A device for detecting the surface reflectivity of a crystalline silicon solar cell wafer

Abstract

The present invention discloses a device for detecting the surface reflectivity of silicon wafers of a crystalline silicon solar cell, which relates to the field of semiconductor detection technology and aims to solve the technical problem that existing devices cannot meet the current requirements for silicon wafer detection. The device comprises a detection base, wherein a lifting mechanism is arranged on a carrier, a dynamic distance adjustment mechanism is hoisted on the lifting mechanism, and a plurality of flexible light-shielding mechanisms are connected to the dynamic distance adjustment mechanism. The present invention enables the plurality of flexible light-shielding mechanisms to flexibly clamp and detect a plurality of crystalline silicon solar cell silicon wafers through the dynamic distance adjustment mechanism. By dispersing pressure and reducing contact area, the potential risk of damage to the surface of the silicon wafer is significantly reduced, local deformation caused by uneven pressure is avoided, and the accuracy of reflectivity detection is improved. The flexible clamping of the silicon wafer forms a tight fit to reduce light leakage. The good sealing helps to maintain the shading effect of the detection area during the detection process, thereby improving the accuracy of reflectivity detection.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor detection technology, and more particularly to a device for detecting the surface reflectivity of a crystalline silicon solar cell silicon wafer. Background Art

[0002] Testing the surface reflectivity of crystalline silicon solar cell wafers essentially evaluates their optical performance by measuring their ability to reflect light of specific wavelengths. An ideal testing device would efficiently and accurately capture this data while avoiding any physical damage to the wafers. However, existing testing methods have significant design deficiencies. Crystalline silicon solar cell wafers are typically thin, making them susceptible to cracking or deformation when subjected to external forces.

[0003] However, the existing detection method, when placing the silicon wafer between two pressure plates for measurement, will inevitably produce a certain amount of extrusion stress on the silicon wafer, increasing the risk of damage, even if the pressure is controlled quite accurately. The existing upper and lower pressing detection method also has obvious shortcomings in detection efficiency. Since the silicon wafers need to be pressed, measured and released one by one, this process is time-consuming and difficult to automate and batch process. As the scale of the solar cell industry continues to expand, the requirements for production efficiency are also getting higher and higher. Traditional detection methods can no longer meet the needs of modern production lines.

[0004] Furthermore, light shielding is often required during reflectivity testing. The primary purpose of this light shielding is to reduce interference from ambient light. This external light can interact with the test light source, leading to inaccurate measurement results. For example, if strong stray light is present in the surrounding environment during testing, this light may be reflected or scattered by the test sample, mixing into the measured reflected light and causing the final measured reflectivity to be biased higher. Another example is that in a laboratory environment, if proper light shielding is not implemented, natural light from windows or indoor lighting can affect the test results. Furthermore, prolonged exposure of the reflectivity tester may have several adverse effects. First, prolonged exposure can cause the instrument's internal photosensitive element to overheat, affecting its performance and accuracy. When the photosensitive element continuously operates and receives a large amount of light, the heat generated may exceed the normal operating range, potentially causing measurement deviations. Second, prolonged exposure can accelerate instrument aging and wear. With this in mind, we propose a device for measuring the surface reflectivity of crystalline silicon solar cell wafers. Summary of the Invention

[0005] The purpose of the present invention is to provide a device for detecting the surface reflectivity of a crystalline silicon solar cell silicon wafer, so as to solve the technical problem that existing devices cannot meet the current silicon wafer detection requirements.

[0006] To solve the above technical problems, the present invention provides the following technical solutions: a device for detecting the surface reflectance of a crystalline silicon solar cell wafer, comprising a detection base, a belt conveyor provided on the detection base, a carrier provided on the detection base near the back of the belt conveyor, a lifting mechanism provided on the carrier directly above the belt conveyor, a dynamic distance adjustment mechanism suspended on the lifting mechanism, and a plurality of flexible light-shielding mechanisms connected to the dynamic distance adjustment mechanism;

[0007] The dynamic distance adjustment mechanism causes the plurality of flexible light-shielding mechanisms to be horizontally opposed and flexibly clamped for detection, and the flexible light-shielding mechanism has two light-shielding states: detection light-shielding and window light-shielding.

[0008] Preferably, the lifting mechanism includes a cylinder, a suspension rod, a sliding rod and a suspension block. The cylinder is arranged at a position where the supporting frame is directly above the belt conveyor. The suspension rod is connected to the output end of the cylinder. The sliding rod is symmetrically arranged on the supporting frame. One end of the suspension block is connected to the suspension rod and the sliding rod, and the other end of the suspension block is connected to the dynamic distance adjustment mechanism.

[0009] Preferably, the dynamic distance adjustment mechanism includes a shell assembly, a drive assembly and a dynamic assembly, the shell assembly is connected to the bottom end of the suspension block, the drive assembly is arranged inside the shell assembly, the dynamic assembly is connected to a position on the shell assembly close to the drive assembly, and the flexible light-shielding mechanism is connected to the dynamic assembly.

