Information management system and method for micro-nano processing experimental platform

Abstract

The present invention discloses an information management system and method for a micro-nano processing experimental platform, which is used to solve the problems of difficult personnel management and poor information display effect in the existing related technologies. The information management system includes an identification and tracking module, an alarm module, an intelligent push module, a data module, a rendering module and at least one terminal device; the identification and tracking module is used to obtain the identity information data of the micro-nano processing laboratory personnel in the monitoring area, and the activity location and operation behavior of the micro-nano processing laboratory personnel on the equipment are tracked in real time; when it is judged that the micro-nano processing laboratory personnel meet the preset violation conditions, the alarm module generates violation alarm information and sends it to the person in charge; the intelligent push module is used to obtain the personnel identity data corresponding to the terminal device, and the relevant virtual display data is automatically matched from the data module; the rendering module is used to superimpose the virtual display data on the real-time relative position of the real-scene image, so as to achieve better personnel management and information display.

Description

Technical Field

[0001] The present invention relates to the field of micro-nano processing technology, and in particular to an information management system for a micro-nano processing experimental platform, an information management method for a micro-nano processing experimental platform, and a terminal device. Background Art

[0002] Micro-nano processing technology is a technology that designs, processes, integrates, tests, optimizes and applies micron and nanometer devices. It is widely used in integrated circuits, flexible electronic devices, micro-electromechanical devices and systems, optoelectronic devices, biochips, 3D hybrid integrated devices and other fields. It is one of the main technologies to measure the level of high-end manufacturing.

[0003] The micro-nano processing experimental platform is a multifunctional public technology support platform that integrates the education, research and development, and industrialization of micro-nano processing technology. With the rapid development of the semiconductor industry, colleges and universities and research institutes have successively established various types of micro-nano processing experimental platforms based on micro-nano processing technology. Equipped with large-scale precision instruments for micron and nanoscale processing, a complete micro-nano processing process chain is formed. The micro-nano processing experimental platforms of colleges and universities and research institutes are not only open to teachers and students on campus, but also to off-campus research institutions and enterprises. In this case, personnel management and equipment operation and maintenance have become more complex and diverse, which has increased the challenges of platform management and rapid training.

[0004] On the one hand, when personnel are trained or communicated on the existing micro-nano processing experimental platform, traditional text, pictures, and videos are generally used as teaching materials. There are disadvantages such as the inability to directly correspond to the actual situation on site, the inability of trainees and communication personnel to quickly understand, the inability to quickly combine the site with the teaching materials, and the time-consuming and labor-intensive updating and improvement of the teaching materials. In addition, the personnel exchanges on the experimental platform are complex, which increases the difficulty of personnel management. On the other hand, the number and types of semiconductor process equipment and supporting factory facilities of the micro-nano processing experimental platform are large. The number and types of information that can be managed by each device are numerous. Due to the complexity and high professionalism of the information, staff are required to work in combination with the actual situation on site and the background data information. At the same time, since the life cycle status of the equipment is difficult to be checked and mastered, and there is a problem of separation between the background and the real-time information of the equipment, and insufficient basis for maintenance judgment, the information display effect is not good. Summary of the invention

[0005] The present invention provides an information management system for a micro-nano processing experimental platform, an information management method for a micro-nano processing experimental platform and a terminal device, which are used to solve or partially solve the problems of difficult personnel management and poor information display effect in the existing experimental platform management.

[0006] The present invention provides an information management system for a micro-nano processing experimental platform, the information management system comprises an identification and tracking module, an alarm module, an intelligent push module, a data module, a rendering module and at least one terminal device; wherein,

[0007] The identification and tracking module is used to obtain the identity information data of the micro-nano processing laboratory personnel in the monitoring area, and track the activity locations and equipment operation behaviors of the micro-nano processing laboratory personnel in real time;

[0008] The alarm module is used to generate violation alarm information and send it to the person in charge when the activity location is determined based on the identity information data and / or the operation behavior on the device meets the preset violation condition;

[0009] An intelligent push module, used to obtain the personnel identity data corresponding to the terminal device, and automatically match the virtual display data related to the personnel identity data from the data module;

[0010] The rendering module is used to superimpose the virtual display data on the real-time relative position of the real-scene image to obtain a rendered image.

[0011] Optionally, the identity information data includes the current reservation scope and equipment use qualification information of the micro-nano processing laboratory personnel, and the alarm module is specifically used to:

[0012] When it is detected that the micro-nano processing laboratory personnel are outside the current reservation range and within the range that requires reservation, an out-of-range violation alarm message is generated;

[0013] When it is detected that the micro-nano processing laboratory personnel are operating other equipment that does not match the equipment use qualification information, an equipment violation operation alarm message is generated.

[0014] Optionally, the intelligent push module is specifically used for:

[0015] Extracting first type of identity information from the identity information data of the personnel in the micro-nano processing laboratory, and displaying the first type of identity information at a preset position of the real-life image of the personnel in the micro-nano processing laboratory through the rendering module;

[0016] When the violation alarm information is received, the second type of identity information is determined according to the preset display rules, and the second type of identity information is displayed at a preset position of the real-life image of the micro-nano processing laboratory personnel through the rendering module.

[0017] Optionally, the intelligent push module is specifically used for:

[0018] When the violation alarm information is received, a violation warning range corresponding to the violation alarm information is determined, and violation analysis is performed on the violation behaviors within the violation warning range based on preset risk conditions to determine the corresponding violation behavior level;

[0019] Retrieving warning display information and warning display form matching the violation level from the data module;

[0020] The warning display information is used as the second type of identity information, and the second type of identity information is displayed in the warning display form above the current position of the micro-nano processing laboratory personnel through the rendering module.

[0021] Optionally, the identity information data includes the identity type and basic identity information of the micro-nano processing laboratory personnel, the person in charge includes a first-class person in charge and a second-class person in charge, and the alarm module is further used to:

[0022] Extract the person in charge corresponding to the equipment currently reserved by the micro-nano processing laboratory personnel from the basic identity information as the first type of person in charge;

[0023] According to the identity type, the second type of person in charge corresponding to the micro-nano processing laboratory personnel is determined.

[0024] Optionally, the alarm module is specifically used for:

[0025] When the micro-nano processing laboratory personnel are first-category personnel, the first target device corresponding to the current location of the first-category personnel is identified and determined by the identification and tracking module, and the person in charge corresponding to the first target device is obtained from the data module as the second-category person in charge;

[0026] When the micro-nano processing laboratory personnel are second-category personnel, the associated person in charge on campus is extracted from the basic identity information of the second-category personnel, and the second target device corresponding to the current location of the second-category personnel and the nearest person are identified and determined through the identification and tracking module, and the person in charge corresponding to the second target device is obtained from the data module, and the person in charge corresponding to the second target device and the nearest person are regarded as second-category persons in charge.

[0027] Optionally, the alarm module is further used for:

[0028] Pushing the violation alarm information to the first category person in charge and the second category person in charge;

[0029] When the violation alert information contains a violation related to the currently scheduled device, the first-category person in charge is regarded as the main person in charge;

[0030] When the violation alarm information contains a violation related to the target device corresponding to the current location of the micro-nano processing laboratory personnel, the second-category person in charge is regarded as the main person in charge.

[0031] Optionally, the alarm module is specifically used for:

[0032] When the micro-nano processing laboratory personnel are first-category personnel, the violation alarm information is pushed to the first-category person in charge and the person in charge corresponding to the first target device;

[0033] When the micro-nano processing laboratory personnel are of the second category, the violation alarm information is pushed to the first category person in charge, the on-campus related person in charge, the person in charge corresponding to the second target device and the person closest to the person, and at the same time, the information of the on-campus related person in charge is pushed to the person closest to the person.

[0034] Optionally, the second category of personnel includes enterprise users and suppliers, the equipment use qualification information corresponding to the enterprise users includes equipment independent operation qualification information, and the equipment use qualification information corresponding to the suppliers includes professional qualification certificate information, and the alarm module is specifically used for:

[0035] When it is detected that the enterprise user is operating other equipment that does not match the equipment independent operation qualification information, or when it is detected that the supplier is operating other equipment that does not match the professional qualification certificate information, an equipment illegal operation alarm message is generated.

[0036] Optionally, the alarm module is further used for:

[0037] When receiving a temporary authorization instruction or a violation cancellation instruction sent by the first type of person in charge or the second type of person in charge through the terminal device, the violation alarm is cancelled and the violation information is recorded.

[0038] Optionally, the identification and tracking module is further used for:

[0039] When receiving a temporary operation equipment request from the micro-nano processing laboratory personnel, determining the temporary request equipment corresponding to the temporary operation equipment request and the person in charge of the temporary request equipment;

[0040] Acquire the reservation application data of the temporary request device from the data module, and determine the current reservation status of the temporary request device through the reservation application data;

[0041] When it is detected that the temporary requested device is not currently in use, the temporary operation device request is sent to the person in charge of the currently operated device and the person in charge of the temporary requested device;

[0042] After receiving the temporary application approval instruction returned by the person in charge corresponding to the currently operating device and / or the person in charge of the temporary request device, the temporary application approval information is sent to the terminal device of the micro-nano processing laboratory personnel, and the equipment operation information of the micro-nano processing laboratory personnel is recorded.

[0043] Optionally, the identification and tracking module is further used for:

[0044] When it is detected that there is an idle device that is not currently executing a task in the monitoring area, temporary authorization opening information of the idle device is generated;

[0045] The temporary authorization opening information is sent to the terminal devices of all micro-nano processing laboratory personnel in the monitoring area, so that the micro-nano processing laboratory personnel in need can send equipment use requests to the person in charge corresponding to the idle equipment.

[0046] Optionally, the identification and tracking module is further used for:

[0047] When receiving a temporary permission opening request from the micro-nano processing laboratory personnel, determining the temporary opening area and the person in charge of the temporary opening area corresponding to the temporary permission opening request;

[0048] Sending the temporary permission opening request to the person in charge of the temporary opening area;

[0049] After receiving the temporary opening pass instruction returned by the person in charge of the temporary opening area, the temporary opening pass information is sent to the terminal device of the micro-nano processing laboratory personnel, and the equipment operation information and / or visit record information of the micro-nano processing laboratory personnel are recorded.

[0050] Optionally, the intelligent push module is specifically used for:

[0051] Determine real-scene images of all real target objects within the current visual range of the terminal device, and at least one virtual anchor point corresponding to the real-scene images for displaying information;

[0052] For each of the virtual anchor points, the virtual anchor point data corresponding to the virtual anchor point is retrieved from the data module, and first category display data, second category display data, third category display data and fourth category display data are generated respectively according to the virtual anchor point data.

[0053] Optionally, the personnel identity data includes a personnel type of a person corresponding to the terminal device, and the intelligent push module is specifically used for:

[0054] When the personnel type is a manager, the first type of display data is used as virtual display data that is automatically pushed;

[0055] When the person type is a visitor, the person background information of the visitor is obtained, and the information with the highest recommendation matching degree with the person background information is screened out from the second type of display data as the virtual display data to be automatically pushed;

[0056] When the personnel type is a trainee, the current ability level of the trainee is obtained, and training content data matching the current ability level is filtered out from the third type of display data as the automatically pushed virtual display data;

[0057] When the personnel type is a device user, the device operation level of the device user is obtained, and device-related data matching the device operation level is filtered from the fourth category of display data as the automatically pushed virtual display data.

[0058] Optionally, the first type of display data includes equipment operation data, equipment management estimation data, and data being viewed by visitors or trainers within the current visual range of the terminal device;

[0059] The second type of display data includes different types of recommendation information generated by visitors based on different background characteristics;

[0060] The third type of display data includes different levels of training content data generated based on trainees with different ability levels;

[0061] The fourth category of display data includes different levels of equipment-related data generated by equipment users at different equipment operation levels.

[0062] Optionally, the intelligent push module is specifically used for:

[0063] When receiving an information viewing instruction sent by the visitor through the corresponding terminal device, determining the display information corresponding to the information viewing instruction and the level of the person who can view it, and obtaining the viewing authority level of the visitor;

[0064] Matching the viewable personnel level with the view permission level, and when the match fails, pushing a view failure reminder message to the terminal device of the visitor, and at the same time pushing an information view request to the corresponding school-related person in charge of the visitor;

[0065] When the match is successful, or when an information viewing pass instruction is received from the school-related person in charge, the display information is obtained from the data module as the currently displayed virtual display data.

[0066] Optionally, the intelligent push module is specifically used for:

[0067] When receiving a temporary viewing instruction sent by the trainee through the corresponding terminal device, determining the training content information and the viewable capability level corresponding to the temporary viewing instruction;

[0068] Matching the viewable capability level with the current capability level, and when the match fails, pushing a viewing failure reminder message to the trainee's terminal device, and simultaneously pushing a temporary viewing request to the trainer corresponding to the trainee;

[0069] When the level matching is successful, or when a temporary viewing pass instruction returned by the training teacher is received, information corresponding to the temporary viewing pass instruction is obtained from the data module as the currently displayed virtual display data.

[0070] Optionally, the information management system further includes a voice interaction module, and the voice interaction module is used to:

[0071] When detecting that the micro-nano processing laboratory personnel issues a voice control instruction, extracting the target control entity and key action information from the voice control instruction;

[0072] Retrieving the equipment use permission of the micro-nano processing laboratory personnel from the data module, and judging whether the micro-nano processing laboratory personnel has the control permission of the target control entity according to the equipment use permission;

[0073] If yes, the target control entity is controlled by the information management system to execute the action corresponding to the key action information; otherwise, the alarm information is pushed to the person in charge of the target control entity through the alarm module.

[0074] Optionally, the voice interaction module is further used for:

[0075] After the alarm information is pushed to the person in charge of the target control entity through the alarm module, if a control authorization instruction returned by the person in charge of the target control entity is received, the target control entity is controlled by the information management system to perform an action corresponding to the key action information, and the control information is recorded;

[0076] If a control authorization rejection instruction is received from the person in charge of the target control entity, the voice control instruction is determined to be invalid, and an invalid prompt message is sent to the micro-nano processing laboratory personnel;

[0077] If the authorization instruction returned by the person in charge of the target control entity is not received within the preset waiting time period, the upper level person in charge corresponding to the person in charge of the target control entity is obtained from the data module, and an alarm message is pushed to the upper level person in charge.

[0078] Optionally, the information management system further includes a usage frequency recording module, and the usage frequency recording module is used to:

[0079] Recording the usage frequency data of each device used in the micro-nano processing experimental platform;

[0080] For any of the used devices, extracting the personnel type record information of the used device from the use frequency data, wherein the personnel type record information records the use frequency or click-to-view times of the used device by different types of micro-nano processing laboratory personnel;

[0081] According to the personnel type record information, the target personnel type with the highest usage frequency or click-to-view times for the used device is determined, and based on the target personnel type, the management and operation plan of the used device is adjusted accordingly.

