Profiler and probe installation tooling

Abstract

The present invention belongs to the technical field of contour testing equipment, and discloses a contour meter and a probe installation tool. The contour meter includes a mounting seat, a base, a lens, a probe assembly and a driving assembly, the base is rotatably connected to the mounting seat, the lens is arranged on the mounting seat in a vertical direction, the probe assembly is arranged on the base, the probe assembly includes a probe, the probe includes a probe body, the probe body is arranged in a vertical direction, and the axis of the probe body coincides with the axis of the lens, the driving assembly is arranged on the mounting seat, the output end of the driving assembly is connected to the base, the driving assembly is used to drive the base to drive the probe body to flip, so that when the start and end positions of the test are observed through the lens, the probe body is driven to flip through the driving assembly to avoid the probe blocking the observation field of the lens, and at the same time ensure that the lower needle position of the probe is consistent with the center point of the lens, thereby eliminating the horizontal deviation, simplifying the structure of the contour meter, and reducing the cost of the contour meter.

Description

Technical Field

[0001] The present invention relates to the technical field of contour detection equipment, and in particular to a contour meter and a probe installation tool. Background Art

[0002] The measurement principle of the profilometer (step gauge) is to press the probe on the wafer surface and move it in a certain direction. The probe swings up and down along the steps on the wafer surface, driving the aluminum plate at the end of the probe to swing. The aluminum plate is located between two parallel capacitor plates. The change in the position of the aluminum plate causes the change in the capacitance value. The shape of the step is depicted by collecting the change in capacitance.

[0003] In order to observe the starting and ending positions of the test, a top-down lens is usually installed above the probe for observation. However, the probe located directly below the top-down lens will block the lens's line of sight. Currently, the profilometers on the market usually install the probe outside the lens's line of sight, which results in a horizontal physical deviation between the center point of the lens observation and the needle tip's position. The horizontal deviation is then recorded by software, and the linear motor is used to move the probe before the test to compensate for the horizontal deviation. There are at least three disadvantages in the existing solution: First, after replacing or disassembling the probe, the horizontal deviation will change, and the compensation value of the linear motor needs to be recalibrated; second, the linear motor will accumulate motion deviations during long-term motion, resulting in a decrease in positioning accuracy; third, the displacement accuracy of the motor itself is very high, which increases costs.

[0004] Therefore, there is an urgent need for a profilometer and a probe installation tool to solve the problems in the prior art. Summary of the invention

[0005] The purpose of the present invention is to provide a profilometer, in which the axis of the probe body coincides with the axis of the lens, and a driving assembly is used to flip the probe body to avoid the probe blocking the observation field of the lens, while ensuring that the needle position of the probe is consistent with the center point of the lens, thereby eliminating horizontal deviation, simplifying the structure of the profilometer, and reducing the cost of the profilometer.

[0006] To achieve this object, the present invention adopts the following technical solutions:

[0007] Profilometer, including:

[0008] Mounting seat;

[0009] A base, rotatably connected to the mounting seat;

[0010] A lens is arranged on the mounting seat in a vertical direction;

[0011] A probe assembly is arranged on the base, the probe assembly comprises a probe, the probe comprises a probe body, the probe body is arranged in a vertical direction, and the axis of the probe body coincides with the axis of the lens;

[0012] A driving component is arranged on the mounting seat, an output end of the driving component is connected to the base, and the driving component is used to drive the base to drive the probe body to flip.

[0013] Optionally, the mounting base includes a base plate and a support plate, the support plate is vertically arranged on the base plate, the lens is arranged on the support plate along the vertical direction, one end of the base is rotatably connected to the support plate, and the other end can overlap the base plate.

[0014] Optionally, a lap platform and an escape space are provided on a side of the base facing the bottom plate, and the lap platform can be lapped on the bottom plate.

