Substrate container protection device

Abstract

The present application provides a substrate container protection device, which is suitable for a substrate container. The substrate container protection device comprises a container door body and a restrictor for resisting and fixing a substrate, a support and an elastic connecting member for engaging and fixing with a container body, and an elastic interference of an anti-static element to provide an electrostatic dissipation path as an electrostatic protection for the substrate. The substrate container protection device of the present application is suitable for improving the protection of the substrate container for the substrate and solving the damage to the substrate caused by vibration, dust, static electricity and other problems.

Description

Technical Field

[0001] The present invention provides a substrate container protection device, and more particularly a substrate container protection device that protects the substrate carried inside the substrate container from damage. Background Technology

[0002] Industrial electronic component-related sheet products, such as circuit boards, wafers, trays, and glass substrates, often need to be contained in containers for protection, support, or transportation. The containers that hold these electronic component-related products or semiconductor process-related components need to be designed with good substrate container protection measures to avoid damage to the substrates stored inside.

[0003] Existing substrate containers, taking non-circular substrates as an example, are all equipped with a door, and the door has a limiter to restrict substrate displacement. When a non-circular substrate is placed in the carrying space of the substrate container, the distance between the non-circular substrate and the opening of the substrate container is greater than the distance between the non-circular substrate and the opening of the substrate container. This means that the limiter must be designed to protrude from the inner surface of the door to abut against the side edge of the non-circular substrate to fix the substrate in the container and prevent it from vibrating or shaking during transportation. However, when the substrate container is transported to the load port and the door needs to be opened for loading and unloading the substrate, the limiter, because it protrudes from the inner surface of the door, interferes with the robotic arm when it removes the door and retracts it into the load port, leading to operational malfunctions.

[0004] Furthermore, existing substrate containers contain support members and multiple trays on the support members to support substrates, such as non-circular substrates, and utilize stacked trays for repeated loading and unloading. However, the overall weight of the substrate container used to support the trays and substrates is much heavier than that of a substrate container without trays. The support members are easily affected by the weight and downward forces during transportation, causing gaps to form at the joint between the support members and the substrate container. This leads to friction and dust contamination, and even worse, the support members may fall out of the substrate container, damaging the substrates.

[0005] In addition to dust contamination caused by mechanical interference and friction, damage to the substrate or functional impairment caused by electrostatic interference is also a major concern. Existing substrate containers used to support trays and substrates do not have any solutions to the problem of electrostatic damage.

[0006] Therefore, how to solve the many problems mentioned above, such as abrasion and dust contamination caused by vibration or friction on the substrate, as well as microstructural damage or functional impairment caused by electrostatic interference, are urgent problems that the industry needs to overcome. Summary of the Invention

[0007] The main objective of this invention is to improve the structural design of the limiter, which can solve the problem that the existing limiter used to hold and fix the substrate protrudes from the inner surface of the door, causing the automated system to malfunction due to interference from the limiter during the transfer of the door to the receiving area.

[0008] Another objective of this invention is to improve the structural design of the support member, which can solve the risk of substrate damage caused by dust particles generated by vibration and friction.

[0009] Another object of the present invention is to provide a novel antistatic element that can solve the problem of damage to the substrate inside the substrate container due to electrostatic discharge.

[0010] An embodiment of the present invention provides a substrate container protection device suitable for a substrate container. The substrate container includes a container body and a container door. The container door is suitable for closing with the container body. The container body is provided with at least one support member and a receiving portion for receiving the substrate. The container door is provided with a recessed portion. The substrate container protection device includes: a limiter disposed in the recessed portion of the container door. The limiter includes: a base disposed in the container door and at least one movable piece pivotally connected to the base. The movable piece includes a pivot side of a first portion and a free side of at least a second portion. The pivot side is used to abut against the support member of the container body. The free side expands outward and abuts against the substrate according to the abutting force of the pivot side, or the free side contracts inward, so that the height of the top surface of the limiter facing the receiving portion is less than the height of the inner surface of the container door.

[0011] In one embodiment, the limiter further includes an elastic member disposed between the base and the movable piece, the elastic member providing an elastic variation in the outward expansion and inward contraction of the free side according to the bearing force on the pivot side.

[0012] In one embodiment, when there are two movable pieces, the pivot sides of the two movable pieces are offset from each other, and the pivot sides are used to abut against the support located on the container body.

[0013] In one embodiment, a latching member is further included, disposed in a recess of the container door, the latching member being detachably fitted with a limiter.

[0014] In one embodiment, a limiting member is further included, disposed in a recess of the container door, the limiting member being used to fix the limiter.

