Automatic feeding device and dicing machine

By introducing a calibration mechanism into the automatic loading device to position and calibrate the tension ring, the problem of position deviation of the tension ring in the traditional automatic loading device is solved, and the processing quality and production efficiency of the scriber are improved.

CN118753771BActive Publication Date: 2025-02-14SHENYANG HEYAN TECH CO LTD
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Patent Information

Application Number
CN202411244290.4
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2024-09-06
Publication Date
2025-02-14
Estimated Expiration
2044-09-06

AI Technical Summary

Technical Problem

Traditional automatic feeding devices can easily lead to deviation of the tension ring position when handling the tension ring, affecting the processing quality of the scriber.

Method used

An automatic feeding device is designed, and the conveying mechanism places the tension ring on the first clamp and the second clamp of the calibration mechanism, and position the tension ring close to the first clamp through the second clamp to ensure the accuracy of the tension ring position. sex.

Benefits of technology

Through positioning calibration, the problem of possible deviation in the position of the tension ring is solved, and the processing quality and production efficiency of the scriber are improved.

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Abstract

The present application relates to the technical field of feeding equipment, and in particular to an automatic feeding device and a dicing machine, the automatic feeding device comprises: a material box lifting mechanism, a calibration mechanism, a conveying mechanism and a workbench mechanism, the material box lifting mechanism, the calibration mechanism, the conveying mechanism and the workbench mechanism are respectively arranged on the operating table; the material box lifting mechanism comprises: a lifting frame, a back plate, a lifting assembly and a material box placement platform; the calibration mechanism comprises: a fixed plate, a first clamping plate, a second clamping plate and a clamping assembly, the first clamping plate and the second clamping plate are arranged parallel to each other on both sides of the fixed plate; the first clamping plate is fixedly connected to the fixed plate, and the second clamping plate is slidably connected to the fixed plate through the clamping assembly. After the conveying mechanism takes the tension ring out of the material box lifting mechanism, it is first placed on the first clamping plate and the second clamping plate of the calibration mechanism, the first clamping plate is fixed, and the tension ring is positioned and calibrated by the second clamping plate approaching the first clamping plate, which solves the technical problem that the position of the tension ring may deviate.
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Description

Technical Field

[0001] The present application relates to the technical field of feeding equipment, and in particular to an automatic feeding device and a dicing machine. Background Art

[0002] The dicing machine is a high-precision industrial processing equipment, which is widely used in the production and manufacturing process of semiconductor wafers. It is mainly used for dicing and cutting of wafers, ceramics, glass and other materials. With the continuous improvement of automation requirements, the demand for automatic loading of dicing machines has also increased significantly. The use of automatic loading devices can significantly improve production efficiency, reduce labor costs, and ensure the stability of product quality.

[0003] The dicing machine, also known as a precision grinding wheel cutting machine, is a precision CNC equipment that integrates water-gas-electric, air-static high-speed spindle, precision mechanical transmission, sensors and automatic control technologies. It is mainly used for dicing and cutting materials such as silicon integrated circuits, light-emitting diodes, lithium niobate, piezoelectric ceramics, gallium arsenide, sapphire, aluminum oxide, iron oxide, quartz, glass, ceramics, solar cells, etc. The working principle of the dicing machine is mainly to use a high-speed rotating grinding wheel to cut the material. The motor drives the grinding wheel to rotate at high speed, places the material on the loading plate, and accurately guides the grinding wheel to move through the guide rail so that it contacts the material to achieve cutting.

[0004] A tension ring, also known as a wafer bonding ring or a tension ring, is a tool used to fix and tighten the blue film of special materials. In semiconductor processing, especially in the wafer cutting process, in order to protect the photolithography circuit on the front of the wafer from damage, it is usually necessary to attach a layer of blue film to the front of the wafer. Since the blue film itself has no strength, it needs to be tightened with the help of a tension ring to ensure that the wafer can remain flat during the processing, which is conducive to the placement of the device.

[0005] With the continuous improvement of automation requirements, the demand for automatic loading of dicing machines has also increased significantly, so that dicing machines can significantly improve production efficiency, reduce labor costs, and ensure stable product quality. The traditional automatic loading device is that the conveying mechanism takes out the tension ring from the material box, and then the conveying mechanism directly places the tension ring on the suction cup. However, since the position of the tension ring may deviate during the process of the conveying mechanism taking out the tension ring from the material box, there will be deviation when the tension ring is placed on the suction cup, which affects the quality of dicing. Summary of the invention

[0006] The present application aims to at least solve one of the technical problems in the prior art or related art that, during the process of the conveying mechanism taking out the tension ring from the material box, the position of the tension ring may deviate, resulting in deviation when the tension ring is placed on the suction cup, thus affecting the quality of dicing.

