Crystal rod cutting machine and its supporting device

Abstract

A crystal rod cutting machine and its supporting device, the supporting device comprising: one or more supporting members, the supporting members are used to carry the crystal rod; a driving assembly, used to drive the one or more supporting members to rise and fall, so that the height of each of the one or more supporting members is adapted to the diameter of the crystal rod portion it carries. The present application can prevent the crystal rod from being displaced after being cut, and the cut crystal segment will not collide with the adjacent crystal segment, thus avoiding the occurrence of edge collapse and cracks, and improving the product yield.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and more specifically to a crystal rod cutting machine and a supporting device thereof. Background Art

[0002] In the wafer production process, it is usually necessary to first use the Czochralski method to pull out a crystal rod. Due to the large size of the crystal rod, it is necessary to cut the crystal rod into multiple segments before use. Each crystal rod segment is then cut into a thin slice of initial wafer by, for example, wire cutting. The initial wafer is then subjected to grinding, polishing, cleaning, and possible epitaxial processing to obtain a finished wafer.

[0003] At present, a crystal ingot cutter is often used to cut the crystal ingot. In the crystal ingot cutter, the crystal ingot needs to be placed on a supporting device of the crystal ingot cutter, and the crystal ingot is cut and cut by a cutting device such as a wire cutting device or a band saw cutting device.

[0004] Since the diameter of the crystal rod usually has a certain fluctuation, and in the related art, the support base of the crystal rod cutting machine is usually an integrated support base, which has a flat surface. The integrated support base cannot completely wrap the supported crystal rod, so that at the moment the crystal rod is cut off, the cut crystal segment lacks supporting force, and the crystal segment moves downward due to its own gravity, and then collides with the adjacent crystal segment, resulting in edge collapse / cracks at the collision point. Summary of the invention

[0005] According to one aspect of the present application, a support device for a crystal rod cutting machine is provided, the support device comprising: one or more support members, the support members being used to support the crystal rod; a drive assembly, being used to drive the one or more support members to rise and fall, so that the height of each of the one or more support members is adapted to the diameter of the portion of the crystal rod it supports.

[0006] In some embodiments of the present application, the driving component includes: a deformable part; the support part is arranged on the deformable part; and a limiting part; wherein each of the support parts is provided with a through hole inside, and the limiting part is passed through the through hole of each of the support parts, so as to limit the support parts to move only in the up and down directions; the deformable part can drive the one or more support parts to rise and fall through its own deformation.

[0007] In some embodiments of the present application, the width of the through hole matches the size of the limiting member, and the height of the through hole is greater than the size of the limiting member.

[0008] In some embodiments of the present application, the deformable member includes a deformable air bag, elastic rubber or elastic plastic.

[0009] In some embodiments of the present application, a pressure gauge is further included, which is connected to the air bag and is used to detect the pressure of the air bag.

[0010] In some embodiments of the present application, the driving assembly includes: one or more cavities, each of the supporting members is slidably disposed in one of the cavities, and a working medium for driving the supporting member to rise and fall is disposed in the cavity.

[0011] In some embodiments of the present application, at least two adjacent support members among the plurality of support members are in contact with each other or there is a preset interval between them.

[0012] In some embodiments of the present application, it further includes: one or more elastic contact heads, each of which is arranged on one of the support members, and the elastic contact head is used to contact the crystal rod.

[0013] In some embodiments of the present application, the surface on which the elastic contact head contacts the crystal rod is an inclined surface, and the angle range of the inclined surface is 20° to 70°.

[0014] In some embodiments of the present application, the support member and the elastic contact head disposed thereon are detachably connected.

[0015] According to another aspect of the present application, a crystal rod cutting machine is provided, and the crystal rod cutting machine includes a supporting device as described in any one of the above.

[0016] In some embodiments of the present application, the crystal ingot cutting machine includes at least two supporting devices, wherein the two supporting devices respectively support two sides of the crystal ingot.

