Ozone supply system for etching cleaning tank for solar cell processing and supply method

Abstract

The application discloses a solar cell processing texturing cleaning tank ozone supply system and a supply method. The solar cell processing texturing cleaning tank ozone supply system comprises a water source, a solution source, an ozone generator, an ozone water generating assembly, a temporary storage tank and a filter. The ozone generator is used for generating ozone. The ozone water generating assembly is used for mixing to form ozone water. A fourth connecting pipe is arranged between the ozone water generating assembly and an ozone cleaning tank. A fifth connecting pipe is arranged between the ozone cleaning tank and the temporary storage tank. The temporary storage tank is used for temporarily storing ozone water. A sixth connecting pipe is arranged between the first connecting pipe and the temporary storage tank. The filter is arranged on the fifth connecting pipe. Compared with the prior art, the solar cell processing texturing cleaning tank ozone supply system can mix the water source, the solution source and the ozone during conveying by arranging the water source, the solution source and the ozone generator respectively.

Description

Technical Field

[0001] This invention belongs to the field of solar cell processing technology, specifically relating to an ozone supply system and method for a texturing and cleaning tank in solar cell processing. Background Technology

[0002] The texturing process in solar cell manufacturing creates a pyramidal texture on the surface of silicon wafers. This reduces the reflectivity of the silicon wafer to incident sunlight, increases the absorption of sunlight, and improves the photoelectric conversion efficiency of the photovoltaic cells. The texturing process sequence includes: pre-cleaning → texturing → post-cleaning → acid washing → slow lifting → drying. The entire operation is generally automated by texturing equipment. During production, silicon wafers are placed in wafer cassettes, and an automatic wafer unwinding machine pours the wafers into wet wafer trays. The wet wafer trays are then automatically conveyed into the texturing machine, where the wafers are processed sequentially according to the process order.

[0003] During the post-cleaning process of texturing equipment, ozone water is typically used. Ozone water has a strong oxidizing effect, which can effectively clean impurities from the surface of silicon wafers, greatly improving the anti-reflective properties of the silicon wafer surface, reducing energy reflection and loss, and thus improving the photoelectric conversion efficiency of the solar cells. After a period of use, a significant amount of impurities will remain in the ozone water, requiring replacement. Directly replacing the ozone water not only wastes the ozone water but also increases process costs.

[0004] The information disclosed in this background section is intended only to enhance the understanding of the overall background of the invention and should not be construed as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Summary of the Invention

[0005] The purpose of this invention is to provide an ozone supply system and method for a texturing and cleaning tank in solar cell processing, which solves the problems mentioned in the background art.

[0006] To achieve the above objectives, a specific embodiment of the present invention provides the following technical solution:

[0007] An ozone supply system for a texturing and cleaning tank in solar cell processing includes a water source, a solution source, an ozone generator, an ozone water generation component, a temporary storage tank, and a filter. The ozone generator generates ozone, the ozone water generation component mixes the solutions to form ozone water, a fourth connecting pipe connects the ozone water generation component to the ozone cleaning tank, a fifth connecting pipe connects the ozone cleaning tank to the temporary storage tank for temporarily storing the ozone water, a sixth connecting pipe connects the first connecting pipe to the storage tank, and a filter is installed on the fifth connecting pipe to filter the ozone water. The ozone water is transported internally, wherein a first connecting pipe is provided between the water source and the ozone water generating component, a second connecting pipe is provided between the first connecting pipe and the solution source, a third connecting pipe is provided between the ozone generator and the first connecting pipe, a second valve is provided on the second connecting pipe, a third valve is provided on the third connecting pipe, a first valve is provided at the end of the first connecting pipe near the water source, a fourth valve is provided at the end of the first connecting pipe near the ozone water generating component, a sixth connecting pipe is provided between the fourth valve and the ozone water generating component, and a fifth valve is provided on the sixth connecting pipe.

[0008] By setting up an ozone generator, an ozone water generation component, a temporary storage tank, and a filter, ozone water of different concentrations can be configured according to process requirements. The filter enables the ozone water to be filtered and reused. Depending on the ozone water content in the ozone water generation component, appropriate amounts of water, solutions, or ozone can be added to the ozone water generation component to ensure that the filtered ozone water meets process requirements.

[0009] In one or more embodiments of the present invention, the ozone water generating component includes a tank, one end of which is provided with an inlet pipe and the other end with an outlet pipe. The inlet pipe is connected to a first connecting pipe, and an annular pipe is provided at the end of the inlet pipe away from the first connecting pipe. A plurality of first nozzles are provided on the annular pipe. The first nozzles are used to spray the liquid transported in the first connecting pipe into the tank and can form a jet to stir the ozone water in the tank.

