Argon tail gas treatment device

Abstract

The present disclosure relates to the field of argon treatment, and to an argon tail gas treatment device, including a reaction unit, an oxygen delivery unit, a first aspirator, a capacity prediction unit and an oxygen supply control unit. The reaction unit is used to supply impurity gas in tail gas to react with oxygen. The first aspirator is connected to the reaction unit, and is provided with a first aspirator that can alternately adsorb oxygen and reducing impurity gas. The capacity prediction unit is arranged in the front stage of the first aspirator, and is used to predict the oxygen capacity and impurity gas capacity supplied to the first aspirator according to the device operation time in a single reduction process or a single oxidation process of the first aspirator, the total inlet flow rate of tail gas and oxygen, and the oxygen content and carbon monoxide content after the reaction. When the oxygen capacity reaches the oxygen saturation of the first aspirator or the carbon monoxide capacity reaches the carbon monoxide saturation of the first aspirator, the oxygen supply control unit controls the oxygen delivery unit to be disconnected / connected accordingly. The present disclosure is conducive to timely adjustment of oxygen input conditions.

Description

Technical Field

[0001] The present disclosure relates to the technical field of argon tail gas treatment, and in particular to an argon tail gas treatment device. Background Art

[0002] The Czochralski method is the main method for producing single crystal silicon. 70% to 80% of the world's single crystal silicon is produced by the Czochralski method. The most commonly used Czochralski method for producing single crystal silicon is the vacuum pulling process. The vacuum pulling process requires that high-purity argon gas be continuously and uniformly introduced into the furnace of the single crystal furnace during the silicon single crystal pulling process, and at the same time, the vacuum pump continuously pumps argon gas out of the furnace to keep the vacuum degree in the furnace stable at 20 Torr. During the vacuum pulling process, the argon gas carries silicon oxides and impurity volatiles generated by the high temperature during the single crystal pulling process, and is discharged into the atmosphere through the pumping of the vacuum pump. Through the analysis of the discharged argon tail gas, the impurity components of the argon tail gas include oxygen, nitrogen, carbon monoxide, carbon dioxide, methane and other alkane gases. Recycling and utilizing argon tail gas has a relatively important practical significance.

[0003] Some argon tail gas recovery and purification processes include: (1) mechanical impurity treatment of argon tail gas recovered from a single crystal furnace; (2) high-temperature catalysis to react hydrocarbons such as methane and carbon monoxide with oxygen to produce water and carbon dioxide, ensuring excess oxygen in the catalytic reaction, and adding oxygen if the impurity oxygen is insufficient; (3) after cooling, excess oxygen reacts with added hydrogen to generate water under the action of a catalyst, ensuring excess hydrogen in the reaction, and the impurity components in the argon after treatment are water, carbon dioxide, hydrogen and nitrogen; (4) water and carbon dioxide are adsorbed by an argon room temperature adsorption unit to obtain a crude argon gas containing only nitrogen and hydrogen as impurities. The above argon treatment process will introduce new impurity gas hydrogen into the argon tail gas, and a small amount of new impurity gas will remain in the argon tail gas, which is not conducive to the recovery of high-purity argon.

[0004] At the same time, during the operation of the reaction device in step (2) above, the amount of oxygen added may be excessive or insufficient, resulting in excessive oxygen or excessive carbon monoxide in the gas coming out of the reaction device. Therefore, an absorption device is provided at the back of the treatment device. The adsorbent filled in the absorption device can react with oxygen or carbon monoxide to absorb oxygen or carbon monoxide, and an oxygen analyzer is provided at the back of the absorption device to detect the oxygen content after absorption by the absorption device and adjust the opening of the oxygen supply valve for supplying oxygen to the treatment device according to the detection result, thereby adjusting the amount of supplementary oxygen. However, the above oxygen input amount is adjusted after the air inhalation device inhales air, and the detection of the oxygen analyzer has a hysteresis, which is prone to errors, affecting the removal effect of oxygen or carbon monoxide. Summary of the invention

[0005] In view of the above-mentioned shortcomings of the prior art, the purpose of the present disclosure is to provide an argon tail gas treatment device, which can avoid the situation of delayed feedback of oxygen input conditions and facilitate timely adjustment of the oxygen input conditions during the treatment process.

[0006] The argon tail gas treatment device provided by the present disclosure comprises: a tail gas delivery unit having a tail gas delivery outlet for outputting tail gas; a reaction unit having a reaction inlet and a reaction outlet, wherein the reaction inlet is connected to the tail gas delivery outlet and is used for the impurity gas in the tail gas to react with oxygen to form a reacted gas; an oxygen delivery unit having an oxygen delivery outlet connected to a pipeline between the tail gas delivery unit and the reaction unit, wherein the oxygen delivery unit can be controlled to turn on / off the oxygen output at the oxygen delivery outlet; an air intake unit comprising a first air intake device having a first air intake inlet, wherein the first air intake inlet is connected to the reaction outlet and is provided with a first air intake agent which absorbs oxygen in a reduced state and absorbs reducing impurity gases in the reacted gas in an oxidized state, and in an initial state, the first air intake device a capacity prediction unit, arranged in the front stage of the first air intake inlet, for predicting the oxygen capacity and impurity gas capacity supplied to the first aspirator according to the device operation time in a single reduction process in which the first aspirator is converted from an oxidized state to a reduced state or a single oxidation process in which the first aspirator is converted from a reduced state to an oxidized state, the total inflow rate of tail gas and oxygen, and the oxygen content and carbon monoxide content in the gas after the reaction; and an oxygen supply control unit, connected to the capacity prediction unit and the oxygen delivery unit, and controlling the oxygen delivery unit to be disconnected in response to the oxygen capacity satisfying the oxygen saturation condition that makes the first aspirator saturated / nearly saturated; and controlling the oxygen delivery unit to be turned on in response to the impurity gas capacity satisfying the impurity gas saturation condition that makes the first aspirator saturated / nearly saturated.

