Ultra-precision hydrostatic guide rail accuracy performance test device and test platform

Abstract

The present invention relates to the technical field of testing ultra-precision hydrostatic guide rails, and provides a performance testing device for ultra-precision hydrostatic guide rails, including a base, a working platform, a guide rail assembly, a mounting seat, a protective cover, a laser interference assembly, a displacement bracket, and an adjustment seat. The base is provided with a plurality of air-floating vibration isolation members, and the working platform is connected to the air-floating vibration isolation members and is located above the base. The air-floating vibration isolation members are used to support the working platform, and the working platform is used to support various components. The setting of the air-floating vibration isolation members enables the working platform to isolate the influence caused by vibration, and the setting of the protective cover enables the laser assembly to avoid the influence of the external environment, thereby improving the measurement accuracy and being applicable to ultra-precision level measurements. Furthermore, through the position layout of the guide rail assembly, the displacement bracket, and the mounting seat, as well as the cooperation with the laser interference assembly, the stiffness test assembly, and the straightness test assembly, the testing of multiple performance indicators on the same working platform is realized, thereby improving the test efficiency.

Description

Technical Field

[0001] The invention relates to the technical field of testing an ultra-precision hydrostatic guide rail, and in particular to an accuracy performance testing device and a test platform for an ultra-precision hydrostatic guide rail. Background Art

[0002] Ultra-precision hydrostatic guides are important core functional components of ultra-precision machine tools. Their performance directly affects the surface quality of workpieces processed by ultra-precision machine tools. Therefore, it is particularly important to detect the various performance indicators of ultra-precision hydrostatic guides.

[0003] In the related technology, most testing devices can only measure a single performance indicator of the precision-level hydrostatic guide rail, which leads to a large measurement error at the ultra-precision level. In addition, the measurement of a single performance indicator requires moving the hydrostatic guide rail when testing multiple performance indicators. On the one hand, the increase in unstable factors will lead to a higher risk of measurement accuracy and reduce the efficiency of the test. Summary of the invention

[0004] The present invention provides an ultra-precision hydrostatic guide rail accuracy performance testing device and a test platform, which are used to solve the defects in the prior art that it is difficult to detect various performance indicators of the ultra-precision hydrostatic guide rail, and a single device can only provide a single performance indicator detection.

[0005] A first aspect of the present invention provides a performance testing device for an ultra-precision hydrostatic guide rail, comprising: a base, a working platform, a guide rail assembly, a mounting seat, a protective cover, a laser interference assembly, a displacement bracket and an adjustment seat, wherein the base is provided with a plurality of air-floating vibration isolation members; the working platform is connected to the air-floating vibration isolation members and is located above the base, and the air-floating vibration isolation members are used to support the working platform; the guide rail assembly is arranged on the working platform, and the guide rail assembly includes two slide rails arranged at intervals, position sensors are provided at both ends of the slide rails, and an installation space is formed between the two slide rails; the mounting seat is arranged in the installation space, and a sliding platform for mounting a workpiece to be tested is provided on the mounting seat, and the sliding platform is slidably connected to the mounting seat, and the sliding platform is configured to move along the first The protective cover is arranged on the working platform, and the protective cover extends from one end of the mounting seat along the first direction, so that the protective cover spans the mounting seat in the first direction, and an internal channel is formed in the protective cover; the laser interference component is arranged at one end of the protective cover away from the mounting seat, and the laser emitting end of the laser interference component is located in the internal channel, and the laser interference component is configured to detect the accuracy performance of the workpiece to be measured; the displacement bracket is slidably connected to the slide rail, and the displacement bracket is provided with a stiffness testing component, and the stiffness testing component is used to test the stiffness performance of the workpiece to be measured; the adjustment seat is arranged on at least one side of the mounting seat, and a placement table is provided on the adjustment seat, and the placement table is used to install the function detection component.

[0006] According to the accuracy performance testing device of the ultra-precision hydrostatic guide rail provided by the present invention, the base is a rectangular base, and the air-floating vibration isolation parts are provided on the four corners of the base, one end of the air-floating vibration isolation parts is connected to the base, and the other end of the air-floating vibration isolation parts is connected to the working platform; wherein, the four air-floating vibration isolation parts are connected to the regulator through a pipeline system, and the input end of the regulator is connected to an air source so that the air pressure of the air-floating vibration isolation parts can be adjusted through the regulator.

[0007] According to the accuracy performance testing device for the ultra-precision hydrostatic guide rail provided by the present invention, the displacement bracket is constructed as a door frame structure, and the stiffness testing assembly is provided on the top of the displacement bracket and at least one side of the displacement bracket.