[0010] By setting up an annular pipe and multiple first nozzles on the annular pipe, the multiple nozzles form a jet in the tank. The jet can impact the liquid in the tank, thereby agitating the solution. During the impact, the ejected substance can be further diffused, allowing the ejected substance to mix more quickly with the solution in the tank. It can even cause the liquid in the tank to rotate in a vortex, agitating the liquid in the tank and making it more uniform.

[0011] In one or more embodiments of the present invention, a fixed main frame is fixedly connected to the outside of the tank, a connecting rod is fixedly connected to the upper end of the fixed main frame, a fixed bracket is fixedly connected to the end of the connecting rod away from the fixed main frame, a motor is fixedly connected to the upper end of the fixed bracket, and a stirring main rod matching the motor is rotatably connected inside the tank, and a plurality of stirring support rods are provided on the stirring main rod.

[0012] The active stirring function is achieved through the cooperation of the motor and the stirring rod.

[0013] In one or more embodiments of the present invention, a second cavity is provided inside both the stirring main rod and the stirring support rod, and a first cavity is provided outside the second cavity. A rotating shaft exchange assembly for connecting the first cavity and the second cavity is fixedly connected to the upper end of the stirring main rod. An ozone input pipe matching the second cavity is provided on the rotating shaft exchange assembly, and the other end of the ozone input pipe is connected to an ozone generator. A first heat exchange pipe and a second heat exchange pipe matching the first cavity are provided on the rotating shaft exchange assembly, and the other ends of the first heat exchange pipe and the second heat exchange pipe are both connected to a water source.

[0014] In one or more embodiments of the present invention, the rotating shaft exchange assembly includes a connecting portion fixedly connected to the outer wall of the stirring main rod. The outer wall of the connecting portion is rotatably connected to three rotating portions. The three rotating portions and the connecting portion respectively form a first exchange chamber, a second exchange chamber, and a third exchange chamber. The first exchange chamber and the second chamber are in communication, the second and third exchange chambers are in communication with the first chamber, the ozone input pipe is in communication with the first exchange chamber, the first heat exchange pipe is in communication with the second exchange chamber, and the second heat exchange pipe is in communication with the third exchange chamber.

[0015] By setting up a first heat exchange tube, a second heat exchange tube, and a rotating shaft exchange assembly, heat or cold sources can be supplied to the main stirring rod and the stirring support rod, and the temperature of the ozone water can be controlled during the stirring process according to the needs of the process.

[0016] In one or more embodiments of the present invention, a first heat exchange branch pipe is provided on the first heat exchange pipe, and a hollow heat absorption plate is fixedly connected to the other end of the first heat exchange branch pipe. The hollow heat absorption plate is used to extract excess heat from the motor to form hot air, and the hot air is transported to the fixed main frame through the first heat exchange branch pipe. A second heat exchange branch pipe is provided on the second heat exchange pipe, and the second heat exchange branch pipe is used to discharge the hot air.

[0017] In one or more embodiments of the present invention, the hollow heat-absorbing plate is hollow, and a plurality of heat-absorbing holes are provided at the end of the hollow heat-absorbing plate near the motor. The hollow heat-absorbing plate extracts excess heat generated by the motor by means of negative pressure. A heat transfer pipe is provided at the end of the hollow heat-absorbing plate away from the motor, and the other end of the heat transfer pipe is connected to the first heat exchange branch pipe.

[0018] By utilizing the excess heat of the motor, the ozone water inside the tank can be heated, allowing the ozone water to mix more quickly, which is energy-saving and environmentally friendly.

[0019] In one or more embodiments of the present invention, the stirring rod is provided with a plurality of sixth valves that match the first cavity.

[0020] By setting a sixth valve, the heat source can be output to the tank, allowing the heat source to directly contact the ozone water in the tank, thereby improving heat exchange efficiency. Under special circumstances, rapid temperature control of the ozone water can be achieved in a short time.

[0021] In one or more embodiments of the present invention, the stirring rod is provided with a plurality of seventh valves that match the second cavity.

[0022] By setting a seventh valve, ozone can be thrown into the tank and collided twice with the inner wall of the tank. The ozone mass ejected is broken into smaller ozone masses by the collision, and then mixed and stirred by the main stirring rod and the supporting stirring rod, ozone is quickly added into the ozone water, increasing the ozone concentration in the ozone water.