[0007] According to some embodiments provided by the present disclosure, the capacity prediction unit includes: a post-reaction detection component, which is arranged between the reaction outlet and the first air inlet, and is used to detect the oxygen content and carbon monoxide content of the post-reaction gas; a timer, which is used to calculate the device operation time in a single reduction process in which the first air inhaler is converted from an oxidized state to a reduced state and a single oxidation process in which the first air inhaler is converted from a reduced state to an oxidized state, and the timer is configured to start timing in the initial state, restart timing in response to the connection of the oxygen delivery unit, and restart timing in response to the disconnection of the oxygen delivery unit; an oxygen flow detector, which is arranged in the oxygen delivery unit, and is used to detect the incoming flow rate of oxygen; an exhaust gas flow detector, which is arranged in the exhaust gas delivery unit, and is used to detect the incoming flow rate of exhaust gas; and a processor, which is connected to the post-reaction detection component, the timer, the exhaust gas flow detector and the oxygen flow detector, so as to predict the oxygen capacity and impurity gas capacity for passing into the first air inhaler according to the detection results of the post-reaction detection component, the timer, the exhaust gas flow detector and the oxygen flow detector.

[0008] According to some embodiments provided by the present disclosure, the air intake unit also includes: a second air intake device, having a second air intake inlet, the second air intake inlet is connected to the first air intake outlet of the first air intake device, and is provided with a second air intake agent that adsorbs oxygen in a reduced state and carbon monoxide in an oxidized state, and in an initial state, a portion of the second air intake agent is in an oxidized state and the other portion is in a reduced state.

[0009] According to some embodiments provided by the present disclosure, the air inhalation unit further includes: a second detection component, which is arranged at the rear stage of the second air inhaler and is used to detect the oxygen content and carbon monoxide content in the gas after the secondary inhalation.

[0010] According to some embodiments provided by the present disclosure, it also includes: a cooling unit connected to the rear stage of the air intake unit; an adsorption unit, including: an adsorber, provided with an adsorbent capable of adsorbing carbon dioxide and water, and connected to the rear stage of the cooling unit.

[0011] According to some embodiments provided by the present disclosure, it also includes: a heating unit, which is arranged in the reaction unit or the front stage of the reaction unit to heat the mixed gas of oxygen and exhaust gas; a heat recovery unit, which has a first heat recovery inlet, a first heat recovery outlet, a second heat recovery inlet and a second heat recovery outlet, the first heat recovery inlet is connected to the exhaust gas delivery outlet and the oxygen delivery outlet, the first heat recovery outlet is connected to the reaction inlet, and a first channel is formed between the first heat recovery inlet and the first heat recovery outlet, the second heat recovery inlet is connected to the rear stage of the air intake unit, the second heat recovery outlet is connected to the front stage of the cooling unit, and a second channel is formed between the second heat recovery inlet and the second heat recovery outlet, and the second channel and the first channel can cooperate with each other in heat exchange.

[0012] According to some embodiments provided by the present disclosure, the cooling unit includes: a water cooler having a first cooling inlet and a first cooling outlet, the first cooling inlet being connected to the rear stage of the air intake unit; a Freon refrigerator having a second cooling inlet and a second cooling outlet, the second cooling inlet being connected to the first cooling outlet, and the second cooling outlet being connected to the adsorption unit.

[0013] According to some embodiments provided in the present disclosure, the heating unit is arranged in the front stage of the reaction unit; the argon exhaust gas treatment device also includes: a temperature detection element, which is arranged between the heating unit and the reaction unit to detect whether the gas is heated to the temperature required for the reaction.

[0014] According to some embodiments provided by the present disclosure, there are multiple first aspirators, and the multiple first aspirators are independently connected in parallel.

[0015] According to some embodiments provided by the present disclosure, the capacity includes volume or mass; and / or the oxygen delivery unit includes: an oxygen delivery pipeline having the oxygen delivery outlet; and a control valve provided in the oxygen delivery pipeline.

[0016] Beneficial effects:

[0017] (1) The argon tail gas treatment device disclosed in the present invention can avoid the situation where the oxygen input condition feedback is delayed, which is conducive to timely adjustment of the oxygen input condition during the treatment process.

[0018] (2) In the argon tail gas treatment device disclosed in the present invention, the heat recovery unit can save the refrigeration burden and the heating burden, which is conducive to fully saving energy.

[0019] (3) In the argon tail gas treatment device disclosed in the present invention, the air intake unit includes a second adsorber, which can fully ensure the absorption effect of the air intake unit on excess oxygen and carbon monoxide.

[0020] (4) The argon tail gas treatment device disclosed in the present invention has a low cooling cost and a good cooling effect of the cooling unit.

[0021] (5) The argon tail gas treatment device disclosed in the present invention is cooled before absorbing water, which is beneficial to improving the absorption effect of water. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the layout of the argon tail gas treatment device of the first embodiment of the present disclosure.

[0023] Figure 2 It is a schematic diagram of the layout of the argon tail gas treatment device of the second embodiment of the present disclosure.

[0024] Reference numerals:

[0025] 10. tail gas delivery unit; 11. tail gas delivery pipeline; 1101. tail gas delivery outlet; 12. compressor; 13. delivery detection component; 131. delivery O2 content detector; 132. delivery CO content detector;

[0026] 20. reaction unit; 201. reaction inlet; 202. reaction outlet;

[0027] 30. oxygen delivery unit; 31. oxygen delivery pipeline; 3101. oxygen delivery outlet; 32. on-off valve;

[0028] 40. Inhalation unit; 41. First inhaler; 4101. First inhalation inlet; 4102. First inhalation outlet; 42. First detection assembly; 421. First O2 content detector; 422. First CO content detector;

[0029] 43. air valve assembly; 431. first air inlet valve; 432. first air outlet valve; 44. second air aspirator; 4401. second air inlet; 45. second detection assembly; 451. second O2 content detector; 452. second CO content detector;

[0030] 50. Capacity prediction unit; 51. Post-reaction detection component; 511. Post-reaction O2 content detector; 512. Post-reaction CO content detector; 52. Timer; 53. Exhaust gas flow detector; 54. Oxygen flow detector; 55. Processor;

[0031] 60. Oxygen supply control unit;

[0032] 70. Cooling unit; 71. Water cooler; 7101. First cooling inlet; 7102. First cooling outlet; 72. Freon refrigerator; 7201. Second cooling inlet; 7202. Second cooling outlet;

[0033] 80. adsorption unit; 81. adsorber; 82. post-adsorption detection component; 821. H2O content detector; 822. CO2 content detector;

[0034] 90. Heating unit;

[0035] 100, heat recovery unit; 1001, first heat recovery inlet; 1002, first heat recovery outlet; 1003, second heat recovery inlet; 1004, second heat recovery outlet;

[0036] 110. Temperature detection component. DETAILED DESCRIPTION

[0037] The following is an explanation of the embodiments of the present disclosure by specific examples, and those skilled in the art can easily understand other advantages and effects of the present disclosure from the information disclosed by the present disclosure. The present disclosure can also be implemented or applied through other different specific embodiments, and the details in the present disclosure can also be modified or changed in various ways according to different viewpoints and application modules without departing from the spirit of the present disclosure. It should be noted that the embodiments in the present disclosure and the features in the embodiments can be combined with each other without conflict.