[0017] The crystal rod cutting machine and its supporting device of the present application drive one or more supporting members to rise and fall through a driving assembly, so that the height of each of the one or more supporting members is adapted to the diameter of the crystal rod portion it carries, so that each supporting member can achieve stable support for the crystal rod portion corresponding thereto, so that the crystal rod will not be displaced after being cut, and the cut crystal segment will not collide with the adjacent crystal segment, thereby avoiding the occurrence of edge collapse and cracks, and improving the product yield. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] By describing the embodiments of the present application in more detail in conjunction with the accompanying drawings, the above and other purposes, features and advantages of the present application will become more apparent. The accompanying drawings are used to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation of the present application. In the accompanying drawings, the same reference numerals generally represent the same components or steps.

[0019] Figure 1 A schematic diagram showing a support base of a crystal ingot cutter in the related art supporting a crystal ingot.

[0020] Figure 2 A schematic diagram showing a crystal ingot supported by a supporting device of a crystal ingot cutter according to an embodiment of the present application.

[0021] Figure 3 A schematic diagram showing a crystal ingot supported by a supporting device of a crystal ingot cutter according to another embodiment of the present application.

[0022] Figure 4 A schematic structural diagram of a support member and a limiting member passing therethrough according to an embodiment of the present application is shown.

[0023] Figure 5 A schematic diagram showing a crystal ingot supported by a supporting device of a crystal ingot cutter according to another embodiment of the present application.

[0024] Figure 6 A schematic diagram showing a crystal ingot supported by a supporting device of a crystal ingot cutter according to another embodiment of the present application.

[0025] Figure 7 A schematic structural diagram of a support member disposed in a cavity according to an embodiment of the present application is shown.

[0026] Figure 8 A schematic diagram showing the use of two supporting devices to support a crystal rod according to an embodiment of the present application is shown.

[0027] Fig. 9 A schematic diagram showing the use of two supporting devices to support a crystal rod according to another embodiment of the present application is shown. DETAILED DESCRIPTION

[0028] In the following description, a large number of specific details are provided to provide a more thorough understanding of the present invention. However, it is apparent to those skilled in the art that the present invention can be implemented without one or more of these details. In other examples, in order to avoid confusion with the present invention, some technical features well known in the art are not described.

[0029] It should be understood that the present invention can be implemented in different forms and should not be construed as being limited to the embodiments presented herein. On the contrary, providing these embodiments will make the disclosure thorough and complete and fully convey the scope of the present invention to those skilled in the art. In the accompanying drawings, the sizes and relative sizes of layers and regions may be exaggerated for clarity. The same reference numerals throughout represent the same elements.

[0030] It should be understood that when an element or layer is referred to as being "on, adjacent to, connected to or coupled to other elements or layers, it may be directly on, adjacent to, connected to or coupled to other elements or layers, or there may be intervening elements or layers. In contrast, when an element is referred to as being "directly on, directly adjacent to, directly connected to or directly coupled to other elements or layers, there may be no intervening elements or layers. It should be understood that, although the terms first, second, third, etc. may be used to describe various elements, components, regions, layers and / or parts, these elements, components, regions, layers and / or parts should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or part from another element, component, region, layer or part. Therefore, without departing from the teachings of the present invention, the first element, component, region, layer or part discussed below may be represented as a second element, component, region, layer or part.

[0031] Spatial relationship terms such as "under", "below", "below", "under", "above", "above", etc., may be used here for convenience of description to describe the relationship between an element or feature shown in the figure and other elements or features. It should be understood that in addition to the orientation shown in the figure, the spatial relationship terms are intended to include different orientations of the device in use and operation. For example, if the device in the accompanying drawings is turned over, then the elements or features described as "under other elements" or "under it" or "under it" will be oriented as "on" other elements or features. Therefore, the exemplary terms "under" and "under" may include both upper and lower orientations. The device can be oriented otherwise (rotated 90 degrees or other orientations) and the spatial descriptors used herein are interpreted accordingly.

