Flexible Actuation System with Dynamically and Programmatically Adjustable Surface Topography Deformation and Applications

Abstract

The present invention provides a flexible actuator system and application capable of dynamically and programmatically adjusting surface topological deformation, including: a chip based on surface topological deformation and a chip control unit that are communicatively connected in sequence, wherein the chip based on surface topological deformation includes a driving layer and a deformation execution layer laid successively from bottom to top, wherein the driving layer is an addressable stimulus source array, the deformation execution layer is a micro flexible actuator array, the stimulus source unit on the driving layer stimulates the deformation execution layer to generate a stimulus-responsive deformation, and a flexible elastomer film can also be laid on the actuator, and dynamic surface topography / shape control of the chip based on surface topological deformation is realized through the chip control unit and the program control unit. This new surface deformation technology has great application potential in fields such as microfluidic systems, lab-on-a-chip, intelligent human-computer interaction interfaces, robot perception and execution systems, braille displays, wearable devices, VR, AR, and the metaverse.

Description

Technical Field

[0001] The present invention belongs to the field of flexible micro - mechanical systems. Specifically, it relates to a flexible actuator system capable of dynamically and programmatically adjusting surface topological deformation and its applications. Background Art

[0002] Flexible actuator systems with surface topological deformation have broad industrial application prospects, such as in new microfluidic systems, intelligent human - machine interaction interfaces, robot perception and execution systems, wearable devices, VR, AR, the meta - universe, etc., which can provide a more secure and reliable human - machine interaction interface and tactile perception experience, etc. Existing flexible actuator systems with variable topological morphology often have the following two problems: 1. The topological changes on the surface are overall. That is, under external physical or chemical stimuli, the material as a whole undergoes topological changes, but the topological changes of a certain or multiple local areas cannot be adjusted individually. For example, a liquid - crystal polymer film can change from a flat plane to a saddle - shaped surface as a whole through the special arrangement of liquid - crystal units, but the local areas cannot be customized. 2. The topological changes on the surface cannot be dynamically and programmatically adjusted. That is, under external physical or chemical stimuli, the local areas of some materials can undergo topological morphological changes, but this kind of change is pre - designed in the material, which makes the topological morphological change patterns only one or two, a very limited number. For example, a liquid - crystal polymer film can achieve topological morphological changes at local positions through the special arrangement of liquid - crystal units, but there is only one such change pattern.

[0003] Therefore, there is an urgent need to develop a flexible actuator system with dynamically adjustable and programmatically controllable surface topological deformation to improve the application scenarios of flexible actuator systems. Summary of the Invention

[0004] This solution provides a flexible actuator system capable of dynamically and programmatically adjusting surface topological deformation and its applications. A flexible actuator system is designed, which can excite the deformation of corresponding stimulus - responsive polymer materials under addressable physical or chemical stimuli, and drive the deformation of the upper diaphragm layer to generate surface topological deformation. Users can use programming software to customize the required surface topological morphology pattern, and then after execution by the execution layer, obtain the set surface topological morphology.

[0005] In a first aspect, the present solution provides a flexible actuator system capable of dynamically and programmatically adjusting the deformation of the surface topology, including: a chip based on the deformation of the surface topology and a chip control unit that are communicatively connected in sequence, wherein the chip based on the deformation of the surface topology includes a driving layer and a deformation execution layer laid sequentially from bottom to top, wherein the driving layer is an addressable stimulus source array, and the deformation execution layer is a micro flexible actuator array, and the chip control unit controls the stimulus source unit on the driving layer to stimulate the deformation execution layer to generate a stimulus response deformation. In some embodiments, the chip based on the deformation of the surface topology and the chip control unit are connected by wires for controlling signal transmission and energy supply.

