Display panel and display device
By adopting a special-shaped buffer layer design in the display panel and forming electrodes and shading patterns on the same metal layer, the problem of low pixel density caused by setting the shading layer and source and drain layers on the same metal layer is solved, achieving higher pixel density and lower cost and process complexity.
Patent Information
- Application Number
- CN202411252205.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-06
- Publication Date
- 2025-09-19
- Estimated Expiration
- 2044-09-06
AI Technical Summary
In existing display devices, the light shielding layer and the source and drain electrode layers are arranged on the same metal layer, resulting in a low pixel density, a large number of mask plates, high cost, and complex process.
A special-shaped buffer layer design is adopted, so that the channel part is set on a plane and sidewall of the special-shaped part of the buffer layer, the gate is set corresponding to the sidewall and top surface of the channel part, and the electrode and shading pattern are formed by the same metal layer, reducing the number of mask plates.
The channel length and gate control area are increased, the size of thin film transistors is reduced, the pixel density is improved, and the cost and process complexity are reduced.
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Figure CN119133188B_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of display technology, and in particular to a display panel and a display device. Background Art
[0002] With the development of display technology, in order to improve the performance of display devices, top-gate indium gallium zinc oxide thin-film transistors (Top gate IGZO TFTs) are used in existing display devices to reduce parasitic capacitance. However, the number of masks required to form top-gate thin-film transistors is greater than the number of masks required to form bottom-gate thin-film transistors, resulting in increased costs and more processes. To reduce the number of masks required in the preparation of top-gate thin-film transistors, existing display devices use the same metal layer to form the light shielding layer and the source and drain electrode layers, thereby eliminating two masks and reducing parasitic capacitance. However, since the light shielding layer and the source and drain electrode layers are formed using the same metal layer, the layout space is limited, resulting in a lower pixel density of the display device.
[0003] Therefore, the existing display device in which the light shielding layer and the source and drain electrode layers are arranged on the same metal layer has a technical problem of low pixel density. Summary of the Invention
[0004] The embodiments of the present application provide a display panel and a display device to solve the technical problem of low pixel density in existing display devices in which a light shielding layer and a source / drain electrode layer are arranged on the same metal layer.
[0005] An embodiment of the present application provides a display panel, comprising:
[0006] substrate;
[0007] A first metal layer is provided on one side of the substrate, wherein the first metal layer includes a drain electrode;
[0008] a buffer layer, disposed on a side of the first metal layer away from the substrate, the buffer layer comprising a first via hole;
[0009] an active layer, disposed on a side of the buffer layer away from the first metal layer, the active layer comprising a channel portion and doped portions disposed on both sides of the channel portion, wherein the doped portion passes through the first via hole and is connected to the drain electrode;
[0010] a second metal layer, disposed on a side of the active layer away from the buffer layer, the second metal layer comprising a gate;
[0011] The buffer layer further includes a special-shaped portion, the channel portion is arranged on a plane of the special-shaped portion and a sidewall of the special-shaped portion, and the gate is arranged corresponding to the sidewall of the channel portion and a top surface of the channel portion.
[0012] In some embodiments, the special-shaped portion includes a second via hole, the channel portion is disposed in the second via hole, and the channel portion overlaps the sidewall and bottom surface of the second via hole.
[0013] In some embodiments, the display panel also includes a gate insulating layer, which is arranged between the active layer and the gate, the channel portion includes a first channel portion overlapping the side wall of the second via and a second channel portion overlapping the bottom surface of the second via, the gate insulating layer includes a first insulating portion overlapping the first channel portion and a second insulating portion overlapping the second channel portion, the gate overlaps the first insulating portion and contacts the second insulating portion, and the gate is arranged corresponding to the first channel portion and the second channel portion.
[0014] In some embodiments, the first metal layer further includes a light-shielding pattern, the light-shielding pattern is arranged corresponding to the channel portion, and a distance exists between a top surface of the light-shielding pattern and the second via hole.
[0015] In some embodiments, a distance between the light shielding pattern and a top surface of a portion of the buffer layer corresponding to the second via hole is one-fifth to four-fifths of the thickness of the buffer layer.
[0016] In some embodiments, an angle between a top surface and a sidewall of a portion of the buffer layer corresponding to the second via hole ranges from 25 degrees to 80 degrees.