[0010] Preferably, the shell assembly includes an outer shell, a back plate, a first pitch variable plate, a second pitch variable plate, a pitch variable slot and a tooth slot, the back plate is connected to the bottom end of the suspension block, the outer shell is installed on the back plate, the drive assembly is connected to one end inside the outer shell, the first pitch variable plate is connected to the other end inside the back plate, the second pitch variable plate is connected to the bottom end of the back plate, the pitch variable slot is opened on the first pitch variable plate and the second pitch variable plate, and the tooth slot is opened on the second pitch variable plate.

[0011] Preferably, the driving assembly includes a mounting block, a servo motor, a belt and a movable screw. The mounting block is connected to the end of the housing away from the first pitch variable plate, the servo motor is arranged at one end of the mounting block, the movable screw is rotatably connected to the other end of the mounting block, one end of the belt is connected to the output end of the servo motor, and the other end of the belt is connected to the movable screw, and the dynamic assembly is connected to the movable screw.

[0012] Preferably, the dynamic component includes a moving block, a slide rail A, a slide rail B and a sliding block, the moving block is movably connected to the moving screw, the slide rail A is connected to the moving block, the slide rail B is slidably connected to the slide rail A, the sliding block is slidably connected to the slide rail B, the slide rail A is arranged vertically, and the slide rail B is arranged horizontally; a limit rod is provided on the sliding block near the first pitch change plate, the limit rod is slidably connected to the pitch change groove, the bottom end of the sliding block is also connected to a mounting column, and the flexible light-shielding mechanism is connected to the mounting column.

[0013] Preferably, the flexible light-shielding mechanism includes a flexible clamping component, a light-shielding adjustment component and an air plug component. The top of the flexible clamping component is connected to the mounting column, the back of the flexible clamping component is movably inserted on the second variable pitch plate, the light-shielding adjustment component is arranged on the flexible clamping component, and the air plug component is arranged on the flexible clamping component.

[0014] Preferably, the flexible clamping assembly includes a mounting main rod, a rotating block, a driving shaft, a gear, a rotating shaft and a rubber suction cup, the mounting main rod is connected to the mounting column, the rotating block is rotatably connected to the bottom end of the mounting main rod, one end of the driving shaft is movably inserted on the second pitch change plate, the other end of the driving shaft passes through the mounting main rod and is connected to the rotating block, the gear is provided at one end of the driving shaft close to the second pitch change plate, the gear is engaged with the tooth groove, the rotating shaft is rotatably connected to the end of the rotating block away from the driving shaft, the rubber suction cup is connected to one end of the rotating shaft away from the rotating block, and the air plug assembly is provided on the rubber suction cup.

[0015] Preferably, the light-shielding adjustment component includes a gear ring groove, a rack plate and a bevel gear A, the gear ring groove is opened on the rotating shaft, the rack plate is arranged on the mounting main rod, the gear ring groove is adapted to the rack plate, and the bevel gear A is arranged on the rotating block near one end of the driving shaft.

[0016] Preferably, an air plug hole is provided on the rubber suction cup, and the air plug assembly is provided on the air plug hole; the air plug assembly includes an air plug cylinder, an internal thread, an air plug column, an air hole groove, an external thread, a bevel gear B and a stopper, the air plug cylinder is provided on the air plug hole, the internal thread is provided inside the air plug cylinder, the air plug column is inserted into the air plug cylinder, the air hole groove is provided in a circular shape with equal intervals at one end of the outer wall of the air plug column, the external thread is provided at the other end of the outer wall of the air plug column, the bevel gear B is provided on one side of the air plug column, the stopper is provided on the other side of the air plug column, and the bevel gear B is adapted to the bevel gear A.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] 1. The present invention improves the structure of an existing device for detecting the surface reflectance of silicon wafers of crystalline silicon solar cells. A belt conveyor is arranged on a detection base, a carrier is arranged on the back of the belt conveyor, a lifting mechanism is arranged on the carrier, a dynamic distance-adjusting mechanism is hoisted on the lifting mechanism, and a plurality of flexible light-shielding mechanisms are connected to the dynamic distance-adjusting mechanism. The present invention enables the plurality of flexible light-shielding mechanisms to flexibly clamp and detect a plurality of crystalline silicon solar cell wafers through the dynamic distance-adjusting mechanism. By dispersing pressure and reducing contact area, the potential risk of damage to the surface of the silicon wafer is significantly reduced, and local deformation caused by uneven pressure is avoided, thereby improving the accuracy of reflectance detection. The flexible clamping of the silicon wafer forms a tight fit to reduce light leakage. Good sealing helps to maintain the light-shielding effect of the detection area during the detection process, thereby improving the accuracy of reflectance detection.

