Flushing mechanism for porous ceramic vacuum chuck and flushing device

Abstract

The application discloses a flushing mechanism and a flushing device for a porous ceramic vacuum chuck. The flushing mechanism comprises a support plate with a mounting hole, a flushing piece with a butt joint cavity, a pipeline and a high-pressure pump located in the butt joint cavity, a pressing assembly for fixing the porous ceramic vacuum chuck relative to the support plate, a pressing disc assembly located above the flushing piece and comprising a pressing disc, a movable strip and a driving element, the pressing disc being provided with a radial strip-shaped notch, the movable strip being slidably arranged on the pressing disc and provided with a through hole, and the driving element being capable of moving the through hole along the length direction of the strip-shaped notch, a rotating element located above the pressing disc assembly, and an extension element located above the rotating element. The flushing medium of the application can be sprayed out only from the through hole of the movable strip. Since the area of the through hole is relatively small relative to the whole porous ceramic disc, the impurities in the channel corresponding to the through hole can be better flushed out, and the channel of the porous ceramic disc which is seriously blocked can be dredged.

Description

Technical Field

[0001] This invention relates to the field of rinsing equipment, and more specifically to a rinsing mechanism and rinsing device for porous ceramic vacuum suction cups. Background Technology

[0002] Porous ceramic vacuum chucks are commonly used in the field of semiconductor CMP thinning machines, such as Figure 1 and Figure 2 As shown, the porous ceramic vacuum chuck 1 includes a porous ceramic disk 12 and a substrate 11 (the substrate 11 can be alumina). The substrate 11 is connected to the CMP equipment and its bottom vent 111 is directly connected to the porous ceramic disk 12. The wafer is placed on the end face of the porous ceramic disk 12 and the vent 111 starts the negative pressure. Since the porous ceramic disk 12 has a loose and uniform texture, it can release the negative pressure evenly, thereby adsorbing the wafer.

[0003] After a certain period of use, the porous ceramic vacuum suction cup needs to be rinsed to remove impurities from the porous ceramic disc. Currently, during cleaning, the high-pressure cleaning medium passes entirely through the porous ceramic disc. However, when some channels in the disc are severely blocked, these blocked channels are difficult to clean thoroughly because high-pressure water vapor can more easily escape through unblocked channels. Therefore, the overall cleaning effect is generally poor. Summary of the Invention

[0004] To address the aforementioned problems, this invention proposes a rinsing mechanism and rinsing device for porous ceramic vacuum suction cups.

[0005] The technical solution adopted in this invention is as follows:

[0006] A rinsing mechanism for a porous ceramic vacuum suction cup, the porous ceramic vacuum suction cup comprising a substrate and a porous ceramic disk fixed on the substrate, wherein a first end face of the porous ceramic disk protrudes from the alumina ceramic substrate, and the rinsing mechanism includes:

[0007] Support plate with mounting holes;

[0008] The flushing component has a mating cavity located in the mounting hole, a pipe communicating with the mating cavity, and a high-pressure pump disposed on the pipe. The opening of the mating cavity is used to seal and engage with one end of the substrate facing away from the first end face.

[0009] The clamping assembly is fixed to the support plate and is used to clamp the substrate so that the porous ceramic vacuum suction cup is fixed relative to the support plate;

[0010] The pressure plate assembly is located directly above the rinsing component. The pressure plate assembly has a pressure plate, a movable bar, and a driving element. The pressure plate has a radially arranged strip-shaped notch. The movable bar is slidably disposed on the pressure plate. The lower end face of the movable bar is flush with the lower end face of the pressure plate. The movable bar has a through hole. The driving element is used to drive the movable bar to move, so that the through hole can reciprocate along the length direction of the strip-shaped notch.

[0011] A rotating element, located above the pressure plate assembly, is used to drive the pressure plate assembly to rotate;

[0012] A telescopic element, located above the rotating element, is used to drive the rotating element and the pressure plate assembly to move up and down, so that the pressure plate and the movable strip press against the first end face of the porous ceramic disc.

