A high-voltage insulating vacuum feedthrough device with flowing liquid seal
By designing a high-voltage insulating vacuum feedthrough with flowing liquid seal and using specific materials and components combined with fluorinated liquid medium, the arcing and sparking problems when the coaxial high-voltage cable is fed into the vacuum system are solved, and the insulation and cooling effects of the cable are achieved.
Patent Information
- Application Number
- CN202411103255.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-13
- Publication Date
- 2025-09-23
- Estimated Expiration
- 2044-08-13
AI Technical Summary
When coaxial high-voltage cables are fed into a vacuum system, arcing and sparking are likely to occur, affecting the stable operation of the system.
A flowing liquid-sealed high-voltage insulating vacuum feedthrough was designed. It used components such as a high-voltage base made of polyoxymethylene, a high-voltage blind plate made of SU304 stainless steel, a high-voltage terminal block made of oxygen-free copper, and a sealing collar and sealing ring made of polyetheretherketone. It was sealed and cooled with a fluorinated liquid medium to prevent the cable from contacting the atmosphere.
It effectively avoids arcing and sparking problems when the coaxial high-voltage cable is fed into a vacuum, and removes internal charges through the flowing medium to achieve insulation and cooling of the cable.
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Figure CN118890761B_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of high-voltage feed-in, and in particular to a flowing liquid-sealed high-voltage insulating vacuum feed-in device. Background Art
[0002] In the field of electro-vacuum technology, high voltages ranging from tens to hundreds of kilovolts are often required to be fed into vacuum systems. For example, in deuterium-deuterium neutron generators, this voltage is required to accelerate and confine the ion beam. Because the contact surface of the coaxial high-voltage cable is exposed to the atmosphere, arcing and even sparking can occur at the feed point when the air is humid, significantly disrupting the system's stable operation and shortening its stable operation time. Summary of the Invention
[0003] The purpose of the present invention is to solve the problem of arcing and sparking easily occurring on the atmospheric side when the coaxial high-voltage cable is fed into the atmosphere as proposed in the above-mentioned background technology, and to design a high-voltage insulating vacuum feeding device with flowing liquid seal, which can effectively avoid the arcing and sparking problem when the coaxial high-voltage cable is fed into the vacuum.
[0004] In order to achieve the above object, the present invention adopts the following technical solutions:
[0005] A high-voltage insulating vacuum feedthrough device with a flowing liquid seal, the device comprising: a high-voltage base, a high-voltage blind plate, a high-voltage terminal, a first sealing ring, a second sealing ring, a third sealing ring, a first bolt, a second bolt, a sealing collar, a sealing end cover, a trapezoidal sealing ring, a housing, a copper wire, and an insulating medium;
[0006] The high-pressure base is made of polyformaldehyde material and is in the shape of a stepped shaft. The middle cylinder has the largest diameter, the lower cylinder has the second largest diameter, and the upper cylinder has the smallest diameter. The connection between the upper cylinder and the middle cylinder is chamfered for a smooth transition to avoid the problem of sparking caused by sharp points in the vacuum chamber. A groove is provided at the center of the upper cylinder of the high-pressure base. The bottom and upper end of the groove are chamfered for a smooth transition, and a radially enlarged cylindrical high-pressure channel is provided at the bottom center of the groove. A sealing groove is provided around the upper end of the high-pressure channel to place a first sealing ring to seal the high-pressure channel. The other end is threaded inside for cooperating with a sealing ring, and threaded holes distributed circumferentially are drilled at the bottom of the groove for connecting to a high-pressure blind plate. Circumferentially distributed through holes are drilled on the middle cylinder of the high-pressure base, and a sealing groove is provided on the upper end surface to place a second sealing ring for connecting to the vacuum chamber to seal the vacuum. A water inlet channel is drilled near the bottom of the lower cylindrical side of the high-pressure base. One end of the channel is connected to the high-pressure channel, and the other end is threaded internally for connecting to a threaded quick connector for easy disassembly and assembly with a water pipe and replacement of parts. On the bottom surface of the lower cylinder, a groove with a slightly larger diameter is first opened based on the inclination angle, and a water outlet channel is then drilled at the bottom of the groove. One end of the water outlet channel is connected to the top of the high-pressure channel near the top, and the other end is also threaded internally for connecting to a threaded quick connector for easy disassembly and assembly with a water pipe and replacement of parts. The purpose of this design is to, on the one hand, seal the coaxial high-voltage cable with insulating liquid to avoid arcing and ignition problems caused by contact with the atmosphere, and on the other hand, the flowing insulating medium can take away the charge accumulated inside the high-voltage channel to avoid ignition, and it can also cool the high-voltage cable.