[0006] In some embodiments, the chip based on the deformation of the surface topology includes a driving layer, a deformation execution layer, and a diaphragm layer laid sequentially from bottom to top, wherein the diaphragm layer is a flexible elastomer film, and the diaphragm layer is bonded to the deformation execution layer by chemical / physical methods to respond to the stimulus response deformation of the deformation execution layer.

[0007] In some embodiments, the lower surface of the flexible elastomer film serving as the diaphragm layer is bonded to the upper surface of the micro flexible actuator array serving as the deformation execution layer by chemical / physical methods. When the micro flexible actuator array makes a stimulus response deformation under external stimuli, it drives the flexible elastomer film to undergo surface shape / topology changes.

[0008] In some embodiments, the thickness range of the diaphragm layer is 0 mm - 5 mm (where 0 means not using the diaphragm layer), and the material of the flexible elastomer film of the diaphragm layer can be a polymer composite material of one or any combination of silicone rubber, epoxy resin, and polyurethane.

[0009] In some preferred embodiments, the flexible elastomer film is a PDMS film with a relatively low modulus (0.1 KPa - 9000 KPa).

[0010] In some embodiments, a plurality of independently controlled micro flexible actuators are provided on the micro flexible actuator array. Each micro flexible actuator generates a stimulus response deformation of elongation / shortening or bending in the height / length direction under stimulus driving. The shape change of the micro flexible actuator acts on the diaphragm layer bonded to it, causing corresponding topology / shape changes on the surface of the flexible elastomer film.

[0011] In some embodiments, the absolute value of the deformation rate (ε = |(L0 - L) / L0|) of each micro flexible actuator in the micro flexible actuator array during shortening deformation in the height / length direction ranges from 0 to 80%, the absolute value of the deformation rate (ε = |(L0 - L) / L0|) during elongation deformation ranges from 0 to 500%, and the bending angle during bending deformation ranges from 0 to 90°.

[0012] In some embodiments, the micro flexible actuators in the micro flexible actuator array are made of a stimulus-responsive deformable polymer material, where the stimulus-responsive deformable polymer material is one of liquid crystal polymer materials, gels, supramolecular materials, shape memory materials, dielectric elastomers, liquid-gas phase transition materials, etc., which can generate changes in length, volume or bending angle under external physical or chemical stimuli, as well as composites of these stimulus-responsive deformation materials.

[0013] In a preferred embodiment, the micro flexible actuators in the micro flexible actuator array are prepared from liquid crystal polymer materials and their composites.

[0014] In a preferred embodiment, the stimulus-responsive deformable polymer material is a liquid crystal elastomer material obtained by enol click reaction, Michael addition reaction or radical polymerization, and the liquid crystal elastomer material is a liquid crystal polymer material.

[0015] In some embodiments, each micro flexible actuator in the micro flexible actuator array can be entirely composed of a stimulus-responsive deformable polymer material, or partially composed of a stimulus-responsive deformable polymer material. For example, in a binary structure, half is composed of a stimulus-responsive flexible material, and the other half is composed of a non-stimulus-responsive deformable material, such as various polymers, ceramics, metals, glasses, inorganic substances, etc. Its height ranges from 0 to 200 mm, and its diameter ranges from 0.0001 to 50 mm, where 0 mm represents that the micro actuator array is entirely prepared using a stimulus-responsive deformable material. Correspondingly, the non-stimulus-responsive deformable material in the micro flexible actuator array is obtained through commercially available epoxy resin.

[0016] In some embodiments, the diameter range of the stimulus-responsive deformable flexible material of a single micro flexible actuator in the micro flexible actuator array is 0.0001 mm - 50 mm, the height range is 0.0001 - 50 mm, and the spacing range between adjacent micro flexible actuators is 0.0001 mm - 50 mm. The dot matrix shape of the arrangement of the micro flexible actuator array can be square, rectangular, triangular or other irregular shapes; the morphology of each micro flexible actuator in the micro flexible actuator array can be cylindrical, tetrahedral, cuboid, spindle-shaped or other regular or irregular polyhedra.