[0017] In some embodiments, the special-shaped portion includes a protrusion, the channel portion is disposed on the protrusion, and the channel portion overlaps the side wall of the protrusion.
[0018] In some embodiments, the display panel also includes a gate insulating layer, which is arranged between the active layer and the gate, the gate insulating layer is arranged on the top surface of the channel portion and overlaps the side wall of the channel portion, and the gate is arranged on the top surface of the gate insulating layer and overlaps the side wall of the gate insulating layer.
[0019] In some embodiments, the display panel further includes a pixel electrode layer, the pixel electrode layer includes a pixel electrode, and the pixel electrode is directly connected to another of the doped portions.
[0020] At the same time, an embodiment of the present application provides a display device, which includes a display panel as described in any of the above embodiments.
[0021] Beneficial effects: The present application provides a display panel and a display device; the display panel enables the display panel to form an electrode and a light-shielding pattern using the same metal layer by making the first metal layer include a drain electrode, and the doped portion is connected to the drain electrode through a first via hole, thereby reducing the number of mask plates, and by making the buffer layer include a special-shaped portion, the channel portion is arranged on a plane of the special-shaped portion and on the sidewall of the special-shaped portion, and the gate is arranged corresponding to the sidewall of the channel portion and the top surface of the channel portion, thereby increasing the channel length, and increasing the length of the portion where the gate is arranged opposite to the channel, thereby increasing the gate control area, thereby correspondingly reducing the gate width, reducing the size of a single thin film transistor, and improving the pixel density. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] The following detailed description of the specific embodiments of the present application in conjunction with the accompanying drawings will make the technical solutions and other beneficial effects of the present application apparent.
[0023] Figure 1 This is a schematic diagram of a first comparative display panel provided in an embodiment of the present application.
[0024] Figure 2 A schematic diagram of a second comparative display panel provided in an embodiment of the present application.
[0025] Figure 3 This is a first schematic diagram of a display panel provided in an embodiment of the present application.
[0026] Figure 4 This is a second schematic diagram of a display panel provided in an embodiment of the present application.
[0027] Figure 5 This is a schematic structural diagram of a display panel corresponding to each step of a method for manufacturing a display panel provided in an embodiment of the present application.
[0028] Figure 6 This is a schematic structural diagram of a display panel corresponding to each step of another method for manufacturing a display panel provided in an embodiment of the present application. DETAILED DESCRIPTION
[0029] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the embodiments described are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without making creative efforts are within the scope of protection of this application.
[0030] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the said features. In the description of the present application, "multiple" means two or more, unless otherwise clearly and specifically defined.
[0031] In the description of this application, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections, electrical connections, or mutual communication; they can refer to direct connections or indirect connections through an intermediate medium; they can refer to internal communication between two components or the interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on specific circumstances.
[0032] In this application, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.
[0033] The disclosure below provides many different embodiments or examples for realizing different structures of the present application. In order to simplify the disclosure of the present application, the components and settings of specific examples are described below. Of course, they are merely examples and are not intended to limit the present application. In addition, the present application may repeat reference numbers and / or reference letters in different examples, and such repetition is for the purpose of simplicity and clarity, and does not itself indicate the relationship between the various embodiments and / or settings discussed. In addition, the present application provides examples of various specific processes and materials, but those of ordinary skill in the art will appreciate the application of other processes and / or the use of other materials.
[0034] As an introduction to the embodiments of the present application, some comparative display panels are provided to illustrate the principles of the technical problems to be solved by the embodiments of the present application. Figure 1 As shown, a comparative display panel includes a substrate 101, a light shielding film 102, a buffer film 103, a semiconductor film 104, a gate insulating film 105, a gate film 106, an interlayer insulating film 107, a source-drain film 108, a first passivation film 109, a planarization film 111, a common electrode film 112, a second passivation film 113, and a second electrode film 114. Figure 1 As can be seen in the figure, the comparative display panel requires a mask when forming the light shielding film 102, the semiconductor film 104, the gate film 106, the source and drain film 108, the common electrode film 112, and the second electrode film 114, and forming via holes in the buffer film 103, the interlayer insulating film 107, the planarization film 111, and the second passivation film 113. Moreover, due to the different patterns of the film layers, the via holes of the film layers are set at different positions. The structures of the mask plates used in forming the film layers and forming the via holes in the film layers are different, resulting in a large number of mask plates. Figure 1 The display panel requires 10 mask plates (i.e., 6 mask plates required to form the light-shielding film 102, the semiconductor film 104, the gate film 106, the source and drain film 108, the common electrode film 112 and the second electrode film 114, and 4 mask plates required to form vias for the buffer film 103, the interlayer insulating film 107, the planarizing film 111 and the second passivation film 113, a total of 10 mask plates), resulting in high cost and complex process.
