Multi-functional pneumatic dispensing valve
By designing a multifunctional pneumatic dispensing valve that integrates a pressure sensor and slide rail assembly, the problem of single-function operation in existing technologies is solved, enabling multifunctional operation of dispensing, displacement sensing, and weighing, thereby improving the flexibility and accuracy of semiconductor packaging.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- SHENZHEN ZHUOXING ADVANCED PACKAGING TECHNOLOGY CO LTD
- Filing Date
- 2024-09-26
- Publication Date
- 2026-05-29
AI Technical Summary
Existing semiconductor dispensing valves have limited functionality and cannot perform multi-functional operations, especially in applications involving dispensing, displacement sensors, and load cells.
A multifunctional pneumatic dispensing valve was designed, integrating a pressure sensor, slide rail assembly, glue cartridge, and dispensing needle. It can detect the glue volume and displacement in real time. Through the cooperation of electromagnet and slide rail assembly, it realizes displacement sensing and weighing functions, and realizes dispensing and glue application operations through motor drive mechanism.
It realizes multifunctional dispensing and sensor functions in the semiconductor packaging process, improving the flexibility and accuracy of operation, and enabling real-time monitoring of adhesive volume and workpiece position.
Smart Images

Figure CN118976660B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of semiconductor packaging equipment technology, and more particularly to a multifunctional pneumatic dispensing valve. Background Technology
[0002] Semiconductor manufacturing processes consist of wafer fabrication, wafer testing, packaging, and testing. Among these, packaging the workpiece is to protect it from the influence of the surrounding environment (including physical and chemical influences). Current semiconductor dispensing valves have a single function, only capable of dispensing and drawing adhesive. Summary of the Invention
[0003] This invention provides a multifunctional pneumatic dispensing valve, including a mounting base, a slide rail assembly, a pressure sensor, a glue cartridge, an air inlet pipe, and a dispensing needle. The pressure sensor is mounted on the support, the support is mounted on the mounting base, the slide rail assembly is mounted on the mounting base, the glue cartridge is mounted on the slide rail assembly, and the glue cartridge can move up and down with the slide rail assembly. The air inlet pipe is located above the glue cartridge, and the dispensing needle is located below the glue cartridge.
[0004] When the dispensing needle touches the workpiece, the pressure sensor can detect the pressure change, thereby sensing that the dispensing needle has touched the workpiece and realizing the function of the displacement sensor.
[0005] When the amount of glue in the glue cartridge decreases, the pressure sensor can detect the weight of the glue in real time.
[0006] As a further improvement of the present invention, the multifunctional pneumatic dispensing valve also includes a support, which is mounted on the mounting base, and the pressure sensor is mounted on the support.
[0007] As a further improvement of the present invention, the multifunctional pneumatic dispensing valve includes a glue tube support and a glue tube clamp. The glue tube support and the glue tube clamp are mounted on the slide rail assembly, and the glue tube support and the glue tube clamp can move up and down with the slide rail assembly. The glue tube clamp holds the glue tube tightly, and the glue tube support supports the glue tube.
[0008] As a further improvement of the present invention, the multifunctional pneumatic dispensing valve further includes a screw and a magnetic block. The screw and the magnetic block are fixedly connected. The magnetic block is installed on the slide rail assembly and can move up and down with the slide rail assembly. The screw is aligned with the pressure sensor and contacts the pressure sensor.
[0009] As a further improvement of the present invention, the pneumatic dispensing valve further includes a spring, a spring rod, and a nut. The spring rod is fixedly installed on the magnetic block, the magnetic block has an inner cavity, the support is located in the inner cavity of the magnetic block, the support has a through hole, one end of the spring rod passes through the through hole of the support, the nut is installed on one end of the spring rod, the spring is sleeved on the outer surface of the spring rod, the spring is located below the support, and the spring is located between the support and the nut.
[0010] As a further improvement of the present invention, the multifunctional pneumatic dispensing valve also includes an electromagnet, which is mounted on the mounting base and is used to attract the magnetic block.
[0011] As a further improvement of the present invention, the multifunctional pneumatic dispensing valve also includes a dispensing controller, one end of the air inlet pipe is connected to the glue cartridge, and the other end of the air inlet pipe is connected to the dispensing controller.
[0012] As a further improvement of the present invention, the multi-functional pneumatic dispensing valve also includes a drive mechanism for driving the multi-functional pneumatic dispensing valve to move.