[0017] In some embodiments, the addressable stimulus source array as the driving layer is communicatively connected to the chip control unit and the programmed control unit. Under the programmed control of the programmed control unit and the chip control unit, the stimulus sources in the driving layer generate dynamically patterned stimuli and drive the micro flexible actuator array as the deformation execution layer to generate dynamically patterned deformations. If a diaphragm layer is provided, the stimulus-responsive deformation of the micro flexible actuator array induces local, patterned topography / shape changes on the surface of the diaphragm layer.

[0018] In some embodiments, the driving layer is composed of addressable control stimulus sources. The driving layer can be selected from digital patterned light projection technologies based on Digital Light Processing (DLP) or (Liquid Crystal Display (LCD), an electrode array driving layer prepared based on Printed Circuit Boards (PCB) or semiconductor micro-nano processing technology, or other driving layers that can achieve local and patterned stimulus control, or one or a combination of light display technologies based on OLED and LED arrays. In a preferred embodiment, the driving layer is selected as an electrode array driving layer prepared based on Printed Circuit Boards (PCB) or semiconductor micro-nano processing technology. In another preferred example, the driving layer of the addressable control stimulus source is an electrode array driving layer prepared based on Printed Circuit Boards (PCB) or semiconductor micro-nano processing technology.

[0019] The addressable control stimulus sources described in this solution are selected from one or more of light, electricity, temperature, humidity, and chemical stimuli. When the driving layer uses light as the stimulus source, the light intensity, spot area size, and light source distribution of the light source are adjusted; when electricity is used as the stimulus source, the electric field strength and distribution of the power supply are adjusted; when temperature is the stimulus source, the temperature and distribution of the temperature source are adjusted; when humidity is the stimulus source, the humidity level and distribution area are adjusted; when a chemical stimulus source is used, the concentration and distribution of the chemical stimulus source are adjusted to achieve real-time dynamic control of the deformation amount of each micro flexible actuator in the micro flexible actuator array, and further control the patterning and local topological morphology / shape change of the flexible elastomer film of the diaphragm layer.

[0020] In another preferred example, the drivable layer that can be patterned and locally driven is an addressable control stimulus source that is an electrical stimulus.

[0021] In some embodiments, the stimulus source array of the driving layer is laid on a substrate to form a drivable substrate that can be patterned and locally driven. In some embodiments, the chip based on surface topological morphology deformation can be fabricated on a planar or non-planar substrate with curvature. Correspondingly, the drivable substrate that can be patterned and locally driven can be a planar or non-planar substrate with curvature. That is to say, the stimulus source array of the driving layer is laid on a planar or non-planar substrate with curvature.

[0022] In some embodiments, the chip control unit includes a switch chip corresponding to control the stimulation source unit and a microcontroller for controlling the switch chip. At this time, the switch chip is selected as an electronic switch chip based on MOSFET. Of course, in other embodiments, the chip control unit can also control whether to excite the stimulation source unit of the driving layer by projecting or displaying the light and dark changes of light based on other technologies such as DLP or LCD light projection schemes. Correspondingly, in some embodiments, the chip control unit controls each stimulation source unit on the driving layer in the chip based on surface topology deformation through the switch chip, and the microcontroller of the chip control unit controls each switch chip through a communication protocol.

[0023] In some embodiments, the flexible execution system includes a programmed control unit connected to the chip control unit. The user programs on the programmed control unit, and the programmed control unit sends the programming signal to the chip control unit; in some embodiments, the user can directly program on the microcontroller of the chip control unit and directly control the switch chip through the microcontroller. In other words, the control methods of the chip control unit are: the programmed control unit is connected to the chip control unit to send the programming signal to the chip control unit, or the microcontroller on the chip control unit forms the programming signal.

[0024] In some embodiments, the chip control unit is controlled by the programmed control unit through a control protocol, and finally realizes controlling each stimulation source unit on the driving layer with a program on the programmed control unit.

