Scanning Method, Device, Imaging Measuring Instrument, and Storage Medium of an Imaging Measuring Instrument

Abstract

The present application relates to the technical field of image scanning, and provides a scanning method, a device, an image measuring instrument and a storage medium for an image measuring instrument. The method includes: acquiring a field-of-view image of an area array camera; controlling the area array camera to focus on a workpiece to be measured in the field-of-view image according to the field-of-view image, and acquiring a first height of a first coordinate axis of the area array camera after focusing is completed; acquiring a focusing height difference between the area array camera and the line scan camera; determining a second height of the first coordinate axis according to the first height of the first coordinate axis and the focusing height difference; controlling the line scan camera to move to the second height of the first coordinate axis, and keeping the second height to scan the workpiece to be measured. The present application can improve the focusing speed of the line scan camera by guiding the line scan camera to focus through the area array camera.

Description

Technical Field

[0001] The present invention relates to the technical field of image scanning, and particularly relates to a scanning method, device, image measuring instrument and storage medium of an image measuring instrument. Background Art

[0002] Two-dimensional measuring equipment, also known as a two-dimensional image measuring instrument, is a measuring device based on computer vision technology. It can present the two-dimensional image of the object to be measured on the computer screen and perform measurements and calculations through software.

[0003] With the popularization of large-scale automated intelligent manufacturing factories, the requirements for measurement accuracy are getting higher and higher. The line scan camera has high measurement accuracy and can meet the measurement accuracy requirements.

[0004] However, the line scan camera has a small field of view and can only see a part of the image on the workpiece to be measured each time. It is difficult to distinguish the object to be measured in the image, so it is difficult for the line scan camera to focus, resulting in a long focusing time, generally more than half a minute. Summary of the Invention

[0005] In view of the deficiencies of the prior art, the present application provides a scanning method, device, image measuring instrument and storage medium of an image measuring instrument, which is beneficial to improving the focusing speed of the line scan camera.

[0006] To solve the above problems, the present invention provides the following technical solutions:

[0007] In a first aspect, an embodiment of the present application provides a scanning method of an image measuring instrument. The image measuring instrument includes an area array camera and a line scan camera. The method includes:

[0008] Obtain the field of view image of the area array camera;

[0009] According to the field of view image, control the area array camera to focus on the workpiece to be measured in the field of view image, and obtain the first height of the first coordinate axis of the area array camera after focusing is completed;

[0010] Obtain the focusing height difference between the area array camera and the line scan camera;

[0011] Determine the second height of the first coordinate axis according to the first height of the first coordinate axis and the focusing height difference;

[0012] Control the line scan camera to move to the second height of the first coordinate axis and keep scanning the workpiece to be measured at the second height.

[0013] In some embodiments, the method further includes:

[0014] The control area array camera focuses on the measurement circle on the calibration workpiece, measures the measurement circle, and obtains the first center coordinate of the measurement circle;

[0015] The control line scan camera focuses on the measurement circle on the calibration workpiece, measures the measurement circle, and obtains the second center coordinate of the measurement circle;

[0016] Determine the focus height difference according to the first axis difference between the first center coordinate and the second center coordinate.

[0017] In some embodiments, the control area array camera focuses on the measurement circle on the calibration workpiece, measures the measurement circle, and obtains the first center coordinate of the measurement circle, including:

[0018] The control area array camera focuses on the measurement circle on the calibration workpiece;

[0019] Align the camera center of the area array camera with the center of the measurement circle;

[0020] Obtain the area measurement image captured by the area array camera;

[0021] Determine the first center coordinate of the measurement circle according to the area measurement image.

[0022] In some embodiments, the control line scan camera focuses on the measurement circle on the calibration workpiece, measures the measurement circle, and obtains the second center coordinate of the measurement circle, including:

[0023] The control line scan camera focuses on the measurement circle on the calibration workpiece;

[0024] Control the line scan camera to scan the entire area where the measurement circle is located to obtain multiple scan images;

[0025] Stitch the multiple scan images according to a preset stitching rule to obtain a line scan measurement image including the measurement circle;

[0026] Determine the second center coordinate of the measurement circle according to the line scan measurement image.