[0023] To achieve the above objectives, a specific embodiment of the present invention provides the following technical solution:

[0024] An ozone supply method for a texturing and cleaning tank in solar cell processing includes the following steps:

[0025] S1. Mix water, hydrochloric acid solution and ozone to obtain preliminary ozone water. Detect the content of the preliminary ozone water. If the content of the preliminary ozone water is qualified, proceed to step S2; otherwise, proceed to step S3.

[0026] S2. Transfer qualified preliminary ozone water to the ozone cleaning tank and wait for the silicon wafers to be cleaned.

[0027] S3. Based on the preliminary ozone water test data, add the corresponding water, hydrochloric acid solution or ozone to the preliminary ozone water and mix it further to obtain further ozone water. After the further ozone water passes the test, add it to the ozone cleaning tank and wait for the silicon wafers to be cleaned.

[0028] S4. Filter the ozone water used for cleaning silicon wafers in the ozone cleaning tank and test its content. If the content meets the standard, add the filtered ozone water to the ozone cleaning tank and wait for the silicon wafers to be cleaned. If the content does not meet the standard, add the corresponding water, hydrochloric acid solution or ozone to the filtered ozone water according to the test results for further mixing. After the content meets the standard, add it to the ozone cleaning tank and wait for the silicon wafers to be cleaned.

[0029] S5. Repeat step S4.

[0030] Compared with the prior art, the ozone supply system for the texturing and cleaning tank of the present invention for solar cell processing sets up a water source, a solution source and an ozone generator separately. It can mix the water source, solution source and ozone during the transportation process, and can detect the state of the ozone water in the ozone water generation component. According to the state of the ozone water in the ozone water generation component, water source, solution source, ozone or a mixture of multiple thereof are supplied to the ozone water generation component so that the ozone water in the ozone water generation component meets the process requirements.

[0031] A filter and a temporary storage tank are installed. The temporary storage tank can temporarily store the ozone water used in the ozone cleaning tank. After being filtered by the filter, the ozone water in the temporary storage tank re-enters the ozone water generation component and is reused after secondary processing. This saves energy and protects the environment while reducing process costs.

[0032] The temperature of ozone water can be controlled while it is being stirred. It can be heated or cooled urgently to quickly meet the process requirements. Through the cooperation of the second chamber and the seventh valve and the fixed main frame, ozone is replenished into the tank in two ways at the same time, which increases the compensation speed of ozone water and makes it easier for ozone water to return to a state that can be used for the process.

[0033] The ozone supply method for the texturing and cleaning tank in solar cell processing of the present invention can significantly reduce the cost of cleaning silicon wafers, and is energy-saving and environmentally friendly. Attached Figure Description

[0034] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0035] Figure 1 This is a flowchart of the ozone supply system for the texturing and cleaning tank in solar cell processing according to one embodiment of the present invention.

[0036] Figure 2 This is a schematic diagram of the structure of an ozone water generating component in one embodiment of the present invention. Figure 1;

[0037] Figure 3 This is a schematic diagram of the structure of an ozone water generating component in one embodiment of the present invention. Figure 2 ;

[0038] Figure 4 This is a cross-sectional view of an ozone water generating component in one embodiment of the present invention. Figure 1 ;

[0039] Figure 5 for Figure 4 Schematic diagram of the structure at point A in the middle;

[0040] Figure 6 for Figure 4 Schematic diagram of the structure at point B;

[0041] Figure 7 This is a cross-sectional view of an ozone water generating component in one embodiment of the present invention. Figure 2 ;

[0042] Figure 8 for Figure 7 Schematic diagram of the structure at point C;

[0043] Figure 9 for Figure 7 Schematic diagram of the structure at point D;

[0044] Figure 10 This is a schematic diagram of the structure of the annular tube in one embodiment of the present invention;

[0045] Figure 11 This is a cross-sectional view of an ozone water generating component in one embodiment of the present invention. Figure 3 ;

[0046] Figure 12 This is a flowchart of an ozone supply method for a texturing and cleaning tank in solar cell processing according to an embodiment of the present invention.