[0007] To this end, the present application provides an automatic loading device and a dicing machine. After the conveying mechanism takes the tension ring out of the material box lifting mechanism, it is first placed on the first clamping plate and the second clamping plate of the calibration mechanism. The first clamping plate is fixed, and the tension ring is positioned and calibrated by moving the second clamping plate closer to the first clamping plate, thereby solving the technical problem that the position of the tension ring may deviate.

[0008] According to an embodiment of the first aspect of the present application, an automatic feeding device is provided, comprising: a material box lifting mechanism, a calibration mechanism, a conveying mechanism and a workbench mechanism, the material box lifting mechanism is arranged on one side of the operating table, the calibration mechanism, the conveying mechanism and the workbench mechanism are respectively arranged on the operating table, and the material box lifting mechanism, the calibration mechanism, the conveying mechanism and the workbench mechanism are arranged in sequence along a straight line; the conveying mechanism is used to take the tension ring out of the material box lifting mechanism, put it into the calibration mechanism for positioning and calibration, and then put it into the workbench mechanism; the material box lifting mechanism comprises: a lifting frame, a back plate, a lifting assembly and a material box placement platform, the back plate is vertically arranged on the lifting frame; the lifting assembly is arranged on the back plate; the material box placement platform is arranged on the lifting assembly; the lifting assembly is used to drive the material box placement platform to rise or fall; the calibration mechanism comprises: a fixed plate, a first clamping plate, a second clamping plate and a clamping assembly, the first clamping plate and the second clamping plate are arranged parallel to each other on both sides of the fixed plate; the first clamping plate is fixedly connected to the fixed plate, and the second clamping plate is slidably connected to the fixed plate through the clamping assembly; the clamping assembly is used to drive the second clamping plate away from or close to the first clamping plate.

[0009] Optionally, the lifting assembly includes: a first slide rail, a slide plate, a lead screw and a servo motor, the first slide rail is arranged on the back plate; the slide plate is arranged on the first slide rail; the lead screw is threadedly connected to the slide plate; and the output end of the servo motor is connected to the lead screw.

[0010] Optionally, the material box lifting mechanism also includes: a first edge sensor and a second edge sensor, the first edge sensor is arranged on the top of the back plate, and the first edge sensor is located at the edge away from the calibration mechanism; the second edge sensor is arranged on the operating table, and the second edge sensor is located at the edge close to the second clamping plate; the first edge sensor is used to detect whether there is an object at the edge of the material box lifting mechanism away from the calibration mechanism; the second edge sensor is used to detect whether there is an object at the edge of the material box lifting mechanism close to the second clamping plate.

[0011] Optionally, the material box lifting mechanism also includes: an infrared transmitter and an infrared receiver, which are respectively arranged at the edge of the operating table close to the material box lifting mechanism, and the infrared transmitter and the infrared receiver are respectively located on both sides of the material box; the infrared transmitter and the infrared receiver are used to detect whether there is an object near the calibration mechanism near the material box.

[0012] Optionally, the clamping assembly includes: a second slide rail, a linear cylinder and a limit block, the second slide rail is arranged on a fixed plate, and the second clamping plate is arranged on the second slide rail; the output end of the linear cylinder is connected to the second clamping plate, and the linear cylinder is used to drive the second clamping plate to move on the second slide rail; the limit block is arranged on the fixed plate, and the limit block is used to limit the moving stroke of the second clamping plate on the second slide rail.

[0013] Optionally, a plurality of workpiece sensors are provided on the first clamping plate, and the workpiece sensors are used to detect whether the flat edges of the tension ring are aligned.

[0014] Optionally, a plurality of material sweeping sensors are provided on the fixed plate, and the material sweeping sensors are used to detect whether there are tension rings on the first clamping plate and the second clamping plate.

[0015] Optionally, a plurality of eccentric wheels are provided on the second clamping plate, and the eccentric wheels are used to adjust the position of the flat edge of the tension ring.

