A miniature gas atmosphere temperature control device for scanning electron microscope

Abstract

This invention discloses a miniature gas atmosphere temperature control device for scanning electron microscopes, relating to the field of materials testing technology. It includes a temperature control chamber, a mechanical loading component, an environmental monitoring component, a sealing component, and a piping component. The temperature control chamber has an observation window at the top. The mechanical loading component includes two sample clamps arranged opposite each other. The environmental monitoring component includes temperature and pressure sensors and a vacuum flange for controlling the wiring harness connection to the outside. The sealing component includes a window opening and closing mechanism and a drive connection section sealing mechanism. The window opening and closing mechanism includes a sealing sliding cover and a sliding cover drive mechanism, which drives the sealing sliding cover to slide and open or close the observation window. The drive connection section sealing mechanism seals the drive connection section and the temperature control chamber. The piping component includes a high- and low-temperature gas inlet pipe, a vacuum pipe, and a flange. This invention enables temperature control via a gas atmosphere without disrupting the vacuum environment of the scanning electron microscope, achieving uniform heating or cooling of material samples.

Description

Technical Field

[0001] This invention relates to the field of materials testing technology, and in particular to a miniature gas atmosphere temperature control device for scanning electron microscopes. Background Technology

[0002] With the widespread application of materials in industries such as industry, biomedicine, and electronic information, the study of their mechanical properties has become particularly important. Accurate measurement of mechanical properties provides crucial reference for material research and development and application. In practical applications, different environmental conditions have a significant impact on the mechanical properties of materials, and high and low temperature treatments are one of the common and effective research methods.

[0003] In operation, the scanning electron microscope (SEM) operates in a vacuum environment. Lacking a heat-conducting medium, temperature regulation is achieved by using contact heating technology in this vacuum environment, where the heating element directly contacts the surface of the sample. Contact heating does not rely on a heat-conducting medium and offers advantages such as rapid heating, high efficiency, and convenient temperature control. However, because one side of the sample surface is in contact with the heating element while the other side is used for observation, a significant temperature gradient often exists between the measured and heated surfaces. This makes it difficult for the behavior observed by the SEM to accurately reflect the material's mechanical properties, especially when studying materials with low thermal conductivity.

[0004] Using a gaseous atmosphere (such as hot air, nitrogen, argon, and other inert gases) to transfer heat to materials can effectively avoid the temperature gradient caused by contact heating, and is especially suitable for materials with poor thermal conductivity, such as polymers and ceramics. Since scanning electron microscopes operate in a vacuum environment, it is not possible to directly regulate the temperature by introducing gas. Therefore, it is necessary to invent a device that can solve the problem of uneven heating or cooling of material samples in a vacuum environment. Summary of the Invention

[0005] The purpose of this invention is to provide a miniature gas atmosphere temperature control device for scanning electron microscopes to solve the problems existing in the prior art. It can effectively regulate the temperature of material samples without damaging the vacuum environment of the scanning electron microscope, and ensure uniform heating or cooling of the material samples.

[0006] To achieve the above object, the present invention provides the following solutions:

[0007] This invention provides a miniature gas atmosphere temperature control device for a scanning electron microscope, comprising a temperature control chamber, a mechanical loading component, an environmental monitoring component, a sealing component, and a piping component;

[0008] The temperature control room is equipped with an observation window at the top;

[0009] The mechanical loading assembly includes two sample clamps arranged opposite each other. The end of the two sample clamps that is close to each other is a sample fixing section, which is located in the temperature control chamber. The end of the two sample clamps that is far from each other is a drive connection section, which extends outward from the temperature control chamber and is used to connect to the power drive module of the mechanical testing instrument.

[0010] The environmental monitoring component includes a temperature and pressure sensor and a vacuum flange for transferring data transmission control harnesses to an external system. The temperature and pressure sensor is installed in the temperature control chamber, and the vacuum flange is fixed to the outer wall of the temperature control chamber.