[0008] According to the accuracy performance testing device of the ultra-precision hydrostatic guide rail provided by the present invention, a locking component is provided at the bottom of the displacement bracket, and the locking component is configured to prevent the displacement bracket from moving in a locked state.

[0009] According to the accuracy performance testing device of the ultra-precision hydrostatic guide rail provided by the present invention, support frames are provided near both ends of the protective cover, the bottom of the support frame is fixedly set on the working platform, and the top of the support frame is connected to the protective cover to support the protective cover.

[0010] According to the accuracy performance testing device of the ultra-precision hydrostatic guide rail provided by the present invention, the laser interference assembly includes a laser interferometer, a support assembly, an interferometer and a reflector; the laser interferometer is arranged on the support assembly, and the support assembly is fixedly connected to the working platform; the interferometer and the laser interferometer are spaced apart in the first direction, and the interferometer is located in the internal channel so that the laser beam emitted by the laser interferometer passes through the interferometer; the reflector is arranged on the mounting seat, and the reflector is located in the internal channel, and the reflector is used to reflect part of the laser beam after passing through the interferometer.

[0011] According to the accuracy performance testing device of the ultra-precision hydrostatic guide rail provided by the present invention, the support assembly includes a support seat, a lifting platform, a magnetic seat and a pan-tilt head; the support seat is fixedly arranged on the working platform, a lifting rod is arranged at the bottom of the lifting platform, the lifting rod is slidably connected to the support seat, the bottom of the magnetic seat is arranged on the lifting platform, the top of the magnetic seat is connected to the pan-tilt head, and the pan-tilt head is used to install the laser interferometer; wherein, an adjustment part is provided on the support seat, and the adjustment part is configured to be able to abut against the lifting rod to limit the movement of the lifting rod.

[0012] According to the accuracy performance testing device of the ultra-precision hydrostatic guide rail provided by the present invention, fixed blocks are provided on both sides of the mounting seat, and each of the fixed blocks is provided with a plurality of the adjustment seats.

[0013] According to the accuracy performance testing device for the ultra-precision hydrostatic guide rail provided by the present invention, a plurality of shims are fixedly connected to the bottom of the base, and the plurality of shims are used to support the base.

[0014] A second aspect of the present invention provides a test platform, comprising a data processing system and an accuracy performance testing device for an ultra-precision hydrostatic guide rail as described in any one of the above embodiments, wherein the data processing system is communicatively connected to the accuracy performance testing device.

[0015] The present invention provides an ultra-precision hydrostatic guide rail accuracy performance test device. The working platform has a gap with the base through the setting of air-floating vibration isolation parts, which enables the working platform to isolate the influence caused by vibration, and the setting of the protective cover enables the laser component to avoid the influence of the external environment, thereby avoiding the influence of external factors on the test results, improving the measurement accuracy and being suitable for ultra-precision measurement. Furthermore, through the position layout of the guide rail component, displacement bracket and mounting seat, as well as the cooperation with the laser interference component, stiffness test component and straightness test component, the test of multiple performance indicators on the same working platform is realized, and the test efficiency is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0017] Figure 1 This is one of the structural schematic diagrams of the performance testing device for the ultra-precision hydrostatic guide rail provided by the present invention.

[0018] Figure 2 This is the second structural schematic diagram of the performance testing device for the ultra-precision hydrostatic guide rail provided by the present invention.

[0019] Figure 3 It is a structural schematic diagram of the arrangement of laser components in the performance testing device for the ultra-precision hydrostatic guide provided by the present invention.

[0020] Figure 4 It is a structural schematic diagram of the arrangement of air-floating vibration isolation parts in the performance testing device for the ultra-precision hydrostatic guide provided by the present invention.

[0021] Figure 5It is a structural schematic diagram of a stiffness test assembly in a performance test device for an ultra-precision hydrostatic guide rail provided by the present invention.

[0022] Figure 6 It is a partial structural schematic diagram of a displacement bracket in the performance testing device of the ultra-precision hydrostatic guide rail provided by the present invention.

[0023] Figure 7 It is a structural schematic diagram of straightness detection in the performance testing device of the ultra-precision hydrostatic guide rail provided by the present invention.