[0047] Explanation of key figure labels:

[0048] 1. Water source; 2. First connecting pipe; 3. First valve; 4. Solution source; 5. Second connecting pipe; 6. Second valve; 7. Ozone generator; 8. Third connecting pipe; 9. Third valve; 10. Fourth valve; 11. Ozone water generation component; 12. Fourth connecting pipe; 13. Ozone cleaning tank; 14. Fifth connecting pipe; 15. Filter; 16. Temporary storage tank; 17. Sixth connecting pipe; 18. Fifth valve;

[0049] 19. Tank body; 1901. Inlet pipe; 1902. Outlet pipe; 1903. Positioning cylinder; 20. Fixed main frame; 2001. Connecting rod; 2002. Fixed bracket; 21. Stirring main rod; 2101. Stirring support rod; 2102. First cavity; 2103. Second cavity; 22. Annular pipe; 2201. First nozzle; 23. Rotary shaft exchange assembly; 2301. Connecting part; 2302. Rotating part ; 2303, First exchange chamber; 2304, Second exchange chamber; 2305, Third exchange chamber; 24, Sixth valve; 25, Ozone input pipe; 26, First heat exchange pipe; 2601, First heat exchange branch pipe; 27, Second heat exchange pipe; 2701, Second heat exchange branch pipe; 28, Seventh connecting pipe; 29, Seventh valve; 30, Motor; 31, Hollow heat absorption plate; 3101, Heat absorption hole; 3102, Heat transfer pipe. Detailed Implementation

[0050] To enable those skilled in the art to better understand the technical solutions of this invention, the technical solutions of the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this invention, and not all embodiments. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of this invention.

[0051] like Figure 1 As shown, an ozone supply system for a texturing and cleaning tank in solar cell processing according to an embodiment of the present invention includes a water source 1, a solution source 4, an ozone generator 7, and an ozone water generating assembly 11. The ozone generator 7 is used to generate ozone. The water source 1 is generally stored in a water tank, and the solution source 4 is stored in a storage tank. The solution source 4 is generally formed by mixing hydrochloric acid solution. A first connecting pipe 2 is provided between the water source 1 and the ozone water generating assembly 11, through which water is supplied to the ozone water generating assembly 11. A second connecting pipe 5 is provided between the solution source 4 and the first connecting pipe 2, allowing the solution source 4 and the water source 1 to mix at the connection between the first connecting pipe 2 and the second connecting pipe 5, and then be fed into the ozone water generating assembly 11. A third connecting pipe 8 is provided between the ozone generator 7 and the first connecting pipe 2, allowing the ozone, water source 1, and solution source 4 to be initially mixed at the connection between the third connecting pipe 8 and the first connecting pipe 2, and then fed into the ozone water generating assembly 11. Water source 1, solution source 4 and ozone are fed into ozone water generating component 11 in a certain proportion. After water source 1, solution source 4 and ozone are initially mixed in the first connecting pipe 2 in a certain proportion, ozone water is obtained.

[0052] like Figure 1As shown, a first valve 3 is installed at the end of the first connecting pipe 2 near the water source 1, a second valve 6 is installed on the second connecting pipe 5, and a third valve 9 is installed on the third connecting pipe 8. That is, the substance transported in the first connecting pipe 2 can be a mixture of water source 1 and solution source 4, a mixture of water source 1 and ozone, a mixture of solution source 4 and ozone, or a mixture of water source 1, the first connecting pipe 2, and ozone, which is then fed into the ozone water generating assembly 11. Of course, water source 1, the first connecting pipe 2, and ozone can also be fed into the ozone water generating assembly 11 individually. The substances fed in can be selected according to the state of the ozone water in the ozone water generating assembly 11, thereby changing the state of the ozone water in the ozone water generating assembly 11 to ensure that the ozone water meets the process requirements.

[0053] like Figure 1 As shown, ozone water in the ozone water generating component 11 is fed into the ozone cleaning tank 13. The silicon wafer comes into contact with the ozone water in the ozone cleaning tank 13, thus achieving cleaning of the silicon wafer through ozone water. A fourth connecting pipe 12 is provided between the ozone water generating component 11 and the ozone cleaning tank 13. The fourth connecting pipe 12 is used to transport the ozone water in the ozone water generating component 11 to the ozone cleaning tank 13.

[0054] like Figure 1 As shown, the ozone supply system for the texturing and cleaning tank in solar cell processing also includes a temporary storage tank 16. The temporary storage tank 16 is used to temporarily store ozone water from the ozone cleaning tank 13. A fifth connecting pipe 14 is provided between the ozone cleaning tank 13 and the temporary storage tank 16. A filter 15 is installed on the fifth connecting pipe 14 to filter impurities in the ozone water, ensuring that the ozone water entering the temporary storage tank 16 is clean and free of secondary impurities, facilitating the reuse of the ozone water. A sixth connecting pipe 17 is provided between the temporary storage tank 16 and the first connecting pipe 2. Through the sixth connecting pipe 17, the ozone water in the temporary storage tank 16 can be transported to the first connecting pipe 2, and then from the first connecting pipe 2 to the ozone water generating component 11.