[0011] The sealing assembly includes a window opening and closing mechanism and a drive connection section sealing mechanism. The window opening and closing mechanism is disposed in the temperature control chamber. The window opening and closing mechanism includes a sealing sliding cover and a sliding cover drive mechanism. The sealing sliding cover is disposed in the inner wall of the temperature control chamber. The sliding cover drive mechanism is used to drive the sealing sliding cover to slide to open or close the observation window. The drive connection section sealing mechanism is used to seal the connection between the drive connection section and the temperature control chamber.

[0012] The piping assembly includes a high and low temperature air inlet pipe, a vacuum pipe, and a flange. One end of the high and low temperature air inlet pipe and the vacuum pipe are fixed to the side wall of the temperature control chamber and connect to the inner cavity of the temperature control chamber, and the other end is fixed to the flange. The flange is used to seal and connect to the flange of the pipe inside the scanning electron microscope chamber that leads to the external air pump.

[0013] Preferably, the temperature control chamber includes a housing and a base that seals the lower surface of the housing.

[0014] Preferably, the sample clamp is a Z-shaped clamp, the sample fixing section and the drive connecting section are connected by a middle connecting section, the head of the sample fixing section for clamping the material is rectangular, and the rest is cylindrical; the middle connecting section and the drive connecting section are cylindrical, the middle connecting section is perpendicular to the sample fixing section and the drive connecting section; the drive connecting section is parallel to the sample fixing section; the middle connecting section is located in the temperature control chamber.

[0015] Preferably, a radial disc is fixedly provided at one end of the drive connection section located outside the temperature control room; the sealing mechanism of the drive connection section includes a bellows and connecting flanges connected to both ends of the bellows, the bellows and the two connecting flanges are sleeved on the drive connection section and located between the radial disc and the outer side wall of the temperature control room, one connecting flange is sealed to the outer side wall of the temperature control room, and the other connecting flange is sealed to the radial disc.

[0016] Preferably, the rectangular head of the sample fixing section is provided with a groove for placing the sample and a sample fixing pressure plate.

[0017] Preferably, the sliding cover drive mechanism is a crank-connecting rod mechanism, and the power of the crank-connecting rod mechanism is provided by a stepper motor.

[0018] Preferably, a sealing strip is embedded in the inner wall of the temperature control room around the observation window, and after the sealing sliding cover closes the observation window, it is sealed to the inner wall of the temperature control room through the sealing strip.

[0019] Preferably, the inner wall of the temperature control room on both sides of the observation window is provided with a sliding groove, and the two ends of the sealing cover are slidably disposed in the sliding groove on both sides.

[0020] Preferably, the base is provided with a fixing lug for fixed connection to a mechanical testing instrument.

[0021] Preferably, a sample fixing plate is provided on each side of the groove. The sample fixing plate is a Z-shaped plate, and the tail of the Z-shaped plate is installed on the outside of the groove by bolts.

[0022] The present invention achieves the following technical effects compared to the prior art:

[0023] The miniature gas atmosphere temperature control device for scanning electron microscopes provided by this invention can effectively regulate the temperature of material samples without disrupting the vacuum environment of the scanning electron microscope. This device reduces the temperature gradient of the material sample through a gas atmosphere, ensuring uniform heating or cooling of the sample within the scanning electron microscope, thereby improving the accuracy of in-situ mechanical testing at high and low temperatures and solving the problem of difficulty in accurately testing materials with low thermal conductivity in existing technologies. Attached Figure Description

[0024] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0025] Figure 1 This is a schematic diagram of the structure of the micro gas atmosphere temperature control device inside the scanning electron microscope in an embodiment of the present invention;

[0026] Figure 2 This is a schematic diagram of the internal structure of the micro gas atmosphere temperature control device inside the scanning electron microscope in an embodiment of the present invention;

[0027] Figure 3This is a horizontal cross-sectional view taken from below of the micro gas atmosphere temperature control device inside the scanning electron microscope in an embodiment of the present invention.

