Patch-type flexible vibration sensor for submandibular snore disease tremor and preparation method thereof

Abstract

The application discloses a patch type flexible vibration sensor for submaxillary snore disease tremor and a preparation method thereof, and comprises the following steps: laser etching of a serpentine lower electrode, microstructure water-soluble transfer printing, vibration microcavity dry etching, vibration microcavity on the serpentine lower electrode is obtained, weak acid corrosion residue, diaphragm preparation and through-hole etching, ion island column spin coating, ion island column photocuring, upper and lower electrode layer bonding, and the patch type flexible vibration sensor is obtained. The ion island column structure is introduced on the vibration diaphragm, the low-frequency vibration resolution of the sensor is improved, the high-frequency cutoff frequency of the sensor is tuned by optimizing the through-hole array structure on the vibration diaphragm, and the high-frequency response is widened. The application solves the problem that it is difficult to continuously, long-range and dynamically monitor the wideband disease of snore disease, provides an equipment for continuous monitoring and home treatment of snore disease, and can be used in three-dimensional flexible and extendable integrated equipment and devices in aerospace, aviation and national defense.

Description

Technical Field

[0001] The present invention relates to a patch-type flexible and stretchable integrated sensor for monitoring clinical snoring, vocal cord tremor and swallowing activity and a preparation method thereof, belonging to the field of frontier cross-manufacturing technology of flexible electronics and medical devices. Background Art

[0002] Snoring is one of the 21st century's most life-threatening diseases, on par with cancer and age-related diseases. Long-term snoring can lead to a range of dangerous conditions, including hypertension, coronary heart disease, pulmonary hypertension, stroke, and cor pulmonale. Obstructive sleep apnea, a severe form of snoring, has been shown to be fatal and poses a serious threat to human health. However, due to the complex pathogenesis of snoring and the difficulty of clinical monitoring (due to the lack of portability of monitoring equipment, which precludes long-term monitoring), clinicians often focus on patients with severe symptoms in the later stages of the disease while neglecting screening for those in the early stages. This has led to a limited market for snoring diagnosis and treatment. According to surveys, nearly one billion people worldwide suffer from varying degrees of sleep snoring, with 200 million in China alone, making the snoring diagnosis and treatment market a multi-billion dollar market.

[0003] Snoring, also known as obstructive sleep apnea syndrome, involves monitoring the rhythm of snoring sounds, vocal cord vibrations, and swallowing activity in the submandibular laryngopharynx, which are of great medical value in the diagnosis of snoring. These rhythms, including those of the larynx and upper airway, are crucial for understanding the underlying mechanisms, assessing the condition, and enabling clinical intervention or surgical treatment. Snoring, a pathological phenomenon characterized by airflow-induced vibrations in the narrowed laryngopharynx, has a frequency range of ~800 Hz and is often used to assess the severity of the disease. Vocal cord vibrations, caused by chronic snoring, have a frequency range of ~1.2 kHz. Because the vocal cords are difficult to locate, monitoring vocal cord vibrations allows for precise localization of lesions during vocal cord surgery. Swallowing activity encompasses marker ingestion, laryngeal muscle activity, and aspiration (i.e., coughing, which has a frequency approaching 4 kHz). Marker flow rate and volume, leakage, and swallowing rhythm (~50 Hz) are key indicators of recovery after snoring-tracheal surgery. Swallowing activity involves the low-frequency dynamic rhythm of the laryngeal epidermis rising and falling, while snoring sounds, vibrations, and aspiration represent high-frequency mechanical patterns, encompassing a wideband range of mechanical information, encompassing nearly 4 kHz. To diagnose the above symptoms, rigid microphone probes or electronic laryngoscopes are often used for monitoring and evaluation in clinical practice. However, these methods have the following technical bottlenecks: 1) The complex morphology of the throat makes it difficult to detect deep subcutaneous vibrations (such as vocal cord tremors); 2) The large modulus span between the skin surface and the rigid microphone prevents close conformal adhesion, resulting in severe attenuation of the detection signal; 3) Electronic laryngoscopes are invasive and expensive (relying on imports and costing more than 3,000 yuan per piece), making it difficult to perform long-term digital description of symptoms.

[0004] Therefore, in order to accurately obtain the tremor information of submandibular disease, it is urgent to develop an attachable flexible and stretchable vibration sensor to collect submandibular broadband vibration symptoms, and then analyze the pathogenesis of snoring. This has become a key issue that needs to be urgently solved in the diagnosis and treatment of snoring and the development of related medical instruments and equipment. Summary of the Invention

[0005] To address the aforementioned deficiencies in the prior art, the present invention aims to provide a patch-type, flexible, and stretchable integrated vibration sensor for submandibular snoring and tremor, and its fabrication method. Based on the detection principles of flexible vibration sensors and ionization sensing methods, a flexible, stretchable, and ionization-type broadband vibration sensor is proposed. The sensor is precisely fabricated using hybrid integrated manufacturing techniques, including plasma dry etching of the vibrating microcavity, femtosecond laser etching of the stretchable serpentine electrode and through-hole array, UV-curing of the ion island pillars, and surface plasma treatment of the diaphragm-microcavity-electrode interface. The flexible, stretchable integrated vibration sensor is fabricated using these techniques. The high-amplitude quasi-static vibrations create a double-layer effect in contact with the electrodes, enabling response to low-frequency, high-amplitude excitations. The resonance of the through-hole diaphragm also enables response to low-amplitude, high-frequency excitations, thus achieving broadband response to submandibular vibrations. Due to the device's stretchability and flexibility, it can be tightly attached to the human body, enabling precise acquisition of various submandibular pathologies.

[0006] The present invention is achieved through the following technical solutions.

[0007] In one aspect, the present invention provides a method for preparing a patch-type flexible vibration sensor for treating submandibular snoring tremor, comprising the following steps:

[0008] S1, serpentine bottom electrode laser etching:

[0009] Prepare a PDMS mixed solution; spin-coat the PDMS mixed solution on a clean glass slide;

[0010] The glass slide coated with PDMS was free of bubbles and heated and cured at a constant temperature to obtain a glass slide covered with a PDMS film;

[0011] Spin-coating a polyimide PI solution on the PDMS film of a glass slide, heating and curing the solution to form a film, thereby obtaining a glass slide covered with a polyimide PI film;

[0012] Chromium and gold foil were sputtered onto a glass slide covered with a polyimide (PI) film to obtain a glass slide with a composite film.

