Silicon wafer basket flipping and transfer device

Abstract

The present invention provides a silicon wafer basket flipping and transporting device, which belongs to the field of silicon wafer processing, and includes a flipping mechanism, a transmission mechanism and a blocking mechanism; the flipping mechanism is arranged at one end of the transmission mechanism, and is used to flip the basket; the transmission mechanism is arranged horizontally, and is used to transmit the basket horizontally; the blocking mechanism is arranged on the transmission line of the transmission mechanism, and is used to block the transmission of the basket. The present application adopts a clamping positioning and a blocking mechanism for transmission after flipping, so that the silicon wafer basket flipping and transporting device is more stable, more conducive to the control of the working rhythm, and is convenient for promotion and application in the fields of semiconductor silicon wafer detection and processing.

Description

Technical Field

[0001] The invention belongs to the field of silicon wafer processing, and in particular relates to a silicon wafer basket overturning and transporting device. Background Art

[0002] In the process of silicon wafer preparation and production, it is necessary to circulate through the silicon wafer basket, and the overall circulation of the silicon wafer basket is used to complete the circulation, cleaning, and inspection of the silicon wafers. However, when the silicon wafer is inserted into the silicon wafer basket, the rotation state of the silicon wafer basket is different from the state during subsequent cleaning and other work. At this time, the silicon wafer basket needs to be flipped. Manual flipping of the silicon wafer basket is time-consuming and labor-intensive. The method of flipping by a mechanical arm is complex in structure and high in cost. The existing flipping mechanism cannot take into account both empty and full baskets, and has poor versatility. In terms of horizontal transfer or transmission, there is currently no stop or blocking structure for the basket during transmission on the market, but only a shutdown and pause, which affects the overall efficiency. The existing technology of the flipping mechanism basket either has no positioning mechanism, or the positioning mechanism is set at the top, including the body structure of the clamping cylinder, which increases the clamping size of the basket in the length direction. Summary of the invention

[0003] In order to overcome the deficiencies of the prior art, the present invention provides a silicon wafer basket flipping and transferring device, which can solve the above-mentioned problems.

[0004] A silicon wafer flower basket flipping and transporting device comprises a flipping mechanism, a transmission mechanism and a blocking mechanism; the flipping mechanism is arranged at one end of the transmission mechanism and is used to flip the flower basket; the transmission mechanism is arranged horizontally and is used to horizontally transmit the flower basket; the blocking mechanism is arranged on the transmission line of the transmission mechanism and is used for blocking control of flower basket transmission.

[0005] Furthermore, the flipping mechanism includes a flipping axis module, a flipping drive module, a flipping pad assembly, a flipping backplate assembly and a flipping upper clamping assembly; the bottom end of the flipping pad assembly is fixedly connected to the flipping axis module, the flipping backplate assembly is vertically fixed to the flipping pad assembly, the flipping upper clamping assembly is arranged on the top surface and side surface of the flipping backplate assembly, and the flipping drive module is connected to the flipping axis module or to the flipping backplate assembly.

[0006] Furthermore, the flipping upper clamping assembly includes an upper clamping mounting block, an upper clamping driver, a clamping fixing block, a clamping connecting rod and a double-headed clamping piece, the bottom of the upper clamping driver is transferred to the top side of the back plate body of the flipping back plate assembly through the upper clamping mounting block, and the bottom of the clamping fixing block is fixedly connected to the upper clamping driver housing or the top side of the back plate body; one end of the two clamping connecting rods is pivotally connected to the top of the clamping fixing block, and the other end of the two clamping connecting rods is pivotally connected to the middle part of the double-headed clamping piece; the double-headed clamping piece includes two forks, one fork is pivotally connected to the end of the driving piston rod of the upper clamping driver, and the other fork is arranged toward the direction of the basket to be flipped.

[0007] Furthermore, the flipping mechanism also includes a flap lower jaw assembly, which includes a lower jaw with a limiting portion and a jaw driver, the front portion of the lower jaw extends toward the flip pad assembly, and the rear portion of the lower jaw is connected to the driving active end of the horizontally arranged jaw driver, wherein the limiting portion of the lower jaw matches the lifting head or positioning piece of the flower basket.

[0008] Furthermore, the flip pad assembly includes a convex pad body and a flip pad block; the protruding end of the pad body is arranged away from the flower basket, and is used to install the flip axis module, the back plate body and the back plate reinforcement rib plate of the flip back plate assembly, and the flip plate lower clamp assembly; the flip pad block is installed on the upper surface of the main part of the pad body to support the bottom of the silicon wafer flower basket; and a mounting hole is opened on the main part of the pad body for installing a flip in place sensor.