[0028] Figure 4 This is a longitudinal sectional view of the micro gas atmosphere temperature control device inside the scanning electron microscope in an embodiment of the present invention;

[0029] Figure 5 This is a top view schematic diagram of the micro gas atmosphere temperature control device inside the scanning electron microscope in an embodiment of the present invention;

[0030] Figure 6 This is a schematic diagram of the sample clamp structure in an embodiment of the present invention;

[0031] Figure 7 This is a schematic cross-sectional view of the sealing mechanism between the sample clamp and the drive connection section in an embodiment of the present invention;

[0032] Figure 8 This is a diagram showing the position of the micro gas atmosphere temperature control device and the mechanical testing device inside the scanning electron microscope in an embodiment of the present invention.

[0033] Figure 9 This is a longitudinal sectional view of the micro gas atmosphere temperature control device inside the scanning electron microscope in an embodiment of the present invention.

[0034] Figure 10 for Figure 9 Another state of the miniature gas atmosphere temperature control device inside the scanning electron microscope (corrugated tube contraction).

[0035] In the diagram: 1-Temperature control chamber, 2-Observation window, 3-Sample clamp, 4-Sample fixing section, 5-Drive connection section, 6-Temperature and pressure sensor, 7-Sealing sliding cover, 8-Sliding cover drive mechanism, 9-High and low temperature gas inlet pipe, 10-Vacuum pipe, 11-Flange, 12-Shell, 13-Base, 14-Middle connection section, 15-Radial disc, 16-Bellowed pipe, 17-Connecting flange, 18-Groove, 19-Sample fixing plate, 20-Sealing strip, 21-Slide groove, 22-Fixing lug, 23-Stepper motor, 24-Coupling, 25-Vacuum flange, 100-Miniature gas atmosphere temperature control device inside scanning electron microscope, 200-Mechanical testing instrument, 300-Scanning electron microscope. Detailed Implementation

[0036] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0037] The purpose of this invention is to provide a miniature gas atmosphere temperature control device for scanning electron microscopes to solve the problems existing in the prior art. It can effectively regulate the temperature of material samples without damaging the vacuum environment of the scanning electron microscope, and ensure uniform heating or cooling of the material samples.

[0038] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0039] like Figures 1-10 As shown, this example provides a miniature gas atmosphere temperature control device 100 for scanning electron microscopes, including a temperature control chamber 1, a mechanical loading component, an environmental monitoring component, a sealing component, and a piping component;

[0040] The top of the temperature control room 1 is equipped with an observation window 2;

[0041] The mechanical loading assembly includes two sample clamps 3 arranged opposite to each other. The end of the two sample clamps 3 that is close to each other is a sample fixing section 4, which is located inside the temperature control chamber 1. The end of the two sample clamps 3 that is far from each other is a drive connection section 5, which extends outward from the temperature control chamber 1 and is used to connect to the power drive module of the mechanical testing instrument 200. The power drive module of the mechanical testing instrument 200 drives the two sample clamps 3 to make relative movements that are close to or far from each other, thereby realizing the mechanical loading of the material sample on the sample clamps 3.

[0042] The environmental monitoring component includes a temperature and pressure sensor 6 and a control harness for transmitting data to an external system, a vacuum flange 25. The temperature and pressure sensor 6 is installed inside the temperature control chamber 1, and the vacuum flange 25 is fixed to the outer wall of the temperature control chamber 1.

[0043] The sealing assembly includes a window opening and closing mechanism and a drive connection section sealing mechanism. The window opening and closing mechanism is located inside the temperature control chamber 1. The window opening and closing mechanism includes a sealing sliding cover 7 and a sliding cover drive mechanism 8. The sealing sliding cover 7 is slidably disposed on the inner wall of the temperature control chamber 1. The sliding cover drive mechanism 8 is used to drive the sealing sliding cover 7 to slide to open or close the observation window 2. The drive connection section sealing mechanism is used to seal the drive connection section 5 and the temperature control chamber 1.