[0038] The following is a detailed description of the embodiments of the present disclosure with reference to the accompanying drawings so that those skilled in the art can easily implement the present disclosure. The present disclosure can be embodied in many different forms and is not limited to the embodiments described herein.

[0039] In the representations of the present disclosure, the reference terms "one embodiment", "some embodiments", "examples", "specific examples", or "some examples" and the like mean that the specific features, structures, materials or characteristics represented in conjunction with the embodiment or example are included in at least one embodiment or example of the present disclosure. Moreover, the specific features, structures, materials or characteristics represented may be combined in any one or a group of embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine different embodiments or examples represented in the present disclosure and the features of different embodiments or examples, unless they are mutually contradictory.

[0040] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the representation of the present disclosure, "a group" means two or more, unless otherwise clearly and specifically defined.

[0041] In order to clearly describe the present disclosure, components not related to the description are omitted, and the same reference numerals are given to the same or similar components throughout the specification.

[0042] Throughout the specification, when a device is said to be "connected" to another device, this includes not only the case of "direct connection" but also the case of "indirect connection" by placing other elements therebetween. In addition, when a device is said to "include" a certain component, unless otherwise stated, it does not exclude other components, but means that other components may be included.

[0043] Although the terms first, second, etc. are used to represent various elements in this article in some examples, these elements should not be limited by these terms. These terms are only used to distinguish one element from another element. For example, the first interface and the second interface, etc. are represented. Moreover, as used in this article, the singular forms "one", "one" and "the" are intended to also include plural forms, unless there is an opposite indication in the context. It should be further understood that the terms "comprising" and "including" indicate that there are the described features, steps, operations, elements, modules, projects, kinds, and / or groups, but do not exclude the existence, occurrence or addition of one or a group of other features, steps, operations, elements, modules, projects, kinds, and / or groups. The terms "or" and "and / or" used herein are interpreted as inclusive, or mean any one or any combination. Therefore, "A, B or C" or "A, B and / or C" means "any of the following: A; B; C; A and B; A and C; B and C; A, B and C". Only when the combination of elements, functions, steps or operations is inherently mutually exclusive in some way, will there be an exception to this definition.

[0044] The technical terms used herein are only used to refer to specific embodiments and are not intended to limit the present disclosure. The singular form used herein also includes the plural form unless the sentence clearly indicates the contrary meaning. The meaning of "including" used in the specification is to specify specific characteristics, regions, integers, steps, operations, elements and / or components, and does not exclude the existence or addition of other characteristics, regions, integers, steps, operations, elements and / or components.

[0045] Although not defined differently, all terms, including technical and scientific terms used herein, have the same meaning as those generally understood by those skilled in the art to which the present disclosure belongs. Terms defined in commonly used dictionaries are additionally interpreted as having meanings consistent with relevant technical literature and the message of the present disclosure, and shall not be overly interpreted as ideal or very formal meanings unless defined.

[0046] In the argon tail gas treatment device of the related technology, during the treatment of argon tail gas by the reaction device, the amount of oxygen added may be excessive or insufficient, resulting in excessive oxygen or excessive carbon monoxide in the gas coming out of the reaction device, so an absorption device is set up at the back stage of the treatment device. The adsorbent filled in the absorption device can react with oxygen or carbon monoxide to absorb excess oxygen or excess carbon monoxide, and an oxygen analyzer is set up at the back stage of the absorption device to detect the oxygen content of the gas after absorption by the absorption device, and adjust the opening of the oxygen delivery valve that delivers oxygen to the treatment device according to the detection result, thereby adjusting the oxygen input amount. However, the above oxygen input amount is adjusted after the air inhalation device inhales, and the detection of the oxygen analyzer has a hysteresis, which is prone to errors, affecting the removal effect of oxygen or carbon monoxide.

[0047] In view of this, the present disclosure provides an argon tail gas processing device, which can avoid the situation of delayed feedback of oxygen input conditions, and is conducive to timely adjustment of the oxygen input conditions during the processing process.

[0048] Figure 1 Schematic diagram of the arrangement of the argon tail gas treatment device according to the first embodiment of the present disclosure. Figure 1 The argon tail gas processing device of the embodiment of the present disclosure includes a tail gas delivery unit 10, a reaction unit 20, an oxygen delivery unit 30, an air intake unit 40, a capacity prediction unit 50 and an oxygen supply control unit 60.

[0049] The exhaust gas delivery unit 10 has an exhaust gas delivery outlet 1101 for delivering the exhaust gas.

[0050] Optionally, the tail gas delivery unit 10 includes a tail gas delivery pipeline 11. The tail gas delivery pipeline 11 is used to deliver argon tail gas output after the preparation of single crystal silicon. The argon tail gas includes alkane gases such as oxygen, nitrogen, hydrogen, carbon monoxide, carbon dioxide and methane. The tail gas delivery pipeline 11 has the tail gas delivery outlet 1101, which is used to deliver the above-mentioned argon tail gas.

[0051] Optionally, the tail gas delivery unit 10 further includes a compressor 12. The tail gas delivery pipeline 11 is in communication with the compressor 12, so that the argon tail gas is pressurized by the compressor 12 and then output, thereby improving the delivery efficiency.

[0052] Optionally, the exhaust gas delivery unit 10 further includes a delivery detection component 13. The delivery detection component 13 is disposed in the exhaust gas delivery pipeline 11 and is used to detect the oxygen content and carbon monoxide content in the exhaust gas.

