Multi-channel power supply board and semiconductor test system

Abstract

The present application relates to the field of chip testing, and in particular to a multi-channel power supply board and a semiconductor testing system, wherein the multi-channel power supply board includes a main power supply channel and a plurality of slave power supply channels connected in parallel; wherein the main power supply channel includes a first loop control unit, a first output unit and a detection unit, and the first loop control unit and the first output unit are connected to the device under test in sequence. Based on the mode configuration instruction, the first loop control unit generates a corresponding first control signal according to the power supply reference signal and the first power supply signal detected by the detection unit; the main power supply channel adjusts the first power supply signal based on the first control signal and outputs a second power supply signal to the device under test; each slave power supply channel outputs a third power supply signal to the device under test based on the first control signal. In the present application, each slave power supply channel can follow the main power supply channel to ensure that the output deviation between each power supply channel is small, and avoid backflow of current between each power supply channel.

Description

Technical Field

[0001] The present application relates to the field of chip testing, and in particular to a multi-channel power supply board and a semiconductor testing system. Background Art

[0002] Power boards that use digital control loops usually have voltage output FV, voltage measurement MV, current output FI, current measurement MI functions and their combinations. In some high-current application scenarios, the output current of a single power supply channel cannot meet actual needs. Connecting multiple power supply channels in parallel to improve the overall current output capacity is a very practical technology.

[0003] In practical applications of existing solutions, the actual output current of each power supply channel in parallel mode has a large deviation. When the deviation reaches a certain limit, it may cause the power supply channels to flow back and forth. Summary of the invention

[0004] Based on this, it is necessary to provide a multi-channel power supply board and a semiconductor testing system to address the above technical problems.

[0005] In a first aspect, an embodiment of the present application provides a multi-channel power supply card connected to a device under test, including a main power supply channel and a plurality of slave power supply channels connected in parallel; wherein:

[0006] The main power supply channel includes a first loop control unit, a first output unit and a detection unit. The first loop control unit and the first output unit are connected to the device under test in sequence. One end of the detection unit is connected to the device under test, and the other end is connected to the first loop control unit to form a feedback loop. The first loop control unit is connected to a plurality of slave power supply channels.

[0007] Based on the mode configuration instruction, the first loop control unit generates a corresponding first control signal according to the power reference signal and the first power signal detected by the detection unit, and sends it to each of the slave power channels; the master power channel adjusts the first power signal based on the first control signal and outputs a second power signal to the device under test; each of the slave power channels outputs a third power signal to the device under test based on the first control signal.

[0008] In some embodiments, the detection unit includes a first voltage detection unit. When the mode configuration instruction is a constant voltage source mode configuration instruction, the first voltage detection unit is connected to the first loop control unit to form a feedback loop; when the mode configuration instruction is a constant voltage source mode configuration instruction, the first power supply signal, the second power supply signal, and the third power supply signal are all voltage signals.

[0009] In some embodiments, the detection unit includes a first current detection unit. When the mode configuration instruction is a constant current source mode configuration instruction, the first current detection unit is connected to the first loop control unit to form a feedback loop; when the mode configuration instruction is a constant current source mode configuration instruction, the first power supply signal, the second power supply signal, and the third power supply signal are all current signals.

[0010] In some embodiments, the first loop control unit generates a first control signal based on the difference between the power reference signal and the first power signal, and the first control signal controls the first output unit to output a second power signal, and feedback adjustment is performed in sequence to control the difference between the second power signal received by the first loop control unit and the power reference signal to be 0.

[0011] In some embodiments, the detection unit includes a first current detection unit and a first voltage detection unit, the first current detection unit is connected to each of the slave power channels, after the second power signal is stably output, the first loop control unit stops sending the first control signal to each of the slave power channels, controls the first current detection unit to detect the first current signal output by the main power channel, sends it to each of the slave power channels, and obtains a stable current value after feedback output from the slave power channels.

