A flame polishing method for quartz tube

Abstract

The present invention relates to the technical field of quartz tube polishing, and discloses a flame polishing method for quartz tubes, comprising the following steps: placing the quartz tube in a quartz tube installation unit for clamping; when the quartz tube is placed, the flame spray head can be driven to rotate and move around the quartz tube through a rotating moving unit; when the rotating moving unit is started, the limit loosening unit can be moved, and when it moves to a certain position, the limit loosening unit is loosened and unlocked, and one end of the quartz tube can be clamped. In the present invention, when the installation block continues to move, it can drive the first extrusion plate to squeeze the fixed plate fixedly installed on the third clamping block to move to the opposite side with the assistance of the second sliding mechanism, until the end of the side wall of the first extrusion plate is located at the opposite end of the third clamping block, and the flame spray head moves to the end of the quartz tube away from the turntable.

Description

Technical Field

[0001] The invention belongs to the technical field of quartz tube polishing, and in particular relates to a flame polishing method for a quartz tube. Background Art

[0002] Since quartz furnace tubes have a series of excellent properties, they are widely used in modern advanced semiconductor process technology; the fields of application cover various occasions such as semiconductor silicon wafers; among them, the quartz furnace tubes used in high-temperature processes such as annealing, oxidation, and diffusion are the most widely used.

[0003] In the quartz semiconductor industry, there are extremely high technical requirements for its polishing, and flame polishing is required to make the appearance of quartz products reach the quality requirements of crystal clear and close to zero defects;

[0004] However, when the existing quartz tube is polished, it is necessary to stably clamp the quartz tube. Therefore, when the quartz tube is flame-polished, the middle part without clamping is often polished first, and then the clamping mechanism is taken out, the clamping position is changed, and then the original clamping position of the quartz tube is polished. This will result in the flame being turned off and then turned on again when the quartz tube is flame-polished, so that the temperature of the quartz tube will change, which makes it easy for defects to appear during flame polishing.

[0005] In view of this, the present invention is proposed. Summary of the invention

[0006] In order to solve the technical problem that when the existing quartz tube is polished, since the quartz tube needs to be stably clamped, when the quartz tube is flame-polished, the middle part without clamping is polished first, and then the clamping position of the quartz tube is polished by taking out the clamping mechanism and changing the clamping position, which will cause the flame to be turned off and then turned on when the quartz tube is flame-polished, so that the temperature of the quartz tube will change, making it easy to have defects during flame polishing, the basic concept of the technical solution adopted by the present invention is:

[0007] A flame polishing method for a quartz tube comprises the following steps:

[0008] Step 1: Place the quartz tube into the quartz tube installation unit for clamping;

[0009] Step 2: After the quartz tube is placed, the flame spray head can be driven to rotate and move around the quartz tube by rotating the moving unit;

[0010] Step 3: When the rotating moving unit is started, the limit loosening unit can be moved, and when it moves to a certain position, the limit loosening unit is loosened and unlocked, and one end of the quartz tube can be clamped at the same time;

[0011] Step 4: When the limit loosening unit continues to move after moving to a certain position, it can drive the mobile clamping unit to move and drive the clamping mechanism at one end of the quartz tube to unlock;

[0012] The quartz tube mounting unit comprises a base, a first mounting plate and a second mounting plate are mounted above the base, the first mounting plate and the second mounting plate are symmetrical to each other, four supporting legs are fixedly mounted above the base, a workbench is fixedly mounted above the four supporting legs, a protective shell is arranged on a side wall opposite to the first mounting plate and the second mounting plate, a rectangular notch is opened in the middle of the workbench, a first sliding mechanism and a second sliding mechanism are arranged above the workbench, a first clamping block, a second clamping block and two third clamping blocks are arranged above the first sliding mechanism and the second sliding mechanism, respectively, a fixing plate is fixedly mounted on two opposite side walls of the two third clamping blocks, a first circular notch is opened on the side wall of the second mounting plate, an observation window is arranged on the front side of the protective shell, a sliding door is arranged on the rear side of the protective shell, a rotating cylinder is rotatably arranged on a side wall of the second mounting plate close to the workbench, a rotating cylinder is fixedly connected to a turntable on a side wall of the rotating cylinder away from the second mounting plate, a first inclined slide groove and a guide slide groove are opened on the turntable, and a second circular notch is opened in the middle of the turntable;

[0013] The rotating moving unit comprises a hydraulic cylinder, one end of the hydraulic cylinder is mounted on a first mounting plate, the output end of the hydraulic cylinder is fixedly connected to a top plate, a rotating mechanism is arranged in the middle of the bottom of the top plate, and the rotating mechanism comprises a rotating rod, mounting rods are fixedly mounted on the bottoms of both ends of the top plate, and pressing plates are fixedly connected to the bottoms of the two mounting rods respectively, the two mounting rods and the two pressing plates are symmetrical with each other, and the two pressing plates are slidably arranged on a workbench; a second ring is arranged on the workbench below the rotating mechanism, a flame spray head is fixedly mounted on the inner cavity of the second ring, a placing plate is fixedly mounted on one side of the rotating rod close to the two mounting rods at the bottom of the top plate, the two placing plates are symmetrical with each other, the bottoms of the two placing plates are fixedly connected to a mounting block, a connecting block is fixedly connected to an opposite side wall of the two placing plates, an opposite end of the two connecting blocks is slidably arranged on a guide rod, and a mounting groove is provided on an opposite side wall of the two mounting blocks;