[0082] The present invention also provides an information management method for a micro-nano processing experimental platform, comprising:

[0083] Obtaining the personnel identity data and identity information data of the micro-nano processing laboratory personnel corresponding to the terminal device, and automatically matching the virtual display data related to the personnel identity data;

[0084] Superimposing the virtual display data on the real-time relative position of the real-scene image to obtain a rendered image;

[0085] Obtain and track in real time the activity locations of the micro-nano processing laboratory personnel in the monitoring area and their operation behaviors on the equipment;

[0086] When the activity location of the micro-nano processing laboratory personnel is determined based on the identity information data, and / or the operation behavior on the equipment meets the preset violation conditions, violation alarm information is generated and sent to the person in charge and the terminal device.

[0087] The present invention also provides a terminal device, which is used in the information management system of the micro-nano processing experimental platform as described in any one of the above, and is used for:

[0088] Acquire the identity information data of the micro-nano processing laboratory personnel from the data module, and perform personnel binding with the micro-nano processing laboratory personnel based on the identity information data;

[0089] Locate the spatial position and angle of the terminal device in the real environment in real time, and obtain the real-scene image of the real target object within the current visual range through its own camera;

[0090] Interacting information with the identification and tracking module, and / or the alarm module, and / or the intelligent push module, and / or the data module;

[0091] The rendered image obtained after being processed by the rendering module is displayed in real time.

[0092] It can be seen from the above technical solutions that the present invention has the following advantages:

[0093] Provided is an information management system and method for a micro-nano processing experimental platform. The information management system includes an identification and tracking module, an alarm module, an intelligent push module, a data module, a rendering module, and at least one terminal device. First, the identification and tracking module is used to obtain the identity information data of the micro-nano processing laboratory personnel in the monitoring area, and the activity location and operation behavior of the micro-nano processing laboratory personnel on the equipment are tracked in real time; when the activity location is judged based on the identity information data, and / or the operation behavior of the equipment meets the preset violation conditions, the alarm module generates violation alarm information and sends it to the person in charge. Therefore, through the interactive settings of the alarm module and the violation triggering and alarm push, more targeted and efficient personnel management can be carried out for the relevant personnel on the scene. Secondly, the personnel identity data corresponding to the terminal device is obtained through the intelligent push module, and the virtual display data related to the personnel identity data is automatically matched from the data module; the virtual display data is superimposed on the real-time relative position of the real-scene image through the rendering module to obtain the rendered image. Therefore, on the one hand, the activities of personnel in the laboratory can be obtained through the identification and tracking module and the alarm module, and multiple persons in charge can be quickly identified when violations occur, which simplifies the personnel management of the laboratory. When problems arise, different persons in charge can be identified in time to avoid management risks. On the other hand, the smart push module can automatically push and display information of greater interest to relevant personnel based on different personnel types, realizing differentiated smart screening and push based on personnel type. Compared with the current information display method, it has better information display effect and improves the user information viewing experience. BRIEF DESCRIPTION OF THE DRAWINGS

[0094] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0095] Figure 1 It is a structural schematic diagram of an information management system for a micro-nano processing experimental platform;

[0096] Figure 2A schematic diagram showing a micro-nano processing equipment;

[0097] Figure 3 A schematic diagram showing a micro-nano processing plant facility;

[0098] FIG4( a ) is a display schematic diagram of a micro-nano processing laboratory personnel;

[0099] FIG4( b ) is another display schematic diagram of micro-nano processing laboratory personnel;

[0100] FIG5( a ) is a rendered image displayed by a terminal device;

[0101] FIG5( b ) is a rendered image displayed on another terminal device;

[0102] Figure 6 The present invention is a flowchart of the steps of an information management method for a micro-nano processing experimental platform. DETAILED DESCRIPTION

[0103] The embodiments of the present invention provide an information management system for a micro-nano processing experimental platform, an information management method for a micro-nano processing experimental platform, and a terminal device, which are used to solve or partially solve the problems of difficult personnel management and poor information display effect in the existing experimental platform management.

[0104] In order to make the purpose, features and advantages of the present invention more obvious and easy to understand, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the embodiments described below are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0105] As an example, in the current micro-nano processing experimental platform, personnel training or communication generally uses traditional text, pictures, and videos as teaching materials. There are disadvantages such as the inability to directly correspond to the actual situation on site, the inability of trainees and communication personnel to quickly understand, the inability to quickly combine the site with the teaching materials, and the time-consuming and labor-intensive updating and improvement of the teaching materials.

[0106] The complicated personnel exchanges in the experimental platform make personnel management more difficult. In addition, the number and types of semiconductor process equipment and supporting factory facilities in the micro-nano processing experimental platform are large. Each device can manage a large number and types of information. Due to the complexity and high professionalism of the information, staff need to work in combination with the actual situation on site and the background data information. At the same time, since the life cycle status of the equipment is difficult to check and grasp, and there is a problem of separation between the background and the real-time information of the equipment, the maintenance judgment basis is insufficient, and the information display effect is not good.

[0107] In summary, there is currently a lack of an information management system that can better manage personnel in micro-nano processing experimental platforms and on-site operation and maintenance and on-site education in semiconductor factories, and at the same time more intelligently push and display relevant data corresponding to the equipment.

[0108] Therefore, one of the core invention points of the embodiment of the present invention is: in view of the deficiencies in the prior art, an information management system and method for a micro-nano processing experimental platform is provided. Among them, the information management system includes an identification and tracking module, an alarm module, an intelligent push module, a data module, a rendering module and at least one terminal device. First, the identity information data of the micro-nano processing laboratory personnel in the monitoring area is obtained through the identification and tracking module, and the activity location and operation behavior of the micro-nano processing laboratory personnel on the equipment are tracked in real time; when the activity location is judged based on the identity information data, and / or the operation behavior of the equipment meets the preset violation conditions, the violation alarm information is generated by the alarm module and sent to the person in charge. Therefore, through the interactive settings of the alarm module and the violation triggering and alarm push, more targeted and efficient personnel management can be carried out for the relevant personnel on the scene. Secondly, the personnel identity data corresponding to the terminal device is obtained through the intelligent push module, and the virtual display data related to the personnel identity data is automatically matched from the data module; the virtual display data is superimposed on the real-time relative position of the real-life image through the rendering module to obtain the rendered image. Therefore, on the one hand, the activities of personnel in the laboratory can be obtained through the identification and tracking module and the alarm module, and when violations occur, multiple persons in charge can be quickly identified, which simplifies the personnel management of the laboratory. When problems arise, different persons in charge can be identified in time to avoid management risks. On the other hand, the smart push module can automatically push and display information of greater interest to relevant personnel based on different personnel types, realizing differentiated smart screening and push based on personnel type. Compared with the current information display method, it has better information display effect and can better enhance the user information viewing experience.

[0109] Reference Figure 1 , shows a schematic structural diagram of an information management system for a micro-nano processing experimental platform provided by an embodiment of the present invention.

[0110] Combination Figure 1 The information management system 100 provided in the embodiment of the present invention can be mainly divided into two parts. One is the server part, which mainly includes an identification and tracking module 101, an alarm module 102, an intelligent push module 103, a data module 104 and a rendering module 105. The other is the user part, which includes at least one terminal device 106. Each terminal device 106 is connected to the server for communication.

[0111] Among them, the terminal device 106 includes but is not limited to AR (Augmented Reality) glasses, MR (Mixed Reality) glasses, tablet computers and mobile phones.

[0112] On the one hand, when the personnel of the micro-nano processing laboratory need to enter the laboratory for visits, training or operating equipment, they need to wear AR or MR glasses, or hold a tablet or mobile phone in hand to receive relevant virtual display information in real time or perform some interactive operations. At this time, the personnel must first be bound to the terminal device one-to-one, so that in the subsequent process, when the personnel violates the rules and an emergency occurs, the corresponding personnel can be quickly locked through the terminal device. Specifically, the terminal device 106 can be used to obtain the identity information data (such as basic identity information, identity type, etc.) of the personnel of the micro-nano processing laboratory from the data module 104, and bind the personnel with the personnel of the micro-nano processing laboratory based on the identity information data.

[0113] On the other hand, the terminal device 106 can also be used to locate its spatial position and angle in the real environment in real time, obtain the real-scene image of the real target object through its own camera, and display the rendered image.

[0114] Furthermore, the terminal device 106 can also exchange information with other modules in the information management system 100, such as the identification and tracking module 101, the alarm module 102, the intelligent push module 103 and the data module 104. The specific information interaction between the device terminal 106 and other modules will be described in conjunction with the corresponding modules in the subsequent introduction, and will not be repeated here.

[0115] The real target objects include but are not limited to micro-nano processing equipment, micro-nano processing factory facilities and micro-nano processing laboratory personnel in the real environment of the micro-nano processing platform.

[0116] As an optional embodiment, the terminal device 106 can locate its spatial position and angle in the real environment based on the SLAM (Simultaneous Localization and Mapping) algorithm. The SLAM algorithm refers to the process in which a moving object calculates its own position based on the information from the sensor while building an environmental map. At present, the application fields of SLAM mainly include robots, virtual reality VR and augmented reality AR.

[0117] In an optional embodiment, the information management system 100 may further include a space construction module. The space construction module is mainly used to construct a 3D space model of the micro-nano processing experimental platform. Specifically, the 3D space model may include 3D models and location information of micro-nano processing equipment and micro-nano processing factory facilities, as well as a display area of ​​virtual information set according to the location information.

[0118] Furthermore, the spatial construction module first obtains the anchor point data of the micro-nano processing equipment and micro-nano processing factory facilities through point 3D scanning technology. Then, the 3D spatial model of the micro-nano processing experimental platform is constructed based on the anchor point data. Among them, each anchor point data contains its X, Y, and Z coordinate information in space. One device has more than 10 million anchor points to achieve contour coverage.

[0119] It is understandable that the anchor point data referred to in the embodiments of the present invention corresponds to the coordinate information of multiple anchor points of the actual device and the corresponding 3D space model. The virtual anchor point data corresponds to the virtual information displayed at a specific or calibrated anchor point position, such as the operation data of the device, the current health status information, etc.

[0120] The space construction module receives the anchor point data of the display area of ​​the calibrated virtual information and obtains the display area of ​​the virtual information. The developer can calibrate the area near the micro-nano processing equipment or the micro-nano processing plant facilities as the display area of ​​the virtual information based on the location information of the micro-nano processing equipment or the plant facilities. Specifically, the anchor point data of the calibrated area is input into the space construction module, and the space construction module constructs the display area of ​​the virtual information in the 3D space model. The developer calibrates the anchor point or anchor point area where the virtual information needs to be displayed, that is, the designated location of the virtual information.

[0121] As for the data module 104, on the one hand, the data module 104 can be used to obtain and store the operation data of the micro-nano processing experimental platform. Exemplarily, the operation data of the micro-nano processing experimental platform can mainly include the real-time operation data and operation principle data of the micro-nano processing process equipment and micro-nano processing factory facilities. Specifically, the operation principle data can mainly include a 3D exploded view of the equipment and an operation principle video.

[0122] Among them, micro-nano processing equipment covers various types of equipment for micro-nano processing, such as lithography, plate making, deposition, bonding, etching, and measurement. Micro-nano processing factory facilities include but are not limited to cold water systems, power systems, air conditioning exhaust systems, process exhaust systems, wastewater systems, pure water systems, gas supply systems, and chemical supply systems.

[0123] In addition, the data module 104 can also be used to establish an association mapping table between the operating data and the display area of ​​the virtual information, and synchronize all the operating data in the constructed 1:1 3D space model to achieve binding and synchronization. Exemplarily, the data to be displayed is extracted and built into Arkit (an AR development platform). In response to the developer clicking on the display area of ​​the virtual information, the system pops up a data box for the developer to select the corresponding data to be displayed and establish an association mapping table. The system will then automatically push real-time data to Arkit, and achieve docking and real-time push through webAPI (web Application ProgrammingInterface).

[0124] In addition to operation and maintenance, the information management system 100 of the micro-nano processing experimental platform provided in the embodiment of the present invention can also be used as a training platform for technicians. The trainees may include on-campus students, corporate users, or operation and maintenance personnel. In the actual scene of the operation of the lithography machine, the trainees can see the corresponding structural position of the lithography machine, the internal operation process video, the lithography principle and other videos through this system. Combining theory with the corresponding real scene for learning will have better perception and memory, and there is no need for teachers to explain on the spot.

[0125] In reality, due to the open nature of the micro-nano processing experimental platform in colleges and universities, there are a large number of users with different professional backgrounds and high mobility, making personnel management difficult. In addition, the semiconductor process has strict requirements on cleanliness, requiring users in the clean room to wear "fully armed" clean clothes from head to toe, making it more difficult for on-site operation and maintenance personnel to obtain information about users.

[0126] Based on this, the data module 104 can also be used to obtain and store the identity information data of the micro-nano processing laboratory personnel. The identity information data can mainly include the current location and identity information of the micro-nano processing laboratory personnel, such as the current reservation equipment information, equipment use qualification information, identity type and basic identity information.

[0127] Among them, micro-nano processing laboratory personnel include but are not limited to visitors, trainees, operation and maintenance personnel, laboratory staff, micro-nano processing personnel and other types of personnel listed in this application.

[0128] Each micro-nano processing laboratory personnel can wear a radio frequency card. After the radio frequency card passes through the radio frequency identification device, the radio frequency identification device identifies the identity information data, and the identity information data is stored in the database. The data module 104 can obtain the identity information data of the micro-nano processing laboratory personnel from the database. When the identity information needs to be displayed (such as the management personnel need to check the identity information of the micro-nano processing laboratory personnel, or when the micro-nano processing laboratory personnel have illegal operations and need to quickly lock the personnel), the corresponding identity information can be superimposed on the real-life image according to the position of the micro-nano processing laboratory personnel through the rendering module 105.

[0129] For example, Figure 2 A schematic diagram of a micro-nano processing equipment is shown. Figure 2 , when the real target object is a micro-nano processing equipment, taking the photolithography machine as an example, the operation and maintenance personnel wear the terminal device 106 to enter the real scene of the micro-nano processing test platform, and can see the photolithography machine and the real-time operation virtual parameters superimposed on the top of the photolithography machine. Among them, the real-time operation virtual parameters include but are not limited to temperature, humidity, whether an alarm is triggered, whether each component is normal, etc. And the parameter display position matches the position of each structure of the photolithography machine. For example, if the actual temperature inside the cavity of the photolithography machine is 23±0.1℃, a line will be drawn next to the cavity, and the character "23±0.1℃" will be displayed. Therefore, the operation and maintenance personnel can directly see the combination of the real scene and the corresponding parameters, without having to retrieve the temperature parameters from the machine on site, or look up the temperature parameters from the background system. There are many devices on site in the clean room, and the sound is noisy. When an abnormal situation occurs, such as when it is found that a person has violated the regulations on the photolithography machine, it is difficult to quickly find the source of the alarm if only listening and watching on site. Therefore, assuming that the alarm module 102 issues an alarm message regarding a person's illegal operation of the lithography machine, the relevant responsible personnel can also see the alarm situation through AR technology.