[0035] In order to reduce the number of masks, such as Figure 2 As shown, another comparative display panel removes the source and drain films and the interlayer insulating film, and uses the light shielding film 102 to form the light shielding pattern and the electrode, so that the light shielding pattern is formed. Figure 2 The comparative display panel shown requires only eight mask plates, but because the light-shielding pattern and the electrode are located on the same layer, multiple metal patterns must be formed in the same layer, resulting in a low pixel density of the display device. Therefore, existing display devices with the light-shielding layer and source and drain electrode layers arranged on the same metal layer suffer from the technical problem of low pixel density.
[0036] In order to solve the above technical problems, the embodiments of the present application provide a display panel and a display device to solve the above technical problems.
[0037] Figure 3 This is a first schematic diagram of a display panel provided in an embodiment of the present application. Figure 4 This is a second schematic diagram of a display panel provided in an embodiment of the present application. Figure 5 This is a schematic structural diagram of a display panel corresponding to each step of a method for manufacturing a display panel provided in an embodiment of the present application. Figure 6 This is a schematic structural diagram of a display panel corresponding to each step of another method for manufacturing a display panel provided in an embodiment of the present application.
[0038] like Figure 3 As shown, an embodiment of the present application provides a display panel, which includes a substrate 21, a first metal layer 22, a buffer layer 23, an active layer 24, and a second metal layer 26. The first metal layer 22 is arranged on one side of the substrate 21, and the first metal layer 22 includes a drain electrode 221; the buffer layer 23 is arranged on a side of the first metal layer 22 away from the substrate 21, and the buffer layer 23 includes a first via 231; the active layer 24 is arranged on a side of the buffer layer 23 away from the first metal layer 22, and the active layer 24 includes a channel portion 241 and doped portions 242 arranged on both sides of the channel portion 241, and the doped portion 242 passes through the first via 231 and is connected to the drain electrode 221; the second metal layer 26 is arranged on a side of the active layer 24 away from the buffer layer 23, and the second metal layer 26 includes a gate 261;
[0039] The buffer layer 23 further includes a profiled portion 232 , the channel portion 241 is disposed on a plane of the profiled portion 232 and on a sidewall of the profiled portion 232 , and the gate 261 is disposed corresponding to the sidewall and top surface of the channel portion 241 .
[0040] An embodiment of the present application provides a display panel, which enables the first metal layer to include a drain electrode, and the doped portion to be connected to the drain electrode through a first via hole, so that the display panel can use the same metal layer to form an electrode and a light-shielding pattern, thereby reducing the number of mask plates. In addition, by enabling the buffer layer to include a special-shaped portion, the channel portion is arranged on a plane of the special-shaped portion and on the sidewall of the special-shaped portion, and the gate is arranged corresponding to the sidewall of the channel portion and the top surface of the channel portion, the channel length can be increased, and the length of the portion where the gate is arranged opposite to the channel can be increased, thereby increasing the gate control area, thereby correspondingly reducing the gate width, reducing the size of a single thin film transistor, and improving the pixel density.
[0041] Specifically, the display panel may include thin film transistors.
[0042] Specifically, such as Figure 2 、 Figure 3 As shown in FIG. 1 , it can be seen that in the comparative display panel, due to the horizontal setting of the surface of the buffer layer, the channel length is Figure 2 The width of the channel portion in the buffer layer is 1 / 4, and accordingly, the area facing the gate and the channel portion is the product of the gate length and width. In the display panel in the embodiment of the present application, since the buffer layer is provided with a special-shaped portion, the channel length is the sum of the length of the channel portion and twice the length of the portion of the channel portion overlapping the sidewall of the special-shaped portion. Accordingly, the area facing the gate and the channel portion is the product of the gate length and the gate width and the product of the gate thickness and the gate length, thereby increasing the channel length and the gate control area. Accordingly, in order to improve the performance of the display panel and / or increase the pixel density, the channel length and the gate control area can be ensured to meet the requirements or even increased by reducing the gate width, and the pixel density can be improved.