[0019] 2. The present invention movably sleeves the moving block on the moving screw rod, drives the servo motor to rotate and drives the belt to rotate. The belt pulls the moving screw rod to rotate. The rotation of the moving screw rod causes the moving block sleeved on the moving screw rod to move in the vertical direction, and the moving block drives the slide rail A to move. Since the slide rail A is also connected to the slide rail B, the slide rail B is slidably connected with several sliding blocks. A limiting rod is provided on the sliding block, and the limiting rod is movably inserted in the pitch changing slot. When the slide rail A moves vertically, the sliding block moves on the slide rail B due to the limiting of the limiting rod and the pitch changing slot. The bottom end of the sliding block is connected to a mounting column, and a flexible light-shielding mechanism is connected to the mounting column, which causes the flexible light-shielding mechanism to move in position. The pitch changing function allows the clamping device to be adjusted according to the actual size of the silicon wafer to ensure that each silicon wafer can be clamped stably and tightly, which is particularly important for processing silicon wafers of different batches or design requirements.

[0020] 3. In the present invention, when the main rod is installed to move, the driving shaft and the gear movably inserted on the second pitch-changing plate slide on the pitch-changing groove. The gear meshes with the tooth groove to rotate the driving shaft, and the driving shaft drives the rotating block to rotate. After the rotating block rotates 180 degrees, the tooth ring groove on the rotating shaft meshes with the rack plate at the top, so that the rotating shaft drives the rubber suction cup to rotate into an opposing state. Due to the pitch-changing groove of the second pitch-changing plate, the rubber suction cup is merged again. Before the rubber suction cup is merged, the bevel gear A rotates to drive the bevel gear B on the air plug column of the air plug assembly to rotate, and the bevel gear B rotates The movement drives the air plug column to rotate, and the external thread on the air plug column cooperates with the internal thread of the air plug tube, so that the air plug column is screwed out of the threaded part and leaks out of the air hole groove. Due to the air hole groove, air enters the rubber suction cup, resulting in it being unable to generate suction, which facilitates the rubber suction cup to separate from the silicon wafer. At the same time, no suction can be generated during the detection window period when the two rubber suction cups are merged again after separation. The purpose of merging the suction cups during the window period is to reduce the situation where the photosensitive elements inside the instrument are overheated due to long-term exposure, thereby affecting its performance and accuracy, thereby increasing the service life of the equipment and improving the detection quality and efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0022] Figure 2 It is a front view structural schematic diagram of the present invention;

[0023] Figure 3 It is a schematic diagram of the back structure of the lifting mechanism and the dynamic distance adjustment mechanism of the present invention;

[0024] Figure 4 It is a schematic structural diagram of the dynamic distance adjustment mechanism and the flexible light-shielding mechanism of the present invention;

[0025] Figure 5 This is a schematic diagram of the front structure of the dynamic distance adjustment mechanism of the present invention;

[0026] Figure 6 This is a schematic diagram of the back structure of the dynamic distance adjustment mechanism of the present invention;

[0027] Figure 7 This is a schematic structural diagram of the second pitch-variable plate and the flexible light-shielding mechanism of the present invention;

[0028] Figure 8 Schematic diagram of the reflectivity detection state of the present invention;

[0029] Figure 9 This is a schematic diagram of the light-shielding state of the detector during the window period of the present invention;

[0030] Figure 10 It is a schematic structural diagram of the rubber suction cup and air plug assembly of the present invention;

[0031] Figure 11 This is an enlarged view of the structure at point A of the present invention;

[0032] Description of the numbers in the figure:

[0033] 1. Detection base; 2. Belt conveyor; 3. Carrying frame; 4. Lifting mechanism; 5. Dynamic distance adjustment mechanism; 6. Flexible light-shielding mechanism;

[0034] 401, cylinder; 402, suspension rod; 403, slide rod; 404, suspension connecting block;

[0035] 501, housing assembly; 502, drive assembly; 503, dynamic assembly;

[0036] 601. Flexible clamping assembly; 602. Light-shielding adjustment assembly; 603. Air plug assembly;

[0037] 5011, housing; 5012, back plate; 5013, first pitch-changing plate; 5014, second pitch-changing plate; 5015, pitch-changing slot; 5016, tooth slot;

[0038] 5021, mounting block; 5022, servo motor; 5023, belt; 5024, moving screw;

[0039] 5031, moving block; 5032, slide rail A; 5033, slide rail B; 5034, sliding block; 5035, limit rod; 5036, mounting column;

[0040] 6011, main rod installation; 6012, rotating block; 6013, drive shaft; 6014, gear; 6015, rotating shaft; 6016, rubber suction cup; 6017, air plug hole;

[0041] 6021, gear ring groove; 6022, rack plate; 6023, bevel gear A;

[0042] 6031, air plug cylinder; 6032, internal thread; 6033, air plug column; 6034, air hole groove; 6035, external thread; 6036, bevel gear B; 6037, stopper. DETAILED DESCRIPTION