[0013] The flushing mechanism of this application uses a clamping assembly to seal the mating cavity between the base and the flushing component. This allows the flushing medium, delivered through a pipeline and driven by a high-pressure pump, to flush the porous ceramic disc. The pressure plate of this application presses against the first end face (upper end face) of the porous ceramic disc. During flushing, due to the obstruction of the pressure plate, the flushing medium can only be ejected from the through-holes of the movable strip. Because the through-holes have a relatively small area compared to the entire porous ceramic disc, they can better flush out impurities from the channels corresponding to the through-holes. A driving element moves the movable strip, causing the through-holes to reciprocate along the length of the strip notch, completing one radial cleaning cycle. Then, a rotating element rotates the strip by a set angle, causing the through-holes to move at least once more along the length of the strip notch, completing the cleaning of another area. The entire cleaning process is completed when the pressure plate rotates 360°. This cleaning method of this application provides excellent cleaning results, especially effective in clearing severely clogged channels in porous ceramic discs.

[0014] In actual use, a specific rinsing method is as follows:

[0015] Place the porous ceramic vacuum suction cup on the support plate, aligning the end of the substrate facing away from the first end face with the docking cavity, and then use the clamping assembly to fix the porous ceramic vacuum suction cup relative to the support plate.

[0016] For initial flushing, the flushing medium (water, water-vapor mixture, or cleaning fluid, etc.) is introduced into the pipeline and pressurized by the high-pressure pump before entering the docking chamber. After passing through the substrate, it enters the porous ceramic disc and is discharged from the first end face of the porous ceramic disc.

[0017] The telescopic element drives the rotating element and the pressure plate assembly to move downward, so that the pressure plate and the movable bar are pressed against the first end face of the porous ceramic disc;

[0018] Point-by-point cleaning: The flushing medium is introduced into the pipeline and pressurized by the high-pressure pump before entering the docking chamber. After passing through the substrate, it enters the porous ceramic disc and is ejected from the through hole of the movable strip. The driving element drives the movable strip to move, so that the through hole can move along the length of the strip notch to complete at least one radial cleaning. Then, the rotating element rotates the disc by a set angle, so that the through hole can move along the length of the strip notch at least once more. After completion, the above operation is repeated until the disc rotates 360°.

[0019] In one embodiment of the present invention, the clamping assembly includes:

[0020] The pressure plate has an arc-shaped pressing part, which is used to press the upper end face of the substrate. When the pressure plate is used in conjunction with the porous ceramic vacuum suction cup, the upper end face of the arc-shaped pressing part is lower than the first end face of the porous ceramic disk, or the upper end face of the arc-shaped pressing part is flush with the first end face of the porous ceramic disk.

[0021] Fasteners are used to secure the pressure plate to the support plate.

[0022] The arc-shaped pressure section design increases the contact area with the substrate, allowing for better fixation of the substrate. The upper surface of the arc-shaped pressure section is lower than or flush with the first end face of the porous ceramic disc. This design prevents interference between the moving strip and the arc-shaped pressure section during cleaning.

[0023] In one embodiment of the present invention, the pressure plate has a countersunk hole, the fastener is an internal hex screw, and the pressure plate is fixed to the support plate by the internal hex screw passing through the countersunk hole.

[0024] This design prevents the moving strip from interfering with the fasteners during cleaning.

[0025] In one embodiment of the present invention, the porous ceramic disk and the substrate form a circular step, and the arc-shaped pressing part is adapted to the circular step.

[0026] The combination of the curved pressure section and the circular step facilitates quick positioning and makes installation faster.

[0027] In one embodiment of the present invention, the strip-shaped notch passes through the center of the pressure plate.

[0028] In one embodiment of the present invention, the strip-shaped notch includes two opposing sidewalls and a connecting wall connecting the two sidewalls. The pressure plate also has a radially arranged strip-shaped groove, one end of which extends to the edge of the pressure plate and the other end extends to the connecting wall of the strip-shaped notch. The direction of the groove is the same as the length direction of the strip-shaped notch. The first end of the movable strip is located at the strip-shaped notch, the through hole is located at the strip-shaped notch, and the second end of the movable strip passes through the groove and is located outside the pressure plate.