[0024] Reference numerals:

[0025] 1. Base; 11. Washer; 12. Air-floating vibration isolation member; 121. Regulator; 122. Output pipeline; 123. Main pipeline; 124. First connecting pipeline; 125. Second connecting pipeline; 2. Working platform; 3. Guide rail assembly; 31. Slide rail; 32. Position sensor; 4. Mounting seat; 40. Workpiece to be measured; 41. Sliding platform; 42. Slide plate; 43. Flat crystal; 5. Protective cover; 51. Support frame; 6. Laser interference assembly; 61. Support assembly; 611. Support seat; 612. Lifting platform; 613. Magnetic table seat; 614. Pan-tilt head; 62. Support support; 63. Laser interferometer; 64. Interferometer; 65. Reflector; 7. Displacement bracket; 71. Stiffness test assembly; 711. Cylinder; 712. Pressure sensor; 8. Adjustment seat; 81. Inductance meter; 82. Fixing block; 9. Operating table. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the drawings of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0027] In the description of the embodiments of the present invention, it should be noted that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limitations on the embodiments of the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0028] In the description of the embodiments of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present invention can be understood according to specific circumstances.

[0029] In the embodiments of the present invention, unless otherwise clearly specified and limited, the first feature being "above" or "below" the second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0030] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the embodiments of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0031] Combine the following Figure 1-Figure 5 The present invention describes a performance testing device for an ultra-precision hydrostatic guide rail, comprising a base 1, a working platform 2, a guide rail assembly 3, a mounting seat 4, a protective cover 5, a laser interference assembly 6, a displacement bracket 7 and an adjustment seat 8. The base 1 is provided with a plurality of air-floating vibration isolation members 12, the working platform 2 is connected to the air-floating vibration isolation members 12 and is located above the base 1, the air-floating vibration isolation members 12 are used to support the working platform 2, and the working platform 2 is used to support various components.

[0032] The base 1 is arranged on the bottom surface or other placement platform, and the working platform 2 is connected to the base 1 through the air-floating vibration isolation member 12, that is, the air-floating vibration isolation member 12 is arranged between the base 1 and the working platform 2, and the air-floating vibration isolation member 12 can achieve vibration isolation, thereby avoiding the influence of the external environment on the test results of each component on the working platform, so as to improve the detection accuracy, thereby achieving ultra-precision detection. Specifically, the working platform 2 is supported by the air-floating vibration isolation member 12 and is located above the base 1, and there is a certain gap between the base 1.

[0033] The guide rail assembly 3 is arranged on the working platform 2, and the guide rail assembly 3 includes two slide rails 31 arranged at an interval. Position sensors 32 are provided at both ends of the slide rails 31, and an installation space is formed between the two slide rails 31. The mounting seat 4 is arranged in the installation space, and a sliding platform 41 for mounting a workpiece 40 to be measured is provided on the mounting seat 4. The sliding platform 41 is slidably connected to the mounting seat 4, and the sliding platform 41 is configured to slide along the first direction X.

[0034] The two slide rails 31 are fixedly arranged on the working platform 2, the interval space between the two slide rails 31 is the installation space, the mounting seat 4 is arranged in the installation space, and a sliding platform 41 is configured in the installation space, and the sliding platform 41 can slide along the first direction X. This arrangement can improve the flexibility of the workpiece 40 to be tested, and facilitate the testing of multiple performance indicators.

[0035] The protective cover 5 is arranged on the working platform 2, and the protective cover 5 extends from one end of the mounting seat 4 along the first direction X, so that the protective cover 5 crosses the mounting seat 4 in the first direction X, and an internal channel is formed in the protective cover 5; the laser interference component 6 is arranged at the end of the protective cover 5 away from the mounting seat 4, and the laser emitting end of the laser interference component 6 is located in the internal channel, and the laser interference component 6 is configured to detect the accuracy performance of the workpiece 40 to be measured. When measuring the position accuracy and repeatability accuracy of the ultra-precision hydrostatic guide rail, it is often necessary to achieve its measurement through laser.

[0036] The setting of the protective cover 5 forms an internal space inside the protective cover 5, and the laser emitting end of the laser interference component 6 is located in the internal channel, so that the emitted laser beam can avoid the influence of the external environment, thereby realizing ultra-precision hydrostatic guide rail measurement.

[0037] The displacement bracket 7 is slidably connected to the slide rail 31, and the displacement bracket 7 is provided with a stiffness test assembly 71, which is used to test the stiffness performance of the workpiece 40 to be tested; the adjustment seat 8 is provided on at least one side of the mounting seat 4, and the adjustment seat 8 is provided with a straightness detection assembly, which is used to detect the straightness of the workpiece 40 to be tested. The measurement of various performance indicators of the ultra-precision hydrostatic guide rail requires high measurement accuracy to achieve measurement. In this embodiment, the floating vibration isolation member and the protective cover 5 are provided to avoid interference from the external environment during the test, thereby achieving accurate measurement of various performance indicators and realizing measurement of ultra-precision hydrostatic guide rails.