[0130] Figure 3 FIG. 1 shows a schematic diagram of a micro-nano processing plant service facility provided by an embodiment of the present invention. Figure 3 As shown, the micro-nano processing plant service facilities are taken as plant service pipelines as an example. Through the information management system 100, when the relevant operation and maintenance data is displayed at the real-time relative position corresponding to the pipeline, the management personnel or operation and maintenance personnel can conveniently and intuitively see the corresponding information of the pipeline. For example, through the corresponding display of virtual information in the real scene, personnel can quickly understand that the pipeline is a compressed air pipeline, the internal gas flow rate, the specific flow direction, the pipeline pressure value, whether there is a leak, and so on. In addition, through the information management system 100, based on the superimposed display of virtual information related to equipment operation at the corresponding position of the real scene, students can directly match the information of pipelines and pipelines on site, without the need to check back and forth in the background or be accompanied by teachers for explanation.

[0131] Without affecting the acquisition of other personnel information, or based on some special circumstances, the identity information of the micro-nano processing laboratory personnel needs to be displayed. For example, if the management personnel want to quickly understand what types of personnel are currently in the laboratory, when the personnel have not committed any violations (i.e., under normal circumstances), the first type of identity information can be quickly extracted from the identity information data of the personnel through the intelligent push module 103, and the first type of identity information can be quickly superimposed and displayed at a preset position of the real-life image of the corresponding personnel through the rendering module 105, such as above the current position.

[0132] If the displayed identity information is divided according to the emergency or risk level, the first type of identity information can be mapped to level 0 basic information. The first type of identity information can specifically include: such as the name of the person, the college (for on-campus personnel) / the unit (for off-campus personnel), the tutor (for on-campus personnel) / the person in charge of the school (for off-campus personnel), the name of the current reservation device (including the current reservation device and time period, security risks) and other information.

[0133] If the person has violated the rules, when the intelligent push module 103 receives the violation alarm information issued by the alarm module 102, it can quickly determine the second type of identity information that meets the preset display rules, and quickly superimpose the second type of identity information on the preset position of the real-life image of the corresponding person through the rendering module 105, such as the displayable area above or next to the current location, so that the management personnel or relevant persons in charge can quickly lock the relevant personnel.

[0134] Furthermore, the confirmation and display of the second type of identity information may be:

[0135] First, when the intelligent push module 103 receives the violation alarm information sent by the alarm module 102, the corresponding violation warning range can be determined based on the violation alarm information. For example, if the violator is currently operating the device in violation of the regulations, the area within a preset range (such as within 3 meters) centered on the device is used as the violation warning range; or, if the violator is currently in an area that has been intruded without authorization, the intruded area or the area within a preset range (such as within 3 meters) centered on the violator can be used as the violation warning range.

[0136] Then, based on the preset risk conditions, violation analysis is performed on the violation behaviors within the violation warning range to determine the corresponding violation level, and the warning display information and warning display form matching the violation level are retrieved from the data module 104.

[0137] Among them, the second type of identity information corresponds to the information when a warning is generated. According to the actual risk situation when the violation occurs, it is still divided according to the emergency or risk level. The information that needs to be displayed above the violator when a violation occurs can be further divided into level 1, level 2 and level 3 warning display information.

[0138] Specifically, the warning risk corresponding to the level 1 warning display information is low, and it only involves violating the equipment or area reservation rules. For example, suppose that person A originally made an appointment to operate equipment A from 9:00 to 10:00, but the system detected that he operated equipment A from 7:00 to 8:00. At this time, the intelligent push module 103 receives the corresponding violation alarm information and quickly determines the equipment A and its surrounding area as the violation warning range. And analyze the violations that occurred within the current warning range based on the violation alarm information and the detected on-site situation. For example, it is determined whether the behavior only involves violating the equipment or area reservation rules, and further determines whether an accident has occurred or whether an emergency has occurred. If it is determined that it only involves violating the equipment or area reservation rules, the warning risk is low, and the current violation level is determined to be a level 1 warning risk. In this case, the level 1 warning display information that needs to be displayed for person A is a warning of inconsistent operation time and the contact information of the person in charge of the equipment A. At this time, the level 1 warning display information corresponding to person A that matches the level 1 warning risk can be retrieved from the data module 104, and the level 1 warning display information can be automatically pushed to the person in charge of the equipment A.

[0139] For another example, person B originally only made an appointment for machine A, but actually operated machine B. Through the aforementioned similar analysis process, it can be determined that the corresponding level of this violation is also a level 1 warning risk. In this case, the level 1 warning display information that needs to be displayed for person B is a warning about inconsistent operation time and the contact information of B, the person in charge of the equipment. At this time, the level 1 warning display information corresponding to person B and matching the level 1 warning risk can be retrieved from data module 104, and automatically pushed to the person in charge of equipment B.

[0140] Similarly, suppose person C accidentally breaks into the electronic fence without prior reservation or permission. In this case, the level 1 warning display information that needs to be displayed for person C is accidental entry or lack of permission, and warns to evacuate in time.

[0141] The warning risk corresponding to the Level 2 warning display information is medium, which involves the health damage of the equipment. For example, due to the improper operation of the current user on the device C, equipment accidents such as debris, collision, cavity contamination, etc. are caused. At this time, the intelligent push module 103 receives the corresponding violation alarm information and quickly determines the device C and its surrounding area as the violation warning range. And analyze the violations that occurred within the current warning range based on the violation alarm information and the detected on-site situation. For example, first determine whether the behavior only involves violating the equipment or area reservation rules, and then further determine whether an accident has occurred or whether an emergency has occurred. If it is confirmed after judgment that the health damage of the equipment has been caused (such as detecting the presence of debris in the violation warning range, detecting that the cavity is contaminated, or the equipment operation data suddenly becomes abnormal, etc.), the warning risk is determined to be medium, and the current violation level is determined to be a Level 2 warning risk. In this case, the Level 2 warning display information that needs to be displayed, in addition to the information that needs to be displayed for the Level 1 warning risk, also needs to display the details of the wrong operation, the contact information of the person in charge of the equipment, and display prompts that can solve the wrong operation. For example, if the collision is caused by the wrong operation sequence, the correct operation sequence can be displayed to give real-time prompts. At the same time, the Level 2 warning display information can be automatically pushed to the person in charge of the equipment to inform him to deal with the on-site accident in time to avoid causing greater losses.

[0142] The warning risk corresponding to the level 3 warning display information is relatively high, involving personal safety. For example, the current user accidentally touches the chemical liquid, causing laboratory accidents such as machine gas leakage, because these accidents are easy to threaten the personal safety of personnel, such as personnel may faint, vomit or even fall into a coma. At this time, the intelligent push module 103 receives the corresponding violation alarm information and quickly determines the current user and its surrounding area as the violation warning range. And analyze the violations that occurred within the current warning range based on the violation alarm information and the detected on-site situation. For example, first determine whether the behavior only involves violating the equipment or area reservation rules, and then further determine whether an accident has occurred or whether an emergency has occurred. If it is confirmed after judgment that an experimental accident has been caused and the current violator may pose a threat to personal safety (such as detecting machine gas leakage, personnel falling, vomiting and other abnormal behaviors, etc.), it is determined that the warning risk is high, and the current violation level is determined to be a level 3 warning risk. In this case, the level 3 warning display information that needs to be displayed, in addition to the information that needs to be displayed for level 1 and level 2 warning risks, also needs to display information such as the person in charge of the machine and contact information, emergency contact person and contact information, emergency treatment measures, etc. For example, if it is detected that the current offender has touched hydrofluoric acid, the emergency measures for hydrofluoric acid need to be popped up. For example, if it is detected that there is a chlorine gas leak, the emergency measures for chlorine gas leak need to be popped up. This real-time display of emergency measures can avoid the problem that the first person who rushes to the scene to deal with it does not know how to deal with it correctly, or reduce the risks caused by improper handling. At the same time, it can also reduce the cost of personnel training, so that laymen or inexperienced personnel can quickly and intuitively understand how to deal with emergencies on site without having to make phone calls or look up information. This can speed up the processing time and further reduce the adverse effects of improper handling.

[0143] Finally, the warning display information is used as the second type of identity information, and the second type of identity information is displayed in a corresponding warning display form at a preset position of the real scene image of the current position of the micro-nano processing laboratory personnel, such as a displayable area above or beside the current position, through the rendering module 105. Therefore, when a person violates the rules, the relevant person in charge can quickly lock the person who violates the rules in the laboratory according to the warning display information displayed at the preset position of the person, so as to stop the violation in time or deal with the violation as soon as possible.

[0144] Among them, for the display interface of information display, in order to enable the personnel who can see the information to intuitively judge the urgency of the abnormal situation occurring on the scene, the font background of the display interface can be set to use different color blocks for intuitive display. For example, for the display interface of the first type of identity information (i.e., level 0 basic information), the font background can be set to gray or transparent; for the second type of identity information, for the warning display information corresponding to the level 1 warning risk, the font background is set to light blue, for the warning display information corresponding to the level 2 warning risk, the font background is set to yellow, and for the warning display information corresponding to the level 3 warning risk, the font background is set to red.

[0145] Furthermore, according to the actual situation on site, the information can be set for priority display. If the display space on site is sufficient to display all the information that needs to be displayed, it can be set to display all the information. If the space on site is limited and only part of the information can be displayed, it can be set to display the higher-level warning display information first, and temporarily fold and hide the lower-level warning display information. When the folded lower-level warning display information needs to be viewed, the personnel can manually click to trigger the expansion.

[0146] Therefore, based on the actual scenario and taking into account the different situations that may occur in the laboratory, different personnel-related information display content and display methods are set accordingly. When it is necessary to quickly view the basic information of relevant personnel, or when an abnormal situation occurs on site or a person violates the rules, set the corresponding information display for different risk levels or accident urgency. When an abnormal situation with a higher risk level occurs, by increasing the information display of emergency measures, on-site personnel can make corresponding processing more quickly and accurately based on the information prompts given by the emergency measures to avoid causing greater losses. At the same time, the corresponding priority information display is set based on the risk level, so that other on-site personnel can quickly obtain the relatively most critical information, further reducing the time required to handle on-site accidents and improving processing efficiency.

[0147] Based on the above embodiments, the present application further discloses a danger warning method for a micro-nano processing experimental platform. As an example, the method includes:

[0148] In the first state, the first type of identity information, such as name, work unit, and laboratory role (see the aforementioned laboratory personnel type for details) is displayed at the preset position of the physical image of the laboratory staff. In some feasible schemes, the first type of identity information further includes equipment that can be visited, studied, and used, and the preset usage time. In some feasible schemes, the first type of identity information also includes the area of ​​permitted activities; in some embodiments, when the first type of identity information in the first state is rendered and displayed on the terminal device of other personnel, it is displayed on the basis of the first preset transparency background. That is, referring to Figure 4 (b), the background of the information box has a certain transparency to avoid interfering with the sight of other personnel. It should be noted that the first preset transparency can be completely transparent or relatively high transparency. In the specific implementation, the transparency can be adjusted to between 70% and 100% according to the experimental equipment and background color.

[0149] In the second state, the second type of identity information and the warning information are displayed at a preset position of the physical image of the laboratory staff, and are rendered in a color different from that in the first state according to preset rules.

[0150] The preset rules at least include: judging the emergency or risk level corresponding to the second state, and rendering the first-class identity information and warning information in a color different from that in the first state when the first-class alert occurs (the content of the warning information is shown in the above content). In some implementation methods of this example, only the warning information is rendered differently, and after the alarm ends, the rendered warning information is stopped from being displayed.

[0151] When the second type of alert occurs, the location information of the alerted laboratory staff is obtained, and according to the preset emergency measures, a warning range with the location of the alerted event as the reference point and a duration of the preset time is established, and the accident information and precautions for entering the warning range or the need to take safety measures are rendered on the warning range. In some specific implementations, the system further renders the safety measures of the approaching personnel on the warning range, and when the safety measures of the approaching personnel do not meet the requirements of the warning range, they are displayed and reminded on the warning range, and pushed as warning information to the terminal device of the approaching personnel.

[0152] It should be noted that the preset emergency measures can be based on the different areas of the laboratory and the risk level of the items used. In other words, the relevant parts of the emergency measures are preset in combination with the laboratory management requirements, and can be adjusted in real time according to the changes in laboratory management. It is understandable that the alert range and alert duration in the emergency measures change according to the laboratory accident situation, while safety measures need to be preset in advance. For example, the protection level of personnel entering, the skills they should have or the equipment they carry can be implemented based on other modules in the management system. For example, based on image recognition, or by obtaining the barcode information or radio frequency chip information on the protective equipment or carried equipment, it will not be repeated here.

[0153] When the third type of alert occurs, in some examples, the status of the personnel in the alert area is further obtained, and the rendering method is adjusted based on the status of the personnel. Specifically, it may include: obtaining the status of the personnel in the area, judging whether the safety measures of the personnel in the area are sufficient to meet the alert requirements, and if not, rendering the alarm information at the preset location and pushing it to the terminal of the current person. The safety measures and alert requirements refer to the second type of alert, and the preset location can be adaptively adjusted according to the various types of information that have been rendered and displayed.

[0154] It should be noted that the preset rules further include the adjustment of the rendering display position. In some implementations, when the information rendering is obtained from the perspective of other personnel terminals, it can be rendered above or beside the current person. In some implementations, when the current person falls to the ground, the rendering information is displayed above or below the current person's body. In some implementations, according to the warning requirements, when various types of information are superimposed, the alarm information is displayed in the forefront and displayed with a solid color opaque background to avoid superposition and occlusion.

[0155] It should be noted that the preset rules further include the adjustment of the transparency of the rendering interface. In some embodiments, when the second type of identity information or alarm rendering in the second state is displayed on other people's terminal devices, it is displayed on the basis of the second preset transparency or opaque solid color background. That is, referring to the information boxes of different colors in Figure 4 (b), the background has a certain degree of transparency, but the transparency is relatively low. In some embodiments, the second preset transparency is 40% to 70%; it should be noted that when setting, the second preset transparency is greater than or equal to the first transparency.

