wafers 2, and the width of the flat airflow is greater than or equal to the width of the flower basket 1.

[0041] The airflow formed by the wind knife body 3 is flat, and the airflow blown out by one wind knife body 3 can take away the moisture in the gap between the two silicon wafers 2, thereby improving the drying speed.

[0042] like Figure 4-Figure 5 As shown, a first air knife body 3 is provided;

[0043] In one embodiment, the wind knife body 3 includes: a first plate body 310 and a second plate body 320 connected to each other, a sealing gasket 330 is arranged between the first plate body 310 and the second plate body 320; an air inlet groove and an air guide groove are arranged inside the first plate body 310, an air inlet cavity 31a connected to an air source is formed between the air inlet groove and the side wall of the second plate body 320, an air guide cavity 32a is formed between the air guide groove and the side wall of the second plate body 320, and a flat first air outlet 33a is formed at one end of the air guide cavity 32a away from the air inlet cavity 31a.

[0044] A sealing gasket 330 is provided between the first plate body 310 and the second plate body 320, which are fixedly connected by bolts; since the width of the flat first air outlet 33a is relatively small, after the air source enters the air inlet chamber 31a, the air intake speed is greater than the air outlet speed, then the air pressure in the air inlet chamber 31a will increase, and the gas will be discharged from the first air outlet 33a at high speed through the air guide chamber 32a. The side of the air guide chamber 32a away from the second plate body 320 is an inclined surface, and the airflow will be discharged from the first air outlet 33a at high speed under the guiding effect of the inclined surface; and, both outer side walls of the first air outlet 33a formed by the first plate body 310 and the second plate body 320 are inclined surfaces, which can introduce surrounding gas when the high-speed airflow is discharged, thereby increasing the airflow volume and further improving the drying effect.

[0045] like Figure 6 and Figure 7 As shown, a second air knife body 3 is provided;

[0046] In one embodiment, the wind knife body 3 includes: a first shell 340 and a second shell 350 arranged inside the first shell 340, two air guide channels 32b are formed between the two outer side walls of the second shell 350 and the first shell 340, and an air inlet channel 31b connected to the air source is formed between the top side of the second shell 350 and the first shell 340; an air outlet mechanism 360 is movably arranged in the second shell 350, one end of the air outlet mechanism 360 is connected to the second shell 350, and the other end extends to the outside of the second shell 350; when the air outlet mechanism 360 is in an extended state, its air outlet channel 361 is connected to the air guide channel 32b, and the air flow is blown out from the air outlet channel 361 to form a flat air flow; when the air outlet mechanism 360 is in a retracted state, its air outlet channel 361 is not connected to the air guide channel 32b, and the air flow is blown out from the air guide channel 32b.

[0047] Holes for connecting the air source and the air inlet channel 31b are provided on the top surface or both end surfaces of the first shell 340. After the gas enters the air inlet channel 31b, the air intake speed is also higher than the air outlet speed, so that the air pressure of the air inlet channel 31b increases, and the air flow is dispersed and flows from the two air guide channels 32b to the outside at high speed. When the air outlet mechanism 360 is in an extended state, the air flow in the air guide channel 32b passes through the air outlet channel 361, and finally forms a flat air flow for discharge. When the air outlet mechanism 360 is in a retracted state, its air outlet channel 361 is not connected with the air guide channel 32b, and the air flow in each air guide channel 32b is directly discharged. Of course, at the same air intake speed, the air flow speed discharged from the air guide channel 32b will be lower than the air flow speed discharged from the air outlet channel 361.

[0048] Furthermore, the air outlet mechanism 360 includes: a fixed frame 362 arranged on the inner side of the second shell 350, a V-shaped plate 363 is slidably provided in the fixed frame 362, the outer side of the V-shaped plate 363 is sleeved with an air outlet shell 364 that moves synchronously with it, and the end of the air outlet shell 364 away from the fixed frame 362 forms a flat second air outlet 33b, and an air outlet channel 361 is formed between the two outer side walls of the V-shaped plate 363 and the air outlet shell 364; the side of the V-shaped plate 363 away from the air outlet shell 364 is connected to a driving component 365, and the other end of the driving component 365 passes through the fixed frame 362 and is connected to the second shell 350.