[0032] The purpose of the terms used herein is only to describe specific embodiments and is not intended to be limiting of the present invention. When used herein, the singular forms "one", "an" and "said / the" are also intended to include plural forms, unless the context clearly indicates otherwise. It should also be understood that the terms "consisting of" and / or "comprising", when used in this specification, determine the presence of the features, integers, steps, operations, elements and / or parts, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, parts and / or groups. When used herein, the term "and / or" includes any and all combinations of the relevant listed items.

[0033] like Figure 1As shown, in the related art, the support base of the crystal rod cutting machine is usually an integrated support base, which has a flat surface. However, since the diameter of the crystal rod usually has certain fluctuations, the integrated support base cannot completely wrap the supporting crystal rod, resulting in the lack of supporting force for the cut crystal segment at the moment the crystal rod is cut off. The crystal segment moves downward due to its own gravity, and then collides with the adjacent crystal segment, resulting in edge collapse / cracks at the collision point.

[0034] In order to solve at least one of the above problems, the present application provides a support device for a crystal rod cutting machine, which includes: one or more support members, which are used to support the crystal rod; a driving assembly, which is used to drive the one or more support members to rise and fall, so that the height of each of the one or more support members is adapted to the diameter of the crystal rod part it supports.

[0035] According to the support device of the crystal rod cutting machine of the present application, one or more support members are driven to rise and fall by a driving assembly, so that the height of each of the one or more support members is adapted to the diameter of the crystal rod portion it carries, so that each support member can achieve stable support for the crystal rod portion corresponding thereto, so that the crystal rod will not be displaced after being cut, and the cut crystal segment will not collide with the adjacent crystal segment, thereby avoiding the occurrence of edge collapse and cracks.

[0036] In order to fully understand the present invention, detailed steps and structures will be presented in the following description to illustrate the technical solution proposed by the present invention. The preferred embodiments of the present invention are described in detail below, but in addition to these detailed descriptions, the present invention may also have other implementations.

[0037] Example 1

[0038] Reference below Figure 2~Figure 4 The support device of a crystal ingot cutter according to an embodiment of the present application is described. The support device includes: one or more support members 121, the support members 121 are used to carry the crystal ingot; a driving component is used to drive the one or more support members 121 to rise and fall, so that the height of each of the one or more support members 121 is adapted to the diameter of the crystal ingot portion it carries; wherein the driving component includes:

[0039] The deformable member 110 and the support member 121 are arranged on the deformable member 110; the limiting member 130; wherein each support member 121 is provided with a through hole 1211 inside; the limiting member 130 is passed through the through hole 1211 of each support member 121, and is used to limit the support member 121 to move only in the up and down directions; the deformable member 110 can drive one or more support members 121 to rise and fall through its own deformation.

[0040] Specifically, when the crystal rod is cut, the crystal rod is placed on one or more support members 121, and the crystal rod is supported by one or more support members 121. Under the deformation of the deformable member 110, each of the one or more support members 121 can move, and at the same time, the limiter 130 can limit the support member 121 to move only in the up and down direction without moving in other directions such as forward and backward, so that when one or more support members 121 support the crystal rod, the deformable member 110 can drive the one or more support members 121 to rise and fall through its own deformation, so that the height of each of the one or more support members 121 is adapted to the diameter of the crystal rod portion it carries, so that each support member 121 can achieve stable support for the corresponding crystal rod portion, so that the crystal rod will not be displaced after being cut, and the cut crystal segment will not collide with the adjacent crystal segment, thereby avoiding the generation of edge collapse and cracks, and improving the product yield.

[0041] In some embodiments, the support device includes a plurality of support members 121, and the plurality of support members 121 can provide stable support for multiple parts of the crystal rod. In this embodiment, a support base is formed by a plurality of support members 121. Compared with the integrated support base in the related art, the existing crystal rod cutting machine does not introduce bulky auxiliary equipment or use complex support methods. The plurality of support members 121 provide different support pressures for different diameters of the crystal rod, so that the crystal rod can be cut stably without displacement edge collapse / cracks.