[0015] Optionally, the driving assembly comprises:

[0016] A driving motor is arranged on the mounting seat;

[0017] A fixing rod, arranged on the base;

[0018] A connecting wire has one end connected to the fixing rod and the other end capable of being wound around the output shaft of the driving motor.

[0019] Optionally, the probe assembly further comprises:

[0020] A pivot seat, wherein the pivot seat is rotatably disposed on the base, and the probe further comprises a probe connecting rod, wherein one end of the probe connecting rod is connected to the pivot seat, and the other end is vertically connected to the probe body;

[0021] A cross spring bearing, wherein the outer ring of the cross spring bearing is connected to the pivot seat, and the inner ring of the cross spring bearing is connected to the base;

[0022] A metal plate is disposed on the pivot seat, and the metal plate moves synchronously with the probe body;

[0023] The sensor is arranged on the base, and the sensor is electrically connected to the metal plate.

[0024] Optionally, the sensor is a capacitive sensor, which includes a first capacitor plate and a second capacitor plate, the first capacitor plate and the second capacitor plate are arranged parallel to each other on the base, and at least part of the metal plate is located between the first capacitor plate and the second capacitor plate.

[0025] Optionally, the profilometer further includes a force applying component, and the force applying component includes:

[0026] An electromagnetic coil is arranged on the base;

[0027] One end of the crescent plate is electrically connected to the electromagnetic coil, and the other end is connected to the pivot seat.

[0028] The purpose of the present invention is to provide a probe installation tool, which no longer needs to recalibrate the horizontal deviation between the probe and the lens when replacing the probe, can significantly reduce the calibration and debugging time, and ensure the repeated installation accuracy of the probe.

[0029] To achieve this object, the present invention adopts the following technical solutions:

[0030] A probe installation tool is applied to the above-mentioned profilometer, and the probe installation tool includes a positioning sleeve, which is sleeved on the lens. The positioning sleeve includes a positioning cavity, the axis of the positioning cavity coincides with the axis of the lens, and the diameter of the positioning cavity is the same as the diameter of the probe body, and the side wall of the positioning cavity is provided with an opening for the probe body to enter.

[0031] Optionally, the positioning sleeve also includes an installation section, a transition section and a positioning section, the installation section is sleeved on the lens and is detachably connected to the lens, one end of the transition section is connected to the installation section, and the other end is connected to the positioning section, and the positioning cavity and the opening are provided on the positioning section.

[0032] Optionally, the mounting section is threadedly connected to the lens; or, the mounting section is snap-fitted to the lens.

[0033] Beneficial effects:

[0034] The profiler provided by the present invention comprises a mounting seat, a base, a lens, a probe assembly and a driving assembly. The base is rotatably connected to the mounting seat, the lens is arranged on the mounting seat in a vertical direction, the probe assembly is arranged on the base, the probe assembly comprises a probe, and the probe comprises a probe body. The probe body is arranged in a vertical direction, and the axis of the probe body coincides with the axis of the lens. The driving assembly is arranged on the mounting seat, and the output end of the driving assembly is connected to the base. The driving assembly is used to drive the base to drive the probe body to flip, so that when the start and end positions of the test are observed through the lens, the probe body is driven to flip through the driving assembly, so that the probe body leaves the observation field of the lens, thereby avoiding the problem of the probe blocking the lens; and during the test, the axis of the probe body coincides with the axis of the observation lens, ensuring that the center point of the lens observation is consistent with the probe needle position, eliminating the horizontal physical deviation caused by the probe and the lens not being on the same straight line in the prior art, thereby eliminating the need for horizontal deviation compensation through a linear motor, eliminating the need for high displacement accuracy of the linear motor, simplifying the structure of the profiler, thereby reducing the cost of the profiler and improving the economic benefit.