[0055] like Figure 1 As shown, a fifth valve 18 is provided on the sixth connecting pipe 17. The fifth valve 18 is located between the fourth valve 10 and the ozone water generating component 11. When circulation is not required, the ozone water can be stored in the temporary storage tank 16 without occupying the ozone supply system.

[0056] However, simply mixing ozone with water source 1 and solution source 4 through the first connecting pipe 2 is insufficient for uniform mixing, resulting in poor cleaning performance of the obtained ozone water. To address this issue, such as... Figures 1 to 11As shown, the ozone water generating component 11 includes a tank 19. The initially mixed ozone water can be further mixed within the tank 19 to achieve a more uniform mixture, thereby enabling the ozone water to better clean the silicon wafers, improving the quality of the silicon wafers, and ultimately enhancing the quality of the resulting solar cells. Furthermore, the concentration of the ozone water within the tank 19 can be adjusted by heating or cooling it according to process requirements.

[0057] Specifically, such as Figures 2 to 11 As shown, a fixed main frame 20 is fixedly connected to the outside of the tank body 19, and the fixed main frame 20 is used to fix the tank body 19. An inlet pipe 1901 is fixedly connected to one end of the tank body 19. The end of the inlet pipe 1901 away from the tank body 19 is connected to a first connecting pipe 2. The end of the inlet pipe 1901 away from the first connecting pipe 2 is located inside the tank body 19 and is fixedly connected to an annular pipe 22. Multiple first nozzles 2201 are installed on the annular pipe 22, and the first nozzles 2201 are inclined upwards. The substance in the first connecting pipe 2 is transported to the inlet pipe 1901, and then to the annular pipe 22, and sprayed out by the first nozzles 2201. Depending on the sprayed substance and the state of the ozone water inside the tank body 19, it can be selected whether the substance sprayed by the first nozzles 2201 forms a jet inside the tank body 19. The sprayed substance forming a jet can agitate the ozone water inside the tank body 19, allowing the substance sprayed by the first nozzles 2201 to mix quickly with the ozone water. If the sprayed substance is ozone, it will be sprayed as foamy ozone gas, slowly sprayed upwards from the bottom of the canister 19. Ozone and ozone water are mixed, and the foamy ozone gas can mix with the ozone water in the canister 19 more quickly.

[0058] The outlet pipe 1902 is connected to the fourth connecting pipe 12. Ozone water is transported through the outlet pipe 1902 to the fourth connecting pipe 12, and then transported by the fourth connecting pipe 12 to the ozone cleaning tank 13.

[0059] like Figures 2 to 11 As shown, a connecting rod 2001 is fixedly connected to the upper end of the fixed main frame 20, a fixed bracket 2002 is fixedly connected to the upper end of the connecting rod 2001, and a motor 30 is fixedly connected to the upper end of the fixed bracket 2002. A stirring main rod 21, matching the output shaft of the motor 30, is rotatably connected to the tank body 19. Multiple stirring support rods 2101 are provided on the stirring main rod 21. The stirring main rod 21 and the stirring support rods 2101 are driven to rotate by the motor 30 to stir the ozone water within the tank body 19. This makes the initially mixed ozone water more uniform and improves the cleaning effect of the ozone water.

[0060] like Figure 2As shown, the tank body 19 is fixedly connected to a 1903 positioning cylinder that matches the stirring main rod 21. The stirring main rod 21 and the 1903 positioning cylinder are rotatably connected. The length of the 1903 positioning cylinder is much greater than the wall thickness of the tank body 19, which makes the stirring main rod 21 more stable during rotation and less prone to shaking.

[0061] like Figures 2-9 As shown, a second cavity 2103 is formed inside the stirring rod 21, and a first cavity 2102 is formed outside the second cavity 2103. A rotating shaft exchange assembly 23 is fixedly connected to the outside of the stirring rod 21. The rotating shaft exchange assembly 23 is connected to the ozone input pipe 25, the first heat exchange pipe 26, and the second heat exchange pipe 27, respectively, connecting the ozone input pipe 25 and the second cavity 2103, and connecting the first heat exchange pipe 26 and the second heat exchange pipe 27 to the first cavity 2102. The other end of the ozone input pipe 25 is connected to the ozone generator 7, through which ozone can be supplied to the second cavity 2103 and temporarily stored in the second cavity 2103. A seventh valve 29 is also provided on the side wall of the second cavity 2103, which can transport the ozone in the second cavity 2103 to the tank 19. Because the stirring rod 21 rotates, when ozone is discharged through the seventh valve 29, centrifugal force is generated. The ozone is thrown out and comes into contact with the inner wall of the tank 19, causing collisions. The large ozone mass breaks into smaller ozone masses, making it easier to mix with the ozone water. In other words, ozone can be added while the ozone water is being stirred, increasing the mixing speed. The simultaneous throwing out of ozone also increases the amplitude of the agitation of the ozone water inside the tank 19, further accelerating the mixing speed.

