Multi-face common reference high-precision measuring device for hexahedron and application method thereof

Abstract

The present invention discloses a multi-faceted common reference high-precision measurement device for a hexahedron and its application method. The device includes a test interferometer, a monitoring interferometer, a first adjustment platform, and a second adjustment platform. The test interferometer is equipped with a first standard plane lens, the monitoring interferometer is equipped with a second standard plane lens, and the first adjustment platform is provided with a standard plane reflection lens. The test interferometer, the monitoring interferometer, and the first adjustment platform are arranged around the second adjustment platform. The optical axes of the second standard plane lens and the standard plane reflection lens are parallel and perpendicular to the optical axis of the first standard plane lens. The optical axis of the first standard plane lens and the optical axes of two adjacent measured surfaces of the hexahedron are at an angle of 45 degrees. The present invention aims to avoid the error accumulation and disturbance problems caused by frequent reference conversions on the hexahedron, and to achieve high-precision and full-surface measurement of the perpendicularity and parallelism errors between multiple surfaces, thereby improving the accuracy and measurement efficiency of hexahedron measurements.

Description

Technical Field

[0001] The present invention relates to the field of optical measurement technology, and in particular to a multi-faceted common reference high-precision measurement device for a hexahedron and an application method thereof. Background Art

[0002] In modern industrial manufacturing, the geometric accuracy requirements for mechanical parts are becoming increasingly stringent, especially in the field of high-precision hexahedron machining. While traditional measurement technologies, such as autocollimators, can assess the geometric properties of hexahedrons to a certain extent, their inherent limitations are becoming a key constraint on the development of the manufacturing industry. As a classic optical measurement tool, autocollimators are primarily used to measure geometric parameters such as flatness and straightness. However, they have certain limitations when measuring the parallelism, perpendicularity, and flatness of high-precision hexahedrons. First, autocollimators are susceptible to external environmental factors such as temperature fluctuations and vibration during the measurement process, which can lead to unstable measurement results. Second, error accumulation is particularly prominent in the joint measurement of multiple parameters, seriously affecting the final accuracy. Furthermore, autocollimators are complex to operate and have low measurement efficiency, which cannot meet the high production efficiency requirements of modern manufacturing. To address these issues, a new measurement device is urgently needed to overcome the limitations of traditional measurement technologies and provide more accurate measurement results. This new measurement device should possess high precision and high efficiency to meet the stringent requirements of high-precision hexahedron machining. Summary of the Invention

[0003] Technical problem to be solved by the present invention: In response to the above-mentioned problems of the prior art, a multi-faceted common reference high-precision measurement device for a hexahedron and an application method thereof are provided. The present invention aims to avoid the error accumulation and disturbance problems caused by frequent reference conversion of the hexahedron, and to achieve high-precision and full-surface measurement of the perpendicularity and parallelism errors between multiple faces, so as to improve the accuracy and measurement efficiency of the hexahedron measurement.

[0004] In order to solve the above technical problems, the technical solution adopted by the present invention is:

[0005] A multi-faceted common reference high-precision measurement device for a hexahedron comprises a test interferometer, a monitoring interferometer, a first adjustment platform, and a second adjustment platform for mounting the hexahedron to be measured. The test interferometer is provided with a first standard plane lens, the monitoring interferometer is provided with a second standard plane lens, and the first adjustment platform is provided with a standard plane reflection lens. The test interferometer, the monitoring interferometer, and the first adjustment platform are respectively arranged around the second adjustment platform. The optical axes of the second standard plane lens and the standard plane reflection lens are parallel and perpendicular to the optical axis of the first standard plane lens. The angle between the optical axis of the first standard plane lens and the optical axes of two measured surfaces of an adjacent measured surface group of the hexahedron is 45 degrees. A portion of a collimated light beam emitted by the test interferometer is reflected by the first standard plane lens to form a reference beam, and another portion is transmitted through the first standard plane lens to form a test beam. The collimated light beam is reflected by the two measured surfaces of the adjacent measured surface group of the hexahedron, the second standard plane lens, and the standard plane reflection lens, and then returns along the original path to the test interferometer to interfere with the reference beam to obtain an interference pattern between the test beam and the reference beam.