[0027] In some embodiments, before the control area array camera focuses on the measurement circle on the calibration workpiece, measures the measurement circle, and obtains the first center coordinate of the measurement circle, the method further includes:

[0028] Calibrate the measurement accuracy and scaling accuracy of the area array camera.

[0029] In some embodiments, before the control line scan camera focuses on the measurement circle on the calibration workpiece, measures the measurement circle, and obtains the second center coordinate of the measurement circle, the method further includes:

[0030] Calibrate the lens distortion of the line scan camera.

[0031] In some embodiments, the controlling the area array camera to focus on the workpiece to be measured in the field of view image includes:

[0032] Controlling the area array camera to focus on the physical object on the workpiece to be measured in the field of view image;

[0033] The controlling the line scan camera to move to the second height of the first coordinate axis and maintaining the second height to scan the workpiece to be measured includes:

[0034] Controlling the line scan camera to move to the second height of the first coordinate axis and maintaining the second height to scan the physical object on the workpiece to be measured.

[0035] In a second aspect, an embodiment of the present application provides a scanning device for an image measuring instrument, the device includes:

[0036] A first acquisition unit, configured to acquire a field of view image of an area array camera;

[0037] A focusing unit, configured to control the area array camera to focus on the workpiece to be measured in the field of view image, and acquire the first height of the first coordinate axis of the area array camera after focusing;

[0038] A second acquisition unit, configured to acquire the focusing height difference between the area array camera and the line scan camera;

[0039] A determination unit, configured to determine the second height of the first coordinate axis according to the first height of the first coordinate axis and the focusing height difference;

[0040] A control unit, configured to control the line scan camera to move to the second height of the first coordinate axis and maintain the second height to scan the workpiece to be measured.

[0041] In a third aspect, an embodiment of the present application provides an image measuring instrument, including:

[0042] At least one processor; and,

[0043] A memory communicatively connected to the at least one processor; wherein,

[0044] The memory stores instructions executable by the at least one processor, and the instructions are executed by the at least one processor so that the at least one processor can execute the scanning method of the image measuring instrument in the first aspect.

[0045] Fourthly, an embodiment of the present application provides a computer-readable storage medium storing an executable program, and the executable program, when executed by a processor, implements the scanning method of the image measuring instrument as in the first aspect.

[0046] The present application provides a scanning method, a device, an image measuring instrument and a storage medium for an image measuring instrument. The method includes: obtaining a field of view image of an area array camera; controlling the area array camera to focus on a workpiece to be measured in the field of view image according to the field of view image, and obtaining a first height of a first coordinate axis of the area array camera after the focusing is completed; obtaining a focusing height difference between the area array camera and the line scan camera; determining a second height of the first coordinate axis according to the first height of the first coordinate axis and the focusing height difference; controlling the line scan camera to move to the second height of the first coordinate axis and maintaining the second height to scan the workpiece to be measured. The present application can improve the focusing speed of the line scan camera by guiding the line scan camera to focus through the area array camera. BRIEF DESCRIPTION OF THE DRAWINGS

[0047] Figure 1 is a schematic diagram of an application scenario provided by the present application.

[0048] Figure 2 is a schematic flowchart of a scanning method of an image measuring instrument provided by an embodiment of the present application.

[0049] Figure 3 is a schematic structural diagram of an image measuring instrument provided by an embodiment of the present application.

[0050] Figure 4 is a structural block diagram of a computer-readable storage medium provided by an embodiment of the present application. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0051] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts shall fall within the protection scope of the present application.

[0052] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present invention, "a plurality" means two or more unless otherwise specifically defined.