[0015] An embodiment of the present invention provides a substrate container protection device, applicable to a substrate container. The substrate container includes a container body and a container door, the container door being suitable for closing with the container body. The container body has multiple slots for correspondingly accommodating support members. The substrate container protection device includes: a limiter as described in the previous embodiment; multiple support members for supporting the substrate, each support member including: a protrusion located on the top surface of the support member, the protrusion being correspondingly inserted into the multiple slots; a reinforcing support portion disposed on the protrusion, the reinforcing support portion including: a rigid connector and an elastic connector including an extension and a hooking portion, one end of the extension being connected to the rigid connector, the other end of the extension being connected to the hooking portion, the hooking portion engaging with the slot of the container body, the rigid connector having a higher hardness than the elastic connector.

[0016] In one embodiment, the rigid connector is embedded within the protrusion.

[0017] An embodiment of the present invention provides a substrate container protection device applicable to a substrate container. The substrate container includes a container body, a base, and at least one support member. The base is disposed at the bottom of the container body, and the support member is disposed within a receiving portion of the container body. The base and the support member are made of an electrostatic dissipation material. The substrate container protection device includes: a limiter as described above; and at least one antistatic element disposed between the bottom of the container body and the base. The antistatic element includes: a fixing portion disposed at the bottom of the container body and connected to the support member; and an elastic connector, one end of which is connected to the fixing portion, and the other end of which elastically abuts against the inner surface of the base; wherein the support member, the antistatic element, and the base define an electrostatic dissipation path.

[0018] In one embodiment, the bottom of the container body and the base define an interference exclusion structure, the interference exclusion structure is located at the bottom of the container body below the support, and the antistatic element is located in the interference exclusion structure.

[0019] In one embodiment, when there are multiple antistatic components and multiple support members, the multiple antistatic components are correspondingly arranged at the positions of the multiple support members.

[0020] In one embodiment, the antistatic element further includes a conductive bridge for connecting the fixing part to the support member via the bottom of the container body.

[0021] In one embodiment, the top surface of the conductive bridge is lower than the height of the top surface of the fixing part facing the base.

[0022] In one embodiment, the conductive bridging element is a metal screw that secures the fixing part to the bottom of the support element via the bottom of the container body.

[0023] In one embodiment, the fixing part is fixed to the conductive bridge member, so that the antistatic element can be connected to the support member through the bottom of the container body.

[0024] In one embodiment, the fixing part has a screw hole, and a metal screw is locked in the screw hole, so that the antistatic element can be connected to the support through the bottom of the container body.

[0025] The substrate container protection device of the present invention not only ensures that the substrate is clamped and fixed in place by the limiter without displacement or vibration when placed and carried in the substrate container, but also prevents unwanted interference between the mechanism and components, and effectively fixes the substrate and provides electrostatic protection. This achieves the purpose of protecting the substrate inside the container and improves the safety of the substrate when it is carried or transported within the container. Attached Figure Description

[0026] Figure 1A This shows a perspective view of a container body to which the substrate container protection device is applicable in one embodiment of the present invention;

[0027] Figure 1B This shows a perspective view of the container door of the substrate container protection device according to an embodiment of the present invention;

[0028] Figure 2 An exploded view of the limiter of a substrate container protection device according to an embodiment of the present invention is shown.

[0029] Figure 3 This shows a perspective view of the limiter of a substrate container protection device according to an embodiment of the present invention;

[0030] Figure 4 This shows a front view of a substrate container to which the substrate container protection device is applicable in an embodiment of the present invention.

[0031] Figure 5A The limiter of the substrate container protection device shown in one embodiment of the present invention is along... Figure 4 A schematic diagram of the cross-sectional movement of line segment AA;

[0032] Figure 5B The limiter of the substrate container protection device shown in one embodiment of the present invention is along... Figure 4 A schematic diagram of the cross-sectional movement of line segment AA;

[0033] Figure 5C The limiter of the substrate container protection device shown in one embodiment of the present invention is along... Figure 4 A schematic diagram of the cross-sectional movement of line segment AA;

[0034] Figure 6A This diagram shows a schematic of the limiter of the substrate container protection device assembled in front of the container door in an embodiment of the present invention.

[0035] Figure 6B This diagram shows a schematic of the limiter of the substrate container protection device assembled after the container door body in one embodiment of the present invention;

[0036] Figure 7A Display along Figure 1A A top view of the cross section of the "BB" line segment;

[0037] Figure 7B show Figure 7A A partially enlarged schematic diagram of the support component;

[0038] Figure 7C show Figure 7A A partially enlarged three-dimensional schematic diagram of the support component;

[0039] Figure 8A This shows a perspective view of the support member of the substrate container protection device in one embodiment of the present invention;

[0040] Figure 8B This shows a perspective view of the elastic connector of the substrate container protection device according to an embodiment of the present invention;

[0041] Figure 8C This is a perspective view showing the elastic connector of the substrate container protection device connected to the rigid connector in one embodiment of the present invention;

[0042] Figure 9 This shows a perspective view of a substrate container to which the substrate container protection device is applicable in one embodiment of the present invention.