[0038] It is understandable that some typical methods in the related art use a sealed special environment for measurement. Due to the limitations of the special environment, this method leads to an overall high cost and is not conducive to flexible layout. In this embodiment, the air-floating vibration isolation member 12 can isolate and reduce the impact of external vibration on the workbench, thereby facilitating the configuration of the device and achieving the stability of the work platform 2, thereby improving the detection accuracy. The provision of the protective cover 5 enables the laser interference assembly 6 to achieve accurate measurement of the workpiece 40 to be measured in a relatively closed environment, thereby improving the measurement accuracy.

[0039] It should be noted that the workpiece 40 to be tested described in this specification is an ultra-precision hydrostatic guide rail, which is slidably mounted on a sliding platform 41, so that it can cooperate when different positions or different performance indicators are required for testing. The sliding platform 41 is slidably arranged on the mounting seat 4, and the structure of the slide seat in the relevant technology can be specifically referred to. That is, the sliding platform 41 is similar to the supporting sliding platform of the slide seat, and a slidable guide rail is provided on the mounting seat 4. The sliding platform is slidably arranged on the slide rail, wherein a driving member for driving the sliding platform to move is also provided in the mounting seat 4, wherein the driving member can be a hydraulic cylinder or other linear drive device.

[0040] According to an embodiment provided by the present invention, the base 1 is a rectangular base 1, and air-floating vibration isolation members 12 are provided at the four corners of the base 1, one end of the air-floating vibration isolation member 12 is connected to the base 1, and the other end of the air-floating vibration isolation member 12 is connected to the work platform 2; wherein, the four air-floating vibration isolation members 12 are connected to the regulator 121 through a pipeline system, and the input end of the regulator 121 is connected to the air source, so as to adjust the air pressure of the air-floating vibration isolation member 12 through the regulator 121. The air-floating vibration isolation member 12 can achieve isolation of vibration, and prevent external vibration from being transmitted to the workbench, thereby reducing the accuracy of the test. The air-floating vibration isolation member 12 is provided at each corner to make the workbench more stable, thereby improving the accuracy of the measurement of each component on the workbench.

[0041] During specific configuration, the adjustment seat 8 may also be provided with instruments such as an inductance meter 81 to implement floating amount detection, thermal deformation experiments, and the like.

[0042] like Figure 4 As shown, in a specific implementation, the pipeline system includes an output pipeline 122, a main pipeline 123, a first connecting pipeline 124 and a second connecting pipeline 125. The main pipeline 123 has a first output port and a second output port. The first output port is connected to the first connecting pipeline 124. The first connecting pipeline 124 is connected to two air-floating vibration isolation members 12 on the same side. The two air-floating vibration isolation members 12 on the other side are connected through the second connecting pipeline 125, and one of the air-floating vibration isolation members 12 is connected to the second output port. When isolating vibration, each air-floating vibration isolation member 12 needs to have a suitable air pressure condition. In this embodiment, the four air-floating vibration isolation members 12 are linked together through the pipeline system to achieve air pressure balance of the four air-floating vibration isolation members 12, thereby improving the stability of the entire pipeline system and the stability of the working platform 2, thereby achieving high-precision measurement.

[0043] In a further example, the slide rail 31 is laid along the first direction X, the displacement bracket 7 is slidably connected to the slide rail 31, and a stiffness test component 71 is provided on the displacement bracket 7, and the stiffness test component 71 can detect the stiffness of the workpiece 40 to be measured. An adjustment seat 8 is provided on at least one side of the mounting seat 4, and a straightness detection component is provided on the adjustment seat 8, and the straightness measurement of the workpiece 40 to be measured is achieved through the straightness detection component. In this embodiment, the position accuracy, repeatability accuracy and other performance indicators of the workpiece 40 to be measured can be measured by the laser interference component 6, and the stiffness and straightness index measurements can be achieved by the stiffness test component 71 and the straightness detection component.

