Photoconductive switch detection system and method

Abstract

The application discloses a light guide switch detection system and a detection method. The light guide switch detection system comprises a signal synchronization unit, a laser and an electric pulse unit. The signal synchronization unit is used for generating a first synchronization control signal and a second synchronization control signal. The electric pulse unit is connected with the signal synchronization unit and between a low-voltage signal and a high-voltage signal. The electric pulse unit is used for generating a first electric pulse signal according to the first synchronization control signal and the high-voltage signal. The laser is connected with the signal synchronization unit. The laser is used for generating a laser signal according to the second synchronization control signal. The light guide switch to be detected is connected with the electric pulse unit and the laser respectively. The light guide switch to be detected is used for generating a third electric pulse signal according to the first electric pulse signal and the laser signal. The first electric pulse signal and the laser signal reach the corresponding peak values at the same time. The performance of the light guide switch is fully detected through photoelectric synchronization.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of photoconductive switch detection, and particularly relates to a photoconductive switch detection system and a detection method. BACKGROUND

[0002] Wide bandgap III-nitride has developed into one of the most important semiconductor material systems, GaN has excellent characteristics such as wide bandgap, high thermal conductivity, high electron mobility, high breakdown field, and the semi-insulating GaN semiconductor material with these characteristics has strong advantages in photoconductive semiconductor switch (PCSS) applications.

[0003] The photoconductive switch has characteristics such as high power, low jitter, high-speed switching time and photoelectric isolation, and the photoconductive switch generates an ultra-short electrical pulse signal under laser irradiation, and is widely used in high-tech fields such as communication, radar, high-current technology and terahertz. The working principle of the photoconductive switch generating an ultrafast electrical pulse: an ultra-short laser pulse is used to irradiate the photoconductive switch to generate photo-generated carriers in the chip, so that the switch is turned on, and after the light pulse stops, the carriers disappear rapidly to turn off the switch. Therefore, the performance detection of the photoconductive switch is crucial.

[0004] Figure 1 It is a schematic diagram of the photoconductive switch detection system in the prior art, comprising a first resistor R1', a second resistor R2', a first capacitor C1', a photoconductive switch, a bias voltage source V and a laser source Laser; wherein the first end of the first resistor R1' is connected with the positive pole of the voltage source V DC , the second end is connected with the first end of the first capacitor C1' and the first end of the photoconductive switch respectively, the second end of the first capacitor C1' is connected with the negative pole of the voltage source V DC , the second end of the photoconductive switch is connected with the negative pole of the voltage source V DC through the second resistor R2', and the bias voltage source V is connected in parallel between the two ends of the second resistor R2'; the photoconductive switch detection circuit in the prior art is simple, the bias voltage source V limits the output voltage of the photoconductive switch, the peak value of the electrical pulse output by the photoconductive switch is low, and the bias voltage source V and the voltage source V DC are both direct current voltages, which results in that the detected withstand voltage of the photoconductive switch is lower than the theoretical withstand voltage.

[0005] Therefore, in view of the above technical problems, it is necessary to provide a photoconductive switch detection system and a detection method. SUMMARY

[0006] The purpose of the present application is to provide a photoconductive switch detection system and a detection method, which can solve the technical problems of low output voltage of the photoconductive switch and insufficient performance detection of the photoconductive switch in the prior art.

[0007] To achieve the above object, one embodiment of the present application provides a light guide switch detection system, comprising a signal synchronization unit, a laser and an electric pulse unit, wherein,

[0008] The signal synchronization unit is configured to generate a first synchronization control signal and a second synchronization control signal;

[0009] The electric pulse unit is connected to the signal synchronization unit and between a low voltage signal and a high voltage signal, and is configured to generate a first electric pulse signal according to the first synchronization control signal and the high voltage signal;

[0010] The laser is connected to the signal synchronization unit, and is configured to generate a laser signal according to the second synchronization control signal;

[0011] The light guide switch to be detected is connected to the electric pulse unit and the laser respectively, and is configured to generate a third electric pulse signal according to the first electric pulse signal and the laser signal;

[0012] The first electric pulse signal and the laser signal reach a corresponding peak value at the same time.

[0013] In one or more embodiments of the present application, the detection system further comprises a waveform detector and an oscilloscope, wherein,

[0014] The waveform detector is connected to the light guide switch to be detected, and is configured to generate a fourth electric pulse signal according to a laser reflection signal reflected from the light guide switch to be detected;

[0015] The oscilloscope is connected to the light guide switch to be detected and the waveform detector respectively, and is configured to display waveforms of the third electric pulse signal and the fourth electric pulse signal.