[0035] The probe installation tool provided by the present invention is applied to the above-mentioned profilometer. The probe installation tool includes a positioning sleeve, which is sleeved on the lens. The positioning sleeve includes a positioning cavity, the axis of the positioning cavity coincides with the axis of the lens, and the diameter of the positioning cavity is the same as the diameter of the probe body. The side wall of the positioning cavity is provided with an opening for the probe body to enter. When replacing the probe, it is only necessary to place the probe body into the positioning cavity to ensure that the axis of the probe body coincides with the axis of the lens. There is no need to recalibrate the horizontal deviation between the probe and the lens, which can significantly reduce the calibration and debugging time and ensure the repeated installation accuracy of the probe. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 is a schematic structural diagram of a profilometer provided in Embodiment 1 of the present invention at a viewing angle;

[0037] Figure 2 is a schematic structural diagram of the profilometer provided in the first embodiment of the present invention at another viewing angle;

[0038] Figure 3 It is a structural schematic diagram of the probe installation tool provided in the second embodiment of the present invention.

[0039] In the figure:

[0040] 100, mounting seat; 110, bottom plate; 120, support plate; 121, rotating shaft;

[0041] 200, base; 210, bridging platform; 220, avoidance space;

[0042] 300, lens;

[0043] 400, probe assembly; 410, probe; 411, probe body; 412, probe connecting rod; 420, pivot seat; 430, cross spring bearing; 440, metal plate; 450, sensor; 451, first capacitor plate; 452, second capacitor plate;

[0044] 500, driving assembly; 510, driving motor; 520, fixing rod; 530, connecting wire;

[0045] 600, force applying component; 610, electromagnetic coil; 620, crescent plate;

[0046] 700, positioning sleeve; 710, mounting section; 720, transition section; 730, positioning section; 731, positioning cavity; 732, opening. DETAILED DESCRIPTION

[0047] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0048] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0049] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0050] In the description of this embodiment, the terms "upper", "lower", "left", "right" and other directions or positional relationships are based on the directions or positional relationships shown in the drawings, and are only for the convenience of description and simplification of operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operate in a specific direction, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0051] Embodiment 1

[0052] This embodiment provides a profilometer such as Figure 1-Figure 2As shown, it includes a mounting seat 100, a base 200, a lens 300, a probe assembly 400 and a driving assembly 500. The base 200 is rotatably connected to the mounting seat 100. The lens 300 is arranged on the mounting seat 100 along the vertical direction. The probe assembly 400 is arranged on the base 200. The probe assembly 400 includes a probe 410. The probe 410 includes a probe body 411. The probe body 411 is arranged along the vertical direction, and the axis of the probe body 411 coincides with the axis of the lens 300. The driving assembly 500 is arranged on the mounting seat 100. The output end of the driving assembly 500 is connected to the base 200. The driving assembly 500 is used to drive the base 200 to drive the probe body 411 to flip. When observing the starting and ending positions of the test, the driving assembly 500 drives the probe body 411 to flip so that the probe body 411 leaves the observation field of the lens 300, thereby avoiding the problem of the probe 410 blocking the lens 300; and, during the test, the axis of the probe body 411 coincides with the axis of the observation lens 300, thereby ensuring that the center point of the lens 300 observation is consistent with the needle position of the probe 410, eliminating the horizontal physical deviation caused by the probe 410 and the lens 300 not being on the same straight line in the prior art, thereby eliminating the need for horizontal deviation compensation through a linear motor, eliminating the need for high displacement accuracy of the linear motor, simplifying the structure of the profilometer, thereby reducing the cost of the profilometer and improving economic benefits.

[0053] Optionally, the mounting base 100 includes a base plate 110 and a support plate 120, the support plate 120 is vertically arranged on the base plate 110, the lens 300 is arranged on the support plate 120 in a vertical direction, one end of the base 200 is rotatably connected to the support plate 120, and the other end can be overlapped on the base plate 110, so that the probe assembly 400 can be easily flipped out of the observation field of the lens 300 when not working. When the contour of the product needs to be measured, the probe assembly 400 can be quickly reset to the working position to ensure that the probe body 411 and the lens 300 maintain consistent axes to ensure accuracy during the measurement process.