[0043] like Figures 1 to 11As shown, the present invention relates to a device for detecting the surface reflectance of silicon wafers of a crystalline silicon solar cell, comprising a detection base 1, a belt conveyor 2 being provided on the detection base 1, a carrier frame 3 being provided on the detection base 1 near the back of the belt conveyor 2, a lifting mechanism 4 being provided on the carrier frame 3 directly above the belt conveyor 2, a dynamic distance adjusting mechanism 5 being suspended on the lifting mechanism 4, and a plurality of flexible light-shielding mechanisms 6 being connected to the dynamic distance adjusting mechanism 5; wherein the dynamic distance adjusting mechanism 5 causes the plurality of flexible light-shielding mechanisms 6 to be horizontally opposed and flexibly clamped for detection, and the flexible light-shielding mechanisms 6 have two light-shielding states: detection light-shielding and window light-shielding. The present invention improves the structure of the existing device for detecting the surface reflectance of silicon wafers of crystalline silicon solar cells. A belt conveyor 2 is arranged on a detection base 1, a carrier frame 3 is arranged on the back of the belt conveyor 2, a lifting mechanism 4 is arranged on the carrier frame 3, a dynamic distance adjustment mechanism 5 is hoisted on the lifting mechanism 4, and several flexible light-shielding mechanisms 6 are connected to the dynamic distance adjustment mechanism 5. The present invention enables several flexible light-shielding mechanisms 6 to perform flexible clamping detection on several crystalline silicon solar cell silicon wafers through the dynamic distance adjustment mechanism 5. By dispersing pressure and reducing contact area, the potential risk of damage to the surface of the silicon wafer is significantly reduced, and local deformation caused by uneven pressure is avoided, thereby improving the accuracy of reflectance detection. The flexible clamping of the silicon wafer forms a tight fit to reduce light leakage. Good sealing helps to maintain the shading effect of the detection area during the detection process, thereby improving the accuracy of reflectance detection.

[0044] In an embodiment of the present invention, the lifting mechanism 4 includes a cylinder 401, a suspension rod 402, a slide rod 403 and a suspension block 404. The cylinder 401 is arranged at a position where the carrier frame 3 is directly above the belt conveyor 2. The suspension rod 402 is connected to the output end of the cylinder 401. The slide rod 403 is symmetrically arranged on the carrier frame 3. One end of the suspension block 404 is connected to the suspension rod 402 and the slide rod 403, and the other end of the suspension block 404 is connected to the dynamic distance adjustment mechanism 5. In the present invention, a cylinder 401 is set at a position where the carrier frame 3 is located directly above the belt conveyor 2. The stroke and return stroke of the cylinder 401 drive the suspension rod 402 and three suspension blocks 404 to descend or ascend. One of the suspension blocks 404 is connected to the suspension rod 402 and the dynamic distance adjustment mechanism 5. The bottom ends of the two outer suspension blocks 404 are connected to the dynamic distance adjustment mechanism 5 and are movably arranged on the slide rod 403, which improves the stability and prevents the detection instrument from being unable to be horizontally calibrated due to offset during the lifting process, resulting in uneven clamping pressure.

[0045] In the embodiment of the present invention, the dynamic distance adjustment mechanism 5 includes a housing assembly 501, a drive assembly 502 and a dynamic assembly 503. The housing assembly 501 is connected to the bottom end of the suspension block 404, the drive assembly 502 is arranged inside the housing assembly 501, the dynamic assembly 503 is connected to the housing assembly 501 near the drive assembly 502, and the flexible light-shielding mechanism 6 is connected to the dynamic assembly 503. Figure 4 And the instruction manual Figure 5 As shown, the housing, the driving component 502 and the dynamic component 503 are all arranged inside the housing component 501 , and the flexible light-shielding mechanism 6 is connected to the portion of the dynamic component 503 extending out of the housing component 501 .

[0046] As another embodiment of the present invention, the shell assembly 501 includes an outer shell 5011, a back plate 5012, a first pitch variable plate 5013, a second pitch variable plate 5014, a pitch variable slot 5015 and a tooth groove 5016. The back plate 5012 is connected to the bottom end of the suspension block 404, the outer shell 5011 is installed on the back plate 5012, the drive assembly 502 is connected to one end inside the outer shell 5011, the first pitch variable plate 5013 is connected to the other end inside the back plate 5012, the second pitch variable plate 5014 is connected to the bottom end of the back plate 5012, the pitch variable slot 5015 is opened on the first pitch variable plate 5013 and the second pitch variable plate 5014, and the tooth groove 5016 is opened on the second pitch variable plate 5014. In the present invention, the driving component 502 is connected to one end of the inside of the shell 5011, and the first pitch plate 5013 is connected to the other end of the inside of the back plate 5012. The first pitch plate 5013 is fixedly connected to the shell 5011. When the driving component 502 causes the dynamic component 503 to move, the dynamic component 503 is limited by the pitch groove 5015, so that the clamping opening and closing distance of the flexible light-shielding mechanism 6 on the dynamic component 503 changes, so as to adapt to the size and shape of the silicon wafers of the crystalline silicon solar cell. Through its flexibility and adjustability, it can easily adapt to silicon wafers of different sizes and shapes without replacing the fixture or making complicated adjustments.

