A substrate non-contact transmission and drying integrated device

Abstract

The present invention relates to the field of air flotation technology, and specifically to a substrate non-contact conveying and drying integrated device, wherein the two sides of the support bottom plate are fixedly connected with supporting side plates, the top of the support bottom plate is fixedly connected with a mounting bottom plate, the top of the mounting bottom plate is fixedly connected with a jet tube, the top of the jet tube is fixedly connected with a jet head, and the jet head has three rows, the inside of the jet tube is rotatably connected with a closed rotating column, and the two ends of the closed rotating column are fixedly connected with a rotating cylinder. Through the cleverly designed structure, the non-contact conveying and drying integrated operation of the substrate is realized, the device realizes the conveying of the substrate by changing the gas injection mode; at the same time, the drying of the substrate is realized by heating the gas, and during the conveying process, a buffer device is provided to reduce the collision force between the substrate and the device, thereby protecting the substrate, and in addition, the device also has an adjustment function to adapt to substrates of different sizes.

Description

Technical Field

[0001] The invention relates to the field of air flotation technology, in particular to a substrate non-contact transmission and drying integrated device. Background Art

[0002] The production process of substrates and other products is complicated. Currently, they are transported through mechanical contact such as rollers, which will produce particles and other pollution in the process. How to protect the products so that they will not be affected by additional particles when traveling through complicated processes and testing links, the mode of transportation becomes a crucial issue.

[0003] In the traditional transportation method, the transportation equipment will directly contact with the substrate, causing damage to its surface, and even seriously affecting the yield rate of the product and increasing the economic cost of the product. Therefore, the present invention provides an integrated device for non-contact transmission and drying of substrates. Summary of the invention

[0004] The object of the present invention is to provide a substrate non-contact conveying and drying integrated device to solve the problems raised in the above background technology.

[0005] The technical solution of the present invention is: a substrate non-contact transmission and drying integrated device, comprising a supporting bottom plate, two sides of the supporting bottom plate are fixedly connected with supporting side plates, the top of the supporting bottom plate is fixedly connected with a mounting bottom plate, the top of the mounting bottom plate is fixedly connected with a jet tube, the top of the jet tube is fixedly connected with a jet head, the jet head has three rows, the inside of the jet tube is rotatably connected with a closed rotating column, both ends of the closed rotating column are fixedly connected with a rotating cylinder, the end of the rotating cylinder away from the cooling inner cylinder is rotatably connected with a fixed cylinder, the outside of the fixed cylinder is fixedly connected with an injection port, the end of the fixed cylinder away from the rotating cylinder is fixedly connected with a fixed cover, the closed rotating column is fan-shaped, the inside of the closed rotating column is fixedly connected with a cooling inner cylinder, the side of the supporting side plate away from the supporting bottom plate is fixedly connected with an outer bottom plate, the top of the outer bottom plate is fixedly connected with an outer plate, the top of the outer bottom plate is slidably clamped with an adjustment rack, the adjustment rack is slidably clamped between the supporting side plate and the outer plate, the outer side of the rotating cylinder is fixedly connected with a rotating gear, the rotating cylinder is rotatably connected to the inner side of the supporting side plate, The top of the adjusting device is fixedly connected with the adjusting rack, and one end of the adjusting rack is fixedly connected with the adjusting rod, and the inner wall of the fixing cover is slidingly clamped with an adjusting rod, and the inner wall of the fixing cover is fixedly connected with an inner clamping ring, and the inner wall of the inner clamping ring is fixedly connected with a fixed abutment plate. The outer side of the adjusting rod is fixedly connected with a fixed mounting plate, and the outer side of the adjusting rod is slidingly clamped with a movable mounting plate. The movable mounting plate and the fixed mounting plate are fixedly connected with a mounting clamping block on one side adjacent to the fixed mounting plate. The mounting clamping block is fixedly connected with an mounting clamping shaft inside the mounting clamping block, and the outer side of the mounting clamping shaft is rotatably connected with a rotating plate. The movable mounting plate and the two rotating plates on the side adjacent to the mounting clamping shaft are rotatably connected by connecting rollers. The interior of the rotating plate is fixedly connected with a heating assembly, and the fixed mounting plate is slidably clamped with the interior of the cooling inner cylinder. The top of the adjusting rod is fixedly connected with a positioning guide column, and the positioning guide column is slidably clamped with the interior of the cooling inner cylinder. The end of the adjusting rod away from the positioning guide column is fixedly connected with a cylinder connecting plate, and the end of the cylinder connecting plate away from the adjusting rod is fixedly connected with a telescopic electric cylinder, and the end of the telescopic electric cylinder away from the cylinder connecting plate is fixedly connected with a cylinder bottom plate.When in use: connect with the gas delivery device through the gas injection port, inject gas into the fixed cylinder through the gas injection port, pass through the rotating cylinder, and inject into the inner side of the jet head. Pull the adjustment plate and the adjustment rack to make the adjustment rack drive the rotating gear to rotate, drive the rotating cylinder to rotate, drive the closed rotating column to rotate, and the closed rotating column is fan-shaped, so that the closed rotating column can conduct all the jet heads at the same time, or conduct the jet heads in the middle and any column, or only one column of the jet heads on one side is conducted, or it is fully closed. The high-pressure gas enters the jet head through the unclosed fan-shaped ring of the closed rotating column, and then sprays out, through Place the substrate between the devices, and move the substrate in one direction by changing the conduction mode of the nozzle on the top of the nozzle cylinder. When drying is required, the telescopic electric cylinder is contracted, the cylinder connecting plate is pulled, and the adjustment rod is pulled to move, so that the movable mounting plate and the fixed mounting plate are separated from the cooling inner cylinder. At the same time, the fixed plate is pressed against the movable mounting plate to bring the movable mounting plate and the fixed mounting plate closer, so that the two sets of rotating plates are gradually folded outward, and the heating component is gradually moved in the direction perpendicular to the center of the circle, so that the heating component heats the gas passing through the rotating cylinder, and the hot air ejected from the nozzle head dries the substrate. ;