[0054] Optionally, the support plate 120 is provided with a rotating shaft 121 , and a mounting hole is provided on a side of the base 200 facing the support plate 120 , and the rotating shaft 121 is inserted into the mounting hole, so that the base 200 can rotate around the rotating shaft 121 .

[0055] Optionally, a overlap platform 210 and an avoidance space 220 are provided on the side of the base 200 facing the bottom plate 110. The overlap platform 210 can be overlapped on the bottom plate 110. The avoidance space 220 can enable the base 200 to rotate relative to the bottom plate 110 to avoid interference between the base 200 and the bottom plate 110. The setting of the overlap platform 210 can ensure the stability of the base 200 when the probe assembly 400 measures the contour of the product, thereby further improving the measurement accuracy.

[0056] Optionally, the driving assembly 500 includes a driving motor 510, a fixing rod 520 and a connecting wire 530. The driving motor 510 is disposed on the support plate 120, the fixing rod 520 is disposed on the base 200, one end of the connecting wire 530 is connected to the fixing rod 520, and the other end can be wound around the output shaft of the driving motor 510. Specifically, in non-testing situations (including observation), Figure 1 From the perspective of , the drive motor 510 rotates clockwise to tighten the wear-resistant wire, the connecting wire 530 pulls the fixing rod 520, and drives the entire probe 410 to rotate clockwise along the rotating shaft 121 until the probe 410 leaves the field of view of the lens 300. Then the operator observes the surface features of the wafer to be tested through the lens 300, selects the test position, clicks the start test button, drives the motor 510 to rotate counterclockwise, releases the connecting wire 530, and the probe 410 rotates counterclockwise along the rotating shaft 121 until the base 200 falls on the bottom plate 110 by its own weight.

[0057] In this embodiment, by driving the motor 510 to control the retraction and extension of the connecting wire 530, the flip angle of the base 200 can be accurately adjusted, so that the probe assembly 400 can be accurately moved out of or back into the observation field of the lens 300, avoiding errors caused by human operation and improving measurement accuracy.

[0058] Specifically, the connecting wire 530 in this embodiment is a wear-resistant wire, which can maintain high durability during multiple retraction and extension processes, thereby increasing the service life of the driving component 500.

[0059] Alternatively, if Figure 1-Figure 2 As shown, the probe assembly 400 also includes a pivot seat 420, a cross spring bearing 430, a metal plate 440 and a sensor 450. The pivot seat 420 is rotatably set on the base 200. The probe 410 also includes a probe connecting rod 412. One end of the probe connecting rod 412 is connected to the pivot seat 420, and the other end is vertically connected to the probe body 411. The outer ring of the cross spring bearing 430 is connected to the pivot seat 420, and the inner ring of the cross spring bearing 430 is connected to the base 200; the metal plate 440 is set on the pivot seat 420, and the metal plate 440 moves synchronously with the probe body 411. The sensor 450 is set on the base 200, and the sensor 450 is electrically connected to the metal plate 440, so that the movement state of the probe 410 can be monitored in real time. The sensor 450 can obtain the movement trajectory of the probe 410 in the step measurement through the position change of the metal plate 440, and quickly feed back to the control system to realize real-time contour information collection.

[0060] It should be noted that the control system in this embodiment may include a controller, which may be a centralized or distributed controller. For example, the controller may be a single single-chip microcomputer or may be composed of multiple distributed single-chip microcomputers. The control program may be run in the single-chip microcomputer to analyze the data detected by the sensor 450 and output the results.