[0049] The fixing frame 362 is fixedly connected to the second housing 350, the V-shaped plate 363 is slidably disposed in the fixing frame 362, and the driving component 365 can be an electric telescopic rod, the fixed end of the electric telescopic rod is connected to the second housing 350, and the driving end is connected to the V-shaped plate 363;

[0050] like Figure 6As shown, when the air outlet mechanism 360 is required to be in the extended state, the air outlet housing 364 and the V-shaped plate 363 are extended synchronously, and the air outlet housing 364 is in sealing contact with the first housing 340, and the air guide channel 32b is connected with the air outlet channel 361, and the width of the air outlet channel 361 is smaller than the width of the air guide channel 32b, and then the airflows of the two air outlet channels 361 converge at the air of the air outlet housing 364 near the second air outlet 33b and are discharged from the second air outlet 33b at high speed, forming a flat high-speed airflow;

[0051] like Figure 7 As shown, when the air outlet mechanism 360 needs to be in a retracted state, the air outlet shell 364 and the V-shaped plate 363 are retracted synchronously, the air outlet shell 364 is in sealing contact with the fixing frame 362, and the V-shaped plate 363 is retracted into the fixing frame 362. Then, the airflow is directly blown out from the air guide channel 32b under the guidance of the outer wall of the air outlet shell 364, and the airflow formed in this way is divergent; the silicon wafers 2 arranged in sequence in the flower basket 1 may be tilted. If a flat high-speed airflow is continuously blown towards the tilted silicon wafer 2, the silicon wafer 2 will be damaged. Therefore, a divergent airflow can be used in this case.

[0052] An elastic sealing layer may be provided at the portion where the air outlet housing 364 is in sealing contact with the first housing 340 and the fixing bracket 362 .

[0053] Furthermore, a first pressure sensor for detecting the outlet air pressure is provided on the outer wall of the V-shaped plate 363. If the first pressure sensor detects that the outlet air pressure is greater than a preset pressure value within a set time period, the control unit controls the drive assembly 365 to operate, so that the outlet mechanism 360 switches from an extended state to a retracted state, so that the air flow is blown out from the air guide channel 32b.

[0054] The first pressure sensor is preferably disposed on the bottom side of the V-shaped plate 363 .

[0055] The normal working state of the air outlet mechanism 360 is the extended state; the preset pressure value is the air outlet pressure detected by the first pressure sensor when the silicon wafer 2 in the flower basket 1 is in an inclined state and the wind knife body 3 blows air vertically; this is because the inclined silicon wafer 2 will hinder the airflow blown out of the second air outlet 33b, thereby significantly increasing the air pressure at the air outlet shell 364 near the second air outlet 33b. If the silicon wafer 2 is in a vertical state, the airflow blown out of the second air outlet 33b will intermittently pass through the gap between the two silicon wafers 2 or blow toward the top surface of the silicon wafer 2, that is, the first pressure sensor will detect a smaller air outlet pressure (lower than the preset pressure value) when the airflow passes through the gap between the two silicon wafers 2, and the air outlet pressure detected within the set time period will not be greater than the preset pressure value. Therefore, in order to prevent the high-speed airflow from affecting the silicon wafer 2, the air outlet mechanism 360 is switched from the extended state to the retracted state, so that the airflow is blown out from the air guide channel 32b, and when the flower basket 1 is transported out of the drying area, the air outlet mechanism 360 is switched to the extended state.

[0056] In addition, the control unit also stores a blockage pressure value, which is greater than the pressure value detected by the first pressure sensor when the second air outlet 33b blows toward the top surface of the silicon wafer 2; if the second air outlet 33b is blocked, the outlet pressure detected by the first pressure sensor will be greater than the blockage pressure value, and the air outlet mechanism 360 will be controlled to switch to a contracted state for temporary use, and a blockage alarm will be issued at the same time.

[0057] like Figure 8 As shown, in one embodiment, the wind knife body 3 is symmetrically provided with bearing shafts 4 at both ends in its length direction, and the outer side of the bearing shaft 4 is rotatably connected with a fixing cylinder 5, and the fixing cylinder 5 is connected to the bearing frame 6 through a fixing rod.

[0058] The output end of the driving part (not shown) is connected to the bearing shaft 4, which is used to control the bearing shaft 4 to drive the wind knife body 3 to rotate, so as to adjust the angle of the wind knife body 3 and ensure that the airflow formed by the wind knife body 3 is parallel to the silicon wafer 2.