[0053] Optionally, the delivery detection component 13 includes a delivery O2 content detector 131 and a delivery CO content detector 132. The delivery O2 content detector 131 is arranged in the tail gas delivery pipeline 11, and is used to detect the oxygen content of the argon tail gas. The delivery CO content detector 132 is arranged in the tail gas delivery pipeline 11, and is used to detect the carbon monoxide content of the argon tail gas. Therefore, according to the detection results of the delivery detection component 13, the carbon monoxide content and the oxygen content in the argon tail gas can be determined.

[0054] The reaction unit 20 has a reaction inlet 201 and a reaction outlet 202. The reaction inlet 201 is connected to the tail gas delivery outlet 1101 and is used for the impurity gas in the tail gas to react with oxygen to form a reacted gas. The following reactions mainly occur in the reaction unit 20:

[0055] (1) CO + 1 / 2O = CO;

[0056] (2) H2+1 / 2O2=H2O;

[0057] (3)C n H 2m +(m / 2+n)O2=nCO2+mH2O;

[0058] Thus, the impurity gases CO, H2 and C n H 2m At the same time, since the oxygen content of the argon tail gas itself is usually low, the argon tail gas often needs to be supplemented with oxygen through the oxygen delivery unit 30.

[0059] The oxygen delivery unit 30 has an oxygen delivery outlet 3101 connected to the pipeline between the tail gas delivery unit 10 and the reaction unit 20, and the oxygen delivery unit 30 can be controlled to turn on / off the oxygen output of the oxygen delivery outlet 3101. Therefore, when the oxygen delivery unit 30 is controlled to turn on the oxygen output of the oxygen delivery outlet 3101, the oxygen delivery outlet 3101 can output oxygen to the tail gas delivery unit 10, thereby supplementing oxygen to the argon tail gas delivered by the tail gas delivery unit 10. When the oxygen delivery unit 30 is controlled to disconnect the oxygen output of the oxygen delivery outlet 3101, the oxygen delivery outlet 3101 no longer outputs oxygen to the tail gas delivery unit 10, thereby no longer supplementing oxygen.

[0060] Optionally, the oxygen delivery unit 30 includes an oxygen delivery pipeline 31 and an on-off valve 32. The oxygen delivery pipeline 31 has the oxygen delivery outlet 3101. The on-off valve 32 is arranged on the oxygen delivery pipeline 31, and can be controlled to open and close the oxygen output of the oxygen delivery outlet 3101. Thus, when the on-off valve 32 is controlled to open, the oxygen output of the oxygen delivery outlet 3101 of the oxygen delivery pipeline 31 is opened, and oxygen can be output. When the on-off valve 32 is controlled to close, the oxygen output of the oxygen delivery outlet 3101 of the oxygen delivery pipeline 31 is disconnected, and oxygen is no longer output.

[0061] The air absorption unit 40 is disposed at the rear stage of the reaction unit 20 and is used to absorb oxygen and carbon monoxide contained in the gas after the reaction.

[0062] The air intake unit 40 includes a first air intake device 41. The first air intake device 41 has a first air intake inlet 4101, which is connected to the reaction outlet 202 and is provided with a first air intake agent that absorbs oxygen in a reduced state and absorbs reducing impurity gas in the post-reaction gas in an oxidized state, and in an initial state, the first air intake agent is in an oxidized state or a reduced state.

[0063] Thus, when the first getter is in a reduced state, the oxygen doped in the reacted gas acts as an oxidant and can undergo an oxidation reaction with the first getter in a reduced state, thereby oxidizing the first getter in a reduced state to an oxidized state and allowing the oxygen to be absorbed. When the first getter is in an oxidized state, the impurity gas with reducing properties doped in the reacted gas acts as a reducing agent and can undergo a reduction reaction with the first getter in an oxidized state, thereby reducing the first getter in an oxidized state to a reduced state and allowing the impurity gas to be absorbed.

[0064] Specifically, the impurity gas with reducing properties may be carbon monoxide, and the first getter may be a metal getter, such as a copper material or a manganese material, etc. In the initial state, the first getter may be completely in a metal element state (reduced state) or the first getter may be completely in a metal oxide state (oxidized state). Thus, when the first getter is a metal element in a reduced state, the oxygen doped in the post-reaction gas, as an oxidant, will react with the metal element in the reduced state, thereby oxidizing the metal element in the reduced state to a metal oxide in an oxidized state. When the first getter is a metal oxide in an oxidized state, the carbon monoxide, as a reducing agent, can react with the metal oxide in the oxidized state to reduce the metal oxide to a metal element in a reduced state.

[0065] Figure 2 Schematic diagram of the arrangement of the argon tail gas treatment device according to the second embodiment of the present disclosure. Figure 2 , there are multiple first aspirators 41, and multiple first aspirators 41 are independently connected in parallel. Multiple first aspirators 41 can work independently and simultaneously. In this state, multiple first aspirators 41 can perform suction work without affecting each other. Multiple first aspirators 41 have large suction volume and high suction efficiency. Multiple first aspirators 41 can be used alternately and serve as backup for each other, so that when one first aspirator 41 fails to work, other first aspirators 41 can still work, thereby improving the working reliability of the suction unit 40.

[0066] The capacity prediction unit 50 is arranged in the front stage of the first air intake inlet 4101, and is used to predict the oxygen capacity and impurity gas capacity for feeding into the first air inlet 41 according to the device operation time in a single reduction process of the first air inlet from the oxidized state to the reduced state or a single oxidation process of the first air inlet from the reduced state to the oxidized state, the total inlet flow rate of the tail gas and oxygen, the oxygen content of the gas after the reaction, and the carbon monoxide content of the gas after the reaction. It can be understood that the oxygen capacity can be the volume of oxygen or the mass of oxygen. The impurity gas capacity can be the volume of impurity gas or the mass of impurity gas.

[0067] Optionally, the capacity prediction unit 50 includes a post-reaction detection component 51 , a timer 52 , an oxygen flow detector 54 , an exhaust gas flow detector 53 and a processor 55 .