[0061] Optionally, the sensor 450 is a capacitive sensor 450, which includes a first capacitor plate 451 and a second capacitor plate 452, which are arranged parallel to each other on the base 200, and at least part of the metal plate 440 is located between the first capacitor plate 451 and the second capacitor plate 452. In this embodiment, the measurement process of the profilometer is roughly that the probe 410 is pressed on the surface of the wafer and slid along a certain direction, and the probe 410 swings up and down along the steps on the wafer surface, driving the metal plate 440 at the tail of the probe 410 to swing, and the metal plate 440 is located between the first capacitor plate 451 and the second capacitor plate 452 which are parallel to each other. The change in the position of the metal plate 440 causes the change in the capacitance value, and the shape of the step is depicted by collecting the change in capacitance. The metal plate 440 in this embodiment is an aluminum plate. In other embodiments, the metal plate 440 can be made of other metal materials, such as copper, iron, etc.

[0062] Alternatively, if Figure 1 As shown, the profilometer further includes a force-applying assembly 600, which includes an electromagnetic coil 610 and a crescent plate 620. The electromagnetic coil 610 is disposed on the base 200, and one end of the crescent plate 620 is electrically connected to the electromagnetic coil 610, and the other end of the crescent plate 620 is connected to the pivot seat 420. Specifically, when the electromagnetic coil 610 is energized, an electromagnetic force is generated on the crescent plate 620, thereby applying a test pressure to the pivot seat 420 through the crescent plate 620, and prompting the probe 410 to perform a stable up and down movement during the measurement process.

[0063] It should be noted that since the test force applied by the electromagnetic coil 610 to the crescent plate 620 and transmitted to the probe 410 is usually within 50 mg, it is only necessary to ensure that the weight of the probe 410 is much larger than 50 mg, and the probe 410 will not rotate along the shaft 121 during the test and affect the test.

[0064] Embodiment 2

[0065] like Figure 2As shown, the present embodiment provides a probe installation tool, which is applied to a profilometer of an embodiment. The probe installation tool includes a positioning sleeve 700, which is sleeved on the lens 300. The positioning sleeve 700 includes a positioning cavity 731. The axis of the positioning cavity 731 coincides with the axis of the lens 300, and the diameter of the positioning cavity 731 is the same as the diameter of the probe body 411. The side wall of the positioning cavity 731 is provided with an opening 732 for the probe body 411 to enter. When replacing the probe 410, it is only necessary to place the probe body 411 into the positioning cavity 731 to ensure that the axis of the probe body 411 coincides with the axis of the lens 300. There is no need to recalibrate the horizontal deviation of the probe 410 and the lens 300, which can significantly reduce the calibration and debugging time and ensure the repeatable installation accuracy of the probe 410.

[0066] Optionally, the positioning sleeve 700 further includes a mounting section 710, a transition section 720 and a positioning section 730. The mounting section 710 is sleeved on the lens 300 and is detachably connected to the lens 300. One end of the transition section 720 is connected to the mounting section 710, and the other end is connected to the positioning section 730. The positioning section 730 is provided with a positioning cavity 731 and an opening 732. In this embodiment, the transition section 720 is in an inverted cone shape, the large end of the inverted cone is connected to the mounting section 710, and the small end of the inverted cone is connected to the positioning section 730, so that the diameter of the mounting section 710 can match the diameter of the lens 300, and the diameter of the positioning section 730 can match the diameter of the probe body 411, thereby improving the positioning accuracy.

[0067] Optionally, the mounting section 710 is threadedly connected to the lens 300; or, the mounting section 710 is snap-fitted to the lens 300. The threaded connection or snap-fitting method provides a flexible option for the connection between the mounting section 710 and the lens 300, which can be more firmly fixed by the threaded connection, and can also be quickly installed and removed by the snap-fitting method, thereby improving the convenience of installing the positioning sleeve 700.

[0068] Specifically, the lens 300 is provided with an external thread, and the mounting section 710 of the positioning sleeve 700 is provided with an internal thread, and the external thread is screwed together with the internal thread; or, one of the buckles or slots is provided on the outer wall of the lens 300, and the mounting section 710 of the positioning sleeve 700 is provided with the other of the buckles or slots, and the buckle is engaged with the slot to enable the positioning sleeve 700 to be quickly installed on the lens 300.