[0009] Furthermore, the transmission mechanism includes a transmission frame, a transmission drive chain belt module, a post-flipping buffer assembly and a material transmission sensing assembly; the transmission chain belt of the transmission drive chain belt module is arranged longitudinally along the transmission frame; the post-flipping buffer assembly is arranged on the cross beam of the transmission frame, and is used to buffer the flipping mechanism arranged horizontally after flipping; the material transmission sensing assembly is arranged on the outside of the longitudinal beam of the transmission frame, and is used to detect whether there is a material basket on the transmission line.

[0010] Furthermore, the transmission mechanism also includes a water receiving trough and a transmission outer frame, and the water receiving trough is supported by the transmission outer frame and arranged on the outer periphery of the transmission frame.

[0011] Furthermore, the blocking mechanism includes a blocking mounting base plate, a blocking vertical plate, a blocking plate with a blocking protrusion, a blocking drive assembly and a blocking in-place monitoring assembly; the blocking mounting base plate is arranged on the crossbeam of the transmission mechanism to support the entire blocking mechanism; the bottoms of two parallel and spaced blocking vertical plates are fixed to the blocking mounting base plate, one end of the two parallel and spaced blocking plates is mounted to the blocking vertical plate through a blocking support pivot, the other end of the two parallel and spaced blocking plates is pivotally connected to the end of the driving rod of the blocking drive assembly through a blocking drive pivot, and the two sides of the shell of the blocking drive of the blocking drive assembly are pivotally connected to the blocking drive support block; the blocking in-place monitoring assembly is installed under the blocking plate to monitor whether the silicon wafer basket is driven in place after blocking.

[0012] Compared with the prior art, the beneficial effect of the present invention is that the present application adopts a clamping positioning and flipping transmission blocking mechanism, which makes the silicon wafer basket flipping and transporting device more stable, more conducive to the control of the working rhythm, and convenient for promotion and application in the fields of semiconductor silicon wafer detection and processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1-3 Schematic diagrams of the silicon wafer basket flipping and transporting device of the present invention from different viewing angles;

[0014] Figure 4 is a schematic diagram of flipping the upper clamping assembly;

[0015] Figure 5 It is a schematic diagram of the lower clamping jaw assembly of the flap;

[0016] Figure 6 is a schematic diagram of a pad body;

[0017] Figure 7 A schematic diagram of another example of a silicon wafer basket flipping and transferring device;

[0018] Figure 8 Schematic diagram of the blocking mechanism.

[0019] In the figure,

[0020] 100. Flipping mechanism;

[0021] 110. Flip axis module;

[0022] 120. Flip drive module;

[0023] 130. Turning pad assembly; 131. Pad body; 132. Turning pad block;

[0024] 140. Flip back panel assembly; 141. Back panel body; 142. Back panel reinforcing rib plate;

[0025] 150, flip up the upper clamping assembly; 151, upper clamping mounting block; 152, upper clamping driver; 153, clamping fixing block; 154, clamping connecting rod; 155, double-headed clamping member;

[0026] 160. flap lower clamping jaw assembly; 161. lower clamping jaw; 162. clamping jaw driver;

[0027] 170. Flip position sensor;

[0028] 180, forward rollover blocking assembly;

[0029] 200. Transmission mechanism;

[0030] 210, transmission framework;

[0031] 220, transmission drive chain belt module;

[0032] 230, flip back the buffer assembly;

[0033] 240. Material transmission sensing components;

[0034] 250. Catchment trough;

[0035] 260, transmission outer frame;

[0036] 270, side baffles;

[0037] 300, blocking mechanism;

[0038] 310, blocking the installation base plate;

[0039] 320, blocking the vertical board;

[0040] 330, blocking plate; 331, blocking protrusion; 332, blocking support pivot; 333, blocking drive pivot;

[0041] 340, blocking drive assembly; 341, blocking drive; 342, blocking drive support block;

[0042] 350. Block the monitoring components in place. DETAILED DESCRIPTION

[0043] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0044] A silicon wafer basket flipping and transporting device, see Figure 1-Figure 3 , including a flipping mechanism 100, a transmission mechanism 200 and a blocking mechanism 300; the flipping mechanism 100 is arranged at one end of the transmission mechanism 200, and is used to flip the flower basket; the transmission mechanism 200 is arranged horizontally, and is used to horizontally transmit the flower basket; the blocking mechanism 300 is arranged on the transmission line of the transmission mechanism 200, and is used for blocking control of flower basket transmission.