[0043] Figure 10 This diagram shows an exploded view of a substrate container to which the substrate container protection device is applicable, according to an embodiment of the present invention.

[0044] Figure 11 This diagram shows an exemplary enlarged view of the antistatic components, support members, and electrical connections of the base to which the substrate container protection device is applicable in an embodiment of the present invention.

[0045] Figure 12 This diagram shows an exemplary enlarged view of the antistatic components, support members, and electrical connections of the base to which the substrate container protection device is applicable in an embodiment of the present invention.

[0046] Figure 13 This diagram shows an exploded view of a substrate container to which the substrate container protection device is applicable, according to an embodiment of the present invention.

[0047] Figure Labels

[0048] 10 substrate container

[0049] 100 container body

[0050] 101 Card Slot

[0051] 102 Bottom

[0052] 103 First conductive contact

[0053] 110 Support component

[0054] 111 protuberance

[0055] 112 Reinforced Support Section

[0056] 120 Rigid Connector

[0057] 130 Flexible connector

[0058] 131 Extension

[0059] 132 holes

[0060] 135 Hookup Department

[0061] 150 Storage Department

[0062] 151 First Bearing Section

[0063] 152 Second bearing section

[0064] 200 Container Door

[0065] 201 Inner Surface

[0066] 210 Recess

[0067] 220 Fastener

[0068] 230 Limiting component

[0069] 300 limiter

[0070] 310 base

[0071] 320 Event Video

[0072] 321 Pivot side

[0073] 322 Free side

[0074] 330 Pivot

[0075] 340 elastic element

[0076] 400 base

[0077] 401 Inner Surface

[0078] 402 Second conductive contact

[0079] 410 Excluding interference structures

[0080] 420 Conductive Bridge

[0081] 500 Antistatic Components

[0082] 510 Fixing part

[0083] 520 Flexible Connector

[0084] 521 Hook Feature

[0085] 600 substrates

[0086] EC electrical connection

[0087] H Top surface height

[0088] ID Installation Direction

[0089] L Limit Position Detailed Implementation

[0090] To illustrate the technical content of this invention in detail, the following description, in conjunction with embodiments and accompanying drawings, provides further insight. It should be noted that, throughout this document, terms such as "first," "second," and "third" are used to distinguish between elements, rather than to limit the elements themselves or indicate a specific order of elements. Furthermore, throughout this document, unless a specific quantity is specifically indicated, the article "a" refers to one element or more than one element.

[0091] To fully understand the purpose, features and effects of the present invention, the present invention will be described in detail below through specific embodiments and in conjunction with the accompanying drawings.

[0092] Please also refer to Figures 1A to 4 , Figure 1A This shows a perspective view of a container body 100 to which the substrate container protection device is applicable in one embodiment of the present invention. Figure 1B This shows a perspective view of the container door 200 of the substrate container protection device according to an embodiment of the present invention; Figure 2 An exploded view of the limiter of a substrate container protection device according to an embodiment of the present invention is shown. Figure 3 This shows a perspective view of the limiter of a substrate container protection device according to an embodiment of the present invention; Figure 4 This shows a front view of a substrate container 10 to which the substrate container protection device is applicable in one embodiment of the present invention.

[0093] The substrate container 10 includes a container body 100, within which at least one support member 110 and a receiving portion 150 for receiving substrates 600 are provided. In this embodiment, the substrate 600 is a non-circular sheet product, such as a wafer or circuit board carried on a tray. In this embodiment, to accommodate multiple stacked substrates 600, multiple support members 110 are correspondingly configured to meet the requirements for receiving substrates 600. Taking the capacity to receive two sets of stacked substrates 600 as an example, to provide sufficient support capacity for the substrates, three support members 110 are provided in the container body 100 at intervals and located on adjacent sides of the two sets of stacked substrates 600.

[0094] The substrate container 10 includes a container door 200, which is adapted to be closed with the container body 100. A recess 210 is provided on the inner surface 201 of the container door 200 facing the receiving portion 150. The substrate container protection device includes a limiter 300 disposed in the recess 210 of the container door 200. The detailed structure of the limiter 300 is further described. The limiter 300 includes a base 310 and at least one movable piece 320. The base 310 is disposed in the recess 210 of the container door 200 and is located away from the inner surface 201 of the container door 200. Two movable pieces 320 are used, for cooperating to support two sets of stacked substrates 600. The movable piece 320 includes a first pivot side 321 and a second free side 322 connected to the pivot side 321. The movable piece 320 is pivotally connected to the base 310 via a pivot 330; the pivot sides 321 of the two movable pieces 320 are offset from each other.