[0069] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to list all the embodiments here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. A profilometer, characterized in that include: Mounting seat (100); A base (200) rotatably connected to the mounting seat (100); A lens (300) is arranged on the mounting seat (100) in a vertical direction; A probe assembly (400) is arranged on the base (200), the probe assembly (400) comprises a probe (410), the probe (410) comprises a probe body (411), the probe body (411) is arranged in a vertical direction, and the axis of the probe body (411) coincides with the axis of the lens (300); A driving assembly (500) is arranged on the mounting seat (100), an output end of the driving assembly (500) is connected to the base (200), and the driving assembly (500) is used to drive the base (200) to drive the probe body (411) to flip; The mounting seat (100) comprises a bottom plate (110) and a support plate (120), wherein the support plate (120) is vertically arranged on the bottom plate (110), the lens (300) is arranged on the support plate (120) in a vertical direction, and one end of the base (200) is rotatably connected to the support plate (120), and the other end can be overlapped on the bottom plate (110); A probe installation tool, the probe installation tool comprising a positioning sleeve (700), the positioning sleeve (700) is sleeved on the lens (300), the positioning sleeve (700) comprises a positioning cavity (731), the axis of the positioning cavity (731) coincides with the axis of the lens (300), and the diameter of the positioning cavity (731) is the same as the diameter of the probe body (411), and the side wall of the positioning cavity (731) is provided with an opening (732) for the probe body (411) to enter.

2. The profilometer according to claim 1, characterized in that A bridging platform (210) and an escape space (220) are provided on one side of the base (200) facing the bottom plate (110); the bridging platform (210) can be bridgingly connected to the bottom plate (110).

3. The profilometer according to claim 1, characterized in that The driving assembly (500) comprises: A driving motor (510) is arranged on the mounting seat (100); A fixing rod (520) is disposed on the base (200); A connecting wire (530) has one end connected to the fixing rod (520) and the other end capable of being wound around the output shaft of the driving motor (510).

4. The profilometer according to claim 1, characterized in that The probe assembly (400) further includes: A pivot seat (420), wherein the pivot seat (420) is rotatably disposed on the base (200), and the probe (410) further comprises a probe connecting rod (412), wherein one end of the probe connecting rod (412) is connected to the pivot seat (420), and the other end is vertically connected to the probe body (411); A cross spring bearing (430), wherein the outer ring of the cross spring bearing (430) is connected to the pivot seat (420), and the inner ring of the cross spring bearing (430) is connected to the base (200); A metal plate (440) is disposed on the pivot seat (420), and the metal plate (440) moves synchronously with the probe body (411); A sensor (450) is disposed on the base (200), and the sensor (450) is electrically connected to the metal plate (440).

5. The profilometer according to claim 4, characterized in that The sensor (450) is a capacitive sensor (450), comprising a first capacitor plate (451) and a second capacitor plate (452), wherein the first capacitor plate (451) and the second capacitor plate (452) are arranged parallel to each other on the base (200), and at least a portion of the metal plate (440) is located between the first capacitor plate (451) and the second capacitor plate (452).

6. The profilometer according to claim 4, characterized in that The profilometer further comprises a force applying component (600), wherein the force applying component (600) comprises: An electromagnetic coil (610) is disposed on the base (200); The crescent plate (620) has one end electrically connected to the electromagnetic coil (610) and the other end connected to the pivot seat (420).

7. The profilometer according to claim 1, characterized in that The positioning sleeve (700) further comprises a mounting section (710), a transition section (720) and a positioning section (730); the mounting section (710) is sleeved on the lens (300) and is detachably connected to the lens (300); one end of the transition section (720) is connected to the mounting section (710) and the other end is connected to the positioning section (730); the positioning section (730) is provided with the positioning cavity (731) and the opening (732).

8. The profilometer according to claim 7, characterized in that The mounting section (710) is threadedly connected to the lens (300); or, the mounting section (710) is snap-connected to the lens (300).

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