[0053] Please refer to Figure 1 ,Figure 1 This is a schematic diagram of the application scenario provided by this application. As Figure 1 shown, this application scenario includes an image measuring instrument 1, and the image measuring instrument 1 includes: a line scan camera 10, a area array camera 20, and a measurement plane 30.

[0054] In some embodiments, a workpiece to be measured can be placed on the measurement plane 30.

[0055] In some embodiments, the workpiece to be measured has at least one solid object, and the solid object includes complex geometric entities and basic geometric entities in the workpiece to be measured, etc.

[0056] Exemplarily, the complex geometric entities include Polyline, BezierCurve, etc., and the basic geometric entities include lines, circles, arcs, etc.

[0057] In some embodiments, the images obtained by the line scan camera have solid objects belonging to different height solid layers. For example, in the image obtained by the line scan camera, the first arc is located in the solid layer at the first height, and the second arc is located in the solid layer at the second height. To measure the solid object corresponding to the first arc and the solid object corresponding to the second arc, the line scan camera needs to move to different heights for focusing.

[0058] Among them, all solid objects at the same height form a solid layer.

[0059] Furthermore, due to the limited imaging range of the line scan camera, generally only a part of the solid object can be photographed. Therefore, it is sometimes difficult to distinguish which part of the image is the part corresponding to the solid object to be measured during focusing, so a long focusing time is required. Sometimes, it is found that the focusing is incorrect only after scanning and stitching to obtain the entire image, which affects the scanning efficiency.

[0060] Please refer to Figure 2 , Figure 2 This is a schematic flow chart of a scanning method for an image measuring instrument provided by an embodiment of this application. As Figure 2 shown, the scanning method 100 of this image measuring instrument includes: step 110 to step 150.

[0061] Step 110: Obtain the field of view image of the area array camera.

[0062] In some embodiments, the field of view image of the area array camera can be previewed in a software program.

[0063] In some embodiments, the field of view image of the area array camera can be an image captured by the area array camera.

[0064] Step 120: Control the area array camera to focus on the workpiece to be measured in the field of view image, and obtain the first height of the first coordinate axis of the area array camera after the focusing is completed.

[0065] Specifically, the area array camera has a wide shooting range and can see the entire solid object, while the line scan camera can only see a part of the entire solid object. Therefore, the focusing speed of the area array camera is faster than that of the line scan camera. However, the measurement accuracy of the area array camera is not as high as that of the line scan camera. Therefore, in this application, the area array camera is used to guide the line scan camera to focus, and then the line scan camera is used to scan the workpiece to be measured, so that the image measuring instrument has both high scanning accuracy and fast focusing speed.

[0066] Step 130: Obtain the focusing height difference between the area array camera and the line scan camera.

[0067] In some embodiments, the focusing height difference is determined in advance and stored in a preset position of the storage unit, and can be directly read.

[0068] In some embodiments, the following method is used to determine the focusing height difference. At this time, the scanning method of the image measuring instrument provided in this application further includes the following steps.

[0069] (1) Control the area array camera to focus on the measurement circle on the calibration workpiece, measure the measurement circle, and obtain the first center coordinates of the measurement circle.

[0070] (2) Control the line scan camera to focus on the measurement circle on the calibration workpiece, measure the measurement circle, and obtain the second center coordinates of the measurement circle.

[0071] (3) Determine the focusing height difference according to the difference of the first coordinate axis between the first center coordinates and the second center coordinates.

[0072] In some embodiments, the first coordinate axis is used to determine the distance between the image acquisition device of the image measuring instrument and the workpiece to be measured placed on the image measuring instrument during measurement.

[0073] In some embodiments, the first coordinate axis is perpendicular to the measurement plane.

[0074] In some embodiments, through a software algorithm, the coordinates of each pixel point in the images captured by the area array camera and the line scan camera can be determined. The coordinates of each pixel point include the first coordinate axis coordinates, the second coordinate axis coordinates, and the third coordinate axis coordinates.

