A magnetic domain imaging device and method with a single light source

Abstract

The present invention discloses a single-light-source magnetic domain imaging device and method, belonging to the technical field of magnetic domain imaging. The device includes: the emitted light generated by a white light source is incident on a digital micromirror device (DMD) after passing through a filter and a polarizer; the filter at least includes two different filtering regions; at least a lens assembly disposed in the incident optical path of the object to be measured, and the light reflected from different reflection regions of the digital micromirror device (DMD) is incident on different positions of the lens assembly and reaches the object to be measured; the light reflected by the object to be measured enters a camera after passing through at least the lens assembly and an analyzer. Through the above scheme, the present invention realizes that the detection light reaches the object to be measured with different incident planes or incident directions, and can meet different detection requirements of the object to be measured.

Description

Technical Field

[0001] The present invention relates to the technical field of magnetic domain imaging, and in particular to a magnetic domain imaging device and method with a single light source. Background Art

[0002] In current magnetic domain imaging devices, the detection light emitted from a light source passes through a polarizer, an objective lens and other lens groups and then reaches the object to be measured. The light reflected by the object to be measured passes through the objective lens and other lens groups, a analyzer and then enters a camera, so that the camera captures a magnetic domain image.

[0003] However, in such a magnetic domain imaging device, after the positions of the light source and the object to be measured are fixed, the detection light emitted by the light source can only reach the object to be measured in a fixed incident direction or incident plane. In some cases, for the magnetic domain state of the object to be measured, it is necessary to select to use the polar magneto-optical Kerr effect or the longitudinal magneto-optical Kerr effect to image the object to be measured. The polar magneto-optical Kerr effect requires the incident light to be perpendicularly incident on the object to be measured, and the longitudinal Kerr effect requires the incident light to be obliquely incident on the object to be measured and requires the incident plane of the incident light to be parallel to the magnetic domain direction to be measured. In the case where the magnetic domain state of the object to be measured is not clear, it is necessary to adjust the optical path of the incident light multiple times to meet the imaging requirements. However, the existing magnetic domain imaging devices cannot arbitrarily adjust or change the incident plane or incident direction of the detection light and cannot adapt to different detection requirements of the object to be measured.

[0004] Even if the incident plane or incident direction can be changed by adjusting the position of the light source, on the one hand, it is necessary to realign the optical path, the operation is complex, and the optical path alignment requires high precision and a long adjustment time. On the other hand, adjusting the position of the light source once can only change the incident plane or incident direction once. If further changes are needed, it is necessary to continue to adjust the position of the light source, resulting in low efficiency of changing the incident plane or incident mode. Summary of the Invention

[0005] The present invention provides a magnetic domain imaging device and method with a single light source for solving at least one of the above technical problems.

[0006] The present invention adopts the following technical solutions:

[0007] On the one hand, the present invention provides a magnetic domain imaging device with a single light source. The device includes: the emitted light generated by a white light source passes through a filter and a polarizer and then enters a digital micromirror device (DMD); the filter includes at least two different filter regions; at least a lens assembly disposed on the incident optical path of the object to be measured, and the light reflected from different reflection regions of the digital micromirror device (DMD) enters different positions of the lens assembly and then reaches the object to be measured; the light reflected by the object to be measured enters a camera after passing through at least the lens assembly and an analyzer.

[0008] In a possible implementation of the present invention, the filter is a rotatable filter, and there are red, blue, and green color filter regions on the filter.

[0009] In a possible implementation of the present invention, the device further includes: a prism disposed at least in the incident light path of the digital micromirror device DMD, and the emitted light is reflected by the prism to the digital micromirror device DMD.

[0010] In a possible implementation of the present invention, the device further includes: a light trap assembly disposed at least in the reflection light path of the digital micromirror device DMD to absorb stray light reflected by other reflection regions of the digital micromirror device DMD.

[0011] In a possible implementation of the present invention, the device further includes a controller; when the camera in the magnetic domain imaging device is a monochrome camera, the controller is connected to the monochrome camera, the digital micromirror device DMD, and the filter to control the image acquisition time of the monochrome camera, the different filter regions of the filter, and the different reflection regions of the digital micromirror device DMD to correspond to each other; when the camera in the magnetic domain imaging device is a color camera, the controller is connected to the digital micromirror device DMD and the filter to control the different filter regions of the filter and the different reflection regions of the digital micromirror device DMD to correspond to each other.