[0025] In another preferred example, the communication protocol is the SPI protocol.

[0026] In another preferred example, the communication protocol is the USB protocol.

[0027] In another preferred example, the programmed control unit is implemented through a computer and a control program.

[0028] In a second aspect, the present solution provides an application method for a flexible execution system capable of dynamically and programmatically adjusting surface topology deformation, including:

[0029] The chip control unit receives or generates a programming signal. The chip control unit controls each stimulation source unit on the driving layer of the chip based on surface topology deformation according to the programming signal. The driving layer stimulates the chip deformation execution layer to make a stimulation response deformation, and the stimulation response deformation of the deformation execution layer drives the diaphragm layer to generate a surface topology.

[0030] In some embodiments, the flexible actuator system capable of dynamically and programmatically adjusting surface topological deformation is applied to fields such as microfluidic systems, lab-on-a-chip, intelligent human-machine interaction interfaces, robot perception and execution systems, braille displays, wearable devices, VR, AR, and the metaverse.

[0031] Compared with the prior art, the technical solution of the present invention has the following characteristics and beneficial effects:

[0032] The present invention designs a flexible actuator system capable of dynamically and programmatically adjusting surface topological deformation and its application. The present invention designs and manufactures an addressable stimulus source array as the driving layer, and sequentially assembles a micro flexible actuator array with stimulus-responsive deformation and a flexible elastomer film thereon. Moreover, a chip control unit and a programmable control unit for the addressable stimulus source array are designed and manufactured. When the corresponding stimulus source unit is activated through the chip control unit and the programmable control unit, the stimulus source unit correspondingly stimulates the micro flexible actuator array to deform, driving the upper flexible elastomer film to generate local deformation, and finally presenting local and patterned topological morphology / shape changes of the flexible actuator system.

[0033] It should be noted that this kind of deformation is: 1. recoverable. When the local stimulus of the stimulus source on the driving layer is removed, the deformation of the polymer material with stimulus-responsive deformation in the micro flexible actuator array returns to the state without applying the stimulus, and the topological structure of the diaphragm layer also returns to the initial state; 2. reconfigurable. When the user sets through software and changes the local stimulus distribution of the addressable stimulus source array on the driving layer through hardware signal transmission, the deformation distribution of the polymer material with stimulus-responsive deformation excited by the stimulus will also be reconfigured, and the topological deformation shown on the diaphragm layer will also be reconfigured.

[0034] This dynamic surface morphology / shape control technology has great application potential in fields such as brand-new concept microfluidic systems, lab-on-a-chip, intelligent human-machine interaction interfaces, robot perception and execution systems, braille displays, wearable devices, VR, AR, and the metaverse. Description of the Drawings

[0035] Figure 1 It is a schematic diagram of a flexible actuator system capable of dynamically and programmatically controlling topological deformation.

[0036] Figure 2 It is a schematic diagram of a chip based on surface topological deformation (with a diaphragm layer).

[0037] Figure 3 It is a schematic diagram of a chip based on surface topological deformation (without a diaphragm layer).

[0038] Figure 4It is a simulation diagram of the height change when the diaphragm layer of the chip based on the surface topology deformation undergoes topology deformation.

[0039] Figure 5 It is a schematic diagram of the surface topology change of the flexible execution system undergoing single-point topology change under the stimulation of a stimulation source.

[0040] Figure 6 It is a schematic diagram of the surface topology change of the flexible execution system undergoing multi-point topology change under the stimulation of a stimulation source.

[0041] Figure 7 It is a schematic diagram of the surface topology change of the flexible execution system with different topology changes under the stimulation of stimulation sources of different sizes. Specific implementation manners

[0042] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art belong to the scope of protection of the present invention.

[0043] Those skilled in the art should understand that in the disclosure of the present invention, the orientation or positional relationships indicated by the terms "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. are based on the orientation or positional relationships shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, the above terms should not be construed as limiting the present invention.