[0014] The limit loosening unit comprises a movable rod, one end of which is provided with a rotating assembly, which is mounted on a first clamping block, the other end of which is arranged in an inner cavity of a mounting slot, and the movable rod is provided with limit plates on two opposite side walls of the inner cavity of the mounting slot, the two limit plates are respectively fixedly connected to the inner walls of the mounting slot, the two limit plates and the movable rod are provided with plug-in slots, and the inner cavity of the plug-in slot is provided with a rotating shaft, a rectangular cylinder is installed on one side wall of the inner cavity of the mounting slot, and a trapezoidal slot is provided at the bottom of the movable rod;

[0015] The movable card connection unit includes a support plate, which is concave. Positioning holes are provided on the opposite side walls of the support plate, and positioning rods are slidably arranged in the inner cavity of the positioning holes. The two positioning rods are symmetrical to each other. The bottoms of the two positioning rods are fixedly connected to the base. Inclined blocks are slidably arranged on the two positioning rods. The two inclined blocks are symmetrical to each other. The two inclined blocks are respectively installed on the bottom of the support plate. Inclined plates are respectively arranged on one side of the bottom of the two inclined blocks. The two inclined plates are symmetrical to each other.

[0016] As a preferred embodiment of the present invention, the first sliding mechanism includes two first sliding grooves, the two first sliding grooves are respectively opened on the workbench, the two first sliding grooves are symmetrical to each other, the first sliding blocks are slidably installed in the inner cavities of the two first sliding grooves, the first clamping block and the second clamping block are respectively fixedly connected above the two first sliding blocks, the first clamping block and the second clamping block are respectively fixedly connected with a connecting rod and a connecting rod on one side wall close to the turntable, the connecting rod and the connecting rod are respectively connected with a first ball and a second ball at one end away from the first clamping block and the second clamping block, and the first ball and the second ball are respectively slidably arranged in the first inclined sliding groove and the guide sliding groove.

[0017] As a preferred embodiment of the present invention, the second sliding mechanism includes two second sliding grooves, the two second sliding grooves are symmetrical to each other, the two second sliding grooves are respectively opened on the workbench, the inner cavities of the two second sliding grooves are both slidably installed with second sliders, and the opposite side walls of the two second sliders are respectively installed with strong extrusion springs, the two strong extrusion springs are symmetrical to each other, and the two strong extrusion springs are respectively fixedly connected to the inner wall of the second sliding groove at one end away from the second slider, and the third clamping blocks are respectively fixedly connected above the two second sliders.

[0018] As a preferred embodiment of the present invention, a bearing is provided at one end of the rotating rod, and the bearing is installed on the top plate, a driving gear and a first bevel gear are fixedly installed on the rotating rod, a rack is meshed and installed on one side wall of the driving gear, one end of the rack is fixedly connected to the first mounting plate, a second bevel gear is vertically meshed and installed on one side wall of the first bevel gear, a first ring is fixedly connected to the inner cavity of the second bevel gear, circular grooves are respectively provided on the inner wall of the first ring and the outer wall of the second ring, two symmetrical third balls are slidably installed in the inner cavities of the two circular grooves, and a side wall opposite to each of the third balls is connected to the guide rod.

[0019] As a preferred embodiment of the present invention, two side walls opposite to the rotating shafts are respectively installed with limit blocks, the two limit blocks are symmetrical to each other, and the side walls of the two limit blocks respectively away from the rotating shafts are both provided with second inclined slots.

[0020] As a preferred embodiment of the present invention, a third sliding mechanism is provided in the inner cavity of the rectangular tube, and the third sliding mechanism includes four third sliding grooves, and the four third sliding grooves are respectively provided on the inner wall of the rectangular tube, and the inner cavities of the four third sliding grooves are all slidably installed with third sliders, and the four third sliders are symmetrical with each other, and a circular mounting plate is installed on one side of the four third sliders, and a limiting rod is fixedly connected to one side wall of the circular mounting plate, and a reset spring is fixedly connected to the other end of the circular mounting plate, and the other end of the reset spring is fixedly connected to the inner wall of the rectangular tube.

[0021] As a preferred embodiment of the present invention, the upper and lower side walls of the two third sliding grooves are both provided with rectangular grooves, and the inner cavity of the rectangular groove is provided with a push rod, the opposite ends of the two push rods are fixedly connected to the third sliding block, and the other ends of the two push rods are movably arranged on the inner wall of the second inclined groove.

[0022] As a preferred embodiment of the present invention, a fourth slide groove is provided on the inclined plate, a fourth slider is slidably installed in the inner cavity of the fourth slide groove, a through slot is provided at the bottom of the inner cavity of the fourth slide groove, a telescopic rod is fixedly connected to the bottom of the fourth slider, the other end of the telescopic rod is fixedly connected to the top of the base, a plug-in rod is fixedly connected to the top of the fourth slider, and the plug-in rod and the trapezoidal slot fit together.

[0023] As a preferred embodiment of the present invention, two opposite side walls of the rectangular slot are provided with slide rails, guide sliders are slidably mounted in the inner cavities of the two slide rails, and one side wall opposite to the guide slider is fixedly connected to the side wall of the inclined plate.

[0024] As a preferred embodiment of the present invention, a first extrusion plate is fixedly connected to the top of the two mounting blocks, and a second extrusion plate is fixedly connected to the bottom of the mounting block. The two first extrusion plates are respectively used to drive the tilting blocks to move downward, and the second extrusion plates are respectively used to drive the fixed plates to move to both sides.