[0075] Optionally, the second coordinate axis is parallel to the long side of the measurement plane, and the third coordinate axis is parallel to the short side of the measurement plane.

[0076] In some embodiments, step (1) controls the area array camera to focus on the measurement circle on the calibration workpiece, measures the measurement circle, and obtains the first center coordinates of the measurement circle, including the following steps.

[0077] (1.1) Control the area array camera to focus on the measurement circle on the calibration workpiece.

[0078] (1.2) Align the camera center of the area array camera with the center of the measurement circle.

[0079] (1.3) Obtain the area measurement image captured by the area array camera.

[0080] (1.4) Determine the first center coordinates of the measurement circle according to the area measurement image.

[0081] In some embodiments, theoretically, as long as the area measurement image captured by the area array camera includes the measurement circle, the center coordinates can be obtained. However, in the actual measurement process, due to various interference factors, it is found in practice that the measurement is the most accurate when the camera center of the area array camera is aligned with the center of the measurement circle. Therefore, aligning the camera center of the area array camera with the center of the measurement circle for measurement can improve the accuracy of the first center coordinates.

[0082] In some embodiments, the area measurement image captured by the area array camera includes the entire measurement circle.

[0083] In some embodiments, step (2) controls the line scan camera to focus on the measurement circle on the calibration workpiece, measures the measurement circle, and obtains the second center coordinates of the measurement circle, including the following steps.

[0084] (2.1) Control the line scan camera to focus on the measurement circle on the calibration workpiece.

[0085] (2.2) Control the line scan camera to scan the entire area where the measurement circle is located to obtain multiple scan images.

[0086] (2.3) Stitch the multiple scan images according to a preset stitching rule to obtain a line scan measurement image including the measurement circle.

[0087] (2.4) Determine the second center coordinates of the measurement circle according to the line scan measurement image.

[0088] Step 140: Determine the second height of the first coordinate axis according to the first height of the first coordinate axis and the focus height difference.

[0089] Step 150: Control the line scan camera to move to the second height of the first coordinate axis and maintain the second height to scan the workpiece to be measured.

[0090] In some embodiments, after the line scan camera moves to the second height of the first coordinate axis, the line scan camera and the area array camera are focused on the same focal plane. Therefore, after the line scan camera scans, a clear image of the solid object on the workpiece to be measured can be obtained.

[0091] In some embodiments, in order to ensure the accuracy of calibration, before controlling the area array camera to focus on the measurement circle on the calibration workpiece and measuring the first center coordinate of the measurement circle, the scanning method of the imaging measuring instrument provided by the present application further includes the step of calibrating the measurement accuracy and scaling accuracy of the area array camera.

[0092] In some embodiments, the measurement accuracy of the area array camera is calibrated by a linear scale.

[0093] Specifically, select a linear scale with high precision, clear scale, and no wear. Place the linear scale stably on the measurement plane to reduce vibration and displacement during the measurement process. When calibrating, place the linear scale horizontally or vertically on the measurement plane to ensure its stability without shaking. According to needs, different parts of the linear scale can be selected for calibration to cover different measurement areas of the camera.

[0094] Adjust parameters such as the focal length, exposure, and contrast of the camera to make the scale lines of the linear scale clearly visible in the imaging window. Compare the actual length of the scale lines with the measured length in the image to obtain the measurement error value, and at least select one adjacent scale line for measurement to obtain multiple measurement error values.

[0095] According to the error values, adjust the measurement parameters of the camera (such as pixel equivalent, lens distortion correction, etc.) to reduce the error until multiple measurement error values all meet the requirements.

[0096] In some embodiments, the scaling accuracy of the area array camera is calibrated by concentricity calibration.

[0097] Specifically, during concentricity calibration, it is first necessary to ensure that the working environment of the area array camera has sufficient and uniform light to avoid the influence of shadows and reflections on the measurement accuracy. At the same time, keep the environment stable to reduce the influence of vibration and temperature changes on the calibration results.