[0095] The limiter 300 also includes an elastic element 340 disposed between the base 310 and the movable piece 320. The elastic element 340 provides an elastic change in the outward expansion and inward contraction of the free side 322 based on the holding force of the pivot side 321. The elastic element 340 is a spring, torsion spring, or other element capable of storing and releasing elastic potential energy. The pivot side 321 supports the support member 110 of the container body 100; here, the pivot side 321 supports the support member 110 located at the center of the receiving portion 150, while the free side 322 corresponds to the position of the two sets of stacked substrates 600. For example, the pivot side 321 and the free side 322 of the movable piece 320 operate on a seesaw principle with the pivot 330 as the fulcrum; when the pivot side 321 tilts upward, the free side 322 tilts downward, and vice versa. When the pivot side 321 abuts against the support member 110, the free side 322 expands outward and abuts against the base plate 600 according to the bearing force of the pivot side 321, or the free side 322 contracts inward, so that the height of the top surface of the limiter 300 toward the storage part 150 is less than the height of the inner surface 201 of the container door 200. That is, when the free side 322 contracts inward, the entire limiter 300 is located in the recessed part 210 and does not exceed the plane height of the inner surface 201 of the container door 200.

[0096] The following describes how the present invention applies a novel limiter structure design to effectively solve the problem that existing limiters used to hold and fix the substrate in substrate containers protrude from the inner surface of the door, causing interference and malfunctions in the automated system during the transfer of the door to the receiving area. In one embodiment of the present invention, the elastic member 340 keeps the pivot side 321 of the first portion of the movable piece 320 in a more protruding position relative to the free side 322 of the second portion. Hereinafter, the state in which the pivot side 321 has a higher protrusion height relative to the free side 322 is defined as the first state position. When the pivot side 321 of the first portion of the movable piece 320 is pressed down by force, the free side 322 of the second portion of the movable piece 320 tilts up relative to the pivot side 321 of the first portion to a higher protrusion height. Hereinafter, the state in which the free side 321 of the second portion has a higher protrusion height relative to the pivot side 321 of the first portion is defined as the second state position.

[0097] Figures 5A to 5C The limiter of the substrate container protection device shown in one embodiment of the present invention is along... Figure 4 A schematic diagram of the cross-sectional movement of line segment "AA". Figure 5A This indicates that the support member 110 has not yet contacted the movable piece 320 of the limiter 300, that is, the movable piece 320 is in the first state position; Figure 5BThis indicates that the support 110 has just contacted the pivot side 321 of the first part of the movable piece 320 of the limiter 300, that is, the movable piece 320 begins to change from the first state position to the second state position. Figure 5C This indicates that the support member 110 has abutted against the pivot side 321 of the first portion of the movable piece 320 of the restrictor 300, meaning the movable piece 320 is in the second state position. When the movable piece 320 is in the first state position, the pivot side 321 of the first portion of the movable piece 320 is the farthest point of the entire restrictor 300 and the movable piece 320 from the base 310; that is, the pivot side 321 of the first portion of the movable piece 320 is the highest point of the entire component, ensuring that the pivot side 321 of the first portion is the first point abutted against by other corresponding components (e.g., the support member 110; in one embodiment, this is abutted against by the centrally located support member 110).

[0098] In one embodiment of the present invention, support members 110 are respectively provided on both inner sides and at the center of the container body 100. The support members 110 are positioned at both sides and the center of the container body 100. Two receiving portions are defined between adjacent support members 110, namely a first supporting portion 151 and a second supporting portion 152, which respectively support and hold the substrate 600. Figure 5A As shown, when the container door 200 is removed from the container body 100, the pivot side 321 is not subjected to any supporting force, so the elastic element 340 is in an elastically released state. At this time, the movable piece 320 is in the first state position, that is, the pivot side 321 is the tallest part (i.e., the most protruding part) in the entire limiter 300, and the height H of the top surface of the pivot side 321 will not exceed the height of the inner surface 201 of the container door 200. Since the entire limiter 300 is located in the recess 210, when the robotic arm removes the container door 200 and retracts it into the platform, it will not be interfered with by the limiter 300 and can smoothly retract the container door 200, thereby overcoming the problem of system abnormalities caused by interference in existing limiters.