[0043] Specifically, it is understandable that Figure 3 The first via 231 and other vias and grooves are shown in the figure, but since the vias and grooves are filled with various structures, the vias and grooves cannot be observed. It can be understood that the positions where the various structures are provided are the positions of the vias and grooves. For example, the doping portion 242 is provided in the first via 231, and the passivation layer 27 is provided in the first via 231. The shape and position of the first via 231 can be determined according to the shape and position of the portion of the doping portion 242 and the passivation layer 27 embedded in the buffer layer. Similarly, the shapes and positions of other vias and grooves can be determined.
[0044] In some embodiments, as Figure 3 As shown, the irregular portion 232 includes a second via hole 233, and the channel portion 241 is disposed within the second via hole 233, overlapping the sidewalls and bottom surface of the second via hole 233. By including the second via hole in the irregular portion, the channel portion can be disposed within the second via hole. As a result, the channel length of the thin-film transistor in the display panel is equal to the sum of twice the length of the sidewall of the portion of the buffer layer corresponding to the second via hole and the width of the channel portion. This increases the channel length of the thin-film transistor in the display panel, correspondingly reducing the gate width, thereby improving pixel density, without increasing or even reducing the thickness of the display panel.
[0045] Specifically, it can be seen that the channel portion 241 overlaps the sidewall and top surface of the portion of the buffer layer 23 corresponding to the second via hole 233 , thereby increasing the channel length of the thin film transistor of the display panel.
[0046] In some embodiments, as Figure 3As shown, the display panel 2 also includes a gate insulating layer 25, which is arranged between the active layer 24 and the gate 261, and the channel portion 241 includes a first channel portion 241a overlapping the side wall of the second via 233 and a second channel portion 241b overlapping the bottom surface of the second via 233. The gate insulating layer 25 includes a first insulating portion 251 overlapping the first channel portion 241a and a second insulating portion 252 overlapping the second channel portion 241b. The gate 261 overlaps the first insulating portion 251 and contacts the second insulating portion 252, and the gate 261 is arranged corresponding to the first channel portion 241a and the second channel portion 241b. By making the channel portion include a first channel portion arranged on the side wall of the second via and a second channel portion arranged on the bottom surface of the second via, the gate insulating layer includes a first insulating portion arranged on the first channel portion and a second insulating portion arranged on the second channel portion, so that the gate can be arranged on the first insulating portion and in contact with the second insulating portion, and the gate can be arranged corresponding to the first channel portion and the second channel portion, the gate control area can be increased, and the width of the gate can be reduced accordingly, thereby improving the pixel density.
[0047] In some embodiments, as Figure 3 As shown, the first metal layer 22 further includes a light-shielding pattern 222, which is disposed corresponding to the channel portion 241. A distance exists between the top surface of the light-shielding pattern 222 and the second via 233. By including the light-shielding pattern in the first metal layer and using the first metal layer to form the light-shielding pattern and the drain electrode, the number of film layers in the display panel can be reduced, the number of masks required for the display panel can be reduced, and costs and process steps can be reduced. Furthermore, the distance between the top surface of the light-shielding pattern and the second via can prevent the light-shielding pattern from contacting the channel portion, which could result in failure of the channel portion, thereby improving the yield of the display panel.
[0048] In some embodiments, as Figure 3 As shown, the distance L1 between the light-shielding pattern 222 and the top surface of the portion of the buffer layer 23 corresponding to the second via hole 233 is one-fifth to four-fifths of the thickness L2 of the buffer layer 23. By setting the distance between the light-shielding pattern and the top surface of the portion of the buffer layer corresponding to the second via hole to one-fifth to four-fifths of the thickness of the buffer layer, contact between the light-shielding pattern and the channel portion, which could cause channel failure, can be avoided, thereby improving the yield of the display panel.