[0007] Furthermore, the high-voltage blind plate is made of SU304 stainless steel, the diameter of the high-voltage blind plate is slightly smaller than the diameter of the cylindrical groove at the upper end of the high-voltage base, a threaded hole is drilled at the center of the bottom of the high-voltage blind plate for threaded connection with the high-voltage terminal, and circumferentially distributed through holes are drilled on the high-voltage blind plate for connection with the cylindrical groove at the upper end of the high-voltage base through a first bolt.
[0008] Furthermore, the high-voltage terminal is a cylinder made of oxygen-free copper, with threads turned on the outer surface of one end of the cylinder for connecting to the threaded hole at the bottom of the high-voltage blind plate, and a circular hole drilled at the bottom center of the other end for inserting the coaxial high-voltage cable core into the circular hole and connecting by soldering.
[0009] Furthermore, the sealing collar is made of polyetheretherketone (PEEK) and has a stepped shaft shape, with the largest diameter in the middle. The upper and lower cylinders have the same diameter and are threaded on their outer surfaces. A circular through-hole is drilled in the center of the upper cylinder for the coaxial cable to enter the high-voltage channel. A sealing groove is bored in the upper end of the middle cylinder to accommodate the third sealing ring. A trapezoidal sealing groove is provided in the center of the lower cylinder for accommodating the trapezoidal sealing ring.
[0010] Furthermore, the sealing end cover is made of polyetheretherketone (PEEK) material, has an L-shaped cross section, and is internally threaded for cooperation with the sealing collar.
[0011] Furthermore, the first sealing ring, the second sealing ring and the third sealing ring are made of fluororubber material, placed in corresponding sealing grooves, and deformed by screw tightening and extrusion to perform sealing.
[0012] Furthermore, the trapezoidal sealing ring is made of fluororubber, placed in the trapezoidal sealing groove, and deformed by screw tightening and extrusion to seal the coaxial high-voltage cable.
[0013] Furthermore, the shell is made of aluminum alloy, wrapping the part of the high-voltage base exposed outside the vacuum, and connecting the shell and the vacuum cavity through copper wire, so that the entire vacuum cavity and the high-voltage base are maintained at the same potential and play a role in voltage equalization.
[0014] Furthermore, the insulating medium is a fluorinated liquid, which flows into the entire channel through the water inlet pipe and flows out from the water outlet pipe.
[0015] Beneficial effects:
[0016] 1. The present invention injects an insulating medium into the interior of the high-voltage channel to isolate the coaxial high-voltage cable from the atmosphere, thereby avoiding the arcing and ignition problems that are likely to occur on the atmospheric side when the coaxial high-voltage cable is fed into a vacuum. At the same time, the flowing insulating medium can avoid the ignition problem caused by the accumulation of free charges inside the high-voltage channel and can also cool the coaxial high-voltage cable.
[0017] 2. The present invention uses a metal shell to wrap the outside of the high-voltage base, and connects the shell and the vacuum cavity through copper wire, so that the entire vacuum cavity and the high-voltage base are kept at the same potential and play a role in voltage equalization. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] Figure 1 It is a structural schematic diagram of the present invention.
[0019] In the figure: 1-high-voltage base; 101-water inlet pipe; 102-water outlet pipe; 103-high-voltage channel; 104-groove; 2-high-voltage blind plate; 3-first bolt; 4-high-voltage terminal; 5-first sealing ring; 6-second bolt; 7-vacuum chamber; 8-second sealing ring; 9-housing; 10-third sealing ring; 11-sealing collar; 12-coaxial high-voltage cable; 13-trapezoidal sealing ring; 14-sealing end cover; 15-fluorinated liquid. DETAILED DESCRIPTION
[0020] The following is a detailed description of an embodiment of the present invention. This embodiment is implemented based on the technical solution of the present invention, and provides a detailed implementation method and specific operation process, but the protection scope of the present invention is not limited to the following implementation.