[0062] Specifically, such as Figures 2-5 As shown, the rotary shaft exchange assembly 23 includes a connecting part 2301 and three rotating parts 2302 rotatably connected to the outside of the connecting part 2301. The connecting part 2301 is fixedly connected to the stirring main rod 21. The rotating parts 2302 and the connecting part 2301 respectively form a first exchange chamber 2303, a second exchange chamber 2304, and a third exchange chamber 2305. The first exchange chamber 2303 is connected to the second chamber 2103, and the first chamber 2102 is connected to the second exchange chamber 2304 and the third exchange chamber 2305. That is, the ozone input pipe 25 delivers ozone to the first exchange chamber 2303, and then from the first exchange chamber 2303 to the second chamber 2103 for temporary storage. Through the cooperation of the annular pipe 22 and the ozone input pipe 25, the two sets of pipes can simultaneously deliver ozone into the tank 19, and the delivery positions and methods are different. Both delivery methods can mix well with the ozone water in the tank 19. When the ozone content of the ozone water is low, the two delivery methods can significantly increase the speed at which ozone water is replenished with ozone, making it easier to use the ozone cleaning tank 13.

[0063] During the stirring process, the ozone water rubs against and collides with the tank 19 and the stirring rod 21, generating heat. During the texturing and cleaning process, the temperature of the ozone water is generally room temperature, ideally maintained between 25 and 30°C. To maintain the ozone water in a better state, one end of the second exchange chamber 2304 is connected to a first heat exchange tube 26. The first heat exchange tube 26 can supply fluid into the first exchange chamber 2303, thereby changing the temperature of the stirring rod 21. Heat exchange occurs between the stirring rod 21 and the ozone water, thus controlling the temperature of the ozone water.

[0064] Specifically, such as Figures 2-9 As shown, the other end of the first heat exchange tube 26 is connected to the water source 1. When the temperature of the ozone water is too high, the water source 1 is transported to the first cavity 2102 through the first heat exchange tube 26 to reduce the temperature of the stirring rod 21. The stirring rod 21 and the ozone water exchange heat, thereby reducing the temperature of the ozone water. The third exchange cavity 2305 is connected to the second heat exchange tube 27, the other end of which is also connected to the water source 1. After heat exchange, the water source 1 is discharged back to its original location through the second heat exchange tube 27. Through natural cooling within the second heat exchange tube 27, its temperature is reduced to a certain extent before entering the water source 1 to mix with other water sources 1. The water source 1 discharged into the water source 1 through the second heat exchange tube 27 is diluted, and its temperature is sufficient to meet the process requirements. Of course, a cooling component can also be installed on the second heat exchange tube 27 to cool the water source 1 within the second heat exchange tube 27, but this will increase the cost of the equipment and the process cost during use. Unless there are special circumstances, it is not necessary to install such a component.

[0065] like Figures 2-9 As shown, the motor 30 generates a large amount of heat during operation. A first heat exchange branch pipe 2601 is installed on the first heat exchange pipe 26, and a hollow heat-absorbing plate 31 is installed at the other end of the first heat exchange branch pipe 2601. The hollow heat-absorbing plate 31 absorbs the excess heat generated by the motor 30 through negative pressure, and can temporarily store heat. When the ozone water in the tank 19 needs to be heated, the hot air stored in the hollow heat-absorbing plate 31 is transported to the first heat exchange branch pipe 2601, and then to the first cavity 2102. The first cavity 2102 exchanges heat with the stirring rod 21, and the stirring rod 21 exchanges heat with the ozone water, thus utilizing the waste heat generated by the motor 30 to raise the temperature of the ozone water. This is energy-saving and environmentally friendly, and also facilitates heat dissipation from the motor 30. A second heat exchange branch pipe 2701 is installed on the second heat exchange pipe 27. After the hot air has undergone heat exchange, it can be directly discharged through the second heat exchange branch pipe 2701.

[0066] Preferably, a hollow heat-absorbing plate 31 can also be provided in the heat dissipation section of the ozone generator 7 to collect excess heat generated by the ozone generator 7 for heating the hydrogen peroxide in the tank 19.