[0044] The piping assembly includes a high and low temperature inlet pipe 9, a vacuum pipe 10, and a flange 11. One end of the high and low temperature inlet pipe 9 and the vacuum pipe 10 are welded and fixed to the side wall of the temperature control chamber 1 and connect to the inner cavity of the temperature control chamber 1. The other end is welded and fixed to the flange 11. The flange 11 is used to seal the connection with the pipe flange inside the scanning electron microscope 300 that leads to the external gas pump, so that the gas pump and the temperature control chamber 1 are connected. Gas can be filled into or extracted into the temperature control chamber 1 through the gas pump to realize the vacuuming of the device and the entry of high and low temperature gases into the temperature control chamber 1.

[0045] The micro gas atmosphere temperature control device 100 provided in this example, together with the mechanical testing instrument 200, allows for precise observation and recording of the mechanical properties of material samples at specific temperatures within the scanning electron microscope 300, thereby enabling microstructural characterization and research of the material samples.

[0046] In this embodiment, the temperature control chamber 1 includes a housing 12 and a base 13 sealing the lower surface of the housing 12. The temperature control chamber 1 is preferably a square structure, including a square housing 12 and a square base 13. The base 13 is connected to the open bottom surface of the housing 12 by fastening bolts and a sealing ring, used to seal the housing 12 after the internal components are installed. The base 13 is provided with fixing lugs 22 for fixed connection to the mechanical testing instrument 200, using bolt fixing. The temperature and pressure sensor 6 is integrated by a microcontroller and is bolted to the rear surface inside the housing 12 for monitoring the temperature and pressure of the temperature control chamber 1. A vacuum flange 25 is embedded in the rear side wall of the housing 12. An observation window 2 is located on the upper surface of the housing 12. The observation window 2 is preferably rectangular in shape, resembling a material sample. Considering the travel distance of the sealing sliding cover 7 controlling the opening and closing of the observation window 2, the preferred location of the observation window 2 is near the upper edge of the rear surface of the housing 12. Both the sealing slide cover 7 and the slide cover drive mechanism 8 are mounted on the inner surface above the housing 12 and are used to control the opening and closing of the observation window 2. The side of the housing 12 is provided with round holes for installing the mechanical loading assembly, the vacuum flange 25 and the welded inlet and outlet pipes (high and low temperature inlet pipe 9, vacuum pipe 10).

[0047] In this embodiment, the sample clamp 3 is a Z-shaped clamp. The sample fixing section 4 and the drive connecting section 5 are connected by a middle connecting section 14. The head of the sample fixing section 4 for clamping the material is rectangular, and the rest is cylindrical. The middle connecting section 14 and the drive connecting section 5 are cylindrical. The middle connecting section 14 is vertically arranged and perpendicular to the sample fixing section 4 and the drive connecting section 5. The drive connecting section 5 is parallel to the sample fixing section 4. The middle connecting section 14 is located inside the temperature control chamber 1. Without affecting the installation, the rectangular head of the sample fixing section 4 is positioned close to the observation window 2 of the temperature control chamber to facilitate the observation and recording of in-situ mechanical testing. When assembling the miniature gas atmosphere temperature control device 100 inside this scanning electron microscope, the pair of Z-shaped clamps are inserted into the sample fixing section 4 and the middle connecting section 14 of the clamp through the round hole on the side of the housing 12.

[0048] In this embodiment, a radial disc 15 is fixedly provided at one end of the drive connection section 5 located outside the temperature control chamber 1; the sealing mechanism of the drive connection section includes a bellows 16 and connecting flanges 17 connected to both ends of the bellows 16. The bellows 16 and the two connecting flanges 17 are sleeved on the drive connection section 5 and located between the radial disc 15 and the outer wall of the temperature control chamber 1. One connecting flange 17 is sealed to the outer wall of the temperature control chamber 1 by fastening bolts and sealing rings, and the other connecting flange 17 is sealed to the radial disc 15 by fastening bolts and sealing rings, so as to ensure the sealing of the side of the temperature control chamber 1.