[0013] The glass slide with the prepared composite film was circularly cut according to the designed structural contour, laser etched, and the residue was peeled off to obtain a serpentine lower electrode covered with a polyimide PI film on the surface;

[0014] S2, microstructure water-soluble transfer:

[0015] Use water-soluble tape to stick the serpentine lower electrode covered with PI film, and transfer the serpentine lower electrode covered with polyimide PI film to the water-soluble tape;

[0016] A PDMS encapsulation layer was spin-coated on a PMMA plate, and one side of the tape with the PI serpentine bottom electrode was adhered to the PDMS encapsulation layer, irradiated under UV light, soaked, rinsed, and dried to obtain a PI serpentine bottom electrode bonded to the PDMS encapsulation layer;

[0017] S3, vibration microcavity dry etching:

[0018] Spin-coat the Parylene solution on the serpentine bottom electrode and heat-curing it to obtain a Parylene film;

[0019] The hollow mask plate customized according to the position of the microcavity is aligned and positioned with the serpentine lower electrode, and the Parylene film is bombarded with a high-energy plasma beam and cyclically etched to obtain a vibrating microcavity on the serpentine lower electrode;

[0020] Hollow out the mask at the position of the serpentine bottom electrode output wiring, and dry-etch to obtain the exposed bottom electrode wiring;

[0021] S4, weak acid corrosion residue:

[0022] placing the lower electrode for preparing the electrode arrangement wire in a weak acid solution and washing it to obtain the lower electrode and the vibrating microcavity;

[0023] S5, diaphragm preparation and through-hole etching:

[0024] Using the electrode preparation process in step S1, the upper electrode is prepared based on the same femtosecond laser processing technology;

[0025] Spin-coat the Parylene solution on the gold foil bonded to the upper electrode layer of the glass slide and heat-curing to obtain a Parylene film;

[0026] The upper electrode covered with the Parylene film is etched with a through-hole array under an ultraviolet laser to obtain an upper electrode with a through-hole array;

[0027] S6, ion island spin coating:

[0028] Using the vibration microcavity dry etching process in step S3, a cavity structure of ion island columns is etched on the Parylene film of the upper electrode;

[0029] The weak acid etching residue cleaning process in step S4 is used to obtain a clean upper electrode with ion island columns;

[0030] Spin-coating the ion gel on the upper electrode at high speed and filtering the air to obtain the upper electrode covered with the ion gel;

[0031] S7, ion island column light curing:

[0032] The upper electrode covered with the ion gel is placed under ultraviolet light for curing to obtain an upper electrode of ion island columns covered with an ion island binding layer, thereby forming an upper electrode vibration diaphragm;

[0033] S8, bonding of upper and lower electrode layers:

[0034] The vibrating microcavity layer surface of the serpentine lower electrode with the vibrating microcavity layer in step S4 and the vibrating diaphragm surface of the upper electrode obtained in step S7 are exposed to a plasma cleaning machine, and the sides of the upper and lower electrodes covered with the Parylene film are aligned and laminated, vacuum defoamed, heated, and bonded to obtain a patch-type flexible vibration sensor.

[0035] According to an exemplary embodiment of the present invention, in step S1, a PDMS mixed solution is prepared by mixing polydimethylsiloxane and an elastomer curing agent at a mass ratio of (5-15):1 and stirring for 3-8 minutes;

[0036] The elastomer curing agent is a PDMS polymer cross-linking agent.

[0037] According to an exemplary embodiment of the present invention, in step S1, the PDMS film is cured by heating at 60-110° C. for 1-3 hours.

[0038] According to an exemplary embodiment of the present invention, in step S1, the coating is rotated on a coating machine at a speed of 500-1000 r / min for 10-30 seconds;

[0039] Spin-coat the polyimide (PI) solution on the PDMS film on the glass slide at a rotation speed of 2000-3000 rpm for 10-30 seconds; heat at 120-180°C for 1-3 hours.

[0040] According to an exemplary embodiment of the present invention, in step S1, inert gas Ar is filled into the chamber to reduce the gas pressure to 3~10Pa, and the chromium target is sputtered for 60~150s at a voltage of 200~300V and a current of 10~12A; under the same gas pressure and voltage, the gold target is sputtered for 90~240s at a current of 12~15A.

[0041] According to an exemplary embodiment of the present invention, in step S2, a 0.05-0.1 mm thick PDMS encapsulation layer is spin-coated on the PMMA plate; and ultraviolet light is irradiated for 10-30 minutes at a power of 5-20 W.

[0042] According to an exemplary embodiment of the present invention, in step S3, the Parylene solution is spin-coated at a rotation speed of 400-1000 r / min for 10-30 s; and heated at 70-150° C. for 30-90 min to cure.

[0043] According to an exemplary embodiment of the present invention, in step S3, the ion beam current is 4-20 nA and the ion beam current is 5-15 nC / μm. 2 The Parylene film in the cavity is bombarded with ion doses and the etching cycle is repeated 5000 to 10000 times.

[0044] According to an exemplary embodiment of the present invention, in step S8, the surface of the vibrating microcavity layer and the surface of the upper electrode vibrating diaphragm are exposed to a plasma cleaning machine and activated at a power of 20 to 50 W for 5 to 10 minutes; and heated at 60 to 120° C. for 1 to 3 hours to bond to obtain a patch-type flexible vibration sensor.

[0045] Another aspect of the present invention provides a patch-type flexible vibration sensor for submandibular snoring tremor prepared by the method, comprising a top packaging layer, a serpentine upper electrode, an ion island binding layer, an ion island column, a vibration microcavity layer, a serpentine lower electrode, and a bottom packaging layer arranged from top to bottom: the serpentine upper electrode is bonded on the top packaging layer, the ion island binding layer is etched on the serpentine upper electrode, and the interior of the upper cavity of the ion island binding layer is a photocured ion island; the serpentine lower electrode is bonded on the bottom packaging layer, and the vibration microcavity is etched on the serpentine lower electrode;

[0046] The top packaging layer, the serpentine upper electrode, the ion island binding layer and the ion island column together constitute the diaphragm of the sensor, and a through hole is provided on the diaphragm.

[0047] The present invention adopts the above technical solution, which has the following beneficial effects:

[0048] 1. Based on the detection principles of vibration sensors and the electric double-layer capacitance effect, this invention introduces an electrically charged island structure on the vibrating diaphragm to improve the sensor's low-frequency vibration resolution. By optimizing the structural parameters of the through-hole array on the vibrating diaphragm, the sensor's high-frequency cutoff frequency is tuned, thereby broadening the high-frequency response. The sensor consists of an 8×8 array, with extended serpentine lines interconnecting the array elements, thereby achieving device scalability.

[0049] 2. Clinically, it can replace traditional rigid vibration microphones and auxiliary electronic laryngoscopes, solving the problem of difficulty in continuous, long-term, and dynamic monitoring of broadband snoring symptoms. It is expected to enter the clinic and be transformed into a Class II snoring medical device in the short term, providing a device for continuous monitoring of snoring, analysis of pathogenesis, online diagnosis, remote warning, and home treatment.

