A particle beam processing device based on an excitation coil

Abstract

The present disclosure provides a particle beam processing device based on an excitation coil, which can be applied to the fields of particle accelerators and charged particle beam transport. The particle beam processing device based on the excitation coil includes: a housing provided with a magnet accommodation cavity in which an N-pole magnet is arranged, and the N-pole magnet is used to generate a basic magnetic field, where N is an even number greater than or equal to 2; an excitation coil sleeved outside the magnet accommodation cavity, which is used to adjust the magnetic field intensity of the superimposed magnetic field formed by the basic magnetic field and the adjustable magnetic field according to the change condition of the adjustable magnetic field when the adjustable magnetic field generated by the excitation coil changes; a magnetic pole head is arranged between the magnet accommodation cavity and the central area of the particle beam processing device, and the magnetic pole head is used to guide the magnetic field direction of the superimposed magnetic field so as to adjust the particle beam injected into the particle beam processing device to obtain an adjusted particle beam.

Description

Technical Field

[0001] The present disclosure relates to the field of particle accelerators and the field of charged particle beam transport, and particularly to a particle beam processing device based on an exciting coil. Background Art

[0002] With the development of various particle accelerator devices, the design, manufacturing, and application technologies of electromagnets have become increasingly mature. Moreover, the design, manufacturing, and application technologies of various magnets regarding permanent magnets are also under development.

[0003] In the process of implementing the inventive concept of the present disclosure, the inventors found that the manufacturing process of permanent magnet magnets is complex, and the speed of magnetic field modulation for permanent magnet magnets is slow, which limits the scope of use of permanent magnet magnets. Summary of the Invention

[0004] In view of the above problems, the present disclosure provides a particle beam processing device based on an exciting coil.

[0005] According to one aspect of the present disclosure, there is provided a particle beam processing device based on an exciting coil, including: a housing provided with a magnet accommodation cavity, in which an N-pole magnet is arranged for generating a basic magnetic field, where N is an even number greater than or equal to 2; an exciting coil sleeved outside the magnet accommodation cavity for adjusting the magnetic field intensity of a superimposed magnetic field formed by the basic magnetic field and the adjustable magnetic field according to the change condition of the adjustable magnetic field when the adjustable magnetic field generated by the exciting coil changes; a magnetic pole head is arranged between the magnet accommodation cavity and the central region of the particle beam processing device for guiding the magnetic field direction of the superimposed magnetic field so as to adjust the particle beam incident on the particle beam processing device to obtain an adjusted particle beam.

[0006] According to an embodiment of the present disclosure, the N-pole magnet includes N sub-magnets, the N sub-magnets include a first magnet corresponding to a first magnetic pole and a second magnet corresponding to a second magnetic pole, and the first magnetic pole and the second magnetic pole are opposite magnetic poles to each other; there are N magnet accommodation cavities which are distributed at the edge position of the housing; the N magnet accommodation cavities are respectively used for accommodating the N sub-magnets, and the magnetic poles of the sub-magnets accommodated in adjacent magnet accommodation cavities are different.

[0007] According to an embodiment of the present disclosure, when the N - pole magnet is a two - pole magnet, the two sub - magnets include one first magnet corresponding to the first magnetic pole and one second magnet corresponding to the second magnetic pole. There are two magnet accommodation cavities, and the two magnet accommodation cavities are oppositely arranged at the edge positions of the housing. The two magnet accommodation cavities are respectively used to accommodate the two sub - magnets; when the N - pole magnet is a four - pole magnet and the housing is square, the four sub - magnets include two first magnets corresponding to the first magnetic pole and two second magnets corresponding to the second magnetic pole. There are four magnet accommodation cavities, and the four magnet accommodation cavities are distributed at the four vertex positions of the square housing. The four magnet accommodation cavities are respectively used to accommodate the four sub - magnets; when the N - pole magnet is a six - pole magnet, the six sub - magnets include three first magnets corresponding to the first magnetic pole and three second magnets corresponding to the second magnetic pole. There are six magnet accommodation cavities, and the six magnet accommodation cavities are distributed at the edge positions of the housing at a predetermined interval. The six magnet accommodation cavities are respectively used to accommodate the six sub - magnets.

[0008] According to an embodiment of the present disclosure, the excitation coil is located between the N - pole magnet and the pole head; the excitation coil includes a first excitation coil and a second excitation coil. The first excitation coil is sleeved outside the magnet accommodation cavity where the first sub - magnet is located, and the second excitation coil is sleeved outside the magnet accommodation cavity where the second sub - magnet is located; the direction of the current flowing through the first excitation coil is opposite to the direction of the current flowing through the second excitation coil.

[0009] According to an embodiment of the present disclosure, the direction of the adjustable magnetic field generated by the excitation coil includes a first magnetic field direction and a second magnetic field direction; wherein, the first magnetic field direction is the direction from the center of the device to the N - pole magnet; the second magnetic field direction is the direction from the N - pole magnet to the center of the device.

[0010] According to an embodiment of the present disclosure, when the direction of the current flowing through the excitation coil changes, the magnitude relationship between the superimposed magnetic field and the basic magnetic field changes.

[0011] According to an embodiment of the present disclosure, in response to the direction of the current flowing through the first excitation coil changing from a first direction to a second direction and the direction of the current flowing through the second excitation coil changing from a second direction to a first direction, the direction of the adjustable magnetic field generated by the first excitation coil changes from a second magnetic field direction to a first magnetic field direction, the direction of the adjustable magnetic field generated by the second excitation coil changes from a first magnetic field direction to a second magnetic field direction, and the magnetic field strength of the superimposed magnetic field changes from being greater than the base magnetic field to being less than the base magnetic field; in response to the direction of the current flowing through the first excitation coil changing from a second direction to a first direction and the direction of the current flowing through the second excitation coil changing from a first direction to a second direction, the direction of the adjustable magnetic field generated by the first excitation coil changes from a first magnetic field direction to a second magnetic field direction, the direction of the adjustable magnetic field generated by the second excitation coil changes from a second magnetic field direction to a first magnetic field direction, and the magnetic field strength of the superimposed magnetic field changes from being less than the base magnetic field to being greater than the base magnetic field.

[0012] According to an embodiment of the present disclosure, the material of the housing includes soft iron material; the N - pole magnet is a permanent magnet, and the material of the N - pole magnet includes soft iron material; the material of the magnet accommodating cavity includes non - magnetic metal material; the particle beam processing device further includes a cooling device, and the cooling device includes an air - cooling device or a water - cooling device. The air - cooling device is provided in the particle beam processing device corresponding to the first power, and the water - cooling device is provided in the particle beam processing device corresponding to the second power, and the second power is higher than the first power.

[0013] According to an embodiment of the present disclosure, the size parameters of the N - pole magnet are determined by the following method: according to the obtained magnetic field modulation requirement range, determine the target material of the permanent magnet for providing the base magnetic field for the particle beam processing device; by adjusting the size parameters of the permanent magnet model belonging to the target material, obtain the target planar size parameters corresponding to the magnetic field modulation requirement range; by adjusting the adjustable magnetic field generated by the excitation coil located at a predetermined position, adjust the superimposed magnetic field corresponding to the base magnetic field generated by the permanent magnet model with the target planar size parameters to obtain the magnetic field modulation range corresponding to the permanent magnet model with the target planar size parameters; obtain the target magnet length information corresponding to the magnetic field modulation range; when the magnetic field strength of the permanent magnet model with the target magnet length information and the target planar size parameters meets a predetermined condition, determine the target magnet length information and the target planar size parameters as the size parameters of the N - pole magnet.