[0049] In this embodiment, the rectangular head of the sample fixing section 4 is provided with a groove 18 for placing the sample and a sample fixing plate 19. A sample fixing plate 19 is provided on each side of the groove 18. The sample fixing plate 19 is a Z-shaped plate, and its tail is bolted to the outside of the groove 18. The Z-shaped plate is used to fix the material sample vertically after it has been placed.

[0050] In this embodiment, the sliding cover drive mechanism 8 is a crank-connecting rod mechanism, powered by a stepper motor 23, which is connected to the sliding cover drive mechanism 8 via a coupling 24. A sealing strip 20 is embedded in the inner wall of the temperature control chamber 1 surrounding the observation window 2. After the sealing sliding cover 7 closes the observation window 2, it is sealed to the inner wall of the temperature control chamber 1 via the sealing strip 20. Slide grooves 21 are provided on the inner walls of the temperature control chamber 1 on both sides of the observation window 2, and the two ends of the sealing sliding cover 7 are slidably disposed in the slide grooves 21 on both sides. The back of the sealing sliding cover 7 is connected to the sliding cover drive mechanism 8 via a pin. The sliding cover drive mechanism 8 is bolted to the inner surface of the top of the housing 12, and the stepper motor 23 and the sliding cover drive mechanism 8 drive the sealing sliding cover 7 to move within the slide grooves 21, controlling the opening and closing of the observation window 2.

[0051] The working principle and usage of the miniature gas atmosphere temperature control device 100 for scanning electron microscope provided in this embodiment will be explained in detail below.

[0052] Before the test, remove the base 13 and inspect the structure and electrical system of the temperature control chamber 1. After confirming that everything is correct, install the base 13 onto the housing 12 using bolts and sealing rings to ensure the bottom of the temperature control chamber housing 12 is sealed. Connect the tail end of the Z-shaped clamp (drive connection section 5) to the power drive module of the mechanical testing instrument 200. Preferably, the transmission mechanism of the mechanical testing instrument 200 is a ball screw, and the power drive module is a nut seat connected to the ball screw. Use bolts to install and fix the temperature control chamber 1 onto the mechanical testing instrument 200 via the fixing lugs 22 on the base 13. During the fixing process, pay attention to adjusting the position of the temperature control chamber 1 so that there is a gap between the circular shaft of the drive connection section 5 of the Z-shaped clamp and the circular hole on the side of the temperature control chamber 1. This is to ensure that the mechanical loading component is only subjected to the driving force of the mechanical testing instrument 200 and the reaction force of the material sample during the test, thus ensuring the accuracy of the test.

[0053] After assembling the miniature gas atmosphere temperature control device 100 and the mechanical testing instrument 200 inside the scanning electron microscope (SEM), place them on the support stage of the SEM 300. Connect the rear wire harness vacuum flange 25 and the front gas pipe flange 11 of the miniature gas atmosphere temperature control device 100 to the corresponding flanges on the inner wall cavity of the SEM 300. Then connect the external control system and the gas pump to the corresponding flanges on the outer wall cavity of the SEM 300, thereby completing the connection between the external control system of the SEM 300 and the miniature gas atmosphere temperature control device 100 inside the SEM 300 cavity. Similarly, complete the connection between the mechanical testing instrument 200 and the external control system.

[0054] The control system causes the sealing cover 7 to slide toward the observation window 2 away from the temperature control chamber housing 12, thereby opening the observation window 2. The material sample is then placed through the observation window 2 into the rectangular head groove 18 of the Z-shaped clamp. The sample fixing plate 19 of the rectangular head is moved to press against the upper surface of the material sample, thus completing the fixing of the material sample.