[0044] It can be understood that the term "one" should be understood as "at least one" or "one or more". That is, in one embodiment, the number of an element can be one, while in other embodiments, the number of the element can be multiple. The term "one" should not be construed as a limitation on the number.

[0045] After extensive and in - depth research, the inventor discloses a flexible actuator system that allows users to achieve dynamic and programmable adjustment of surface topological deformation through program control. In this invention, an addressable stimulus source array is designed and fabricated as the driving layer, on which a micro - flexible actuator array that responds to stimuli and deforms and a flexible elastomer film are sequentially assembled; a control system for the addressable stimulus source array is designed and fabricated. When the corresponding stimulus source unit is activated through the control system, the corresponding stimulus - responsive micro - flexible actuator deforms, driving the flexible elastomer film above to produce local deformation, and finally resulting in local and patterned topological morphology / shape changes on the flexible surface. This dynamic surface morphology / shape control technology has great application potential in areas such as new - concept microfluidic systems, lab - on - a - chip, intelligent human - machine interaction interfaces, robot perception and actuator systems, braille displays, wearable devices, VR, AR, and the metaverse. Based on this, the inventor completed this invention.

[0046] The following further elaborates on the present invention in conjunction with specific embodiments. It should be understood that these embodiments are only used to illustrate the present invention and not to limit the scope of the present invention. The electronic components, signal converters, and data communication protocols used in the following preparation examples can be adjusted accordingly according to specific design requirements and array scales; for the experimental methods and parameters without specific conditions noted in the following embodiments, they are usually in accordance with conventional conditions, the conditions and parameters required in specific practical applications, or the conditions recommended by the manufacturer. Unless otherwise stated, percentages and parts are calculated by weight.

[0047] In the present invention, Similar diagrams are used to represent the activated stimulus sources; similarly, in the same figure, Similar diagrams are used to represent the high intensity of the activated stimulus sources, and Similar diagrams are used to represent the low intensity of the activated stimulus sources.

[0048] The flexible actuator system for dynamically and programmably adjusting surface topological deformation described in the present invention mainly includes a driving layer, a deformation execution layer, a diaphragm layer, and combines them in a control system. The specific preparation processes for preparing the programmable flexible actuator system are described in Preparation Examples 1, 2, 3, and 4 below:

[0049] Preparation Example 1: Preparation of a Patternable and Locally Driven Driving Layer

[0050] The number of rows and columns of the stimulation source array is designed to be 14 and 20 respectively through PCB design software, and a resistor array with a row and column spacing of 1.2 mm is designed. Each resistor on it is a 0201 package chip resistor with a specification of 1000 Ω. One pole of each resistor is individually led out and connected to the FPC / FFC cable through the FPC / FFC connector and then accessed to the chip control unit; the other poles are collinear and led out and accessed to the programmed control system. The production of the PCB board is entrusted to a PCB manufacturer.

[0051] Preparation Example 2 Preparation of a chip based on surface topological deformation

[0052] According to the molar ratio of RM257:DODT = 1.67:1 and DODT:PETMP = 3:1, with a mass ratio of graphene of 1.5% and a monomer ratio of carbon-carbon double bond to thiol group of 1:1, the monomers are mixed and dissolved in toluene. After ultrasonic dispersion for 10 min, 0.5 wt% of DPA is added as a catalyst and 6 wt% of XYS-4522 is added as a surfactant to the mixed solution. After heating and oscillating dissolution at 80 °C, the precursor solution is placed in a mold and placed in a vacuum dryer to evacuate for 10 - 15 s so that the precursor solution fills the mold. A liquid crystal elastomer microcolumn array with a diameter of 0.6 mm and a height of 1.2 mm is prepared by the template method at 50 °C for 1 h. The number of rows and columns of the array is 14 and 20, and the row and column spacing is 1.2 mm; then it is taken out of the mold, transferred to a glass slide, and the excess liquid crystal elastomer is cut off for use. The pre-crosslinking time is 3 h in total. The liquid crystal elastomer microcolumn is pressed with another glass slide with a spacing of 0.75 mm to complete the secondary crosslinking, and the curing time of the secondary crosslinking is 48 h.