[0049] Specifically, such as Figure 3As shown, it can be understood that the first metal layer 22 includes a light-shielding pattern 222, which can shield the channel portion from light. However, the light-shielding pattern 222 is a conductor. In order to avoid conductor failure of the channel portion 241, a buffer layer of a certain thickness needs to be retained between the light-shielding pattern 222 and the channel portion 241 so that the display panel can work normally.
[0050] Specifically, the above embodiment is described by taking the example that the distance between the light-shielding pattern and the top surface of the portion of the buffer layer corresponding to the second via hole is one-fifth to four-fifths of the thickness of the buffer layer, but the embodiments of the present application are not limited to this. It is sufficient that there is a distance between the light-shielding pattern and the top surface of the portion of the buffer layer corresponding to the second via hole, and the light-shielding pattern does not affect the normal function of the channel portion. For example, the distance between the light-shielding pattern and the top surface of the portion of the buffer layer corresponding to the second via hole is one-sixth of the thickness of the buffer layer.
[0051] In some embodiments, the light shielding pattern is connected to the gate, or the potential on the light shielding pattern is the same as the potential of the gate. By connecting the light shielding pattern to the gate, or making the potential on the light shielding pattern the same as the potential of the gate, the light shielding pattern can be used as part of the gate, thereby increasing the gate control area and improving the performance of the display panel.
[0052] The above embodiments are described using the connection between the shading pattern and the gate as an example, but the embodiments of the present application are not limited to this. For example, the shading pattern can be set in the air, the shading pattern is not connected to other wirings, or the shading pattern is connected to the pixel electrode, or the shading pattern is connected to the doped part.
[0053] In some embodiments, as Figure 3 As shown, the included angle A between the top surface of the portion of the buffer layer 23 corresponding to the second via hole 233 and the sidewall is in a range of 25 degrees to 80 degrees. By setting the included angle between the top surface of the portion of the buffer layer corresponding to the second via hole and the sidewall in a range of 25 degrees to 80 degrees, the channel portion is better overlapped with the sidewall of the portion of the buffer layer corresponding to the second via hole, and the channel length of the display panel is longer, thereby reducing the gate width and improving the pixel density.
[0054] Specifically, the above embodiment is described by taking the range of the angle between the top surface and the side wall of the portion corresponding to the second via hole in the buffer layer as 25 degrees to 80 degrees as an example, but the embodiments of the present application are not limited to this. It is sufficient that the channel portion is arranged in the second via hole to increase the channel length and avoid the channel portion from breaking. For example, the angle between the top surface and the side wall of the portion corresponding to the second via hole in the buffer layer can also be 20 degrees.
[0055] In some embodiments, as Figure 4As shown, the profiled portion 232 includes a protrusion 234, the channel portion 241 is disposed on the protrusion 234, and the channel portion 241 overlaps the sidewall of the protrusion 234. By having the profiled portion include a protrusion, the channel portion disposed on the protrusion, and the channel portion overlapping the sidewall of the protrusion, the channel length of the display panel can be increased, and the width of the gate can be correspondingly reduced, thereby improving the pixel density.
[0056] In some embodiments, as Figure 5 As shown, the display panel 2 further includes a gate insulating layer 25, which is disposed between the active layer 24 and the gate electrode 261. The gate insulating layer 25 is disposed on the top surface of the channel portion 241 and overlaps the sidewalls of the channel portion 241. The gate electrode 261 is disposed on the top surface of the gate insulating layer 25 and overlaps the sidewalls of the gate insulating layer 25. By disposing the gate insulating layer on the top surface of the channel portion and overlapping the sidewalls of the channel portion, and disposing the gate electrode on the top surface of the gate insulating layer and overlapping the sidewalls of the gate insulating layer, the gate electrode can be disposed opposite the top surface and the sidewalls of the channel portion, thereby increasing the gate control area and correspondingly reducing the gate electrode width, thereby improving the pixel density.
[0057] In some embodiments, as Figure 3 、 Figure 4 As shown, the display panel 2 further includes a pixel electrode layer 29, which includes a pixel electrode 291. The pixel electrode 291 is directly connected to another doped portion 242. By directly connecting the pixel electrode to the doped portion, there is no need to provide a source electrode, which reduces the number of masks, the number of vias, and the number of process steps, thereby improving the yield of the display panel.