[0014] According to an embodiment of the present disclosure, by adjusting the adjustable magnetic field generated by an excitation coil located at a predetermined position, the superimposed magnetic field corresponding to the basic magnetic field generated by a permanent magnet model with target planar dimension parameters is adjusted to obtain a magnetic field modulation range corresponding to the permanent magnet model with target planar dimension parameters, including: by adjusting the adjustable magnetic field generated by the excitation coil located at the predetermined position, the superimposed magnetic field corresponding to the basic magnetic field generated by the permanent magnet model with target planar dimension parameters is adjusted to obtain the maximum magnetic field modulation value and the minimum magnetic field modulation value corresponding to the permanent magnet model; according to the maximum magnetic field modulation value and the minimum magnetic field modulation value, the magnetic field modulation range is obtained; according to the obtained magnetic field modulation requirement range, the target material of the permanent magnet for providing the basic magnetic field for the particle beam processing device is determined, including: according to the intermediate value of the magnetic field modulation requirement range, the target material of the permanent magnet for providing the basic magnetic field for the particle beam processing device is determined.

[0015] According to an embodiment of the present disclosure, by using the adjustable magnetic field generated by the excitation coil to control the magnetic field intensity of the superimposed magnetic field formed by the basic magnetic field and the adjustable magnetic field, thereby retaining the original fast modulation characteristic of the excitation coil. Based on this, by quickly regulating the excitation current, the fast modulation of the superimposed magnetic field can be realized, improving the magnetic field modulation rate and reducing the resources consumed for modulating the N - pole magnet.

[0016] Moreover, for the N - pole magnet of the embodiment of the present disclosure, since only soft iron materials are used for the magnetic poles around the effective aperture and the permanent magnet is not located close to the effective aperture, in a high - radiation environment, the N - pole magnet of the embodiment of the present disclosure can have a long service life. Based on this, the N - pole magnet of the embodiment of the present disclosure has good magnetic field quality indicators, and the service life of the N - pole magnet affected by beam current radiation will not be significantly reduced compared with that of the excitation coil.

[0017] Moreover, the N - pole magnet of the present disclosure with high remanence and high coercivity can be miniaturized, which is beneficial to the development of high - magnetic - field magnets with fast modulation functions. For a light source storage ring with a small beam energy modulation, a permanent magnet material with high remanence and high coercivity can be selected to design and manufacture the N - pole magnet. Based on this, a small current can be used to modulate the magnetic field of the small - size high - field N - pole magnet, thereby reducing the power consumption for magnetic field modulation of the particle beam processing device.

[0018] Moreover, since the N - pole magnet of the present disclosure can be manufactured and assembled in a method similar to the electromagnet manufacturing and assembly technology, the difficulty of manufacturing and assembling the permanent magnet is reduced.

[0019] Based on this, the magnetic field fast modulation technology of the permanent magnet of the present disclosure can form a new industrial direction. Description of the Drawings

[0020] Through the following description of the embodiments of the present disclosure with reference to the accompanying drawings, the above content and other objects, features, and advantages of the present disclosure will become clearer. In the drawings:

[0021] Figure 1 Schematically shows a schematic diagram of a particle beam processing apparatus according to a first embodiment of the present disclosure.

[0022] Figure 2 Schematically shows a schematic diagram of a particle beam processing apparatus according to a second embodiment of the present disclosure.

[0023] Figure 3a Schematically shows that in the case where the residual magnetic field B of the quadrupole magnet according to the embodiment of the present disclosure r is 0.32 T, and the good field W of plus or minus five ten-thousandths gf is greater than 30 mm, the distribution of the magnetic field gradient k c (x) in the central horizontal plane of the quadrupole magnet.

[0024] Figure 3b Schematically shows that in the case where the residual magnetic field B of the quadrupole magnet made of iron-barium-cobalt material according to the embodiment of the present disclosure r is 0.32 T, the magnetic field gradient k c in the central horizontal plane of the quadrupole magnet and the good field W of plus or minus five ten-thousandths gf versus the change relationship of the adjustment current I.

[0025] Figure 4a Schematically shows that in the case where the residual magnetic field B of the quadrupole magnet according to the embodiment of the present disclosure r is 0.42 T, and the good field W of plus or minus five ten-thousandths gf is greater than 30 mm, the distribution of the magnetic field gradient k c (x) in the central horizontal plane of the quadrupole magnet.

[0026] Figure 4b Schematically shows that in the case where the residual magnetic field B of the quadrupole magnet made of iron-barium-cobalt material according to the embodiment of the present disclosure r is 0.42 T, the magnetic field gradient k c in the central horizontal plane of the quadrupole magnet and the good field W of plus or minus five ten-thousandths gf versus the change relationship of the adjustment current I.

[0027] Figure 5a Schematically shows that in the case where the residual magnetic field B of the quadrupole magnet according to the embodiment of the present disclosure r is 0.52 T, and the good field W of plus or minus five ten-thousandths gf is greater than 30 mm, the distribution of the magnetic field gradient k c (x) in the central horizontal plane of the quadrupole magnet.

[0028] Figure 5b Schematically shows the remanent magnetic field B of a quadrupole magnet made of iron-barium-cobalt material, r when B is 0.52 T, the magnetic field gradient k at the central horizontal plane of the quadrupole magnet c and the good field W of plus or minus five ten-thousandths gf The schematic diagram of the variation relationship with the adjustment current I.

[0029] Figure 6a Schematically shows the remanent magnetic field B of a quadrupole magnet according to an embodiment of the present disclosure r when B is 0.62 T, and the good field W of plus or minus five ten-thousandths gf is greater than 30 mm, the distribution of the magnetic field gradient k(x) at the central horizontal plane of the quadrupole magnet c The schematic diagram.

[0030] Figure 6b Schematically shows the remanent magnetic field B of a quadrupole magnet made of iron-barium-cobalt material, r when B is 0.62 T, the magnetic field gradient k at the central horizontal plane of the quadrupole magnet c and the good field W of plus or minus five ten-thousandths gf The schematic diagram of the variation relationship with the adjustment current I.

[0031] Figure 7a Schematically shows the remanent magnetic field B of a quadrupole magnet according to an embodiment of the present disclosure r when B is 0.72 T, and the good field W of plus or minus five ten-thousandths gf is greater than 30 mm, the distribution of the magnetic field gradient k(x) at the central horizontal plane of the quadrupole magnet c The schematic diagram.

[0032] Figure 7b Schematically shows the remanent magnetic field B of a quadrupole magnet made of iron-barium-cobalt material, r when B is 0.72 T, the magnetic field gradient k at the central horizontal plane of the quadrupole magnet c and the good field W of plus or minus five ten-thousandths gf The schematic diagram of the variation relationship with the adjustment current I.