[0053] The liquid crystal elastomer microcolumn array, epoxy resin microcolumn array (height 2 mm, diameter 0.6 mm), and PDMS diaphragm layer (50 μm) assembled in sequence are bonded to the addressable resistor array driving layer obtained in Preparation Example 1 with UV glue and silicone rubber adhesive to obtain a chip based on surface topological deformation.

[0054] Preparation Example 3 Fabrication of the chip control unit

[0055] The design principle of the control system is to provide 280 electronic switches in total of 14 * 20. Here, 18 MC33996 low-side switch chips are used to provide 280 OUTPUT interfaces to independently control 280 chip resistors on the addressable stimulation source array. The 18 electronic switches are equally divided into two parts and controlled by two signal converters BUS ADAPTOR through the SPI communication protocol.

[0056] The entire switch chip is installed on the designed PCB board, and 280 OUTPUT interfaces are led out. The production of the PCB board is entrusted to a PCB manufacturer.

[0057] Preparation Example 4 Fabrication of a Flexible Actuation System with Dynamic and Programmable Surface Topography Deformation

[0058] Connect the microfluidic chip and the chip control unit obtained in Preparation Examples 2 and 3 with an FPC / FFC cable. Then, connect the chip control unit and the programmable control unit (a computer is used in this preparation example) via USB for data communication. The power supply for the entire system comes from an external DC regulated power supply.

[0059] Example 1 Single-Point Topological Change of the Flexible Actuation System with Dynamic and Programmable Surface Topography Deformation

[0060] Place the flexible actuation system with dynamic and programmable surface topography deformation prepared in Preparation 4 on a horizontal tabletop. Control the excitation of a single resistor through a computer program and change the position of the excitation resistor over time.

[0061] It was found that, as Figure 5 shown, local topological changes occurred on the flexible surface above the excited resistor, and these topological changes varied with the position change of the excitation resistor.

[0062] Example 2 Multi-Point Topological Change of the Flexible Actuation System with Dynamic and Programmable Surface Topography Deformation

[0063] Repeat the experiment in Example 1, except that multiple resistors are controlled to be excited through a computer program, and the position of the excitation resistor is changed over time.

[0064] It was found that, as Figure 6 shown, local topological changes occurred on the flexible surface above the excited resistor, and these topological changes varied with the position change of the excitation resistor and showed W, L, and U in sequence on the surface.

[0065] Example 3 Control of the Degree of Topological Change of the Flexible Actuation System with Dynamic and Programmable Surface Topography Deformation

[0066] Repeat the experiment in Example 1, except that the excitation of a single resistor is controlled through a computer program, and the voltages of the DC regulated power supply during the two excitations are different, that is, the powers of the resistors are different.

[0067] It was found that, as Figure 7 shown, when the power of the excited resistor is larger, the local topological change on the flexible surface above the resistor is greater.

[0068] The present invention is not limited to the above best implementation mode. Anyone can obtain various other forms of products under the inspiration of the present invention. However, no matter what changes are made in its shape or structure, as long as it has a technical solution identical or similar to the present application, it falls within the protection scope of the present invention.