[0156] In some embodiments, when the second and third types of alerts appear in the second state, the transparency of the corresponding rendered information background frame is further reduced. That is, under the second and third types of alerts, the third preset transparency is implemented, and the third preset transparency is 60% to 100%. For example, in some cases, the transparency is 100%, that is, the rendered information is displayed on a completely opaque background. It should be noted that the third transparency is less than the first and second transparency.

[0157] It should be noted that the preset rules further include the adjustment of the color of the rendering interface. In some specific implementations, the warning display and prompt are rendered in front of the user's terminal device, the color of the equipment, environment, and light intensity around the person whose identity information and warning information are rendered are obtained, and the color of the identity information and warning information, as well as the color of the background frame are adjusted according to the color of the equipment and environment.

[0158] In some specific implementations, the first, second, and third preset transparencies are adjusted according to the device and the environment color. For example, in some specific examples, when the reflectivity of the device around the person whose identity information or warning information is rendered is high, a background with lower transparency is used for rendering, or a solid color background with low transparency and bright color is used for rendering.

[0159] Exemplarily, FIG4(a) shows a simple display schematic diagram of a micro-nano processing laboratory personnel provided by an embodiment of the present invention. As can be seen from FIG4(a), since in the clean room, personnel are required to wear clean clothes, hats, masks, and gloves, it is difficult to distinguish each other. Through the information management system 100, virtual information superimposed on the head of the corresponding personnel can be seen. Including name, unit, which device is reserved, etc. It is convenient for on-site personnel management. At the same time, due to the large number of users using the open platform, including students, personnel from off-campus scientific research institutions, corporate personnel and other different types of users. Managers or operation and maintenance personnel can also match the actual entered appointment-related information through these intuitively displayed information to confirm whether the user has an appointment, whether there is an area where he should not appear, whether he uses equipment without prior reservation, whether there are errors in the use of equipment, and whether he enters the clean room without an appointment and other illegal operations.

[0160] FIG4(b) shows another display schematic diagram of micro-nano processing laboratory personnel provided by an embodiment of the present invention. In conjunction with FIG4(b), it can be seen that for different violations and different levels of security risks, the warning display information corresponding to the personnel is different from the specific information display method, such as the information corresponding to different warning risk levels is displayed with different font backgrounds and different transparencies. Taking an actual scenario as an example, when the equipment user operates the relevant equipment, the management personnel or operation and maintenance personnel can also view the identity information of these personnel, the currently used equipment, the usage time and other information at any time through the terminal device 106 to quickly understand the personnel information and equipment usage in the current laboratory.

[0161] Through the above-mentioned information display setting method for micro-nano processing laboratory personnel, visitors can quickly understand the laboratory's personnel structure and important personnel-related information from the outside through VR or AR glasses or other available terminal devices even if they do not enter the laboratory. For example, through the personnel information display method provided by the embodiment of the present invention, when the leaders of the school or outside the school visit, even if the personnel in the laboratory are "fully armed" from head to toe, the management ability of the laboratory for complex personnel can be quickly demonstrated to them.

[0162] As for the recognition and tracking module 101, first, the recognition and tracking module 101 can be used to calculate the real-time relative position of the real target object and the display area of ​​the virtual information according to the spatial position and angle of the terminal device 106 and the 3D space model. That is, the real-time relative position of the real device and the display area of ​​the virtual information is calculated by locating the spatial position and angle of the terminal device 106 in the real environment in real time.

[0163] Furthermore, the identification and tracking module 101 can also be used to obtain the identity information data of the micro-nano processing laboratory personnel in the monitoring area, and track the activity locations and equipment operation behaviors of the micro-nano processing laboratory personnel in real time. The identity information data includes:

[0164] The identity type of the personnel in the micro-nano processing laboratory includes at least whether the personnel are on-campus or off-campus personnel. On-campus personnel can be further divided into laboratory staff, members of various experimental teams, and students of various grades. Off-campus personnel can be further divided into corporate users, suppliers, visitors, etc.

[0165] Basic identity information, for example, for on-campus personnel, it can include name, student number, campus (such as Clear Water Bay / Guangzhou), tutor name and other information; for off-campus personnel, it can include the person's name, company or unit name, school inviter or related person in charge on campus, etc.).

[0166] The current reserved device information, such as the reserved device, the corresponding active range area (current reservation range), the available time period, etc.

[0167] Equipment usage qualification information, for example, for on-campus personnel, it can be a list of machines that have passed the assessment; for off-campus personnel, if they are corporate users, it can be a list of machines that have passed the assessment; if they are suppliers, it can be supplier certificates or equipment-related professional qualification certificates and other information.

[0168] Education or work background information, for example, from the platform database, obtain the education information of the personnel entering the laboratory, including major, academic qualifications, etc., and obtain the work background information of the personnel entering the laboratory, including brief work experience, etc.

[0169] Based on one or more of the above-mentioned identity type, basic identity information, current reservation device information, device usage qualification information, education or work background information, violation monitoring or information push is performed.

[0170] Furthermore, in order to better manage different types of personnel, corresponding direct or indirect persons in charge can be set for different types of personnel according to actual conditions, so that when abnormal situations occur or personnel violate regulations, the corresponding persons in charge of the violators can be quickly identified to achieve more standardized personnel management.

[0171] For example, for people on campus, the person in charge of the reserved device can be regarded as the first-category person in charge, and the person in charge of the device within the preset range of the person's current location (such as within a radius of 3 meters) or the device used by the person in violation of regulations without authorization or reservation can be regarded as the second-category person in charge. The first-category person in charge and the second-category person in charge can be regarded as the corresponding persons in charge for the person on campus.

[0172] For off-campus personnel, the person in charge of the reserved device can be regarded as the first type of person in charge, the person invited by the school (i.e. the on-campus related person in charge of the off-campus personnel), the person in charge of the equipment within the preset range of the person's current location (such as within a radius of 3 meters) or the person in charge of the equipment used by the person without authorization or reservation, and the person closest to the off-campus personnel can be regarded as the second type of persons in charge. The first type of person in charge and the second type of person in charge can be regarded as the corresponding persons in charge of the off-campus personnel.

[0173] Therefore, when the personnel of the corresponding type of micro-nano processing laboratory violate the rules, the violation information can be quickly sent to the relevant person in charge to stop the illegal operation of the personnel in time. In particular, when the person who violates the rules is an off-campus person, the corresponding school inviter can also be quickly determined, so that the management personnel can determine whether to regard the school inviter as the joint person in charge of the illegal person and bear part of the responsibility for the current illegal behavior according to the actual situation.

[0174] In a specific implementation, the alarm module 102 can also be used to: extract the person in charge corresponding to the current reserved equipment of the micro-nano processing laboratory personnel from the basic identity information as the first type of person in charge; and determine the second type of person in charge corresponding to the micro-nano processing laboratory personnel according to the identity type.

[0175] Specifically, the second-type person in charge is determined for different types of micro-nano processing laboratory personnel. When the micro-nano processing laboratory personnel are first-type personnel (i.e., on-campus personnel), the alarm module 102 can identify and determine the first target device corresponding to the current location of the first-type personnel through the identification and tracking module 101, and obtain the device person in charge corresponding to the first target device from the data module 104 as the second-type person in charge; when the micro-nano processing laboratory personnel are second-type personnel (i.e., off-campus personnel), the school-related person in charge is extracted from the basic identity information of the second-type personnel, and the second target device corresponding to the current location of the second-type personnel and the nearest person are identified and determined through the identification and tracking module 101, and one or more of these persons are used as the second-type person in charge.

[0176] In actual situations, it is usually the case that the personnel of the micro-nano processing laboratory have made an appointment to visit a certain area or use it as an area where equipment can be moved. However, due to emergencies on site or other reasonable needs, they need to go to another area (which has not been booked in advance) to visit or operate equipment. At this time, the personnel of the micro-nano processing laboratory can issue a request to the relevant person in charge to temporarily open the permissions for the unbooked area. After receiving the request, the relevant person in charge can grant temporary authorization or refuse authorization based on the actual situation.

[0177] Specifically, the identification and tracking module 101 can also be used to: when receiving a temporary permission opening request from a micro-nano processing laboratory staff, determine the temporary opening area and the person in charge of the temporary opening area corresponding to the temporary permission opening request; send the temporary permission opening request to the person in charge of the temporary opening area; after receiving the temporary opening pass instruction returned by the person in charge of the temporary opening area, send temporary opening pass information to the terminal device 106 of the micro-nano processing laboratory staff, and record the equipment operation information and / or visit record information of the micro-nano processing laboratory staff. Assuming that the person in charge of the temporary opening area does not grant temporary authorization based on confidentiality or other factors, a rejection authorization instruction can also be sent to the terminal device 106 of the micro-nano processing laboratory staff.

[0178] In addition to the above situations, there may also be situations where the micro-nano processing laboratory personnel have made a reservation for a certain device, but want to operate a device that has not been reserved in advance. When the device has a reservation time period, or the device schedule is full, but no one is operating it at this time (that is, the device is currently not in use), the micro-nano processing laboratory personnel can also issue a temporary operation request for the device that has not been reserved in advance to the relevant person in charge. After receiving the request, the relevant person in charge can grant temporary authorization or refuse authorization based on the actual situation.

[0179] Specifically, the identification and tracking module 101 can also be used to: when receiving a temporary operation device request issued by a micro-nano processing laboratory personnel, determine the temporary request device corresponding to the temporary operation device request and the person in charge of the temporary request device; obtain the reservation application data of the temporary request device from the data module 104, and determine the current reservation status of the temporary request device through the reservation application data; when it is detected that the temporary request device is currently unused, send the temporary operation device request to the person in charge corresponding to the current operation device and the person in charge of the temporary request device; when receiving the person in charge corresponding to the current operation device, and / or, after the temporary application approval instruction returned by the person in charge of the temporary request device, send the temporary application approval information to the terminal device 106 of the micro-nano processing laboratory personnel, and record the equipment operation information of the micro-nano processing laboratory personnel. Similarly, assuming that the person in charge corresponding to the current operation device, or the person in charge of the temporary request device, does not grant the temporary operation authorization, a temporary operation rejection authorization instruction can also be sent to the terminal device 106 of the micro-nano processing laboratory personnel.

[0180] In another possible situation, assuming that there is idle equipment that is not currently executing any tasks, the equipment idle information can also be sent to the terminal device 106 of the micro-nano processing laboratory personnel in the monitoring area to inform these personnel that there is idle equipment in the current laboratory and they can apply for operation if there is a need to use it.

[0181] The identification and tracking module 101 can also be used to: generate temporary authorization and opening information of the idle device when it is detected that there is an idle device with no current execution task in the monitoring area; send the temporary authorization and opening information to the terminal device 106 of all micro-nano processing laboratory personnel in the monitoring area, so that the micro-nano processing laboratory personnel in need can send equipment use requests to the person in charge of the idle device.

[0182] The alarm module 102 is used to generate violation alarm information and send it to the person in charge when the activity location of the micro-nano processing laboratory personnel is detected based on the identity information data, and / or the operation behavior of the equipment meets the preset violation conditions.

[0183] In an optional embodiment, different violation alarm information can be generated according to different violation types. Specifically, based on the preset electronic fence, and the activity area (activity location) of the micro-nano processing laboratory personnel tracked by the identification and tracking module 101, and / or the operation behavior of the equipment, when it is detected that the micro-nano processing laboratory personnel appear outside the current reservation range and within the range that requires reservation, the alarm module 102 can generate an out-of-range violation alarm information; when it is detected that the micro-nano processing laboratory personnel are operating other equipment that does not match the equipment use qualification information, an equipment violation operation alarm information is generated.

[0184] Furthermore, the alarm module 102 can also be used to push the violation alarm information to the first type of person in charge and the second type of person in charge determined based on the identity information data, so that the relevant persons in charge can make timely handling of the violation. In specific implementation, in order to deal with different equipment violations, when the violation alarm information contains violations related to the currently scheduled equipment, the first type of person in charge can be regarded as the main person in charge (direct person in charge); when the violation alarm information contains violations related to the target equipment corresponding to the current location of the micro-nano processing laboratory personnel, the second type of person in charge can be regarded as the main person in charge (direct person in charge).

[0185] Thus, when the violation alarm information includes a violation related to the currently scheduled device, the alarm module 102 can push the corresponding violation alarm information to the first-class person in charge and the second-class person in charge at the same time, and send an additional key reminder message to the first-class person in charge to remind the first-class person in charge to handle the violation in a timely manner. When the violation alarm information includes a violation related to the target device corresponding to the current location of the micro-nano processing laboratory personnel, the alarm module 102 can push the corresponding violation alarm information to the first-class person in charge and the second-class person in charge at the same time, and send an additional key reminder message to the second-class person in charge to remind the second-class person in charge to handle the violation in a timely manner.

[0186] As a preferred embodiment, when the alarm module 102 determines that a violation has occurred, it further obtains the location of the violator, and determines the nearest person who meets the relevant conditions as the authorized manager according to the location of the violator. The authorized manager can be a laboratory maintenance personnel or a laboratory staff with management authority.

[0187] In a more preferred embodiment, the alarm module 102 can further obtain multiple laboratory staff within a certain range of distance, and determine the authorized manager responsible for on-site management according to the work progress registered by multiple laboratory staff in the laboratory. For example, different priorities are determined according to the work situation, and the first priority is the identity of the personnel. Within the preset range, the laboratory maintenance personnel are given priority as the authorized manager on site. Secondly, the laboratory staff who are responsible for on-site explanation, visit guidance, and completion of the previous stage of work are further used as authorized managers. Once again, according to the working experience of the laboratory staff in the laboratory, within the preset range, the laboratory staff with more work experience are given priority as authorized managers. Thereby personnel are determined according to priority and distance, and the authorized manager finally determined is used as the third type of person in charge.

[0188] In a feasible solution, the priority and distance of the authorized managers are assigned specific coefficients, and the authorized manager with the highest score is used as the final authorized manager for calculation based on the specific coefficients.

[0189] In one feasible method: assuming that the distance is L and the distance parameter is A; the value when the personnel is a laboratory maintenance personnel is X, and the value when the personnel is a laboratory staff responsible for on-site explanations, tour guidance, and completion of the previous stage of work is Y; the work experience is E, and the work experience parameter is B. When an alarm occurs, the priority procedure score for each authorized manager is calculated as: L*A+X+E*B or L*A+Y+E*B.

[0190] The alarm module 102 can also be used to simultaneously push the violation alarm information to the third category responsible person determined based on the identity information data, so that the violation can be confirmed and handled in a timely manner.