[0067] Specifically, such as Figure 4 As shown, the hollow heat-absorbing plate 31 is a hollow cavity. Multiple heat-absorbing holes 3101 are provided on the side wall of the hollow heat-absorbing plate 31 near the motor 30. A heat transfer pipe 3102 is provided at the end of the hollow heat-absorbing plate 31 away from the motor 30. The heat transfer pipe 3102 can be connected to either the first heat exchange pipe 26 or the second heat exchange pipe 27. When connected to the first heat exchange pipe 26, the first heat exchange pipe 26 serves as the fluid input pipe. When the heat transfer pipe 3102 is connected to the second heat exchange pipe 27, the second heat exchange pipe 27 serves as the fluid input pipe.

[0068] like Figures 7-9 As shown, if the ozone water in the tank 19 needs to be cooled or heated quickly, a sixth valve 24 is provided on the side wall of the first cavity 2102. The fluid in the first cavity 2102 can be thrown into the ozone water in the tank 19 through the sixth valve 24, so that the tank 19 can be cooled or heated quickly, and the temperature of the ozone water can meet the temperature requirements.

[0069] To ensure that the ozone in the second chamber 2103 does not decompose due to overheating, the outer wall of the second chamber 2103 is made of heat-insulating material to ensure that the ozone in the second chamber 2103 is not affected by the temperature of the fluid in the first chamber 2102. Alternatively, the wall thickness of the second chamber 2103 can be increased to improve its heat insulation performance.

[0070] like Figures 2-9 As shown, the first cavity 2102 is also provided with a seventh connecting pipe 28. The seventh connecting pipe 28 is connected to the third exchange cavity 2305. The seventh connecting pipe 28 enables the fluid outlet to be at the bottom and the inlet of the first heat exchange tube 26 to be at the top. When the fluid enters, the fluid can be discharged at the same time. The fluid entering and the fluid being discharged will not conflict, thereby maximizing the heat exchange effect of the fluid in the stirring rod 21.

[0071] This invention, by separately setting up a water source 1, a solution source 4, and an ozone generator 7, can complete the mixing of water source 1, solution source 4, and ozone during the transportation process, and can detect the state of ozone water in the ozone water generation component 11. Based on the state of ozone water in the ozone water generation component 11, water source 1, solution source 4, ozone, or a mixture thereof are supplied to the ozone water generation component 11 so that the ozone water in the ozone water generation component 11 meets the process requirements.

[0072] The present invention provides a filter 15 and a temporary storage tank 16. The temporary storage tank 16 can temporarily store the ozone water used in the ozone cleaning tank 13. After being filtered by the filter 15, the ozone water in the temporary storage tank 16 re-enters the ozone water generating component 11 and is reused after secondary processing. This saves energy and is environmentally friendly while reducing process costs.

[0073] By setting a fixed main frame 20, the present invention can control the temperature of ozone water while stirring it, and can urgently raise or lower the temperature of ozone water to quickly meet the process requirements. Through the cooperation of the second chamber 2103 and the seventh valve 29 and the fixed main frame 20, ozone is simultaneously replenished into the tank 19 in two ways, which improves the compensation speed of ozone water and facilitates the ozone water to return to a state that can be used for processing.

[0074] like Figure 12 As shown, in one embodiment of the present invention, the ozone supply process for the texturing and cleaning tank for solar cell processing includes: S1, water, hydrochloric acid solution and ozone are initially mixed to obtain preliminary ozone water, and the content of the preliminary ozone water is detected. If the content of the preliminary ozone water is qualified, then step S2 is executed; otherwise, step S3 is executed.

[0075] S2. Transfer qualified preliminary ozone water to ozone cleaning tank 13 and wait for the silicon wafers to be cleaned.

[0076] S3. Based on the preliminary ozone water test data, add the corresponding water, hydrochloric acid solution or ozone to the preliminary ozone water and mix it further to obtain further ozone water. After the further ozone water passes the test, add it to the ozone cleaning tank 13 and wait for the silicon wafers to be cleaned.

[0077] S4. Filter the ozone water used for cleaning silicon wafers in ozone cleaning tank 13 and test its content. If the content meets the standard, add the filtered ozone water to ozone cleaning tank 13 and wait for the silicon wafers to be cleaned. If the content does not meet the standard, add the corresponding water, hydrochloric acid solution or ozone to the filtered ozone water according to the test results for further mixing. After the content meets the standard, add it to ozone cleaning tank 13 and wait for the silicon wafers to be cleaned.

[0078] S5. Repeat step S4.