[0016] In one or more embodiments of the present application, the signal synchronization unit comprises a signal generator and a synchronizer, wherein,

[0017] The signal generator is configured to generate a pulse signal;

[0018] The synchronizer is connected to the signal generator, and is configured to generate the first synchronization control signal and the second synchronization control signal according to the pulse signal.

[0019] In one or more embodiments of the present application, the electric pulse unit comprises a driving module, a pulse module and a first resistor, wherein,

[0020] The driving module is connected to the first synchronization control signal and the low voltage signal respectively, and is configured to generate a driving signal according to the low voltage signal and the first synchronization control signal;

[0021] The pulse module is connected with the driving module and connected with the high-voltage signal through a first resistor, and the pulse module is used for generating a first electric pulse signal according to the driving signal and the high-voltage signal.

[0022] In one or more embodiments of the present application, the detection system further comprises a voltage division energy storage unit connected with the first electric pulse signal, and the voltage division energy storage unit is used for generating a second electric pulse signal according to the first electric pulse signal, and the to-be-detected photoconductive switch generates a third electric pulse signal according to the second electric pulse signal and the laser signal.

[0023] In one or more embodiments of the present application, the voltage division energy storage unit comprises a second resistor and a first capacitor, wherein,

[0024] The first end of the second resistor is connected with the first electric pulse signal;

[0025] The first end of the first capacitor is connected with the second end of the second resistor, the second electric pulse signal and the oscilloscope respectively, and the second end of the first capacitor is connected with a reference voltage.

[0026] In another aspect of the present application, a photoconductive switch detection method is provided, and the detection method comprises the following steps:

[0027] A first synchronization control signal and a second synchronization control signal are generated, a first electric pulse signal is generated according to the first synchronization control signal and a high-voltage signal, and the second synchronization control signal is applied to a laser to generate a laser signal;

[0028] It is judged whether the first electric pulse signal and the laser signal reach corresponding peak values at the same time, if yes, the to-be-detected photoconductive switch is detected, and if not, the first synchronization control signal and the second synchronization control signal are adjusted;

[0029] The first electric pulse signal and the laser signal are applied to the to-be-detected photoconductive switch, and in the case that the first electric pulse signal and the laser signal reach corresponding peak values at the same time, an output voltage signal and / or a breakdown voltage of the to-be-detected photoconductive switch are detected.

[0030] In one or more embodiments of the present application, whether the first electric pulse signal and the laser signal reach corresponding peak values at the same time is specifically:

[0031] The waveforms of a third electric pulse signal output by the to-be-detected photoconductive switch and a laser reflection signal reflected from the to-be-detected photoconductive switch are obtained, and it is judged whether the two waveforms reach corresponding peak values at the same time.

[0032] In one or more embodiments of the present application, the detection method further comprises:

[0033] In the case that the first electric pulse signal and the laser signal reach the corresponding peak values at the same time, a third electric pulse signal is generated according to the second electric pulse signal converted from the first electric pulse signal and the laser signal, and the third electric pulse signal is an output voltage signal of the to-be-tested photoconductive switch.

[0034] In one or more embodiments of the present application, the detection method further comprises:

[0035] In the case that the first electric pulse signal and the laser signal reach the corresponding peak values at the same time, the high-voltage signal is increased until the to-be-tested photoconductive switch is broken down, and a second electric pulse signal input to the to-be-tested photoconductive switch is recorded, and when the to-be-tested photoconductive switch is broken down, the voltage value of the second electric pulse signal is the breakdown voltage of the to-be-tested photoconductive switch.

[0036] Compared with the prior art, the photoconductive switch detection system and the detection method can control the first electric pulse signal and the laser signal to reach the corresponding peak values at the same time through the signal synchronization unit to realize photoelectric synchronization, and compared with the photoconductive switch which is turned on by a direct current voltage, the output voltage signal of the photoconductive switch is stronger after realizing photoelectric synchronization under the pulse voltage, the withstand voltage value of the photoconductive switch is higher because the pulse voltage is used as the input of the photoconductive switch, the detection result is closer to the theoretical value of the photoconductive switch, and the performance of the photoconductive switch can be fully detected. BRIEF DESCRIPTION OF DRAWINGS

[0037] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments described in the present application, and other drawings can be obtained by those skilled in the art without creative labor on the basis of these drawings.