[0012] In some embodiments, when the mode configuration instruction is a constant voltage source mode configuration instruction, the first voltage detection unit is used to connect with the device under test and the first loop control unit to form a feedback loop, and one end of the first current detection unit is connected to the device under test, and the other end is connected to each of the slave power supply channels;

[0013] When the mode configuration instruction is a constant current source mode configuration instruction, the first voltage detection unit does not work, the first end of the first current detection unit is connected to the device under test, the second end of the first current detection unit is connected to the first loop control unit to form a feedback loop, and the third end of the first current detection unit is connected to each of the slave power supply channels.

[0014] In some embodiments, each of the slave power supply channels includes a second loop control unit, a second output unit, and a second current detection unit, the second loop control unit and the second output unit are connected to the device under test in sequence, and the second current detection unit is connected to the device under test and the second loop control unit to form a feedback loop;

[0015] The first current detection unit is connected to the second loop control unit of each slave power channel respectively, and the first loop control unit is connected to the second output unit of each slave power channel respectively.

[0016] In some embodiments, the second loop control unit of each slave power channel generates a first current control signal based on the first current signal and the second current signal detected by the second current detection unit, outputs a third current signal after adjusting the second current signal, and performs feedback adjustment in a cycle in sequence to make the third current signal equal to the first current signal.

[0017] In some embodiments, when the second power signal reaches a set threshold, the second power signal reaches a stable output, or when the vibration amplitude of the second power signal is less than an amplitude threshold, the second power signal reaches a stable output.

[0018] In some embodiments, the master power channel and each of the slave power channels receive a same clock signal, and synchronously output power signals to the device under test based on the same clock signal.

[0019] In a second aspect, an embodiment of the present application proposes a semiconductor testing system, including a host computer and a test head communicatively connected to the host computer, wherein the test head includes the multi-channel power supply board as described in the first aspect.

[0020] Compared with the prior art, in the present application, based on the mode configuration instruction, the first loop control unit generates a corresponding first control signal according to the power reference signal and the first power signal detected by the detection unit, and sends it to each slave power channel. The master power channel adjusts the first power signal based on the first control signal and outputs a second power signal to the device under test. Each slave power channel outputs a third power signal to the device under test based on the first control signal. Each slave power channel can follow the master power channel to ensure that the output deviation between the power channels is small and avoid the possibility of backflow of current between the power channels. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a schematic diagram of the structure of a multi-channel power board in an embodiment of the present application;

[0022] Figure 2 This is a connection diagram of a multi-channel power supply card in an embodiment of the present application when it is in a constant voltage source mode;

[0023] Figure 3 This is a connection diagram of a multi-channel power board in an embodiment of the present application when it is in constant current source mode. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical solution and advantages of the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0025] Obviously, the drawings described below are only some examples or embodiments of the present application. For ordinary technicians in this field, the present application can also be applied to other similar scenarios based on these drawings without creative work. In addition, it can also be understood that although the efforts made in this development process may be complicated and lengthy, for ordinary technicians in this field related to the content disclosed in this application, some changes in design, manufacturing or production based on the technical content disclosed in this application are just conventional technical means, and should not be understood as insufficient content disclosed in this application.

[0026] Reference to "embodiments" in this application means that the specific features, structures, or characteristics described in conjunction with the embodiments may be included in multiple embodiments of the application. The appearance of the phrase in various places in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those of ordinary skill in the art that the embodiments described in this application can be combined with other embodiments without conflict.

[0027] Unless otherwise defined, the technical terms or scientific terms involved in this application should be understood by people with ordinary skills in the technical field to which this application belongs. The words "one", "a", "a", "the" and the like involved in this application do not indicate a quantitative limitation, and may represent the singular or plural. The terms "include", "comprise", "have" and any of their variations involved in this application are intended to cover non-exclusive inclusions; for example, a process, method, system, product or device that includes a series of steps or modules (units) is not limited to the listed steps or units, but may also include steps or units that are not listed, or may also include other steps or units inherent to these processes, methods, products or devices. The words "connect", "connected", "coupled" and the like involved in this application are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. The "multiple" involved in this application refers to two or more. "And / or" describes the association relationship of associated objects, indicating that there may be three relationships, for example, "A and / or B" can represent: A exists alone, A and B exist at the same time, and B exists alone. The character " / " generally indicates that the objects before and after are in an "or" relationship. The terms "first", "second", "third", etc. involved in this application are only used to distinguish similar objects and do not represent a specific ordering of the objects.