[0055] The door of the scanning electron microscope 300 is closed, and the air pump is turned on to evacuate the cavity of the scanning electron microscope 300. Since the observation window 2 of the miniature gas atmosphere temperature control device 100 inside the scanning electron microscope is open at this time, the two cavities are connected and both are evacuated. The stepper motor 23 in the temperature control chamber 1 is driven by the external control system to work, so that the sealing cover 7 slides along the groove 21 on the inner surface of the top of the temperature control chamber shell 12 toward the observation window 2, and finally closes the observation window 2. Gas at the expected temperature is introduced into the temperature control chamber 1. Since the cavity of the scanning electron microscope 300 outside the temperature control chamber 1 is in a vacuum state, while gas is introduced into the temperature control chamber 1, a pressure difference is generated inside and outside the temperature control chamber 1. As more gas is introduced, the pre-tightening force on the sealing cover 7 becomes greater, so that the sealing cover 7 is pressed tightly against the sealing strip 20 around the observation window 2, making the temperature control chamber 1 completely sealed.

[0056] The temperature and pressure sensor 6 inside the temperature control chamber 1 is monitored on the external system display. When the temperature reaches the expected temperature, the gas supply is stopped, and a vacuum pump is used to evacuate the temperature control chamber 1. After the evacuation is completed, the pressure difference between the inside and outside of the temperature control chamber 1 is zero, the sealing cover 7 is no longer under force, and the observation window 2 is opened by controlling the sealing cover 7.

[0057] Because of the excellent thermal insulation properties of the vacuum environment, the material sample remains at the expected temperature for a certain period of time. At this time, the motor of the mechanical testing instrument 200 rotates forward or backward at a certain speed, causing the nut seat on the ball screw to drive the two Z-shaped clamps to move towards or away from each other, thereby compressing or stretching the material sample in the temperature-controlled chamber 1. The rectangular head of the Z-shaped clamp is close to the observation window, and the detection instrument of the scanning electron microscope 300 can see and record the changes in the material sample.

[0058] This invention employs a non-contact heating method, transferring heat to the material through a gas atmosphere. This avoids surface damage or contamination that can occur with contact heating, and the gas heating method ensures uniform heating of the material. Furthermore, gas atmosphere heating can be performed under oxygen-free, reducing, or specific atmospheric conditions, making it suitable for material processing requiring precise atmospheric control and effectively preventing oxidation or other chemical reactions during testing.

[0059] In this invention, both the temperature control chamber and the mechanical loading assembly are housed within the vacuum chamber of the scanning electron microscope. Precise gas control is achieved through high and low temperature gas inlet pipes and a vacuum extraction pipeline, ensuring the uniformity of the sample under different temperature conditions. The temperature control chamber has a square structure with an observation window at the top for the scanning electron microscope to observe the sample. Combined with a sealing sliding cover and a sliding cover driving mechanism, the opening and closing of the observation window can be easily controlled, thereby ensuring the sealing and stability of the gas atmosphere.

[0060] The design of the sealing and piping components of this invention ensures stable pressure difference and gas flow between the inside and outside of the temperature control chamber. Temperature and pressure sensors monitor the temperature and pressure inside the temperature control chamber in real time, ensuring an accurate testing environment. The Z-shaped clamps and sample fixing plates in the mechanical loading assembly effectively fix the material sample and provide precise mechanical loading after sample heating or cooling, enabling high-precision observation and recording of the material's microstructure.

[0061] Specific examples have been used to illustrate the principles and implementation methods of this invention. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of this invention. Furthermore, those skilled in the art will recognize that, based on the ideas of this invention, there will be changes in the specific implementation methods and application scope. Therefore, the content of this specification should not be construed as a limitation of this invention.