[0033] Figure 8a Schematically shows the remanent magnetic field B of a quadrupole magnet according to an embodiment of the present disclosure r when B is 0.82 T, and the good field W of plus or minus five ten-thousandths gf is greater than 30 mm, the distribution of the magnetic field gradient k(x) at the central horizontal plane of the quadrupole magnet c The schematic diagram.

[0034] Figure 8bSchematically shows the residual magnetic field B of a quadrupole magnet made of iron-barium-cobalt material, r when the residual magnetic field B is 0.82 T, the magnetic field gradient k at the central horizontal plane of the quadrupole magnet c and the good field W of plus or minus five ten-thousandths gf Schematic diagram of the variation relationship with the adjustment current I.

[0035] Figure 9a Schematically shows the residual magnetic field B of a quadrupole magnet according to an embodiment of the present disclosure r when it is 0.92 T, and the good field W of plus or minus five ten-thousandths gf is greater than 30 mm, the distribution of the magnetic field gradient k(x) at the central horizontal plane of the quadrupole magnet c Schematic diagram.

[0036] Figure 9b Schematically shows the residual magnetic field B of a quadrupole magnet made of iron-barium-cobalt material according to an embodiment of the present disclosure r when the residual magnetic field B is 0.92 T, the magnetic field gradient k at the central horizontal plane of the quadrupole magnet c and the good field W of plus or minus five ten-thousandths gf Schematic diagram of the variation relationship with the adjustment current I.

[0037] Figure 10a Schematically shows the residual magnetic field B of a quadrupole magnet according to an embodiment of the present disclosure r when it is 1.02 T, and the good field W of plus or minus five ten-thousandths gf is greater than 30 mm, the distribution of the magnetic field gradient k(x) at the central horizontal plane of the quadrupole magnet c Schematic diagram.

[0038] Figure 10b Schematically shows the residual magnetic field B of a quadrupole magnet made of iron-barium-cobalt material according to an embodiment of the present disclosure r when the residual magnetic field B is 1.02 T, the magnetic field gradient k at the central horizontal plane of the quadrupole magnet c and the good field W of plus or minus five ten-thousandths gf Schematic diagram of the variation relationship with the adjustment current I.

[0039] Figure 11a Schematically shows the residual magnetic field B of a quadrupole magnet according to an embodiment of the present disclosure r when it is 1.12 T, and the good field W of plus or minus five ten-thousandths gf is greater than 30 mm, the distribution of the magnetic field gradient k(x) at the central horizontal plane of the quadrupole magnet c Schematic diagram.

[0040] Figure 11b Schematically shows the residual magnetic field B of a quadrupole magnet made of iron-barium-cobalt material according to an embodiment of the present disclosure rWhen it is 1.12T, the magnetic field gradient k of the quadrupole magnet in the central horizontal plane c and the good field W of plus or minus five ten-thousandths gf Schematic diagram of the variation relationship with the adjusted current I.

[0041] Figure 12a Schematically shows the residual magnetic field B of the quadrupole magnet according to an embodiment of the present disclosure r is 1.22T, and the good field W of plus or minus five ten-thousandths gf is greater than 30 mm, the magnetic field gradient k of the quadrupole magnet in the central horizontal plane c (x) Distribution status schematic diagram.

[0042] Figure 12b Schematically shows the residual magnetic field B of the quadrupole magnet made of iron-barium-cobalt material according to an embodiment of the present disclosure r is 1.22T, the magnetic field gradient k of the quadrupole magnet in the central horizontal plane c and the good field W of plus or minus five ten-thousandths gf Schematic diagram of the variation relationship with the adjusted current I.

[0043] Figure 13a Schematically shows the residual magnetic field B of the quadrupole magnet according to an embodiment of the present disclosure r is 1.32T, and the good field W of plus or minus five ten-thousandths gf is greater than 30 mm, the magnetic field gradient k of the quadrupole magnet in the central horizontal plane c (x) Distribution status schematic diagram.

[0044] Figure 13b Schematically shows the residual magnetic field B of the quadrupole magnet made of iron-barium-cobalt material according to an embodiment of the present disclosure r is 1.32T, the magnetic field gradient k of the quadrupole magnet in the central horizontal plane c and the good field W of plus or minus five ten-thousandths gf Schematic diagram of the variation relationship with the adjusted current I.

[0045] Figure 14a Schematically shows the residual magnetic field B of the quadrupole magnet according to an embodiment of the present disclosure r is 1.42T, and the good field W of plus or minus five ten-thousandths gf is greater than 30 mm, the magnetic field gradient k of the quadrupole magnet in the central horizontal plane c (x) Distribution status schematic diagram.

[0046] Figure 14b Schematically shows the residual magnetic field B of the quadrupole magnet made of iron-barium-cobalt material according to an embodiment of the present disclosure r is 1.42T, the magnetic field gradient k of the quadrupole magnet in the central horizontal plane cand the good field W with a positive and negative tolerance of five ten-thousandths gf Schematic diagram of the relationship with the change of the adjusted current I.

[0047] Figure 15a Schematically shows the residual magnetic field B of the quadrupole magnet according to an embodiment of the present disclosure r is 1.52 T, and the good field W with a positive and negative tolerance of five ten-thousandths gf is greater than 30 mm, the distribution of the magnetic field gradient k c (x) of the quadrupole magnet.

[0048] Figure 15b Schematically shows the residual magnetic field B of the quadrupole magnet made of iron barium cobalt material according to an embodiment of the present disclosure r is 1.52 T, the magnetic field gradient k at the central horizontal plane c and the good field W with a positive and negative tolerance of five ten-thousandths gf Schematic diagram of the relationship with the change of the adjusted current I.

[0049] Figure 16 Schematically shows the magnetization curve of PMQA30 of the medium and low power DC magnetic field technology according to an embodiment of the present disclosure and the relationship with the residual magnetic field B of the quadrupole magnet r Schematic diagram of the relationship with the adjusted current I.

[0050] Figure 17 Schematically shows the residual magnetic field B of the quadrupole magnet of the medium and low power DC magnetic field technology according to an embodiment of the present disclosure r Schematic diagram of the relationship with the magnetic field gradient k in the central region of the particle beam processing device. Detailed implementation manners

[0051] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. However, it should be understood that these descriptions are merely exemplary and are not intended to limit the scope of the present disclosure. In the following detailed description, for the sake of explanation, many specific details are set forth to provide a comprehensive understanding of the embodiments of the present disclosure. However, obviously, one or more embodiments can also be implemented without these specific details. In addition, in the following description, descriptions of well-known structures and technologies are omitted to avoid unnecessarily confusing the concepts of the present disclosure.

[0052] The terms used herein are merely for describing specific embodiments and are not intended to limit the present disclosure. The terms "including", "comprising" and the like used herein indicate the presence of the described features, steps, operations and / or components, but do not exclude the presence or addition of one or more other features, steps, operations or components.

[0053] All terms used herein (including technical and scientific terms) have the meanings commonly understood by those of ordinary skill in the art, unless otherwise defined. It should be noted that the terms used herein should be interpreted as having a meaning consistent with the context of this specification, and should not be interpreted in an idealized or overly rigid manner.