[0016] Optionally, the workbench mechanism includes: a suction cup and a clamping assembly, the suction cup is arranged on the operating table, and the clamping assembly is arranged around the suction cup; the clamping assembly includes: a pressure plate, a rotary cylinder and a mounting frame, the mounting frame is arranged around the suction cup, the rotary cylinder is arranged on the mounting frame, and the pressure plate is arranged at the output end of the rotary cylinder.

[0017] A dicing machine provided in an embodiment of the second aspect of the present application is provided with the automatic loading device mentioned above. Since the automatic loading device has the above-mentioned technical effects, the dicing machine provided with the automatic loading device should also have corresponding technical effects.

[0018] One of the above technical solutions has at least the following advantages or beneficial effects:

[0019] For an automatic loading device and a dicing machine provided in the embodiments of the present application, the automatic loading device, after the conveying mechanism takes the tension ring out of the material box lifting mechanism, first places it on the first clamping plate and the second clamping plate of the calibration mechanism, the first clamping plate is fixed, and the tension ring is positioned and calibrated by moving the second clamping plate closer to the first clamping plate, which solves the technical problem that the position of the tension ring may deviate. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solution of the present application, the drawings required for use in the embodiments are briefly introduced below. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0021] Figure 1 A schematic structural diagram of an automatic feeding device provided in an embodiment of the present application is shown;

[0022] Figure 2A front view of an automatic feeding device provided in an embodiment of the present application is shown;

[0023] Figure 3 A schematic diagram of the structure of a material box lifting mechanism in an automatic feeding device provided in an embodiment of the present application is shown;

[0024] Figure 4 A schematic diagram of the structure of a calibration mechanism in an automatic feeding device provided in an embodiment of the present application is shown;

[0025] Figure 5 A schematic diagram of the structure of a workbench mechanism in an automatic feeding device provided in an embodiment of the present application is shown;

[0026] Figure 6 A schematic structural diagram of a clamping assembly in an automatic feeding device provided in an embodiment of the present application is shown;

[0027] Figure 7 A schematic diagram showing the structure of a first edge sensor and a second edge sensor in an automatic feeding device provided in an embodiment of the present application is shown;

[0028] Figure 8 A schematic structural diagram of an infrared transmitter and an infrared receiver in an automatic feeding device provided in an embodiment of the present application is shown.

[0029] Description of reference numerals:

[0030] 1. Material box lifting mechanism, 11. Lifting frame, 12. Back plate, 13. Lifting assembly, 131. First slide rail, 132. Slide plate, 133. Screw rod, 134. Servo motor, 14. Material box placement platform, 141. Connecting plate, 15. Cover plate, 16. First edge sensor, 17. Second edge sensor, 18. Infrared transmitter, 19. Infrared receiver, 2. Calibration mechanism, 21. Fixed plate, 22. First clamping plate, 23. Second clamping plate, 24. Clamping assembly, 241. Second slide rail, 242. Linear cylinder, 243. Limit block, 25. Workpiece sensor, 26. Sweeping sensor, 27. Eccentric wheel, 3. Transport mechanism, 4. Workbench mechanism, 41. Suction cup, 42. Clamping assembly, 421. Pressing plate, 422. Rotary cylinder, 423. Mounting frame, 5. Material box, 6. Operating table. DETAILED DESCRIPTION

[0031] In order to better explain the present application and facilitate understanding, the present application is described in detail below in conjunction with the accompanying drawings through specific implementation methods. The directional terms such as "upper", "lower", "left", "right", "front" and "back" mentioned in this document are used in the following manner. Figure 1 ,and Figure 4The position of the transport mechanism 3 relative to the calibration mechanism 2 is defined as "up"; the position of the first clamping plate 22 relative to the second clamping plate 23 is defined as "left"; the position of the calibration mechanism 2 relative to the magazine lifting mechanism 1 is defined as "front".

[0032] The following describes an automatic loading device according to some embodiments provided by the present application with reference to the accompanying drawings.

[0033] See also Figures 1 to 8 An automatic feeding device provided in an embodiment of the first aspect of the present application includes: a material box lifting mechanism 1, a calibration mechanism 2, a conveying mechanism 3 and a workbench mechanism 4, the material box lifting mechanism 1 is arranged on one side of an operating table 6, the calibration mechanism 2, the conveying mechanism 3 and the workbench mechanism 4 are respectively arranged on the operating table 6, the material box lifting mechanism 1, the calibration mechanism 2, the conveying mechanism 3 and the workbench mechanism 4 are arranged in sequence along a straight line; the conveying mechanism 3 is used to take the tension ring out of the material box lifting mechanism 1, put it into the calibration mechanism 2 for positioning and calibration, and then put it into the workbench mechanism 4.