[0079] This can significantly reduce the cost of cleaning silicon wafers, making it energy-efficient and environmentally friendly.

[0080] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0081] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. An ozone supply system for a texturing and cleaning tank in solar cell processing, used to supply ozone water to the ozone cleaning tank, characterized in that, include: Water source; Solution source; An ozone generator, wherein the ozone generator is used to generate ozone; An ozone water generating component is used to mix and form ozone water, and a fourth connecting pipe is provided between the ozone water generating component and the ozone cleaning tank. A temporary storage tank is provided, with a fifth connecting pipe between the ozone cleaning tank and the temporary storage tank. The temporary storage tank is used to temporarily store ozone water. A first connecting pipe is provided between the water source and the ozone water generating component. A sixth connecting pipe is provided between the first connecting pipe and the temporary storage tank. A filter, which is installed on the fifth connecting pipe, is used to filter the ozone water transported in the fifth connecting pipe; A second connecting pipe is provided between the first connecting pipe and the solution source, and a third connecting pipe is provided between the ozone generator and the first connecting pipe; The second connecting pipe is provided with a second valve, the third connecting pipe is provided with a third valve, the end of the first connecting pipe near the water source is provided with a first valve, the end of the first connecting pipe near the ozone water generating component is provided with a fourth valve, the sixth connecting pipe is provided between the fourth valve and the ozone water generating component, and the sixth connecting pipe is provided with a fifth valve. The ozone water generating component includes a tank, with an inlet pipe at one end and an outlet pipe at the other end, and the inlet pipe is connected to a first connecting pipe. An annular pipe is provided at the end of the inlet pipe away from the first connecting pipe. Multiple first nozzles are provided on the annular pipe. The first nozzles are used to spray the liquid transported in the first connecting pipe into the tank and can form a jet to stir the ozone water in the tank. The tank body is fixedly connected to a fixed main frame, the upper end of the fixed main frame is fixedly connected to a connecting rod, and the end of the connecting rod away from the fixed main frame is fixedly connected to a fixed bracket. A motor is fixedly connected to the upper end of the fixed bracket, and a stirring main rod that matches the motor is rotatably connected inside the tank. Several stirring support rods are provided on the stirring main rod. Both the main stirring rod and the supporting stirring rod are provided with a second cavity, and a first cavity is provided outside the second cavity; The upper end of the stirring rod is fixedly connected to a rotating shaft exchange assembly for connecting the first chamber and the second chamber. The rotating shaft exchange assembly is provided with an ozone input pipe that matches the second chamber. The other end of the ozone input pipe is connected to an ozone generator. The rotating shaft exchange assembly is provided with a first heat exchange tube and a second heat exchange tube that match the first chamber. The other ends of both the first and second heat exchange tubes are connected to a water source. The rotating shaft exchange assembly includes a connecting part fixedly connected to the outer wall of the stirring main rod. The outer wall of the connecting part is rotatably connected to three rotating parts. The three rotating parts and the connecting part respectively form a first exchange chamber, a second exchange chamber and a third exchange chamber. The first exchange chamber is connected to the second chamber, and the second and third exchange chambers are connected to the first chamber. The ozone input pipe is connected to the first exchange chamber, the first heat exchange pipe is connected to the second exchange chamber, and the second heat exchange pipe is connected to the third exchange chamber; The stirring support rod is equipped with multiple seventh valves that match the second chamber.

2. The ozone supply system for the texturing and cleaning tank in solar cell processing according to claim 1, characterized in that, The first heat exchange tube is provided with a first heat exchange branch tube, and a hollow heat absorption plate is fixedly connected to the other end of the first heat exchange branch tube. The hollow heat absorption plate is used to extract excess heat from the motor to form hot air, and the hot air is transported to the fixed main frame through the first heat exchange branch tube. The second heat exchange tube is provided with a second heat exchange branch pipe, which is used to discharge hot gas.

3. The ozone supply system for the texturing and cleaning tank in solar cell processing according to claim 2, characterized in that, The hollow heat-absorbing plate is hollow, and multiple heat-absorbing holes are opened at the end of the hollow heat-absorbing plate near the motor. The hollow heat-absorbing plate extracts excess heat generated by the motor through negative pressure. A heat transfer pipe is provided at the end of the hollow heat-absorbing plate away from the motor, and the other end of the heat transfer pipe is connected to the first heat exchange branch pipe.

4. The ozone supply system for the texturing and cleaning tank in solar cell processing according to claim 1, characterized in that, The stirring support rod is equipped with multiple sixth valves that match the first cavity.

Images