[0045] The flip mechanism 100 includes a flip axis module 110 , a flip driving module 120 , a flip pad assembly 130 , a flip back plate assembly 140 and a flip upper clamping assembly 150 .

[0046] Layout relationship: The bottom of one end of the flip pad assembly 130 is fixedly connected to the flip axis module 110, the flip back plate assembly 140 is vertically fixed to the flip pad assembly 130, and the flip upper clamping assembly 150 is arranged on the top surface and side surface of the flip back plate assembly 140, and the flip drive module 120 is connected to the flip axis module 110 or connected to the flip back plate assembly 140.

[0047] For details, see Figure 4 The flip upper clamping assembly 150 includes an upper clamping mounting block 151, an upper clamping driver 152, a clamping fixing block 153, a clamping connecting rod 154 and a double-headed pressing piece 155. The bottom of the upper clamping driver 152 is transferred to the top side of the back plate body 141 of the flip back plate assembly 140 through the upper clamping mounting block 151, and the bottom of the clamping fixing block 153 is fixedly connected to the housing of the upper clamping driver 152 or the top side of the back plate body 141; one end of the two clamping connecting rods 154 is pivotally connected to the top of the clamping fixing block 153, and the other end of the two clamping connecting rods 154 is pivotally connected to the middle part of the double-headed pressing piece 155; the double-headed pressing piece 155 includes two forks, one fork is pivotally connected to the end of the driving piston rod of the upper clamping driver 152, and the other fork is arranged toward the direction of the basket to be flipped.

[0048] It should be noted that a notch is provided on the top of the back plate body 141 of the flip back plate assembly 140 for the installation of the double-headed pressing member 155 .

[0049] The working principle of the top pressing of the flower basket is as follows: when the driving rod of the upper clamping driver 152 - such as a cylinder, an electric cylinder, etc. - extends upward, it drives one fork head on the corresponding side of the double-headed pressing member 155 to tilt upward, while the fork head on the other side is pressed down under the action of the lever, thereby pressing down the top plate of the flower basket located in the flip pad assembly 130 and the flip back plate assembly 140, thereby pressing the flower basket.

[0050] Furthermore, the flip mechanism 100 also includes a flap lower clamping claw assembly 160, see Figure 5 The flap lower clamp assembly 160 includes a lower clamp 161 with a limiting portion and a clamp driver 162, the front portion of the lower clamp 161 extends toward the flip pad assembly 130, the rear portion of the lower clamp 161 is connected to the driving active end of the horizontally arranged clamp driver 162, wherein the limiting portion of the lower clamp 161 matches the lifting head or positioning piece of the flower basket.

[0051] Specifically, a notch is also provided in the middle of the bottom of the back plate body 141 of the flip back plate assembly 140, and the clamping claw driver 162 is arranged on the flip pad assembly 130 on the side of the back plate body 141 away from the flower basket. Referring to the attached drawings, it is located on the upper surface of one end of the flip pad assembly 130, and the flip axis module 110 is located on the lower surface of the flip pad assembly 130 below the clamping claw driver 162. The driving rod of the clamping claw driver 162 passes through the notch and is connected to the rear of the lower clamping claw 161, driving the lower clamping claw 161 to extend and retract forward and backward. The clamping claw driver 162 is driven by a cylinder or an electric cylinder.

[0052] Principle of positioning and clamping of the flower basket: The silicon wafer flower basket falls vertically onto the flip pad assembly 130. At this time, the lower clamping jaw 161 of the flip plate lower clamping jaw assembly 160 extends forward, and the hanging head or positioning piece of the flower basket is inserted into the limit part of the lower clamping jaw 161. Then, the clamping jaw driver 162 contracts, and the lower clamping jaw 161 pulls the hanging head or positioning piece of the flower basket backward. This matches the compression of the top of the flower basket to achieve the clamping and positioning of the entire silicon wafer flower basket.

[0053] For further information, see Figure 6 The flip pad assembly 130 includes a convex pad body 131 and a flip pad block 132; the protruding end of the pad body 131 is arranged away from the flower basket, and is used to install the flip axis module 110, the back plate body 141 and the back plate reinforcement rib plate 142 of the flip back plate assembly 140, and the flip plate lower clamp assembly 160; the flip pad block 132 is installed on the upper surface of the main part of the pad body 131 to support the bottom of the silicon wafer flower basket; a mounting hole is opened on the main part of the pad body 131 for installing a flip position sensor 170.