[0191] More specifically, in order to achieve more targeted alarm information push, the alarm module 102 is specifically used for: when the micro-nano processing laboratory personnel are first-category personnel, the violation alarm information is pushed to the first-category person in charge and the person in charge corresponding to the first target device; when the micro-nano processing laboratory personnel are second-category personnel, the violation alarm information is pushed to the first-category person in charge, the related person in charge within the school, the person in charge corresponding to the second target device, and the nearest person. Furthermore, the nearest person can be the third-category person in charge determined by the aforementioned method, that is, the authorized manager, and the information of the related person in charge within the school is pushed to the authorized manager.

[0192] In combination with the above content, it can be known that the second type of personnel referred to in the embodiment of the present invention can mainly include off-campus personnel such as visitors, corporate users and suppliers. For the two different types of off-campus personnel, corporate users and suppliers, the corresponding equipment use qualification information is also different. Among them, the equipment use qualification information corresponding to the corporate user may include equipment independent operation qualification information, and the equipment use qualification information corresponding to the supplier may include professional qualification certificate information.

[0193] Therefore, for the judgment of the violation of the scope by the non-school personnel, the alarm module 102 can be used to generate the alarm information of the violation of the scope when it is detected that the visitor, the enterprise user, or the supplier appears in the range of the device that does not belong to the currently reserved device. In particular, for the judgment of the violation of the use of the device by the two non-school personnel, the enterprise user and the supplier, the alarm module 102 can be used to generate the alarm information of the violation of the device operation when it is detected that the enterprise user is operating other devices that do not match the independent operation qualification information of the device, or when it is detected that the supplier is operating other devices that do not match the professional qualification certificate information.

[0194] Furthermore, for violation cancellation, the alarm module 102 is also used to: upon receiving a temporary authorization instruction sent by the first-category person in charge, the second-category person in charge, or the authorized manager through the terminal device 106, or a violation cancellation instruction, cancel the violation alarm and record the violation information of the time.

[0195] In order to enable those skilled in the art to better understand the technical solution of the present invention, the relevant modules introduced in the above embodiments are auxiliary explained through several specific examples.

[0196] In combination with the foregoing, it can be seen that when a person is detected to appear in the monitoring area, the identification and tracking module 101 can automatically match the identity information data with the actual pre-stored reservation information. When there is a violation point (such as no reservation or appearing in an unreserved area / near the device), a warning or push is made through the alarm module 102. At the same time, the intelligent push module 103 can determine the warning display information to be displayed based on the preset display rules, and the rendering module 105 can simultaneously display the corresponding warning display information at the preset position of the real-life image of the person (such as above the current position), so that the management personnel or operation and maintenance personnel can quickly understand the violation points or illegal operation information of the person.

[0197] For example, suppose that the student originally made an appointment for machine 1, but appeared in the area range (such as an electronic fence) of machine 2. And the student did not make an appointment for machine 2 on that day. Then the alarm module 102 can generate an out-of-range violation alarm information, and automatically push the out-of-range violation alarm information to the student's direct manager (tutor or experimental teacher) and the equipment person in charge of machine 2. The manager who receives the information can investigate the violation alarm information, for example, the equipment person in charge can judge whether it is reasonable for the student to appear in the electronic fence of machine 2 based on experience, such as the student temporarily studying at machine 2 or studying under the guidance of a tutor. When the authorization instruction of the terminal of the direct manager or the person in charge of the equipment is received, the violation alarm is lifted according to the location record of the direct manager or the person in charge of the equipment as on-site authorization or on-site exclusion of violation information or remote authorization, but the alarm module 102 will record the violation information, on-site images, and operation records for subsequent review or information sorting by the manager or operation and maintenance personnel.

[0198] It should be noted that there are various types of machines in the laboratory according to confidentiality authority or operation authority. When the authorization of the student by the direct manager or the person in charge of the equipment on-site or remotely conflicts with the authority, the authorization will be rejected and the rejection reason information will be returned to the terminal of the direct manager or the person in charge of the equipment and the student. That is, when the authorization instruction is received from the management terminal, it is determined whether the authorization instruction meets the confidentiality authority or operation authority requirements according to the information of the authorized personnel. If it meets the requirements, it is authorized. When it does not meet the preset rules, the alarm module 102 returns the rejection information including the reason.

[0199] As a specific example, confidentiality rights include rights to visit or use the current area or equipment, and rights to operating information during equipment execution (for example, the equipment includes the team's test processes and data that have not yet been made public and need to be kept confidential); rights to visit or use can be determined based on basic identity information or equipment usage qualifications to determine different preset level requirements; rights to operating information during equipment execution are determined according to the level and settings of the using team, and can be set to preset level requirements for different operating information such as public to team members, public within the laboratory, public to school personnel, and public to the outside world. When the alarm module 102 receives area or equipment authorization information for authorized personnel, it compares the identity information of the authorized personnel with the preset level requirements of the area or equipment, and authorizes or returns unauthorized information.

[0200] In addition, suppose that the student needs to use machine 2 temporarily due to some needs during the use of machine 1. However, the student did not make an appointment for machine 2 in advance. Suppose that there is a situation where a temporary appointment cannot be made on site or machine 2 has been reserved by others, but no one is currently using machine 2. At this time, the student can send a temporary operation request to the person in charge of machine 1 and machine 2 obtained from the information management system 100 through the terminal device 106, and provide the specific reservation device and the corresponding reservation time period. When the person in charge confirms and agrees, the authorization instruction is sent to the information management system 100 through the management terminal, and the information management system 100 sends a temporary application approval information to the student's terminal device 106, and the approval information includes the specified time range information and machine operation requirements. At this time, the student can use machine 2 under the guidance of the machine operation requirements within the specified time range. During the device operation process, the system can record the student's device operation information.

[0201] For equipment operation, it is assumed that the student has passed the assessment of machine 1, that is, he is qualified to use machine 1 independently. If the student is independently operating a machine other than machine 1, it means that he is operating in violation of regulations. Then the alarm module 102 will generate equipment violation operation alarm information, and push the equipment violation operation alarm information to the person in charge of machine 1 and the person in charge of other machines that the student is operating. Then the person in charge will make a judgment and handle it based on the actual situation, and determine whether to open temporary authorization or cancel the violation. Regardless of the handling method adopted, the alarm module 102 will record the violation information.

[0202] Furthermore, the identity information of the school personnel can also include portrait information, including the student's historical reservation records and violation records, and based on the actual recorded operation data or violation records. At the same time, students can be further classified as novice users, experienced users, or key users. In actual situations, the management staff can judge the student's learning or operation status based on the above information of the student, analyze which device is prone to violations and errors when operating, and give key guidance or attention in subsequent training or operation.

[0203] When the person being viewed by the identification and tracking module 101 is an off-campus person (such as a corporate user, supplier, or visitor), the basic information that can be displayed is mainly: basic identity information, including the person's name, company name, school inviter (on-campus related person in charge), etc.; current reservation equipment information, including the current reservation equipment and time period, the person in charge of the current reservation equipment, the laboratory safety officer, other equipment and time scheduled for the day, entry time period, and entry area, etc.; if the person is not a visitor, equipment use qualification information can also be included. For corporate users, the equipment use qualification information can be equipment independent operation qualification information, corresponding to a list of machines that have passed the assessment, that is, a list of equipment with independent operation qualifications. For suppliers, the equipment use qualification information can be professional qualification certificate information, that is, the supplier's certificate and professional qualification information, such as a "special operation operation certificate."

[0204] Similar to on-campus personnel, when a person is detected in the monitoring area, the system can automatically match the above information with the actual pre-stored reservation information. When there are violations (such as no reservation or appearing in an unreserved area / near equipment), a warning or push notification will be issued, and the corresponding violation information can be displayed above the person at the same time, so that management personnel or operation and maintenance personnel can quickly understand the violation of the person.

[0205] For example, suppose that the supplier was supposed to replace spare parts in machine 1, but appeared in the area range (such as electronic fence) of machine 2, and the supplier did not make an appointment for machine 2 on that day. Then the alarm module 102 can generate an out-of-range violation alarm information, and automatically push the out-of-range violation alarm information to the equipment person in charge of machine 1 and machine 2, the school inviter corresponding to the person, and the nearest person (or the nearest equipment person in charge). The relevant person in charge can judge whether it is reasonable for the supplier to appear in the electronic fence of machine 2 at the current time based on experience. After on-site authorization or elimination of violation information, the violation alarm is lifted, but the alarm module 102 will record the violation information for subsequent review or information sorting by management personnel or operation and maintenance personnel. In order to avoid repeated processing, if someone among the notified personnel has given the processing result, the result can be automatically pushed to other personnel and the alarm is terminated.

[0206] Accordingly, if the user originally applies to work in maintenance area A, an emergency occurs on site or based on certain needs (such as the need to view parameters or temporarily need to pick up items that are not in area A), the user needs to go to maintenance area B. At this time, the user can also send a temporary opening authorization application to the person in charge of maintenance area B through the terminal device 106. In addition, the user can also send a temporary opening authorization application to the school inviter, and make an indirect application to the person in charge of maintenance area B through the school inviter. After actual confirmation and consent, the person in charge of maintenance area B can issue a temporary opening pass instruction, send temporary opening pass information to the user's terminal device 106, and record the user's equipment operation information within the permitted range, and / or, visit record information.

[0207] Similarly, assuming that the visitor is authorized to visit the second floor, but the visitor appears on the third floor (that is, it is not within the currently authorized visiting range), the alarm module 102 will also generate an out-of-range violation alarm message and hand it over to the school inviter or the area scope authorizer for processing through the same steps as mentioned above. The school inviter or the area scope authorizer will decide whether to temporarily increase the visiting area for the person.

[0208] Regarding the equipment operation of the enterprise user, it is assumed that the enterprise user has passed the assessment of machine 1, that is, he is qualified to use machine 1 independently. If the enterprise user is independently operating other machines other than machine 1, it means that he is operating in violation of regulations. The alarm module 102 will generate equipment violation operation alarm information, and push the equipment violation operation alarm information to the person in charge of machine 1, the person in charge of other machines being operated by the enterprise user, the person invited by the school, and the nearest person (authorized manager or person in charge of the nearest device), so as to stop the violation in time or temporarily open the authorization. Then the person in charge will make a judgment and handle it based on the actual situation to determine whether to open the temporary authorization or lift the violation. Regardless of the handling method adopted, the alarm module 102 will record the violation information.

[0209] The micro-nano processing experimental platform in this application contains a large number of flammable, explosive, toxic, and harmful chemicals and gases, and the working environment is special. Therefore, there are necessary requirements for the professional qualifications of the relevant supplier maintenance personnel. For example, for supplier personnel who replace gas cylinders, they need to hold a "special operation operation certificate", and for suppliers who use acetone, sulfuric acid, and hydrochloric acid, they need to hold an "acetone, sulfuric acid, hydrochloric acid operation certificate", etc. Similarly, if the certificate is not included in the virtual information of the person, it means that the person has violated the regulations, and the corresponding alarm information is generated by executing the aforementioned relevant steps and pushed to the corresponding person in charge, so that the corresponding person in charge can take timely processing actions.

[0210] Furthermore, the identity information of off-campus personnel may also include portrait information, including the off-campus personnel's historical reservation records and violation records, and based on the actual recorded operation data or violation records. In particular, enterprise users or suppliers can be further divided into novice users, experienced users, or key users. In actual situations, managers can judge the user's operation status based on the above information of the user, and can give key guidance or attention in subsequent device operations.

[0211] The intelligent push module 103 is used to obtain the personnel identity data corresponding to the terminal device 106 (mainly the specific personnel type corresponding to the personnel using the terminal device 106), and automatically match the virtual display data related to the personnel identity data from the data module 104. Then, the virtual display data can be superimposed on the real-time relative position of the real-scene image through the rendering module 105. That is, based on the association mapping table, the operation data corresponding to the display area of ​​the virtual information is superimposed on the real-time relative position of the real-scene image to obtain a rendered image.

[0212] For example, according to the actual situation, the personnel types of micro-nano processing laboratory personnel can be specifically divided into management personnel, visitors, trainees and equipment users. Furthermore, for the personnel characteristics of these different types of personnel, we can start from the different information display focuses, and generate different types of display data associated with these personnel characteristics based on the virtual anchor data of the real target object (i.e., the object that needs to display virtual information). In the subsequent information intelligent push process, different virtual display data are triggered by the acquired personnel type. Thus, through the intelligent push module 103, personalized information push and display can be performed based on the actual personnel type of the micro-nano processing laboratory personnel.

[0213] Specifically, for the generation of different types of display information, the intelligent push module 103 is specifically used to: determine the real-life images of all real target objects within the current visible range of the terminal device 106, and at least one virtual anchor point corresponding to the real-life images for displaying information; for each virtual anchor point, retrieve the virtual anchor point data corresponding to the virtual anchor point from the data module 104, and generate first-category display data, second-category display data, third-category display data, and fourth-category display data according to the virtual anchor point data.

[0214] Among them, the first category of display data includes equipment operation data within the current visual range of the terminal device, equipment management estimation data, and data being viewed by visitors or trainers. The second category of display data includes different types of recommendation information generated by visitors based on different personnel background characteristics (such as technicians, industry personnel, and non-industry personnel). The third category of display data includes different levels of training content data generated by trainees based on different ability levels (such as ability levels divided into elementary, intermediate, and advanced based on training capabilities). The fourth category of display data includes different levels of equipment-related data generated by equipment users based on different equipment operation levels (such as operation levels divided into elementary, intermediate, and advanced based on equipment operation capabilities or relevant equipment operation certificates).

[0215] Regarding the intelligent push of information, in a specific implementation, when the personnel type is a manager, the intelligent push module 103 can be specifically used to: directly push the first type of display data as virtual display data that is automatically pushed to the manager.

[0216] For example, when the person viewing the AR is a manager, the corresponding permission level of this person is the highest. Not only can he view any information in the laboratory, but also can view the information that trainees and visitors can see.

[0217] Among them, the equipment operation data may include current operation data, comparison results of current operation data and normal values, and historical operation data.

[0218] Specifically: the displayable data within the current visual range of the manager may include: current operating data: for example, displaying current power, exhaust volume, gas flow, pressure, wastewater and waste gas discharge flow, various equipment operating parameters, equipment alarm information, etc.

[0219] Comparison results of current operating data and normal values: For example, if the current pressure value is 200Pa, which is within the normal range of 100-300Pa, it will display "normal pressure value". If you want to view more specific details, you can trigger the data display by clicking your finger to view detailed operating parameters.

[0220] Historical operation data: For example, display historical data graphs (such as the pressure value graph within the past 6 months), fault records, historical maintenance records (including text descriptions, drawings, videos, exploded diagrams and schematic diagrams of maintenance improvement points, etc.), replacement records of accessories or consumables, etc.