[0042] In some embodiments, multiple support members 121 are arranged along the axial direction of the supported crystal rod (for example, when the axial direction of the crystal rod is longitudinal, they are arranged longitudinally, and when it is transverse, they are arranged transversely), so as to provide support force to the crystal rod at multiple positions along the axial direction of the crystal rod, so that the crystal rod can be stably supported at multiple positions. Moreover, by arranging multiple support members 121 along the axial direction of the supported crystal rod, the layout of multiple support members 121 can be compacted in one direction, and stable support of the crystal rod can be achieved in a limited space, thereby improving space utilization.

[0043] In some embodiments, at least two adjacent support members 121 among the plurality of support members 121 are in contact with each other or there is a preset interval between them. That is, among the plurality of support members 121, any two adjacent support members 121 may be in contact with each other, or there may be a preset interval between any two adjacent support members 121, or there may be a portion of two adjacent support members 121 in contact with each other, and there may be a preset interval between another portion of two adjacent support members 121.

[0044] For example, Figure 2As shown, any two adjacent support members 121 among the plurality of support members 121 are in contact with each other, so that the two adjacent support members 121 lean against each other, and the support member 121 can be subjected to the force of the adjacent support member 121, thereby preventing itself from being displaced forward, backward, left, and right. Moreover, by making the two adjacent support members 121 among the plurality of support members 121 contact with each other, the support device can achieve stable support for each part of the crystal rod.

[0045] For example, Figure 3 As shown, there is a preset interval between any two adjacent support members 121 among the multiple support members 121. The preset interval can be set according to actual conditions and is not limited to this. In addition, the preset intervals between adjacent support members 121 can be equal or unequal, and this is not limited to this. By setting an interval between two adjacent support members 121, the number of support members 121 can be saved and the cost can be reduced. Moreover, when adjacent support members 121 are set at intervals, since the drive component support members 121 are moved up and down, the interval setting can also achieve stable support for the crystal rod without causing displacement to the front, back, left and right.

[0046] The support member 121 can be made of a hard material, such as a hard PP (polypropylene) material, an ABS (acrylonitrile-butadiene-styrene) material, a hard PS (polystyrene) material, etc., without limitation. Taking the hard PP material as an example, it has a series of advantages such as being strong, durable, and light in weight.

[0047] It is worth noting that the present application does not limit the specific structural implementation of the support member 121, and all structural designs of the support member 121 that can provide support should be within the protection scope of the present application.

[0048] In some embodiments, the stopper 130 can be implemented as a stopper screw or any other design structure that can limit the support member 121 to move only in the up-down direction. Taking the stopper 130 as a stopper screw as an example, the stopper screw is inserted into the through hole 1211 of each support member 121, and the width of the through hole 1211 matches the size of the stopper 130 (for example, the width of the through hole 1211 can be slightly larger than the size of the stopper 130 to avoid friction between the through hole 1211 and the stopper 130), and the height of the through hole 1211 is larger than the size of the stopper 130, so that the stopper 130 can limit the support member 121 to move only in the up-down direction without moving in other directions such as front, back, left, and right.

[0049] In some embodiments, the deformable member 110 may be an air bag, elastic rubber, elastic plastic, or any other suitable deformable material, which is not limited.

[0050] Taking the deformable part 110 as a deformable air bag as an example, when one or more support members 121 support the crystal rod, the air bag can bear the weight of the one or more support members 121 and the crystal rod thereon and has a certain deformation amount itself, so that it can drive the one or more support members 121 to rise and fall through its own deformation, so that the height of each of the one or more support members 121 is adapted to the diameter of the crystal rod part it supports.

[0051] Among them, air holes can be provided on the airbag, through which air can be inflated into the airbag and / or the airbag can be exhausted to the outside, so as to adjust the amount of gas in the airbag. By adjusting the amount of gas in the airbag, the ability of the airbag to drive the support member 121 to rise and fall can be adjusted. Generally speaking, when the amount of gas in the airbag is insufficient or too high, the ability of the airbag to drive the support member 121 to rise and fall is weak, and the airbag can only drive the support member 121 to rise and fall within a smaller range; when the amount of gas in the airbag is appropriate, the ability of the airbag to drive the support member 121 to rise and fall is strong, and the airbag can drive the support member 121 to rise and fall within a larger range.