[0012] On the other hand, the present invention also provides a magnetic domain imaging method with a single light source, which applies a magnetic domain imaging device with a single light source as described above. The method includes: controlling the white light source to emit light to generate emitted light; moving the filter so that the emitted light sequentially passes through different filter regions, adjusting the digital micromirror device DMD so that the light emitted from different filter regions is incident on a preset position of the lens assembly through preset reflection regions respectively, so that the emitted light reaches the object to be measured with a preset incident plane or incident direction, and enabling the magnetic domain imaging device to obtain a magnetic domain image.

[0013] In a possible implementation of the present invention, when there are three-color filter regions on the filter, the method further includes: sequentially moving the filter to the three-color filter regions, making the emitted light passing through the three-color filter regions incident on the digital micromirror device DMD, adjusting the digital micromirror device DMD to reflect the emitted light through different reflection regions corresponding to the three-color filter regions, so that the emitted light reaches the object to be measured through different positions of the incident lens assembly with different incident planes or incident directions respectively, and enabling the magnetic domain imaging device to obtain magnetic domain images of the object to be measured under different incident planes or incident directions of the three emitted lights.

[0014] In a possible implementation manner of the present invention, the method further includes: a camera in the magnetic domain imaging device adopts a monochromatic camera, and the image acquisition time of the monochromatic camera is controlled to correspond to the light output time of the three-color filter region, so that the monochromatic camera acquires three magnetic domain images of the object to be measured under three colors.

[0015] In a possible implementation manner of the present invention, the method further includes: a camera in the magnetic domain imaging device adopts a color camera, and the single exposure time of the color camera is controlled to be greater than or equal to the time for the filter to move through the three-color filter region, so that the color camera acquires magnetic domain images of the object to be measured under three colors.

[0016] In a possible implementation manner of the present invention, when there is a three-color filter region on the filter, the method further includes: adjusting the digital micromirror device DMD so that the light emitted from the reflection region at the L-shaped corner in the three groups of reflection regions arranged in an L-shape is perpendicularly incident on the object to be measured; sequentially moving the filter to the three-color filter region, so that the emitted light passing through the three-color filter region is incident on the digital micromirror device DMD, and adjusting the digital micromirror device DMD so that the three groups of reflection regions arranged in an L-shape sequentially reflect the emitted light passing through the three-color filter region, so that the magnetic domain imaging device obtains three magnetic domain images of the lateral polar and longitudinal directions of the object to be measured.

[0017] A single-light-source magnetic domain imaging device and method provided by the present invention have the following beneficial effects:

[0018] 1) By arranging a digital micromirror device DMD in the optical path structure in the present invention, and using a plurality of reflection units provided thereon, the reflection region or reflection unit for reflecting the detection light can be arbitrarily changed. Since different reflection regions or reflection units correspond to different incident positions of the lens assemblies, and different incident positions of the lens assemblies can make the detection light reach the object to be measured with different incident surfaces or incident directions. Therefore, in the present invention, by changing different reflection regions or reflection units on the DMD, the detection light can be incident on the object to be measured with different incident surfaces or incident directions, so as to realize arbitrary adjustment of the incident surface or incident direction and meet different detection requirements of the object to be measured.

[0019] 2) Since the digital micromirror device DMD is adopted in the present invention, the optical path alignment speed is faster and the alignment operation is simpler. On the one hand, because the response speed of the digital micromirror device DMD is extremely fast, the reflection region can be quickly adjusted and changed to align the optical path. On the other hand, when aligning the optical path, if the reflection region of the digital micromirror device DMD is adjusted, there is no need to adjust the optical devices on the incident light path of the digital micromirror device DMD anymore. The alignment of the optical path can be achieved only by adjusting the digital micromirror device DMD, and the operation is simpler and faster.

[0020] 3) The light source in the present invention is implemented by a single light source. On the one hand, three colors of emitted light can be generated by cooperating with a filter, and different reflection units of the digital micromirror device (DMD) are used to quickly find the best combination of color / wavelength and the incident surface or incident direction, so that the camera can obtain the magnetic domain image with the best imaging effect of the object to be measured. On the other hand, the cost of the single light source is lower than that of the three-color LED lamp, and the adjustment speed when cooperating with the filter is faster, which is also helpful for fast imaging when the camera uses a color camera. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following will briefly introduce the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments recorded in the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings. In the drawings:

[0022] Figure 1 is an optical path structure diagram of a magnetic domain imaging device with a single light source provided by the present invention;

[0023] Figure 2 is a schematic diagram of a filter provided by the present invention;

[0024] Figure 3 is a flowchart of a magnetic domain imaging method with a single light source provided by the present invention.