[0025] Compared with the prior art, the present invention has the following beneficial effects:

[0026] The present invention can pull the top plate to move toward the side of the third clamping block by starting the hydraulic cylinder. When the top plate moves, the rotating rod can be driven to move, so that the driving gear installed on the rotating rod can rotate with the assistance of the rack. Therefore, the rotating rod can rotate, so that the rotating rod can drive the first bevel gear to rotate at this time. When the first bevel gear rotates, it can drive the second bevel gear to rotate. When the second bevel gear rotates, it can drive the first ring to drive the second ring to rotate, so that the flame injection head arranged in the second ring can rotate at this time, so the flame injection head can move while rotating.

[0027] In the present invention, when the mounting block continues to move, it can drive the first extrusion plate to squeeze the fixed plate fixedly mounted on the third clamping block to move to the opposite side with the assistance of the second sliding mechanism until the end of the side wall of the first extrusion plate is located at the end opposite to the third clamping block. At this time, the flame spray head moves to the end of the quartz tube away from the turntable.

[0028] The specific implementation modes of the present invention are further described in detail below in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In the attached picture:

[0030] Figure 1 A three-dimensional structural schematic diagram of a flame polishing method for a quartz tube;

[0031] Figure 2 A rear view structural schematic diagram of a flame polishing method for a quartz tube;

[0032] Figure 3 A schematic diagram of the inner cavity structure of a flame polishing method for a quartz tube;

[0033] Figure 4 A schematic diagram of the inner cavity side structure of a flame polishing method for a quartz tube;

[0034] Figure 5 A partial cross-sectional structural schematic diagram of a flame polishing method for a quartz tube;

[0035] Figure 6 It is a partial side view structural schematic diagram of a flame polishing method for a quartz tube;

[0036] Figure 7 A schematic diagram of a movable rod structure of a flame polishing method for a quartz tube;

[0037] Figure 8 A schematic diagram of the cross-sectional structure of a mounting block in a method for flame polishing a quartz tube;

[0038] Fig. 9 A schematic diagram of the inner cavity structure of a mounting block in a method for flame polishing a quartz tube;

[0039] Fig.10 A partial structural schematic diagram of a flame polishing method for a quartz tube;

[0040] Fig.11 A flame polishing method for a quartz tube Figure 5 A schematic diagram of the structure enlargement in the middle;

[0041] Fig.12 A flame polishing method for a quartz tube Fig. 9 A magnified schematic diagram of the structure at B in the middle;

[0042] Fig.13 The present invention is a schematic diagram of the first circular ring and the second circular ring structure of a flame polishing method for a quartz tube.

[0043] In the figure:

[0044] 100, quartz tube installation unit; 101, base; 1011, first installation plate; 1012, second installation plate; 1013, first circular notch; 1014, protective shell; 1015, observation window; 1016, sliding door; 1017, guide rod; 102, workbench; 1021, support leg; 1022, rectangular notch; 1023, rotating cylinder; 1024, turntable; 1025, second circular notch; 103, first inclined slide; 10 31. first ball; 1032. connecting rod; 1033. guide slide; 1034. second ball; 1035. connecting rod; 1036. first clamping block; 1037. second clamping block; 1038. first slide; 1039. first slider; 104. second slide; 1041. strong extrusion spring; 1042. second slider; 1043. third clamping block; 1044. fixing plate; 105. circular slide; 1051. third ball;

[0045] 200, rotating moving unit; 201, hydraulic cylinder; 2011, top plate; 2012, mounting rod; 2013, placing plate; 2014, connecting block; 2015, mounting block; 2016, first extrusion plate; 2017, second extrusion plate; 2018, pressing plate; 202, rotating rod; 2021, driving gear; 2022, rack; 2023, first bevel gear; 2024, second bevel gear; 2025, first ring; 2026, second ring; 203, flame spray head;

[0046] 300, limit loosening unit; 301, mounting notch; 3011, rotating assembly; 3012, movable rod; 3013, limit plate; 3014, rotating shaft; 3015, limit block; 3016, trapezoidal notch; 3017, second inclined notch; 302, rectangular tube; 3021, circular mounting plate; 3022, limit rod; 3023, third slider; 3024, third slide groove; 3026, return spring; 3027, rectangular groove; 3028, ejector rod;

[0047] 400, mobile card-connecting unit; 401, support plate; 4011, positioning rod; 4012, tilting block; 4013, tilting plate; 4014, fourth slide groove; 4015, through notch; 402, fourth slide block; 4021, plug-in rod; 4022, telescopic rod; 4023, slide rail. DETAILED DESCRIPTION

[0048] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. The following embodiments are used to illustrate the present invention.

[0049] Embodiment 1:

[0050] like Figures 1 to 13 As shown, a flame polishing method for a quartz tube comprises the following steps:

[0051] Step 1: placing the quartz tube into the quartz tube installation unit 100 for clamping;

[0052] Step 2: After the quartz tube is placed, the flame spray head 203 can be driven to rotate and move around the quartz tube by rotating the moving unit 200;

[0053] Step 3: When the rotation moving unit 200 is started, the limit loosening unit 300 can be moved, and when it moves to a certain position, the limit loosening unit 300 is loosened and unlocked, and at the same time, one end of the quartz tube can be clamped;

[0054] Step 4: When the limit loosening unit 300 moves to a certain position and then continues to move, it can drive the movable clamping unit 400 to move and drive the clamping mechanism at one end of the quartz tube to unlock;