[0028] like Figure 1As shown, an embodiment of the present application proposes a multi-channel power supply card, which is connected to the device under test DUT, including a main power supply channel and a plurality of slave power supply channels connected in parallel. The main power supply channel includes a first loop control unit, a first output unit and a detection unit, the first loop control unit and the first output unit are connected to the device under test in sequence, one end of the detection unit is connected to the device under test, and the other end is connected to the first loop control unit to form a feedback loop; the first loop control unit is connected to a plurality of slave power supply channels.

[0029] Based on the mode configuration instruction, the first loop control unit generates a corresponding first control signal according to the power reference signal and the first power signal detected by the detection unit, and sends it to each slave power channel; the master power channel adjusts the first power signal based on the first control signal and outputs a second power signal to the device under test; each slave power channel outputs a third power signal to the device under test based on the first control signal.

[0030] Specifically, the first loop control unit generates a first control signal based on the difference between the reference signal and the first power supply signal. The first control signal controls the first output unit to output the second power supply signal. Feedback adjustment is performed in sequence to control the difference between the second power supply signal received by the first loop control unit and the power supply reference signal to be 0.

[0031] Each slave power channel does not generate a control signal by itself, but directly generates a third power signal according to the first control signal obtained from the master power channel, and outputs the third power signal to the device under test. Since both the master power channel and the slave power channel generate power signals based on the first control signal, the difference between the power signals outputted by them is small.

[0032] The mode configuration instruction can be a constant voltage source mode configuration instruction or a constant current source mode configuration instruction. The mode configuration instruction can be sent by the host computer to the multi-channel power supply card. When the mode configuration instruction is a constant voltage source mode configuration instruction, the multi-channel power supply card enters the constant voltage source mode; when the mode configuration instruction is a constant current source mode configuration instruction, the multi-channel power supply card enters the constant current source mode.

[0033] Specifically, when the mode configuration instruction is a constant voltage source mode configuration instruction, the first power signal, the second power signal, and the third power signal are all voltage signals. At this time, the main power channel realizes the stable output of the voltage signal, and each slave power channel can follow the voltage signal of the main power channel, ensuring that the output voltage signal deviation between the power channels is small, avoiding the possibility of backflow of current between the power channels.

[0034] When the mode configuration instruction is a constant current source mode configuration instruction, the first power signal, the second power signal, and the third power signal are all current signals. At this time, the main power channel realizes the stable output of the current signal, and each slave power channel can follow the voltage signal of the main power channel to ensure that the output voltage signal deviation between the power channels is small, avoiding the possibility of backflow of current between the power channels.

[0035] In some embodiments, the master power channel and each slave power channel receive the same clock signal, and synchronously output power signals to the device under test based on the same clock signal, thereby ensuring synchronization of the output signals.

[0036] In the above embodiment, based on the mode configuration instruction, the first loop control unit generates a corresponding first control signal according to the power reference signal and the first power signal detected by the detection unit, and sends it to each slave power channel. The master power channel adjusts the first power signal based on the first control signal and outputs a second power signal to the device under test. Each slave power channel outputs a third power signal to the device under test based on the first control signal. Each slave power channel is connected in parallel with the master power channel, and each slave power channel can follow the master power channel based on the first control signal sent by the master power channel, so as to ensure that the output voltage deviation between each power channel is small and avoid the possibility of backflow of current between each power channel.

[0037] In the above embodiment, the slave power channel can output the power signal synchronously with the master power channel, but due to the difference in their hardware parameters, there will still be slight differences between the output current signals of each power channel. This hardware parameter difference will cause more severe effects as the number of parallel power channels increases.

[0038] In a further embodiment, after the second power signal is stably output, the main power channel stops sending the first control signal to each of the slave power channels, and the control detection unit detects the first current signal output by the main power channel and sends it to each slave power channel, and a stable current value is obtained after feedback output from the slave power channel.