[0052] In some embodiments, the support device further includes a pressure gauge connected to the air bag for detecting the pressure of the air bag. By detecting the pressure of the air bag through the pressure gauge, it is possible to fill the air bag with gas when the pressure of the air bag is insufficient, or to exhaust the air bag to the outside when the pressure of the air bag is too high, so as to keep the pressure of the air bag within an appropriate range, thereby achieving stable support.

[0053] In some embodiments, Figure 4 As shown, it also includes: one or more elastic contact heads 122, each elastic contact head 122 is arranged on one of the support members 121, and the elastic contact head 122 is used to contact the crystal rod.

[0054] Specifically, after the crystal rod is placed on the support 121 of the support device, the elastic contact head 122 arranged on the support 121 contacts the crystal rod. The elastic contact head 122 undergoes a certain deformation under the action of the gravity of the crystal rod, thereby generating a certain friction force between the crystal rod and the crystal rod, so that after the crystal rod is cut off, the cut crystal segment can be prevented from shifting.

[0055] The elastic contact head 122 may be made of elastic materials such as rubber, elastic plastic, etc., and this is not limited. Taking the elastic contact head 122 as an example, when the crystal rod is cut and cut by a cutting device such as a wire cutting device or a band saw cutting device, the elastic contact head 122 can also participate in the cutting to ensure the quality of the knife edge (the step / notch generated by the knife jumper).

[0056] In some embodiments, Figure 4As shown, the surface of the elastic contact head 122 that contacts the crystal rod can be configured as an inclined surface to increase the contact area between the elastic contact head 122 and the crystal rod, thereby improving the stability of the support. The angle of the inclined surface can range from 20° to 70°, such as 20°, 30°, 40°, 50°, 60°, 70°, etc. By limiting the angle of the inclined surface to 20° to 70°, it can be avoided that the contact area between the elastic contact head 122 and the crystal rod is insufficient when the angle of the inclined surface is too small or too large.

[0057] In some embodiments, the support member 121 and the elastic contact head 122 disposed thereon are detachably connected. Through the design of detachable connection, when the elastic contact head 122 on the support member 121 is damaged, the damaged elastic contact head 122 can be removed from the support member 121, and a new elastic contact head 122 can be installed on the support member 121, so that the maintenance of the support member 121 can be facilitated. Alternatively, the elastic contact head 122 adapted to the different truncation conditions of the crystal rod can be replaced, and this is not limited.

[0058] Among them, the support member 121 and the elastic contact head 122 arranged thereon can be detachably connected through a variety of structural designs, such as detachably connected through a threaded connection, detachably connected through a snap connection, detachably connected through a pin connection, detachably connected through a magnetic connection, etc., without limitation.

[0059] For example, Figure 4 As shown, a threaded member 123 can be provided on the support member 121, the threaded member 123 is higher than the upper surface of the support member 121, the elastic contact head 122 is provided with a hollow structure, and a nut is provided in the hollow structure, so that the threaded member 123 and the nut are threadedly connected, so that the support member 121 and the elastic contact head 122 can be detachably connected, which is simple to disassemble and convenient to replace.

[0060] Embodiment (II)

[0061] Reference below Figure 5~Figure 7 The support device of a crystal ingot cutter according to an embodiment of the present application is described. The support device includes: one or more support members 221, the support members 221 are used to carry the crystal ingot; a driving component is used to drive the one or more support members 221 to rise and fall, so that the height of each of the one or more support members 221 is adapted to the diameter of the crystal ingot portion it carries; wherein the driving component includes:

[0062] One or more cavities 210 , each support member 221 is slidably disposed in one of the cavities 210 , and a working medium for driving the support member 221 to rise and fall is disposed in the cavity 210 .