[0068] The post-reaction detection component 51 is disposed between the reaction outlet 202 and the first air intake inlet 4101 , and is used to detect the oxygen content w1 and the carbon monoxide content w2 of the post-reaction gas before the post-reaction gas is input into the first air intake inlet 4101 .

[0069] Optionally, the post-reaction detection component 51 includes a post-reaction O2 content detector 511 and a post-reaction CO content detector 512. The post-reaction O2 content detector 511 is arranged between the reaction outlet 202 and the first air inlet 4101, and is used to detect the oxygen content w1 of the post-reaction gas before the post-reaction gas is input into the first air inlet 4101. The post-reaction CO content detector 512 is arranged between the reaction outlet 202 and the first air inlet 4101, and is used to detect the carbon monoxide content w2 of the post-reaction gas before the post-reaction gas is input into the first air inlet 4101.

[0070] The timer 52 is used to calculate the device operation time T in a single reduction process in which the first getter is converted from an oxidized state to a reduced state and in a single oxidation process in which the first getter is converted from a reduced state to an oxidized state, where T=t-t0, t0 is the time 0 at which the timing is started, and the time t0 is the initial time in the initial state, the time when the oxygen delivery unit 30 starts to be connected, or the time when the oxygen delivery unit 30 starts to be disconnected. In other words, the timer 52 is configured to start timing in the initial state, restart timing in response to the connection of the oxygen delivery unit 30, and restart timing in response to the disconnection of the oxygen delivery unit 30. Specifically, the timer 52 starts timing in the initial state, restarts timing in response to the opening of the on-off valve 32, and restarts timing in response to the closing of the on-off valve 32, and t is any current time in a single reduction process or a single oxidation process.

[0071] The oxygen flow detector 54 is provided in the oxygen delivery unit 30, and is used to detect the oxygen flow rate Q1. The tail gas flow detector 53 is provided in the tail gas delivery unit 10, and is used to detect the tail gas flow rate Q2. The processor 55 predicts the oxygen capacity C1 and the impurity gas capacity C2 supplied to the first aspirator 41 based on the detection results of the post-reaction detection component 51, the timer 52, the tail gas flow detector 53 and the oxygen flow detector 54.

[0072] Specifically, when the processor 55 processes, the processing formula may be as follows:

[0073] ;

[0074] ;

[0075] Therefore, according to the above processing formula, the processor 55 can process and predict the oxygen capacity C1 and the impurity gas capacity C2 to be supplied to the first aspirator 41 .

[0076] The oxygen supply control unit 60 is connected to the capacity prediction unit 50 and the oxygen delivery unit 30. In response to the oxygen capacity satisfying the oxygen saturation condition that makes the first getter saturated / close to saturation, the oxygen supply control unit 60 controls the oxygen delivery unit 30 to be disconnected, for example, controls the on-off valve 32 to be closed. In response to the impurity gas capacity satisfying the impurity gas saturation condition that makes the first getter saturated / close to saturation, the oxygen supply control unit 60 controls the oxygen delivery unit 30 to be turned on, for example, controls the on-off valve 32 to be opened.

[0077] Optionally, the timer 52 is connected to the oxygen supply control unit 60 so as to be controlled to be reset to zero to restart timing when the oxygen delivery unit 30 is disconnected / connected.

[0078] Since the capacity of the first getter in the first getter 41 is certain, the capacity of oxygen or carbon monoxide that can be absorbed by the first getter in the reduced state or the oxidized state is also certain, and the first getter in the reduced state or the oxidized state absorbs oxygen or carbon monoxide with an oxygen saturation amount and a carbon monoxide saturation amount. Therefore, through the above-mentioned setting, oxygen is used as the oxidant of the first getter in the reduced state, and the impurity gas with reducing properties is used as the reductant of the first getter in the oxidized state, so that the first getter can alternately perform an oxidation process and a reduction process, and the first getter can alternately adsorb the alternating excess oxygen and carbon monoxide in the post-reaction gas in the process. For example, taking the first getter in the reduced state in the initial state and the impurity gas being carbon monoxide as an example, the processing process of the argon tail gas treatment device is as follows:

[0079] In the initial state, when the first getter is in a reduced state, the oxygen delivery unit 30 is in a connected state. Thus, when the mixed gas of exhaust gas and oxygen is delivered to the reaction unit 20, since the mixed gas has a high oxygen content, there is excess oxygen when the reaction occurs in the reaction unit 20. When the excess oxygen is output from the reaction unit 20 after the reaction and enters the first getter 41, the first getter in a reduced state in the first getter 41 reacts with the oxygen and absorbs the excess oxygen.

[0080] When the capacity prediction unit 50 predicts that the oxygen capacity introduced into the first aspirator 41 satisfies the oxygen saturation condition for saturating / approaching saturation of the first aspirator, that is, when it is predicted that the oxygen capacity absorbed by the first aspirator in the reduced state reaches or approaches the oxygen saturation of the first aspirator, the oxygen supply control unit 60 controls the oxygen delivery unit 30 to be disconnected, thereby making it difficult for the oxygen delivery unit 30 to add oxygen to the argon tail gas. At this time, due to the oxidation of the oxygen, the first aspirator is in / approaching a completely oxidized state.

[0081] After the oxygen delivery unit 30 is disconnected, when the exhaust gas is delivered to the reaction unit 20, since the oxygen content in the exhaust gas is relatively low, the oxygen content during the reaction in the reaction unit 20 is relatively low. Therefore, when the reaction occurs in the reaction unit 20, excess carbon monoxide is generated. When the excess carbon monoxide enters the first aspirator 41, it reacts with the first aspirator in an oxidized state, thereby gradually reducing the first aspirator in an oxidized state.

[0082] When the capacity prediction unit 50 predicts that the carbon monoxide capacity introduced into the first getter 41 satisfies the carbon monoxide saturation condition for saturating / approaching saturation of the first getter, that is, it is predicted that the carbon monoxide capacity absorbed by the first getter in the oxidized state reaches or approaches the carbon monoxide saturation of the first getter, and the first getter in the oxidized state is about to be regenerated into a reduced state, the oxygen supply control unit 60 controls the oxygen delivery unit 30 to be reconnected, so that the device is restored to the state where the first getter is in the reduced state and the oxygen delivery unit 30 is connected, and then the aforementioned excess oxygen treatment process is repeated. Thus, when the device is running, the first getter can alternately perform oxidation and reduction processes, and alternately adsorb alternating excess oxygen and carbon monoxide in the reacted gas. In the above process, since the capacity prediction unit 50 is arranged in the front stage of the first air intake inlet 4101, the capacity prediction unit 50 can adjust the oxygen input condition of the oxygen delivery unit 30 when the post-reaction gas has not yet entered the first air inhaler 41, thereby avoiding the situation of delayed feedback on the oxygen input condition, and timely adjusting the oxygen input condition during the argon exhaust gas treatment process, which is beneficial to the effective removal of oxygen and carbon monoxide in the gas.