[0034] There are multiple grids in the material box 5, each grid is placed with a tension ring, and the material box 5 is placed on the material box lifting mechanism 1. When processing starts, the material box lifting mechanism 1 needs to be lowered so that the first grid of the material box 5 is aligned with the conveying mechanism 3. When the conveying mechanism 3 takes out the tension ring from the first grid of the material box 5 and completes the processing, the material box lifting mechanism 1 needs to rise to the height of one grid so that the second grid of the material box 5 is aligned with the conveying mechanism 3, and then the above process is repeated until the tension rings of all grids in the material box 5 are processed.

[0035] The material box lifting mechanism 1 includes: a lifting frame 11, a back plate 12, a lifting component 13 and a material box placement platform 14, the back plate 12 is vertically arranged on the lifting frame 11; the lifting component 13 is arranged on the back plate 12; the material box placement platform 14 is arranged on the lifting component 13; the lifting component 13 is used to drive the material box placement platform 14 to rise or fall.

[0036] The material box 5 is placed on the material box placement platform 14. When the lifting component 13 drives the material box placement platform 14 to rise, the material box 5 also rises; when the lifting component 13 drives the material box placement platform 14 to descend, the material box 5 also descends.

[0037] In an illustrative embodiment, Figure 3 As shown, the lifting assembly 13 includes: a first slide rail 131, a slide plate 132, a screw rod 133 and a servo motor 134, the first slide rail 131 is arranged on the back plate 12; the slide plate 132 is arranged on the first slide rail 131; the screw rod 133 is threadedly connected to the slide plate 132; the output end of the servo motor 134 is connected to the screw rod 133.

[0038] The back plate 12 is a platform for providing support, and is usually made of a solid material, such as a metal plate or a plastic plate, to ensure its stability and load-bearing capacity. The first slide rail 131 provides necessary support and guidance for the slide 132, ensuring that the slide 132 can stably move along a predetermined track, that is, the slide 132 can move up and down along the first slide rail 131. The stability and guidance provided by the first slide rail 131 help prevent the slide 132 from deflecting or shaking during the sliding process. The screw rod 133 is a transmission element that converts rotary motion into linear motion, which can achieve high-precision linear motion, and is relatively simple to maintain and has a long service life. The servo motor 134 is a motor that can accurately control position, speed and acceleration, and can accurately control the position and speed of the rotor according to the control signal to achieve high-precision motion control. The servo motor 134 drives the screw rod 133 to rotate through its precise control ability, and then converts the rotary motion into the linear motion of the slide 132, so that the slide 132 can be accurately controlled to rise or fall. The material box placement platform 14 is horizontally arranged and is fixedly connected to the slide 132 via a connecting plate 141 . The rise or fall of the slide 132 drives the material box placement platform 14 to rise or fall.

[0039] Furthermore, a cover plate 15 is provided on the top of the back plate 12, and the cover plate 15 is used to protect the lifting assembly 13 and prevent pollutants such as dust and oil from directly contacting the components or equipment below.

[0040] Furthermore, a positioning block is provided on the material box placement platform 14 , and the positioning block is used to locate the placement position of the material box 5 , which can improve the accuracy of the placement of the material box 5 .

[0041] In an illustrative embodiment, Figure 2 and Figure 7 As shown, the material box lifting mechanism 1 also includes: a first edge sensor 16 and a second edge sensor 17, the first edge sensor 16 is arranged on the top of the back plate 12, and the first edge sensor 16 is located at the edge position away from the calibration mechanism 2; the second edge sensor 17 is arranged on the operating table 6, and the second edge sensor 17 is located at the edge position close to the second clamping plate 23; the first edge sensor 16 is used to detect whether there is an object at the edge of the material box lifting mechanism 1 away from the calibration mechanism 2; the second edge sensor 17 is used to detect whether there is an object at the edge of the material box lifting mechanism 1 close to the second clamping plate 23.

[0042] The detection directions of the first edge sensor 16 and the second edge sensor 17 are as follows: Figure 7The edge positions indicated by the two arrows, i.e., the edge position of the material box lifting mechanism 1 away from the calibration mechanism 2 and the edge position close to the second clamping plate 23, are the two positions that operators easily pass by when the device is working, causing human error or personal injury. The first edge sensor 16 and the second edge sensor 17 can detect whether there is anyone passing by these two edge positions when the device is working. If there is someone, the device can be stopped to prevent human error or personal injury.