[0050] 3. The preparation method of the patch-type flexible and stretchable vibration sensor provided involves core manufacturing technologies such as cross-scale micro-nano laser precision processing, unconstrained transfer of micro-nano structures, UV curing, MEMS dry etching and interface alkylation bonding, which can solve the problem of separation between traditional flexible sensors and acquisition equipment.

[0051] 4. Stretchable hybrid integrated manufacturing technology can be used in the field of three-dimensional flexible electronic manufacturing in aerospace, aviation, and national defense. By expanding hybrid flexible key manufacturing technologies to meet major demands such as aircraft skin device integration and missile-borne antenna conformal manufacturing, it can promote the development of flexible stretchable integrated equipment and devices that are restricted by rapid large-scale manufacturing technology. BRIEF DESCRIPTION OF THE DRAWINGS

[0052] The drawings described herein are used to provide a further understanding of the present invention, constitute a part of this application, and do not constitute an improper limitation of the present invention. In the drawings:

[0053] Figure 1 This is a schematic diagram of the exploded structure of a patch-type flexible vibration sensor for submandibular snoring tremor according to the present invention;

[0054] Figure 2 (a) and (b) are schematic diagrams of the patch-type flexible vibration sensor unit;

[0055] Figure 3 This is a process flow chart for preparing the patch-type flexible vibration sensor of the present invention. DETAILED DESCRIPTION

[0056] The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments. The exemplary embodiments and descriptions of the present invention are used to explain the present invention but are not intended to limit the present invention.

[0057] refer to Figure 1 As shown in Figures 2 (a) and (b), the patch-type flexible vibration sensor for submandibular snoring tremor of the present invention includes a sensor composed of an array of M×N flexible vibration sensor units. The flexible vibration sensor unit includes a top packaging layer 1, a serpentine upper electrode 2, an ion island binding layer 3, an ion island column 4, a vibration microcavity layer 5, a serpentine lower electrode 6 and a bottom packaging layer 7 distributed from top to bottom. The top packaging layer 1, the serpentine upper electrode 2, the ion island binding layer 3 and the ion island column 4 together constitute the diaphragm 9 of the sensor, and a through hole 8 is provided on the diaphragm 9.

[0058] Among them, the top packaging layer 1 is bonded with a serpentine upper electrode 2, and a Parylene ion island binding layer 3 is etched on the serpentine upper electrode 2. The interior of the cylindrical cavity on the ion island binding layer 3 is a photocured ion island 4; the bottom packaging layer 7 is bonded with a serpentine lower electrode 6, and a Parylene vibration microcavity 5 is etched on the serpentine lower electrode 6.

[0059] In this embodiment, the top elastomer 1 and bottom elastomer 7 utilize American Ecoflex 00-30 silicone as the stretchable elastomer. Its ultra-low Young's modulus (60 kPa) ensures a perfect match between the flexible substrate and human skin modulus. Organic ions ([EMIM] + [TFSI]-) are dissolved in the photocurable hydroxyethyl acrylate monomer, enabling contactless photocuring of the ion island pillars.

[0060] refer to Figure 3 As shown, the preparation method of a patch-type flexible and stretchable vibration sensor for submandibular snoring tremor includes the following steps:

[0061] Step 1: Laser etching of the extendable serpentine bottom electrode:

[0062] 11) Prepare polydimethylsiloxane (PDMS), silicone elastomer curing agent PDMS polymer crosslinker at a mass ratio of (5-15):1 and stir thoroughly with a glass rod for 3-8 minutes;

[0063] 12) Take another piece of 6×6cm 2 Wash and dry the glass slide according to the method in step 1, evenly apply an appropriate amount of PDMS mixed material on the glass slide, and then place the PDMS-coated glass slide on a coating machine and rotate it at a speed of 500-1000 r / min for 10-30 seconds;

[0064] 13) Remove the PDMS-coated glass slide from the spin coater and place it in a vacuum filter to remove bubbles from the PDMS film. After extraction, place it on a constant temperature heating table and heat at 60-110°C for 1-3 hours to solidify the PDMS film, thus obtaining a glass slide covered with a PDMS film.

[0065] 14) Spin-coat a polyimide (PI) solution onto the PDMS film on a glass slide at a speed of 2000-3000 rpm for 10-30 seconds. Place the slide on a constant temperature heating table and heat at 120-180°C for 1-3 hours to heat the polyimide solution and solidify it into a film, thereby obtaining a glass slide covered with a PI film.

[0066] 15) Place the glass slide covered with the PI film in the magnetron sputtering chamber, fill the chamber with inert gas Ar and reduce the pressure to 3-10 Pa. At a voltage of 200-300 V, adjust the current to 10-12 A to sputter the chromium target for 60-150 s. Then, at the same pressure and voltage, adjust the current to 12-15 A to sputter the gold target for 90-240 s to obtain a glass slide with a composite film. Figure 3 a;

[0067] 16) Place the glass slide with the prepared composite film under a 355nm UV laser A. Enter the pre-designed structure outline B and perform 5-20 cycles of cutting by adjusting the UV light power to 5-10W and the cutting speed to 800-1500mm / min. Once all contours are cut, use tweezers to peel off the remaining copper foil. After cleaning the remaining copper foil on the PDMS surface, use a dust-free cotton swab dipped in alcohol to clean the oxide residue from the laser etching at the edge of the conductive network. This results in the pre-designed serpentine bottom electrode 6 with the PI network layer on the surface. The residue is then peeled off.

[0068] Step 2: Microstructure water-soluble transfer:

[0069] 21) Prepare a 5×5cm 2 Tear off the protective paper on one side of the AQUASOL water-soluble tape, use the adhesive side to remove the adhesive to prepare a complete PI-covered serpentine lower electrode layer, transfer it to the water-soluble tape, and transfer the PI-covered serpentine lower electrode layer 6;

[0070] 22) Then prepare a 5×5cm 2 A 0.05-0.1 mm thick PDMS encapsulation layer 7 is spin-coated on a PMMA plate of different sizes. The transferred PI serpentine electrode layer and one side of the tape are adhered to the prepared PDMS encapsulation layer 7. The plate is then exposed to UV light at a power of 5-20 W for 10-30 min to promote adhesion between the PI and PDMS encapsulation layers.

[0071] 23) Soak the silicone elastomer with the hydrosol tape in deionized water for 2 to 5 hours until the hydrosol tape is completely dissolved by deionized water C. Figure 3 b. The hydrosol tape is dissolved. The conductive structure on the surface of the silicone elastomer is then rinsed with deionized water for 5-20 minutes. A hot air blower is used to dry any remaining moisture around the conductive structure, thereby obtaining a PI-coated serpentine lower electrode 6 bonded to the PDMS encapsulation layer 7.