[0025] Among them, 101, light source; 102, optical fiber; 103, filter, 1031, red filter region, 1032, blue filter region, 1033, green filter region; 104, polarizer; 105, prism; 106, digital micromirror device (DMD); 107, beam splitter; 108, objective lens; 109, analyzer; 110, camera; 111, control / processor; 112, light trap assembly; 200, object to be measured. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0026] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the following will clearly and completely describe the technical solutions in the present invention in conjunction with the drawings in the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of this specification, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0027] The method in the present invention will be described in detail below with reference to the drawings.

[0028] Figure 1 is an optical path structure diagram of a magnetic domain imaging device with a single light source provided by the present invention, asFigure 1 As shown in Figure 1 , the magneto - domain imaging device of the present invention at least includes the following optical components:

[0029] A light source 101, which is used to provide detection light for the magneto - domain imaging device. Here, the light source 101 can adopt a single - light - source such as a white - light source, and it has a lower cost compared with a three - color LED light source.

[0030] An optical fiber 102, which is used to transmit the detection light and make the detection light exit the optical fiber 102 at the output structure of the optical fiber 102.

[0031] A filter 103, which is used to change the color / wavelength of the detection light generated by a single light source. There are at least two filter regions provided on it. The detection light can be transformed into different colors / wavelengths when passing through different filter regions. In Figure 2 it, a red filter region 1031, a blue filter region 1032 and a green filter region 1033 are provided on the filter 103.

[0032] A polarizer 104, which is used to convert the detection light into polarized light.

[0033] A digital micromirror device DMD106. The detection light output from the polarizer 104 (at this time, the detection light is polarized light) is incident on the digital micromirror device DMD106 after passing through a prism 105. There are several reflection regions provided on the digital micromirror device DMD106, and each reflection region at least includes a reflection unit such as a micro - mirror, which can reflect the incident light.

[0034] A beam splitter 107 and an objective lens 108. The light reflected from different reflection regions of the digital micromirror device DMD106 in the same direction is substantially parallel and can be incident on different positions of the objective lens 108 respectively, so as to reach substantially the same position of the object to be measured 200 with different incident planes or incident directions.

[0035] When performing magneto - domain imaging on the object to be measured 200, by adjusting and changing the reflection regions on the digital micromirror device DMD106 for reflecting the detection light, that is, making different reflection regions on the digital micromirror device DMD106 reflect the detection light, the detection light can be incident on different positions of the objective lens 108, and arbitrary adjustment of the incident plane or incident direction can be achieved, so as to meet different detection requirements of the object to be measured 200. In addition, due to the adoption of the digital micromirror device DMD106 in the optical path structure of the present invention, the difficulty of optical path alignment can also be reduced. For the optical path before the digital micromirror device DMD106, it is only necessary to make the detection light output from the optical fiber 102 irradiate on the digital micromirror device DMD106, instead of manually adjusting the position of the light source and corresponding optical devices to align the optical path like in traditional magneto - domain imaging devices, which greatly reduces the difficulty of optical path alignment.

[0036] The analyzer 109, the light reflected from the object 200 to be measured enters the analyzer 109 after passing through the objective lens 108 and the beam splitter 107, and finally enters the camera 110. The magnetic domain image is obtained by the camera 110. In Figure 1 the camera 110 can be a color camera. By moving the filter 103 to different filter regions, imaging can be achieved with the color camera. The magnetic domain images of the object 200 under multiple colors / wavelengths can be collected through a single exposure, improving the imaging efficiency. Even though the imaging speed of the color camera is slower than that of the black-and-white camera, fast imaging can still be achieved based on this solution. The imaging speed can reach three times that of the color camera. Additionally, the camera 110 can also be a black-and-white camera. Utilizing the fast imaging speed of the black-and-white camera, the magnetic domain images corresponding to different colors / wavelengths are collected when the filter 103 allows light to pass through different filter regions. Therefore, based on this solution, whether the camera 110 is a color camera or a black-and-white camera, fast magnetic domain imaging can be achieved.