[0038] Figure 1 It is a circuit schematic diagram of the photoconductive switch detection system in the prior art;

[0039] Figure 2 It is a schematic diagram of the photoconductive switch detection system in an embodiment of the present application;

[0040] Figure 3 It is a timing diagram of the synchronization of the optical pulse and the electric pulse in an embodiment of the present application;

[0041] Figure 4 It is a voltage-time curve diagram of the optical pulse and the electric pulse in an embodiment of the present application;

[0042] Figure 5 It is a voltage-time comparison curve diagram of the present application and the prior art detection system. DETAILED DESCRIPTION

[0043] To enable those skilled in the art to better understand the technical solutions of this invention, the technical solutions of the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are merely some embodiments of this invention, and not all embodiments. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of this invention.

[0044] like Figure 1 As shown, this is the detection circuit for a photoconductive switch under test in the prior art, which uses a DC bias voltage source V and a voltage source V. DC A DC voltage is provided to the photoconductive switch 40 under test, and a laser source is used to illuminate the photoconductive switch 40 under test to provide a laser signal, thereby detecting the output voltage signal of the photoconductive switch 40 under test and / or its breakdown voltage.

[0045] As described in the background section, the bias voltage source V limits the output voltage of the photoconductive switch 40 under test, resulting in a low peak value for the output voltage signal of the photoconductive switch 40. Furthermore, the bias voltage source V and the voltage source V... DC All voltages are DC voltages, and the tested withstand voltage of the photoconductive switch 40 is lower than the theoretical withstand voltage.

[0046] In response to the above technical problems, such as Figure 2 As shown, the present invention provides a photoconductive switch detection system, comprising: a signal synchronization unit 10, a laser 20, and an electrical pulse unit 30; wherein,

[0047] Signal synchronization unit 10 is used to generate a first synchronization control signal CH1 and a second synchronization control signal CH2;

[0048] The electrical pulse unit 30 is connected to the signal synchronization unit 10 and is connected between the low voltage signal LV and the high voltage signal HV. The electrical pulse unit 30 is used to generate a first electrical pulse signal E1 according to the first synchronization control signal CH1 and the high voltage signal HV.

[0049] Laser 20 is connected to signal synchronization unit 10, and laser 20 is used to generate laser signal according to the second synchronization control signal CH2;

[0050] The photoconductive switch 40 under test is connected to the electrical pulse unit 30 and the laser 20 respectively. The photoconductive switch 40 under test is used to generate a third electrical pulse signal E3 according to the first electrical pulse signal E1 and the laser signal.

[0051] In this process, the first electrical pulse signal E1 and the laser signal both reach their corresponding peak values ​​at the same time.

[0052] Specifically, the high voltage signal HV is converted into the first electric pulse signal E1 by the electric pulse unit 30, the first electric pulse signal E1 is used as the electric signal for turning on the light guide switch 40 to be tested, the laser signal generated by the laser 20 according to the second synchronization control signal CH2 is used as the optical signal for turning on the light guide switch 40 to be tested, and the photoelectric synchronization is realized by adjusting the first electric pulse signal E1 and the laser signal to reach the corresponding peak value at the same time through the signal synchronization unit 10, so as to fully exert the performance of the light guide switch 40 to be tested.

[0053] In the embodiment, the detection system further comprises a waveform detector 50 and an oscilloscope 60, wherein,

[0054] The waveform detector 50 is connected to the light guide switch 40 to be tested, and the waveform detector 50 is used to generate the fourth electric pulse signal E4 according to the reflected laser signal reflected from the light guide switch 40 to be tested;

[0055] The oscilloscope 60 is connected to the light guide switch 40 to be tested and the waveform detector 50 respectively, and the oscilloscope 60 is used to display the waveforms of the third electric pulse signal E3 and the fourth electric pulse signal E4.

[0056] Specifically, in order to determine whether the first electric pulse signal E1 and the laser signal reach the corresponding peak value at the same time, the waveform detector 50 generates the fourth electric pulse signal E4 according to the reflected laser signal reflected from the light guide switch 40 to be tested, the waveforms of the third electric pulse signal E3 and the fourth electric pulse signal E4 generated by the light guide switch 40 to be tested are displayed on the oscilloscope 60, the first synchronization control signal CH1 and the second synchronization control signal CH2 are adjusted through the synchronizer 102, and the photoelectric synchronization of the first electric pulse signal E1 and the laser signal is ensured.