[0054] The bottom surface of the raised portion of the pad body 131 of the flip pad assembly 130 is fixed to the flip axis of the flip axis module 110 through a flip adapter block.

[0055] The flipping mechanism 100 further includes a forward flipping blocking assembly 180 , which is in the form of a limiting plate, a buffer limiting column, a limiting pad, etc., and is installed at the front end of the transmission mechanism 200 .

[0056] Among them, the transmission mechanism 200 includes a transmission frame 210, a transmission drive chain belt module 220, a post-flipping buffer assembly 230 and a material transmission sensing assembly 240; the transmission chain belt of the transmission drive chain belt module 220 is arranged longitudinally along the transmission frame 210; the post-flipping buffer assembly 230 is arranged on the crossbeam of the transmission frame 210, and is used to buffer the flipping mechanism 100 arranged horizontally after flipping; the material transmission sensing assembly 240 is arranged on the outer side of the longitudinal beam of the transmission frame 210, and is used to detect whether there is a material basket on the transmission line.

[0057] See also Figure 7 The transmission mechanism 200 further includes a water receiving trough 250 and a transmission outer frame 260. The water receiving trough 250 is supported by the transmission outer frame 260 and arranged on the periphery of the transmission frame 210. This solution is used to receive waste water flowing down from the washed silicon wafers when the silicon wafer basket is full.

[0058] Furthermore, side baffles 270 are provided on both sides of the transport frame 210 along the longitudinal transport direction.

[0059] Among them, see Figure 8 The blocking mechanism 300 includes a blocking mounting base plate 310 , a blocking vertical plate 320 , a blocking plate 330 with a blocking protrusion 331 , a blocking driving assembly 340 and a blocking in-place monitoring assembly 350 .

[0060] Layout relationship: the blocking mounting base plate 310 is arranged on the crossbeam of the transmission mechanism 200, and is used to support the entire blocking mechanism 300; the bottoms of two parallel and spaced blocking vertical plates 320 are fixed to the blocking mounting base plate 310, one end of two parallel and spaced blocking plates 330 is installed to the blocking vertical plate 320 through a blocking support pivot 332, and the other end of the two parallel and spaced blocking plates 330 is pivotally connected to the end of the driving rod of the blocking driving assembly 340 through a blocking drive pivot 333, and the two sides of the shell of the blocking driver 341 of the blocking driving assembly 340 are pivotally connected to the blocking driver support block 342; the blocking in-position monitoring assembly 350 is installed under the blocking plate 330, and is used to monitor whether the silicon wafer basket is driven in place after blocking.

[0061] In a specific example, the blocking driver support block 342 is a bearing support seat.

[0062] In one example, corresponding to the installation of the blocking driver 341, a driver arrangement gap is opened on the blocking installation base plate 310, and two blocking driver support blocks 342 are arranged on both sides of the driver arrangement gap.

[0063] Blocking operation principle: When it is detected that there are too many flower baskets on the transmission mechanism 200, in order to control the working rhythm, the blocking mechanism 300 is started, the driving rod of the blocking driving assembly 340 is extended or retracted, and the blocking plate 330 with the blocking protrusion 331 is driven to rise or fall. The rising or falling of the blocking protrusion 331 realizes the blocking or release of the flower basket, thereby achieving the effect of stopping or releasing the flower basket transmission.

[0064] On the whole, the solution of the present application adopts a double-row streamline arrangement, that is, two silicon wafer basket transfer devices are arranged side by side to improve the overall work efficiency.