[0044] In a specific embodiment, the stiffness test assembly 71 includes a hydraulic station, a cylinder 711 and a pressure sensor 712. The cylinder 711 is connected to the hydraulic station. The pressure sensor 712 is arranged on the piston rod of the cylinder 711. A displacement sensor is built in the piston rod or the cylinder 711. The displacement sensor can monitor the displacement of the piston rod. A closed-loop control system is adopted as a whole. A starting voltage instruction is issued from the operating table 9 to control the proportional valve on the hydraulic station to output a certain pressure of air pressure to the cylinder 711. The piston rod of the cylinder 711 pushes the pressure sensor 712 forward and pushes against the upper surface or side of the guide rail, generating a certain pressure and feeding it back to the operating table 9. The operating table 9 compares the initial set pressure value with the pressure value fed back, and corrects the output voltage value until the pressure value fed back matches the set value. The inductance meter 81 picks up the change in the position of the guide rail generated under different loading loads. The static stiffness of the guide rail calculated by the platform software. The relationship curve of "force-displacement" and the relationship curve of "stiffness-force" are drawn.

[0045] According to an embodiment provided by the present invention, the displacement bracket 7 is constructed as a door frame structure, and the top of the displacement bracket 7 and at least one side of the displacement bracket 7 are provided with a stiffness testing assembly 71. The displacement bracket 7 can slide along the slide rail 31, so as to reach any position of the workpiece 40 to be tested, thereby realizing stiffness testing of various parts of the workpiece 40 to be tested.

[0046] In the specific configuration, the top of the door frame-shaped displacement bracket 7 has a crossbeam structure, and the stiffness test assembly 71 is connected to the crossbeam, so that the stiffness test in the vertical direction can be realized. The two ends of the crossbeam structure are provided with columns, and the stiffness test assembly 71 is provided on at least one column, so that the stiffness test in the lateral direction can be realized. In a further example, a handle is provided on the outer side wall of the column, and the displacement bracket 7 is easily moved by the handle.

[0047] It can be understood that the height of the displacement bracket 7 is higher than the highest position of the protective cover 5 and the mounting seat 4, the slide rail 31 extends along the first direction and can cover the entire length of the mounting seat 4, and one end of the slide rail 31 exceeds the end of the mounting seat 4, so that a section of the slide rail 31 is located outside the mounting seat 4, and the displacement bracket 7 slides along the slide rail 31. When the displacement bracket 7 is on the outer section of the slide rail 31, it is easy to disassemble the protective cover 5, because it is not necessary to disassemble the protective cover 5 for measuring the position accuracy and repeatability accuracy through the laser interference component 6. When the stiffness test is required, the stiffness measurement is achieved by sliding the displacement bracket 7 to the specified position.

[0048] In a specific implementation, a locking component is provided at the bottom of the displacement bracket 7, and the locking component is configured to prevent the displacement bracket 7 from moving when in a locked state. When a stiffness test is required, the displacement bracket 7 needs to be moved to a specified position, and after reaching the specified position, the movement needs to be stopped to maintain stability. In this embodiment, the locking of the displacement bracket 7 is achieved by means of a locking portion.

[0049] In specific applications, the locking component includes a rotating handle, which is connected to a rotating pin. The rotating pin is arranged at the bottom of the displacement bracket 7, that is, the bottom of the column. The rotating pin has a limiting portion, so that after the rotating pin rotates a certain angle, the limiting portion can cooperate with the slide rail 31 to achieve locking, thereby ensuring the stability of the displacement bracket 7.

[0050] According to an embodiment provided by the present invention, support frames 51 are provided near both ends of the protective cover 5, the bottom of the support frame 51 is fixedly arranged on the working platform 2, and the top of the support frame 51 is connected to the protective cover 5 to support the protective cover 5. The support frame 51 is used to facilitate the disassembly of the protective cover 5, and the quick disassembly and assembly of the protective cover 5 can be achieved.

[0051] In the specific configuration, a fixing block 82 is provided at both ends of the mounting seat 4 along the first direction, the fixing block 82 is connected to the working platform 2, and the support frame 51 is provided on the fixing block 82. A connecting groove is provided on the fixing block 82 along the length direction, and the support frame 51 is provided in the connecting groove to support the protective cover, which facilitates the quick disassembly and assembly of the protective cover 5.

[0052] In a specific application, handles are provided at both ends of the top of the protective cover 5 , and the protective cover 5 can be easily removed through the handles, so that the protective cover 5 can be quickly disassembled and assembled.

[0053] According to an embodiment provided by the present invention, the laser interference assembly 6 includes a laser interferometer 63, a support assembly 61, an interference mirror 64 and a reflector 65; the laser interferometer 63 is arranged on the support assembly 61, and the support assembly 61 is fixedly connected to the work platform 2; the interference mirror 64 and the laser interferometer 63 are spaced apart in the first direction, and the interference mirror 64 is located in the internal channel so that the laser beam emitted by the laser interferometer 63 passes through the interference mirror 64; the reflector 65 is arranged on the mounting seat 4, and the reflector 65 is located in the internal channel, and the reflector 65 is used to reflect part of the laser beam after passing through the interference mirror 64.