[0063] Specifically, when the crystal rod is cut, the crystal rod is placed on one or more support members 221, and the crystal rod is supported by one or more support members 221. Under the action of the working medium, each of the one or more support members 221 can be driven to slide up and down along the cavity 210, so that the height of each of the one or more support members 221 is adapted to the diameter of the crystal rod portion it carries, so that each support member 221 can stably support the corresponding crystal rod portion, so that the crystal rod will not be displaced after being cut, and the cut crystal segment will not collide with the adjacent crystal segment, thereby avoiding the generation of edge collapse and cracks, and improving the product yield.

[0064] In some embodiments, the working medium may be compressed gas or hydraulic oil. When the working medium is compressed gas, each support member 221 and the cavity 210 in which it is located constitute a cylinder, and the support member 221 acts as a piston of the cylinder to achieve lifting and lowering along the cavity 210. When the working medium is hydraulic oil, each support member 221 and the cavity 210 in which it is located constitute a hydraulic cylinder, and the support member 221 acts as a piston of the hydraulic cylinder to achieve lifting and lowering along the cavity 210.

[0065] In some embodiments, the support device includes a plurality of support members 221, and the plurality of support members 221 can provide stable support for multiple parts of the crystal rod. In this embodiment, a support base is formed by a plurality of support members 221. Compared with the integrated support base in the related art, the existing crystal rod cutting machine does not introduce bulky auxiliary equipment or use complex support methods. The plurality of support members 221 provide different support pressures for different diameters of the crystal rod, so that the crystal rod can be cut stably without displacement edge collapse / cracks.

[0066] In some embodiments, multiple support members 221 are arranged along the axial direction of the supported crystal rod (for example, when the axial direction of the crystal rod is longitudinal, they are arranged longitudinally, and when it is transverse, they are arranged transversely), so as to provide support force to the crystal rod at multiple positions along the axial direction of the crystal rod, so that the crystal rod can be stably supported at multiple positions. Moreover, by arranging multiple support members 221 along the axial direction of the supported crystal rod, the layout of multiple support members 221 can be compacted in one direction, and stable support of the crystal rod can be achieved in a limited space, thereby improving space utilization.

[0067] In some embodiments, at least two adjacent support members 221 among the plurality of support members 221 are in contact with each other or there is a preset interval between them. That is, among the plurality of support members 221, any two adjacent support members 221 may be in contact with each other, or there may be a preset interval between any two adjacent support members 221, or there may be a portion of two adjacent support members 221 in contact with each other, and there may be a preset interval between another portion of two adjacent support members 221.

[0068] For example, any two adjacent support members 221 among the plurality of support members 221 are in contact with each other (for example, by increasing Figure 5 The upper width of the middle support member 221 is increased to achieve contact between two adjacent support members 221), so that the two adjacent support members 221 lean on each other, and the support member 221 can be subjected to the force of the adjacent support member 221, thereby preventing itself from being displaced left and right. Moreover, by making two adjacent support members 221 of the plurality of support members 221 contact each other, the support device can achieve stable support for each part of the crystal rod.

[0069] For example, there is a preset interval between any two adjacent support members 221 among the plurality of support members 221. The preset interval can be set according to actual conditions and is not limited thereto. Figure 5 As shown, any two adjacent cavities 210 among the plurality of cavities 210 are in contact with each other, a support member 221 is provided in each cavity 210, and there is a preset interval between any two adjacent support members 221, and the preset interval is equal to twice the wall thickness of the cavity 210. Or, as Figure 6 As shown, there is a preset interval between any two adjacent cavities 210 in the plurality of cavities 210, and there is also a preset interval between any two adjacent support members 221. In addition, the preset intervals between adjacent support members 221 may be equal or unequal, and there is no limitation on this. By setting an interval between two adjacent support members 221, the number of support members 221 can be saved and the cost can be reduced. Moreover, when adjacent support members 221 are arranged at intervals, since the drive assembly support member 221 moves up and down, the interval setting can also achieve stable support for the crystal rod without causing displacement to the front, back, left, and right.