[0072] Step 3, dry etching of the vibration microcavity:

[0073] 31) Spin-coat the Parylene solution on the prepared serpentine lower electrode layer 6 at a rotation speed of 400-1000 r / min for 10-30 seconds, and heat at 70-150°C for 30-90 minutes to solidify the Parylene film;

[0074] 32) Align and position the hollow mask plate customized according to the position of the microcavity with the lower electrode, and use Plasma high energy beam D with 4~20 nA ion beam current and 5~15 nC / μm 2The Parylene film at the cavity position is bombarded with ion doses and etched repeatedly for 5000~10000 times. Figure 3 c, obtaining a vibration microcavity layer 5;

[0075] 33) Using the etching method in step 32), the electrode output wiring position is hollowed out with a mask and dry-etched to obtain an exposed lower electrode wiring.

[0076] Step 4, weak acid corrosion residue:

[0077] The lower electrode with microcavity is placed in a weak hydrochloric acid solution with a mass fraction of 5-10% to clean the surface etching residue to obtain a clean serpentine lower electrode 6 and a vibrating microcavity layer 5. Figure 3 d.

[0078] Step 5: Diaphragm preparation and through-hole etching:

[0079] 51) Repeat the electrode preparation process in step 1 to prepare the serpentine upper electrode 2 based on the same process;

[0080] 52) Repeat step 31) in step 3 to prepare a Parylene film on the serpentine upper electrode;

[0081] 53) The upper electrode covered with Parylene film was placed under a 355nm UV laser A, and the pre-designed through-hole structure profile was input. By adjusting the power of the UV light to 5-10W and the cutting speed to 300-800mm / min, 20-50 cycles of cutting were performed to obtain a serpentine upper electrode 2 with an array of 8 through-holes, as shown in FIG. Figure 3 e.

[0082] Step 6, spin coating ion island column:

[0083] Repeat the vibration microcavity dry etching process in step 3 to etch the cavity structure of the ion island column 4 on the Parylene film of the serpentine upper electrode 2;

[0084] Repeat the weak acid corrosion residue cleaning process in step 4 to obtain a clean serpentine upper electrode 2 with ion island columns 4;

[0085] Spin-coat a layer of pre-prepared ion gel on the upper electrode and rotate at 400-800 r / min for 10-30 s to allow the gel to fill each cavity. Filter the air to obtain the upper electrode covered with ion gel. Figure 3 f.

[0086] Step 7: Photocuring of ion island columns:

[0087] The upper electrode covered with ion gel is placed under 10-30W ultraviolet light for curing for 5-10 minutes to obtain the upper electrode of ion island column 4 covered with ion island binding layer 3, forming diaphragm 9. Figure 3 g.

[0088] Step 8: Bond the upper and lower electrode layers:

[0089] The surface of the vibrating microcavity layer 5 of the serpentine lower electrode 6 with the vibrating microcavity layer 5 obtained in step 4 and the surface of the upper electrode vibrating diaphragm 9 obtained in step 7 were exposed to a plasma cleaning machine and activated at a power of 20-50W for 5-10 minutes. Then, the vibrating microcavity layer 5 of the upper and lower electrodes and the Parylene film on one side of the ion island binding layer 3 were aligned and bonded under an optical microscope. The bubbles were removed by vacuum filtration and heated at 60-120°C for 1-3 hours. Figure 3 h, bonding to obtain the final patch-type flexible vibration sensor.

[0090] The present invention is further described below through different embodiments.

[0091] Example 1

[0092] A method for preparing a patch-type flexible and stretchable vibration sensor for submandibular snoring tremor comprises the following steps:

[0093] Step 1: Laser etching of the extendable serpentine bottom electrode:

[0094] 11) Prepare polydimethylsiloxane (PDMS) and PDMS polymer crosslinker at a mass ratio of 10:1 and stir thoroughly with a glass rod for 8 minutes;

[0095] 12) Take another piece of 6×6cm 2 Wash and dry the glass slide according to the method in step 1, evenly apply an appropriate amount of PDMS mixed material on the glass slide, and then place the PDMS-coated glass slide on a coating machine and rotate it at a speed of 500r / min for 30s;

[0096] 13) Remove the PDMS-coated glass slide from the spin coater and place it in a vacuum filter to remove bubbles from the PDMS film. After extraction, place it on a constant temperature heating table and heat it at 90°C for 2 hours to solidify the PDMS film, thus obtaining a glass slide covered with a PDMS film.

[0097] 14) Spin-coat a polyimide (PI) solution onto the PDMS film on a glass slide at 3000 rpm for 10 seconds. Place the slide on a constant temperature heating table and heat at 120°C for 3 hours to heat the polyimide solution and solidify it into a film, thereby obtaining a glass slide covered with a PI film.

[0098] 15) Place the glass slide covered with the PI film in the magnetron sputtering chamber, fill the chamber with inert gas Ar and reduce the pressure to 6 Pa. At a voltage of 250 V, adjust the current to 10 A to sputter the chromium target for 100 s. Then, at the same pressure and voltage, adjust the current to 14 A to sputter the gold target for 180 s to obtain a glass slide with a composite film. Figure 3 a;

[0099] 16) Place the glass slide with the prepared composite film under a 355nm UV laser A. Enter the pre-designed structure outline B and perform 20 cycles of cutting by adjusting the UV light power to 10W and the cutting speed to 800mm / min. Once all contours are cut, use tweezers to peel off the remaining copper foil. After cleaning the remaining copper foil on the PDMS surface, use a dust-free cotton swab dipped in alcohol to clean the oxide residue from the laser etching at the edge of the conductive network. This results in the pre-designed serpentine bottom electrode 6 with the PI network layer on the surface. The residue is then peeled off.

[0100] Step 2: Microstructure water-soluble transfer:

[0101] 21) Prepare a 5×5cm 2 Tear off the protective paper on one side of the AQUASOL water-soluble tape, use the adhesive side to remove the adhesive to prepare a complete PI-covered serpentine lower electrode layer, transfer it to the water-soluble tape, and transfer the PI-covered serpentine lower electrode layer 6;

[0102] 22) Then prepare a 5×5cm 2 A 0.05-0.1 mm thick PDMS encapsulation layer 7 was spin-coated on a PMMA plate of different sizes. The transferred PI serpentine electrode layer and one side of the tape were adhered to the prepared PDMS encapsulation layer 7. The plate was then exposed to UV light at a power of 10 W for 20 min to promote adhesion between the PI and PDMS encapsulation layers.

[0103] 23) Soak the silicone elastomer with the hydrosol tape in deionized water for 5 hours until the hydrosol tape is completely dissolved by deionized water C. Figure 3 b. The water-soluble adhesive tape is dissolved. The conductive structure on the surface of the silicone elastomer is then rinsed with deionized water for 5 minutes, and the residual moisture around the entire conductive structure is blown away with a hot air blower, thereby obtaining a PI-coated serpentine lower electrode 6 bonded to the PDMS encapsulation layer 7.