[0039] Specifically, the slave power channel uses the first current signal stably output by the main power channel as a reference signal, and then generates a corresponding first current control signal according to the second current signal at its own output end, and outputs a third current signal after adjusting the second current signal, and performs feedback adjustment in a cycle in sequence to make the third current signal equal to the first current signal, thereby ensuring that the first current signal output by the main power channel is followed in real time and remains consistent, ensuring that each power channel outputs a constant current signal, and realizing high-precision current signal control.

[0040] In some embodiments, when the second power signal reaches a set threshold, the second power signal reaches a stable output.

[0041] Exemplarily, when the multi-channel power supply board is in the constant voltage source mode, assuming that the power supply reference signal Vref is 10V and the threshold is set to 9.8V, when the second power supply signal is in the initial stage of voltage establishment of 0V-9.8V, the main power supply channel outputs a first control signal to the slave power supply channel to achieve rapid control of the output voltage signal, and when the second power supply signal is in the subsequent stage of voltage establishment of 9.8V-10V, the second power supply signal reaches a stable output, stops sending the first control signal to each slave power supply channel, and controls the first current detection unit to detect the first current signal output by the main power supply channel to each slave power supply channel, thereby achieving high-precision control of the output current signal.

[0042] When the multi-channel power supply card is in the constant current source mode, the current signal threshold can also be set according to the same principle, which will not be described in detail here.

[0043] In some embodiments, when the vibration amplitude of the second power signal is less than an amplitude threshold, the second power signal reaches a stable output.

[0044] Exemplarily, when the multi-channel power supply board is in constant voltage source mode, assuming that the voltage amplitude threshold is 200mV, when the second power supply signal is greater than 200mV, the main power supply channel outputs a first control signal to the slave power supply channel to achieve rapid control of the output voltage signal; when the second power supply signal is between 0mV and 200mV, the second power supply signal reaches a stable output, stops sending the first control signal to each slave power supply channel, and controls the first current detection unit to detect the first current signal output by the main power supply channel to each slave power supply channel, thereby achieving high-precision control of the output current signal.

[0045] When the multi-channel power supply card is in the constant current source mode, the current amplitude threshold can also be set according to the same principle, which will not be described in detail here.

[0046] The structures of the power supply channels may be the same, and logically one of the power supply channels may be arbitrarily selected as the main power supply channel, and the remaining channels may be selected as slave power supply channels.

[0047] Specifically, the main power supply channel includes a first loop control unit, a first output unit and a detection unit, and the detection unit includes a first voltage detection unit and a first current detection unit. The first loop control unit and the first output unit are connected to the device under test in sequence. When the mode configuration instruction is a constant voltage source mode configuration instruction, the first voltage detection unit is configured to be connected to the device under test and the first loop control unit to form a feedback loop, and the first current detection unit and the first loop control unit are configured to be connected to each slave power supply channel respectively. Specifically, one end of the first current detection unit is connected to the device under test, and the other end is connected to each slave power supply channel. When the mode configuration instruction is a constant current source mode configuration instruction, the first current detection unit is configured to be connected to the device under test and the first loop control unit to form a feedback loop, and the first current detection unit and the first loop control unit are configured to be connected to each slave power supply channel respectively. At this time, the first voltage detection unit may not work. Specifically, the first voltage detection unit does not work, the first end of the first current detection unit is connected to the device under test, the second end of the first current detection unit is connected to the first loop control unit to form a feedback loop, and the third end of the first current detection unit is connected to each of the slave power supply channels.

[0048] Each slave power supply channel includes a second loop control unit, a second output unit and a second current detection unit. The second loop control unit, the second output unit and the device under test are connected in sequence. The second current detection unit is connected to the device under test and the second loop control unit to form a feedback loop. The first current detection unit of the master power supply channel is connected to the second loop control unit of each slave power supply channel. The first loop control unit of the master power supply channel is connected to the second output unit of each slave power supply channel. The second voltage detection unit of the slave power supply channel does not work.