[0043] The first edge sensor 16 and the second edge sensor 17 can be infrared distance measuring sensors, which are sensors that use infrared technology for non-contact distance measurement, and calculate the distance between the target object and the sensor by measuring the time required for the infrared signal to be transmitted and received. The infrared distance measuring sensor does not need to be in direct contact with the object being measured during the measurement process, thus avoiding friction and wear caused by contact; by accurately measuring the round-trip time or intensity of the infrared signal, it can achieve high-precision distance measurement; it can adapt to different types of target objects, and can accurately measure whether the target object is bright, dark, reflective or absorptive; it has strong anti-environmental interference ability, and can eliminate the influence of external light sources, smoke and dust on the measurement results.

[0044] In an illustrative embodiment, Figure 8 As shown, the material box lifting mechanism 1 also includes: an infrared transmitter 18 and an infrared receiver 19, which are respectively arranged at the edge of the operating table 6 close to the material box lifting mechanism 1, and the infrared transmitter 18 and the infrared receiver 19 are respectively located on both sides of the material box 5; the infrared transmitter 18 and the infrared receiver 19 are used to detect whether there is an object near the calibration mechanism 2 when the material box 5 is close to the calibration mechanism 2.

[0045] The infrared transmitter 18 is located above the material box 5, and the infrared receiver 19 is located below the material box 5. The infrared transmitter 18 transmits infrared rays, which are received by the infrared receiver 19. With this design, when the tension ring in the material box 5 leaves the material box 5 due to unexpected factors, the infrared rays between the infrared transmitter 18 and the infrared receiver 19 will be blocked, and the existence of the tension ring can be detected, and the material box lifting mechanism 1 can be controlled to stop rising or falling to prevent the tension ring from being damaged by collision. It is understandable that the positions of the infrared transmitter 18 and the infrared receiver 19 can be swapped, and the same technical effect can be achieved.

[0046] The calibration mechanism 2 includes: a fixed plate 21, a first clamping plate 22, a second clamping plate 23 and a clamping assembly 24. The first clamping plate 22 and the second clamping plate 23 are arranged in parallel on both sides of the fixed plate 21; the first clamping plate 22 is fixedly connected to the fixed plate 21, and the second clamping plate 23 is slidably connected to the fixed plate 21 through the clamping assembly 24; the clamping assembly 24 is used to drive the second clamping plate 23 away from or close to the first clamping plate 22.

[0047] The first clamping plate 22 and the second clamping plate 23 are arranged in parallel. When the tension ring is placed on the first clamping plate 22 and the second clamping plate 23, the flat edges on both sides of the tension ring will correspond to the first clamping plate 22 and the second clamping plate 23. The first clamping plate 22 is fixed and the clamping assembly 24 drives the second clamping plate 23 to approach the first clamping plate 22, so that the tension ring is pushed to a fixed position next to the first clamping plate 22. At the same time, the clamping of the first clamping plate 22 and the second clamping plate 23 will calibrate the flat edges on both sides of the tension ring, thereby solving the technical problem that the position of the tension ring may deviate.

[0048] In an illustrative embodiment, Figure 4 As shown, the clamping assembly 24 includes: a second slide rail 241, a linear cylinder 242 and a limit block 243. The second slide rail 241 is arranged on the fixed plate 21, and the second clamping plate 23 is arranged on the second slide rail 241; the output end of the linear cylinder 242 is connected to the second clamping plate 23, and the linear cylinder 242 is used to drive the second clamping plate 23 to move on the second slide rail 241; the limit block 243 is arranged on the fixed plate 21, and the limit block 243 is used to limit the moving stroke of the second clamping plate 23 on the second slide rail 241.

[0049] The travel direction of the second slide rail 241 is perpendicular to the straight line where the second clamping plate 23 is located. This arrangement allows the second clamping plate 23 to only move closer to or farther from the first clamping plate 22 when moving on the second slide rail 241, without displacement in the front-to-back direction. The linear cylinder 242 is a common pneumatic actuator, and its working principle is based on the hydraulic or air pressure principle, which converts pneumatic energy into mechanical energy to achieve linear motion. The output end of the linear cylinder 242 can drive the second clamping plate 23 to move on the second slide rail 241. The limit block 243 prevents the linear cylinder 242 from moving for a long time, which will produce a certain distance deviation. It is necessary to limit the cylinder movement stroke, and at the same time, the workpiece positioning can be more accurate.