[0054] During the specific setting, the mounting seat 4 is fixedly connected to the working platform 2, a sliding platform 41 is provided on the mounting seat 4, a workpiece 40 to be measured is slidably set on the sliding platform 41, a slide plate 42 is provided on the surface of the workpiece 40 to be measured, and a reflector 65 is connected to the slide plate 42. Various position accuracies are detected by light path reflection during detection.

[0055] When measuring the position accuracy of the workpiece 40 to be measured, the laser interferometer 63 emits a laser beam, which is divided into two beams by the interferometer 64, one beam is used as a reference light, and the other beam is used to irradiate the workpiece 40 to be measured. The reflector 65 is set on the separated reference beam, which reflects a part of the beam emitted from the laser light source, so that it interferes with the beam reflected from the surface of the workpiece 40 to be measured, thereby realizing various position accuracy detections. In this embodiment, the internal channel in the protective cover 5 serves as the optical path channel of the laser, and the laser beam is emitted by the laser interferometer 63, and then acts on the interferometer 64, and finally realizes the high-precision measurement of the workpiece 40 to be measured.

[0056] During the specific setting, the interference mirror 64 is connected through a support bracket 62, the bottom of the support bracket 62 is connected to the fixing block 82 by bolts, the top of the support bracket 62 is located below the protective cover 5, and the interference mirror 64 is arranged on the top of the support bracket 62. The height of the support bracket 62 enables the main body of the interference mirror 64 to be located in the internal channel.

[0057] In a specific embodiment, the support assembly 61 includes a support seat 611, a lifting platform 612, a magnetic table seat 613 and a pan-tilt platform 614; the support seat 611 is fixedly arranged on the working platform 2, a lifting rod is arranged at the bottom of the lifting platform 612, and the lifting rod is slidably connected to the support seat 611, the bottom of the magnetic table seat 613 is arranged on the lifting platform 612, and the top of the magnetic table seat 613 is connected to the pan-tilt platform 614, and the pan-tilt platform 614 is used to install the laser interferometer 63; wherein, an adjustment part is arranged on the support seat 611, and the adjustment part is configured to be able to abut against the lifting rod to limit the movement of the lifting rod. The laser interferometer 63 is located on the pan-tilt platform 614, which can change the optical path of the laser beam by adjusting the lifting platform 612, and can realize the detection of position accuracy in cooperation with the interferometer 64 and the reflector 65.

[0058] In the specific setting, the top of the lifting platform 612 has a platform part, and the bottom surface of the platform part is connected to a lifting rod, which is inserted on the support seat 611, and the support seat 611 is connected to the working platform 2 through a fixing block 82, and the adjustment part is an adjustment bolt. Further, a lifting hole is opened along the axial direction of the support seat 611, and the lifting rod is inserted in the lifting hole. The adjustment bolt is arranged along the radial direction of the support seat 611. When the laser interferometer 63 is in the working position, by tightening the adjustment bolt, the adjustment bolt is abutted against the lifting rod, thereby realizing the limitation of the lifting platform 612 and ensuring the stability of the laser interferometer 63.

[0059] The bottom of the magnetic stand 613 has a magnetic attraction portion, which is connected to the lifting platform 612 for easy disassembly. A connecting rod is provided on the magnetic stand 613, and the connecting rod is fixedly connected to the pan-tilt head 614.

[0060] According to an embodiment provided by the present invention, both sides of the mounting seat 4 are provided with fixed blocks 82, and each fixed block 82 is provided with a plurality of adjustment seats 8. The fixed block 82 is provided with a connecting groove along its length direction, and the mounting seat 4 is connected through the connecting groove. In this way, the measurement of different performance indicators can be achieved through multiple adjustment seats, enriching the measurement function of the device.

[0061] In the specific setting, a placing table is provided on the top of the adjustment seat 8 , and the testing instrument etc. can be placed on the placing table to facilitate the measurement of the workpiece 40 to be measured.

[0062] According to an embodiment provided by the present invention, a plurality of shims 11 are fixedly connected to the bottom of the base 1, and the plurality of shims 11 are used to support the base 1. The shims 11 can reduce the contact surface with the ground or the placement platform, thereby reducing the influence of external vibration and other factors.

[0063] The following introduces multiple testing functions of the performance testing device provided in the above embodiment by taking examples.