[0047] As another embodiment of the present invention, the driving component 502 includes a mounting block 5021, a servo motor 5022, a belt 5023 and a moving screw 5024. The mounting block 5021 is connected to the end of the housing 5011 away from the first pitch plate 5013, the servo motor 5022 is arranged at one end of the mounting block 5021, the moving screw 5024 is rotatably connected to the other end of the mounting block 5021, one end of the belt 5023 is connected to the output end of the servo motor 5022, the other end of the belt 5023 is connected to the moving screw 5024, and the dynamic component 503 is connected to the moving screw 5024. In the present invention, a mounting block 5021 is symmetrically arranged at one end of the housing 5011 away from the first pitch plate 5013, and a servo motor 5022 is arranged on the mounting block 5021. The servo motor 5022 is driven to rotate and drive the belt 5023 to rotate. The belt 5023 pulls the moving screw rod 5024 to rotate. The rotation of the moving screw rod 5024 causes the dynamic component 503 mounted on the moving screw rod 5024 to move.

[0048] As another embodiment of the present invention, the dynamic component 503 includes a moving block 5031, a slide rail A5032, a slide rail B5033 and a sliding block 5034. The moving block 5031 is movably connected to the moving screw rod 5024, the slide rail A5032 is connected to the moving block 5031, the slide rail B5033 is slidably connected to the slide rail A5032, and the sliding block 5034 is slidably connected to the slide rail B5033. The slide rail A5032 is arranged vertically, and the slide rail B5033 is arranged horizontally. A limiting rod 5035 is provided on the sliding block 5034 near the first pitch change plate 5013. The limiting rod 5035 is slidably connected to the pitch change slot 5015. The bottom end of the sliding block 5034 is also connected to a mounting column 5036, and the flexible light-shielding mechanism 6 is connected to the mounting column 5036. The present invention movably sets the moving block 5031 on the moving screw rod 5024, drives the servo motor 5022 to rotate and drives the belt 5023 to rotate, the belt 5023 pulls the moving screw rod 5024 to rotate, and the rotation of the moving screw rod 5024 causes the moving block 5031 set on the moving screw rod 5024 to move in the vertical direction, and the moving block 5031 drives the slide rail A5032 to move. Since the slide rail A5032 is also connected to the slide rail B5033, the slide rail B5033 is slidably connected to a plurality of sliding blocks 5034, and a limit rod 5035 is provided on the sliding block 5034 to limit The positioning rod 5035 is movably inserted in the pitch-varying slot 5015, so that when the slide rail A5032 moves vertically, the sliding block 5034 moves on the slide rail B5033 due to the limitation of the positioning rod 5035 and the pitch-varying slot 5015. The bottom end of the sliding block 5034 is connected to the mounting column 5036, and the mounting column 5036 is connected to the flexible light-proof mechanism 6, so that the flexible light-proof mechanism 6 moves in position. The pitch-varying function allows the clamping device to be adjusted according to the actual size of the silicon wafer, ensuring that each silicon wafer can be clamped stably and tightly, which is especially important for processing silicon wafers of different batches or design requirements.

[0049] As another embodiment of the present invention, the flexible light-shielding mechanism 6 includes a flexible clamping component 601, a light-shielding adjustment component 602, and an air plug component 603. The top of the flexible clamping component 601 is connected to the mounting post 5036, the back of the flexible clamping component 601 is movably inserted into the second pitch-changing plate 5014, the light-shielding adjustment component 602 is provided on the flexible clamping component 601, and the air plug component 603 is provided on the flexible clamping component 601. In the present invention, the flexible clamping component 601 is connected to the mounting post 5036, the light-shielding adjustment component 602 and the air plug component 603 are provided on the flexible clamping component 601, and the back of the flexible clamping component 601 is movably inserted into the second pitch-changing plate 5014, so that when the position of the flexible clamping component 601 moves, the position of the flexible clamping component 601 is limited by the second pitch-changing plate 5014, so that the state of the flexible clamping component 601 is adjusted through the light-shielding adjustment component 602.

[0050] As another embodiment of the present invention, the flexible clamping assembly 601 includes a mounting main rod 6011, a rotating block 6012, a driving shaft 6013, a gear 6014, a rotating shaft 6015 and a rubber suction cup 6016. The mounting main rod 6011 is connected to the mounting column 5036, the rotating block 6012 is rotatably connected to the bottom end of the mounting main rod 6011, one end of the driving shaft 6013 is movably inserted into the second pitch change plate 5014, and the other end of the driving shaft 6013 is movably inserted into the second pitch change plate 5014. It passes through the mounting main rod 6011 and is connected to the rotating block 6012. The gear 6014 is provided at one end of the driving shaft 6013 close to the second pitch change plate 5014. The gear 6014 is engaged with the tooth groove 5016. The rotating shaft 6015 is rotatably connected to the end of the rotating block 6012 away from the driving shaft 6013. The rubber suction cup 6016 is connected to the end of the rotating shaft 6015 away from the rotating block 6012. The air plug assembly 603 is provided on the rubber suction cup 6016. In the present invention, the mounting column 5036 is connected to the mounting main rod 6011, the mounting main rod 6011 is connected to the rotating shaft 6015, the rotating shaft 6015 is connected to the rotating block 6012, and the rotating shaft 6015 is connected to the rubber suction cup 6016. The mounting column 5036 drives the mounting main rod 6011 to move, and the mounting main rod 6011 drives the rotating shaft 6015, the rotating block 6012 and the rubber suction cup 6016 to form opposite clamping, thereby achieving the effect of fixing the silicon wafer.