[0055] The quartz tube installation unit 100 includes a base 101, a first installation plate 1011 and a second installation plate 1012 are installed above the base 101, the first installation plate 1011 and the second installation plate 1012 are symmetrical to each other, four support legs 1021 are fixedly installed above the base 101, a workbench 102 is fixedly installed above the four support legs 1021, a protective shell 1014 is provided on one side wall opposite to the first installation plate 1011 and the second installation plate 1012, a rectangular notch 1022 is provided in the middle of the workbench 102, a first sliding mechanism and a second sliding mechanism are provided above the workbench 102, and a first clamping block 1036 and a second clamping block 1036 are provided above the first sliding mechanism and the second sliding mechanism, respectively. Block 1037 and two third clamping blocks 1043, the two opposite side walls of the two third clamping blocks 1043 are fixedly installed with fixing plates 1044, the side wall of the second mounting plate 1012 is provided with a first circular notch 1013, the front side of the protective shell 1014 is provided with an observation window 1015, the rear side of the protective shell 1014 is provided with a sliding door 1016, a side wall of the second mounting plate 1012 close to the workbench 102 is rotatably provided with a rotating cylinder 1023, the side wall of the rotating cylinder 1023 away from the second mounting plate 1012 is fixedly connected with a turntable 1024, the turntable 1024 is provided with a first inclined slide groove 103 and a guide slide groove 1033, and a second circular notch 1025 is provided in the middle of the turntable 1024;

[0056] The rotating moving unit 200 includes a hydraulic cylinder 201, one end of which is mounted on the first mounting plate 1011, the output end of the hydraulic cylinder 201 is fixedly connected to a top plate 2011, a rotating mechanism is arranged at the bottom of the top plate 2011, and the rotating mechanism includes a rotating rod 202, mounting rods 2012 are fixedly mounted at the bottom of both ends of the top plate 2011, and pressing plates 218 are fixedly connected to the bottoms of the two mounting rods 2012, respectively, and the two mounting rods 2012 and the two pressing plates 218 are symmetrical to each other. The pressing plate 2018 is slidably arranged on the workbench 102; a second ring 2026 is arranged on the workbench 102 below the rotating mechanism, and a flame jet head 203 is fixedly installed in the inner cavity of the second ring 2026; a placing plate 2013 is fixedly installed at the bottom of the top plate 2011 on one side of the rotating rod 202 close to the two mounting rods 2012, and the two placing plates 2013 are symmetrical to each other, and the bottoms of the two placing plates 2013 are fixedly connected with mounting blocks 2015, and the opposite side walls of the two placing plates 2013 are fixedly connected with The connecting blocks 2014, the opposite ends of the two connecting blocks 2014 are slidably arranged on the guide rod 1017, and the opposite side walls of the two mounting blocks 2015 are provided with mounting notches 301; by starting the hydraulic cylinder 201, the hydraulic cylinder 201 will be able to pull the top plate 2011 to move toward the third clamping block 1043, and when the top plate 2011 moves, it can bring the rotating rod 202 to move, so that the driving gear 2021 installed on the rotating rod 202 can rotate with the assistance of the rack 2022, Therefore, the rotating rod 202 can rotate, so that the rotating rod 202 can drive the first bevel gear 2023 to rotate. When the first bevel gear 2023 rotates, it can drive the second bevel gear 2024 to rotate. When the second bevel gear 2024 rotates, it can drive the first ring 2025 to drive the second ring 2026 to rotate, so that the flame injection head 203 set in the second ring 2026 can rotate. Therefore, the flame injection head 203 can move while rotating.

[0057] The limit loosening unit 300 includes a movable rod 3012, one end of which is provided with a rotating assembly 3011, which is mounted on the first clamping block 1036, the other end of the movable rod 3012 is arranged in the inner cavity of the mounting slot 301, and the movable rod 3012 is provided with limit plates 3013 on the two opposite side walls of the inner cavity of the mounting slot 301, the two limit plates 3013 are respectively fixedly connected to the inner walls of the mounting slot 301, the two limit plates 3013 and the movable rod 3012 are provided with plug-in slots, and the inner cavity of the plug-in slot is provided with a rotating shaft 3014, a rectangular cylinder 302 is installed on one side wall of the inner cavity of the mounting slot 301, and a trapezoidal slot 3016 is provided at the bottom of the movable rod 3012;

[0058] The mobile card-connecting unit 400 includes a support plate 401, which is concave. Positioning holes are provided on the opposite side walls of the support plate 401, and a positioning rod 4011 is slidably provided in the inner cavity of the positioning hole. The two positioning rods 4011 are symmetrical to each other. The bottoms of the two positioning rods 4011 are fixedly connected to the base 101. Tilting blocks 4012 are slidably provided on the two positioning rods 4011. The two tilting blocks 4012 are symmetrical to each other. The two tilting blocks 4012 are respectively installed at the bottom of the support plate 401, and tilting plates 4013 are respectively provided on one side of the bottom of the two tilting blocks 4012. The two tilting plates 4013 are symmetrical to each other. When the mounting block 2015 continues to move, it can drive the first extrusion plate 2016 to squeeze the fixed plate 1044 fixedly installed on the third clamping block 1043 to move to the opposite side with the assistance of the second sliding mechanism until the end of the side wall of the first extrusion plate 2016 is located at the end opposite to the third clamping block 1043. At this time, the flame spray head 203 moves to the end of the quartz tube away from the turntable 1024.

[0059] like Figures 3 to 6 and Fig.10 As shown, in a specific embodiment, the first sliding mechanism includes two first sliding grooves 1038, and the two first sliding grooves 1038 are respectively opened on the workbench 102, and the two first sliding grooves 1038 are symmetrical to each other. The inner cavities of the two first sliding grooves 1038 are slidably installed with first sliders 1039, and the first clamping block 1036 and the second clamping block 1037 are respectively fixedly connected above the two first sliders 1039. The first clamping block 1036 and the second clamping block 1037 are respectively fixedly connected with a connecting rod 1032 and a connecting rod 1035 on one side wall close to the turntable 1024, and the connecting rod 1032 and the connecting rod 1035 are respectively connected with a first ball 1031 and a second ball 1034 at one end away from the first clamping block 1036 and the second clamping block 1037, and the first ball 1031 and the second ball 1034 are respectively slidably set in the first inclined sliding groove 103 and the guide sliding groove 1033. In this configuration, the installation position and components of the first sliding mechanism, as well as the specific installation positions of the first clamping block 1036 and the second clamping block 1037 are determined.