[0029] The portion of the movable bar furthest from the slide groove has a rack and pinion structure;

[0030] The driving element includes a drive motor fixed relative to the pressure plate and a drive gear driven by the drive motor. The drive gear meshes with the rack structure, and the drive motor can drive the movable bar to move back and forth when it rotates.

[0031] In one embodiment of the present invention, the sidewall of the strip-shaped notch has an anti-detachment groove, and the sidewall of the movable strip has an anti-detachment slider that cooperates with the anti-detachment groove.

[0032] In one embodiment of the present invention, the rotating element is a motor assembly.

[0033] In one embodiment of the present invention, the telescopic element is an electric push rod or a cylinder.

[0034] This application also discloses a rinsing device, including the rinsing mechanism for porous ceramic vacuum suction cups described above.

[0035] The beneficial effects of this invention are as follows: During operation, the flushing mechanism of this application uses a clamping assembly to seal the mating cavity between the base and the flushing component. This allows the flushing medium, delivered through the pipeline, to flush the porous ceramic disc under the action of a high-pressure pump. The pressure plate of this application presses against the first end face (upper end face) of the porous ceramic disc. During flushing, due to the obstruction of the pressure plate, the flushing medium can only be ejected from the through-holes of the movable strip. Because the through-holes have a relatively small area compared to the entire porous ceramic disc, they can better flush out impurities from the channels corresponding to the through-holes. The driving element can move the movable strip, causing the through-holes to reciprocate along the length of the strip notch, thus completing one radial cleaning cycle. Then, by rotating the element at a set angle, the through-holes can move at least once more along the length of the strip notch, completing the cleaning of another area. The entire cleaning process is completed when the pressure plate rotates 360°. This cleaning method of this application provides excellent cleaning results, especially effective in clearing severely clogged channels in porous ceramic discs. Attached Figure Description

[0036] Figure 1 This is a schematic diagram of a porous ceramic vacuum chuck;

[0037] Figure 2 This is a schematic diagram of a porous ceramic vacuum chuck from another angle;

[0038] Figure 3 This is a schematic diagram of the rinsing mechanism;

[0039] Figure 4 This is a schematic diagram of a porous ceramic vacuum suction cup installed on a rinsing mechanism;

[0040] Figure 5 yes Figure 4 Enlarged view of point A in the middle;

[0041] Figure 6 This is a schematic diagram showing the pressure plate assembly after it moves down and comes into contact with the porous ceramic disc;

[0042] Figure 7 This is a diagram showing the movement of the slider after it has moved a certain distance.

[0043] Figure 8 This is a schematic diagram showing the pressure plate after it has rotated a certain angle;

[0044] Figure 9 This is a partial schematic diagram of the pressure plate;

[0045] Figure 10 This is a diagram of the activity bar.

[0046] The labels for the attached figures are as follows:

[0047] 1. Porous ceramic vacuum suction cup; 11. Substrate; 111. Vent hole; 12. Porous ceramic disc; 121. First end face; 13. Circular step; 2. Support plate; 21. Mounting hole; 3. Flushing component; 31. Docking cavity; 32. Pipe; 33. High-pressure pump; 4. Clamping assembly; 41. Pressure plate; 411. Arc-shaped pressure part; 412. Countersunk hole; 42. Fastener; 5. Pressure plate assembly; 51. Pressure plate; 511. Strip notch; 5111. Connecting wall; 5112. Anti-detachment groove; 512. Slide groove; 52. Movable strip; 521. Through hole; 522. Anti-detachment slider; 523. Rack and pinion structure; 53. Drive element; 531. Drive motor; 532. Drive gear; 6. Rotating element; 7. Telescopic element. Detailed Implementation

[0048] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0049] In the description of this application, it should be noted that the terms "inner" and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product is in use. They are used only for the convenience of describing this application and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0050] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "setup" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0051] The present invention will now be described in detail with reference to the accompanying drawings.