[0051] A reflectivity detector is installed inside the rubber suction cup 6016 of the flexible light-shielding mechanism 6 of the present invention. The detector is a detection instrument and principle used in a silicon wafer reflectivity detection method based on a filter array disclosed in Chinese invention patent publication CN112304904B.

[0052] As another embodiment of the present invention, the light-shielding adjustment component 602 includes a gear ring groove 6021, a rack plate 6022 and a bevel gear A6023. The gear ring groove 6021 is opened on the rotating shaft 6015, the rack plate 6022 is arranged on the mounting main rod 6011, the gear ring groove 6021 is adapted to the rack plate 6022, and the bevel gear A6023 is arranged on one end of the rotating block 6012 close to the driving shaft 6013.

[0053] The rubber suction cup 6016 is provided with an air plug hole 6017, and the air plug assembly 603 is provided on the air plug hole 6017; the air plug assembly 603 includes an air plug cylinder 6031, an internal thread 6032, an air plug column 6033, an air hole groove 6034, an external thread 6035, a bevel gear B6036 and a stopper 6037. The air plug cylinder 6031 is provided on the air plug hole 6017, and the internal thread 6032 is provided on the air plug cylinder 6033. Inside 031, the air plug column 6033 is inserted into the air plug tube 6031, and the air hole grooves 6034 are arranged in a circular shape at equal intervals on one end of the outer wall of the air plug column 6033. The external thread 6035 is arranged on the other end of the outer wall of the air plug column 6033. The bevel gear B6036 is arranged on one side of the air plug column 6033, and the block 6037 is arranged on the other side of the air plug column 6033. The bevel gear B6036 is adapted to the bevel gear A6023. The air plug assembly 603 used in the present invention achieves two light-shielding effects, one is light-shielding in the detection state, and the other is light-shielding of the detector during the detection window period, respectively achieving the effects of improving the detection quality and increasing the service life of the equipment. The air plug assembly 603 in the present invention not only makes the suction cup lose suction but also does not affect its light-shielding effect during the window period, further improving the service life and facilitating later maintenance.

[0054] In the present invention, when the main rod 6011 is installed to move its position, the drive shaft 6013 and the gear 6014 movably inserted on the second pitch-changing plate 5014 slide on the pitch-changing groove 5015, and the gear 6014 engages with the tooth groove 5016 to rotate the drive shaft 6013, and the drive shaft 6013 drives the rotating block 6012 to rotate. After the rotating block 6012 rotates 180 degrees, the tooth ring groove 6021 on the rotating shaft 6015 engages with the rack plate 6022 at the top, so that the rotating shaft 6015 drives the rubber suction cup 6016 to rotate into an opposing state. Due to the pitch-changing groove 5015 of the second pitch-changing plate 5014, the rubber suction cup 6016 is merged again. Before the rubber suction cup 6016 is merged, the bevel gear A6023 rotates the air plug column of the air plug assembly 603. The bevel gear B6036 on 6033 rotates, and the rotation of the bevel gear B6036 drives the air plug column 6033 to rotate. The external thread 6035 on the air plug column 6033 is threadedly matched with the internal thread 6032 of the air plug cylinder 6031, so that the air plug column 6033 is unscrewed and the threaded part leaks out of the air hole groove 6034. Due to the air hole groove 6034, air enters the rubber suction cup 6016, making it unable to generate suction, which facilitates the rubber suction cup 6016 to separate from the silicon wafer. At the same time, suction cannot be generated during the detection window period when the two rubber suction cups 6016 are merged again after separation. The purpose of merging the suction cups during the window period is to reduce the situation where the photosensitive elements inside the instrument are overheated due to long-term exposure, thereby affecting its performance and accuracy, thereby increasing the service life of the equipment and improving the detection quality and efficiency.