[0057] In the embodiment, the signal synchronization unit 10 comprises a signal generator 101 and a synchronizer 102, wherein,

[0058] The signal generator 101 is used to generate the pulse signal;

[0059] The synchronizer 102 is connected to the signal generator 101, and the synchronizer 102 is used to generate the first synchronization control signal CH1 and the second synchronization control signal CH2 according to the pulse signal.

[0060] In the embodiment, the electric pulse unit 30 comprises a driving module 301 and a pulse module 302, wherein,

[0061] The driving module 301 is connected to the first synchronization control signal CH1 and the low voltage signal LV respectively, and the driving module 301 is used to generate the driving signal according to the low voltage signal LV and the first synchronization control signal CH1;

[0062] The pulse module 302 is connected with the driving module 301 and connected with the high voltage signal HV through a first resistor, and the pulse module 302 is used for generating a first electric pulse signal E1 according to the driving signal and the high voltage signal HV.

[0063] Specifically, the driving module 301 generates a driving signal according to the first synchronization control signal CH1 under the driving of the low voltage signal LV, and the pulse module 302 converts the high voltage signal HV into the first electric pulse signal E1 under the control of the driving signal, in the embodiment, the first electric pulse signal E1 is used as an original signal of an electric signal for turning on the to-be-tested photoconductive switch 40, the low voltage signal LV is 15V, and the high voltage signal HV is a direct current high voltage signal having a predetermined initial value, which can be adjusted according to actual detection requirements.

[0064] In the embodiment, the detection system further comprises a voltage division and energy storage unit connected with the electric pulse unit 30, and the voltage division and energy storage unit is used for generating a second electric pulse signal E2 according to the first electric pulse signal E1, and the to-be-tested photoconductive switch 40 generates a third electric pulse signal E3 according to the second electric pulse signal E2 and a laser signal.

[0065] Further, the voltage division and energy storage unit comprises a first capacitor C1 and a second resistor R2, wherein,

[0066] The first end of the second resistor R2 is connected with the first electric pulse signal E1;

[0067] The first end of the first capacitor C1 is connected with the second end of the second resistor R2, the second electric pulse signal E2 and an oscilloscope 60 respectively, and the second end of the first capacitor C1 is connected with a reference voltage.

[0068] The second resistor R2 is used for reducing the input first electric pulse signal E1 to a predetermined level and storing on the first capacitor C1 to generate the second electric pulse signal E2 which is stable and meets the application range of the to-be-tested photoconductive switch 40.

[0069] The application further provides a photoconductive switch detection method, and the test method comprises the following steps:

[0070] The first synchronization control signal CH1 and the second synchronization control signal CH2 are generated, the first electric pulse signal E1 is generated according to the first synchronization control signal CH1 and the high voltage signal HV, and the second synchronization control signal CH2 is applied to the laser 30 to generate a laser signal;

[0071] It is judged whether the first electric pulse signal E1 and the laser signal reach corresponding peak values at the same time, if yes, the to-be-tested photoconductive switch 40 is detected, and if not, the first synchronization control signal CH1 and the second synchronization control signal CH2 are continuously adjusted.

[0072] The first electric pulse signal E1 and the laser signal are applied to the to-be-tested photoconductive switch 40, and the output voltage signal and / or the breakdown voltage of the to-be-tested photoconductive switch 40 are detected in the case that the first electric pulse signal E1 and the laser signal reach the corresponding peak values at the same time.

[0073] As shown in FIG. 1, the first electric pulse signal E1 and the laser signal are applied to the to-be-tested photoconductive switch 40, and the output voltage signal and / or the breakdown voltage of the to-be-tested photoconductive switch 40 are detected in the case that the first electric pulse signal E1 and the laser signal reach the corresponding peak values at the same time. Figure 3 and Figure 4 As shown in FIG. 1, the first electric pulse signal E1 and the laser signal are applied to the to-be-tested photoconductive switch 40, and the output voltage signal and / or the breakdown voltage of the to-be-tested photoconductive switch 40 are detected in the case that the first electric pulse signal E1 and the laser signal reach the corresponding peak values at the same time.

[0074] In the embodiment, the judgment of whether the first electric pulse signal E1 and the laser signal reach the corresponding peak values at the same time is specifically as follows:

[0075] The waveforms of the third electric pulse signal E3 and the laser reflection signal reflected from the to-be-tested photoconductive switch 40 are obtained, and it is judged whether the two waveforms reach the corresponding peak values at the same time.