[0052] like Figures 1-10 As shown, a rinsing mechanism for a porous ceramic vacuum suction cup 1 is disclosed. The porous ceramic vacuum suction cup 1 includes a base 11 and a porous ceramic disk 12 fixed on the base 11. The first end face 121 of the porous ceramic disk 12 protrudes from the alumina ceramic base 11. The rinsing mechanism includes:

[0053] Support plate 2 has mounting holes 21;

[0054] The flushing component 3 has a docking cavity 31 located in the mounting hole 21, a pipe 32 communicating with the docking cavity 31, and a high-pressure pump 33 disposed on the pipe 32. The opening of the docking cavity 31 is used to seal and cooperate with the end of the base 11 facing away from the first end face 121.

[0055] The clamping component 4 is fixed to the support plate 2 and is used to clamp the base 11 so that the porous ceramic vacuum suction cup 1 is fixed relative to the support plate 2.

[0056] The pressure plate assembly 5 is located directly above the rinsing component 3. The pressure plate assembly 5 has a pressure plate 51, a movable bar 52, and a driving element 53. The pressure plate 51 has a radially arranged strip-shaped notch 511. The movable bar 52 is slidably disposed on the pressure plate 51. The lower end face of the movable bar 52 is flush with the lower end face of the pressure plate 51. The movable bar 52 has a through hole 521. The driving element 53 is used to drive the movable bar 52 to move, so that the through hole 521 can reciprocate along the length direction of the strip-shaped notch 511.

[0057] The rotating element 6 is located above the pressure plate assembly 5 and is used to drive the pressure plate assembly 5 to rotate.

[0058] The telescopic element 7, located above the rotating element 6, is used to drive the rotating element 6 and the pressure plate assembly 5 to move up and down, so that the pressure plate 51 and the movable bar 52 are pressed against the first end face 121 of the porous ceramic disc 12.

[0059] In operation, the flushing mechanism of this application uses the clamping component 4 to seal the mating cavity 31 of the base 11 and the flushing component 3. This allows the flushing medium through the pipe 32 to flush the porous ceramic disc 12 under the action of the high-pressure pump 33. The pressure plate 51 of this application is used to press against the first end face 121 (upper end face) of the porous ceramic disc 12. During flushing, due to the obstruction of the pressure plate 51, the flushing medium can only be ejected from the through hole 521 of the movable strip 52. Because the through hole 521 is relatively small in area compared to the entire porous ceramic disc 12, it can better flush out impurities in the channels corresponding to the through hole 521. The driving element 53 can drive the movable strip 52 to move, thereby allowing the through hole 521 to reciprocate along the length of the strip-shaped notch 511 (see...). Figure 6 and 7 This allows for one cleaning cycle to be completed radially, followed by rotation by the rotating element 6 at a set angle (see...). Figure 7 and 8 Then, the through hole 521 is moved at least once along the length of the strip notch 511 to complete the cleaning of another area. The entire cleaning is completed when the pressure plate 51 rotates 360°. This cleaning method of the present application has a good cleaning effect, especially in clearing severely blocked channels of the porous ceramic disc 12.

[0060] In actual use, a specific rinsing method is as follows:

[0061] Place the porous ceramic vacuum suction cup 1 on the support plate 2, so that the end of the substrate 11 facing away from the first end face 121 is aligned with the docking cavity 31, and then fix the porous ceramic vacuum suction cup 1 and the support plate 2 relative to each other by the clamping assembly 4.

[0062] For initial rinsing, the rinsing medium (water, water vapor mixture or cleaning fluid, etc.) is introduced into the pipeline 32 and pressurized by the high-pressure pump 33 before entering the docking chamber 31. After passing through the substrate 11, it enters the porous ceramic disc 12 and is discharged from the first end face 121 of the porous ceramic disc 12.

[0063] The telescopic element 7 drives the rotating element 6 and the pressure plate assembly 5 to move downward, so that the pressure plate 51 and the movable bar 52 are pressed against the first end face 121 of the porous ceramic disc 12;

[0064] Point-by-point cleaning: The flushing medium is introduced into the pipeline 32 and pressurized by the high-pressure pump 33 before entering the docking chamber 31. After passing through the substrate 11, it enters the porous ceramic disc 12 and is ejected from the through hole 521 of the movable strip 52. The driving element 53 drives the movable strip 52 to move, so that the through hole 521 can move along the length direction of the strip notch 511 to complete at least one radial cleaning. Then, the rotating element 6 rotates by a set angle, so that the through hole 521 can move along the length direction of the strip notch 511 at least once. After completion, the above operation is repeated until the disc rotates 360°.