[0006] Optionally, the first standard plane lens, the second standard plane lens and the standard plane reflective lens are arranged adjacent to the hexahedron and a gap between them and the hexahedron is greater than or equal to a preset safety distance.

[0007] Optionally, the safety distance is 10 mm.

[0008] Optionally, the first adjustment platform is a three-dimensional adjustment platform.

[0009] Optionally, the second adjustment platform is a three-dimensional adjustment platform with a turntable, and the turntable is provided with a fixture for mounting the hexahedron.

[0010] Optionally, the test interferometer is further connected to a computing terminal, and the computing terminal is used to obtain an interference pattern between the test beam and the reference beam from the test interferometer and calculate a measurement result.

[0011] The present invention also provides an application method of the aforementioned multi-faceted common reference high-precision measurement device for a hexahedron, comprising:

[0012] S101, installing the hexahedron to be measured on the second adjustment table;

[0013] S102, starting a test interferometer so that a portion of a collimated light beam emitted by the test interferometer is reflected by a first standard plane lens to form a reference beam, and another portion is transmitted through the first standard plane lens to form a test beam, and then enters a second standard plane lens and a standard plane reflection lens respectively through adjacent test face groups of the hexahedron;

[0014] S103, for each pair of adjacent measured surface groups among the four side surfaces of the hexahedron, measured surface #1 to measured surface #4: adjust the first adjustment stage until the optical axes of the second standard plane lens and the standard plane reflection lens are parallel so that the interference pattern obtained by the monitoring interferometer is zero fringes; adjust the second adjustment stage so that the interference pattern in the test interferometer is close to zero fringes in both the horizontal and vertical directions to meet the multi-surface common reference measurement standard. At this time, the test beam emitted by the test interferometer is reflected by the two measured surfaces of the pair of adjacent measured surface groups of the hexahedron, the second standard plane lens, and the standard plane reflection lens, and then returns to the test interferometer along the original path to interfere with the reference beam to obtain an interference pattern between the test beam and the reference beam.

[0015] Optionally, adjusting the second adjustment stage in step S103 so that the interference pattern in the test interferometer is close to zero fringes in both the horizontal and vertical directions includes: first switching the test interferometer to an alignment mode, and adjusting the three-axis angle of the hexahedron through the second adjustment stage so that the light spots of the two measured surfaces of the pair of adjacent measured surface groups of the hexahedron coincide with the centers of the crosshairs of the test interferometer; then switching the test interferometer to a measurement mode, and fine-tuning the angle of the hexahedron around the Z-axis through the second adjustment stage so that the interference patterns corresponding to the two measured surfaces are close to zero fringes in the horizontal direction, and fine-tuning the angle of the hexahedron around the Y-axis through the second adjustment stage so that the interference patterns corresponding to the two measured surfaces are close to zero fringes in the vertical direction.

[0016] Optionally, after obtaining the interference pattern between the test beam and the reference beam in step S103, the method further includes: obtaining the X-tilt value t of the test surface #i in the pair of adjacent test surface groups from the interference pattern between the test beam and the reference beam of the test interferometer. i and the X-tilt value t of the measured surface #j j , obtain the X-tilt value t0 of the second standard plane lens from the interference pattern of the monitoring interferometer, according to p ij =( t i - t j - t 0) / 2Calculate the perpendicularity p between the measured surface #i and the measured surface #j ij .

[0017] Optionally, after step S103, the following steps are further performed: p 13 = p 12 + p 23 Calculate the parallelism of the measured surfaces #1 and #3 of the hexahedron p 13 ,according to p 14 = p 12 +p 23 + p 34 Calculate the perpendicularity of the measured surfaces #1 and #4 of the hexahedron p 14 and according to e = p 14 + p 41 Calculating the form closure error of a hexahedron e ,in, p 12 is the perpendicularity between the measured surface #1 and the measured surface #3, p 23 is the perpendicularity between the measured surface #2 and the measured surface #3, p 34 is the perpendicularity between the measured surface #3 and the measured surface #4, p 41 It is the perpendicularity between the measured surface #4 and the measured surface #1.