[0221] Estimated data and estimated reminders: According to the specific maintenance type of the equipment, the relevant data can be classified more finely, such as regular maintenance, regular repair, technical upgrade, and accident emergency, so that personnel can quickly retrieve and view. In addition, these data of different maintenance types can also be displayed to operation and maintenance personnel or equipment users according to actual needs.

[0222] For the realization of the display interaction function, the management personnel can obtain the content currently viewed by the visitor or trainee at any time through the terminal device 106. Make a judgment based on the currently viewed content, such as judging whether the operation and maintenance data needs to be displayed in the current situation in a short time according to the richness of the currently displayed information or the degree of necessity of displaying the operation and maintenance data. If necessary, the operation and maintenance data is obtained from the data module 104 through the management terminal, and the operation and maintenance data is pushed to the terminal device of the visitor or trainee through the intelligent push module 103, and then the information is displayed through the rendering module 105. Through this intelligent push method, it can be avoided that the visitors and trainees obtain too much data at the data anchor point, and miss or miss to view more important operation and maintenance data.

[0223] In addition, operation and maintenance personnel can also be regarded as management personnel to a certain extent. For operation and maintenance personnel, they can be divided into plant operation and maintenance personnel and equipment operation and maintenance personnel according to actual conditions. For plant operation and maintenance personnel, the main push and display of plant information corresponding to the equipment, such as power, exhaust volume, gas flow and pressure, wastewater and exhaust gas discharge flow, etc. For equipment operation and maintenance personnel, the main push and display of important parameters and alarm information of equipment operation.

[0224] When the person type is a visitor, the intelligent push module 103 is specifically used to obtain the visitor's background information from the data module 104, and filter out the information with the highest recommendation matching degree with the person's background information from the second type of display data as virtual display data for automatic push and priority display.

[0225] Specifically, when the person viewing the AR is a visitor, the academic background and purpose of the visit of the person can be obtained from the data module 104, and based on the background information of the person, the information that the other party may be more interested in can be intelligently and differentially filtered and pushed from the second category of display data for different visitors.

[0226] For example, based on personnel background information, visitors can be mainly divided into technicians, people in the industry, and people outside the industry.

[0227] Among them, for technicians who may be more interested in the parameter information of the equipment itself, the parameters of the display equipment, operating data, clean room environmental parameters, corresponding technical difficulties and key points, patent information, etc. can be pushed intelligently in priority.

[0228] For those who may be more interested in the development of the industry, we can give priority to intelligently push information about the development of the industry, industry development comparison, the originality of this experimental platform or equipment, existing cooperation models, cooperation cases, etc. You can also choose whether to push information such as the parameters of the display device according to the actual situation.

[0229] For those outside the industry who are not familiar with the relevant technologies in this field, scientific information about micro-nano processing can be pushed and displayed intelligently first. For example, information such as the relevance of micro-nano processing products and life, the parameters and purchase status of lithography machines, how to ensure clean temperature and humidity in clean rooms, and the structural design of semiconductor laboratories can be pushed.

[0230] In addition, the intelligent push module 103 can also obtain the visitor's authority and give priority to push display of different levels of information. For example, for teachers on campus, students on campus, off-campus research institutes, corporate visitors, government visitors, investors, etc., different focuses can be displayed according to the personnel's authority.

[0231] At the same time, the intelligent push module 103 can also obtain the visitors' points of interest and interact based on the points of interest. For example, during the visit, the intelligent push module 103 can intelligently push a list of information that the visitors may be interested in at an appropriate time point (such as when there is no content currently displayed, or when the content currently displayed has been displayed for a long time), and display it in front of the visitors through the rendering module 105.

[0232] Visitors can select the information they want to see or hear by voice from the information list by clicking on the specific items of interest in the information list within their authority. Then the intelligent push module 103 can retrieve the information selected by the visitor from the data module 104 and display it through the rendering module 105.

[0233] If the visitor is not interested in the pushed information, he can also click "skip" with his finger. At this time, the intelligent push module 103 can select other information lists that may be of interest to push to the visitor again for the visitor to choose again. If the "skip" operation is performed several times (such as 3 times), the information intelligent push mode is temporarily put away, and the next appropriate node is waited for to push again.

[0234] If visitors want to view information beyond their current viewing permissions, they need to send a temporary permission viewing application to the school inviter in the AR system. Once the application is approved, they can view the relevant content.

[0235] In a specific implementation, the intelligent push module 103 can also be specifically used for: when receiving an information viewing instruction sent by a visitor through the corresponding terminal device 106, determining the display information and the level of the person who can view the information corresponding to the information viewing instruction, and obtaining the viewing authority level of the visitor; matching the level of the person who can view the information with the viewing authority level, and when the match fails, pushing a viewing failure reminder message to the visitor's terminal device 106, and at the same time pushing an information viewing request to the corresponding on-campus person in charge of the visitor; when the match is successful, or, when receiving an information viewing pass instruction returned by the on-campus person in charge, obtaining the display information from the data module 104 as the currently displayed virtual display data.

[0236] When the personnel type is a trainee, the intelligent push module 103 is specifically used to obtain the current ability level of the trainee, and filter the training content data matching the current ability level from the third type of display data as the virtual display data to be automatically pushed.

[0237] When the person viewing AR is a trainee, based on the corresponding information viewing permissions, he or she can mainly view operation and maintenance information, equipment principle structure drawings, videos, 3D models, exploded views, VR operation models and other information. During the viewing process, he or she can also click, zoom in, zoom out, rotate, disassemble and other operations on the relevant information.

[0238] Intelligent and automatic information push to trainees can not only display the basic information of equipment / facility, but also further display the principle structure information of equipment / facility, such as VR model, BIM model (Building Information Modeling), exploded view, etc.

[0239] It is understandable that the ability levels of different trainees are different, and the corresponding information viewing permissions are also different. Therefore, when information is automatically pushed or trainees actively want to view certain information, the viewing ability level permissions of the personnel can be determined first, and based on the viewing ability level, it is determined which information can be displayed.

[0240] For example, equipment training is divided into elementary, intermediate and advanced training contents. Intermediate training contents can be displayed only when trainees complete elementary training and pass the assessment, and advanced training contents can be displayed only when trainees complete intermediate training and pass the assessment. When the trainee has not passed the elementary assessment at this time but wants to view the intermediate training contents, the intelligent push module 103 can judge whether to display it based on the trainee's viewable ability level. When it is judged that the trainee cannot view the intermediate training contents, a viewing failure reminder message is pushed to the trainee's terminal device 106, prompting that the current ability does not reach this level and that the trainee needs to pass the elementary assessment before entering the intermediate course. At this time, in order to view the training content, the trainee can send an assessment application directly to the training teacher through the system.

[0241] In a specific implementation, the intelligent push module 103 is specifically used for: when receiving a temporary viewing instruction sent by the trainee through the corresponding terminal device 106, determining the training content information and the viewable ability level corresponding to the temporary viewing instruction; matching the viewable ability level with the current ability level, and when the match fails, pushing a viewing failure reminder message to the trainee's terminal device 106, and at the same time pushing a temporary viewing request to the training teacher corresponding to the trainee; when the level matching is successful, or, when a temporary viewing pass instruction is received returned by the training teacher, obtaining the information corresponding to the temporary viewing pass instruction from the data module 104 as the currently displayed virtual display data.

[0242] For example, the trainee only applies for training on device 1, or only the training content on device 1 can be displayed based on the current viewable capability level. At this time, the information display is limited and the training content on device 2 cannot be displayed. At the same time, a corresponding reminder can be sent to the terminal device 106 of the trainee.

[0243] In addition, when a relevant teacher accompanies the trainees for on-site training, the teacher can, based on the on-site situation of the students, temporarily authorize the opening of non-authorized and non-capable training courses through corresponding open rules. For example, all courses within 10 meters of the teacher's current location are opened, or a certain device is selected to open all courses related to a certain device, etc. Specifically, the intelligent push module 103 receives the temporary permission opening instruction sent by the training teacher through the terminal device 106, retrieves data that meets the permission opening requirements from the data module 104 (for example, all courses within 10 meters of the training teacher's current location as mentioned above), and displays the retrieved data through the rendering module 105.

[0244] In a more specific implementation scheme, when the intelligent push module 103 receives a course or equipment information opening instruction from the management terminal, it obtains all trainees within 10 meters of the current location of the management terminal, and pushes designated training courses, designated equipment training courses or designated equipment operation information to the terminals carried by these trainees.

[0245] For example, a designated training course can be opened to all people within a 10-meter radius of the teacher's current location; or a certain device can be selected to open designated courses or data related to the device, etc. In this way, it is convenient for teachers to adjust teaching or presentation content based on the actual site conditions or students' situations and problems.

[0246] That is, in specific implementation, when no preset instruction is received, the virtual display data open to the trainee terminal is preset authorization data or first category data; when a preset instruction is received, the virtual display data open to the trainee terminal is temporary authorization data or second category data.

[0247] Among them, the preset authorization data or the first category of data is the data that can be displayed on the trainees' terminals based on their historical learning progress and permissions, or the data that the trainees choose to view by themselves; the temporary authorization data or the second category of data is the data that the management terminal temporarily pushes from the database to the trainees' terminals for display.

[0248] It should be noted that the temporary authorization data or the second type of data can be displayed synchronously in a preset order according to the instructions of the management terminal, or can be pushed to the trainee terminal and displayed by the trainee himself.

[0249] At the same time, the system can also realize the display of different course contents according to the batch of personnel currently participating in the training. For example, if the current batch of trainees are outsiders, the primary training permissions for all equipment can be opened first; if the current batch of trainees are insiders and hope to continue in-depth learning, the primary, intermediate and advanced course content permissions can be opened at the same time according to the actual situation; if the current batch of trainees are factory training personnel, the factory course content permissions can be opened at the same time, and so on.

[0250] Specifically, the intelligent push module 103 obtains the trainee type of the current batch of trainees from the data module 104, and determines the corresponding temporary course opening authority according to the trainee type, and retrieves the corresponding authority data from the data module 104 according to the temporary course opening authority, and displays the retrieved corresponding authority data through the rendering module 105. Therefore, the corresponding training content opening authority can be generated differently according to the training degree of trainees in different batches, and the corresponding training courses can be pushed.

[0251] When the personnel type is a device user, the intelligent push module 103 can be specifically used to: obtain the device operation level of the device user, and filter the device-related data matching the device operation level from the fourth category of display data as the virtual display data to be automatically pushed.

[0252] When the person viewing AR is an equipment user, the current equipment operation SOP (Standard Operating Procedure), error-prone operation details, safety risks, equipment emergency contacts, and laboratory safety contacts can be intelligently pushed and displayed based on the equipment user's current equipment operation level, so that the user can view and contact them in time.

[0253] The rendering module 105 can also be used to render interactive buttons at real-time relative positions of real-scene images. Among them, the interactive buttons are mainly used for interaction between users and operation information, as well as for filtering or operating operation information. In the embodiments of the present invention, not only virtual display can be achieved, but also real operations can be performed on virtual information. For example, by clicking on the filter button through a real click action, the display of different information levels can be entered. Among them, the real click action includes real finger clicks, zooming in, zooming out, rotating, disassembling VR models of equipment or factory services, exploded diagrams, schematic diagrams, etc.

[0254] Therefore, by displaying real-time information through the rendering module 105, the information corresponding to the real object (including equipment / facilities / personnel) can be superimposed on the identified real object in the form of virtual information. This allows personnel to see the real object and the virtual information mapped on the real object, which represents the current operating status of the real object, directly in the actual scene. Therefore, there is no need to manually search and match the real object with the real-time information of the background, but the information can be obtained directly on the real object on the scene in a very intuitive and clear manner, and operation and maintenance and training can be carried out on site at any time, which greatly improves efficiency.

[0255] As an optional embodiment, the information management system 100 also includes a voice interaction module, which can be specifically used for: when a voice control instruction issued by a micro-nano processing laboratory personnel is detected through the terminal, the target control entity and key action information are extracted from the voice control instruction; the equipment usage rights of the micro-nano processing laboratory personnel are retrieved from the data module 104, and based on the equipment usage rights, it is determined whether the micro-nano processing laboratory personnel have the control authority over the target control entity; if so, the target control entity is controlled by the information management system 100 to perform an action corresponding to the key action information. When the voice control instruction is an instruction to display information, the relevant operating information or parameter information corresponding to the voice control instruction can be superimposed on the real-time relative position of the real-life image corresponding to the target control entity through the rendering module 105; otherwise, an alarm message is pushed to the person in charge of the target control entity through the alarm module 102.

[0256] For example, assuming that a staff member of the micro-nano processing laboratory issues a voice control command "check the monthly usage data of chlorine gas of the etching machine", the voice interaction module can derive the target control entity as "etching machine" through information extraction, the key action information is "check", the action object information is "chlorine gas", and the action range information is "monthly usage data"; then the voice interaction module retrieves the equipment use authority of the equipment operation and maintenance personnel from the data module 104, and determines whether the equipment operation and maintenance personnel has the control authority of "key action", "action object information" and "action range information" of the target control entity such as the etching machine according to the equipment use authority;

[0257] When the micro-nano processing laboratory personnel have the corresponding control authority, the voice interaction module can retrieve the monthly chlorine consumption data of the etching machine from the data module 104, and superimpose the information on the real-time relative position of the corresponding real-scene image of the etching machine through the rendering module 105.

[0258] When the micro-nano processing laboratory personnel do not have the corresponding control authority, they can return the reason and a request to the terminal whether to apply for relevant authority; when receiving the request for application authority returned by the terminal, an authorization request is issued to the person in charge corresponding to the target control entity or the person in charge corresponding to the key action information, action object information, and action range information of the target control entity. When the authorization instruction is returned by the person in charge, the micro-nano processing laboratory personnel are notified and data is retrieved for display according to the instructions of the micro-nano processing laboratory personnel.

[0259] For another example, suppose the manager issues a voice control command "Please show the appointment information of user xx". Through similar steps as above, the system can automatically retrieve the corresponding personnel information from the huge amount of data, and display the information above the user's current location, thereby avoiding the manager from searching for the desired data from massive data and improving the user experience.

[0260] Furthermore, after the alarm information is pushed to the person in charge of the target control entity through the alarm module 102, if the terminal receives a control authorization instruction returned by the person in charge of the target control entity, the target control entity is controlled through the information management system 100 to perform an action corresponding to the key action information, and the control information is recorded; if a control rejection authorization instruction is received from the person in charge of the target control entity, the voice control instruction is determined to be invalid, and an invalid prompt message is sent to the micro-nano processing laboratory personnel; if the authorization instruction returned by the person in charge of the target control entity is not received within the preset waiting time period, the person in charge of the next level corresponding to the person in charge of the target control entity is obtained from the data module 104, and the alarm information is pushed to the person in charge of the next level.