[0058] Specifically, such as Figure 3 As shown, the display panel 2 further includes a first passivation layer 27 and a planarization layer 28 .
[0059] Specifically, the display panel may further include a second passivation layer and a common electrode layer, the second passivation layer is disposed between the planarization layer and the pixel electrode layer, and the common electrode layer is disposed between the planarization layer and the second passivation layer.
[0060] Specifically, the material of the first metal layer includes molybdenum, aluminum, copper, titanium, or alloys of the above materials, or stacks of the above materials. The thickness of the first metal layer ranges from 1000 angstroms to 8000 angstroms.
[0061] Specifically, the material of the buffer layer includes silicon nitride, silicon oxide, or a stack of the two, and the thickness of the buffer layer ranges from 6000 angstroms to 10000 angstroms.
[0062] Specifically, the active layer material includes indium gallium zinc oxide (IGZO), with a thickness ranging from 400 to 1000 angstroms. The active layer can be deposited using physical vapor deposition and patterned using a photolithography and etching process. The active layer material can also be oxides such as indium gallium zinc tin oxide (IGZTO), indium gallium oxide (IGO), indium zinc oxide (IZO), and lanthanide oxide (IZO).
[0063] Specifically, the material of the gate insulating layer includes silicon oxide, and the thickness of the gate insulating layer ranges from 1000 angstroms to 3000 angstroms.
[0064] Specifically, the material of the second metal layer includes a stack of molybdenum-titanium alloy / copper / molybdenum-titanium alloy, the thickness of the second metal layer ranges from 2000 angstroms to 8000 angstroms, and the second metal layer can be patterned by a yellow light process, and then the gate insulating layer is self-aligned with the pattern of the second metal layer to form a pattern.
[0065] Specifically, the doping portion is doped with nitrogen, and the ion doping concentration of the doping portion is greater than the ion doping concentration of the channel portion.
[0066] Specifically, the materials of the first passivation layer and the second passivation layer include silicon nitride or silicon oxide, and the thickness of the first passivation layer ranges from 1000 angstroms to 5000 angstroms.
[0067] Specifically, the material of the planarization layer includes polytetrafluoroethylene, and the thickness of the planarization layer ranges from 10,000 angstroms to 30,000 angstroms.
[0068] Specifically, the material of the pixel electrode layer and the common electrode layer includes indium tin oxide.
[0069] Specifically, the first metal layer may further include data lines, and the second metal layer may further include scan lines.
[0070] The above embodiments provide a detailed description of the display panel from the perspective of each film layer and its specific design. It can be understood that when there is no conflict between the embodiments, the embodiments can be combined. For example, the angle between the top surface and the side wall of the portion of the buffer layer corresponding to the second via hole ranges from 25 degrees to 80 degrees, and the display panel also includes a pixel electrode layer, the pixel electrode layer includes a pixel electrode, and the pixel electrode is directly connected to the doped portion.
[0071] At the same time, an embodiment of the present application provides a method for preparing a display panel, which prepares the display panel as described in any of the above embodiments.
[0072] In some embodiments, a method for preparing a display panel includes:
[0073] Provide a substrate; the structure of the display panel corresponding to this step is as follows Figure 5 As shown in (a);
[0074] A first metal layer and a buffer layer are sequentially formed on the substrate, and the buffer layer is etched to form a first via hole and a second via hole; the structure of the display panel corresponding to this step is as follows: Figure 5 As shown in (a);
[0075] An active layer, a gate insulating layer, and a second metal layer are sequentially formed on the buffer layer; the structure of the display panel corresponding to this step is as follows Figure 5 As shown in (b);
[0076] A first passivation layer, a planarization layer, and a pixel electrode layer are sequentially formed on the second metal layer. The structure of the display panel corresponding to this step is as follows: Figure 3 shown.
[0077] Specifically, when etching the buffer layer to form the first via hole and the second via hole, a semi-transparent process may be used to form the first via hole and the second via hole in one step, so that the first via hole and the second via hole have different depths.