[0018] Compared with the prior art, the present invention mainly has the following advantages:

[0019] 1. The multi-faceted common reference high-precision measurement device for a hexahedron of the present invention comprises a test interferometer, a monitoring interferometer, a first adjustment platform, and a second adjustment platform for mounting the hexahedron to be measured. The test interferometer is provided with a first standard plane lens, the monitoring interferometer is provided with a second standard plane lens, the first adjustment platform is provided with a standard plane reflection lens, the test interferometer, the monitoring interferometer, and the first adjustment platform are respectively arranged around the second adjustment platform, the optical axes of the second standard plane lens and the standard plane reflection lens are parallel and perpendicular to the optical axis of the first standard plane lens, and the optical axis of the first standard plane lens is parallel to the optical axis of the hexahedron. The included angle of the optical axes of the two measured surfaces of the adjacent measured surface group of the hexahedron is 45°, so that the first standard plane lens, the second standard plane lens, and the standard plane reflection lens form a T-shaped interferometer cavity. The parallelism of the second standard plane lens and the standard plane reflection lens of the monitoring interferometer is monitored in real time by the monitoring interferometer, ensuring that the two working surfaces of the hexahedron are measured in a common reference manner. Therefore, for the hexahedron as the detection object, the error accumulation and disturbance problems caused by frequent reference conversion can be avoided, and high-precision and full-surface measurement of the verticality and parallelism errors between multiple surfaces can be achieved, thereby improving the accuracy and measurement efficiency of the hexahedron measurement.

[0020] 2. In the multi-faceted common reference high-precision measurement device for a hexahedron of the present invention, the optical axes of the second standard plane lens and the standard plane reflective lens are parallel and perpendicular to the optical axis of the first standard plane lens. The monitoring interferometer monitors the parallelism of the standard plane reflective lens with the first adjustment stage in real time, so that the parallelism error is taken into account in the perpendicularity calculation process of the test interferometer to improve the measurement accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 Schematic diagram of the structure of the device in an embodiment of the present invention.

[0022] Figure 2 Schematic diagram of the numbering of the measured surfaces of the hexahedron in an embodiment of the present invention.

[0023] Figure 3 These are the measurement data of measured surface #1 and measured surface #2 in the embodiment of the present invention.

[0024] Figure 4 This is the measurement data of the second standard plane lens acquired by the monitoring interferometer in the embodiment of the present invention.

[0025] Legend: 1. Test interferometer; 11. First standard plane lens; 2. Monitoring interferometer; 21. Second standard plane lens; 3. First adjustment stage; 31. Standard plane reflection lens; 4. Second adjustment stage; 5. Hexahedron. DETAILED DESCRIPTION

[0026] like Figure 1As shown, the multi-faceted common reference high-precision measurement device for a hexahedron in this embodiment includes a test interferometer 1, a monitoring interferometer 2, a first adjustment platform 3, and a second adjustment platform 4 for mounting the hexahedron 5 to be measured. The test interferometer 1 is provided with a first standard plane lens 11, the monitoring interferometer 2 is provided with a second standard plane lens 21, and the first adjustment platform 3 is provided with a standard plane reflection lens 31. The test interferometer 1, the monitoring interferometer 2, and the first adjustment platform 3 are respectively arranged around the second adjustment platform 4. The optical axes of the second standard plane lens 21 and the standard plane reflection lens 31 are parallel to and aligned with the first standard plane lens 11. The optical axes of the lenses 11 are perpendicular to each other, and the angle between the optical axis of the first standard plane lens 11 and the optical axes of the two measured surfaces of the adjacent measured surface group of the hexahedron 5 is 45 degrees. A portion of the collimated light beam emitted by the test interferometer 1 is reflected by the first standard plane lens 11 to form a reference beam, and another portion is transmitted through the first standard plane lens 11 to form a test beam. After being reflected by the two measured surfaces of the adjacent measured surface group of the hexahedron 5, the second standard plane lens 21, and the standard plane reflection lens 31, it returns to the test interferometer 1 along the original path to interfere with the reference beam to obtain an interference pattern between the test beam and the reference beam. In this embodiment, the first standard plane lens 11, the second standard plane lens 21, and the standard plane reflection lens 31 are arranged adjacent to the hexahedron 5 and the gap between them and the hexahedron 5 is greater than or equal to a preset safety distance. The arrangement of the first standard plane lens 11, the second standard plane lens 21, and the standard plane reflection lens 31 adjacent to the hexahedron 5 means that the first standard plane lens 11, the second standard plane lens 21, and the standard plane reflection lens 31 are as close as possible to the hexahedron 5 and maintain a safe distance. The safety distance may be determined based on experience. For example, as an optional implementation, the safety distance in this embodiment is 10 mm.