[0104] Step 3, dry etching of the vibration microcavity:

[0105] 31) Spin-coat the Parylene solution on the prepared serpentine lower electrode layer 6 at a rotation speed of 700 r / min for 20 seconds, and heat at 150°C for 30 minutes to solidify to obtain a Parylene film;

[0106] 32) Align and position the hollow mask plate customized according to the position of the microcavity with the lower electrode, and use Plasma high energy beam D with 4~20 nA ion beam current and 5~15 nC / μm 2 The Parylene film at the cavity position is bombarded with ion doses and etched repeatedly for 8000 times. Figure 3 c, obtaining a vibration microcavity layer 5;

[0107] 33) Using the etching method in step 32), the electrode output wiring position is hollowed out with a mask and dry-etched to obtain an exposed lower electrode wiring.

[0108] Step 4, weak acid corrosion residue:

[0109] The lower electrode with microcavity was placed in a weak hydrochloric acid solution with a mass fraction of 7% to clean the surface etching residue to obtain a clean serpentine lower electrode 6 and a vibrating microcavity layer 5. Figure 3 d.

[0110] Step 5: Diaphragm preparation and through-hole etching:

[0111] 51) Repeat the electrode preparation process in step 1 to prepare the serpentine upper electrode 2 based on the same process;

[0112] 52) Repeat step 31) in step 3 to prepare a Parylene film on the serpentine upper electrode;

[0113] 53) The upper electrode covered with Parylene film was placed under a 355nm UV laser A, and the pre-designed through-hole structure profile was input. By adjusting the UV light power to 5W and the cutting speed to 300mm / min, 50 cycles of cutting were performed to obtain a serpentine upper electrode 2 with an array of 8 through-holes, as shown in FIG. Figure 3 e.

[0114] Step 6, spin coating ion island column:

[0115] Repeat the vibration microcavity dry etching process in step 3 to etch the cavity structure of the ion island column 4 on the Parylene film of the serpentine upper electrode 2;

[0116] Repeat the weak acid corrosion residue cleaning process in step 4 to obtain a clean serpentine upper electrode 2 with ion island columns 4;

[0117] Spin-coat a layer of pre-prepared ion gel on the upper electrode and rotate at 400-800 r / min for 10-30 s to allow the gel to fill each cavity. Filter the air to obtain the upper electrode covered with ion gel. Figure 3 f.

[0118] Step 7: Photocuring of ion island columns:

[0119] The upper electrode covered with ion gel was placed under 20W ultraviolet light for curing for 9 minutes to obtain the upper electrode of ion island column 4 covered with ion island binding layer 3, forming diaphragm 9. Figure 3 g.

[0120] Step 8: Bond the upper and lower electrode layers:

[0121] The surface of the vibrating microcavity layer 5 of the serpentine lower electrode 6 with the vibrating microcavity layer 5 obtained in step 4 and the surface of the upper electrode vibrating diaphragm 9 obtained in step 7 were exposed to a plasma cleaning machine and activated at 30W power for 6 minutes. Then, the vibrating microcavity layer 5 of the upper and lower electrodes and the Parylene film on one side of the ion island binding layer 3 were aligned and bonded under an optical microscope. The bubbles were removed by vacuum filtration and heated at 100°C for 2 hours. Figure 3 h, bonding to obtain the final patch-type flexible vibration sensor.

[0122] Example 2

[0123] A method for preparing a patch-type flexible and stretchable vibration sensor for submandibular snoring tremor comprises the following steps:

[0124] Step 1: Laser etching of the extendable serpentine bottom electrode:

[0125] 11) Prepare polydimethylsiloxane (PDMS) and PDMS polymer crosslinker at a mass ratio of 5:1 and stir thoroughly with a glass rod for 3 minutes;

[0126] 12) Take another piece of 6×6cm 2 Wash and dry the glass slide according to the method in step 1, evenly apply an appropriate amount of PDMS mixed material on the glass slide, and then place the PDMS-coated glass slide on a coating machine and rotate it at a speed of 800 r / min for 20 s;

[0127] 13) Remove the PDMS-coated glass slide from the spin coater and place it in a vacuum filter to remove bubbles from the PDMS film. After extraction, place it on a constant temperature heating table and heat it at 110°C for 1 hour to solidify the PDMS film, thus obtaining a glass slide covered with a PDMS film.

[0128] 14) Spin-coat a polyimide (PI) solution onto the PDMS film on a glass slide at 2500 rpm for 20 seconds. Place the slide on a constant temperature heating table and heat at 180°C for 1 hour to heat the polyimide solution and solidify it into a film, thereby obtaining a glass slide covered with a PI film.

[0129] 15) Place the glass slide covered with the PI film in the magnetron sputtering chamber, fill the chamber with inert gas Ar and reduce the pressure to 3 Pa. At a voltage of 200 V, adjust the current to 12 A to sputter the chromium target for 60 s. Then, at the same pressure and voltage, adjust the current to 15 A to sputter the gold target for 90 s to obtain a glass slide with a composite film. Figure 3 a;

[0130] 16) Place the glass slide with the prepared composite film under a 355nm UV laser A. Enter the pre-designed structure outline B and perform five cycles of cutting by adjusting the UV power to 5W and the cutting speed to 1500mm / min. Once all contours are cut, use tweezers to peel off the remaining copper foil. After cleaning the remaining copper foil on the PDMS surface, use a dust-free cotton swab dipped in alcohol to clean the oxide residue from the laser etching at the edge of the conductive network. This results in the pre-designed serpentine bottom electrode 6 with the PI network layer on the surface. The residue is then peeled off.

[0131] Step 2: Microstructure water-soluble transfer:

[0132] 21) Prepare a 5×5cm 2 Tear off the protective paper on one side of the AQUASOL water-soluble tape, use the adhesive side to remove the adhesive to prepare a complete PI-covered serpentine lower electrode layer, transfer it to the water-soluble tape, and transfer the PI-covered serpentine lower electrode layer 6;

[0133] 22) Then prepare a 5×5cm 2 A 0.05-0.1 mm thick PDMS encapsulation layer 7 was spin-coated on a PMMA plate of different sizes. The transferred PI serpentine electrode layer and one side of the tape were adhered to the prepared PDMS encapsulation layer 7. The plate was then exposed to UV light at 20 W for 10 min to promote adhesion between the PI and PDMS encapsulation layers.