[0078] In some embodiments, a method for preparing a display panel includes:
[0079] Provide a substrate; the structure of the display panel corresponding to this step is as follows Figure 6 As shown in (a);
[0080] A first metal layer and a buffer layer are sequentially formed on the substrate, and the buffer layer is etched to form a first via hole; the structure of the display panel corresponding to this step is as follows: Figure 6 As shown in (a);
[0081] The buffer layer is etched to form a second via hole; the structure of the display panel corresponding to this step is as follows Figure 6 As shown in (b);
[0082] An active layer, a gate insulating layer, and a second metal layer are sequentially formed on the buffer layer; the structure of the display panel corresponding to this step is as follows Figure 6 As shown in (c);
[0083] A first passivation layer, a planarization layer, and a pixel electrode layer are sequentially formed on the second metal layer. The structure of the display panel corresponding to this step is as follows: Figure 3 shown.
[0084] Specifically, when etching the buffer layer to form the first via hole and the second via hole, the first via hole and the second via hole can be formed in two steps, so that the first via hole and the second via hole have different depths.
[0085] At the same time, an embodiment of the present application provides a display device, which includes the display panel as described in any of the above embodiments.
[0086] In the above embodiments, the description of each embodiment has its own focus. For parts that are not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.
[0087] The above is a detailed introduction to a display panel and a display device provided in the embodiments of the present application. Specific examples are used herein to illustrate the principles and implementation methods of the present application. The description of the above embodiments is only used to help understand the technical solutions and core ideas of the present application. Ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. These modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.
Claims
1. A display panel, characterized in that: include: substrate; A first metal layer is provided on one side of the substrate, wherein the first metal layer includes a drain electrode; a buffer layer, disposed on a side of the first metal layer away from the substrate, the buffer layer comprising a first via hole; an active layer, disposed on a side of the buffer layer away from the first metal layer, the active layer comprising a channel portion and doped portions disposed on both sides of the channel portion, wherein the doped portion passes through the first via hole and is connected to the drain electrode; a second metal layer, disposed on a side of the active layer away from the buffer layer, the second metal layer comprising a gate; In which, the buffer layer also includes a shaped portion, the channel portion is arranged on a plane of the shaped portion and the side wall of the shaped portion, and the gate is arranged corresponding to the side wall of the channel portion and the top surface of the channel portion; the display panel also includes a gate insulating layer, the gate insulating layer is arranged between the active layer and the gate, the channel portion includes a first channel portion overlapping the side wall of the shaped portion and a second channel portion overlapping the plane of the shaped portion, the gate insulating layer includes a first insulating portion overlapping the first channel portion and a second insulating portion overlapping the second channel portion, the gate is overlapped on the first insulating portion and in contact with the second insulating portion, and the gate is arranged corresponding to the first channel portion and the second channel portion; the first metal layer also includes a shading pattern, the shading pattern is arranged corresponding to the channel portion, and there is a distance between the top surface of the shading pattern and the bottom surface of the second channel portion.
2. The display panel according to claim 1, wherein The special-shaped portion includes a second via hole, the channel portion is disposed in the second via hole, and the channel portion overlaps the side wall and the bottom surface of the second via hole.
3. The display panel according to claim 2, wherein: A distance between the light shielding pattern and a top surface of a portion of the buffer layer corresponding to the second via hole is one-fifth to four-fifths of the thickness of the buffer layer.
4. The display panel according to claim 2, wherein: An included angle between a top surface and a sidewall of a portion of the buffer layer corresponding to the second via hole ranges from 25 degrees to 80 degrees.
5. The display panel according to claim 1, wherein The special-shaped portion includes a protrusion, the channel portion is arranged on the protrusion, and the channel portion overlaps the side wall of the protrusion.
6. The display panel according to claim 5, wherein: The display panel also includes a gate insulating layer, which is arranged between the active layer and the gate. The gate insulating layer is arranged on the top surface of the channel portion and overlaps the side wall of the channel portion. The gate is arranged on the top surface of the gate insulating layer and overlaps the side wall of the gate insulating layer.
7. The display panel according to claim 1, wherein: The display panel further includes a pixel electrode layer, the pixel electrode layer includes a pixel electrode, and the pixel electrode is directly connected to another of the doped parts.
8. A display device, characterized in that: The display panel comprises the display panel according to any one of claims 1 to 7.
Citation Information
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