[0261] For example, suppose a person in the micro-nano processing laboratory issues a voice command to "turn on lithography machine A". When the voice interaction module receives the voice command, it extracts information from the voice command, and based on the extracted information, retrieves the person's equipment usage permissions from the data module 104 to determine whether the person has the authority to control the physical device.

[0262] If the user has the permission, the instruction is valid, and the information management system 100 controls the opening of the photolithography machine A. If the user does not have the permission, the alarm module 102 sends an alarm message to the person in charge of the photolithography machine A.

[0263] Assuming that the person in charge of the equipment refuses to authorize, the voice command is determined to be invalid, and an invalid prompt message is sent to the person. If the person in charge of the equipment agrees to authorize, the photolithography machine A device can be turned on through the information management system 100, and the control information can be recorded. If the relevant person in charge cannot make a decision, and the voice interaction module does not receive relevant instructions within the preset waiting time period, the person in charge of the upper level corresponding to the person in charge of the photolithography machine A device can be obtained from the data module 104, and an alarm message can be pushed to the person in charge of the upper level to push the problem to the person in charge of the upper level for processing.

[0264] In addition, the voice interaction module can also realize the voice suggestion function. Any person (such as visitors, trainees, and maintenance personnel) can leave suggestions or questions by voice, and the voice interaction module will convert the acquired voice information into text records and store it in the data module 104 for the convenience of management personnel to view.

[0265] In a specific implementation, the voice interaction module can also be used for: in response to receiving a voice control instruction issued by a person in the micro-nano processing laboratory, when the voice control instruction is determined to be a voice suggestion instruction (such as analyzing the voice content based on a large language model to determine whether the voice content is suggestive content or question content), extracting voice suggestion information from the voice suggestion instruction; the voice suggestion information includes but is not limited to the target control entity and the suggestion object, converting the voice suggestion information into text suggestion content, and sending the text suggestion content to the data module 104 for storage, and displaying the suggestion content of the suggester to the person in charge of the target control entity or other suggestion objects.

[0266] As an example, for example, if the visitor Professor Liu says "the display content of machine A is too professional", then after the voice interaction module recognizes "machine A", it pushes a message to "Professor Liu", the person in charge of "machine A", to provide feedback that "the display content of machine A is too professional".

[0267] Among them, other suggestion objects are further determined based on the target control entity, role, and time range obtained from the voice, and suggestions are pushed.

[0268] As an example, for example, the operation and maintenance personnel Mr. Liu said, "The module of machine A has been used too irregularly too many times in the past two months, resulting in an increase in the frequency of equipment maintenance. It is recommended that the instructor strengthen the early guidance of the trainees." After the voice interaction module recognizes "machine A", it obtains the "person in charge of machine A" and the corresponding "instructor" and "trainee" in the "past two months", and pushes module usage suggestions or usage guidance suggestions to these personnel.

[0269] As an optional embodiment, when the personnel of the micro-nano processing laboratory operate the equipment in the micro-nano processing experimental platform, if there is any doubt, the personnel of the micro-nano processing laboratory can ask voice questions at any time, and the voice interaction module can match the recommended answer content from the data module 104 according to the question content based on AI (Artificial Intelligence) and the large language model, and feedback to the personnel in the form of voice broadcast. Therefore, the voice interaction module can also be used to: in response to receiving the voice question instruction issued by the personnel of the micro-nano processing laboratory, extract the key question information from the voice question instruction; match the information with the highest degree of correlation with the key question information from the data module 104, and make a voice broadcast to the personnel of the micro-nano processing laboratory; if the second question or voice broadcast feedback is not received from the personnel of the micro-nano processing laboratory within the preset time period, the voice interaction is terminated; if the voice broadcast feedback of the personnel of the micro-nano processing laboratory is received within the preset time period, the satisfaction degree of the voice broadcast feedback is analyzed, and when the satisfaction degree analysis result indicates that the personnel of the micro-nano processing laboratory are not satisfied with the voice broadcast, the voice question instruction and the voice broadcast feedback are pushed to the person in charge of the equipment corresponding to the equipment operated by the personnel of the micro-nano processing laboratory. Therefore, based on voice question-and-answer interaction, problems encountered by users during the operation process can be solved or partially solved. Even if the currently filtered reply content cannot completely solve the question raised by the user, the question can be sent to the person in charge of the device so that the person in charge of the device can handle the problem in time or provide question-answering assistance to the user.

[0270] As an optional embodiment, when an emergency problem occurs on site, the person in charge of the equipment can see the real scene on site through the remote expert guidance system in the AR system, that is, in the same field of view as the user. At this time, the person in charge of the equipment can issue instructions to the site through the voice interaction module, or remotely annotate the scene in 3D to guide the user to solve the problem.

[0271] In a specific implementation, when an emergency situation is detected on site, an emergency help instruction can be sent to the terminal device 106 of the relevant equipment manager through the alarm module 102; the equipment manager accesses the remote expert guidance system based on the emergency help instruction to view the same screen as the user through the terminal device 106; the voice guidance instruction sent by the equipment manager is received through the voice interaction module, the voice content in the voice guidance instruction is extracted, and it is broadcasted in the form of voice broadcast, or sent to the user's terminal device 106 in the form of text content, and the text content is displayed through the rendering module 105. In addition, when the recognition and tracking module 101 detects the remote 3D annotation of the equipment manager, the 3D annotation content is obtained, and the 3D annotation content is displayed at the corresponding position in the user's field of view through the rendering module 105.

[0272] At the same time, the user can also directly call the device emergency contact and the nearest manager through the AR system. Specifically, the voice interaction module detects the phone access reminder, generates a phone communication prompt message, and sends the phone communication prompt message to the device emergency contact terminal device 106 and the nearest manager's terminal device 106, so that the relevant personnel can establish a phone call with the user and solve the relevant problems through on-site connection.

[0273] In an optional embodiment, the information management system 100 may also include a usage frequency recording module. The usage frequency recording module can be used to record the number of times and duration of use of the 3D model of each micro-nano processing equipment and micro-nano processing plant facilities, and then analyze which equipment or area is viewed most frequently, and then strengthen management in a targeted manner. For example, assuming that in the current month, through the analysis of the usage frequency recording module, it is found that the usage frequency of the 3D model of the power system is much higher than that of other time periods, it is very likely that operation and maintenance problems frequently occur, and when managing the power system, the operation and maintenance personnel need to pay special attention.

[0274] In a specific implementation, the usage frequency recording module is specifically used to: record the usage frequency data of each device in the micro-nano processing experimental platform; for any device in use, extract the personnel type record information of the device in use from the usage frequency data, and the personnel type record information records the usage frequency or click-through number of different types of micro-nano processing laboratory personnel for the device in use; according to the personnel type record information, determine the target personnel type with the highest usage frequency or click-through number for the device in use, and based on the target personnel type, make corresponding adjustments to the management and operation plan of the device in use.

[0275] Assuming that for device A, it is found through analysis that the maintenance personnel use it most frequently, it means that the management of the device needs to be strengthened. Then the frequency recording module can send maintenance reminder instructions to the maintenance personnel so that the maintenance personnel can strengthen the management of the device according to the actual situation. At the same time, the frequency recording module can also send user feedback suggestion instructions to the maintenance personnel to suggest that the maintenance personnel provide user feedback according to the actual maintenance situation when maintaining the equipment. When the frequency recording module receives the user feedback information sent by the maintenance personnel, it can send it to the data module 104 for storage, so as to conduct a comprehensive analysis of the device based on the user feedback information in the subsequent maintenance process, so as to achieve more comprehensive and targeted equipment maintenance.

[0276] Assuming that for device B, it is found through analysis that the trainees have the most repeated clicks, it indicates that it is necessary to strengthen the demonstration or training of these personnel for device B. At this time, the frequency recording module can send a strengthening training suggestion instruction for device B to the terminal device 106 of the trainer, so that the trainer can focus on strengthening the demonstration of device B or increase the training content during the training.

[0277] Assuming that for device C, it is found through analysis that visitors click the most repeatedly, it means that this part of the content is the most concerned, so it can be displayed more strongly. At this time, the usage frequency recording module can generate a suggestion instruction for enhanced display and send it to the terminal device 106 of the person in charge of device C, so that the person in charge of the device can increase the display frequency of this part of the content when setting the display. Or the suggestion instruction for enhanced display can be sent to the intelligent push module 103, and the intelligent push module 103 can give priority to displaying this part of the content or increase the display frequency when performing intelligent push of information.

[0278] Similarly, if the number of clicks on device C is the least, it indicates that this part of information is not of interest. If it is to be of interest, the management personnel or relevant operation and maintenance personnel need to re-describe or plan this part of the content. At this time, the frequency recording module can generate content optimization instructions and send them to the terminal device 106 of the person in charge of device C, so that the person in charge of the device can adjust and optimize this part of the content, and send the updated content to the data module 104 for data replacement. When the information is displayed next time, the modified content is displayed, and the effect analysis is performed based on the click situation of the modified content. If the number of clicks increases, it means that the modification is effective. If the number of clicks remains almost unchanged or decreases, it means that modification and optimization adjustments are still needed.

[0279] For example, Figures 5(a) and 5(b) both show a rendered image displayed by a terminal device 106 provided in an embodiment of the present invention. It can be seen from Figures 5(a) and 5(b) that a user can simultaneously see a real object and virtual information mapped on the real object and representing the current operating status of the real object through the terminal device 106.

[0280] It should be noted that, in order to enable those skilled in the art to better distinguish data of the same type but with different actual meanings, the embodiments of the present invention use terms such as first and second to distinguish and explain some technical features. The terms such as first and second are only used to distinguish data and have no other special meanings. It can be understood that the present invention is not limited to this.

[0281] In an embodiment of the present invention, an information management system for a micro-nano processing experimental platform is provided. Wherein, the information management system at least includes an identification and tracking module, an alarm module, an intelligent push module, a data module, a rendering module and at least one terminal device. In combination with the information management method provided by the present invention, firstly, through the interactive settings of the alarm module and the violation triggering and alarm push, more targeted and efficient personnel management can be performed on the relevant personnel on site. Thus, on the one hand, the activities of the personnel in the laboratory are obtained through the identification and tracking module and the alarm module, and when the violation occurs, multiple persons in charge are quickly determined, which simplifies the personnel management of the laboratory, and when problems arise, different persons in charge can be determined in time to avoid management risks. On the other hand, the intelligent push module is used to intelligently push and display more interesting information to relevant personnel for different personnel types, realizing differentiated intelligent screening and push based on personnel types, which has better information display effect and improves the user information viewing experience compared with the current information display method.

[0282] Reference Figure 6 , shows a flowchart of the steps of an information management method for a micro-nano processing experimental platform provided by an embodiment of the present invention, and the method may specifically include the following steps:

[0283] Step 601, obtaining the personnel identity data and identity information data of the micro-nano processing laboratory personnel corresponding to the terminal device, and automatically matching the virtual display data related to the personnel identity data;

[0284] Step 602, superimposing the virtual display data on the real-time relative position of the real scene image to obtain a rendered image;

[0285] Step 603, obtaining and tracking in real time the activity locations of the micro-nano processing laboratory personnel in the monitoring area and the operation behaviors of the equipment;

[0286] Step 604: When the activity location of the micro-nano processing laboratory personnel is determined based on the identity information data, and / or the operation behavior of the equipment meets the preset violation conditions, a violation alarm message is generated and sent to the person in charge and the terminal device.

[0287] As for the method embodiment, since it is basically similar to the aforementioned device embodiment, the description is relatively simple, and the relevant parts may refer to the partial description of the aforementioned device embodiment.

[0288] In an embodiment of the present invention, a corresponding information management method is provided based on the information management system of the proposed micro-nano processing experimental platform. First, the identity information data of the micro-nano processing laboratory personnel in the monitoring area is obtained through the identification and tracking module, and the activity location and operation behavior of the micro-nano processing laboratory personnel on the equipment are tracked in real time; when the activity location is judged based on the identity information data, and / or the operation behavior of the equipment meets the preset violation conditions, the violation alarm information is generated by the alarm module and sent to the person in charge. Therefore, through the interactive settings of the alarm module and the violation triggering and alarm push, more targeted and efficient personnel management can be carried out for the relevant personnel on site. Secondly, the personnel identity data corresponding to the terminal device is obtained through the intelligent push module, and the virtual display data related to the personnel identity data is automatically matched from the data module; the virtual display data is superimposed on the real-time relative position of the real-scene image through the rendering module to obtain the rendered image. Therefore, on the one hand, the activities of personnel in the laboratory can be obtained through the identification and tracking module and the alarm module, and multiple persons in charge can be quickly identified when violations occur, which simplifies the personnel management of the laboratory. When problems arise, different persons in charge can be identified in time to avoid management risks. On the other hand, the smart push module can automatically push and display information of greater interest to relevant personnel based on different personnel types, realizing differentiated smart screening and push based on personnel type. Compared with the current information display method, it has better information display effect and improves the user information viewing experience.

[0289] Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working processes of the systems, devices and units described above can refer to the corresponding processes in the aforementioned method embodiments and will not be repeated here.

[0290] In the several embodiments provided by the present invention, it should be understood that the disclosed systems, devices and methods can be implemented in other ways. For example, the device embodiments described above are only schematic. For example, the division of the units is only a logical function division. There may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be an indirect coupling or communication connection through some interfaces, devices or units, which can be electrical, mechanical or other forms.

[0291] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0292] In addition, each functional unit in each embodiment of the present invention may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit. The above-mentioned integrated unit may be implemented in the form of hardware or in the form of software functional units.

[0293] If the integrated unit is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention is essentially or the part that contributes to the prior art or all or part of the technical solution can be embodied in the form of a software product. The computer software product is stored in a storage medium, including several instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the method described in each embodiment of the present invention. The aforementioned storage medium includes: U disk, mobile hard disk, read-only memory (ROM), random access memory (RAM), disk or optical disk and other media that can store program codes.