[0134] 23) Soak the silicone elastomer with the hydrosol tape in deionized water for 2 hours until the hydrosol tape is completely dissolved by deionized water C. Figure 3 b. The water-soluble adhesive tape is dissolved. The conductive structure on the surface of the silicone elastomer is then rinsed with deionized water for 15 minutes, and the residual moisture around the entire conductive structure is blown away with a hot air blower, thereby obtaining a PI-coated serpentine lower electrode 6 bonded to the PDMS encapsulation layer 7.

[0135] Step 3, dry etching of the vibration microcavity:

[0136] 31) Spin-coat the Parylene solution on the prepared serpentine lower electrode layer 6 at a rotation speed of 1000 r / min for 10 seconds, and heat at 100°C for 60 minutes to solidify to obtain a Parylene film;

[0137] 32) Align and position the hollow mask plate customized according to the position of the microcavity with the lower electrode, and use Plasma high energy beam D with 4~20 nA ion beam current and 5~15 nC / μm 2 The Parylene film at the cavity position is bombarded with ion doses and etched 10,000 times. Figure 3 c, obtaining a vibration microcavity layer 5;

[0138] 33) Using the etching method in step 32), the electrode output wiring position is hollowed out with a mask and dry-etched to obtain an exposed lower electrode wiring.

[0139] Step 4, weak acid corrosion residue:

[0140] The lower electrode with microcavity was placed in a weak hydrochloric acid solution with a mass fraction of 5% to clean the surface etching residue to obtain a clean serpentine lower electrode 6 and a vibrating microcavity layer 5. Figure 3 d.

[0141] Step 5: Diaphragm preparation and through-hole etching:

[0142] 51) Repeat the electrode preparation process in step 1 to prepare the serpentine upper electrode 2 based on the same process;

[0143] 52) Repeat step 31) in step 3 to prepare a Parylene film on the serpentine upper electrode;

[0144] 53) The upper electrode covered with Parylene film was placed under a 355nm UV laser A, and the pre-designed through-hole structure profile was input. By adjusting the UV light power to 10W and the cutting speed to 800mm / min, 20 cycles of cutting were performed to obtain a serpentine upper electrode 2 with an array of 8 through-holes, as shown in FIG. Figure 3 e.

[0145] Step 6, spin coating ion island column:

[0146] Repeat the vibration microcavity dry etching process in step 3 to etch the cavity structure of the ion island column 4 on the Parylene film of the serpentine upper electrode 2;

[0147] Repeat the weak acid corrosion residue cleaning process in step 4 to obtain a clean serpentine upper electrode 2 with ion island columns 4;

[0148] A layer of pre-prepared ion gel was spin-coated on the upper electrode and rotated at 800 r / min for 10 s to allow the gel to fill each cavity. The air was then filtered to obtain the upper electrode covered with ion gel. Figure 3 f.

[0149] Step 7: Photocuring of ion island columns:

[0150] The upper electrode covered with ion gel is placed under 10-30W ultraviolet light for curing for 5-10 minutes to obtain the upper electrode of ion island column 4 covered with ion island binding layer 3, forming diaphragm 9. Figure 3 g.

[0151] Step 8: Bond the upper and lower electrode layers:

[0152] The surface of the vibrating microcavity layer 5 of the serpentine lower electrode 6 with the vibrating microcavity layer 5 obtained in step 4 and the surface of the upper electrode vibrating diaphragm 9 obtained in step 7 were exposed to a plasma cleaning machine and activated at a power of 20W for 10 minutes. Then, the vibrating microcavity layer 5 of the upper and lower electrodes and the Parylene film on one side of the ion island binding layer 3 were aligned and bonded under an optical microscope. The bubbles were removed by vacuum filtration and heated at 120°C for 1 hour. Figure 3 h, bonding to obtain the final patch-type flexible vibration sensor.

[0153] Example 3

[0154] A method for preparing a patch-type flexible and stretchable vibration sensor for submandibular snoring tremor comprises the following steps:

[0155] Step 1: Laser etching of the extendable serpentine bottom electrode:

[0156] 11) Prepare polydimethylsiloxane (PDMS) and PDMS polymer crosslinker at a mass ratio of 15:1 and stir thoroughly with a glass rod for 5 minutes;

[0157] 12) Take another piece of 6×6cm 2 Wash and dry the glass slide according to the method in step 1, evenly apply an appropriate amount of PDMS mixed material on the glass slide, and then place the PDMS-coated glass slide on a coating machine and rotate it at a speed of 1000 r / min for 10 seconds;

[0158] 13) Remove the PDMS-coated glass slide from the spin coater and place it in a vacuum filter to remove bubbles from the PDMS film. After extraction, place it on a constant temperature heating table and heat it at 60°C for 3 hours to solidify the PDMS film, thus obtaining a glass slide covered with a PDMS film.

[0159] 14) Spin-coat a polyimide (PI) solution onto the PDMS film on a glass slide at 2000 rpm for 30 seconds. Place the slide on a constant temperature heating table and heat at 150°C for 2 hours to heat the polyimide solution and solidify it into a film, thereby obtaining a glass slide covered with a PI film.

[0160] 15) Place the glass slide covered with the PI film in the magnetron sputtering chamber, fill the chamber with inert gas Ar and reduce the pressure to 10 Pa. At a voltage of 300 V, adjust the current to 11 A to sputter the chromium target for 150 s. Then, at the same pressure and voltage, adjust the current to 12 A to sputter the gold target for 240 s to obtain a glass slide with a composite film. Figure 3 a;

[0161] 16) Place the glass slide with the prepared composite film under a 355nm UV laser A. Enter the pre-designed structure outline B and perform 10 cycles of cutting by adjusting the UV light power to 8W and the cutting speed to 1000mm / min. Once all the outlines are cut, use tweezers to peel off the remaining copper foil. After cleaning the remaining copper foil on the PDMS surface, use a dust-free cotton swab dipped in alcohol to clean the oxide residue from the laser etching at the edge of the conductive network. This results in the pre-designed serpentine bottom electrode 6 with the PI network layer on the surface. The residue is then peeled off.

[0162] Step 2: Microstructure water-soluble transfer:

[0163] 21) Prepare a 5×5cm 2 Tear off the protective paper on one side of the AQUASOL water-soluble tape, use the adhesive side to remove the adhesive to prepare a complete PI-covered serpentine lower electrode layer, transfer it to the water-soluble tape, and transfer the PI-covered serpentine lower electrode layer 6;

[0164] 22) Then prepare a 5×5cm 2 A 0.05-0.1 mm thick PDMS encapsulation layer 7 was spin-coated on a PMMA plate of different sizes. The transferred PI serpentine electrode layer and one side of the tape were adhered to the prepared PDMS encapsulation layer 7. The plate was then exposed to UV light at 5 W for 30 min to promote adhesion between the PI and PDMS encapsulation layers.