[0049] Of course, those skilled in the art will know that the main power supply channel can also be designed to be different from each slave power supply channel, that is, the main power supply channel includes a first loop control unit, a first output unit and a detection unit, and the detection unit includes a first voltage detection unit and a first current detection unit. The first loop control unit and the first output unit are connected to the device under test in sequence. When the mode configuration instruction is a constant voltage source mode configuration instruction, the first voltage detection unit is configured to be connected to the device under test and the first loop control unit to form a feedback loop, and the first current detection unit and the first loop control unit are configured to be connected to each slave power supply channel respectively. Specifically, one end of the first current detection unit is connected to the device under test, and the other end is connected to each slave power supply channel. When the mode configuration instruction is a constant current source mode configuration instruction, the first current detection unit is configured to be connected to the device under test and the first loop control unit to form a feedback loop, and the first current detection unit and the first loop control unit are configured to be connected to each slave power supply channel respectively. At this time, the first voltage detection unit may not work. Specifically, the first end of the first current detection unit is connected to the device under test, the second end of the first current detection unit is connected to the first loop control unit to form a feedback loop, and the third end of the first current detection unit is connected to each of the slave power supply channels.

[0050] The slave power supply channel includes a second loop control unit, a second output unit and a second current detection unit. The second loop control unit, the second output unit and the device under test are connected in sequence. The second current detection unit is connected to the device under test and the second loop control unit to form a feedback loop. The first current detection unit is connected to the second loop control units of each slave power supply channel, and the first loop control unit is connected to the second output unit.

[0051] Figure 2 This is a connection diagram of a multi-channel power supply card in a constant voltage source mode in an embodiment of the present application.

[0052] The main power supply channel includes a first loop control unit, a first output unit and a detection unit. The detection unit includes a first voltage detection unit and a first current detection unit. The first loop control unit and the first output unit are connected to the device under test in sequence. The first voltage detection unit is connected to the device under test and the first loop control unit to form a feedback loop.

[0053] The first output unit, for example, includes a first digital-to-analog converter DAC1 and a first differential signal amplifier A1 which are connected in sequence.

[0054] The slave power supply channel includes a second loop control unit, a second output unit and a second current detection unit. The second loop control unit and the second output unit are connected to the device under test in sequence. The second current detection unit is connected to the device under test and the second loop control unit to form a feedback loop.

[0055] The second output unit, for example, includes a second digital-to-analog converter DAC2 and a second differential signal amplifier A2 which are connected in sequence.

[0056] The first loop control unit is also connected to the second output unit of each slave power channel for sending a first control signal. The first current detection unit is also connected to the second loop control unit of each slave power channel for sending a first current signal.

[0057] According to the following Figure 2 The signal control process when the multi-channel power supply card is in constant voltage source mode is described in detail.

[0058] Figure 2 The power channel CH1 is used as the main power channel, and the other power channels (CH2...) are used as slave power channels. The first loop control unit outputs the first power signal (voltage signal Vout) to the device under test DUT through the first digital-to-analog converter DAC1 and the first differential signal amplifier A1 based on the power reference signal Vref. The first voltage detection unit detects the first power signal obtained at its output end (two ends of the device under test) and sends it to the first loop control unit as a voltage feedback signal Vfb. The first loop control unit generates a corresponding first control signal according to the difference between the power reference signal Vref and the voltage feedback signal Vfb, and sends it to the second output unit of each slave power channel. The first control signal controls the first digital-to-analog converter DAC1 to output a signal and then outputs a second power signal through the first differential signal amplifier A1. The first voltage detection unit detects the second power signal and inputs it into the first loop control unit to form another feedback adjustment, and the feedback adjustment is circulated in sequence, so as to ensure that the main power channel can achieve constant voltage output according to the power reference signal Vref.

[0059] The second output unit outputs a third power signal to the device under test DUT based on the first control signal, and the slave power channel can follow the main power channel to output a voltage signal, thereby ensuring that the output voltage deviation between the power channels is small and avoiding the possibility of backflow of current between the power channels.