[0059] like Figure 8-Figure 9 As shown, the present invention provides another detection unit;

[0060] In one embodiment, the detection unit includes: a plurality of protrusions 7 uniformly arranged along the circumferential direction on the outside of the load-bearing shaft 4, a second pressure sensor 8 is arranged on the protrusion 7, an elastic sleeve 9 is sleeved on the outside of the plurality of protrusions 7, the second pressure sensor 8 is arranged between the elastic sleeve 9 and the protrusion 7, a rigid sleeve 10 is sleeved on the outside of the elastic sleeve 9, and the rigid sleeve 10 is rotatably connected in the fixed cylinder 5.

[0061] Furthermore, the number of the bumps 7 is at least eight; the control unit stores a setting range corresponding to the second pressure sensor 8 on each bump 7, and the setting range is a pressure range formed by the pressure values ​​obtained multiple times by the second pressure sensor 8 when the airflow formed by the wind knife body 3 is parallel to the silicon wafer 2 and the airflow passes through the gap between the two silicon wafers 2.

[0062] Furthermore, the judgment criterion for the deviation of the airflow direction formed by the wind knife body 3 is that, on a load-bearing shaft 4, if the pressure values ​​detected by at least two asymmetrically arranged second pressure sensors 8 exceed their corresponding set ranges within a preset time, then the airflow direction formed by the wind knife body 3 deviates.

[0063] The preset time refers to the time that one air knife body 3 passes through at least two gaps (gaps formed between two adjacent silicon wafers 2) when the flower basket 1 is being transported.

[0064] Assuming that the silicon wafer 2 is in a vertical state, if the flat airflow is not parallel to the silicon wafer 2, the blown airflow will continue to be greatly obstructed within the preset time, and a reverse thrust force will be generated on the wind knife body 3, causing the pressure values ​​detected by the multiple second pressure sensors 8 to exceed the set range;

[0065] like Fig.10 As shown, assuming that the airflow formed by the wind knife body 3 is inclined to the right, the reverse thrust force will cause the pressure values ​​detected by the two upper left (or two lower right) second pressure sensors 8 to change significantly and exceed the set range, indicating that the airflow direction formed by the wind knife body 3 deviates. In this case, the angle of the wind knife body 3 is adjusted in real time so that the pressure values ​​detected by the multiple second pressure sensors 8 are restored to their corresponding set ranges.

[0066] like Fig.11 As shown, in one embodiment, in order to further protect the silicon wafer 2 from being affected by the high-speed airflow, the flower basket 1 can be provided with a cover 11 , on which baffles 12 are arranged at intervals, and the baffles 12 correspond to the silicon wafer 2 .

[0067] The width of the baffle 12 is made the same as the width of the silicon wafer 12 , so that a flat airflow can pass between adjacent baffles 12 .

[0068] In the description of the present invention, it is to be understood that the terms “center”, “longitudinal”, “lateral”, “length”, “width”, “thickness”, “up”, “down”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inside”, “outside”, “clockwise”, “counterclockwise”, “axial”, “radial”, “circumferential”, etc., indicating orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0069] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral one; it can be a mechanical connection, an electrical connection, or communication with each other; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0070] Although the embodiments of the present invention have been disclosed as above, they are not limited to the applications listed in the specification and the implementation methods. They can be fully applied to various fields suitable for the present invention. For those familiar with the art, additional modifications can be easily implemented. Therefore, without departing from the general concept defined by the claims and the scope of equivalents, the present invention is not limited to the specific details and the illustrations shown and described herein.

Claims

1. A wind knife for quickly drying flower baskets and silicon wafers, characterized in that: include: The wind knife body (3) is arranged on one side of the flower basket (1), and a plurality of silicon wafers (2) are carried in the flower basket (1). The airflow formed by the wind knife body (3) is parallel to the silicon wafers (2) and passes between two adjacent silicon wafers (2). The wind knife body (3) is arranged on a carrier (6), and a detection unit for detecting the direction of the airflow is provided on the wind knife body (3). When the direction of the airflow formed by the wind knife body (3) deviates, the control unit controls the driving unit to adjust the position of the wind knife body (3) on the carrier (6) so that the formed airflow is parallel to the silicon wafers (2). The wind knife body (3) is symmetrically provided with bearing shafts (4) at both ends in the length direction thereof, and a fixing cylinder (5) is rotatably connected to the outer side of the bearing shaft (4), and the fixing cylinder (5) is connected to the bearing frame (6) via a fixing rod; The detection unit comprises: a plurality of protrusions (7) uniformly arranged on the outside of the bearing shaft (4) along the circumferential direction; a second pressure sensor (8) is arranged on the protrusion (7); an elastic sleeve (9) is sleeved on the outside of the plurality of protrusions (7); the second pressure sensor (8) is arranged between the elastic sleeve (9) and the protrusion (7); a rigid sleeve (10) is sleeved on the outside of the elastic sleeve (9); and the rigid sleeve (10) is rotatably connected in the fixed cylinder (5).