[0027] In this embodiment, the monitoring interferometer 2

[0028] In this embodiment, the first adjustment platform 3 is a three-dimensional adjustment platform, which is a known posture adjustment structure with XYZ three-axis adjustment function. This embodiment only involves the application of this known structure, so its implementation details are not described in detail here.

[0029] In this embodiment, the second adjustment platform 4 is a three-dimensional adjustment platform with a turntable. A fixture for mounting the hexahedron 5 is provided on the turntable, so that the hexahedron 5 can be easily rotated to achieve in-situ measurement of multiple measured surfaces.

[0030] like Figure 2 As shown, in this embodiment, the hexahedron 5 includes six faces #1 to #6, of which #1 to #4 are measured faces located on the same circumference, and the cross-section along this circumference is square. The faces #5 and #6 at the two ends can be squares as needed to form a cube or rectangular parallelepiped structure, or other curved or inclined surfaces.

[0031] As an optional implementation, in this embodiment, the test interferometer 1 is further connected to a computing terminal, which is used to obtain the interference pattern between the test beam and the reference beam from the test interferometer 1 and calculate the measurement result.

[0032] This embodiment further provides an application method of the aforementioned multi-faceted common reference high-precision measurement device for a hexahedron, comprising:

[0033] S101, mounting the hexahedron 5 to be measured on the second adjustment platform 4;

[0034] S102, starting the test interferometer 1, so that part of the collimated light beam emitted by the test interferometer 1 is reflected by the first standard plane lens 11 to form a reference beam, and the other part is transmitted through the first standard plane lens 11 to form a test beam, and then enters the second standard plane lens 21 and the standard plane reflection lens 31 respectively through adjacent test surface groups of the hexahedron 5;

[0035] S103, for each pair of adjacent measured surface groups among the four side surfaces of the hexahedron 5, the first adjustment stage 3 is adjusted until the optical axes of the second standard plane lens 21 and the standard plane reflection lens 31 are parallel so that the interference pattern obtained by the monitoring interferometer 2 is zero fringes; the second adjustment stage 4 is adjusted so that the interference pattern in the test interferometer 1 is close to zero fringes in both the horizontal and vertical directions to meet the multi-surface common reference measurement standard. At this time, the test beam emitted by the test interferometer 1 is reflected by the two measured surfaces of the pair of adjacent measured surface groups of the hexahedron 5, the second standard plane lens 21, and the standard plane reflection lens 31, and then returns to the test interferometer 1 along the original path to interfere with the reference beam to obtain an interference pattern between the test beam and the reference beam.

[0036] In step S103, adjusting the second adjustment stage 4 so that the interference pattern in the test interferometer 1 approaches zero fringes in both the horizontal and vertical directions includes: first, switching the test interferometer 1 to the alignment mode, adjusting the three-axis angle of the hexahedron 5 via the second adjustment stage 4 so that the light spots on the two test surfaces of the pair of adjacent test surfaces of the hexahedron 5 coincide with the centers of the crosshairs of the test interferometer 1; then, switching the test interferometer 1 to the measurement mode, fine-tuning the angle of the hexahedron 5 around the Z axis via the second adjustment stage 4 so that the interference patterns corresponding to the two test surfaces approach zero fringes in the horizontal direction, and fine-tuning the angle of the hexahedron 5 around the Y axis via the second adjustment stage 4 so that the interference patterns corresponding to the two test surfaces approach zero fringes in the vertical direction. In this embodiment, in this state, clicking the Measure button on the test interferometer 1 performs a measurement and saves the data as 1-2.dat; then clicking the Measure button on the monitoring interferometer 2 performs a measurement and saves the data as 1-2P.dat. Then use MetroPro software to view the data file 1-2.dat, apply the mask function to extract the measurement data area corresponding to the measured surface #1 and the measured surface #2, and view their Tilt X (X-tilt) values, which are recorded as t 1 and t 2 (unit: arc seconds). Use MetroPro software to view the data file 1-2P.dat and check its Tilt X value, which is recorded as t 0 (unit: arc seconds).