[0099] For example Figures 5B to 5CAs shown, when the container door 200 approaches the container body 100, the pivot side 321 of the first part of the movable piece 320 first contacts the support member 110 located at the center. As the container door 200 approaches the storage part of the container door 200, the support member 110 exerts a greater force on the pivot side 321 of the first part. At this time, the elastic member 340 stores elastic potential energy due to elastic compression. At the same time, the elastic member 340 drives the pivot 330 on the base 310 to rotate, so that the free side 322 of the second part is driven away from the base 310 of the limiter 300 and unfolds outward, approaching the first support part 151 and the second support part 152. Until the container door 200 and the container body 100 are completely closed, the movable piece 320 is in the second state position, that is, the extent to which the free side 322 extends toward the storage part is just enough to abut and fix the base plate 600 in the first support part 151 and the second support part 152. When the container door 200 is unclosed and reopened, the support member 110 releases the force on the pivot side 321 of the first part, thereby allowing the elastic member 340 to release its elastic potential energy, causing the movable piece 320 to return to its original position. Figure 5A The state is the first state position, and at the same time, the pivot 330 on the base 310 pivots and the free side 322 of the second part returns to its original position.

[0100] Figure 6A and Figure 6B These diagrams show schematic images of the restrictor of the substrate container protection device assembled at the front and rear of the container door in one embodiment of the present invention. In one embodiment, the substrate container protection device further includes a latching member 220 disposed in the recess 210 of the container door 200. The restrictor 300 can be inserted into the latching member 220 to be assembled to the recess 210 of the container door 200 in a latching manner, for example, by inserting the latching member 220 in the installation direction ID, thereby allowing the restrictor 300 to be flexibly installed and removed as needed. The substrate container protection device also includes a limiting member 230 disposed in the recess 210 of the container door 200, such as... Figure 6B As indicated by the arrow, the limiting member 230 can provide a limiting position L for the limiter 300, preventing the limiter 300 from unexpectedly slipping or falling off due to vibration or other reasons.

[0101] This invention further proposes a solution to the problem of dust contamination or substrate damage caused by gaps, vibrations, and friction between existing support components and the substrate container due to unstable support. This embodiment applies to the aforementioned substrate container and limiter; therefore, identical component structures, symbols, and functions will not be repeated here, only the differences will be described. Please refer to... Figures 7A to 8C , Figure 7A Display along Figure 1A A top view of the cross section of the "BB" line segment; Figure 7B show Figure 7A A partially enlarged schematic diagram of the support member 110; Figure 7Cshow Figure 7A A partially enlarged three-dimensional schematic diagram of the support member 110. Figure 8A This shows a perspective view of the support member of the substrate container protection device in one embodiment of the present invention; Figure 8B This shows a perspective view of the elastic connector of the substrate container protection device according to an embodiment of the present invention; Figure 8C This is a perspective view showing an elastic connector of a substrate container protection device connected to a rigid connector in one embodiment of the present invention.

[0102] The container body 100 has multiple slots 101, and the substrate container protection device includes multiple supports 110 for supporting the substrate 600. Each support 110 includes a protrusion 111 and a reinforcing support 112. The protrusion 111 is located on the top surface of the support 110 and is inserted into the slot 101 of the container body 100 to fix the support 110 to the container body 100 through the slot 101. The reinforcing support 112 is disposed on the protrusion 111 and includes a rigid connector 120 and an elastic connector 130. The elastic connector 130 includes an extension 131 and an engaging portion 135. One end of the extension 131 is connected to the rigid connector 120, and the other end of the extension 131 is connected to the engaging portion 135. The engaging portion 135 engages with the slot 101 of the container body 100, such as... Figure 7B and Figure 7C As shown, the extension 131 extends outside the slot 101, and the engaging portion 135 engages with the outer side of the slot 101 to provide a clamping effect that secures the support 110 within the container body 100. (For clarity, the details are not provided in the original text.) Figure 7C The slot 101 is transparent to make the extension 131 of the elastic connector 130 visible. The rigid connector 120 is made of a material with a harder hardness than the elastic connector 130. The rigid connector 120 can be embedded in the protrusion 111 for stable fixation. The rigid connector 120 and the support 110 can be made of the same material. The rigid connector 120 and the support 110 are integrally formed, but this is not a limitation.

[0103] Specifically, when the support member 110 is to be assembled into the container body 100, the entire support member 110 slides parallel into the storage part 150 from the opening of the container body 100, and the protrusion 111 is placed into the slot 101. At this time, the hook part 135 of the elastic connector 130 protrudes from the side surface of the protrusion 111, so the hook part 135 is subjected to force and the elastic connector 130 is elastically deformed until the support member 110 and the container body 100 are completely engaged. The elastic connector 130 releases its elastic deformation and the hook part 135 engages with the outer side of the slot 101 to prevent the support member 110 from detaching from the container body 100. The elastic connector 130 serves as a connection and buffer element between the rigid connector 120 and the slot 101. It not only has the function of connection and fixation, but also absorbs the impact force and friction force between the two, so that the support 110 can be firmly locked in the container body 100, preventing dust from being generated by friction and preventing the component from cracking or aging due to impact. Even if it is dropped or vibrated, the support 110 will not fall off the container body 100.