[0065] like Figure 3 As shown, in this embodiment, the clamping component 4 includes:

[0066] The pressure plate 41 has an arc-shaped pressing part 411, which is used to press the upper end face of the substrate 11. When the pressure plate 41 is engaged with the porous ceramic vacuum chuck 1, the upper end face of the arc-shaped pressing part 411 is lower than the first end face 121 of the porous ceramic disk 12, or the upper end face of the arc-shaped pressing part 411 is flush with the first end face 121 of the porous ceramic disk 12.

[0067] Fastener 42 is used to fix the pressure plate 41 to the support plate 2.

[0068] The arc-shaped pressure part 411 is designed to increase the contact area with the substrate 11, which can better fix the substrate 11. The upper end surface of the arc-shaped pressure part 411 is lower than the first end surface 121 of the porous ceramic disk 12, or the upper end surface of the arc-shaped pressure part 411 is flush with the first end surface 121 of the porous ceramic disk 12. This arrangement can prevent the movable strip 52 from interfering with the arc-shaped pressure part 411 during cleaning.

[0069] like Figure 3 As shown, in this embodiment, the pressure plate 41 has a countersunk hole 412, and the fastener 42 is an internal hex screw. The pressure plate 41 is fixed to the support plate 2 by the internal hex screw passing through the countersunk hole 412. This arrangement can prevent the movable strip 52 from interfering with the fastener 42 during cleaning.

[0070] like Figure 3 As shown, in this embodiment, the porous ceramic disc 12 and the substrate 11 form a circular step 13, and the arc-shaped pressing part 411 is adapted to the circular step 13. The matching form of the arc-shaped pressing part 411 and the circular step 13 facilitates quick positioning and makes installation faster.

[0071] In this embodiment, the strip-shaped notch 511 passes through the center of the pressure plate 51.

[0072] like Figure 4 , 5As shown in Figure 9, in this embodiment, the strip-shaped notch 511 includes two opposing sidewalls and a connecting wall 5111 connecting the two sidewalls. The pressure plate 51 also has a radially arranged strip-shaped groove 512. One end of the groove 512 extends to the edge of the pressure plate 51, and the other end extends to the connecting wall 5111 of the strip-shaped notch 511. The direction of the groove 512 is the same as the length direction of the strip-shaped notch 511. The first end of the movable strip 52 is located at the strip-shaped notch 511, the through hole 521 is located at the strip-shaped notch 511, and the second end of the movable strip 52 passes through the groove 512 and is located on the outside of the pressure plate 51.

[0073] like Figure 5 and 10 As shown, the portion of the movable bar 52 away from the slide groove 512 has a rack structure 523;

[0074] like Figure 5 As shown, the driving element 53 includes a driving motor 531 fixed relative to the pressure plate 51 and a driving gear 532 driven by the driving motor 531. The driving gear 532 meshes with the rack structure 523. When the driving motor 531 rotates, it can drive the movable bar 52 to move back and forth.

[0075] like Figure 5 and 9 As shown, in this embodiment, the sidewall of the strip notch 511 has an anti-detachment groove 5112, and the sidewall of the movable strip 52 has an anti-detachment slider 522 that cooperates with the anti-detachment groove 5112.

[0076] In this embodiment, the rotating element 6 is a motor assembly.

[0077] In this embodiment, the telescopic element 7 is an electric push rod or a cylinder.

[0078] In practical applications, the rinsing mechanism of this embodiment can also perform forward and reverse rinsing.

[0079] At this time, the pressurizing pump is used as a vacuum pump. The movable bar 52 is equipped with a liquid outlet head. The liquid outlet head is aligned with the through hole 521 and can spray the cleaning medium into the through hole 521, that is, reverse flushing can be performed at this time.

[0080] The above description is merely a preferred embodiment of the present invention and does not limit the scope of patent protection of the present invention. Any equivalent structural transformations made based on the description and drawings of the present invention, whether directly or indirectly applied to other related technical fields, are similarly included within the scope of protection of the present invention.