[0060] like Figures 3 to 6 and Fig.10As shown, further, the second sliding mechanism includes two second slide grooves 104, the two second slide grooves 104 are symmetrical to each other, the two second slide grooves 104 are respectively opened on the workbench 102, the inner cavities of the two second slide grooves 104 are both slidably installed with second sliders 1042, the opposite side walls of the two second sliders 1042 are respectively installed with strong extrusion springs 1041, the two strong extrusion springs 1041 are symmetrical to each other, the two strong extrusion springs 1041 are respectively fixedly connected to the inner wall of the second slide groove 104 at one end away from the second slider 1042, and the third clamping blocks 1043 are respectively fixedly connected above the two second sliders 1042. In this setting, the installation position and components of the second sliding mechanism, as well as the specific installation position of the strong extrusion spring 1041 are determined.

[0061] like Figures 3 to 6 as well as Fig.11 and Fig.12 As shown, further, a bearing is provided at one end of the rotating rod 202, and the bearing is installed on the top plate 2011, and a driving gear 2021 and a first bevel gear 2023 are fixedly installed on the rotating rod 202, a rack 2022 is meshedly installed on one side wall of the driving gear 2021, one end of the rack 2022 is fixedly connected to the first mounting plate 1011, a second bevel gear 2024 is vertically meshedly installed on one side wall of the first bevel gear 2023, a first ring 2025 is fixedly connected to the inner cavity of the second bevel gear 2024, and a circular groove 105 is respectively provided on the inner wall of the first ring 2025 and the outer wall of the second ring 2026, and two mutually symmetrical third balls 1051 are slidably installed in the inner cavities of the two circular grooves 105, and the opposite side wall of each third ball 1051 is connected to the guide rod 1017. In this arrangement, it is ensured that by starting the hydraulic cylinder 201, the hydraulic cylinder 201 will be able to pull the top plate 2011 to move toward the side of the third clamping block 1043. When the top plate 2011 moves, it can lead the rotating rod 202 to move, so that the driving gear 2021 installed on the rotating rod 202 can rotate with the assistance of the rack 2022. Therefore, the rotating rod 202 can rotate, so that the rotating rod 202 at this time can drive the first bevel gear 2023 to rotate. When the first bevel gear 2023 rotates, it can drive the second bevel gear 2024 to rotate. When the second bevel gear 2024 rotates.

[0062] Embodiment 2:

[0063] The difference between the above embodiment and this embodiment is that: Figures 7 to 10 and Fig.12As shown, a flame polishing method for a quartz tube, a limiting block 3015 is respectively installed on one side wall opposite to the two rotating shafts 3014, the two limiting blocks 3015 are symmetrical to each other, and a second inclined notch 3017 is provided on one side wall of the two limiting blocks 3015 away from the rotating shaft 3014. A third sliding mechanism is provided in the inner cavity of the rectangular tube 302, and the third sliding mechanism includes four third slide grooves 3024, the four third slide grooves 3024 are respectively opened on the inner wall of the rectangular tube 302, and the inner cavity of the four third slide grooves 3024 is slidably installed with a third slider 3023, and the four third sliders 3023 are symmetrical to each other, and a circular mounting plate 3021 is installed on one side of the four third sliders 3023, and a limiting rod 3022 is fixedly connected to one side wall of the circular mounting plate 3021, and a return spring 3026 is fixedly connected to the other end of the circular mounting plate 3021, and the other end of the return spring 3026 is fixedly connected to the inner wall of the rectangular tube 302. In this setting, when the mounting block 2015 moves to a certain position, the angle of the movable rod 3012 in the mounting block 2015 will change, so it will squeeze the limiting rod 3022 to drive the circular mounting plate 3021 to move inward with the assistance of the third sliding mechanism, so that the third slider 3023 of the third sliding mechanism can drive the top rod 3028 to move.

[0064] like Figures 7 to 10 and Fig.12 As shown, further, rectangular grooves 3027 are provided on the upper and lower side walls of the two third slide grooves 3024, and a push rod 3028 is provided in the inner cavity of the rectangular groove 3027. The opposite ends of the two push rods 3028 are fixedly connected to the third slider 3023, and the other ends of the two push rods 3028 are movably provided on the inner wall of the second inclined slot 3017. In this arrangement, it is ensured that when the push rod 3028 moves, it can push the limit block 3015 upward with the assistance of the second inclined slot 3017, so that the limit block 3015 drives the rotating shaft 3014 to leave the movable rod 3012, thereby realizing the separation of the movable rod 3012 and the mounting block 2015.