[0064] Stiffness test: The static stiffness of the guide rail refers to the ability of the machine tool guide rail to resist deformation during load or processing, and is expressed as the load and (vertical force / lateral force) under unit deformation. It reflects the guide rail's ability to maintain accuracy during processing and is an important indicator for judging the performance of the guide rail. In this embodiment, the guide rail to be tested is first installed on the sliding platform 41, the displacement bracket 7 is moved to make the displacement bracket 7 reach the predetermined position, and then the displacement bracket 7 is locked. At this time, the stiffness test component 71 is located at the center of the guide rail to be tested, and then the cylinder 711 or the oil cylinder is used to load the slide 42 in the vertical and lateral directions, and the displacement of the guide rail in the vertical and lateral directions is measured by the displacement sensor (the displacement sensor built into the cylinder 711 or the oil cylinder). The four-point (or two-point) displacement sensor readings are detected at the same time, and the inductance meter 81 reads the data and takes the average as the deformation variable. When performing vertical stiffness testing, the pressure sensor 712 (or inductive probe) is fixed perpendicularly to the horizontal surface of the guide rail; when performing lateral stiffness testing, the pressure sensor 712 (or inductive probe) is fixed perpendicularly to the side surface of the guide rail.

[0065] Straightness detection: such as Figure 7 As shown, the straightness of the hydrostatic guideway reflects the guiding accuracy of the ultra-precision machine tool and is an important indicator in the detection of the geometric accuracy of the machine tool. Place the flat crystal 43 (the flat crystal 43 is a rectangular block structure) on the slide 42, use the smoothest surface of the flat crystal 43 as the measuring surface, fix the inductance meter 81 used to measure the performance on the adjustment seat 8, and the meter head contacts the measuring surface of the flat crystal 43. Align the flat crystal 43 so that the values ​​of the inductance meter 81 at both ends are equal, move the slide 42, record the maximum and minimum values ​​of the inductance meter 81 readings, and perform straightness detection. The difference between the two values ​​is the straightness error.

[0066] The guide rail position accuracy detection can be realized by laser interference assembly 6 to detect positioning accuracy and repeat positioning accuracy. Specifically: install the protective cover 5, adjust the laser interferometer 63, interferometer 64 and reflector 65 to the appropriate position, and turn on the laser interferometer 63 for measurement. For details, please refer to the specific detection method recorded in A13 of GB / T17421.1-1998.

[0067] Floating amount detection: install the guide rail to be tested on the sliding platform 41; fix the inductive probe on the adjustment seat 8, and make the detection end of the inductive probe perpendicular to the four corners of the horizontal plane of the guide rail, remove the pressure oil in the static pressure guide rail, and adjust the inductance meter 81 to zero; use the displacement sensor to detect the thickness change of the oil film at four points of the guide rail before and after the oil is passed, adjust the micrometer to zero, and read the value. Then adjust the oil pressure or adjust the load to perform multi-parameter detection.

[0068] Micro-feeding experiment, the purpose of the guide rail micro-feeding experiment is to determine the motion resolution of the experimental guide rail in the motion direction, that is, the minimum step length of the guide rail. At any point in the first direction of travel, the slide 42 moves ten steps forward in the first direction and ten steps backward in the first direction in sequence according to the step length of 0.005μm, and the minimum resolution of the first direction movement is tested. Specifically, when using the laser interferometer 63, the specific detection method described in A13 of GB / T 17421.1-1998 is followed.

[0069] Thermal deformation experiment: During the operation of the guide rail, the ambient temperature and the temperature of the hydraulic oil will change the temperature of the guide rail itself, causing the guide rail posture to change. After the guide rail is running through the oil, the inductance meter 81 is set on the adjustment seat 8, the inductance meter 81 is zeroed, and the oil temperature change and the reading of the inductance meter 81 are observed when the guide rail moves.

[0070] The second aspect of the present invention provides a test platform, including a data processing system (not shown in the figure) and an accuracy performance test device for an ultra-precision hydrostatic guide rail as described in any one of the above embodiments, wherein the data processing system is in communication connection with the accuracy performance test device. The data processing system is used to collect various data in the test, and the collected data is processed to output the real-time test results. Specifically, the data processing system includes an operating table 9.