[0050] In an exemplary embodiment, a plurality of workpiece sensors 25 are provided on the first clamping plate 22, and the workpiece sensors 25 are used to detect whether the flat edge of the tension ring is aligned. For example, two workpiece sensors 25 are provided to sense the position of the flat edge of the tension ring to detect whether the tension ring is placed correctly.

[0051] In an illustrative embodiment, a plurality of material scanning sensors 26 are provided on the fixed plate 21, and the material scanning sensors 26 are used to detect whether there are tension rings on the first clamping plate 22 and the second clamping plate 23. For example, two material scanning sensors 26 are provided to scan the edge of the tension ring, and the conveying mechanism 3 will not convey the material until both of the material scanning sensors 26 have detected the edge of the tension ring.

[0052] In an exemplary embodiment, a plurality of eccentric wheels 27 are provided on the second clamping plate 23, and the eccentric wheels 27 are used to adjust the position of the flat edge of the tension ring. For example, two eccentric wheels 27 are provided to facilitate installation and debugging, and prevent equipment alarm or material pulling problems caused by inaccurate positioning of the flat edge of the tension ring.

[0053] In an illustrative embodiment, Figure 5 and Figure 6 As shown, the workbench mechanism 4 includes: a suction cup 41 and a clamping assembly 42, the suction cup 41 is arranged on the operating table 6, and the clamping assembly 42 is arranged around the suction cup 41; the clamping assembly 42 includes: a pressing plate 421, a rotary cylinder 422 and a mounting frame 423, the mounting frame 423 is arranged around the suction cup 41, the rotary cylinder 422 is arranged on the mounting frame 423, and the pressing plate 421 is arranged at the output end of the rotary cylinder 422.

[0054] The clamping assembly 42 is used to clamp the edge of the tension ring. When the transport mechanism 3 places the tension ring on the suction cup 41, the pressure plate 421 is driven by the rotary cylinder 422 to flip upward to clamp the edge of the tension ring to prevent the tension ring from moving during the dicing process; when the dicing is completed, the pressure plate 421 is driven by the rotary cylinder 422 to flip downward to loosen the edge of the tension ring, making it easier for the transport mechanism 3 to transport the tension ring.

[0055] Based on the automatic loading device provided in the above embodiment, the second aspect of the present application also provides a dicing machine, including the automatic loading device of the above embodiment. Since the dicing machine provided in this embodiment has the automatic loading device provided in any of the above embodiments, the dicing machine has all the beneficial effects of the automatic loading device provided in any of the above embodiments, which will not be repeated here.

[0056] In the description of the present application, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the feature. In the description of the present application, "plurality" means two or more, unless otherwise clearly and specifically defined.

[0057] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0058] In the present application, unless otherwise clearly specified and limited, when a first feature is “on” or “below” a second feature, it may be that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, when a first feature is “above”, “above” or “above” a second feature, it may be that the first feature is directly above or obliquely above the second feature, or it may simply mean that the first feature is higher in level than the second feature. When a first feature is “below”, “below” or “below” a second feature, it may be that the first feature is directly below or obliquely below the second feature, or it may simply mean that the first feature is lower in level than the second feature.

[0059] In the description of this specification, the description of the terms "one embodiment", "some embodiments", "embodiment", "exemplary embodiment", "example", "specific example" or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, unless they are contradictory.

[0060] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Ordinary technicians in the field can change, modify, replace and modify the above embodiments within the scope of the present application.