[0013] As a further improvement of the present invention, the driving mechanism includes a motor and a lead screw, the output shaft of the motor is connected to the lead screw, and the multifunctional pneumatic dispensing valve is connected to a nut on the lead screw.
[0014] As a further improvement of the present invention, the slide rail assembly includes a guide rail.
[0015] The beneficial effects of this invention are: the multifunctional pneumatic dispensing valve of this invention can not only dispense or paint glue, but also act as a displacement sensor and a weighing sensor, making it highly functional. Attached Figure Description
[0016] Figure 1 This is a schematic diagram of the structure of the present invention;
[0017] Figure 2 This is a side view of the structure. Detailed Implementation
[0018] like Figure 1 , 2 As shown, this invention discloses a multifunctional pneumatic dispensing valve, which aims to invent a multifunctional dispensing valve that can not only dispense or paint glue, but also act as a displacement sensor and a weighing sensor.
[0019] The multi-functional pneumatic dispensing valve includes a mounting base 01, a slide rail assembly 02, a support 04, an electromagnet 05, a pressure sensor 06, a magnetic block 03, a screw 07, a spring 08, a glue cartridge support 09, a glue cartridge buckle 10, a glue cartridge 11, an air inlet pipe 12, and a dispensing needle 13. The support 04 and the electromagnet 05 are mounted on the mounting base 01, and the pressure sensor 06 is mounted on the support 04. The slide rail assembly 02 includes a guide rail 15, preferably a cross roller guide rail. The magnetic block 03 is mounted on the slide rail assembly 02 and can move up and down with the slide rail assembly 02. The screw 07 is fixedly connected to the magnetic block 03. A spring rod 16 is fixedly mounted on a magnetic block 03. The magnetic block 03 has an inner cavity, and a support 04 is located inside the inner cavity of the magnetic block 03. The support 04 has a through hole, and one end of the spring rod 16 passes through the through hole of the support 04. A nut 14 is installed on one end of the spring rod 16, and a spring 08 is fitted onto the outer surface of the spring rod 16. The spring 08 is located below the support 04 and between the support 04 and the nut 14. The nut 14 is used to adjust the spring force. A rubber tube support 09 and a rubber tube buckle 10 are mounted on a slide rail assembly 02, and the rubber tube support 09 and the rubber tube buckle 10 can move up and down with the slide rail assembly 02. A rubber tube 11 is located between the rubber tube support 09 and the rubber tube buckle 10, an air inlet pipe 12 is located above the rubber tube 11, and a dispensing needle 13 is located below the rubber tube 11. Spring 08 is not essential; its function is simply to ensure that screw 07 contacts pressure sensor 06, thus improving reliability. Even without spring 08, screw 07 will still contact pressure sensor 06 under the influence of gravity.
[0020] The glue cartridge 11 is used to store glue. One end of the air inlet pipe 12 is connected to the glue cartridge 11, and the other end is connected to the glue dispensing controller. The glue dispensing controller applies pressure to the glue in the glue cartridge 11 through the air inlet pipe 12, and squeezes the glue out from the glue dispensing needle 13, thereby achieving the purpose of dispensing or drawing glue.
[0021] The guide rail 15 of the slide rail assembly 02 is mounted on the mounting base 01. Under its own weight, the magnetic block 03 tends to move downwards, but stops falling under the support of the pressure sensor 06 and the screw 07. The motor drives the multi-functional pneumatic dispensing valve to move downwards. When the dispensing needle 13 touches the workpiece, the force applied to the pressure sensor 06 by the screw 07 decreases. The pressure sensor 06 can detect the pressure change, thereby sensing that the dispensing needle 13 has touched the workpiece, realizing the function of a displacement sensor.
[0022] The pressure sensor 06 can detect the weight in real time. When the amount of glue in the glue cartridge 11 decreases, the weight will decrease, thus enabling the monitoring of the amount of glue.
[0023] This invention allows for the energization or de-energization of the electromagnet 05 as needed. When energized, the electromagnet 05 generates an attractive force, creating a pulling force on the magnetic block 03. Furthermore, the attractive force of the electromagnet 05 can be adjusted by changing the current; a larger current results in a stronger attractive force, and a smaller current results in a weaker attractive force. The purpose of the electromagnet 05 is to ensure that there is no relative displacement between the mounting base 01 and the slide rail assembly 02 when the dispensing valve moves at high speed. The function of the electromagnet 05 is to prevent the screw 07 from dislodging from the pressure sensor 06 during rapid up-and-down movement; when force measurement is required, the electromagnet 05 must be de-energized.