[0070] The support member 221 can be made of a hard material, such as a hard PP (polypropylene) material, an ABS (acrylonitrile-butadiene-styrene) material, a hard PS (polystyrene) material, etc., without limitation. For example, the hard PP material has a series of advantages such as being strong, durable, and light in weight.

[0071] It is worth noting that the present application does not limit the specific structural implementation of the support member 221, and all structural designs of the support member 221 that can provide support should be within the protection scope of the present application.

[0072] In some embodiments, Figure 7 As shown, it also includes: one or more elastic contact heads 222, each of which is arranged on one of the support members 221, and the elastic contact head 222 is used to contact the crystal rod.

[0073] Specifically, after the crystal rod is placed on the support 221 of the support device, the elastic contact head 222 arranged on the support 221 contacts the crystal rod. The elastic contact head 222 undergoes a certain deformation under the action of the gravity of the crystal rod, thereby generating a certain friction force between the crystal rod and the crystal rod, so that after the crystal rod is cut off, the cut crystal segment can be prevented from shifting.

[0074] The elastic contact head 222 can be made of elastic materials such as rubber and elastic plastic, and there is no limitation on this. Taking the elastic contact head 222 as a soft elastic material such as rubber, for example, when the crystal rod is cut and cut by a cutting device such as a wire cutting device or a band saw cutting device, the elastic contact head 222 can also participate in the cutting to ensure the quality of the knife edge (the step / notch generated by the knife jumper).

[0075] In some embodiments, the surface of the elastic contact head 222 that contacts the crystal rod can be configured as an inclined surface to increase the contact area between the elastic contact head 222 and the crystal rod, thereby improving the stability of the support. The angle of the inclined surface can range from 20° to 70°, such as 20°, 30°, 40°, 50°, 60°, 70°, etc. By limiting the angle of the inclined surface to 20° to 70°, it can be avoided that the contact area between the elastic contact head 222 and the crystal rod is insufficient when the angle of the inclined surface is too small or too large.

[0076] In some embodiments, the support member 221 and the elastic contact head 222 disposed thereon are detachably connected. Through the design of detachable connection, when the elastic contact head 222 on the support member 221 is damaged, the damaged elastic contact head 222 can be removed from the support member 221, and a new elastic contact head 222 can be installed on the support member 221, so that the maintenance of the support member 221 can be facilitated. Alternatively, the elastic contact head 222 adapted to the different truncation conditions of the crystal rod can be replaced, and this is not limited.

[0077] Among them, the support member 221 and the elastic contact head 222 arranged thereon can be detachably connected through a variety of structural designs, such as detachably connected through a threaded connection, detachably connected through a snap connection, detachably connected through a pin connection, detachably connected through a magnetic connection, etc., without limitation.

[0078] For example, Figure 7 As shown, a threaded member 223 can be provided on the support member 221, the threaded member 223 is higher than the upper surface of the support member 221, the elastic contact head 222 is provided with a hollow structure, and a nut is provided in the hollow structure, so that the threaded member 223 and the nut are threadedly connected, so that the support member 221 and the elastic contact head 222 can be detachably connected, which is simple to disassemble and convenient to replace.

[0079] Example (III)

[0080] According to another aspect of the present application, a crystal ingot cutting machine is provided. The crystal ingot cutting machine includes a supporting device.

[0081] Among them, the supporting device can be implemented as the supporting device mentioned above, and reference can be made to the introduction above, which will not be repeated here.

[0082] In some embodiments, the ingot cutter has at least two supporting devices. Figure 8 As shown, the crystal rod cutting machine includes two supporting devices in the first embodiment, and the two supporting devices support the two sides of the crystal rod respectively, so as to achieve more stable support. Fig. 9 As shown, two supporting devices in the second embodiment are used to support the two sides of the crystal rod respectively, and this is not limited.