[0060] After the voltage signal is stably output, the first loop control unit stops sending the first control signal to each slave power channel. While the main power channel outputs a stable second power signal to the device under test, the first loop control unit controls the first current detection unit to detect the first current signal output by the main power channel and sends it to the second loop control unit in each slave power channel. The second loop control unit uses the first current signal as the reference signal Iref, and then generates a corresponding first current control signal based on the second current signal detected by the second current detection unit as the feedback signal. The first current control signal controls the second digital-to-analog converter DAC2 to output a third current signal through the second differential signal amplifier A2, and the feedback adjustment is cyclically performed in sequence to make the third current signal equal to the first current signal, so as to ensure that the slave power channel follows the current signal output by the main power channel in real time and maintains consistency, so as to ensure that each power channel outputs a constant current signal with equal current value, thereby realizing high-precision current signal control.

[0061] Figure 3 This is a connection diagram of a multi-channel power board in an embodiment of the present application when it is in constant current source mode.

[0062] The main power supply channel includes a first loop control unit, a first output unit and a first current detection unit. The first loop control unit and the first output unit are connected to the device under test in sequence. The first current detection unit is connected to the device under test and the first loop control unit to form a feedback loop. The first loop control unit is also connected to the second output unit of each slave power supply channel to send a first control signal.

[0063] The slave power channel includes a second loop control unit, a second output unit, and a second current detection unit. The second loop control unit and the second output unit are connected to the device under test in sequence. The second current detection unit is connected to the device under test and the second loop control unit to form a feedback loop. The second loop control unit is also connected to the first current detection unit of the master power channel to generate a corresponding first current control signal based on a stable first current signal and a second current signal obtained by detecting its output end.

[0064] According to the following Figure 3 The signal control process when the multi-channel power supply card is in constant current source mode is described in detail.

[0065] Figure 3The power channel CH1 is used as the main power channel, and the other power channels (CH2...CHn) are used as slave power channels. The first loop control unit outputs the first power signal Iout to the device under test DUT through the first digital-to-analog converter DAC1 and the first differential signal amplifier A1 based on the power reference signal Iref. The first current detection unit detects the first power signal Iout obtained at its output end and sends it to the first loop control unit as the current feedback signal Ifb. The first loop control unit generates a corresponding first control signal according to the difference between the power reference signal Iref and the current feedback signal Ifb, and sends it to the second output unit of each slave power channel. After the first output unit adjusts the first power signal Iout based on the first control signal, that is, the first control signal controls the output signal of the first digital-to-analog converter DAC1 to pass through the first differential signal amplifier A1, the second power signal is output, the first current detection unit detects the second power signal, and inputs it into the first loop control unit, thereby forming another feedback adjustment, and the feedback adjustment is circulated in sequence, so as to ensure that the main power channel can achieve constant current output according to the power reference signal Iref. The second output unit outputs a third power signal to the device under test DUT based on the first control signal, and the slave power channel can follow the main power channel to output a voltage signal based on the first control signal, thereby ensuring that the output voltage deviation between the power channels is small and avoiding the possibility of backflow of current between the power channels. The power reference signal Iref, the first power signal Iout, the second power signal, and the third power signal are all current signals.

[0066] After the current signal is stably output, the first loop control unit stops sending the first control signal to each slave power channel. While the main power channel outputs a stable second power signal to the device under test, the first loop control unit controls the first current detection unit to detect the first current signal output by the main power channel and sends it to the second loop control unit in each slave power channel. The second loop control unit uses the first current signal as a reference signal Iref, and then generates a corresponding first current control signal based on the second current signal at its own output end as a feedback signal. The first current control signal controls the output signal of the second digital-to-analog converter DAC2 to output a third current signal through the second differential signal amplifier A2, and performs feedback adjustment in sequence to make the third current signal equal to the first current signal, so as to ensure that the slave power channel follows the current signal output by the main power channel in real time and maintains consistency, thereby ensuring that each power channel outputs a constant current signal with equal current value, thereby achieving high-precision current signal control.

[0067] An embodiment of the present application provides a semiconductor testing system, including a host computer and a test head communicatively connected to the host computer, wherein the test head includes a multi-channel power supply board as in the above embodiment.

[0068] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0069] The above embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application shall be subject to the attached claims.