[0054] In cases where expressions similar to "at least one of A, B, and C, etc." are used, generally, it should be interpreted according to the meaning that those of ordinary skill in the art usually understand this expression (for example, "a system having at least one of A, B, and C" should include, but not be limited to, a system having only A, only B, only C, having A and B, having A and C, having B and C, and / or having A, B, and C, etc.).

[0055] In the process of implementing the inventive concept of the present disclosure, the inventors found that the manufacturing process of permanent magnet magnets is complex, and the speed of magnetic field modulation of permanent magnet magnets is slow, which limits the scope of use of permanent magnet magnets.

[0056] Based on this, the inventors found that for permanent magnet magnets, high-power excitation current and constant-temperature cooling water are not required, but when the magnetic gap or aperture of the permanent magnet magnet remains unchanged, magnetic field modulation requires the assistance of mechanical devices and does not have a fast modulation feedback function. Moreover, the permanent magnet parts in the area close to the beam aperture are greatly affected by the radiation environment.

[0057] In addition, the inventors found that the design, manufacturing, and application technologies of electromagnets are mature. During the use of electromagnets, high-power excitation current and constant-temperature cooling water are required, and the use of electromagnets will affect the storage beam with high stability. For example, an electromagnet may include an excitation coil, etc.

[0058] Based on this, the inventors found that if the structure of the permanent magnet magnet that does not require excitation power is appropriately adjusted and the magnetic field modulation method of the electromagnet is added to the permanent magnet magnet to form a current excitation modulation device based on the magnetic field of the permanent magnet magnet, it is beneficial to the stable operation of the low-emittance and high-intensity beam. For example, the magnetic field modulation method of the electromagnet may be a method of modulating the magnetic field by controlling the excitation current flowing through the electromagnet.

[0059] In view of this, embodiments of the present disclosure provide a particle beam processing device based on an excitation coil, including: a housing provided with a magnet accommodation cavity, in which an N-pole magnet is arranged, and the N-pole magnet is used to generate a basic magnetic field, where N is an even number greater than or equal to 2. An excitation coil is sleeved outside the magnet accommodation cavity and is used to adjust the magnetic field strength of the superimposed magnetic field formed by the basic magnetic field and the adjustable magnetic field according to the change condition of the adjustable magnetic field generated by the excitation coil when the adjustable magnetic field changes. A magnetic pole head is arranged between the magnet accommodation cavity and the central area of the particle beam processing device, and the magnetic pole head is used to guide the magnetic field direction of the superimposed magnetic field so as to adjust the particle beam incident on the particle beam processing device to obtain an adjusted particle beam.

[0060] Figure 1 FIG. schematically shows a schematic diagram of a particle beam processing device according to a first embodiment of the present disclosure.

[0061] Figure 2 FIG. schematically shows a schematic diagram of a particle beam processing device according to a second embodiment of the present disclosure.

[0062] As Figure 1 shown, the particle beam processing device of this embodiment includes a housing 110, a magnet accommodation cavity 120, an excitation coil 130, an N-pole magnet 140, and a magnetic pole head 150. It should be noted that the housing 110 and the magnetic pole head 150 may be integrated together or separated, and the present disclosure does not limit this. It should also be noted that Figure 1 the same pattern is used to schematically represent the same structure. And, as Figure 2 shown, in some embodiments, the particle beam processing device may further include, but is not limited to, a base 160, etc.

[0063] The housing 110 is provided with a magnet accommodation cavity 120. For example, the magnet accommodation cavity 120 may be integrated inside the housing 110. For example, the magnet accommodation cavity 120 is composed of the housing 110 and an inner housing. The material of the housing 110 may include soft iron materials, etc. The material of the inner housing must be a non-magnetic metal material. Based on this, the material of the magnet accommodation cavity 120 of the present disclosure includes non-magnetic metal materials. To represent the difference in materials, different filling patterns are used to schematically represent the housing 110 and the inner housing. In addition, the same filling pattern is used to schematically represent the same structure in the drawings of the present disclosure.

[0064] An N-pole magnet 140 is arranged in the magnet accommodation cavity 120. The N-pole magnet 140 is a permanent magnet, and the material of the N-pole magnet 140 includes soft iron materials. The N-pole magnet 140 is used to generate a basic magnetic field. Where N is an even number greater than or equal to 2. For example, N may be 2, 4, or 6, etc.

[0065] For example, the N - pole magnet 140 includes N sub - magnets. The N sub - magnets include a first magnet corresponding to the first magnetic pole and a second magnet corresponding to the second magnetic pole. The first magnetic pole and the second magnetic pole are opposite magnetic poles. For example, one of the first magnetic pole and the second magnetic pole can be the S - pole, and the other can be the N - pole.

[0066] For example, there are N magnet accommodating cavities 120. The N magnet accommodating cavities 120 are distributed at the edge position of the housing 110. The N magnet accommodating cavities 120 are respectively used to accommodate N sub - magnets, that is, each magnet accommodating cavity 120 accommodates one sub - magnet. The magnetic poles of the sub - magnets accommodated in adjacent magnet accommodating cavities 120 are different.

[0067] For example, when the N - pole magnet 140 is a two - pole magnet, the 2 sub - magnets include 1 first magnet corresponding to the first magnetic pole and 1 second magnet corresponding to the second magnetic pole. There are 2 magnet accommodating cavities 120. The 2 magnet accommodating cavities 120 are oppositely arranged at the edge position of the housing 110. The 2 magnet accommodating cavities 120 are respectively used to accommodate the 2 sub - magnets.

[0068] For example, when the N - pole magnet 140 is a four - pole magnet, the 4 sub - magnets include 2 first magnets corresponding to the first magnetic pole and 2 second magnets corresponding to the second magnetic pole. There are 4 magnet accommodating cavities 120. The 4 magnet accommodating cavities 120 are distributed at the edge position of the housing 110. The 4 magnet accommodating cavities 120 are respectively used to accommodate the 4 sub - magnets. The intervals between the 4 magnet accommodating cavities 120 can be the same.

[0069] For example, when the N - pole magnet 140 is a four - pole magnet and the housing 110 is square, the 4 sub - magnets include 2 first magnets corresponding to the first magnetic pole and 2 second magnets corresponding to the second magnetic pole. There are 4 magnet accommodating cavities 120. The 4 magnet accommodating cavities 120 are distributed at the 4 vertex positions of the square housing 110. The 4 magnet accommodating cavities 120 are respectively used to accommodate the 4 sub - magnets.

[0070] For example, when the N - pole magnet 140 is a six - pole magnet, the 6 sub - magnets include 3 first magnets corresponding to the first magnetic pole and 3 second magnets corresponding to the second magnetic pole. There are 6 magnet accommodating cavities 120. The 6 magnet accommodating cavities 120 are distributed at the edge position of the housing 110 at a predetermined interval. The 6 magnet accommodating cavities 120 are respectively used to accommodate the 6 sub - magnets. The predetermined interval can be set according to actual needs, and the present disclosure does not limit this.