2. The air knife for rapidly drying flower baskets and silicon wafers according to claim 1, characterized in that: The airflow formed by the wind knife body (3) is flat, the thickness of the flat airflow is less than or equal to the gap distance between two adjacent silicon wafers (2), and the width of the flat airflow is greater than or equal to the width of the flower basket (1).

3. The air knife for rapidly drying flower baskets and silicon wafers according to claim 1, characterized in that: The wind knife body (3) comprises: a first plate body (310) and a second plate body (320) connected to each other, a sealing gasket (330) being arranged between the first plate body (310) and the second plate body (320); an air inlet groove and an air guide groove are arranged inside the first plate body (310), an air inlet cavity (31a) connected to an air source is formed between the air inlet groove and the side wall of the second plate body (320), an air guide cavity (32a) is formed between the air guide groove and the side wall of the second plate body (320), and a flat first air outlet (33a) is formed at one end of the air guide cavity (32a) away from the air inlet cavity (31a).

4. The air knife for rapidly drying flower baskets and silicon wafers according to claim 1, characterized in that: The wind knife body (3) comprises: a first shell (340) and a second shell (350) arranged inside the first shell (340); two air guide channels (32b) are formed between the two outer side walls of the second shell (350) and the first shell (340); an air inlet channel (31b) connected to an air source is formed between the top side of the second shell (350) and the first shell (340); an air outlet mechanism (360) is movably arranged inside the second shell (350); one end of the air outlet mechanism (360) is connected to the inside of the second shell (350), and the other end extends to the outside of the second shell (350); The air outlet mechanism (360) comprises: a fixing frame (362) arranged on the inner side of the second shell (350), a V-shaped plate (363) being slidably arranged inside the fixing frame (362), an air outlet shell (364) being sleeved on the outer side of the V-shaped plate (363) and moving synchronously therewith, a flat second air outlet (33b) being formed at one end of the air outlet shell (364) away from the fixing frame (362), and an air outlet channel (361) being formed between two outer side walls of the V-shaped plate (363) and the air outlet shell (364); When the air outlet mechanism (360) is in an extended state, its air outlet channel (361) is connected to the air guide channel (32b), and airflow is blown out from the air outlet channel (361) to form a flat airflow; when the air outlet mechanism (360) is in a retracted state, its air outlet channel (361) is not connected to the air guide channel (32b), and airflow is blown out from the air guide channel (32b).

5. The air knife for rapidly drying flower baskets and silicon wafers according to claim 4, characterized in that: A driving assembly (365) is connected to one side of the V-shaped plate (363) away from the air outlet housing (364), and the other end of the driving assembly (365) passes through the fixing frame (362) and is connected to the second housing (350).

6. The air knife for rapidly drying flower baskets and silicon wafers according to claim 5, characterized in that: A first pressure sensor for detecting the outlet pressure is provided on the outer wall of the V-shaped plate (363); if the first pressure sensor detects that the outlet pressure is greater than a preset pressure value within a set time period, the control unit controls the drive assembly (365) to operate, so that the outlet mechanism (360) switches from an extended state to a retracted state, so that the air flow is blown out from the air guide channel (32b).

7. The air knife for rapidly drying flower baskets and silicon wafers according to claim 1, characterized in that: The number of the protrusions (7) is at least eight; the control unit stores a setting range corresponding to the second pressure sensor (8) on each protrusion (7); the setting range is a pressure range formed by pressure values ​​obtained multiple times by the second pressure sensor (8) when the airflow formed by the air knife body (3) is parallel to the silicon wafer (2) and the airflow passes through the gap between the two silicon wafers (2).

8. The air knife for rapidly drying flower baskets and silicon wafers according to claim 7, characterized in that: A criterion for determining whether the direction of the airflow formed by the air knife body (3) is deviated is that, on a load-bearing shaft (4), if the pressure values ​​detected by at least two asymmetrically arranged second pressure sensors (8) exceed their corresponding set ranges, then the direction of the airflow formed by the air knife body (3) is deviated.

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