[0076] The third electric pulse signal E3 is the output voltage signal of the to-be-tested photoconductive switch 40.

[0077] The to-be-tested photoconductive switch 40 outputs the third electric pulse signal E3 according to the second electric pulse signal E2 and the laser signal, the wave probe 50 detects the laser signal reflected by the photoconductive switch, and outputs the fourth electric pulse signal E4, and the oscilloscope 60 receives the third electric pulse signal E3 and the fourth electric pulse signal E4 and displays the waveforms of the corresponding signals. The voltage dividing and energy storage unit receives the first electric pulse signal E1 and outputs the second electric pulse signal E2. Therefore, in the embodiment, the waveforms of the third electric pulse signal E3 and the fourth electric pulse signal E4 on the oscilloscope 60 are used to judge whether the second electric pulse signal E2 and the laser signal input to the to-be-tested photoconductive switch 40 reach the peak values of the corresponding signals at the same time. When the second electric pulse signal E2 and the laser signal output by the to-be-tested photoconductive switch 40 do not realize photoelectric synchronization, the delay time of the first synchronization control signal CH1 and the second synchronization control signal CH2 is adjusted by the synchronizer 102 to ensure photoelectric synchronization.

[0078] In the embodiment, the detection method of the output voltage of the to-be-tested photoconductive switch 40 includes:

[0079] In the case that the first electric pulse signal E1 and the laser signal reach the corresponding peak values at the same time, the third electric pulse signal E3 is generated according to the second electric pulse signal E2 converted from the first electric pulse signal E1 and the laser signal, and the third electric pulse signal E3 is the output voltage signal of the to-be-tested photoconductive switch 40.

[0080] As shown in the figure, the electric pulse output by the to-be-tested photoconductive switch 40 under photoelectric synchronization is greater than the electric pulse output under direct current voltage, the to-be-tested photoconductive switch 40 has a higher output voltage under the condition of photoelectric synchronization, and the detection of the to-be-tested photoconductive switch 40 is more complete. Figure 5

[0081] In the embodiment, the detection method of the withstand voltage value of the to-be-tested photoconductive switch 40 further comprises:

[0082] In the case that the first electric pulse signal E1 and the laser signal reach the corresponding peak values at the same time, the high voltage signal HV is increased until the to-be-tested photoconductive switch 40 is broken down, and the second electric pulse signal E2 input to the to-be-tested photoconductive switch 40 is recorded, when the to-be-tested photoconductive switch 40 is broken down, the voltage value of the second electric pulse signal E2 is the breakdown voltage of the to-be-tested photoconductive switch 40.

[0083] Among them, compared with the direct current voltage in the prior art, the output voltage of the second electric pulse signal E2 input to the to-be-tested photoconductive switch 40 has a higher instantaneous peak value, the direct current voltage is continuous and stable, so the to-be-tested photoconductive switch 40 needs to have higher insulation and withstand voltage performance to resist the voltage action for a long time, and the detected withstand voltage value is lower than the theoretical withstand voltage value; but under the pulse voltage, even if the voltage peak value is high, after adjusting the photoelectric synchronization, because the pulse duration is very short, the to-be-tested photoconductive switch 40 can withstand this instantaneous voltage impact, and the performance of the to-be-tested photoconductive switch 40 can be fully played, and the detected withstand voltage value is closer to the theoretical withstand voltage value of the to-be-tested photoconductive switch 40.

[0084] It is apparent for those skilled in the art that the present application is not limited to the details of the above-described exemplary embodiments, but can be implemented in other concrete forms without departing from the spirit or essential characteristics of the present application. Therefore, the embodiments should be considered in all respects as illustrative and not restrictive, the scope of the present application being defined by the appended claims rather than the above description, and it is intended to embrace all changes and modifications that fall within the meaning and scope of equivalents of the claims. Any reference signs in the claims should not be construed as limiting the claims to which they belong.

[0085] ​Furthermore, it should be understood that although the specification is described in terms of embodiments, not every embodiment includes every feature or implementation described herein. The specification can include implicit combinations of explicitly mentioned features and / or implicit combinations of implicitly mentioned features. Such combinations are also expressly included within the scope of the specification and an embodiment.