[0165] 23) Soak the silicone elastomer with the hydrosol tape in deionized water for 3 hours until the hydrosol tape is completely dissolved by deionized water C. Figure 3 b. The hydrosol tape is dissolved. The conductive structure on the surface of the silicone elastomer is then rinsed with deionized water for 20 minutes, and the residual moisture around the entire conductive structure is blown away with a hot air blower, thereby obtaining a PI-coated serpentine lower electrode 6 bonded to the PDMS encapsulation layer 7.

[0166] Step 3, dry etching of the vibration microcavity:

[0167] 31) Spin-coat the Parylene solution on the prepared serpentine lower electrode layer 6 at a rotation speed of 400 r / min for 30 seconds, and heat at 70°C for 90 minutes to solidify to obtain a Parylene film;

[0168] 32) Align and position the hollow mask plate customized according to the position of the microcavity with the lower electrode, and use Plasma high energy beam D with 4~20 nA ion beam current and 5~15 nC / μm 2 The Parylene film at the cavity position is bombarded with ion doses and etched 5000 times. Figure 3 c, obtaining a vibration microcavity layer 5;

[0169] 33) Using the etching method in step 32), the electrode output wiring position is hollowed out with a mask and dry-etched to obtain an exposed lower electrode wiring.

[0170] Step 4, weak acid corrosion residue:

[0171] The lower electrode with microcavity was placed in a weak hydrochloric acid solution with a mass fraction of 10% to clean the surface etching residue to obtain a clean serpentine lower electrode 6 and a vibrating microcavity layer 5. Figure 3 d.

[0172] Step 5: Diaphragm preparation and through-hole etching:

[0173] 51) Repeat the electrode preparation process in step 1 to prepare the serpentine upper electrode 2 based on the same process;

[0174] 52) Repeat step 31) in step 3 to prepare a Parylene film on the serpentine upper electrode;

[0175] 53) The upper electrode covered with Parylene film was placed under a 355nm UV laser A, and the pre-designed through-hole structure profile was input. By adjusting the power of the UV light to 7W and the cutting speed to 600mm / min, 40 cycles of cutting were performed to obtain a serpentine upper electrode 2 with an array of 8 through-holes, as shown in FIG. Figure 3 e.

[0176] Step 6, spin coating ion island column:

[0177] Repeat the vibration microcavity dry etching process in step 3 to etch the cavity structure of the ion island column 4 on the Parylene film of the serpentine upper electrode 2;

[0178] Repeat the weak acid corrosion residue cleaning process in step 4 to obtain a clean serpentine upper electrode 2 with ion island columns 4;

[0179] A layer of pre-prepared ion gel was spin-coated on the upper electrode and rotated at 400 r / min for 30 s to allow the gel to fill each cavity. The air was then filtered to obtain the upper electrode covered with ion gel. Figure 3 f.

[0180] Step 7: Photocuring of ion island columns:

[0181] The upper electrode covered with ion gel is placed under 10-30W ultraviolet light for curing for 5-10 minutes to obtain the upper electrode of ion island column 4 covered with ion island binding layer 3, forming diaphragm 9. Figure 3 g.

[0182] Step 8: Bond the upper and lower electrode layers:

[0183] The surface of the vibrating microcavity layer 5 of the serpentine lower electrode 6 with the vibrating microcavity layer 5 obtained in step 4 and the surface of the upper electrode vibrating diaphragm 9 obtained in step 7 were exposed to a plasma cleaning machine and activated at 50W power for 5 minutes. Then, the vibrating microcavity layer 5 of the upper and lower electrodes and the Parylene film on one side of the ion island binding layer 3 were aligned and bonded under an optical microscope. The bubbles were removed by vacuum filtration and heated at 60°C for 3 hours. Figure 3 h, bonding to obtain the final patch-type flexible vibration sensor.

[0184] The sensor provided by the present invention, when a high-frequency signal acts, the laryngeal pharyngeal vibration excitation is transmitted from the bottom packaging layer 7 to the vibrating microcavity layer 5, causing the diaphragm 9 to bulge and collapse axially under the action of the vibration, thereby achieving a strong correlation between the output capacitance and the diaphragm structure, thereby realizing the detection of high-frequency vibration. In addition, when the sensor is subjected to high-amplitude / low-frequency quasi-static vibration, mechanical deformation causes the ion island column layer 4 to form a non-steady-state pre-contact with the serpentine lower electrode 6. Under the action of the bias voltage, the anions and cations inside the ion island column are rapidly arranged in a direction at the interface where the serpentine upper electrode 2 and the serpentine lower electrode 6 contact the ion island column layer 4. Since the ions inside the serpentine lower electrode 6 cannot escape from the polymer, numerous parallel-arranged "positive charge-anion" and "negative charge-cation" charge pairs are formed at the contact interface. The charge pairs cannot directly contact each other to form a nanoscale charge gap, causing the charge pairs to become nanocapacitor pairs. A huge number of capacitor pairs are connected in parallel to form upper and lower electrode interface capacitances with a high capacitance ratio. Compared with the initial pF level of air capacitance, ionic capacitance can form a vibration response that is several orders of magnitude higher than the air capacitance. Low-frequency vibration forms a continuous dynamic high-sensitivity ionic double-layer capacitance at the non-steady-state pre-contact interface, thereby realizing high-resolution perception of quasi-static vibrations and broadband perception of flexible vibration sensors.

[0185] In addition, the flexible sensor can be highly adhered to the skin of the throat, thereby obtaining high-fidelity vibration signals of the throat vital signs. The array composition of the sensor can obtain high-resolution, multi-site throat information, ensuring multi-dimensional information collection under a single disease. At the same time, the combination of the double-layer ionic capacitance effect and the parallel plate capacitance effect can effectively solve the problems of high cost and insufficient response bandwidth of traditional MEMS vibration sensors. The flexible broadband vibration sensor can be used for laryngeal respiratory rhythm, snoring vibration, vocal cord tremor, and voice detection, providing a novel and convenient strategy for home monitoring of dyspnea, clinical snoring assessment, diagnosis, postoperative monitoring, and non-invasive assessment and analysis of swallowing disorders.

[0186] The present invention is not limited to the above-mentioned embodiments. On the basis of the technical solutions disclosed in the present invention, those skilled in the art can make some substitutions and modifications to some of the technical features therein according to the disclosed technical content without creative labor, and these substitutions and modifications are all within the protection scope of the present invention.