[0071] The exciting coil 130 is sleeved outside the magnet accommodating cavity 120. For example, the exciting coil 130 is located between the N - pole magnet 140 and the magnetic pole head 150. Thus, the exciting coil 130 can adjust the magnetic field intensity of the superimposed magnetic field within the effective aperture of the particle beam processing device to the greatest extent. Based on this, the housing 110 made of soft iron material can act as a magnetic cage to restrain the magnetic field inside the particle beam processing device from leaking out, thereby improving the modulation effect of the adjustable magnetic field of the exciting coil on the superimposed magnetic field.

[0072] For example, the number of turns of the exciting coil 130 outside the n - th magnet accommodating cavity 120 among the N magnet accommodating cavities 120 can be an even number. n is a positive integer less than or equal to N.

[0073] For example, the exciting coil 130 includes a first exciting coil and a second exciting coil. The first exciting coil is sleeved outside the magnet accommodating cavity 120 where the first sub - magnet is located, and the second exciting coil is sleeved outside the magnet accommodating cavity 120 where the second sub - magnet is located. The direction of the current flowing through the first exciting coil is opposite to the direction of the current flowing through the second exciting coil. For example, the direction of the current flowing through the exciting coil 130 can include a first direction and a second direction. For example, the first direction can be the clockwise direction, and the second direction can be the counter - clockwise direction.

[0074] For example, the direction of the adjustable magnetic field generated by the exciting coil 130 includes a first magnetic field direction and a second magnetic field direction. Among them, the first magnetic field direction is the direction from the center of the device to the N - pole magnet 140. The second magnetic field direction is the direction from the N - pole magnet 140 to the center of the device.

[0075] For example, when the direction of the basic magnetic field generated by the first magnet is the first magnetic field direction and the current flowing through the first exciting coil is in the counter - clockwise direction, the magnetic field intensity of the superimposed magnetic field is less than the magnetic field intensity of the basic magnetic field.

[0076] For example, when the direction of the basic magnetic field generated by the first magnet is the second magnetic field direction and the current flowing through the first exciting coil is in the counter - clockwise direction, the magnetic field intensity of the superimposed magnetic field is greater than the magnetic field intensity of the basic magnetic field.

[0077] For example, when the direction of the basic magnetic field generated by the first magnet is the first magnetic field direction and the current flowing through the first exciting coil is in the clockwise direction, the magnetic field intensity of the superimposed magnetic field is greater than the magnetic field intensity of the basic magnetic field.

[0078] For example, when the direction of the basic magnetic field generated by the first magnet is the second magnetic field direction and the current flowing through the first exciting coil is in the clockwise direction, the magnetic field intensity of the superimposed magnetic field is less than the magnetic field intensity of the basic magnetic field.

[0079] It should be noted that the law of the magnetic field intensity of the basic magnetic field generated by the second magnet and the superimposed magnetic field corresponding to the second magnet can refer to that of the first magnet, and the present disclosure will not elaborate here.

[0080] For example, the excitation coil 130 is used to adjust the magnetic field intensity of the superimposed magnetic field formed by the basic magnetic field and the adjustable magnetic field according to the change condition of the adjustable magnetic field when the adjustable magnetic field generated by the excitation coil 130 changes. For example, the excitation coil 130 can be used to adjust the superimposed magnetic field within the effective aperture of the particle beam processing device.

[0081] When the direction of the current flowing through the excitation coil 130 changes, the magnitude relationship between the superimposed magnetic field and the basic magnetic field changes.

[0082] For example, in response to the direction of the current flowing through the first excitation coil changing from the first direction to the second direction, and the direction of the current flowing through the second excitation coil changing from the second direction to the first direction, the direction of the adjustable magnetic field generated by the first excitation coil changes from the second magnetic field direction to the first magnetic field direction, the direction of the adjustable magnetic field generated by the second excitation coil changes from the first magnetic field direction to the second magnetic field direction, and the magnetic field intensity of the superimposed magnetic field changes from being greater than the basic magnetic field to being less than the basic magnetic field.

[0083] In response to the direction of the current flowing through the first excitation coil changing from the second direction to the first direction, and the direction of the current flowing through the second excitation coil changing from the first direction to the second direction, the direction of the adjustable magnetic field generated by the first excitation coil changes from the first magnetic field direction to the second magnetic field direction, the direction of the adjustable magnetic field generated by the second excitation coil changes from the second magnetic field direction to the first magnetic field direction, and the magnetic field intensity of the superimposed magnetic field changes from being less than the basic magnetic field to being greater than the basic magnetic field.

[0084] Based on this, by changing the current flowing through the first excitation coil and the current flowing through the second excitation coil, the magnetic field intensity of the superimposed magnetic field can be changed while keeping the shape of the superimposed magnetic field unchanged.

[0085] For example, the particle beam processing device further includes a cooling device. The cooling device includes an air-cooling device or a water-cooling device. The air-cooling device is arranged in the particle beam processing device corresponding to the first power, and the water-cooling device is arranged in the particle beam processing device corresponding to the second power, and the second power is higher than the first power. In some embodiments, the particle beam processing device can be provided with both an air-cooling device and a water-cooling device, which will not be elaborated here.

[0086] For example, the first power may refer to a low power, and the second power may refer to a medium power. Based on this, the particle beam processing device corresponding to the first power may be a device with an exciting current approaching 0, such as a synchrotron radiation light source and a storage ring. The particle beam processing device corresponding to the second power may be a device with a relatively high power, such as a damping ring or a collider.

[0087] Based on this, for the particle beam processing device corresponding to the first power, the exciting coil 130 can avoid using water cooling for cooling, saving the resources for cooling the exciting coil 130. Based on this, for the N - pole magnet 140 with a small magnetic field modulation amount, only a very small exciting current is required to achieve rapid magnetic field modulation. Therefore, a low - rated modulation current can be adopted, and no cooling water is needed, retaining the characteristic of the permanent magnet not requiring cooling water and the stability characteristic of the permanent magnet. This can be called the low - voltage DC magnetic field technology. For the N - pole magnet 140 with a large magnetic field modulation amount, a slightly larger exciting current can be used to achieve a magnetic field with a large modulation amount and rapid modulation of this magnetic field. This can be called the medium - voltage DC magnetic field technology. Thus, the electric power loss of the particle beam processing device in the embodiments of the present disclosure is much lower than the power consumption of a mature electromagnet.

[0088] A magnetic pole head 150 is provided between the magnet accommodating cavity 120 and the central region of the particle beam processing device. For example, the central region may be the geometric center of the particle beam processing device. For example, the particle beam may pass through the particle beam processing device from this central region.

[0089] The magnetic pole head 150 is used to guide the magnetic field direction of the superimposed magnetic field so as to adjust the particle beam incident into the particle beam processing device to obtain an adjusted particle beam. For example, the magnetic pole head 150 may be used to guide the superimposed magnetic field to converge into the effective aperture of the particle beam processing device. For example, the number of the magnetic pole heads 150 may be the same as the number of the magnet accommodating cavities 120.

[0090] According to the embodiments of the present disclosure, by using the adjustable magnetic field generated by the exciting coil 130 to control the magnetic field strength of the superimposed magnetic field formed by the basic magnetic field and the adjustable magnetic field, thus, the original rapid modulation characteristic of the exciting coil 130 is retained. Based on this, rapid modulation of the superimposed magnetic field can be achieved by rapidly regulating the exciting current, improving the magnetic field modulation rate and reducing the resources required for modulating the N - pole magnet 140.