[0104] In one embodiment of the present invention, the extension 131 of the elastic connector 130 has a hole 132 to enhance the elasticity of the extension 131 and increase its resistance to deformation of the elastic material.

[0105] In one embodiment of the present invention, the rigid connector 120 may be made of a mixture of polycarbonate (PC), carbon fiber and APWA material, which has better rigidity than the elastic connector 130.

[0106] In one embodiment of the present invention, the elastic connector 130 may be made of a combination of polycarbonate and carbon nanotube materials, which has better elasticity than the rigid connector 120 and is less likely to generate dust by friction with the container body 100. However, the present invention is not limited to this. The materials of the rigid connector 120 and the elastic connector 130 may be adjusted and changed as needed. However, the hardness of the material of the rigid connector 120 must be greater than that of the elastic connector 130 to avoid the reinforcing support 112 breaking off from the protrusion 111.

[0107] Therefore, the support member of the substrate container protection device of the present invention, which combines the elastic connector and the rigid connector, can properly bear the weight and be stably fixed to the container body without causing dust contamination or damage due to gaps, vibration, or friction.

[0108] An embodiment of the present invention also provides a substrate container protection device for electrostatic protection of the substrate container. This embodiment is applicable to the aforementioned substrate container, limiter, and support member; therefore, the same component structures, symbols, and functions will not be repeated here, only the differences will be described. Please refer to... Figures 9 to 13 , Figure 9This is a perspective view of a substrate container 10 to which the substrate container protection device is applicable in one embodiment of the present invention. Figure 10 This diagram shows an exploded view of a substrate container to which the substrate container protection device is applicable, according to an embodiment of the present invention. Figure 11 This diagram shows an exemplary enlarged view of the antistatic components, support members, and electrical connections of the base to which the substrate container protection device is applicable in an embodiment of the present invention. Figure 12 This diagram shows an exemplary enlarged view of the antistatic components, support members, and electrical connections of the base to which the substrate container protection device is applicable in an embodiment of the present invention. Figure 13 This diagram shows an exploded view of a substrate container to which the substrate container protection device is applicable, according to an embodiment of the present invention. The substrate container 10 includes a container body 100, a base 400, and a support member 110. The base 400 is disposed at the bottom 102 of the container body 100, and the support member 110 is disposed within the receiving portion 150 of the container body 100. The base 400 and the support member 110 are made of static dissipation material. The substrate container protection device includes an antistatic element 500 disposed between the bottom 102 of the container body 100 and the base 400. The support member 110 is electrically connected to the base 400 through the antistatic element 500, defining a static dissipation path between the support member 110, the antistatic element 500, and the base 400, so as to discharge the charge through electrical conduction via the base 400, preventing the accumulation of charge on the substrate 600 supported by the support member 110, thereby achieving the function of static electricity protection.

[0109] In one embodiment of the present invention, multiple antistatic elements 500 can be provided to electrically connect the support 110 and the base 400 to conduct static charge at different locations.

[0110] In one embodiment of the present invention, please also refer to Figure 10 and Figure 13 As shown, since the base 400 has three positioning slots in its standard structural design to correspond to the three positioning pins (KC Pins) on the machine, allowing the substrate container to be positioned on the machine, this invention, while avoiding the standard structural conditions, designs a novel interference-avoiding structure 410 for the installation of the antistatic element 500. The interference-avoiding structure 410 is disposed between the base 400 and the bottom 102 of the container body 100, providing a static dissipation path that allows the antistatic element 500 to be installed without interference without altering the original standard structure of the base 400 and the container body 100, thus giving it a completely new function. The interference-avoiding structure 410 is either a flat portion without protruding interference structures or has protruding conductive contact portions. The interference-avoiding structure 410 is defined and formed corresponding to the area below one or more support members 110 of the container body 100, so that the antistatic element 500 is correspondingly disposed in the interference-avoiding structure 410 according to the position of the support member 100.

[0111] In one embodiment of the present invention, when there are multiple antistatic elements 500 and multiple support members 110, the antistatic elements 500 are respectively configured at positions corresponding to each support member 110, such as... Figure 10 As shown. In this embodiment, please also refer to... Figure 10 and Figure 13 As shown, three spaced-apart support members 110 are disposed within the container body 100, located on adjacent sides of two sets of stacked substrates 600. Below the support members 110 located on the two inner sides of the container body 100, the interference-avoiding structure 410 between the bottom 102 of the container body 100 and the inner surface 401 of the base 400 can be a flat portion. Below the support member 110 located at the center of the container body 100, the interference-avoiding structure 410 between the bottom 102 of the container body 100 and the inner surface 401 of the base 400 can have a protruding conductive contact portion. For example, a first conductive contact 103 is provided on the bottom 102 of the container body 100, and a second conductive contact 402 is provided on the inner surface 401 of the base 400. The first conductive contact 103 and the second conductive contact 402 are connected and define a space for accommodating the antistatic element 500. Without interfering with the structure of the container body 100 and the base 400, the support member 110 can be electrically connected to the base 400 to conduct static charge and achieve a static dissipation path.