[0037] After obtaining the interference pattern between the test beam and the reference beam in step S103, the following step further includes: obtaining the X-tilt value t of the test surface #i in the pair of adjacent test surface groups from the interference pattern between the test beam and the reference beam of the test interferometer 1 i and the X-tilt value t of the measured surface #j j , obtain the X-tilt value t0 of the second standard plane lens 21 from the interference pattern of the monitoring interferometer 2, according to p ij =( t i - t j - t 0) / 2Calculate the perpendicularity p between the measured surface #i and the measured surface #j ij .For example Figure 3 is the measurement data of the measured surface #1 and the measured surface #2 in the embodiment of the present invention, Figure 4 This is the measurement data of the second standard plane lens acquired by the monitoring interferometer in the embodiment of the present invention.

[0038] "Tilt X" is the X-tilt value. Figure 3From (a) in the figure, we can see that the X-tilt value t1 of the measured surface #1 is 2.15 sec (arc seconds); according to Figure 3 From (b) in the figure, we can see that the X-tilt value t2 of the measured surface #2 is -3.21 sec (arc seconds). Figure 4 It can be seen that the X-tilt value t0 of the second standard plane lens 21 obtained from the interference pattern of the monitoring interferometer 2 is 0.31 sec (arc seconds). p 12 =(t 1 -t 2 -t 0 ) / 2 can calculate the verticality p between the measured surface #1 and the measured surface #2 12 , the results are shown in Figure 1.

[0039] Table 1: Measurement data and perpendicularity of measured surface #1 and measured surface #2

[0040]

[0041] Adjust the hexahedron 5 to rotate 90° counterclockwise around the Y axis, and repeat the measurement operation in step S103 to obtain the verticality of each pair of adjacent measured surface groups: measured surfaces #2 and #3, measured surfaces #3 and #4, and measured surfaces #4 and #1. p 23 、 p 34 、 p 41 , and the results are shown in Figure 2.

[0042] Table 2: Verticality of other pairs of adjacent measured surfaces

[0043]

[0044] As an optional implementation manner, this embodiment further includes, after step S103, the following steps:

[0045] p 13 = p 12 + p 23

[0046] Calculate the parallelism of measured surface #1 and measured surface #3 of hexahedron 5 p 13 、

[0047] according to:

[0048] p 14 = p 12 + p23 + p 34

[0049] Calculate the perpendicularity of measured surface #1 and measured surface #4 of hexahedron 5 p 14 And according to:

[0050] e = p 14 + p 41

[0051] Calculate the form closure error of hexahedron 5 e ,in, p 12 is the perpendicularity between the measured surface #1 and the measured surface #3, p 23 is the perpendicularity between the measured surface #2 and the measured surface #3, p 34 is the perpendicularity between the measured surface #3 and the measured surface #4, p 41 It is the perpendicularity between the measured surface #4 and the measured surface #1.

[0052] For example, in this embodiment, the parallelism of the measured surface #1 and the measured surface #3 p 13 for:

[0053] p 13 =p 12 +p 23 =1.5 (arcsecond)

[0054] Perpendicularity of measured surface #1 and measured surface #4 of hexahedron 5 p 14 for:

[0055] p 15 = p 12 + p 23 + p 34 =-0.95 (unit: arc seconds),

[0056] Form closure error of hexahedron 5 e for:

[0057] e = p 14 + p 41=0.01 (unit: arc second).