[0037] The light trap assembly 112 is arranged on the outgoing light path of the digital micromirror device DMD106 and can be used to absorb the stray light reflected from other reflection regions / units of the digital micromirror device DMD106, preventing the stray light from acting on the object 200 and affecting the imaging effect. Here, the other reflection regions / units refer to the remaining reflection regions / units in the digital micromirror device DMD106 except those set to reflect the detection light to the object 200.

[0038] The control / processor 111 is connected to the filter 103, the digital micromirror device DMD106, and the camera 110 in the optical path structure and is used to control these three optical components. Specifically, the control / processor 111 needs to control the filter 103, the digital micromirror device DMD106, and the camera 110 simultaneously. When the camera 110 is a monochromatic camera, when a filter region on the filter 103 allows light to pass through, the corresponding reflection region on the digital micromirror device DMD106 is turned on to reflect the light emerging from the filter region, and the monochromatic camera is controlled to perform image acquisition so that the monochromatic camera can collect the magnetic domain image. When the camera 110 is a color camera, the control / processor 111 controls the filter 103 and the digital micromirror device DMD106 to cooperate. When the filter 103 moves to a certain filter region, the control makes the reflection region corresponding to this filter region on the digital micromirror device DMD106 reflect the detection light, and adjusts the exposure time of the color camera according to the states of the filter 103 and the digital micromirror device DMD106, ensuring that the filter 103 can complete a cycle of three-color filter regions within one exposure period, so that the color camera can collect the magnetic domain image.

[0039] That is, in Figure 1Among them, the incident light path of the object 200 to be measured is composed of a light source 101, an optical fiber 102, a filter 103, a polarizer 104, a prism 105, a digital micromirror device DMD 106, a beam splitter 107, and an objective lens 108. The outgoing light path of the object 200 to be measured is composed of the objective lens 108, the beam splitter 107, an analyzer 109, and a camera 110. The detection light emitted from the light source 101 is output through the optical fiber 102 and then enters the filter 103. After being affected by different filtering regions of the filter 103, the color / wavelength can be changed. Then, after passing through the polarizer 104 and the prism 105, it enters the digital micromirror device DMD 106. After being reflected by different reflection regions on the digital micromirror device DMD 106, it enters different positions of the objective lens 108 through the beam splitter 107, and finally reaches the object 200 to be measured with different incident planes or incident directions. When the detection light emitted from the light source 101 is reflected by the same reflection region on the digital micromirror device DMD 106, it can reach the object 200 to be measured with the same incident plane or incident direction. The light reflected from the object 200 to be measured enters the camera 110 after passing through the objective lens 108, the beam splitter 107, and the analyzer 109, enabling the camera 110 to obtain the magnetic domain images of the object 200 with different incident planes or incident directions, or the same incident plane or incident direction as needed. Since the micro mirrors or reflection regions on the digital micromirror device DMD 106 are relatively large, the micro mirrors or reflection regions on the digital micromirror device DMD 106 can be adjusted arbitrarily, thereby arbitrarily adjusting the position of the detection light incident on the objective lens 108, so as to realize that the incident plane or incident direction of the detection light incident on the object 200 to be measured can be adjusted / changed arbitrarily, and it can meet the different detection requirements of various objects 200 to be measured.

[0040] It should be noted that Figure 1 The optical path structure shown is only for illustrative purposes and does not limit the optical path structure of the present invention. In actual use, the positions / orders of the optical devices on the incident light path of the object 200 to be measured, such as the optical fiber 102, the polarizer 104, etc., can be swapped, and the number or type of the optical devices in the optical path structure can also be replaced or deleted according to the actual situation, as long as it can ensure that the detection light emitted from the light source 101 enters the digital micromirror device DMD 106 and is reflected by different reflection regions of the digital micromirror device DMD 106 to different positions of the objective lens 108, so as to change the incident direction or incident plane of the object 200 to be measured and then be imaged by the camera.

[0041] Figure 3 The following is a flowchart of a magnetic domain imaging method with a single light source provided by the present invention. As Figure 3 shown, the magnetic domain imaging method in the present invention at least includes the following execution steps:

[0042] Step 301, control the white light source to turn on to generate emitted light.

[0043] In one example, the single light source in the present invention uses a white light source, and emitted light is generated after the white light source is turned on.