[0065] Embodiment 3:

[0066] The difference between the above embodiment and this embodiment is that: Figures 3 to 6 as well as Fig.10As shown, a flame polishing method for a quartz tube is provided, wherein a fourth slide groove 4014 is provided on an inclined plate 4013, a fourth slider 402 is slidably installed in the inner cavity of the fourth slide groove 4014, a through slot 4015 is provided at the bottom of the inner cavity of the fourth slide groove 4014, a telescopic rod 4022 is fixedly connected to the bottom of the fourth slider 402, the other end of the telescopic rod 4022 is fixedly connected to the top of the base 101, a plug-in rod 4021 is fixedly connected to the top of the fourth slider 402, and the plug-in rod 4021 and the trapezoidal slot 3016 fit together. When the mounting block 2015 moves to a certain position, it can squeeze the tilting block 4012 to move on the positioning rod 4011 through the second squeezing plate 2017 arranged at the bottom. When the tilting block 4012 moves to a certain position, it can squeeze the tilting plate 4013 to move with the assistance of the slide rail 4023. Therefore, when the tilting plate moves, the bottom of the fourth sliding block 402 slidingly arranged above will be limited by the telescopic rod 4022 arranged below. Because the fourth sliding block 402 slides in the fourth sliding groove 4014, and the fourth sliding groove 4014 is inclined, the fourth sliding block 402 will be able to pull the telescopic rod 4022 to move upward when it is pushed. When the fourth sliding block 402 moves upward to a certain position, it can be just inserted into the trapezoidal notch 3016 opened at the bottom of the movable rod 3012, so that the movable rod 3012 that has just been separated can be positioned.

[0067] like Figures 3 to 6 as well as Fig.10 As shown, in a specific embodiment, two opposite side walls of the rectangular slot 1022 are provided with slide rails 4023, and guide sliders are slidably installed in the inner cavity of the two slide rails 4023, and one side wall opposite to the guide slider is fixedly connected to the side wall of the inclined plate 4013. In this configuration, the specific installation position and components of the slide rails 4023 are determined.

[0068] like Figures 3 to 10 As shown, further, the first extrusion plates 2016 are fixedly connected to the top of the two mounting blocks 2015, and the second extrusion plates 2017 are fixedly connected to the bottom of the mounting blocks 2015. The two first extrusion plates 2016 are respectively used to drive the tilting blocks 4012 to move downward, and the second extrusion plates 2017 are respectively used to drive the fixed plates 1044 to move to both sides. In this arrangement, it is ensured that when the mounting blocks 2015 continue to move, they can drive the first extrusion plates 2016 to squeeze the fixed plates 1044 fixedly installed on the third clamping blocks 1043 to move to the opposite side with the assistance of the second sliding mechanism, until the end of the side wall of the first extrusion plates 2016 is located at the opposite end of the third clamping blocks 1043, and at this time, the flame spray head 203 moves to the end of the quartz tube away from the turntable 1024.

[0069] The specific steps of the flame polishing method of a quartz tube in this embodiment are as follows:

[0070] First, the staff moves the two third clamping blocks 1043 outward, and then places the quartz tube on the workbench 102, and slowly loosens the third clamping blocks 1043, so that the third clamping blocks 1043 can clamp the quartz tube;

[0071] At this time, by starting the hydraulic cylinder 201, the hydraulic cylinder 201 will pull the top plate 2011 to move toward the side of the third clamping block 1043. When the top plate 2011 moves, it can lead the rotating rod 202 to move, so that the driving gear 2021 installed on the rotating rod 202 can rotate with the assistance of the rack 2022, so that the rotating rod 202 can rotate, so that the rotating rod 202 at this time can drive the first bevel gear 2023 to rotate, and when the first bevel gear 2023 rotates, it can drive the second bevel gear 2024 to rotate. When the second bevel gear 2024 rotates, it can drive the first ring 2025 to drive the second ring 2026 to rotate, so that the flame spray head 203 set in the second ring 2026 can rotate, so the flame spray head 203 can rotate and move at the same time to polish the surface of the quartz tube;

[0072] When the top plate 2011 moves, it can drive the placement plate 2013 to move, and the placement plate 2013 drives the installation block 2015 to move. When the installation block 2015 moves, the installation block 2015 can pull the first clamping block 1036 to move through the movable rod 3012. When the first clamping block 1036 moves, it can drive the first ball 1031 to move in the first inclined slot 103 through the connecting rod 1032, so that the turntable 1024 can rotate. When the turntable 1024 rotates, the turntable 1024 will be able to drive the connecting rod 1035 to drive the second clamping block 1037 to move through the guide slot 1033, so that the first clamping block 1036 and the second clamping block 1037 can be close to each other to clamp the quartz tube.

[0073] When the mounting block 2015 moves to a certain position, the angle of the movable rod 3012 in the mounting block 2015 will change, so it will squeeze the limiting rod 3022 to drive the circular mounting plate 3021 to move inward with the assistance of the third sliding mechanism, so that the third sliding block 3023 of the third sliding mechanism can drive the push rod 3028 to move. When the push rod 3028 moves, it will be able to push the limiting block 3015 upward with the assistance of the second inclined notch 3017, so that the limiting block 3015 drives the rotating shaft 3014 to leave the movable rod 3012, thereby realizing the separation of the movable rod 3012 and the mounting block 2015;

[0074] When the mounting block 2015 moves to a certain position, it can squeeze the tilting block 4012 to move on the positioning rod 4011 through the second squeezing plate 2017 arranged at the bottom. When the tilting block 4012 moves to a certain position, it can squeeze the tilting plate 4013 to move with the assistance of the slide rail 4023. Therefore, when the tilting plate moves, the bottom of the fourth sliding block 402 slidingly arranged at the top can be limited by the telescopic rod 4022 arranged at the bottom. Because the fourth sliding block 402 slides in the fourth sliding groove 4014, and the fourth sliding groove 4014 is inclined, the fourth sliding block 402 can pull the telescopic rod 4022 to move upward when it is pushed. When the fourth sliding block 402 moves upward to a certain position, it can be just inserted into the trapezoidal notch 3016 opened at the bottom of the movable rod 3012, so the movable rod 3012 that has just been separated can be positioned.