[0083] Optionally, see Figure 2 The air inhalation unit 40 further includes a first detection component 42. The first detection component 42 is disposed at the rear stage of the first air inhaler 41, and is used to detect the oxygen content and carbon monoxide content in the gas after one inhalation. Optionally, the first detection component 42 can be multiple, and the multiple first detection components 42 are disposed one-to-one corresponding to the multiple first air inhalers 41. Specifically, refer to Figure 1 The first detection component 42 includes a first O2 content detector 421 and a first CO content detector 422. The first O2 content detector 421 is arranged at the rear stage of the first aspirator 41, and is used to detect the oxygen content of the gas after one inhalation. The first CO content detector 422 is arranged at the rear stage of the first aspirator 41, and is used to detect the carbon monoxide content of the gas after one inhalation.

[0084] Therefore, according to the detection result of the first detection component 42, it can be judged whether the capacity prediction unit 50 and the oxygen supply control unit 60 replenish and disconnect oxygen in time. If the capacity prediction unit 50 and the oxygen supply control unit 60 replenish and disconnect oxygen in time, the oxygen content and the carbon monoxide content should be lower than the first threshold. On the contrary, if the capacity prediction unit 50 and the oxygen supply control unit 60 replenish and disconnect oxygen lagging, the oxygen content and the carbon monoxide content will often be higher than the first threshold, and the device needs to be repaired and adjusted.

[0085] Optionally, see Figure 2, the air intake unit 40 also includes an air valve assembly 43. The air valve assembly 43 includes a first air inlet valve 431 and a first air outlet valve 432. The first air inlet valve 431 is arranged at the front stage of the first air inhaler 41, and is used to control whether the gas enters the first air inhaler 41. The first air outlet valve 432 is arranged at the rear stage of the first air inhaler 41, and is used to control whether the gas can be output from the rear of the first air inhaler 41. Therefore, through the first air inlet valve 431 and the first air outlet valve 432, it is convenient to individually adjust the air intake and air outlet conditions of each of the first air inhalers 41. Optionally, the air valve assembly 43 can be multiple, and the multiple air valve assemblies 43 are arranged one-to-one corresponding to the multiple first air inhalers 41.

[0086] Optionally, see Figure 2 , the air intake unit 40 further includes a second air intake device 44. The second air intake device 44 has a second air intake inlet 4401. The second air intake inlet 4401 is connected to the first air intake outlet 4102 of the first air intake device 41, and is provided with a second air intake agent that absorbs oxygen in a reduced state and carbon monoxide in an oxidized state, and in an initial state, a part of the second air intake agent is in an oxidized state, and the other part is in a reduced state. Specifically, the weight ratio of the second air intake agent in the reduced state to the second air intake agent in the oxidized state can be 1:1.

[0087] Specifically, the second getter can be a metal getter, such as a copper material or a manganese material. In the initial state, a portion of the second getter is in a metal element state, and the other portion is in a metal oxide state. Specifically, the weight ratio of the metal element to the metal oxide can be 1:1.

[0088] Therefore, starting from the initial state, if the gas outputted by the first aspirator 41 still contains oxygen, the metal element in the reduced state will absorb the oxygen that has not been fully absorbed by the first aspirator 41. If the gas outputted by the first aspirator 41 still contains the impurity gas with reducing properties, the metal oxide in the oxidized state will absorb the impurity gas that has not been fully absorbed by the first aspirator 41. Therefore, even if the first aspirator 41 fails to fully absorb excess oxygen or carbon monoxide, the excess oxygen or carbon monoxide in the reacted gas can be fully absorbed after the second aspirator 44 absorbs it, thereby ensuring the absorption effect of the aspirator unit 40 on the carbon monoxide and oxygen.

[0089] Optionally, the air inhalation unit 40 further includes a second detection component 45. The second detection component 45 is disposed at the rear stage of the second air inhaler 44, and is used to detect the oxygen content and carbon monoxide content in the gas after the secondary inhalation.

[0090] Optionally, the second detection component 45 includes a second O2 content detector 451 and a second CO content detector 452. The second O2 content detector 451 is arranged at the rear stage of the second aspirator 44, and is used to detect the oxygen content of the gas after the secondary inhalation. The second CO content detector 452 is arranged at the rear stage of the second aspirator 44, and is used to detect the carbon monoxide content of the gas after the secondary inhalation. Thus, according to the detection result of the second detection component 45, the overall inhalation effect of the inhalation unit 40 on carbon monoxide and oxygen can be judged, and the inhalation effect of the second aspirator 44 on carbon monoxide and oxygen can be determined in combination with the detection result of the first detection component 42. For example, if the detection result of the first detection component 42 meets the requirements, and the detection result of the second detection component 45 also meets the requirements of being lower than the second threshold, it means that the second aspirator 44 is also operating normally. On the contrary, if the detection result of the first detection component 42 meets the requirements, and the detection result of the second detection component 45 is higher than the second threshold, it means that there is a problem with the second aspirator 44 and it needs to be repaired and adjusted.

[0091] Optionally, see Figure 2 , the argon tail gas treatment device also includes a cooling unit 70 and an adsorption unit 80. The cooling unit 70 is connected to the rear stage of the air intake unit 40. As a result, the air-inhaled gas in which carbon monoxide and oxygen are absorbed can enter the cooling unit 70 from the air intake unit 40, and is thereby cooled by the cooling unit 70, so that the vapor-state water vapor in the air-inhaled gas is condensed and condensed, thereby facilitating the subsequent absorption and treatment of moisture. The adsorption unit 80 includes an adsorber 81, which is connected to the rear stage of the cooling unit 70, and an adsorbent for adsorbing carbon dioxide and water is provided in the adsorber 81. As a result, the cooled gas can enter the adsorption unit 80 from the cooling unit 70, and is thereby adsorbed by the adsorbent in the adsorption unit 80, so that the moisture and carbon dioxide in the cooled gas are fully absorbed.