[0071] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. An ultra-precision hydrostatic guide rail accuracy performance test device, characterized in that: include: A base, provided with a plurality of air-floating vibration isolation members; A working platform connected to the air-floating vibration isolation member and located above the base, wherein the air-floating vibration isolation member is used to support the working platform; A guide rail assembly is arranged on the working platform, the guide rail assembly comprises two slide rails arranged at intervals, position sensors are arranged at both ends of the slide rails, and an installation space is formed between the two slide rails; A mounting seat, arranged in the mounting space, the mounting seat being provided with a sliding platform for mounting the workpiece to be measured, the sliding platform being slidably connected to the mounting seat, and the sliding platform being configured to slide along a first direction; A protective cover is disposed on the working platform, the protective cover extends from one end of the mounting seat along the first direction so that the protective cover spans the mounting seat in the first direction, and an internal channel is formed in the protective cover; A laser interference assembly is arranged at one end of the protective cover away from the mounting seat, a laser emitting end of the laser interference assembly is located in the internal channel, and the laser interference assembly is configured to detect the accuracy performance of the workpiece to be measured; A displacement bracket is slidably connected to the slide rail, and the displacement bracket is provided with a stiffness testing component, and the stiffness testing component is used to test the stiffness performance of the workpiece to be tested; An adjustment seat, arranged on at least one side of the mounting seat, and a placement table is provided on the adjustment seat, and the placement table is used to install a functional detection component; Among them, the laser interference component includes a laser interferometer, a support component, an interferometer and a reflector; the laser interferometer is arranged on the support component, and the support component is fixedly connected to the work platform; the interferometer and the laser interferometer are arranged at intervals in the first direction, and the interferometer is located in the internal channel, so that the laser beam emitted by the laser interferometer passes through the interferometer; the reflector is arranged on the mounting seat, and the reflector is located in the internal channel, and the reflector is used to reflect part of the laser beam after passing through the interferometer; the laser interferometer emits a laser beam, and the laser beam is divided into two beams by the interferometer, one beam is used as a reference light, and the other beam is used to irradiate the workpiece to be measured, and the reflector is arranged on the separated reference beam to reflect a part of the beam emitted from the laser light source, so that it interferes with the beam reflected back from the surface of the workpiece to be measured, thereby realizing various position accuracy detections.

2. The precision performance testing device of the ultra-precision hydrostatic guide rail according to claim 1 is characterized in that: The base is a rectangular base, and the air-floating vibration isolation parts are arranged on the four corners of the base, one end of the air-floating vibration isolation part is connected to the base, and the other end of the air-floating vibration isolation part is connected to the working platform; The four air-floating vibration isolation components are connected to a regulator through a pipeline system, and an input end of the regulator is connected to an air source so that the air pressure of the air-floating vibration isolation components can be adjusted through the regulator.

3. The ultra-precision hydrostatic guide rail accuracy performance testing device according to claim 1, characterized in that: The displacement bracket is constructed as a door frame structure, and the stiffness testing assembly is provided on the top of the displacement bracket and at least one side of the displacement bracket.

4. The ultra-precision hydrostatic guide rail accuracy performance testing device according to claim 3, characterized in that: A locking component is provided at the bottom of the displacement bracket, and the locking component is configured to prevent the displacement bracket from moving in a locked state.

5. The ultra-precision hydrostatic guide rail accuracy performance testing device according to claim 1, characterized in that: Support frames are provided near both ends of the protective cover, the bottom of the support frame is fixedly arranged on the working platform, and the top of the support frame is connected to the protective cover to support the protective cover.

6. The ultra-precision hydrostatic guide rail accuracy performance testing device according to claim 1, characterized in that: The support assembly includes a support seat, a lifting platform, a magnetic table seat and a pan-tilt platform; the support seat is fixedly arranged on the working platform, a lifting rod is arranged at the bottom of the lifting platform, the lifting rod is slidably connected with the support seat, the bottom of the magnetic table seat is arranged on the lifting platform, the top of the magnetic table seat is connected with the pan-tilt platform, and the pan-tilt platform is used to install the laser interferometer; Wherein, the support seat is provided with an adjusting portion, and the adjusting portion is configured to be able to abut against the lifting rod to limit the movement of the lifting rod.

7. The ultra-precision hydrostatic guide rail accuracy performance testing device according to claim 1, characterized in that: Both sides of the mounting seat are provided with fixing blocks, and each of the fixing blocks is provided with a plurality of the adjusting seats.

8. The ultra-precision hydrostatic guide rail accuracy performance testing device according to claim 1, characterized in that: A plurality of pads are fixedly connected to the bottom of the base, and the plurality of pads are used to support the base.

9. A test platform, characterized in that: It comprises a data processing system and an accuracy performance testing device for an ultra-precision hydrostatic guide rail as described in any one of claims 1 to 8, wherein the data processing system is communicatively connected to the accuracy performance testing device.

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