[0021] The present invention is described in detail below with reference to the embodiments shown in the accompanying drawings:
[0022] like Figure 1As shown, the present invention provides a high-voltage insulating vacuum feed-in device with a flowing liquid seal, comprising: a high-voltage base 1, a water inlet pipe 101, a water outlet pipe 102, a high-voltage channel 103, a groove 104, a high-voltage blind plate 2, a first bolt 3, a high-voltage terminal 4, a first sealing ring 5, a second bolt 6, a vacuum chamber 7, a second sealing ring 8, a housing 9, a third sealing ring 10, a sealing collar 11, a coaxial high-voltage cable 12, a trapezoidal sealing ring 13, a sealing end cover 14, and a fluorinated liquid 15. The high-voltage base 1 is made of polyformaldehyde and is in the shape of a stepped shaft. The diameter of the middle cylinder is 300 mm, the diameter of the lower cylinder is 240 mm, and the diameter of the upper cylinder is 180 mm. The connection between the upper cylinder and the middle cylinder is rounded for a smooth transition to avoid sparking caused by sharp points in the vacuum chamber. At the center of the upper cylinder of the high-pressure base 1, a groove with a diameter of 140mm and a depth of 80mm is opened. The bottom and upper ends of the groove are chamfered for smooth transition. Circumferentially distributed M6 threaded holes are drilled at the bottom of the groove, and a cylindrical high-pressure channel 103 with radially increasing diameters of 15mm and 50mm respectively is opened at the center of the bottom of the groove. A sealing groove is provided around the upper end of the high-pressure channel 103 to place the first sealing ring 5. By fastening it with the high-pressure blind plate 2 using the first bolt 3, the first sealing ring 5 is squeezed to produce deformation, and the upper end of the high-pressure channel 103 is sealed. The other end of the high-pressure channel 103 is internally threaded for threaded cooperation with the sealing ring 11; a through hole with a circumferential distribution diameter of 10mm is drilled on the middle cylinder of the high-pressure base 1, and a sealing groove is provided on the upper end surface to place the second sealing ring 8. The vacuum chamber 7 and the high-pressure base 1 are fastened together by the second bolt 6, so that the second sealing ring 8 produces deformation and sealing. Seal vacuum; a water inlet channel 101 with a diameter of 14 mm is drilled near the bottom of the lower cylindrical side of the high-voltage base 1. One end of the water inlet channel 101 is connected to the high-pressure channel 103, and the other end is threaded internally for connecting to a threaded quick connector for easy disassembly and assembly with a water pipe and replacement of parts. On the bottom surface of the lower cylinder, a groove 104 with a slightly larger diameter is first opened based on the inclination angle, and a water outlet channel 102 with a diameter of 14 mm is then drilled at the bottom of the groove 104. One end of the water outlet channel 102 is connected to it near the top of the high-pressure channel 103, and the other end is also threaded internally for connecting to a threaded quick connector for easy disassembly and assembly with a water pipe and replacement of parts. The purpose of this design is to, on the one hand, seal the coaxial high-voltage cable 12 with insulating liquid to avoid arcing and sparking problems caused by contact with the atmosphere, and on the other hand, the flowing insulating medium can take away the charge accumulated inside the high-pressure channel 103 to avoid sparking, and at the same time, the coaxial high-voltage cable 12 can also be cooled.
[0023] Preferably, the high-voltage blind plate 2 is made of SU304 stainless steel, the diameter of the high-voltage blind plate is slightly smaller than the diameter of the cylindrical groove at the upper end of the high-voltage base, and an M3 threaded hole is drilled at the center of the bottom of the high-voltage blind plate for threaded connection with the high-voltage terminal 4, and a through hole with a diameter of 7 mm is drilled on the high-voltage blind plate 2 for connecting to the cylindrical groove at the upper end of the high-voltage base 1 through the first bolt 3.
[0024] Preferably, the high-voltage terminal is made of oxygen-free copper and is a cylinder with a diameter of 13 mm. An M3 thread is turned on the outer surface of one end of the cylinder for connecting with the M3 threaded hole at the bottom of the high-voltage blind plate 2. A circular hole with a diameter of 4 mm is drilled at the bottom center of the other end for inserting the core of the coaxial high-voltage cable 12 into the circular hole and connecting by soldering.
[0025] Furthermore, the sealing collar 11 is made of polyetheretherketone (PEEK) and has a stepped shaft shape. The diameter of the middle cylinder is 80mm, and the diameter of the upper and lower cylinders is 60mm. Both cylinders are threaded on their outer surfaces. A circular through-hole with a diameter of 13mm is drilled in the center of the upper cylinder for the coaxial high-voltage cable 12 to enter the high-pressure channel 103. A sealing groove is bored in the upper end surface of the middle cylinder to accommodate the third sealing ring 10. The threads on the upper cylinder surface are screwed together with the internal threads at the bottom of the high-pressure channel 103 to tighten and mate, squeezing and deforming the third sealing ring 10, thereby sealing the high-pressure channel 103. A trapezoidal sealing groove is provided in the center of the lower cylinder for accommodating the trapezoidal sealing ring 13.
[0026] Furthermore, the sealing end cover 14 is made of polyetheretherketone (PEEK) material, has an L-shaped cross section, and is internally threaded for fastening with the sealing collar 11 through threaded engagement.
[0027] Furthermore, the first sealing ring, the second sealing ring and the third sealing ring are made of fluororubber material, placed in corresponding sealing grooves, and deformed by screw tightening and extrusion to perform sealing.
[0028] Furthermore, the trapezoidal sealing ring 13 is made of fluororubber, placed in the trapezoidal sealing groove, and deformed by screw tightening and extrusion to seal the coaxial high-voltage cable 12.