Claims

1. A multi-channel power supply card connected to a device under test, characterized in that: It includes a main power supply channel and a plurality of slave power supply channels connected in parallel; wherein, The main power supply channel includes a first loop control unit, a first output unit and a detection unit. The first loop control unit and the first output unit are connected to the device under test in sequence. One end of the detection unit is connected to the device under test, and the other end is connected to the first loop control unit to form a feedback loop. The first loop control unit is connected to a plurality of slave power supply channels. Based on the mode configuration instruction, the first loop control unit generates a corresponding first control signal according to the power reference signal and the first power signal detected by the detection unit, and sends the first control signal to each of the slave power channels; the master power channel adjusts the first power signal based on the first control signal and outputs a second power signal to the device under test; each of the slave power channels outputs a third power signal to the device under test based on the first control signal; The detection unit includes a first current detection unit and a first voltage detection unit. The first current detection unit is connected to each of the slave power channels. After the second power signal is stably output, the first loop control unit stops sending the first control signal to each of the slave power channels, controls the first current detection unit to detect the first current signal output by the main power channel, and sends it to each of the slave power channels. A stable current value is obtained after feedback output from the slave power channels.

2. The multi-channel power board according to claim 1, characterized in that: When the mode configuration instruction is a constant voltage source mode configuration instruction, the first voltage detection unit is connected to the first loop control unit to form a feedback loop; when the mode configuration instruction is a constant voltage source mode configuration instruction, the first power supply signal, the second power supply signal, and the third power supply signal are all voltage signals.

3. The multi-channel power board according to claim 1, characterized in that: When the mode configuration instruction is a constant current source mode configuration instruction, the first current detection unit is connected to the first loop control unit to form a feedback loop; when the mode configuration instruction is a constant current source mode configuration instruction, the first power supply signal, the second power supply signal, and the third power supply signal are all current signals.

4. The multi-channel power board according to claim 1, characterized in that: The first loop control unit generates a first control signal based on the difference between the power reference signal and the first power signal. The first control signal controls the first output unit to output the second power signal, and feedback adjustment is performed in sequence to control the difference between the second power signal received by the first loop control unit and the power reference signal to be 0.

5. The multi-channel power board according to claim 1, characterized in that: When the mode configuration instruction is a constant voltage source mode configuration instruction, the first voltage detection unit is used to connect with the device under test and the first loop control unit to form a feedback loop, and one end of the first current detection unit is connected to the device under test, and the other end is connected to each of the slave power supply channels; When the mode configuration instruction is a constant current source mode configuration instruction, the first voltage detection unit does not work, the first end of the first current detection unit is connected to the device under test, the second end of the first current detection unit is connected to the first loop control unit to form a feedback loop, and the third end of the first current detection unit is connected to each of the slave power supply channels.

6. The multi-channel power board according to claim 1, characterized in that: Each of the slave power supply channels comprises a second loop control unit, a second output unit and a second current detection unit, the second loop control unit and the second output unit are connected to the device under test in sequence, and the second current detection unit is connected to the device under test and the second loop control unit to form a feedback loop; The first current detection unit is connected to the second loop control unit of each slave power channel respectively, and the first loop control unit is connected to the second output unit of each slave power channel respectively.

7. The multi-channel power board according to claim 6, characterized in that: The second loop control unit of each slave power supply channel generates a first current control signal based on the first current signal and the second current signal detected by the second current detection unit, outputs a third current signal after adjusting the second current signal, and performs feedback adjustment in a cycle in sequence to make the third current signal equal to the first current signal.

8. The multi-channel power board according to claim 1, characterized in that: When the second power signal reaches a set threshold, the second power signal reaches a stable output, or when the vibration amplitude of the second power signal is less than an amplitude threshold, the second power signal reaches a stable output.

9. The multi-channel power board according to any one of claims 1 to 8, characterized in that: The master power channel and each slave power channel receive the same clock signal, and synchronously output a power signal to the device under test based on the same clock signal.

10. A semiconductor test system, comprising a host computer and a test head communicatively connected to the host computer, characterized in that: The test head comprises a multi-channel power supply board as claimed in any one of claims 1 to 9.

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