[0055] Working principle: This embodiment provides a device for detecting the surface reflectivity of a crystalline silicon solar cell wafer. When in use, a quartz boat with solar cell wafers is first placed on a belt conveyor 2. The belt conveyor 2 transports the wafers to the bottom of a lifting mechanism 4. The stroke of the cylinder 401 of the lifting mechanism 4 drives the hanging block 404 to descend. The hanging block 404 drives the back plate 5012 to descend, driving the servo motor 5022 to rotate and drive the belt 5023 to rotate. The belt 5023 pulls the moving screw 5024 to rotate. The rotation of the moving screw 5024 causes the moving block 5031 mounted on the moving screw 5024 to move in the vertical direction. The moving block 5031 moves vertically. 31 drives the slide rail A5032 to move. Since the slide rail A5032 is also connected to the slide rail B5033, the slide rail B5033 is slidably connected to a number of sliding blocks 5034. A limit rod 5035 is provided on the sliding block 5034. The limit rod 5035 is movably inserted in the variable pitch groove 5015. When the slide rail A5032 moves vertically, the limit rod 5035 and the variable pitch groove 5015 limit the sliding block 5034 to move on the slide rail B5033. The bottom end of the sliding block 5034 is connected to the mounting column 5036. The mounting column 5036 is connected to the flexible light-shielding mechanism 6, which causes the main rod 6011 to move in position. The movable insertion The driving shaft 6013 and gear 6014 on the second pitch-changing plate 5014 slide on the pitch-changing groove 5015. The gear 6014 engages the tooth groove 5016 to rotate the driving shaft 6013. The driving shaft 6013 drives the rotating block 6012 to rotate. After the rotating block 6012 rotates 180 degrees, the tooth ring groove 6021 on the rotating shaft 6015 engages with the rack plate 6022 at the top, so that the rotating shaft 6015 drives the rubber suction cup 6016 to rotate into an opposing state. Because the pitch-changing groove 5015 of the second pitch-changing plate 5014 causes the rubber suction cup 6016 to merge again, before the rubber suction cup 6016 merges, the bevel gear A6023 The bevel gear B6036 on the air plug column 6033 of the rotation-driven air plug assembly 603 rotates, and the rotation of the bevel gear B6036 drives the air plug column 6033 to rotate. The external thread 6035 on the air plug column 6033 is threadedly engaged with the internal thread 6032 of the air plug cylinder 6031, so that the air plug column 6033 is unscrewed from the threaded part to leak out of the air hole groove 6034. Due to the air hole groove 6034, air enters the rubber suction cup 6016, resulting in it being unable to generate suction, which facilitates the rubber suction cup 6016 to detach from the silicon wafer. At the same time, after separation, the two rubber suction cups 6016 without suction are reunited to achieve light protection during the detection window period, preventing overheating due to long-term exposure.

[0056] The embodiments disclosed in the present invention are preferred embodiments, but are not limited to them. Ordinary technicians in this field can easily understand the spirit of the present invention based on the above embodiments and make different extensions and changes. As long as they do not deviate from the spirit of the present invention, they are all within the scope of protection of the present invention.

Claims

1. A device for detecting the surface reflectivity of a crystalline silicon solar cell wafer, characterized in that: The invention comprises a detection base (1), wherein a belt conveyor (2) is provided on the detection base (1), a carrier (3) is provided on the detection base (1) at a position close to the back of the belt conveyor (2), a lifting mechanism (4) is provided on the carrier (3) at a position directly above the belt conveyor (2), a dynamic distance adjustment mechanism (5) is suspended on the lifting mechanism (4), and a plurality of flexible light-shielding mechanisms (6) are connected to the dynamic distance adjustment mechanism (5); The dynamic distance adjustment mechanism (5) causes the plurality of flexible light-shielding mechanisms (6) to be horizontally opposed and flexibly clamped for detection, and the flexible light-shielding mechanism (6) has two light-shielding states: detection light-shielding and window light-shielding. The dynamic distance adjustment mechanism (5) comprises a housing component (501), a drive component (502) and a dynamic component (503); the housing component (501) is connected to the bottom end of the suspension block (404); the drive component (502) is arranged inside the housing component (501); the dynamic component (503) is connected to a position on the housing component (501) close to the drive component (502); and the flexible light-shielding mechanism (6) is connected to the dynamic component (503); The flexible light-shielding mechanism (6) comprises a flexible clamping component (601), a light-shielding adjustment component (602) and an air plug component (603); the top end of the flexible clamping component (601) is connected to the mounting column (5036); the back end of the flexible clamping component (601) is movably inserted into the second variable pitch plate (5014); the light-shielding adjustment component (602) is arranged on the flexible clamping component (601); and the air plug component (603) is arranged on the flexible clamping component (601); A reflectivity detector is installed inside the rubber suction cup (6016) of the flexible light-shielding mechanism (6).

2. The device for detecting the surface reflectivity of a crystalline silicon solar cell wafer according to claim 1, wherein: The lifting mechanism (4) includes a cylinder (401), a suspension rod (402), a slide rod (403) and a suspension block (404), wherein the cylinder (401) is arranged at a position where the carrier (3) is located directly above the belt conveyor (2), the suspension rod (402) is connected to the output end of the cylinder (401), the slide rod (403) is symmetrically arranged on the carrier (3), one end of the suspension block (404) is connected to the suspension rod (402) and the slide rod (403), and the other end of the suspension block (404) is connected to the dynamic distance adjustment mechanism (5).