[0294] As described above, the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features thereof may be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. An information management system for a micro-nano processing experimental platform, characterized in that: The information management system includes an identification and tracking module, an alarm module, an intelligent push module, a data module, a rendering module and at least one terminal device; wherein, The identification and tracking module is used to obtain the identity information data of the micro-nano processing laboratory personnel in the monitoring area, and track the activity locations and equipment operation behaviors of the micro-nano processing laboratory personnel in real time; The alarm module is used to generate violation alarm information and send it to the person in charge when the activity location is determined based on the identity information data and / or the operation behavior on the device meets the preset violation condition; An intelligent push module, used to obtain the personnel identity data corresponding to the terminal device, and automatically match the virtual display data related to the personnel identity data from the data module; The rendering module is used to superimpose the virtual display data on the real-time relative position of the real-scene image to obtain a rendered image; The intelligent push module is specifically used for: Determine real-scene images of all real target objects within the current visual range of the terminal device, and at least one virtual anchor point corresponding to the real-scene images for displaying information; For each of the virtual anchor points, the virtual anchor point data corresponding to the virtual anchor point is retrieved from the data module, and the first type of display data, the second type of display data, the third type of display data and the fourth type of display data are respectively generated according to the virtual anchor point data; the first type of display data includes the equipment operation data, the equipment management estimation data, and the data being viewed by the visitors or trainers within the current visual range of the terminal device; the second type of display data includes different types of recommendation information generated by visitors based on different personnel background characteristics; the third type of display data includes different levels of training content data generated by trainees based on different ability levels; the fourth type of display data includes different levels of equipment-related data generated by equipment users based on different equipment operation levels; The personnel identity data includes the personnel type of the personnel corresponding to the terminal device, and the intelligent push module is specifically used for: When the personnel type is a manager, the first type of display data is used as virtual display data that is automatically pushed; When the person type is a visitor, the person background information of the visitor is obtained, and the information with the highest recommendation matching degree with the person background information is screened out from the second type of display data as the virtual display data to be automatically pushed; When the personnel type is a trainee, the current ability level of the trainee is obtained, and training content data matching the current ability level is filtered out from the third type of display data as the automatically pushed virtual display data; When the personnel type is a device user, the device operation level of the device user is obtained, and device-related data matching the device operation level is filtered from the fourth category of display data as the automatically pushed virtual display data.

2. The information management system according to claim 1, characterized in that: The identity information data includes the current reservation scope and equipment use qualification information of the micro-nano processing laboratory personnel, and the alarm module is specifically used for: When it is detected that the micro-nano processing laboratory personnel are outside the current reservation range and within the range that requires reservation, an out-of-range violation alarm message is generated; When it is detected that the micro-nano processing laboratory personnel are operating other equipment that does not match the equipment use qualification information, an equipment violation operation alarm message is generated.

3. The information management system according to claim 2, characterized in that: The intelligent push module is specifically used for: Extracting first type of identity information from the identity information data of the personnel in the micro-nano processing laboratory, and displaying the first type of identity information at a preset position of the real-life image of the personnel in the micro-nano processing laboratory through the rendering module; When the violation alarm information is received, the second type of identity information is determined according to the preset display rules, and the second type of identity information is displayed at a preset position of the real-life image of the micro-nano processing laboratory personnel through the rendering module.

4. The information management system according to claim 1, characterized in that: The intelligent push module is specifically used for: When the violation alarm information is received, a violation warning range corresponding to the violation alarm information is determined, and violation analysis is performed on the violation behaviors within the violation warning range based on preset risk conditions to determine the corresponding violation behavior level; Retrieving warning display information and warning display form matching the violation level from the data module; The warning display information is used as the second type of identity information, and the second type of identity information is displayed in the warning display form at a preset position of the real-life image of the micro-nano processing laboratory personnel through the rendering module.

5. The information management system according to claim 3, characterized in that: The identity information data includes the identity type and basic identity information of the micro-nano processing laboratory personnel, the responsible persons include the first type responsible person and the second type responsible person, and the alarm module is also used for: Extract the person in charge corresponding to the equipment currently reserved by the micro-nano processing laboratory personnel from the basic identity information as the first type of person in charge; According to the identity type, the second type of person in charge corresponding to the micro-nano processing laboratory personnel is determined.

6. The information management system according to claim 5, characterized in that: The alarm module is specifically used for: When the micro-nano processing laboratory personnel are first-category personnel, the first target device corresponding to the current location of the first-category personnel is identified and determined by the identification and tracking module, and the person in charge corresponding to the first target device is obtained from the data module as the second-category person in charge; When the micro-nano processing laboratory personnel are second-category personnel, the associated person in charge on campus is extracted from the basic identity information of the second-category personnel, and the second target device corresponding to the current location of the second-category personnel and the nearest person are identified and determined through the identification and tracking module, and the person in charge corresponding to the second target device is obtained from the data module, and the person in charge corresponding to the second target device and the nearest person are regarded as second-category persons in charge.

7. The information management system according to claim 6, characterized in that: The alarm module is also used for: Pushing the violation alarm information to the first category person in charge and the second category person in charge; When the violation alert information contains a violation related to the currently scheduled device, the first-category person in charge is regarded as the main person in charge; When the violation alarm information contains a violation related to the target device corresponding to the current location of the micro-nano processing laboratory personnel, the second-category person in charge is regarded as the main person in charge.

8. The information management system according to claim 7, characterized in that: The alarm module is specifically used for: When the micro-nano processing laboratory personnel are first-category personnel, the violation alarm information is pushed to the first-category person in charge and the person in charge corresponding to the first target device; When the micro-nano processing laboratory personnel are of the second category, the violation alarm information is pushed to the first category person in charge, the on-campus related person in charge, the person in charge corresponding to the second target device and the person closest to the person, and at the same time, the information of the on-campus related person in charge is pushed to the person closest to the person.

9. The information management system according to claim 8, characterized in that: The second category of personnel includes enterprise users and suppliers. The equipment use qualification information corresponding to the enterprise users includes equipment independent operation qualification information. The equipment use qualification information corresponding to the suppliers includes professional qualification certificate information. The alarm module is specifically used for: When it is detected that the enterprise user is operating other equipment that does not match the equipment independent operation qualification information, or when it is detected that the supplier is operating other equipment that does not match the professional qualification certificate information, an equipment illegal operation alarm message is generated.

10. The information management system according to claim 5, characterized in that: The alarm module is also used for: When receiving a temporary authorization instruction or a violation cancellation instruction sent by the first type of person in charge or the second type of person in charge through the terminal device, the violation alarm is cancelled and the violation information is recorded.

11. The information management system according to claim 5, characterized in that: The identification and tracking module is also used for: When receiving a temporary operation equipment request from the micro-nano processing laboratory personnel, determining the temporary request equipment corresponding to the temporary operation equipment request and the person in charge of the temporary request equipment; Acquire the reservation application data of the temporary request device from the data module, and determine the current reservation status of the temporary request device through the reservation application data; When it is detected that the temporary requested device is not currently in use, the temporary operation device request is sent to the person in charge of the currently operated device and the person in charge of the temporary requested device; After receiving the temporary application approval instruction returned by the person in charge corresponding to the currently operating device and / or the person in charge of the temporary request device, the temporary application approval information is sent to the terminal device of the micro-nano processing laboratory personnel, and the equipment operation information of the micro-nano processing laboratory personnel is recorded.

12. The information management system according to claim 11, characterized in that: The identification and tracking module is also used for: When it is detected that there is an idle device that is not currently executing a task in the monitoring area, temporary authorization opening information of the idle device is generated; The temporary authorization opening information is sent to the terminal devices of all micro-nano processing laboratory personnel in the monitoring area, so that the micro-nano processing laboratory personnel in need can send equipment use requests to the person in charge corresponding to the idle equipment.

13. The information management system according to claim 5, characterized in that: The identification and tracking module is also used for: When receiving a temporary permission opening request from the micro-nano processing laboratory personnel, determining the temporary opening area and the person in charge of the temporary opening area corresponding to the temporary permission opening request; Sending the temporary permission opening request to the person in charge of the temporary opening area; After receiving the temporary opening pass instruction returned by the person in charge of the temporary opening area, the temporary opening pass information is sent to the terminal device of the micro-nano processing laboratory personnel, and the equipment operation information and / or visit record information of the micro-nano processing laboratory personnel are recorded.

14. The information management system according to claim 1, characterized in that: The intelligent push module is specifically used for: When receiving an information viewing instruction sent by the visitor through the corresponding terminal device, determining the display information corresponding to the information viewing instruction and the level of the person who can view it, and obtaining the viewing authority level of the visitor; Matching the viewable personnel level with the view permission level, and when the match fails, pushing a view failure reminder message to the terminal device of the visitor, and at the same time pushing an information view request to the corresponding school-related person in charge of the visitor; When the match is successful, or when an information viewing pass instruction is received from the school-related person in charge, the display information is obtained from the data module as the currently displayed virtual display data.

15. The information management system according to claim 1, characterized in that: The intelligent push module is specifically used for: When receiving a temporary viewing instruction sent by the trainee through the corresponding terminal device, determining the training content information and the viewable capability level corresponding to the temporary viewing instruction; Matching the viewable capability level with the current capability level, and when the match fails, pushing a viewing failure reminder message to the trainee's terminal device, and simultaneously pushing a temporary viewing request to the trainer corresponding to the trainee; When the level matching is successful, or when a temporary viewing pass instruction returned by the training teacher is received, information corresponding to the temporary viewing pass instruction is obtained from the data module as the currently displayed virtual display data.

16. The information management system according to claim 1, characterized in that: The information management system further includes a voice interaction module, which is used to: When detecting that the micro-nano processing laboratory personnel issues a voice control instruction, extracting the target control entity and key action information from the voice control instruction; Retrieving the equipment use permission of the micro-nano processing laboratory personnel from the data module, and judging whether the micro-nano processing laboratory personnel has the control permission of the target control entity according to the equipment use permission; If yes, the target control entity is controlled by the information management system to execute the action corresponding to the key action information; otherwise, the alarm information is pushed to the person in charge of the target control entity through the alarm module.

17. The information management system according to claim 16, characterized in that: The voice interaction module is also used for: After the alarm information is pushed to the person in charge of the target control entity through the alarm module, if a control authorization instruction returned by the person in charge of the target control entity is received, the target control entity is controlled by the information management system to perform an action corresponding to the key action information, and the control information is recorded; If a control authorization rejection instruction is received from the person in charge of the target control entity, the voice control instruction is determined to be invalid, and an invalid prompt message is sent to the micro-nano processing laboratory personnel; If the authorization instruction returned by the person in charge of the target control entity is not received within the preset waiting time period, the upper level person in charge corresponding to the person in charge of the target control entity is obtained from the data module, and an alarm message is pushed to the upper level person in charge.

18. The information management system according to claim 1, characterized in that: The information management system further includes a usage frequency recording module, which is used to: Recording the usage frequency data of each device used in the micro-nano processing experimental platform; For any of the used devices, extracting the personnel type record information of the used device from the use frequency data, wherein the personnel type record information records the use frequency or click-to-view times of the used device by different types of micro-nano processing laboratory personnel; According to the personnel type record information, the target personnel type with the highest usage frequency or click-to-view times for the used device is determined, and based on the target personnel type, the management and operation plan of the used device is adjusted accordingly.

19. An information management method for a micro-nano processing experimental platform, characterized in that: include: Obtaining the personnel identity data and identity information data of the micro-nano processing laboratory personnel corresponding to the terminal device, and automatically matching the virtual display data related to the personnel identity data; Superimposing the virtual display data on the real-time relative position of the real-scene image to obtain a rendered image; Obtain and track in real time the activity locations of the micro-nano processing laboratory personnel in the monitoring area and their operation behaviors on the equipment; When the activity location of the micro-nano processing laboratory personnel is determined based on the identity information data, and / or the operation behavior of the equipment meets the preset violation conditions, a violation alarm message is generated and sent to the person in charge and the terminal device; The personnel identity data includes the personnel type of the person corresponding to the terminal device; and the automatic matching of virtual display data related to the personnel identity data includes: Determine real-scene images of all real target objects within the current visual range of the terminal device, and at least one virtual anchor point corresponding to the real-scene images for displaying information; For each of the virtual anchor points, the virtual anchor point data corresponding to the virtual anchor point is retrieved, and according to the virtual anchor point data, the first type of display data, the second type of display data, the third type of display data and the fourth type of display data are respectively generated; the first type of display data includes the equipment operation data, the equipment management estimated data, and the data being viewed by the visitors or trainers within the current visual range of the terminal device; the second type of display data includes different types of recommendation information generated by visitors based on different personnel background characteristics; the third type of display data includes different levels of training content data generated by trainees based on different ability levels; the fourth type of display data includes different levels of equipment-related data generated by equipment users based on different equipment operation levels; When the personnel type is a manager, the first type of display data is used as virtual display data that is automatically pushed; When the person type is a visitor, the person background information of the visitor is obtained, and the information with the highest recommendation matching degree with the person background information is screened out from the second type of display data as the virtual display data to be automatically pushed; When the personnel type is a trainee, the current ability level of the trainee is obtained, and training content data matching the current ability level is filtered out from the third type of display data as the automatically pushed virtual display data; When the personnel type is a device user, the device operation level of the device user is obtained, and device-related data matching the device operation level is filtered from the fourth category of display data as the automatically pushed virtual display data.

20. A terminal device, the terminal device being used for the information management system of the micro-nano processing experimental platform according to any one of claims 1 to 18, characterized in that: The terminal device is used for: Acquire the identity information data of the micro-nano processing laboratory personnel from the data module, and perform personnel binding with the micro-nano processing laboratory personnel based on the identity information data; Locate the spatial position and angle of the terminal device in the real environment in real time, and obtain the real-scene image of the real target object within the current visual range through its own camera; Interacting information with the identification and tracking module, and / or the alarm module, and / or the intelligent push module, and / or the data module; Displaying in real time the rendered image obtained after being processed by the rendering module; Wherein, the personnel identity data includes the personnel type of the personnel corresponding to the terminal device; Determine real-scene images of all real target objects within the current visual range of the terminal device, and at least one virtual anchor point corresponding to the real-scene images for displaying information; For each of the virtual anchor points, the virtual anchor point data corresponding to the virtual anchor point is retrieved, and according to the virtual anchor point data, the first type of display data, the second type of display data, the third type of display data and the fourth type of display data are respectively generated; the first type of display data includes the equipment operation data, the equipment management estimated data, and the data being viewed by the visitors or trainers within the current visual range of the terminal device; the second type of display data includes different types of recommendation information generated by visitors based on different personnel background characteristics; the third type of display data includes different levels of training content data generated by trainees based on different ability levels; the fourth type of display data includes different levels of equipment-related data generated by equipment users based on different equipment operation levels; When the personnel type is a manager, the first type of display data is used as virtual display data that is automatically pushed; When the person type is a visitor, the person background information of the visitor is obtained, and the information with the highest recommendation matching degree with the person background information is screened out from the second type of display data as the virtual display data to be automatically pushed; When the personnel type is a trainee, the current ability level of the trainee is obtained, and training content data matching the current ability level is filtered out from the third type of display data as the automatically pushed virtual display data; When the personnel type is a device user, the device operation level of the device user is obtained, and device-related data matching the device operation level is filtered from the fourth category of display data as the automatically pushed virtual display data.

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