[0098] Optionally, prepare a high-precision circular plate or a calibration plate with precise circular holes as the calibration standard part.

[0099] Then, the area array camera is adjusted to multiple different magnification factors to take pictures of the circles in the calibration standard respectively, and multiple center coordinates of each image are calculated; determine whether the deviation of the multiple center coordinates is within the preset range. If it is not within the preset range, the following operations can be performed: 1. Try to adjust the position of the lens to make it point more accurately to the center of the calibration standard; 2. Fine-tune the position of the image sensor in the area array camera; 3. Adjust the camera parameters through software, such as the distortion correction coefficient, focal length correction value, etc., to reduce the measurement deviation; 4. When adjusting the camera parameters, since the camera parameters may affect each other, iterative adjustment can be performed. That is, after adjusting one camera parameter each time, re-measure and record the results, and then analyze the deviation and adjust the next camera parameter.

[0100] In some embodiments, because it is necessary to determine an appropriate calibration period according to the usage frequency of the camera and the measurement requirements, and calibrate the area array camera regularly, after the adjustment is completed, the key data in the calibration process, such as the measurement coordinates at different magnification factors, the values of the adjustment parameters, etc., are recorded to form a record file for reference and traceability during subsequent regular calibrations.

[0101] In some embodiments, a deviation function between the camera parameters and the center coordinates at different magnification factors can be constructed for auxiliary calibration.

[0102] In some embodiments, before the line scan camera is controlled to focus on the measurement circle on the calibration workpiece and measure the second center coordinates of the measurement circle, the scanning method of the image measuring instrument provided in the present application further includes the step of calibrating the lens distortion of the line scan camera.

[0103] In some embodiments, the distortions that the line scan camera needs to calibrate include: geometric distortion, optical distortion, and motion distortion.

[0104] Geometric distortion: includes radial distortion (distortion caused by the shape of the lens, such as the fish-eye effect) and tangential distortion (distortion caused by the non-parallelism between the lens and the imaging plane).

[0105] Optical distortion: distortion caused by defects in optical elements or problems in the optical path design.

[0106] Motion distortion: distortion generated during the imaging process due to the movement of the camera or the target object.

[0107] In some embodiments, step 120 includes the following step (1).

[0108] (1) Control the area array camera to focus on the physical object on the workpiece to be measured in the field of view image according to the field of view image.

[0109] Based on the above step (1), step 150 includes the following step (2).

[0110] (2) Control the line scan camera to move to the second height of the first coordinate axis, and keep the second height to scan the entity object on the workpiece to be measured.

[0111] In some embodiments, there are a large number of entity objects on the workpiece to be measured. The entity objects are, for example, points, lines, circles, arcs, etc. Scanning the workpiece to be measured is actually scanning the entity objects. For the entity objects between different entity layers, the line scan camera needs to refocus. In the above method, by guiding the line scan camera to focus through the area array camera, the focusing time of the line scan camera can be reduced, and the scanning efficiency can be improved.

[0112] The embodiment of the present application also provides a scanning device of an image measuring instrument. The device includes:

[0113] A first acquisition unit, configured to acquire a field of view image of the area array camera;

[0114] A focusing unit, configured to control the area array camera to focus on the workpiece to be measured in the field of view image according to the field of view image, and acquire the first height of the first coordinate axis of the area array camera after focusing;

[0115] A second acquisition unit, configured to acquire the focusing height difference between the area array camera and the line scan camera;

[0116] A determination unit, configured to determine the second height of the first coordinate axis according to the first height of the first coordinate axis and the focusing height difference;

[0117] A control unit, configured to control the line scan camera to move to the second height of the first coordinate axis, and keep the second height to scan the workpiece to be measured.

[0118] Please refer to Figure 3 , Figure 3 is a schematic structural diagram of an image measuring instrument provided by the embodiment of the present application. As Figure 3 shown, the image measuring instrument 200 includes: one or more processors 210 and a memory 220, Figure 3 Here, one processor 210 is taken as an example.