[0092] Optionally, the cooling unit 70 includes a water cooler 71 and a Freon refrigerator 72. The water cooler 71 has a first cooling inlet 7101 and a first cooling outlet 7102, and the first cooling inlet 7101 is connected to the rear stage of the air suction unit 40. The Freon refrigerator 72 has a second cooling inlet 7201 and a second cooling outlet 7202. The second cooling inlet 7201 is connected to the first cooling outlet 7102. The second cooling outlet 7202 is connected to the adsorption unit 80.

[0093] The water cooler 71 can utilize cooling water to exchange heat with gas to cool the gas, and the Freon refrigerator 72 can utilize Freon to exchange heat with gas to cool the gas, and since the temperature of liquid Freon can be lower than that of liquid water, the lowest cooling temperature of the Freon refrigerator 72 can be lower than that of liquid water, but the cost of liquid water is lower than that of the Freon. The present disclosure cools the gas by first utilizing the water cooler 71 and then utilizing the Freon refrigerator 72, so the cooling cost is low and the cooling effect on the gas can be guaranteed.

[0094] Optionally, there are multiple adsorbers 81, and the multiple adsorbers 81 are independently connected in parallel. Thus, the multiple adsorbers 81 can work independently and simultaneously. In this state, the multiple adsorbers 81 can adsorb water and carbon dioxide without affecting each other. The multiple adsorbers 81 have a large absorption capacity of water and carbon dioxide and a high absorption efficiency. The multiple adsorbers 81 can be used alternately and standby for each other, so that when one adsorber 81 fails to work, the other adsorbers 81 can still work, thereby improving the working reliability of the adsorption unit 80.

[0095] Optionally, the adsorption unit 80 further includes a post-adsorption detection component 82. The post-adsorption detection component 82 is disposed at the rear stage of the adsorption unit 80 and is used to detect the water content and carbon dioxide content after adsorption.

[0096] Optionally, the post-adsorption detection component 82 includes an H2O content detector 821 and a CO2 content detector 822. The H2O content detector 821 is arranged at the rear stage of the adsorption unit 80, and is used to detect the H2O content in the gas after adsorption. The CO2 content detector 822 is arranged at the rear stage of the adsorption unit 80, and is used to detect the CO2 content in the gas after adsorption. Therefore, according to the detection result of the post-adsorption detection component 82, the adsorption effect of the adsorption unit 80 on water and carbon dioxide can be judged. For example, if the water content and the carbon dioxide content after adsorption are both lower than the adsorption setting threshold, it means that the adsorption effect of the adsorption unit 80 is good and meets the requirements. On the contrary, if the water content and the carbon dioxide content after adsorption are both higher than the adsorption setting threshold, it means that the adsorption effect of the adsorption unit 80 is poor, does not meet the requirements, and needs to be repaired and adjusted.

[0097] Optionally, see Figure 2 The argon tail gas treatment device further includes a heating unit 90 and a heat recovery unit 100. The heating unit 90, such as a heater, is disposed in the reaction unit 20 or in the front stage of the reaction unit 20 to heat the mixed gas of oxygen and tail gas, so that in the reaction unit 20, the oxygen and the carbon monoxide and hydrocarbon gas in the tail gas can react smoothly with the oxygen under the action of high temperature and catalyst.

[0098] The reheat unit 100 has a first reheat inlet 1001, a first reheat outlet 1002, a second reheat inlet 1003 and a second reheat outlet 1004. The first reheat inlet 1001 is connected to the tail gas delivery outlet 1101 and the oxygen delivery outlet 3101, the first reheat outlet 1002 is connected to the reaction inlet 201, and a first channel is formed between the first reheat inlet 1001 and the first reheat outlet 1002. Therefore, after the tail gas delivery outlet 1101 and the mixed gas of tail gas and oxygen output from the tail gas delivery outlet 1101 enter the first reheat inlet 1001, it will enter the first reheat outlet 1002 through the first channel in the reheat unit 100, and enter the reaction unit 20 and the air intake unit 40 after passing through the first reheat outlet 1002, so as to provide the reaction of the reaction unit 20 and the air intake of the air intake unit 40.

[0099] The second heat regeneration inlet 1003 is connected to the rear stage of the air intake unit 40, the second heat regeneration outlet 1004 is connected to the front stage of the cooling unit 70, and a second channel is formed between the second heat regeneration inlet 1003 and the second heat regeneration outlet 1004, and the second channel and the first channel can cooperate with each other in heat exchange.

[0100] Thus, after entering the second heat recovery inlet 1003, the high-temperature gas output from the air intake unit 40 will enter the second heat recovery outlet 1004 through the second channel in the heat recovery unit 100, and enter the cooling unit 70 after passing through the second heat recovery outlet 1004 for cooling by the cooling unit 70. In this process, due to the mutual heat exchange between the first channel and the second channel, the gas delivered to the reaction unit 20 can be preheated before being heated to reduce the heating burden of the heating unit 90. And the gas delivered to the cooling unit 70 can be precooled before being delivered to the cooling unit 70 to reduce the refrigeration burden of the cooling unit 70. Thus, the heat recovery unit 100 can fully reduce the energy demand during the operation of the device and save energy by reducing the heating burden of the gas before the reaction and reducing the cooling burden of the gas before the water absorption.

[0101] Optionally, the heating unit 90 is arranged in the front stage of the reaction unit 20. The argon tail gas treatment device also includes a temperature detection component 110. The temperature detection component 110, such as a temperature sensor, is arranged between the heating unit 90 and the reaction unit 20 to detect the temperature of the heated gas. Thus, the temperature detection component 110 can determine whether the gas is heated to the temperature required for the reaction and whether it is heated in place, so as to facilitate the adjustment of the heating condition. For example, according to whether the temperature detected by the temperature detection component 110 is higher or lower than the temperature required for the reaction, the heating power of the heating unit 90 is correspondingly lowered or increased to ensure that the heating unit 90 heats the gas to the temperature required for the reaction.