3. The device for detecting the surface reflectivity of a crystalline silicon solar cell wafer according to claim 2, wherein: The housing assembly (501) comprises an outer shell (5011), a back plate (5012), a first pitch-changing plate (5013), a second pitch-changing plate (5014), a pitch-changing slot (5015) and a tooth groove (5016); the back plate (5012) is connected to the bottom end of the suspension block (404); the outer shell (5011) is mounted on the back plate (5012); the drive assembly (502) is connected to one end inside the outer shell (5011); the first pitch-changing plate (5013) is connected to the other end inside the back plate (5012); the second pitch-changing plate (5014) is connected to the bottom end of the back plate (5012); the pitch-changing slot (5015) is provided on the first pitch-changing plate (5013) and the second pitch-changing plate (5014); and the tooth groove (5016) is provided on the second pitch-changing plate (5014).

4. The device for detecting the surface reflectivity of a crystalline silicon solar cell wafer according to claim 3, wherein: The driving component (502) comprises a mounting block (5021), a servo motor (5022), a belt (5023) and a movable screw rod (5024); the mounting block (5021) is connected to one end of the housing (5011) away from the first pitch-changing plate (5013); the servo motor (5022) is provided at one end of the mounting block (5021); the movable screw rod (5024) is rotatably connected to the other end of the mounting block (5021); one end of the belt (5023) is connected to the output end of the servo motor (5022); the other end of the belt (5023) is connected to the movable screw rod (5024); and the dynamic component (503) is connected to the movable screw rod (5024).

5. The device for detecting the surface reflectivity of a crystalline silicon solar cell wafer according to claim 4, wherein: The dynamic component (503) includes a moving block (5031), a slide rail A (5032), a slide rail B (5033) and a sliding block (5034), wherein the moving block (5031) is movably connected to the moving screw rod (5024), the slide rail A (5032) is connected to the moving block (5031), the slide rail B (5033) is slidably connected to the slide rail A (5032), and the sliding block (5034) is slidably connected to the slide rail B (5033), the slide rail A (5032) is arranged vertically, and the slide rail B (5033) is arranged horizontally. A limiting rod (5035) is provided on the sliding block (5034) at a position close to the first pitch-changing plate (5013), and the limiting rod (5035) is slidably connected to the pitch-changing slot (5015). A mounting column (5036) is also connected to the bottom end of the sliding block (5034), and the flexible light-shielding mechanism (6) is connected to the mounting column (5036).

6. The device for detecting the surface reflectivity of a crystalline silicon solar cell wafer according to claim 5, characterized in that: The flexible clamping assembly (601) includes a mounting main rod (6011), a rotating block (6012), a driving shaft (6013), a gear (6014), a rotating shaft (6015) and a rubber suction cup (6016), wherein the mounting main rod (6011) is connected to the mounting column (5036), the rotating block (6012) is rotatably connected to the bottom end of the mounting main rod (6011), one end of the driving shaft (6013) is movably inserted into the second pitch-changing plate (5014), and the other end of the driving shaft (6013) passes through the mounting main rod (6011) and is fixed to the second pitch-changing plate (5014). ) is connected to the rotating block (6012), the gear (6014) is provided at one end of the driving shaft (6013) close to the second pitch change plate (5014), the gear (6014) is engaged with the tooth groove (5016), the rotating shaft (6015) is rotatably connected to one end of the rotating block (6012) away from the driving shaft (6013), the rubber suction cup (6016) is connected to one end of the rotating shaft (6015) away from the rotating block (6012), and the air plug assembly (603) is provided on the rubber suction cup (6016).

7. The device for detecting the surface reflectivity of a crystalline silicon solar cell wafer according to claim 6, characterized in that: The light-shielding adjustment component (602) includes a gear ring groove (6021), a rack plate (6022) and a bevel gear A (6023), wherein the gear ring groove (6021) is provided on the rotating shaft (6015), the rack plate (6022) is provided on the mounting main rod (6011), the gear ring groove (6021) is adapted to the rack plate (6022), and the bevel gear A (6023) is provided on one end of the rotating block (6012) close to the driving shaft (6013).

8. The device for detecting the surface reflectivity of a crystalline silicon solar cell wafer according to claim 7, characterized in that: An air plug hole (6017) is provided on the rubber suction cup (6016), and the air plug assembly (603) is arranged on the air plug hole (6017); The air plug assembly (603) includes an air plug cylinder (6031), an internal thread (6032), an air plug column (6033), an air hole groove (6034), an external thread (6035), a bevel gear B (6036) and a stopper (6037). The air plug cylinder (6031) is arranged on the air plug hole (6017). The internal thread (6032) is opened inside the air plug cylinder (6031). The air plug column (6033) is inserted into the air plug cylinder ( 6031), the air hole grooves (6034) are arranged in a circular shape at equal intervals on one end of the outer wall of the air plug column (6033), the external thread (6035) is arranged on the other end of the outer wall of the air plug column (6033), the bevel gear B (6036) is arranged on one side of the air plug column (6033), the stopper (6037) is arranged on the other side of the air plug column (6033), and the bevel gear B (6036) is adapted to the bevel gear A (6023).

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