[0119] In some embodiments, the processor 210 and the memory 220 may be connected by a bus or other means, Figure 3 Here, taking the connection by a bus as an example.

[0120] In some embodiments, the processor 210 is configured to obtain a field-of-view image of the area array camera; control the area array camera to focus on the workpiece to be measured in the field-of-view image, and after the focusing is completed, obtain the first height of the first coordinate axis of the area array camera; obtain the focusing height difference between the area array camera and the line scan camera; determine the second height of the first coordinate axis according to the first height of the first coordinate axis and the focusing height difference; control the line scan camera to move to the second height of the first coordinate axis, and maintain the second height to scan the workpiece to be measured.

[0121] In some embodiments, the memory 220, as a non-volatile computer-readable storage medium, can be used to store non-volatile software programs, non-volatile computer-executable programs, and modules, such as program instructions / modules of the scanning method of the image measuring instrument in the embodiments of the present application. The processor 210 executes various functional applications and data processing of the image measuring instrument by running the non-volatile software programs, instructions, and modules stored in the memory 220, that is, implements the scanning method of the image measuring instrument in the above method embodiments.

[0122] In some embodiments, the memory 220 may include a program storage area and a data storage area. Among them, the program storage area can store an operating system and application programs required for at least one function; the data storage area can store data created according to the use of the image measuring instrument, etc. In addition, the memory 220 may include a high-speed random access memory, and may also include a non-volatile memory, such as at least one magnetic disk storage device, a flash memory device, or other non-volatile solid-state storage devices. In some embodiments, the memory 220 may optionally include a memory remotely arranged relative to the processor 210, and these remote memories can be connected to the controller through a network. Examples of the above network include but are not limited to the Internet, an enterprise intranet, a local area network, a mobile communication network, and combinations thereof.

[0123] In some embodiments, one or more modules are stored in the memory 220 and, when executed by one or more processors 210, execute the scanning method of the image measuring instrument in any of the above method embodiments. For example, execute the Figure 2 method steps 110 to 150 described above.

[0124] Please refer to Figure 4 , Figure 4 which is a structural block diagram of a computer-readable storage medium provided by an embodiment of the present application. Program code 310 is stored in the computer-readable storage medium 300, and the program code 310 can be called by a processor to execute the scanning method of the image measuring instrument described in the above method embodiments.

[0125] The computer-readable storage medium 300 can be an electronic memory such as a flash memory, an EEPROM (electrically erasable programmable read-only memory), an EPROM, a hard disk, or a ROM. Optionally, the computer-readable storage medium includes a non-transitory computer-readable storage medium. The computer-readable storage medium 300 has a storage space for program codes that execute any of the method steps in the above control method. These program codes can be read from or written into one or more computer program products. The program codes can be compressed in an appropriate form, for example.

[0126] In summary, the present application provides a scanning method, apparatus, imaging measuring instrument, and storage medium for an imaging measuring instrument. The method includes: obtaining a field-of-view image of an area array camera; controlling the area array camera to focus on a workpiece to be measured in the field-of-view image according to the field-of-view image, and obtaining a first height of a first coordinate axis of the area array camera after focusing is completed; obtaining a focusing height difference between the area array camera and the line scan camera; determining a second height of the first coordinate axis according to the first height of the first coordinate axis and the focusing height difference; controlling the line scan camera to move to the second height of the first coordinate axis, and keeping the second height to scan the workpiece to be measured. The present application can improve the focusing speed of the line scan camera by guiding the line scan camera to focus through the area array camera.

[0127] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some of the technical features; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the various embodiments of the present application.