Claims

1. A photoconductive switch detection system, characterized by, The light guide switch detection system comprises a signal synchronization unit, a laser, a waveform detector, an oscilloscope, an electric pulse unit and a voltage division energy storage unit, wherein The signal synchronization unit is configured to generate a first synchronization control signal and a second synchronization control signal; The electric pulse unit is connected to the signal synchronization unit and between the low-voltage signal and the high-voltage signal, and is configured to generate a first electric pulse signal according to the first synchronization control signal and the high-voltage signal; The laser is connected to the signal synchronization unit, and is configured to generate a laser signal according to the second synchronization control signal; The to-be-detected light guide switch is connected to the electric pulse unit and the laser respectively, and is configured to generate a third electric pulse signal according to the first electric pulse signal and the laser signal; The first electric pulse signal and the laser signal reach the corresponding peak values at the same time. The voltage division energy storage unit is connected to the electric pulse unit, and is configured to generate a second electric pulse signal according to the first electric pulse signal, and the to-be-detected light guide switch generates a third electric pulse signal according to the second electric pulse signal and the laser signal; the voltage division energy storage unit comprises a first capacitor and a second resistor, wherein the first end of the second resistor is connected to the first electric pulse signal; the first end of the first capacitor is connected to the second end of the second resistor, the second electric pulse signal and the oscilloscope respectively, and the second end of the first capacitor is connected to a reference voltage; The waveform detector is connected to the to-be-detected light guide switch, and is configured to generate a fourth electric pulse signal according to a laser reflection signal reflected from the to-be-detected light guide switch; The oscilloscope is connected to the to-be-detected light guide switch and the waveform detector respectively, and is configured to display the waveforms of the third electric pulse signal and the fourth electric pulse signal.

2. The photoconductive switch detection system of claim 1, wherein, The signal synchronization unit comprises a signal generator and a synchronizer, wherein The signal generator is configured to generate a pulse signal; The synchronizer is connected to the signal generator, and is configured to generate a first synchronization control signal and a second synchronization control signal according to the pulse signal.

3. The photoconductive switch detection system of claim 1, wherein, The electric pulse unit comprises a driving module and a pulse module, wherein The driving module is connected to the first synchronization control signal and the low-voltage signal respectively, and is configured to generate a driving signal according to the low-voltage signal and the first synchronization control signal; The pulse module is connected to the driving module and connected to the high-voltage signal through a first resistor, and is configured to generate a first electric pulse signal according to the driving signal and the high-voltage signal.

4. A photoconductive switch detection method based on the photoconductive switch detection system according to any one of claims 1 to 3, characterized by, The detection method comprises the following steps: generating a first synchronization control signal and a second synchronization control signal, generating a first electric pulse signal according to the first synchronization control signal and a high-voltage signal, and generating a laser signal after the second synchronization control signal is applied to the laser; determining whether the first electric pulse signal and the laser signal reach the corresponding peak values at the same time, if yes, detecting the to-be-detected light guide switch, and if not, adjusting the first synchronization control signal and the second synchronization control signal; applying the first electric pulse signal and the laser signal to the to-be-detected light guide switch, and detecting the output voltage signal and / or the breakdown voltage of the to-be-detected light guide switch when the first electric pulse signal and the laser signal reach the corresponding peak values at the same time.

5. The photoconductive switch detection method of claim 4, wherein, The judgment of whether the first electric pulse signal and the laser signal reach corresponding peaks at the same time specifically comprises: Obtaining waveforms of a third electric pulse signal output by the to-be-tested photoconductive switch and a laser reflection signal reflected from the to-be-tested photoconductive switch, and judging whether the two waveforms reach corresponding peaks at the same time.

6. The photoconductive switch detection method of claim 4, wherein, The detection method further comprises: In the case that the first electric pulse signal and the laser signal reach corresponding peaks at the same time, a third electric pulse signal is generated according to a second electric pulse signal converted from the first electric pulse signal and the laser signal, and the third electric pulse signal is an output voltage signal of the to-be-tested photoconductive switch.

7. The photoconductive switch detection method of claim 6, wherein, The detection method further comprises: In the case that the first electric pulse signal and the laser signal reach corresponding peaks at the same time, the high-voltage signal is increased until the to-be-tested photoconductive switch is broken down, and a second electric pulse signal input to the to-be-tested photoconductive switch is recorded, wherein when the to-be-tested photoconductive switch is broken down, a voltage value of the second electric pulse signal is a breakdown voltage of the to-be-tested photoconductive switch.

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