[0091] Moreover, for the N - pole magnet according to the embodiments of the present disclosure, since only soft iron materials are used for the magnetic poles around the effective aperture and the permanent magnet is not located close to the effective aperture, the N - pole magnet according to the embodiments of the present disclosure can have a long service life in a high - radiation environment. Based on this, the N - pole magnet 140 according to the embodiments of the present disclosure has good magnetic - field quality indicators, and the service life of the N - pole magnet 140 affected by beam radiation will not be significantly reduced compared with that of the excitation coil 130.

[0092] Moreover, the N - pole magnet 140 with high remanence and high coercivity according to the present disclosure can be miniaturized, which is beneficial to the development of high - magnetic - field magnets with fast - modulation functions. For a light - source storage ring with a small beam - energy modulation, a permanent - magnet material with high remanence and high coercivity can be selected to design and manufacture the N - pole magnet 140. Based on this, a small - current modulation can be used to modulate the magnetic field of the small - size high - field N - pole magnet 140, thereby reducing the power consumption for magnetic - field modulation of the particle - beam processing device.

[0093] Moreover, since the N - pole magnet 140 according to the present disclosure can be manufactured and assembled in a method similar to the manufacturing and assembly technology of electromagnets, the difficulty of manufacturing and assembling the permanent - magnet magnet is reduced.

[0094] Based on this, the magnetic - field fast - modulation technology of the permanent - magnet magnet according to the present disclosure can form a new industrial direction.

[0095] To better understand the content of the present disclosure, the content of the embodiments of the present disclosure will be elaborated through specific embodiments below.

[0096] Combined Figures 3a to 16 , taking the first PMQA30 as an example below, the data of the magnetic field of the magnet that can be modulated with a small excitation current are calculated. Among them, PM (Permanent Magnet) in PMQA30 can represent a permanent magnet, Q can represent a quadrupole magnet, A can represent adjustable, and 30 can represent the effective aperture of the quadrupole magnet. Since the excitation current can be excited in two different directions to modulate the magnetic field of the permanent magnet, the embodiments of the present disclosure illustrate with a modulation amplitude of about ±30 T / m in the neighborhood of the magnetic - field gradient.

[0097] Based on the present disclosure, for a synchrotron radiation light source storage ring with a small modulation of the magnetic field of the magnet, a small current can be used to modulate the magnetic field. For a collider ring with a large modulation of the magnetic field of the magnet, an excitation current with a slightly larger magnitude can be used for magnetic field modulation. Since excitation can be performed in both positive and negative current directions, the power consumption of the excitation current can be reduced by at least approximately 75%. Moreover, in the particle beam processing device according to the embodiments of the present disclosure, only soft iron materials similar to those of the electromagnets designed with mature technologies are used for the magnetic poles around the effective aperture, and there are no permanent magnets near the effective aperture. Such a design can enable the permanent magnets in the embodiments of the present disclosure to have a long lifespan in a high-radiation environment. The following presents the calculation data taking the first PMQA30 as an example.

[0098] The radial distribution of the zero-current magnetic field gradient in the central horizontal plane of the quadrupole magnet of this PMQA30, the relationship between the magnetic field gradient and the adjustment current, and the variation in the good field region of plus or minus five ten-thousandths are shown in Figure 2 a to Figure 15b . Among them, the good field region of plus or minus five ten-thousandths may refer to the range of variation of the magnetic field gradient not exceeding plus or minus five ten-thousandths, which may be equivalent to the gradient of the higher-order magnetic field not exceeding plus or minus five ten-thousandths.

[0099] Based on this, by comparing Figure 3a , Figure 4a , Figure 5a , Figure 6a , Figure 7a , Figure 8a , Figure 9a , Figure 10a , Figure 11a , Figure 12a , Figure 13a , Figure 14a and Figure 15a , it can be seen the different magnetic field gradient variation conditions corresponding to the remanent magnetisms of different quadrupole magnets. By comparing Figure 3b , Figure 4b , Figure 5b , Figure 6b , Figure 7b , Figure 8b , Figure 9b , Figure 10b , Figure 11b , Figure 12b , Figure 13b , Figure 14b and Figure 15b , it can be seen the variation relationships of the magnetic field gradient k c in the central horizontal plane of the particle beam processing device and the good field W gf of plus or minus five ten-thousandths with the adjustment current I.

[0100] Based on this, from Figure 16It can be seen that when the remanence of the quadrupole magnet is 1.42 T and 1.52 T, the magnetization curve enters the non-linear state in the neighborhood of the excitation current of 12 kA. In other regions, the magnetization curve has a good linear state, and the positive and negative 0.05% good field state is greater than or equal to 30 mm. Therefore, it can be seen that the magnetic field change of the permanent magnet quadrupole magnet with magnetic field modulation by the excitation current in the embodiment of the present disclosure is good.

[0101] And, as Figure 17 shown, compared with Figure 16 of, Figure 17 the abscissa is the remanence, and the ordinate is the magnetic field gradient value at the geometric center of the quickly adjustable quadrupole magnet of the embodiment of the present disclosure. In Figure 17 , the excitation currents corresponding to the same straight line are the same, and the middle straight line reflects the change of the magnetic field gradient at the geometric center with the remanence under zero excitation current. Based on this, it can be seen from Figure 17 that under the condition of applying different excitation currents, a good linear relationship can be maintained between the remanence and the magnetic field gradient value at the geometric center of the quickly adjustable quadrupole magnet. It should be noted that for the straight line of I = 11.768 kA, in the range of Br = 1.4~1.5 T, the linearity of this straight line is relatively poor, and this situation is related to the properties of the soft iron material, which can be solved by replacing the soft iron material.

[0102] According to the embodiment of the present disclosure, the size parameters of the N-pole magnet 140 are determined by the following method: according to the obtained magnetic field modulation requirement range, determine the target material of the permanent magnet that provides the basic magnetic field for the particle beam processing device. By adjusting the size parameters of the permanent magnet model belonging to the target material, obtain the target plane size parameters corresponding to the magnetic field modulation requirement range. By adjusting the adjustable magnetic field generated by the excitation coil 130 located at a predetermined position, adjust the superimposed magnetic field corresponding to the basic magnetic field generated by the permanent magnet model with the target plane size parameters, and obtain the magnetic field modulation range corresponding to the permanent magnet model with the target plane size parameters. Obtain the target magnet length information corresponding to the magnetic field modulation range. When the magnetic field intensity of the permanent magnet model with the target magnet length information and the target plane size parameters meets the predetermined conditions, determine the target magnet length information and the target plane size parameters as the size parameters of the N-pole magnet 140.

[0103] According to the embodiment of the present disclosure, the magnetic field modulation requirement range may refer to the modulation range of the required magnetic field intensity. The specific value of the magnetic field modulation requirement range can be determined according to actual needs, and the present disclosure does not limit this. According to this magnetic field modulation requirement range, the material of a suitable permanent magnet can be queried. Thus, the material of the N-pole magnet 140 can be determined.