Claims

1. A miniature gas atmosphere temperature control device for scanning electron microscopes, characterized in that: This includes a temperature control chamber, a mechanical loading assembly, an environmental monitoring assembly, a sealing assembly, and a piping assembly; The temperature control room is equipped with an observation window at the top; The mechanical loading assembly includes two sample clamps arranged opposite each other. The end of the two sample clamps that is close to each other is a sample fixing section, which is located in the temperature control chamber. The end of the two sample clamps that is far from each other is a drive connection section, which extends outward from the temperature control chamber and is used to connect to the power drive module of the mechanical testing instrument. The environmental monitoring component includes a temperature and pressure sensor and a vacuum flange for transferring data transmission control harnesses to an external system. The temperature and pressure sensor is installed in the temperature control chamber, and the vacuum flange is fixed to the outer wall of the temperature control chamber. The sealing assembly includes a window opening and closing mechanism and a drive connection section sealing mechanism. The window opening and closing mechanism is disposed in the temperature control chamber. The window opening and closing mechanism includes a sealing sliding cover and a sliding cover drive mechanism. The sealing sliding cover is slidably disposed on the inner wall of the temperature control chamber. The sliding cover drive mechanism is used to drive the sealing sliding cover to slide to open or close the observation window. The drive connection section sealing mechanism is used to seal the connection between the drive connection section and the temperature control chamber. The piping assembly includes a high and low temperature air inlet pipe, a vacuum pipe, and a flange. One end of the high and low temperature air inlet pipe and the vacuum pipe are fixed to the side wall of the temperature control chamber and connect to the inner cavity of the temperature control chamber, and the other end is fixed to the flange. The flange is used to seal and connect to the flange of the pipe inside the scanning electron microscope chamber that leads to the external air pump.

2. The micro gas atmosphere temperature control device for scanning electron microscopes according to claim 1, characterized in that: The temperature control chamber includes a housing and a base that seals the lower surface of the housing.

3. The micro gas atmosphere temperature control device for scanning electron microscopes according to claim 1, characterized in that: The sample clamp is a Z-shaped clamp. The sample fixing section and the drive connecting section are connected by a middle connecting section. The head of the sample fixing section for clamping the material is rectangular, and the rest is cylindrical. The middle connecting section and the drive connecting section are cylindrical. The middle connecting section is perpendicular to the sample fixing section and the drive connecting section. The drive connecting section is parallel to the sample fixing section. The middle connecting section is located in the temperature control chamber.

4. The micro gas atmosphere temperature control device for scanning electron microscopes according to claim 3, characterized in that: The drive connection section has a radial disc fixed at one end located outside the temperature control room; the sealing mechanism of the drive connection section includes a bellows and connecting flanges connected to both ends of the bellows. The bellows and the two connecting flanges are sleeved on the drive connection section and located between the radial disc and the outer side wall of the temperature control room. One connecting flange is sealed to the outer side wall of the temperature control room, and the other connecting flange is sealed to the radial disc.

5. The micro gas atmosphere temperature control device for scanning electron microscopes according to claim 3, characterized in that: The rectangular head of the sample fixing section is provided with a groove for placing the sample and a sample fixing pressure plate.

6. The micro gas atmosphere temperature control device for scanning electron microscopes according to claim 1, characterized in that: The sliding cover drive mechanism is a crank-connecting rod mechanism, and the power of the crank-connecting rod mechanism is provided by a stepper motor.

7. The micro gas atmosphere temperature control device for scanning electron microscopes according to claim 1, characterized in that: A sealing strip is embedded in the inner wall of the temperature control room around the observation window. After the sealing sliding cover closes the observation window, it is sealed to the inner wall of the temperature control room through the sealing strip.

8. The micro gas atmosphere temperature control device for scanning electron microscopes according to claim 1, characterized in that: The inner wall of the temperature control room on both sides of the observation window is provided with sliding grooves, and the two ends of the sealing cover are slidably disposed in the sliding grooves on both sides.

9. The micro gas atmosphere temperature control device for scanning electron microscopes according to claim 2, characterized in that: The base is provided with a fixing lug for fixed connection to the mechanical testing instrument.

10. The micro gas atmosphere temperature control device for scanning electron microscopes according to claim 5, characterized in that: A sample fixing plate is provided on each side of the groove. The sample fixing plate is a Z-shaped plate, and the tail of the Z-shaped plate is installed on the outside of the groove by bolts.

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