[0024] This invention also includes a drive mechanism for moving the multi-functional pneumatic dispensing valve. The drive mechanism can have many different driving methods and structures, which will not be listed here. Any drive mechanism capable of moving the multi-functional pneumatic dispensing valve up and down is within the scope of this invention. In a preferred embodiment, the drive mechanism includes a motor and a lead screw. The output shaft of the motor is connected to the lead screw, and the multi-functional pneumatic dispensing valve is connected to a nut on the lead screw.
[0025] The above description, in conjunction with specific preferred embodiments, provides a further detailed explanation of the present invention. It should not be construed that the specific implementation of the present invention is limited to these descriptions. For those skilled in the art, various simple deductions or substitutions can be made without departing from the concept of the present invention, and all such modifications and substitutions should be considered within the scope of protection of the present invention.
Claims
1. A multi-functional pneumatic dispensing valve, characterized in that: The device includes a mounting base (01), a slide rail assembly (02), a pressure sensor (06), a glue tube (11), an air inlet pipe (12), a glue dispensing needle (13), and a support (04). The pressure sensor (06) is mounted on the support (04), the support (04) is mounted on the mounting base (01), the slide rail assembly (02) is mounted on the mounting base (01), the glue tube (11) is mounted on the slide rail assembly (02), and the glue tube (11) can move up and down with the slide rail assembly (02). The air inlet pipe (12) is located above the glue tube (11), and the glue dispensing needle (13) is located below the glue tube (11). When the dispensing needle (13) touches the workpiece, the pressure sensor (06) can detect the pressure change, thereby sensing that the dispensing needle (13) has touched the workpiece and realizing the function of the displacement sensor. When the amount of glue in the glue cartridge (11) decreases, the pressure sensor (06) can detect the weight of the glue in real time. The multi-functional pneumatic dispensing valve also includes a screw (07) and a magnetic block (03). The screw (07) is fixedly connected to the magnetic block (03). The magnetic block (03) is installed on the slide rail assembly (02). The magnetic block (03) can move up and down with the slide rail assembly (02). The screw (07) is aligned with the pressure sensor (06) and contacts the pressure sensor (06).
2. The multifunctional pneumatic dispensing valve according to claim 1, characterized in that: The multi-functional pneumatic dispensing valve includes a cartridge support (09) and a cartridge clamp (10). The cartridge support (09) and the cartridge clamp (10) are mounted on the slide rail assembly (02), and the cartridge support (09) and the cartridge clamp (10) can move up and down with the slide rail assembly (02). The cartridge clamp (10) clamps the cartridge (11), and the cartridge support (09) supports the cartridge (11).
3. The multifunctional pneumatic dispensing valve according to claim 1, characterized in that: The pneumatic dispensing valve also includes a spring (08), a spring rod (16), and a nut (14). The spring rod (16) is fixedly installed on the magnetic block (03). The magnetic block (03) has an inner cavity. The support (04) is located inside the inner cavity of the magnetic block (03). The support (04) has a through hole. One end of the spring rod (16) passes through the through hole of the support (04). The nut (14) is installed on one end of the spring rod (16). The spring (08) is fitted onto the outer surface of the spring rod (16). The spring (08) is located below the support (04) and between the support (04) and the nut (14).
4. The multifunctional pneumatic dispensing valve according to claim 1, characterized in that: The multi-functional pneumatic dispensing valve also includes an electromagnet (05), which is mounted on the mounting base (01) and is used to attract the magnetic block (03).
5. The multifunctional pneumatic dispensing valve according to claim 1, characterized in that: The multi-functional pneumatic dispensing valve also includes a dispensing controller. One end of the air inlet pipe (12) is connected to the glue cartridge (11), and the other end of the air inlet pipe (12) is connected to the dispensing controller.
6. The multifunctional pneumatic dispensing valve according to claim 1, characterized in that: The multi-functional pneumatic dispensing valve also includes a drive mechanism for moving the multi-functional pneumatic dispensing valve.
7. The multifunctional pneumatic dispensing valve according to claim 6, characterized in that: The drive mechanism includes a motor and a lead screw. The output shaft of the motor is connected to the lead screw, and the multi-functional pneumatic dispensing valve is connected to a nut on the lead screw.
8. The multifunctional pneumatic dispensing valve according to claim 7, characterized in that: The slide rail assembly (02) includes a guide rail (15).