[0058] In summary, the multi-faceted co-reference, high-precision measurement device for a hexahedron in this embodiment includes a test interferometer, a monitoring interferometer, a standard plane lens, an adjustment platform, and a hexahedron. During the measurement of the perpendicularity, parallelism, and surface shape of the hexahedron, the test interferometer standard plane lens, the monitoring interferometer standard plane lens, and the standard plane reflective lens form a T-shaped interferometer cavity. The parallelism of the monitoring interferometer standard plane lens and the standard plane reflective lens is monitored in real time by the monitoring interferometer, ensuring that the two working surfaces of the hexahedron are measured in a co-reference manner. The application method of the multi-faceted co-reference, high-precision measurement device for a hexahedron in this embodiment includes placing the hexahedron on a three-axis angle adjustment platform, bringing the hexahedron and the interferometer standard plane lens as close as possible while maintaining an appropriate safety distance (>10 mm). The two-dimensional inclination angle of the standard plane reflective lens is then adjusted so that the monitoring interferometer obtains a zero-fringe interference pattern. Finally, the three-axis angle of the hexahedron is adjusted so that the interference pattern in the test interferometer approaches zero fringe in both the horizontal and vertical directions. The above steps are repeated continuously to obtain the perpendicularity, parallelism, and surface shape errors between each surface. The multi-faceted common reference high-precision measurement device for a hexahedron and its application method in this embodiment can avoid the error accumulation and disturbance problems caused by frequent reference conversion, and achieve high-precision and full-surface measurement of verticality and parallelism errors between multiple faces.

[0059] The above description is merely a preferred embodiment of the present invention. The scope of protection of the present invention is not limited to the above embodiment. All technical solutions based on the concept of the present invention are within the scope of protection of the present invention. It should be noted that for those skilled in the art, various improvements and modifications that do not depart from the principles of the present invention should also be considered within the scope of protection of the present invention.

Claims

1. A multi-faceted common reference high-precision measuring device for a hexahedron, characterized in that: The invention comprises a test interferometer (1), a monitoring interferometer (2), a first adjustment platform (3) and a second adjustment platform (4) for mounting a hexahedron (5) to be measured, wherein the test interferometer (1) is provided with a first standard plane lens (11), the monitoring interferometer (2) is provided with a second standard plane lens (21), the first adjustment platform (3) is provided with a standard plane reflection lens (31), the test interferometer (1), the monitoring interferometer (2) and the first adjustment platform (3) are respectively arranged around the second adjustment platform (4), and the optical axes of the second standard plane lens (21) and the standard plane reflection lens (31) are parallel to and aligned with the optical axes of the first standard plane lens The optical axes of the first standard plane lens (11) are perpendicular to each other, and the angle between the optical axis of the first standard plane lens (11) and the optical axes of the two measured surfaces of the adjacent measured surface group of the hexahedron (5) is 45 degrees. A part of the collimated light beam emitted by the test interferometer (1) is reflected by the first standard plane lens (11) to form a reference beam, and the other part is transmitted through the first standard plane lens (11) to form a test beam, which is reflected by the two measured surfaces of the adjacent measured surface group of the hexahedron (5), the second standard plane lens (21) and the standard plane reflection lens (31) respectively, and then returns to the test interferometer (1) along the original path to interfere with the reference beam to obtain an interference pattern between the test beam and the reference beam.

2. The multi-faceted common reference high-precision measuring device for a hexahedron according to claim 1, characterized in that: The first standard plane lens (11), the second standard plane lens (21), and the standard plane reflection lens (31) are arranged adjacent to the hexahedron (5), and the gap between them and the hexahedron (5) is greater than or equal to a preset safety distance.

3. The multi-faceted common reference high-precision measuring device for a hexahedron according to claim 2, characterized in that: The safety distance is 10 mm.

4. The multi-faceted common reference high-precision measuring device for a hexahedron according to claim 1, characterized in that: The first adjustment platform (3) is a three-dimensional adjustment platform.

5. The multi-faceted common reference high-precision measuring device for a hexahedron according to claim 1, characterized in that: The second adjustment platform (4) is a three-dimensional adjustment platform with a turntable, and a fixture for mounting the hexahedron (5) is provided on the turntable.