[0104] According to an embodiment of the present disclosure, the permanent magnet model belonging to the target material may be a two-dimensional plane model. The magnetic field intensity of the magnetic field corresponding to the two-dimensional plane model can be adjusted by adjusting the size parameters of the two dimensions of the two-dimensional plane model, so that the target plane size parameters corresponding to the magnetic field modulation requirement range can be determined.

[0105] An exciting coil 130 may be provided at a predetermined position around the permanent magnet model. The predetermined position may include the magnetic poles of the permanent magnet and the yoke position, etc. Thus, the adjustable magnetic field generated by the exciting coil 130 and the basic magnetic field generated by the permanent magnet model can form a superimposed magnetic field.

[0106] By adjusting the current density, value, and direction of the exciting current of the exciting coil 130, and adjusting the magnetic field intensity of the adjustable magnetic field generated by the exciting coil 130, the magnetic field intensity of the superimposed magnetic field can be adjusted. For example, the value of the exciting current may include a positive value or a negative value. Thus, the magnetic field modulation range corresponding to the permanent magnet model with the target plane size parameters can be obtained. The magnetic field modulation range is the magnetic field value when no exciting current is applied, which can be called the magnetic field value of zero current.

[0107] The target magnet length information input by the user can be obtained and used as the parameter of the third dimension of the permanent magnet model.

[0108] After converting from a two-dimensional permanent magnet model to a three-dimensional permanent magnet model, the magnetic field intensity of the permanent magnet model will change. Based on this, 3D (Dimension) calculation and magnetic field longitudinal integration calculation can be performed based on the permanent magnet model with the target plane size parameters to adjust the parameters of the three dimensions of the permanent magnet model until the magnetic field intensity of the permanent magnet model meets the predetermined conditions. Thus, the size parameters of the N-pole magnet 140 can be obtained. The predetermined condition may be a predetermined magnetic field intensity value set based on the engineering design requirements, and the present disclosure does not limit this.

[0109] For example, by adjusting the adjustable magnetic field generated by the exciting coil 130 located at the predetermined position, the superimposed magnetic field corresponding to the basic magnetic field generated by the permanent magnet model with the target plane size parameters is adjusted to obtain the magnetic field modulation range corresponding to the permanent magnet model with the target plane size parameters, including: by adjusting the adjustable magnetic field generated by the exciting coil 130 located at the predetermined position, the superimposed magnetic field corresponding to the basic magnetic field generated by the permanent magnet model with the target plane size parameters is adjusted to obtain the maximum magnetic field modulation value and the minimum magnetic field modulation value corresponding to the permanent magnet model. According to the maximum magnetic field modulation value and the minimum magnetic field modulation value, the magnetic field modulation range is obtained.

[0110] For example, according to the obtained magnetic field modulation requirement range, determining the target material of the permanent magnet for providing the basic magnetic field for the particle beam processing device includes: determining the target material of the permanent magnet for providing the basic magnetic field for the particle beam processing device according to the intermediate value of the magnetic field modulation requirement range.

[0111] So far, the embodiments of the present disclosure have been described in detail with reference to the accompanying drawings. It should be noted that, in the accompanying drawings or the main text of the specification, the implementation manners that are not illustrated or described are all forms known to those of ordinary skill in the art and are not described in detail. In addition, the above definitions of each element and method are not limited to the specific structures, shapes, or manners mentioned in the embodiments, and those of ordinary skill in the art can make simple changes or replacements to them.

[0112] Throughout the drawings, the same elements are represented by the same or similar reference numerals. When it may cause confusion in the understanding of the present disclosure, the conventional structures or configurations will be omitted.

[0113] And the shapes and sizes of the components in the figures do not reflect the actual size and proportion, but only illustrate the content of the embodiments of the present disclosure. In addition, in the claims, any reference signs placed between parentheses shall not be construed as limiting the claims.

[0114] Unless otherwise known to the contrary, the numerical parameters in this specification and the appended claims are approximate values and can be changed according to the required characteristics obtained through the content of the present disclosure. Specifically, all the numbers representing the contents of components, reaction conditions, etc. used in the specification and the claims should be understood to be modified by the term "about" in all cases. Furthermore, the word "comprising" does not exclude the existence of elements or steps not listed in the claims. The word "a" or "an" preceding an element does not exclude the existence of a plurality of such elements.

[0115] The ordinal numbers used in the specification and the claims, such as "first", "second", "third", etc., are used to modify the corresponding elements, and they do not mean that the elements have any ordinal numbers in themselves, nor do they represent the order of one element and another element or the order in the manufacturing method. The use of these ordinal numbers is only to clearly distinguish one element with a certain name from another element with the same name.

[0116] The algorithms and displays provided herein are not inherently related to any particular computer, virtual system, or other device. Various general-purpose systems can also be used in conjunction with the revelations based herein. According to the above description, the structures required to construct such systems are obvious. In addition, the present disclosure is not directed to any specific programming language. It should be understood that the content of the present disclosure described herein can be implemented using various programming languages, and the description of the specific language above is for disclosing the best implementation manner of the present disclosure.

[0117] The present disclosure can be implemented by means of hardware including several different elements and by means of a suitably programmed computer. Each component embodiment of the present disclosure can be implemented in hardware, or in software modules running on one or more processors, or in a combination thereof. Those skilled in the art should understand that a microprocessor or a digital signal processor (DSP) can be used in practice to implement some or all of the functions of some or all of the components in the relevant devices according to the embodiments of the present disclosure. The present disclosure can also be implemented as a device or apparatus program (e.g., a computer program and a computer program product) for performing part or all of the methods described herein. Such a program implementing the present disclosure can be stored on a computer-readable medium or can be in the form of one or more signals.

[0118] Those skilled in the art can understand that the modules in the devices in the embodiments can be adaptively changed and arranged in one or more devices different from the embodiments. The modules or units or components in the embodiments can be combined into one module or unit or component, and in addition, they can be divided into multiple sub-modules or sub-units or sub-components. Except that at least some of such features and / or processes or units are mutually exclusive, any combination can be adopted to combine all the features disclosed in this specification (including the accompanying claims, abstract and drawings) and all the processes or units of any method or device so disclosed. Unless otherwise explicitly stated, each feature disclosed in this specification (including the accompanying claims, abstract and drawings) can be replaced by an alternative feature providing the same, equivalent or similar purpose. And, in the unit claims listing several devices, several of these devices can be embodied by the same hardware item.

[0119] Similarly, it should be understood that, in order to streamline the present disclosure and help understand one or more of the various disclosed aspects, in the above description of the exemplary embodiments of the present disclosure, the various features of the present disclosure are sometimes grouped together into a single embodiment, figure, or description thereof. However, the disclosed method should not be construed as reflecting the intention that the claimed present disclosure requires more features than those expressly recited in each claim. Rather, as reflected in the following claims, the disclosed aspects lie in less than all the features of the single foregoing disclosed embodiment. Thus, the claims following the detailed description are hereby expressly incorporated into the detailed description, where each claim itself serves as a separate embodiment of the present disclosure.

[0120] The specific embodiments described above further elaborate on the purpose, technical solutions, and beneficial effects of the present disclosure. It should be understood that the above are only specific embodiments of the present disclosure and are not used to limit the present disclosure. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present disclosure shall be included within the protection scope of the present disclosure.