[0083] Based on the above description, according to the crystal rod cutting machine and its supporting device of the embodiment of the present application, one or more supporting members are driven to rise and fall through a driving component, so that the height of each of the one or more supporting members is adapted to the diameter of the crystal rod portion it carries, so that each supporting member can achieve stable support for the crystal rod portion corresponding thereto, so that the crystal rod will not be displaced after being cut off, and the cut crystal segment will not collide with the adjacent crystal segment, thereby avoiding the occurrence of edge collapse and cracks, and improving the product yield.

[0084] Although example embodiments have been described herein with reference to the accompanying drawings, it should be understood that the above example embodiments are merely exemplary and are not intended to limit the scope of the present application to this. Those of ordinary skill in the art may make various changes and modifications therein without departing from the scope and spirit of the present application. All these changes and modifications are intended to be included within the scope of the present application as required by the appended claims.

[0085] Similarly, it should be understood that in order to streamline the present application and help understand one or more of the various application aspects, in the description of the exemplary embodiments of the present application, the various features of the present application are sometimes grouped together into a single embodiment, figure, or description thereof. However, the method of the present application should not be interpreted as reflecting the following intention: the claimed application requires more features than the features clearly stated in each claim. More specifically, as reflected in the corresponding claims, the application point is that the corresponding technical problem can be solved with less than all the features of a single disclosed embodiment. Therefore, the claims following the specific embodiment are hereby explicitly incorporated into the specific embodiment, wherein each claim itself serves as a separate embodiment of the present application.

[0086] In addition, those skilled in the art will appreciate that, although some embodiments described herein include certain features included in other embodiments but not other features, the combination of features of different embodiments is meant to be within the scope of the present application and form different embodiments. For example, in the claims, any one of the claimed embodiments can be used in any combination.

[0087] It should be noted that the above embodiments illustrate rather than limit the present application, and that those skilled in the art may devise alternative embodiments without departing from the scope of the appended claims. In the claims, any reference symbol between brackets should not be construed as a limitation to the claims. The use of the words first, second, and third, etc. does not indicate any order. These words may be interpreted as names.

Claims

1. A supporting device for a crystal rod cutting machine, characterized in that: The supporting device comprises: A plurality of support members, each of which is used to support a crystal rod; A driving assembly, used for driving the plurality of supporting members to move up and down so that the height of each of the plurality of supporting members is adapted to the diameter of the crystal rod portion it carries; Wherein, the driving component comprises: A deformable member, wherein the support member is arranged on the deformable member; Limiting parts; Wherein, a through hole is arranged inside each of the supporting members, and the limiting member is arranged through the through hole of each of the supporting members, so as to limit the supporting members to move only in the up and down directions; The deformable member can drive the multiple supporting members to move up and down through its own deformation; The deformable member includes a deformable air bag, elastic rubber or elastic plastic.

2. The supporting device of the crystal rod cutting machine according to claim 1, characterized in that: The width of the through hole matches the size of the limiting member, and the height of the through hole is greater than the size of the limiting member.

3. The supporting device of the crystal rod cutting machine according to claim 1, characterized in that: It also includes a pressure gauge, which is connected to the air bag and is used to detect the pressure of the air bag.

4. The supporting device of the crystal rod cutting machine according to claim 1, characterized in that: At least two adjacent support members among the plurality of support members are in contact with each other or have a preset interval therebetween.

5. The supporting device of the crystal rod cutting machine according to claim 1, characterized in that: Also includes: A plurality of elastic contact heads, each of which is disposed on one of the support members, and is used for contacting the crystal rod.

6. The supporting device of the crystal ingot cutting machine according to claim 5, characterized in that: The surface of the elastic contact head in contact with the crystal rod is an inclined surface, and the angle range of the inclined surface is 20° to 70°.

7. The supporting device of the crystal ingot cutting machine according to claim 5, characterized in that: The support member and the elastic contact head arranged thereon are detachably connected.

8. A crystal rod cutting machine, characterized in that: The crystal rod cutting machine comprises a supporting device as described in any one of claims 1 to 7.

9. The ingot cutting machine according to claim 8, characterized in that: The crystal ingot cutting machine comprises at least two supporting devices, wherein the two supporting devices support two sides of the crystal ingot respectively.

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