6. The multi-faceted common reference high-precision measuring device for a hexahedron according to claim 1, characterized in that: The test interferometer (1) is also connected to a computing terminal, and the computing terminal is used to obtain an interference pattern between the test beam and the reference beam from the test interferometer (1) and calculate a measurement result.

7. An application method of the multi-faceted common reference high-precision measurement device for a hexahedron according to any one of claims 1 to 6, characterized in that: include: S101, installing the hexahedron (5) to be measured on the second adjustment platform (4); S102, starting the test interferometer (1), so that a portion of the collimated light beam emitted by the test interferometer (1) is reflected by the first standard plane lens (11) to form a reference beam, and the other portion is transmitted through the first standard plane lens (11) to form a test beam, and respectively enters the second standard plane lens (21) and the standard plane reflection lens (31) through the adjacent test surface groups of the hexahedron (5); S103, for each pair of adjacent measured surface groups among the four side surfaces #1 to #4 of the hexahedron (5): adjust the first adjustment stage (3) until the optical axes of the second standard plane lens (21) and the standard plane reflection lens (31) are parallel so that the interference pattern obtained by the monitoring interferometer (2) is zero fringe; adjust the second adjustment stage (4) so ​​that the interference pattern in the test interferometer (1) is close to zero fringe in both the horizontal and vertical directions to meet the multi-faceted common reference measurement standard, at this time, the test beam emitted by the test interferometer (1) is respectively reflected by the two measured surfaces of the pair of adjacent measured surface groups of the hexahedron (5), the second standard plane lens (21) and the standard plane reflection lens (31), and then returns to the test interferometer (1) along the original path to interfere with the reference beam to obtain the interference pattern between the test beam and the reference beam.

8. The application method of the multi-faceted common reference high-precision measuring device for a hexahedron according to claim 7, characterized in that: Adjusting the second adjustment stage (4) in step S103 so that the interference pattern in the test interferometer (1) approaches zero fringes in both the horizontal and vertical directions includes: first switching the test interferometer (1) to an alignment mode, adjusting the three-axis angle of the hexahedron (5) by the second adjustment stage (4) so ​​that the light spots of the two measured surfaces of the pair of adjacent measured surface groups of the hexahedron (5) coincide with the centers of the crosshairs of the test interferometer (1); then switching the test interferometer (1) to a measurement mode, fine-tuning the angle of the hexahedron (5) around the Z axis by the second adjustment stage (4) so ​​that the interference patterns corresponding to the two measured surfaces approach zero fringes in the horizontal direction, and fine-tuning the angle of the hexahedron (5) around the Y axis by the second adjustment stage (4) so ​​that the interference patterns corresponding to the two measured surfaces approach zero fringes in the vertical direction.

9. The application method of the multi-faceted common reference high-precision measurement device for a hexahedron according to claim 8, characterized in that: After obtaining the interference pattern between the test beam and the reference beam in step S103, the following steps are further included: obtaining the X-tilt value t of the test surface #i in the pair of adjacent test surface groups from the interference pattern between the test beam and the reference beam of the test interferometer (1) i and the X-tilt value t of the measured surface #j j , obtain the X-tilt value t0 of the second standard plane lens (21) from the interference pattern of the monitoring interferometer (2), according to p ij =( t i - t j - t 0) / 2Calculate the perpendicularity p between the measured surface #i and the measured surface #j ij .

10. The application method of the multi-faceted common reference high-precision measurement device for a hexahedron according to claim 9, characterized in that: Step S103 is followed by p 13 = p 12 + p 23 Calculate the parallelism of the measured surface #1 and the measured surface #3 of the hexahedron (5) p 13 ,according to p 14 = p 12 + p 23 + p 34 Calculate the perpendicularity of the measured surface #1 and the measured surface #4 of the hexahedron (5) p 14 and according to e = p 14 + p 41 Calculate the form closure error of the hexahedron (5) e ,in, p 12 is the perpendicularity between the measured surface #1 and the measured surface #3, p 23 is the perpendicularity between the measured surface #2 and the measured surface #3, p 34 is the perpendicularity between the measured surface #3 and the measured surface #4, p 41 It is the perpendicularity between the measured surface #4 and the measured surface #1.

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