[0112] Further explanation of the detailed structural design of the antistatic component 500, such as... Figure 11 As shown, the antistatic element 500 includes a fixing part 510 and an elastic connector 520. The fixing part 510 is directly disposed at the bottom of the container body 100 and connected to the support member 110. One end of the elastic connector 520 is connected to the fixing part 510, and the other end elastically abuts against a structure on the inner surface 401 of the base 400. Since there is a gap between the bottom 102 of the container body 100 and the inner surface 401 of the base 400, and the height of the gap is sufficient to accommodate the antistatic element 500, in order to maintain a continuous static dissipation effect, the elastic connector 520 has an elastic length and an elastic curvature. The end of the elastic connector 520 away from the fixing part 510 abuts against and is electrically connected to the inner surface 401 of the base 400. The elastic length of the elastic connector 520 and the inner surface 401 of the base 400 define a sufficient elastic interference stroke. The elastic curvature of the elastic connector 520 is away from the fixing part 510 and abuts against the inner surface 401 of the base 400, elastically interfering with and dissipating accumulated static charge, while reducing contact friction and improving the smoothness of the abutment. The elastic curvature can be an upward hook feature 521 to increase the contact area for the elastic connector 520 of the antistatic element 500 to achieve an electrical connection with the base 400.

[0113] In one embodiment of the present invention, as Figure 12As shown, the antistatic element 500 also includes a conductive bridge 420, which connects the fixing part 510 to the support member 110 via the bottom 102 of the container body 100. The fixing part 510 is fixed to the conductive bridge 420 and maintains an electrical connection EC. The conductive bridge 420 is, for example, a metal screw, and the fixing part 510 has a screw hole (not shown). The metal screw is locked into the screw hole, so that the antistatic element 500 is connected to the support member 110 via the bottom 102 of the container body 100. The top surface of the conductive bridge 420 is lower than the top surface of the inner surface 401 of the fixing part 510 facing the base 400. The conductive bridge 420 achieves electrostatic protection of the support member 110 without contacting the inner surface 401 of the base 400 and without being subjected to direct interference forces. Since the conductive bridging component 420 of the present invention is directly connected to the support component 110 via the bottom 102 of the container body 100, it does not affect the assembly interference between the base 400 and the container body 100. Therefore, the present invention can solve many problems caused by the existing method of directly fastening the support component from the base via the bottom of the container body to the support component with screws, which can easily lead to structural interference such as changes in the height and internal dimensions of the support component, deformation or displacement of the support component due to the magnitude of the screw fastening force, resulting in abnormalities and reduced product yield.

[0114] The antistatic element 500 can have different structural designs and assembly methods. For example, the fixing part 510 of the antistatic element 500 is sleeved on the conductive bridge member 420, allowing the fixing part 510 to slide up and down while maintaining an electrical connection. In another embodiment, one end of the conductive bridge member 420 is connected to the support member 110, and the other end of the conductive bridge member 420 is embedded in the container body 100. The fixing part 510 of the antistatic element 500 is embedded in the container body 100 and electrically connected to the conductive bridge member 420. In yet another embodiment, the fixing part 510 of the antistatic element 500 passes through the container body 100, is directly fixed to the support member 110, and is electrically connected. Regardless of the different structural designs and assembly methods of the antistatic element 500, as long as an antistatic element 500 is provided between the base and the container body, and can solve the problem of damage to the substrate inside the substrate container due to electrostatic discharge, it falls within the scope of patent protection of this invention.

[0115] In one embodiment of the present invention, the antistatic element 500 is made of antistatic plastic with carbon nanotubes, such as antistatic PC.

[0116] In summary, through the substrate container protection device of the present invention, by improving the structural design of the limiter, it is possible to solve the problem that the limiter of the existing substrate container for holding and fixing the substrate protrudes from the inner surface of the door body, resulting in interference from the limiter during the transfer of the door body to the accommodation process by the automated system and abnormal operation. Furthermore, the present invention can ensure that when the substrate is stored and carried in the substrate container, it can be clamped and fixed by the limiter without displacement or vibration. In addition, the setting of the limiter will not cause unexpected interference between the mechanisms and components. Moreover, the support member with an elastic connection member and a rigid connection member can also properly bear the weight and be stably fixed to the container body without causing many problems such as pollution or damage caused by dust particles due to gaps, vibrations, and friction. Furthermore, the present invention can also use the elastic interference between the anti-static element and the base of the substrate container protection device of the present invention as the connection for static electricity conduction (ESD protection), and use the elastic anti-static element as the bridge for the anti-static connection between the support member of the substrate container and the base. Thereby, the purpose of protecting the substrate in the container is achieved, and the safety of the substrate during loading or transportation in the container can be improved.