[0044] Step 302: Move the filter so that the emitted light sequentially passes through different filter regions, and adjust the digital micromirror device DMD to make the light emitted from different filter regions respectively enter the preset position of the lens assembly through the preset reflection region, so that the emitted light reaches the object to be measured with a preset incident plane or incident direction, and the magnetic domain imaging device obtains a magnetic domain image.

[0045] In one example, if the filter 103 includes filter regions of three colors, red, blue, and green, when the emitted light generated by the white light source enters the filter through the optical fiber 102, the filter 103 can be moved to allow the filter regions of the three colors to transmit light respectively, obtaining three different colors of detection light. It should be noted that if the filter 103 used is circular, the filter region for light transmission can also be changed by rotating the filter 103, so that the emitted light changes different colors / wavelengths. Then, control the digital micromirror device DMD106 to adjust the reflection regions thereon, so that different reflection regions reflect the detection light of different colors / wavelengths, making the detection light enter different positions of the objective lens 108 and reach substantially the same position of the object to be measured 200 with different incident planes or incident directions. The light reflected by the object to be measured 200 enters the camera 110 after passing through the objective lens 108, the beam splitter 107, and the analyzer 109, so that the camera 110 obtains the magnetic domain images of the object to be measured 200 at three different colors / wavelengths, different incident planes or incident directions.

[0046] That is to say, the present invention can realize arbitrary changes in the incident plane or incident direction of the object to be measured 200 by controlling the reflection of the detection light by different reflection regions of the digital micromirror device DMD106, so as to meet different detection requirements of the object to be measured 200.

[0047] For example, when there are filter regions of three colors, red, blue, and green, provided on the filter 103, after the emitted light generated by the light source 101 is output to the filter 103 through the optical fiber 102, assuming that the filter region on the current filter 103 is red, the digital micromirror device DMD106 is adjusted to turn on the reflection region corresponding to the red detection light on the DMD to reflect the red detection light. When the filter region on the filter 103 moves to green, the digital micromirror device DMD106 is adjusted to turn on the reflection region corresponding to the green detection light on the DMD to reflect the green detection light. When the filter region on the filter 103 moves to blue, the digital micromirror device DMD106 is adjusted to turn on the reflection region corresponding to the blue detection light on the DMD to reflect the blue detection light. It should be noted that the regions on the digital micromirror device DMD106 that reflect the red detection light, blue detection light, and green detection light are different reflection regions, but the detection light reflected by these three different reflection regions can all reach approximately the same measured position on the object to be measured 200. In this way, the camera 110 can obtain three magnetic domain images of the object to be measured 200 under three different colors / wavelengths, three different incident surfaces, or incident directions.

[0048] Similarly, if the filter 103 selected in the optical path structure includes two different filter regions, and reflection regions corresponding to these two different filter regions are provided on the digital micromirror device DMD106, after the light source 101 generates the emitted light, the camera 110 can collect two magnetic domain images of the object to be measured 200 under two different colors / wavelengths, two different incident directions, or incident surfaces.

[0049] Furthermore, if during the above imaging process, the filter 103 is controlled to remain in a certain filter region unchanged, that is, a certain filter region continuously transmits light, and only the reflection region on the digital micromirror device DMD106 is controlled to change, then magnetic domain images of the object to be measured 200 under the same color / wavelength, different incident surfaces, or incident directions can be obtained; and if during the imaging process, the reflection region on the digital micromirror device DMD106 is controlled not to change, and the filter 103 is controlled to move so that the emitted light passes through different filter regions in sequence, then magnetic domain images of the object to be measured 200 under different colors / wavelengths, the same incident surface, or incident direction can be obtained.

[0050] Through the above process, the corresponding magnetic domain images are obtained. One can compare the magnetic domain images of the emitted light of different colors with the same incident surface or incident direction to know the quality of the imaging effect of the current object under test 200 when the emitted light is of a certain color. One can also compare the magnetic domain images of the emitted light of the same color with different incident surfaces or incident directions to meet the imaging requirements of different magnetic domains on the object under test 200. One can also splice the magnetic domain images according to the color and different incident surfaces to obtain a three-dimensional magnetic domain image that can reflect multiple magnetic domain characteristics in one picture. One can also obtain a better magnetic domain image according to the combination of the color, incident direction, or incident surface of the emitted light with a better imaging effect.