Claims

1. A rinsing mechanism for porous ceramic vacuum suction cups, characterized in that, The porous ceramic vacuum suction cup includes a substrate and a porous ceramic disk fixed on the substrate, wherein the first end face of the porous ceramic disk protrudes from the substrate, and the rinsing mechanism includes: Support plate with mounting holes; The flushing component has a mating cavity located in the mounting hole, a pipe communicating with the mating cavity, and a high-pressure pump disposed on the pipe. The opening of the mating cavity is used to seal and engage with one end of the substrate facing away from the first end face. The clamping assembly is fixed to the support plate and is used to clamp the substrate so that the porous ceramic vacuum suction cup is fixed relative to the support plate; The pressure plate assembly is located directly above the rinsing component. The pressure plate assembly has a pressure plate, a movable bar, and a driving element. The pressure plate has a radially arranged strip-shaped notch. The movable bar is slidably disposed on the pressure plate. The lower end face of the movable bar is flush with the lower end face of the pressure plate. The movable bar has a through hole. The driving element is used to drive the movable bar to move, so that the through hole can reciprocate along the length direction of the strip-shaped notch. A rotating element, located above the pressure plate assembly, is used to drive the pressure plate assembly to rotate; A telescopic element, located above the rotating element, is used to drive the rotating element and the pressure plate assembly to move up and down, so that the pressure plate and the movable strip press against the first end face of the porous ceramic disc.

2. The rinsing mechanism for porous ceramic vacuum suction cups as described in claim 1, characterized in that, The clamping assembly includes: The pressure plate has an arc-shaped pressing part, which is used to press the upper end face of the substrate. When the pressure plate is used in conjunction with the porous ceramic vacuum suction cup, the upper end face of the arc-shaped pressing part is lower than the first end face of the porous ceramic disk, or the upper end face of the arc-shaped pressing part is flush with the first end face of the porous ceramic disk. Fasteners are used to secure the pressure plate to the support plate.

3. The rinsing mechanism for porous ceramic vacuum suction cups as described in claim 2, characterized in that, The pressure plate has a countersunk hole, and the fastener is an internal hex screw. The pressure plate is fixed to the support plate by the internal hex screw passing through the countersunk hole.

4. The rinsing mechanism for porous ceramic vacuum suction cups as described in claim 2, characterized in that, The porous ceramic disc and the substrate form a circular step, and the arc-shaped pressing part is adapted to the circular step.

5. The rinsing mechanism for porous ceramic vacuum suction cups as described in claim 1, characterized in that, The strip-shaped notch passes through the center of the pressure plate.

6. The rinsing mechanism for porous ceramic vacuum suction cups as described in claim 5, characterized in that, The strip-shaped notch includes two opposing sidewalls and a connecting wall connecting the two sidewalls. The pressure plate also has a radially arranged strip-shaped groove, one end of which extends to the edge of the pressure plate and the other end extends to the connecting wall of the strip-shaped notch. The direction of the groove is the same as the length direction of the strip-shaped notch. The first end of the movable strip is located at the strip-shaped notch, the through hole is located at the strip-shaped notch, and the second end of the movable strip passes through the groove and is located on the outside of the pressure plate. The portion of the movable bar furthest from the slide groove has a rack and pinion structure; The driving element includes a drive motor fixed relative to the pressure plate and a drive gear driven by the drive motor. The drive gear meshes with the rack structure, and the drive motor can drive the movable bar to move back and forth when it rotates.

7. The rinsing mechanism for porous ceramic vacuum suction cups as described in claim 6, characterized in that, The sidewall of the strip-shaped notch has an anti-detachment groove, and the sidewall of the movable strip has an anti-detachment slider that cooperates with the anti-detachment groove.

8. The rinsing mechanism for porous ceramic vacuum suction cups as described in claim 1, characterized in that, The rotating element is a motor assembly.

9. The rinsing mechanism for porous ceramic vacuum suction cups as described in claim 1, characterized in that, The telescopic element is an electric push rod or a cylinder.

10. A rinsing device, characterized in that, The rinsing mechanism for porous ceramic vacuum suction cups as described in any one of claims 1 to 9.

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