[0117] The present invention has been disclosed in the above with preferred embodiments. However, those skilled in the art should understand that these embodiments are only used to illustrate the present invention and should not be construed as limiting the scope of the present invention. It should be noted that all equivalent changes and substitutions to these embodiments should be considered as falling within the scope of the present invention. Therefore, the protection scope of the present invention shall be defined by the scope of the patent application, and the scope of the appended claims should be interpreted in the broadest sense to include all such modifications, similar arrangements, and processes.

Claims

1. A substrate container protection device, characterized in that, A substrate container is applicable to a substrate container, the substrate container including a container body and a container door, the container door being adapted to be closed with the container body, the container body having at least one support member and a receiving portion for receiving the substrate, and the container door having a recessed portion. The substrate container protection device includes: A limiter is disposed in the recess of the container door, the limiter comprising: A base, installed on the container door; and At least one movable piece is pivotally connected to the base. The movable piece includes a pivot side and a free side. The pivot side is used to abut against the support member of the container body. When the pivot side abuts against the support member, the free side expands outward and abuts against the base plate according to the abutting force of the pivot side. When the pivot side is not subjected to the abutting force, the free side contracts inward, so that the height of the top surface of the limiter toward the storage part is less than the height of the inner surface of the container door.

2. The substrate container protection device according to claim 1, characterized in that, The limiter also includes an elastic element disposed between the base and the movable piece, the elastic element providing an elastic change in the outward expansion and inward contraction of the free side according to the holding force on the pivot side.

3. The substrate container protection device according to claim 1, characterized in that, When there are two movable pieces, the pivot sides of the two movable pieces are offset from each other, and the pivot sides are used to abut against the support member provided on the container body.

4. The substrate container protection device according to claim 1, characterized in that, It also includes a latching element disposed in the recess of the container door, the latching element being detachably mounted on the limiter.

5. The substrate container protection device according to claim 1, characterized in that, It also includes a limiting member disposed in the recess of the container door, the limiting member being used to fix the limiter.

6. A substrate container protection device, characterized in that, A substrate container is applicable to a substrate container, the substrate container including a container body and a container door, the container door being adapted to close with the container body, the container body having multiple slots, and the substrate container protection device comprising: The limiter as described in any one of claims 1 to 5; Multiple support members are used to support the substrate, each of the support members including: A protrusion is located on the top surface of the support member, and the protrusion is used to be inserted into the slots accordingly; A reinforcing support is disposed on the protrusion, the reinforcing support comprising: A rigid connector; and An elastic connector includes an extension and a hook-and-loop portion. One end of the extension is connected to the rigid connector, and the other end of the extension is connected to the hook-and-loop portion. The hook-and-loop portion engages with the slot of the container body. The rigid connector has a higher hardness than the elastic connector.

7. The substrate container protection device according to claim 6, characterized in that, The rigid connector is embedded in the protrusion.

8. A substrate container protection device, characterized in that, A substrate container is applicable to a substrate container, the substrate container including a container body, a base, and at least one support member, the base being disposed at the bottom of the container body, and the support member being disposed within a receiving portion of the container body, the base and the support member being made of an electrostatic dissipative material, the substrate container protection device comprising: The limiter as described in any one of claims 1 to 5; as well as At least one antistatic element is disposed between the bottom of the container body and the base, the antistatic element comprising: A fixing part is provided at the bottom of the container body and connected to the support member; An elastic connector, one end of which is connected to the fixing part, and the other end elastically abuts against the inner surface of the base; The support, the antistatic component, and the base define a static electricity dissipation path.

9. The substrate container protection device according to claim 8, characterized in that, The bottom of the container body and the base define an interference-avoidance structure, and the antistatic element is located within the interference-avoidance structure.

10. The substrate container protection device according to claim 8, characterized in that, When there are multiple antistatic components and multiple support members, the antistatic components are respectively configured to correspond to the position of each support member.

11. The substrate container protection device according to claim 8, characterized in that, The antistatic component also includes a conductive bridge for connecting the fixing part to the support member via the bottom of the container body.

12. The substrate container protection device according to claim 11, characterized in that, The top surface of the conductive bridge is lower than the top surface of the fixing part facing the base.

13. The substrate container protection device according to claim 11, characterized in that, The conductive bridging component is a metal screw, and the fixing part has a screw hole. The metal screw is locked in the screw hole so that the antistatic element is connected to the support through the bottom of the container body.

14. The substrate container protection device according to claim 11, characterized in that, The fixing part is fixed to the conductive bridge component.

Images