[0065] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A silicon wafer basket flipping and transporting device, characterized in that: The invention comprises a flipping mechanism (100), a transmission mechanism (200) and a blocking mechanism (300); the flipping mechanism (100) is arranged at one end of the transmission mechanism (200) and is used to flip the flower basket; the transmission mechanism (200) is arranged horizontally and is used to transmit the flower basket horizontally; the blocking mechanism (300) is arranged on the transmission line of the transmission mechanism (200) and is used to block and control the transmission of the flower basket; The flip mechanism (100) comprises a flip axis module (110), a flip driving module (120), a flip pad assembly (130), a flip back plate assembly (140) and a flip upper clamping assembly (150); the bottom of one end of the flip pad assembly (130) is fixedly connected to the flip axis module (110), the flip back plate assembly (140) is vertically fixed to the flip pad assembly (130), the flip upper clamping assembly (150) is arranged on the top surface and side surface of the flip back plate assembly (140), and the flip driving module (120) is connected to the flip axis module (110) or to the flip back plate assembly (140); The flip upper clamping assembly (150) comprises an upper clamping mounting block (151), an upper clamping driver (152), a clamping fixing block (153), a clamping connecting rod (154) and a double-headed clamping member (155). The bottom of the upper clamping driver (152) is connected to the top side of the back plate body (141) of the flip back plate assembly (140) through the upper clamping mounting block (151). The bottom of the clamping fixing block (153) is fixedly connected to the upper clamping driver (151). 2) on the shell or on the top side of the back plate (141); one end of the two clamping links (154) is pivotally connected to the top of the clamping fixing block (153), and the other end of the two clamping links (154) is pivotally connected to the middle of the double-headed clamping member (155); the double-headed clamping member (155) includes two forks, one fork is pivotally connected to the end of the driving piston rod of the upper clamping driver (152), and the other fork is arranged toward the direction of the basket to be turned over; The flip mechanism (100) further comprises a flap lower clamping jaw assembly (160), the flap lower clamping jaw assembly (160) comprising a lower clamping jaw (161) with a limiting portion and a clamping jaw driver (162), the front portion of the lower clamping jaw (161) extending toward the flip pad assembly (130), the rear portion of the lower clamping jaw (161) being connected to a driving movable end of a horizontally arranged clamping jaw driver (162), wherein the limiting portion of the lower clamping jaw (161) matches with a hoisting head or a positioning member of a flower basket; The flip pad assembly (130) comprises a convex pad body (131) and a flip pad block (132); the protruding end of the pad body (131) is arranged away from the flower basket and is used to install the flip axis module (110), the back plate body (141) and the back plate reinforcing rib plate (142) of the flip back plate assembly (140), and the flip plate lower clamping claw assembly (160); the flip pad block (132) is installed on the upper surface of the main body of the pad body (131) to support the bottom of the silicon wafer flower basket; and a mounting hole is provided on the main body of the pad body (131) to install a flip position sensor (170).

2. The silicon wafer basket flipping and transporting device according to claim 1, characterized in that: The transmission mechanism (200) comprises a transmission frame (210), a transmission drive chain belt module (220), a post-turnover buffer assembly (230) and a material transmission sensing assembly (240); the transmission chain belt of the transmission drive chain belt module (220) is arranged longitudinally along the transmission frame (210); the post-turnover buffer assembly (230) is arranged on a crossbeam of the transmission frame (210) and is used to buffer the horizontally arranged turning mechanism (100) after turning over; and the material transmission sensing assembly (240) is arranged outside the longitudinal beam of the transmission frame (210) and is used to detect whether there is a material basket on the transmission line.

3. The silicon wafer basket flipping and transporting device according to claim 2, characterized in that: The transmission mechanism (200) further comprises a water receiving trough (250) and a transmission outer frame (260); the water receiving trough (250) is supported by the transmission outer frame (260) and is arranged on the periphery of the transmission frame (210).

4. The silicon wafer basket flipping and transporting device according to claim 2, characterized in that: The blocking mechanism (300) comprises a blocking installation base plate (310), a blocking vertical plate (320), a blocking plate (330) with a blocking protrusion (331), a blocking drive assembly (340) and a blocking position monitoring assembly (350); the blocking installation base plate (310) is arranged on a crossbeam of a transmission mechanism (200) and is used to support the entire blocking mechanism (300); the bottoms of two blocking vertical plates (320) arranged in parallel and spaced apart are fixed to the blocking installation base plate (310); and the two blocking plates (330) arranged in parallel and spaced apart are fixed to the blocking installation base plate (310). One end of the blocking plate (320) is mounted to the blocking upright plate (320) via a blocking support pivot (332), the other ends of the two parallel and spaced blocking plates (330) are pivotally connected to the end of the driving rod of the blocking driving assembly (340) via a blocking driving pivot (333), and the two sides of the housing of the blocking driver (341) of the blocking driving assembly (340) are pivotally connected to the blocking driver support block (342); a blocking in-position monitoring assembly (350) is mounted below the blocking plate (330) and is used to monitor whether the silicon wafer basket is driven in place after being blocked.

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