Claims

1. An automatic feeding device, characterized in that: include: A material box lifting mechanism (1), a calibration mechanism (2), a conveying mechanism (3) and a workbench mechanism (4), wherein the material box lifting mechanism (1) is arranged on one side of an operating table (6), the calibration mechanism (2), the conveying mechanism (3) and the workbench mechanism (4) are respectively arranged on the operating table (6), and the material box lifting mechanism (1), the calibration mechanism (2), the conveying mechanism (3) and the workbench mechanism (4) are arranged in sequence along a straight line; the conveying mechanism (3) is used to take the tension ring out of the material box lifting mechanism (1), put it into the calibration mechanism (2) for positioning and calibration, and then put it into the workbench mechanism (4); The material box lifting mechanism (1) comprises: a lifting frame (11), a back plate (12), a lifting component (13) and a material box placement platform (14); the back plate (12) is vertically arranged on the lifting frame (11); the lifting component (13) is arranged on the back plate (12); the material box placement platform (14) is arranged on the lifting component (13); the lifting component (13) is used to drive the material box placement platform (14) to rise or fall; The calibration mechanism (2) comprises: a fixed plate (21), a first clamping plate (22), a second clamping plate (23) and a clamping assembly (24); the first clamping plate (22) and the second clamping plate (23) are arranged in parallel on both sides of the fixed plate (21); the first clamping plate (22) is fixedly connected to the fixed plate (21), and the second clamping plate (23) is slidably connected to the fixed plate (21) via the clamping assembly (24); the clamping assembly (24) is used to drive the second clamping plate (23) to move away from or closer to the first clamping plate (22); The clamping assembly (24) comprises: a second slide rail (241), a linear cylinder (242) and a limit block (243); the second slide rail (241) is arranged on the fixing plate (21); and the second clamping plate (23) is arranged on the second slide rail (241); The output end of the linear cylinder (242) is connected to the second clamping plate (23), and the linear cylinder (242) is used to drive the second clamping plate (23) to move on the second slide rail (241); The limit block (243) is arranged on the fixed plate (21), and the limit block (243) is used to limit the travel of the second clamping plate (23) on the second slide rail (241); The second clamping plate (23) is provided with a plurality of eccentric wheels (27), and the eccentric wheels (27) are used to adjust the position of the flat edge of the tension ring.

2. An automatic feeding device as claimed in claim 1, characterized in that: The lifting assembly (13) comprises: a first slide rail (131), a slide plate (132), a screw rod (133) and a servo motor (134); the first slide rail (131) is arranged on the back plate (12); The slide plate (132) is arranged on the first slide rail (131); The screw rod (133) is threadedly connected to the slide plate (132); The output end of the servo motor (134) is connected to the lead screw (133).

3. An automatic feeding device as claimed in claim 1, characterized in that: The material box lifting mechanism (1) further comprises: a first edge sensor (16) and a second edge sensor (17), wherein the first edge sensor (16) is arranged on the top of the back plate (12), and the first edge sensor (16) is located at an edge position away from the calibration mechanism (2); the second edge sensor (17) is arranged on the operating table (6), and the second edge sensor (17) is located at an edge position close to the second clamping plate (23); The first edge sensor (16) is used to detect whether there is an object on the edge of the material box lifting mechanism (1) away from the calibration mechanism (2); the second edge sensor (17) is used to detect whether there is an object on the edge of the material box lifting mechanism (1) close to the second clamping plate (23).

4. An automatic feeding device as claimed in claim 1, characterized in that: The material box lifting mechanism (1) further comprises: an infrared transmitter (18) and an infrared receiver (19), wherein the infrared transmitter (18) and the infrared receiver (19) are respectively arranged at an edge position of the operating table (6) close to one side of the material box lifting mechanism (1), and the infrared transmitter (18) and the infrared receiver (19) are respectively located on two sides of the material box (5); The infrared transmitter (18) and the infrared receiver (19) are used to detect whether there is an object near the material box (5) near the calibration mechanism (2).

5. The automatic feeding device according to claim 1, characterized in that: A plurality of workpiece sensors (25) are provided on the first clamping plate (22), and the workpiece sensors (25) are used to detect whether the flat edges of the tension ring are aligned.

6. An automatic feeding device as claimed in claim 1, characterized in that: A plurality of material sweeping sensors (26) are provided on the fixed plate (21), and the material sweeping sensors (26) are used to detect whether there are tension rings on the first clamping plate (22) and the second clamping plate (23).

7. An automatic feeding device as claimed in claim 1, characterized in that: The workbench mechanism (4) comprises: a suction cup (41) and a pressing assembly (42), wherein the suction cup (41) is arranged on the operating table (6), and the pressing assembly (42) is arranged around the suction cup (41); The pressing assembly (42) comprises: a pressing plate (421), a rotary cylinder (422) and a mounting frame (423); the mounting frame (423) is arranged around the suction cup (41); the rotary cylinder (422) is arranged on the mounting frame (423); and the pressing plate (421) is arranged at the output end of the rotary cylinder (422).

8. A dicing machine, characterized in that: include: An automatic feeding device as described in any one of claims 1 to 7.

Citation Information

Patent Citations

  • Wafer cutting machine and cutting method

    CN114918562A