[0075] When the mounting block 2015 continues to move, it can drive the first extrusion plate 2016 to squeeze the fixing plate 1044 fixedly mounted on the third clamping block 1043 to move to the opposite side with the assistance of the second sliding mechanism, until the end of the side wall of the first extrusion plate 2016 is located at the end opposite to the third clamping block 1043, and the flame spray head 203 moves to the end of the quartz tube away from the turntable 1024;

[0076] When the top plate 2011 moves, it can drive the installation rod 2012 to drive the placement plate 2013 to move. When the placement plate 2013 moves to a certain position, it can press on the tilting block 4012 to limit the tilting block 4012.

Claims

1. A flame polishing method for a quartz tube, characterized in that: The following steps are involved: Step 1: placing the quartz tube into the quartz tube installation unit (100) for clamping; Step 2: After the quartz tube is placed, the flame spray head (203) can be driven to rotate and move around the quartz tube by rotating the moving unit (200); Step 3: When the rotation moving unit (200) is started, the limit loosening unit (300) can be moved, and when it moves to a certain position, the limit loosening unit (300) is loosened and unlocked, and at the same time, one end of the quartz tube can be clamped; Step 4: When the limit loosening unit (300) moves to a certain position and then continues to move, it can drive the movable clamping unit (400) to move and drive the clamping mechanism at one end of the quartz tube to unlock; The quartz tube installation unit (100) comprises a base (101), a first installation plate (1011) and a second installation plate (1012) are installed above the base (101), the first installation plate (1011) and the second installation plate (1012) are symmetrical to each other, four support legs (1021) are fixedly installed above the base (101), a workbench (102) is fixedly installed above the four support legs (1021), a protective shell (1014) is provided on one side wall opposite to the first installation plate (1011) and the second installation plate (1012), a rectangular notch (1022) is provided in the middle of the workbench (102), a first sliding mechanism and a second sliding mechanism are arranged above the workbench (102), and a first clamping block (1036) and a second clamping block (1037) are respectively arranged above the first sliding mechanism and the second sliding mechanism. 1037) and two third clamping blocks (1043), the two opposite side walls of the two third clamping blocks (1043) are fixedly installed with a fixing plate (1044), the side wall of the second mounting plate (1012) is provided with a first circular notch (1013), the front side of the protective shell (1014) is provided with an observation window (1015), the rear side of the protective shell (1014) is provided with a sliding door (1016), a side wall of the second mounting plate (1012) close to the workbench (102) is rotatably provided with a rotating cylinder (1023), a side wall of the rotating cylinder (1023) away from the second mounting plate (1012) is fixedly connected with a rotating disk (1024), the rotating disk (1024) is provided with a first inclined slide groove (103) and a guide slide groove (1033), and a second circular notch (1025) is provided in the middle of the rotating disk (1024); The rotating moving unit (200) comprises a hydraulic cylinder (201), one end of the hydraulic cylinder (201) is mounted on a first mounting plate (1011), the output end of the hydraulic cylinder (201) is fixedly connected to a top plate (2011), a rotating mechanism is arranged at the bottom of the top plate (2011), the rotating mechanism comprises a rotating rod (202), mounting rods (2012) are fixedly mounted at the bottoms of both ends of the top plate (2011), the bottoms of the two mounting rods (2012) are respectively fixedly connected to pressing plates (2018), the two mounting rods (2012) and the two pressing plates (2018) are symmetrical to each other, and the two pressing plates (2018) are slidably arranged on a workbench (102); the workbench (102) is provided with a plurality of mounting rods (2012) and a plurality of pressing plates (2018) arranged on the workbench (102); A second circular ring (2026) is arranged below the rotating mechanism, a flame spray head (203) is fixedly installed in the inner cavity of the second circular ring (2026), a placement plate (2013) is fixedly installed at the bottom of the top plate (2011) on one side of the rotating rod (202) close to the two mounting rods (2012), the two placement plates (2013) are symmetrical to each other, the bottoms of the two placement plates (2013) are fixedly connected with mounting blocks (2015), the opposite side walls of the two placement plates (2013) are fixedly connected with connecting blocks (2014), the opposite ends of the two connecting blocks (2014) are slidably arranged on the guide rod (1017), and the opposite side walls of the two mounting blocks (2015) are provided with mounting notches (301); The limit loosening unit (300) comprises a movable rod (3012), one end of which is provided with a rotating assembly (3011), the rotating assembly (3011) being mounted on a first clamping block (1036), the other end of which is arranged in the inner cavity of the mounting slot (301), the movable rod (3012) being provided with limit plates (3013) on two opposite side walls of the inner cavity of the mounting slot (301), the two limit plates (3013) being respectively fixedly connected to the inner wall of the mounting slot (301), the two limit plates (3013) and the movable rod (3012) being provided with plug-in slots, and the inner cavity of the plug-in slots being provided with a rotating shaft (3014), a rectangular cylinder (302) being installed on one side wall of the inner cavity of the mounting slot (301), and a trapezoidal slot (3016) being provided at the bottom of the movable rod (3012); The mobile card connection unit (400) comprises a support plate (401), the support plate (401) is concave, and the two opposite side walls of the support plate (401) are provided with positioning holes, and the inner cavity of the positioning hole is slidably provided with a positioning rod (4011), the two positioning rods (4011) are symmetrical to each other, the bottoms of the two positioning rods (4011) are fixedly connected to the base (101), and the two positioning rods (4011) are slidably provided with a tilting block (4012), the two tilting blocks (4012) are symmetrical to each other, the two tilting blocks (4012) are respectively installed at the bottom of the support plate (401), and a tilting plate (4013) is respectively provided on one side of the bottom of the two tilting blocks (4012), and the two tilting plates (4013) are symmetrical to each other.