[0102] The above embodiments are merely illustrative of the principles and effects of the present disclosure, and are not intended to limit the present disclosure. Anyone familiar with the technology may modify or change the above embodiments without violating the spirit and scope of the present disclosure. Therefore, all equivalent modifications or changes made by those with ordinary knowledge in the technical field without departing from the spirit and technical ideas disclosed in the present disclosure shall still be covered by the protection scope of the present disclosure.

Claims

1. Argon tail gas treatment device, characterized in that: include: An exhaust gas delivery unit having an exhaust gas delivery outlet for delivering exhaust gas; A reaction unit having a reaction inlet and a reaction outlet, wherein the reaction inlet is connected to the tail gas delivery outlet and is used for the impurity gas in the tail gas to react with oxygen to form a reacted gas; An oxygen delivery unit having an oxygen delivery outlet connected to the pipeline between the tail gas delivery unit and the reaction unit, and the oxygen delivery unit can be controlled to turn on / off the oxygen output at the oxygen delivery outlet; The air intake unit comprises a first air intake device having a first air intake inlet, the first air intake inlet is connected to the reaction outlet, and is provided with a first air intake agent which absorbs oxygen in a reduced state and absorbs reducing impurity gas in the gas after the reaction in an oxidized state, and in an initial state, the first air intake agent is in an oxidized state or a reduced state; a capacity prediction unit, provided at the front stage of the first air intake inlet, for predicting the oxygen capacity and impurity gas capacity supplied to the first air intake device according to the device operation time in a single reduction process in which the first air intake agent is converted from an oxidized state to a reduced state or a single oxidation process in which the first air intake agent is converted from a reduced state to an oxidized state, the total inflow flow rate of tail gas and oxygen, the oxygen content in the reacted gas, and the carbon monoxide content in the reacted gas; and The oxygen supply control unit is connected to the capacity prediction unit and the oxygen delivery unit, and controls the oxygen delivery unit to be disconnected in response to the oxygen capacity satisfying the oxygen saturation condition for saturating the first getter; and controls the oxygen delivery unit to be turned on in response to the impurity gas capacity satisfying the impurity gas saturation condition for saturating the first getter.

2. The argon tail gas treatment device according to claim 1, characterized in that: The capacity prediction unit comprises: A post-reaction detection component, disposed between the reaction outlet and the first air intake inlet, for detecting the oxygen content and carbon monoxide content of the post-reaction gas; a timer for counting the device operation time in a single reduction process in which the first getter is converted from an oxidized state to a reduced state and a single oxidation process in which the first getter is converted from a reduced state to an oxidized state, and the timer is configured to start timing in the initial state, restart timing in response to connection of the oxygen delivery unit, and restart timing in response to disconnection of the oxygen delivery unit; An oxygen flow detector, provided in the oxygen delivery unit, for detecting the oxygen flow rate; An exhaust gas flow detector, provided in the exhaust gas delivery unit, for detecting the exhaust gas flow rate; and A processor is connected to the post-reaction detection component, the timer, the exhaust gas flow detector and the oxygen flow detector to predict the oxygen capacity and impurity gas capacity for passing into the first aspirator based on the detection results of the post-reaction detection component, the timer, the exhaust gas flow detector and the oxygen flow detector.

3. The argon tail gas treatment device according to claim 1, characterized in that: The air intake unit also includes: a second air intake device having a second air intake inlet, the second air intake inlet is connected to the first air intake outlet of the first air intake device, and is provided with a second air intake agent that absorbs oxygen in a reduced state and absorbs carbon monoxide in an oxidized state, and in an initial state, a part of the second air intake agent is in an oxidized state, and the other part is in a reduced state.

4. The argon tail gas treatment device according to claim 3, characterized in that: The air inhalation unit further comprises: a second detection component, which is arranged at the rear stage of the second air inhaler and is used to detect the oxygen content and carbon monoxide content in the gas after the secondary air inhalation.

5. The argon tail gas treatment device according to claim 1, characterized in that: Also includes: A cooling unit connected to the rear stage of the air intake unit; The adsorption unit comprises an adsorber provided with an adsorbent capable of adsorbing carbon dioxide and water and connected to the rear stage of the cooling unit.

6. The argon tail gas treatment device according to claim 5, characterized in that: Also includes: A heating unit, provided in the reaction unit or in the front stage of the reaction unit, to heat the mixed gas of oxygen and tail gas; The heat regeneration unit has a first heat regeneration inlet, a first heat regeneration outlet, a second heat regeneration inlet and a second heat regeneration outlet, the first heat regeneration inlet is connected to the exhaust gas delivery outlet and the oxygen delivery outlet, the first heat regeneration outlet is connected to the reaction inlet, and a first channel is formed between the first heat regeneration inlet and the first heat regeneration outlet, the second heat regeneration inlet is connected to the rear stage of the air intake unit, the second heat regeneration outlet is connected to the front stage of the cooling unit, and a second channel is formed between the second heat regeneration inlet and the second heat regeneration outlet, and the second channel and the first channel can cooperate with each other in heat exchange.

7. The argon tail gas treatment device according to claim 6, characterized in that: The cooling unit comprises: A water cooler having a first cooling inlet and a first cooling outlet, wherein the first cooling inlet is connected to the rear stage of the air intake unit; The Freon refrigerator has a second cooling inlet and a second cooling outlet, wherein the second cooling inlet is communicated with the first cooling outlet, and the second cooling outlet is communicated with the adsorption unit.

8. The argon tail gas treatment device according to claim 6, characterized in that: The heating unit is arranged in the front stage of the reaction unit; The argon tail gas processing device further comprises: a temperature detection element, which is arranged between the heating unit and the reaction unit to detect whether the gas is heated to a temperature required for the reaction.

9. The argon tail gas treatment device according to claim 1, characterized in that: There are a plurality of the first aspirators, and the plurality of the first aspirators are independently connected in parallel.

10. The argon tail gas treatment device according to claim 1, characterized in that: The capacity includes volume or mass; and / or The oxygen delivery unit comprises: an oxygen delivery pipeline having the oxygen delivery outlet; and a control valve arranged on the oxygen delivery pipeline.

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