[0029] Furthermore, the shell 9 is made of aluminum alloy with a thickness of 2 mm, which wraps the part of the high-voltage base 1 exposed outside the vacuum, and connects the shell 9 and the vacuum cavity 7 through copper wire, so that the entire vacuum cavity 7 and the high-voltage base 1 are maintained at the same potential and play a role in voltage equalization.
[0030] Furthermore, the insulating medium is fluorinated liquid 15 , which is pumped into the water inlet pipe 101 through a water chiller, thereby filling the entire high-pressure channel and flowing out from the water outlet pipe 102 .
[0031] The above description is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed by the present invention fall within the protection scope and disclosure scope of the present invention.
Claims
1. A high-voltage insulating vacuum feedthrough sealed by flowing liquid, characterized in that: The high-voltage insulation includes: a high-voltage base, a high-voltage blind plate, a high-voltage terminal, a first sealing ring, a second sealing ring, a third sealing ring, a first bolt, a second bolt, a sealing collar, a sealing end cover, a trapezoidal sealing ring, an outer shell, a copper wire, and an insulating medium; the high-voltage base is made of polyformaldehyde material, and the connection between the upper cylinder and the middle cylinder is chamfered for a smooth transition. A groove is provided at the center of the upper cylinder of the high-voltage base, and the bottom and upper ends of the groove are chamfered for a smooth transition. A radially enlarged cylindrical high-voltage channel is provided at the bottom center of the groove, and a sealing groove is provided around the upper end of the high-voltage channel to place the first sealing ring to seal the high-voltage channel, and the other end is threaded inside , which is used to cooperate with the sealing ring, and threaded holes distributed circumferentially are drilled at the bottom of the groove; circumferentially distributed through holes are drilled on the middle cylinder of the high-pressure base, and a sealing groove is opened on the upper end surface to place the second sealing ring, which is used to connect to the vacuum chamber to seal the vacuum; a water inlet channel is drilled near the bottom of the lower cylindrical side of the high-pressure base, one end of the water inlet channel is connected to the high-pressure channel, and the other end is threaded inside for connecting threaded quick connectors to facilitate disassembly and assembly with water pipes and replacement of parts. On the bottom surface of the lower cylinder, a groove with a slightly larger diameter is first opened based on the inclination angle, and a water outlet channel is then drilled at the bottom of the groove. One end of the water outlet channel is connected to the top of the high-pressure channel near it, and the other end is also threaded inside.
2. A flowing liquid sealed high voltage insulating vacuum feedthrough according to claim 1, characterized in that: The high-voltage blind plate is made of SU304 material, a threaded hole is drilled at the center of the bottom of the high-voltage blind plate, and through holes distributed in a circumference are drilled on the high-voltage blind plate.
3. A flowing liquid sealed high voltage insulating vacuum feedthrough according to claim 1, characterized in that: The high-voltage terminal is a cylinder made of oxygen-free copper. A thread is turned on the outer surface of one end of the cylinder, and a circular hole is drilled at the bottom center of the other end.
4. The high-voltage insulating vacuum feedthrough device with flowing liquid seal according to claim 1, characterized in that: The sealing ring is made of polyetheretherketone and is in the shape of a stepped shaft. The outer surfaces of the upper and lower cylinders are threaded, a circular through hole is drilled in the center of the upper cylinder, and a sealing groove is machined on the upper end surface of the middle cylinder to place the third sealing ring; a trapezoidal sealing groove is provided in the center of the lower cylinder for placing the trapezoidal sealing ring.
5. The high-voltage insulating vacuum feedthrough device with flowing liquid seal according to claim 1, characterized in that: The sealing ring is made of fluororubber, placed in the corresponding sealing groove, and deformed by screw tightening and extrusion to perform sealing.
6. The flowing liquid sealed high voltage insulating vacuum feedthrough according to claim 1, characterized in that: The trapezoidal sealing ring is made of fluororubber, is placed in the trapezoidal sealing groove, and is deformed by screw tightening and extrusion to seal the coaxial high-voltage cable.
7. The flowing liquid sealed high voltage insulating vacuum feedthrough according to claim 1, characterized in that: The shell is made of aluminum alloy, wraps the part of the high-voltage base exposed outside the vacuum, and connects the shell and the vacuum cavity through copper wire.
8. The flowing liquid sealed high voltage insulating vacuum feedthrough according to claim 1, characterized in that: The insulating medium is fluorinated liquid, which is pumped into the high-pressure channel through a chiller.
Citation Information
Patent Citations
Device for solving problem of electrode ignition of coaxial cable adapter in low-pressure plasma environment
CN118137241A
High-voltage coaxial feed-in vacuum system device
CN203645906U