Claims

1. A scanning method for an image measuring instrument, characterized in that, The image measuring instrument includes an area array camera and a line scan camera, and the method includes: Obtain the field of view image of the area array camera; According to the field of view image, control the area array camera to focus on the workpiece to be measured in the field of view image, and after the focusing is completed, obtain the first height of the first coordinate axis of the area array camera; Control the area array camera to focus on the measurement circle on the calibration workpiece; Align the camera center of the area array camera with the center of the measurement circle; Obtain the area array measurement image captured by the area array camera; Determine the first center coordinate of the measurement circle according to the area array measurement image; Control the line scan camera to focus on the measurement circle on the calibration workpiece; Control the line scan camera to scan the entire area where the measurement circle is located to obtain multiple scan images; Stitch the multiple scan images according to a preset stitching rule to obtain a line scan measurement image including the measurement circle; Determine the second center coordinate of the measurement circle according to the line scan measurement image; Determine the focus height difference according to the first coordinate axis difference between the first center coordinate and the second center coordinate; Obtain the focus height difference between the area array camera and the line scan camera; Determine the second height of the first coordinate axis according to the first height of the first coordinate axis and the focus height difference; Control the line scan camera to move to the second height of the first coordinate axis and keep scanning the workpiece to be measured at the second height.

2. The scanning method of the imaging measuring instrument according to claim 1, characterized in that, Before controlling the area array camera to focus on the measurement circle on the calibration workpiece and measure the measurement circle to obtain the first center coordinate of the measurement circle, the method further includes: Calibrate the measurement accuracy and scaling accuracy of the area array camera.

3. The scanning method of the imaging measuring instrument according to claim 1, wherein, Before controlling the line scan camera to focus on the measurement circle on the calibration workpiece and measure the measurement circle to obtain the second center coordinate of the measurement circle, the method further includes: Calibrate the lens distortion of the line scan camera.

4. The scanning method of the imaging measuring instrument according to claim 1, characterized in that, The step of controlling the area array camera to focus on the workpiece to be measured in the field of view image according to the field of view image includes: Control the area array camera to focus on the solid object on the workpiece to be measured in the field of view image according to the field of view image; The step of controlling the line scan camera to move to the second height of the first coordinate axis and keep scanning the workpiece to be measured at the second height includes: Control the line scan camera to move to the second height of the first coordinate axis and keep scanning the solid object on the workpiece to be measured at the second height.

5. A scanning device of an image measuring instrument, characterized in that, The device includes: A first acquisition unit for acquiring the field of view image of the area array camera; A focusing unit for controlling the area array camera to focus on the workpiece to be measured in the field of view image according to the field of view image, and after the focusing is completed, acquiring the first height of the first coordinate axis of the area array camera; The focusing unit is further configured to control the area array camera to focus on the measurement circle on the calibration workpiece; align the camera center of the area array camera with the center of the measurement circle; obtain an area measurement image captured by the area array camera; determine the first center coordinates of the measurement circle according to the area measurement image; control the line scan camera to focus on the measurement circle on the calibration workpiece; control the line scan camera to scan the entire area where the measurement circle is located to obtain multiple scan images; splice the multiple scan images according to a preset splicing rule to obtain a line scan measurement image including the measurement circle; determine the second center coordinates of the measurement circle according to the line scan measurement image; determine the focusing height difference according to the first coordinate axis difference between the first center coordinates and the second center coordinates; A second acquisition unit, configured to acquire the focusing height difference between the area array camera and the line scan camera; A determination unit, configured to determine the second height of the first coordinate axis according to the first height of the first coordinate axis and the focusing height difference; A control unit, configured to control the line scan camera to move to the second height of the first coordinate axis and keep scanning the workpiece to be measured at the second height.

6. An image measuring instrument, characterized in that, The image measuring instrument includes: At least one processor; and, A memory communicatively connected to the at least one processor; wherein, The memory stores instructions executable by the at least one processor, and the instructions are executed by the at least one processor so that the at least one processor can execute the scanning method of the image measuring instrument according to any one of claims 1-4.

7. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores an executable program, and the executable program is executed by a processor to implement the scanning method of the image measuring instrument according to any one of claims 1-4.

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