Claims

1. A method for preparing a patch-type flexible vibration sensor for submandibular snoring tremor, characterized in that: The following steps are involved: S1, serpentine bottom electrode laser etching: Prepare PDMS mixed solution; The PDMS mixed solution was spin-coated on a clean glass slide; The glass slide coated with PDMS was free of bubbles and heated and cured at a constant temperature to obtain a glass slide covered with a PDMS film; Spin-coating a polyimide PI solution on the PDMS film of a glass slide, heating and curing the solution to form a film, thereby obtaining a glass slide covered with a polyimide PI film; Chromium and gold foil were sputtered onto a glass slide covered with a polyimide (PI) film to obtain a glass slide with a composite film. The glass slide with the prepared composite film was circularly cut according to the designed structural contour, laser etched, and the residue was peeled off to obtain a serpentine lower electrode covered with a polyimide PI film on the surface; S2, microstructure water-soluble transfer: Use water-soluble tape to stick the serpentine lower electrode covered with PI film, and transfer the serpentine lower electrode covered with polyimide PI film to the water-soluble tape; A PDMS encapsulation layer was spin-coated on a PMMA plate, and one side of the tape with the PI serpentine bottom electrode was adhered to the PDMS encapsulation layer, irradiated under UV light, soaked, rinsed, and dried to obtain a PI serpentine bottom electrode bonded to the PDMS encapsulation layer; S3, vibration microcavity dry etching: Spin-coat the Parylene solution on the serpentine bottom electrode and heat-curing it to obtain a Parylene film; The hollow mask plate customized according to the position of the microcavity is aligned and positioned with the serpentine lower electrode, and the Parylene film is bombarded with a high-energy plasma beam and cyclically etched to obtain a vibrating microcavity on the serpentine lower electrode; Hollow out the mask at the position of the serpentine bottom electrode output wiring, and dry-etch to obtain the exposed bottom electrode wiring; S4, weak acid corrosion residue: placing the lower electrode for preparing the electrode arrangement wire in a weak acid solution and washing it to obtain the lower electrode and the vibrating microcavity; S5, diaphragm preparation and through-hole etching: Using the electrode preparation process in step S1, the upper electrode is prepared based on the same femtosecond laser processing technology; Spin-coat the Parylene solution on the gold foil bonded to the upper electrode layer of the glass slide and heat-curing to obtain a Parylene film; The upper electrode covered with the Parylene film is etched with a through-hole array under an ultraviolet laser to obtain an upper electrode with a through-hole array; S6, ion island spin coating: Using the vibration microcavity dry etching process in step S3, a cavity structure of ion island columns is etched on the Parylene film of the upper electrode; The weak acid etching residue cleaning process in step S4 is used to obtain a clean upper electrode with ion island columns; Spin-coating the ion gel on the upper electrode at high speed and filtering the air to obtain the upper electrode covered with the ion gel; S7, ion island column light curing: The upper electrode covered with the ion gel is placed under ultraviolet light for curing to obtain an upper electrode of ion island columns covered with an ion island binding layer, thereby forming an upper electrode vibration diaphragm; S8, bonding of upper and lower electrode layers: The vibrating microcavity layer surface of the serpentine lower electrode with the vibrating microcavity layer in step S4 and the vibrating diaphragm surface of the upper electrode obtained in step S7 are exposed to a plasma cleaning machine, and the sides of the upper and lower electrodes covered with the Parylene film are aligned and laminated, vacuum defoamed, heated, and bonded to obtain a patch-type flexible vibration sensor.

2. The method for preparing a patch-type flexible vibration sensor for treating submandibular snoring tremor according to claim 1, characterized in that: In step S1, a PDMS mixed solution is prepared by mixing polydimethylsiloxane and an elastomer curing agent at a mass ratio of (5-15):1 and stirring for 3-8 minutes; The elastomer curing agent is a PDMS polymer cross-linking agent.

3. The method for preparing a patch-type flexible vibration sensor for treating submandibular snoring tremor according to claim 1, characterized in that: In step S1, the PDMS film is cured by heating at 60-110° C. for 1-3 hours.

4. The method for preparing a patch-type flexible vibration sensor for treating submandibular snoring tremor according to claim 1, characterized in that: In step S1, the coating is rotated on a coating machine at a speed of 500 to 1000 r / min for 10 to 30 seconds; The polyimide PI solution was spin-coated on the PDMS film on the glass slide, and the rotation speed was 2000-3000 r / min for 10-30s; and the solution was heated at 120-180°C for 1-3h.

5. The method for preparing a patch-type flexible vibration sensor for treating submandibular snoring tremor according to claim 1, characterized in that: In step S1, inert gas Ar is filled into the chamber to reduce the gas pressure to 3-10 Pa, and the chromium target is sputtered for 60-150 s at a voltage of 200-300 V and a current of 10-12 A; at the same gas pressure and voltage, the gold target is sputtered for 90-240 s at a current of 12-15 A.

6. The method for preparing a patch-type flexible vibration sensor for treating submandibular snoring tremor according to claim 1, characterized in that: In step S2, a PDMS encapsulation layer with a thickness of 0.05 to 0.1 mm is spin-coated on the PMMA plate; and the plate is irradiated with ultraviolet light at a power of 5 to 20 W for 10 to 30 minutes.

7. The method for preparing a patch-type flexible vibration sensor for treating submandibular snoring tremor according to claim 1, characterized in that: In step S3, the Parylene solution is spin-coated at a rotation speed of 400 to 1000 r / min for 10 to 30 seconds, and heated at 70 to 150° C. for 30 to 90 minutes to cure.

8. The method for preparing a patch-type flexible vibration sensor for treating submandibular snoring tremor according to claim 1, characterized in that: In step S3, the ion beam current is 4-20nA and the ion beam current is 5-15nC / μm. 2 The Parylene film at the cavity position is bombarded with ion doses and the etching cycle is repeated 5000 to 10000 times.

9. The method for preparing a patch-type flexible vibration sensor for treating submandibular snoring tremor according to claim 1, characterized in that: In step S8, the surface of the vibrating microcavity layer and the surface of the upper electrode vibrating diaphragm are exposed to a plasma cleaning machine and activated at a power of 20 to 50 W for 5 to 10 minutes; and heated at 60 to 120° C. for 1 to 3 hours to bond and obtain a patch-type flexible vibration sensor.

10. A patch-type flexible vibration sensor for submandibular snoring tremor prepared according to the method of any one of claims 1 to 9, characterized in that: The process includes a top encapsulation layer, a serpentine upper electrode, an ion island binding layer, an ion island column, a vibration microcavity layer, a serpentine lower electrode, and a bottom encapsulation layer distributed from top to bottom: a serpentine upper electrode is bonded on the top encapsulation layer, an ion island binding layer is etched on the top of the serpentine upper electrode, and the interior of the cavity above the ion island binding layer is a photocured ion island; a serpentine lower electrode is bonded on the bottom encapsulation layer, and a vibration microcavity is etched on the top of the serpentine lower electrode; The top packaging layer, the serpentine upper electrode, the ion island binding layer and the ion island column together constitute the diaphragm of the sensor, and a through hole is provided on the diaphragm.

Images