2. The flame polishing method of a quartz tube according to claim 1, characterized in that: The first sliding mechanism comprises two first sliding grooves (1038), the two first sliding grooves (1038) are respectively opened on the workbench (102), the two first sliding grooves (1038) are symmetrical to each other, the inner cavities of the two first sliding grooves (1038) are both slidably mounted with first sliding blocks (1039), the upper parts of the two first sliding blocks (1039) are respectively fixedly connected with a first clamping block (1036) and a second clamping block (1037), the first clamping block (1036) and the second clamping block (1037) are respectively fixedly connected with each other, and the first clamping block (1036) and the second clamping block (1037) are respectively fixedly connected with each other. 7) A connecting rod (1032) and a connecting rod (1035) are fixedly connected to a side wall close to the turntable (1024), and one end of the connecting rod (1032) and the connecting rod (1035) away from the first clamping block (1036) and the second clamping block (1037) are respectively connected to a first ball (1031) and a second ball (1034), and the first ball (1031) and the second ball (1034) are respectively slidably arranged in the first inclined slide groove (103) and the guide slide groove (1033).

3. The flame polishing method of a quartz tube according to claim 1, characterized in that: The second sliding mechanism comprises two second slide grooves (104), the two second slide grooves (104) are symmetrical to each other, the two second slide grooves (104) are respectively opened on the workbench (102), the inner cavities of the two second slide grooves (104) are slidably installed with second sliders (1042), the opposite side walls of the two second sliders (1042) are respectively installed with strong extrusion springs (1041), the two strong extrusion springs (1041) are symmetrical to each other, and one end of the two strong extrusion springs (1041) away from the second slider (1042) is fixedly connected to the inner wall of the second slide groove (104), and the top of the two second sliders (1042) is respectively fixedly connected with a third clamping block (1043).

4. The flame polishing method of a quartz tube according to claim 1, characterized in that: A bearing is provided at one end of the rotating rod (202), and the bearing is mounted on the top plate (2011); a driving gear (2021) and a first bevel gear (2023) are fixedly mounted on the rotating rod (202); a rack (2022) is meshedly mounted on one side wall of the driving gear (2021); one end of the rack (2022) is fixedly connected to the first mounting plate (1011); a second bevel gear (2024) is vertically meshedly mounted on one side wall of the first bevel gear (2023); a first circular ring (2025) is fixedly connected to the inner cavity of the second bevel gear (2024); a circular slide groove (105) is respectively provided on the inner wall of the first circular ring (2025) and the outer wall of the second circular ring (2026); two mutually symmetrical third balls (1051) are slidably mounted in the inner cavities of the two circular slide grooves (105); and a side wall opposite to each of the third balls (1051) is connected to the guide rod (1017).

5. The flame polishing method of a quartz tube according to claim 1, characterized in that: The two side walls opposite to the rotating shafts (3014) are respectively installed with limit blocks (3015), the two limit blocks (3015) are symmetrical to each other, and the side walls of the two limit blocks (3015) away from the rotating shafts (3014) are respectively provided with second inclined notches (3017).

6. The flame polishing method of a quartz tube according to claim 1, characterized in that: The inner cavity of the rectangular tube (302) is provided with a third sliding mechanism, and the third sliding mechanism includes four third sliding grooves (3024). The four third sliding grooves (3024) are respectively provided on the inner wall of the rectangular tube (302). The inner cavities of the four third sliding grooves (3024) are all slidably installed with third sliding blocks (3023). The four third sliding blocks (3023) are symmetrical with each other. A circular mounting plate (3021) is installed on one side of the four third sliding blocks (3023). A limiting rod (3022) is fixedly connected to one side wall of the circular mounting plate (3021). A return spring (3026) is fixedly connected to the other end of the circular mounting plate (3021). The other end of the return spring (3026) is fixedly connected to the inner wall of the rectangular tube (302).

7. The flame polishing method of a quartz tube according to claim 6, characterized in that: The upper and lower side walls of the two third sliding grooves (3024) are both provided with rectangular grooves (3027), and the inner cavity of the rectangular grooves (3027) is provided with a push rod (3028), and the opposite ends of the two push rods (3028) are fixedly connected to the third sliding block (3023), and the other ends of the two push rods (3028) are movably arranged on the inner wall of the second inclined notch (3017).

8. The flame polishing method of a quartz tube according to claim 1, characterized in that: The inclined plate (4013) is provided with a fourth slide groove (4014), a fourth slider (402) is slidably installed in the inner cavity of the fourth slide groove (4014), a through slot (4015) is provided at the bottom of the inner cavity of the fourth slide groove (4014), a telescopic rod (4022) is fixedly connected to the bottom of the fourth slider (402), the other end of the telescopic rod (4022) is fixedly connected to the top of the base (101), a plug-in rod (4021) is fixedly connected to the top of the fourth slider (402), and the plug-in rod (4021) and the trapezoidal slot (3016) fit each other.

9. The flame polishing method of a quartz tube according to claim 1, characterized in that: The two opposite side walls of the rectangular slot (1022) are provided with slide rails (4023), the inner cavities of the two slide rails (4023) are slidably mounted with guide sliders, and the side wall opposite to the guide sliders is fixedly connected to the side wall of the inclined plate (4013).

10. The flame polishing method of a quartz tube according to claim 1, characterized in that: A first extrusion plate (2016) is fixedly connected to the top of each of the two mounting blocks (2015), and a second extrusion plate (2017) is fixedly connected to the bottom of each of the mounting blocks (2015). The two first extrusion plates (2016) are respectively used to drive the tilting block (4012) to move downward, and the second extrusion plates (2017) are respectively used to drive the fixed plate (1044) to move to both sides.

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