Claims

1. A particle beam processing device based on an excitation coil, comprising: A housing provided with a magnet accommodating cavity, in which an N - pole magnet is arranged, and the N - pole magnet is used to generate a basic magnetic field, where N is an even number greater than or equal to 2; An excitation coil sleeved outside the magnet accommodating cavity, which is used to adjust the magnetic field strength of the superimposed magnetic field formed by the basic magnetic field and the adjustable magnetic field according to the change condition of the adjustable magnetic field generated by the excitation coil when the adjustable magnetic field changes; A magnetic pole head is arranged between the magnet accommodating cavity and the central area of the particle beam processing device, and the magnetic pole head is used to guide the magnetic field direction of the superimposed magnetic field so as to adjust the particle beam injected into the particle beam processing device to obtain an adjusted particle beam; Among them, the size parameters of the N - pole magnet are determined by the following method: According to the obtained magnetic field modulation requirement range, determine the target material of the permanent magnet used to provide the basic magnetic field for the particle beam processing device; By adjusting the size parameters of the permanent magnet model belonging to the target material, obtain the target plane size parameters corresponding to the magnetic field modulation requirement range; By adjusting the adjustable magnetic field generated by the excitation coil located at a predetermined position, adjust the superimposed magnetic field corresponding to the basic magnetic field generated by the permanent magnet model with the target plane size parameters to obtain the magnetic field modulation range corresponding to the permanent magnet model with the target plane size parameters; Obtain the target magnet length information corresponding to the magnetic field modulation range; When the magnetic field strength of the permanent magnet model with the target magnet length information and the target plane size parameters meets the predetermined conditions, determine the target magnet length information and the target plane size parameters as the size parameters of the N - pole magnet.

2. The particle beam processing apparatus according to claim 1, wherein, The N - pole magnet includes N sub - magnets, and the N sub - magnets include a first magnet corresponding to the first magnetic pole and a second magnet corresponding to the second magnetic pole, and the first magnetic pole and the second magnetic pole are opposite magnetic poles to each other; There are N magnet accommodating cavities, and the N magnet accommodating cavities are distributed at the edge position of the housing; The N magnet accommodating cavities are respectively used to accommodate the N sub - magnets, and the magnetic poles of the sub - magnets accommodated in adjacent magnet accommodating cavities are different.

3. The particle beam processing device according to claim 2, wherein, When the N - pole magnet is a two - pole magnet, the 2 sub - magnets include 1 first magnet corresponding to the first magnetic pole and 1 second magnet corresponding to the second magnetic pole, there are 2 magnet accommodating cavities, and the 2 magnet accommodating cavities are oppositely arranged at the edge position of the housing, and the 2 magnet accommodating cavities are respectively used to accommodate the 2 sub - magnets; Or When the N - pole magnet is a four - pole magnet and the housing is square, the 4 sub - magnets include 2 first magnets corresponding to the first magnetic pole and 2 second magnets corresponding to the second magnetic pole, there are 4 magnet accommodating cavities, and the 4 magnet accommodating cavities are distributed at the 4 vertex positions of the square housing, and the 4 magnet accommodating cavities are respectively used to accommodate the 4 sub - magnets; Or When the N - pole magnet is a six - pole magnet, the six sub - magnets include three first magnets corresponding to the first magnetic pole and three second magnets corresponding to the second magnetic pole. There are six magnet accommodation cavities, and the six magnet accommodation cavities are distributed at the edge position of the housing at a predetermined interval, and the six magnet accommodation cavities are respectively used to accommodate the six sub - magnets.

4. The particle beam processing apparatus according to claim 2, wherein, The exciting coil is located between the N - pole magnet and the magnetic pole head; The exciting coil includes a first exciting coil and a second exciting coil. The first exciting coil is sleeved outside the magnet accommodation cavity where the first magnet is located, and the second exciting coil is sleeved outside the magnet accommodation cavity where the second magnet is located; The direction of the current flowing through the first exciting coil is opposite to the direction of the current flowing through the second exciting coil.

5. The particle beam processing apparatus according to claim 4, wherein, The direction of the adjustable magnetic field generated by the exciting coil includes a first magnetic field direction and a second magnetic field direction; Among them, the first magnetic field direction is the direction from the center of the particle beam processing device to the N - pole magnet; The second magnetic field direction is the direction from the N - pole magnet to the center of the particle beam processing device.

6. The particle beam processing apparatus according to claim 5, wherein, When the direction of the current flowing through the exciting coil changes, the magnitude relationship between the superimposed magnetic field and the basic magnetic field changes.

7. The particle beam processing apparatus according to claim 6, wherein, In response to the direction of the current flowing through the first exciting coil changing from the first direction to the second direction, and the direction of the current flowing through the second exciting coil changing from the second direction to the first direction, the direction of the adjustable magnetic field generated by the first exciting coil changes from the second magnetic field direction to the first magnetic field direction, the direction of the adjustable magnetic field generated by the second exciting coil changes from the first magnetic field direction to the second magnetic field direction, and the magnetic field intensity of the superimposed magnetic field changes from being greater than the basic magnetic field to being less than the basic magnetic field; In response to the direction of the current flowing through the first exciting coil changing from the second direction to the first direction, and the direction of the current flowing through the second exciting coil changing from the first direction to the second direction, the direction of the adjustable magnetic field generated by the first exciting coil changes from the first magnetic field direction to the second magnetic field direction, the direction of the adjustable magnetic field generated by the second exciting coil changes from the second magnetic field direction to the first magnetic field direction, and the magnetic field intensity of the superimposed magnetic field changes from being less than the basic magnetic field to being greater than the basic magnetic field.

8. The particle beam processing apparatus according to claim 1, wherein, The material of the housing includes soft iron material; The material of the magnet accommodation cavity includes non - magnetic metal material; The N - pole magnet is a permanent magnet, and the material of the N - pole magnet includes soft iron material; The particle beam processing device further includes a cooling device. The cooling device includes an air - cooling device or a water - cooling device. The air - cooling device is arranged in the particle beam processing device corresponding to the first power, and the water - cooling device is arranged in the particle beam processing device corresponding to the second power, and the second power is higher than the first power.

9. According to the particle beam processing device of claim 1, wherein, Adjusting the superimposed magnetic field corresponding to the basic magnetic field generated by the permanent magnet model with the target plane size parameter by adjusting the adjustable magnetic field generated by the excitation coil located at the predetermined position, to obtain the magnetic field modulation range corresponding to the permanent magnet model with the target plane size parameter, includes: Adjusting the superimposed magnetic field corresponding to the basic magnetic field generated by the permanent magnet model with the target plane size parameter by adjusting the adjustable magnetic field generated by the excitation coil located at the predetermined position, to obtain the maximum magnetic field modulation value and the minimum magnetic field modulation value corresponding to the permanent magnet model; Obtaining the magnetic field modulation range according to the maximum magnetic field modulation value and the minimum magnetic field modulation value; Determining the target material of the permanent magnet for providing the basic magnetic field for the particle beam processing device according to the obtained magnetic field modulation requirement range, includes: Determining the target material of the permanent magnet for providing the basic magnetic field for the particle beam processing device according to the intermediate value of the magnetic field modulation requirement range.

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