[0051] In one example, the camera 110 in the magnetic domain imaging device can use a monochromatic camera or a color camera. Taking the example that the filter 103 needs to move three filter regions, when using a monochromatic camera, it is necessary to control the exposure time of the monochromatic camera to correspond to the time when the filter 103 moves to one filter region. For example, when the filter 103 moves to the red filter region 1031, the filter 103 emits red light, and at this time, control the monochromatic camera to collect an image once. When the filter 103 moves to the blue filter region 1032, the filter 103 emits blue light, and at this time, control the monochromatic camera to collect an image once. When the filter 103 moves to the green filter region 1033, the filter 103 emits green light, and at this time, control the monochromatic camera to collect an image once. Thus, it can be ensured that the monochromatic camera can collect three magnetic domain images of the object under test 200 at three colors / wavelengths. By combining these three magnetic domain images according to the color / wavelength and the incident surface direction, the three-dimensional magnetic domain image of the object under test 200 can be obtained. When the camera 110 uses a color camera, control the exposure time of the color camera to include the situation where the three-color filter regions of the filter 103 are respectively located in the optical path, so as to ensure that the color camera can collect the magnetic domain images of the object under test at three colors through one exposure. When the image obtained by the camera is a color image, it can be decomposed according to the wavelength and / or color, and three magnetic domain images at three colors / wavelengths can be obtained. When the photosensitive elements of different colors of the camera respectively output and form monochromatic images corresponding to the colors, the magnetic domain images at three colors / wavelengths can be directly obtained.

[0052] In one example, in order to detect the Kerr effect of the object under test 200 in the transverse, polar, and longitudinal directions, it is required that the digital micromirror device DMD106 uses three groups of reflection regions arranged in an L shape, and the light emitted from the reflection region at the L-shaped corner can be vertically incident on the object under test 200. Correspondingly, the light emitted from the other two groups of reflection regions can be obliquely incident on the object under test 200. In this way, by controlling the filter 103 to move to different color filter regions in sequence, the emitted light is sequentially changed into three different color detection lights, and the three groups of reflection regions distributed in an L shape are sequentially enabled, so that the detection light is reflected and reaches the object under test 200. The light reflected from the object under test 200 enters the camera 110 after passing through the objective lens 108, the beam splitter 107, and the analyzer 109, so that the camera 110 can collect three magnetic domain images of the polar magnetic domain and the in-plane magnetic domains in two directions of the object under test 200.

[0053] Suppose that when the filter 103 moves to the red filter region 1031, the reflection region above the corner in the three groups of reflection regions distributed in an L shape is turned on to reflect the red light. When the filter 103 moves to the blue filter region 1032, the reflection region at the corner in the three groups of reflection regions distributed in an L shape is turned on to reflect the blue light. When the filter 103 moves to the green filter region 1033, the reflection region on the right side of the corner in the three groups of reflection regions distributed in an L shape is turned on to reflect the green light. In this way, the three different color detection lights reach the object under test 200 with different incident planes or incident directions. After the light is reflected by the object under test 200, it enters the camera 110 through the objective lens 108, the beam splitter 107, and the analyzer 109, so that the camera 110 collects three magnetic domain images of the in-plane magnetic domain in one direction, the polar magnetic domain, and the in-plane magnetic domain in the other direction of the object under test 200.

[0054] Each embodiment in the present invention is described in a progressive manner. The same or similar parts among the embodiments can be referred to each other, and the differences between each embodiment and other embodiments are emphasized.

[0055] Those skilled in the art should understand that the embodiments of the present invention can be provided as a method, a system, or a computer program product. Therefore, the present invention can take the form of a complete hardware embodiment, a complete software embodiment, or an embodiment combining software and hardware aspects. Moreover, the present invention can take the form of a computer program product implemented on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

[0056] It should also be noted that the term "comprising", "including" or any other variation thereof is intended to cover non-exclusive inclusion, such that a process, method, commodity or device comprising a series of elements not only includes those elements but also includes other elements not expressly listed, or further includes elements inherent to such process, method, commodity or device. Without further limitation, an element defined by the statement "comprising an..." does not exclude the presence of additional identical elements in the process, method, commodity or device comprising the element.