Claims

1. A flexible actuator system capable of dynamically and programmatically adjusting the deformation of surface topography, characterized in that, Comprising: A chip based on surface topology deformation and a chip control unit that are communicatively connected in sequence. The chip based on surface topology deformation includes a driving layer and a deformation execution layer laid sequentially from bottom to top. The driving layer is an addressable stimulus source array, and the deformation execution layer is a micro flexible actuator array. The chip control unit controls the stimulus source unit on the driving layer to stimulate the deformation execution layer to generate a stimulus response deformation. There are multiple independently controllable micro flexible actuators on the micro flexible actuator array. Each micro flexible actuator generates a stimulus response deformation of elongation / shortening or bending in the height / length direction under stimulus drive. Each micro flexible actuator in the micro flexible actuator array is entirely composed of a stimulus response deformation polymer material or partially composed of a stimulus response deformation polymer material. The stimulus response deformation polymer material is a liquid crystal elastomer material obtained by an enol click reaction, a Michael addition reaction, or radical polymerization. The liquid crystal elastomer material is prepared by mixing monomers in a molar ratio of RM257:DODT = 1.67:1, DODT:PETMP = 3:1, with a mass ratio of graphene of 1.5% and a monomer ratio of carbon-carbon double bond to thiol group of 1:1 and dissolving them in toluene.

2. The flexible actuator system capable of dynamically and programmatically adjusting the deformation of surface topography according to claim 1, characterized in that, The chip based on surface topology deformation includes a driving layer, a deformation execution layer, and a diaphragm layer laid sequentially from bottom to top. The diaphragm layer is a flexible elastomer film, and the diaphragm layer is bonded to the deformation execution layer by chemical / physical methods to respond to the stimulus response deformation of the deformation execution layer.

3. The flexible actuator system capable of dynamically and programmatically adjusting the deformation of the surface topography according to claim 2, wherein, The material of the flexible elastomer film of the diaphragm layer is one or any combination of polymer materials such as silicone rubber, epoxy resin, and polyurethane.

4. The flexible actuator system capable of dynamically and programmatically adjusting the deformation of the surface topography according to claim 1, characterized in that, The absolute value range of the deformation rate of each micro flexible actuator during shortening deformation in the height / length direction is 0 - 80%, the absolute value range of the deformation rate during elongation deformation is 0 - 500%, and the bending angle range during bending deformation is 0 - 90°.

5. The flexible actuator system capable of dynamically and programmatically adjusting the deformation of the surface topography according to claim 1, wherein The stimulus source of the addressable stimulus source array is selected from one or more of light, electricity, temperature, humidity, and chemical stimuli. When the driving layer uses light as the stimulus source, the light intensity, spot area size, and light source distribution of the light source are adjusted; when electricity is used as the stimulus source, the electric field intensity and distribution of the power supply are adjusted; when temperature is the stimulus source, the temperature and distribution of the temperature source are adjusted; when humidity is the stimulus source, the humidity and distribution area are adjusted; when a chemical stimulus source is used, the concentration and distribution of the chemical stimulus source are adjusted for real-time dynamic control of the deformation amount of each micro flexible actuator in the micro flexible actuator array.

6. The flexible actuator system capable of dynamically and programmatically adjusting the deformation of the surface topography according to claim 1, wherein The stimulus source array of the driving layer is laid on a flat or non-flat substrate with curvature.

7. The flexible actuator system capable of dynamically and programmatically adjusting the deformation of the surface topography according to claim 1, characterized in that, The chip control unit controls each stimulus source unit on the driving layer in the chip based on surface topology deformation; the programmed control unit communicates with the chip control unit to send a programming signal to the chip control unit or generate a programming signal on the chip control unit.

8. An application method of a flexible actuator system capable of dynamically and programmatically adjusting surface topological deformation, which controls the flexible actuator system capable of dynamically and programmatically adjusting surface topological deformation according to any one of claims 1 to 7 above, characterized in that, Comprising: The chip control unit receives or generates a programming signal. Based on the programming signal, the chip control unit controls each stimulation source unit on the driving layer of the chip that deforms based on the surface topography. The driving layer stimulates the deformation execution layer of the chip to make a stimulation-responsive deformation. The stimulation-responsive deformation of the deformation execution layer drives the diaphragm layer to generate a surface topography.

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