[0057] The above are only embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A magnetic domain imaging device with a single light source, characterized in that, The device includes: An incident light path of the object to be measured is composed of a light source, an optical fiber, a filter, a polarizer, a prism, a digital micromirror device (DMD), a beam splitter, and an objective lens; an exit light path of the object to be measured is composed of the objective lens, the beam splitter, an analyzer, and a camera; the filter is used to change the color / wavelength of the detection light generated by a single light source, and at least two filter regions are arranged thereon, and the detection light can be changed to different colors / wavelengths when passing through different filter regions; The emitted light generated by the white light source passes through the filter and the polarizer, and then is incident on the digital micromirror device (DMD) after passing through the prism; a plurality of reflection regions are arranged on the digital micromirror device (DMD), and each reflection region includes at least one reflection unit to reflect the incident light; For the beam splitter and the objective lens, the light reflected from different reflection regions of the digital micromirror device (DMD) in the same direction is parallel and is respectively incident on different positions of the objective lens, so as to reach the same position of the object to be measured with different incident surfaces or incident directions; The light reflected by the object to be measured enters the camera after passing through the objective lens, the beam splitter, and the analyzer; A light trap assembly is arranged in the reflection light path of the digital micromirror device (DMD) to absorb the stray light reflected by other reflection regions of the digital micromirror device (DMD); The device further includes a controller; When the camera in the magnetic domain imaging device adopts a monochromatic camera, the controller is connected to the monochromatic camera, the digital micromirror device (DMD), and the filter to control the image acquisition time of the monochromatic camera, the different filter regions of the filter, and the different reflection regions of the digital micromirror device (DMD) to correspond to each other; When the camera in the magnetic domain imaging device adopts a color camera, the controller is connected to the digital micromirror device (DMD) and the filter to control the different filter regions of the filter and the different reflection regions of the digital micromirror device (DMD) to correspond to each other.

2. The magnetic domain imaging device with a single light source according to claim 1, characterized in that, The filter is a rotatable filter, and there are red, blue, and green filter regions on the filter.

3. A magnetic domain imaging method with a single light source, which applies a magnetic domain imaging device with a single light source as described in any one of claims 1-2, characterized in that, The method includes: Controlling the white light source to emit light to generate emitted light; Moving the filter to enable the emitted light to pass through different filter regions in sequence, adjusting the digital micromirror device (DMD) so that the light emitted from different filter regions is respectively incident on the preset positions of the beam splitter and the objective lens through the preset reflection regions, enabling the emitted light to reach the object to be measured with a preset incident surface or incident direction, and enabling the magnetic domain imaging device to obtain a magnetic domain image.

4. A magnetic domain imaging method with a single light source according to claim 3, characterized in that When there are three-color filter regions on the filter, the method further includes: Moving the filter to the three-color filter regions in sequence, enabling the emitted light passing through the three-color filter regions to be incident on the digital micromirror device (DMD), adjusting the digital micromirror device (DMD) to reflect the emitted light through different reflection regions corresponding to the three-color filter regions, enabling the emitted light to reach the object to be measured through different positions of the incident lens assembly with different incident surfaces or incident directions respectively, and enabling the magnetic domain imaging device to obtain the magnetic domain images of the object to be measured under different incident surfaces or incident directions of the three emitted lights.

5. A magnetic domain imaging method with a single light source according to claim 4, characterized in that, The method further includes: The camera in the magnetic domain imaging device uses a monochrome camera, and the image acquisition time of the monochrome camera is controlled to correspond to the light output time of the three-color filter region, so that the monochrome camera acquires three magnetic domain images of the object to be measured under three colors.

6. A magnetic domain imaging method with a single light source according to claim 4, characterized in that, The method further includes: The camera in the magnetic domain imaging device uses a color camera, and the one-time exposure time of the color camera is controlled to be greater than or equal to the time for the filter to move through the three-color filter region, so that the color camera acquires the magnetic domain images of the object to be measured under three colors.

7. A magnetic domain imaging method with a single light source according to claim 3, characterized in that When there is a three-color filter region on the filter, the method further includes: Adjust the digital micromirror device DMD so that the light emitted from the reflection region at the L-shaped corner in the three groups of reflection regions arranged in an L-shape is vertically incident on the object to be measured; Move the filter to the three-color filter region in sequence, so that the emitted light passing through the three-color filter region is incident on the digital micromirror device DMD, and adjust the digital micromirror device DMD so that the three groups of reflection regions arranged in an L-shape reflect the emitted light passing through the three-color filter region in sequence, so that the magnetic domain imaging device obtains three magnetic domain images of the lateral polar and longitudinal directions of the object to be measured.

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