[0006] Preferably, the top of the jet cylinder is fixedly connected to an outer telescopic cylinder, the outer telescopic cylinder is fixedly sleeved on the outer side of the jet head at the top of the jet cylinder, a buffer spring is installed between the outer telescopic cylinder and the jet head, the top height of the buffer spring is connected to an inner telescopic cylinder, the inner telescopic cylinder is fixedly connected to a protective cushion at the top, the inner telescopic cylinder is slidably clamped to the inner side of the outer telescopic cylinder, the top of the outer plate is fixedly connected to an outer top plate, the top of the outer top plate is fixedly connected to a guide mounting plate, one side of the guide mounting plate is fixedly connected to a guide clamping block, the inner side of the guide clamping block is rotatably connected to a guide shaft, the outer side of the guide shaft is rotatably connected to a guide rotating cylinder, torsion springs are installed at both ends of the guide rotating cylinder, the torsion spring is installed on the inner side of the guide clamping block, A guide buffer frame is fixedly connected to the outside, an adaptive spring is installed on the inside of the guide buffer frame, a guide telescopic plate is fixedly connected to the top of the adaptive spring, the guide telescopic plate is slidably clamped on the inside of the guide buffer frame, and the top of the guide telescopic plate is fixedly connected to the guide inclined plate; when in use: by arranging an inner telescopic cylinder and a protective cushion, and by using the buffer spring for buffering, it can prevent the occurrence of gas failure, reduce the direct collision force between the substrate and the device, so as to prevent damage to the substrate, the guide inclined plate is maintained in one position by the adaptive spring and the torsion spring, and each time the substrate rotates, it collides with the guide inclined plate, which can be buffered and corrected by the guide inclined plate, and the guide inclined plate is reset by the torsion spring and the adaptive spring, and the position of the guide mounting plate can be adjusted to suit substrates of different sizes.

[0007] The present invention provides a substrate non-contact conveying and drying integrated device through improvement, which has the following improvements and advantages compared with the prior art:

[0008] First, the non-contact transmission and drying integrated device of the substrate described in the present invention is connected to the gas delivery device through the gas injection port. The gas is injected into the fixed cylinder through the gas injection port and injected into the inner side of the nozzle through the rotating cylinder. By pulling the adjustment plate and the adjustment rack, the adjustment rack drives the rotating gear to rotate, drives the rotating cylinder to rotate, and drives the closed rotating column to rotate. The closed rotating column is fan-shaped, so that the closed rotating column can conduct all the nozzles at the same time, or conduct the nozzles in the middle and any column, or only conduct the nozzles in one side, or fully closed, and the high-pressure gas enters through the unclosed fan-shaped ring of the closed rotating column. The substrate is placed between the devices and the conduction mode of the nozzle on the top of the nozzle is changed to move the substrate in one direction for transportation. When drying is required, the telescopic electric cylinder is contracted, the cylinder connecting plate is pulled, and the adjustment rod is pulled to move, so that the movable mounting plate and the fixed mounting plate are separated from the cooling inner cylinder. At the same time, the fixed plate is pressed against the movable mounting plate to bring the movable mounting plate and the fixed mounting plate closer, so that the two sets of rotating plates are gradually folded outward, and the heating component is gradually moved in the direction perpendicular to the center of the circle, so that the heating component heats the gas passing through the rotating cylinder, and the hot gas ejected from the nozzle is used to dry the substrate.

[0009] Second, the non-contact conveying and drying integrated device for substrates described in the present invention can prevent the occurrence of air cut-off by arranging an inner telescopic cylinder and a protective cushion, and can reduce the direct collision force between the substrate and the device to prevent damage to the substrate by using a buffer spring. The guide inclined plate is kept in one position by an adaptive spring and a torsion spring. When the substrate rotates each time, it collides with the guide inclined plate, which can be buffered and corrected by the guide inclined plate. The guide inclined plate is reset by a torsion spring and an adaptive spring, and the position of the guide mounting plate can be adjusted to suit substrates of different sizes.

[0010] Summary: The non-contact conveying and drying integrated device for substrates described in the present invention realizes the non-contact conveying and drying integrated operation of substrates through a cleverly designed structure. The device realizes the conveying of substrates by changing the gas injection mode; at the same time, the drying of substrates is realized by heating the gas. During the conveying process, a buffer device is provided to reduce the collision force between the substrate and the device, thereby protecting the substrate. In addition, the device also has an adjustment function to adapt to substrates of different sizes. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] The present invention will be further explained below in conjunction with the accompanying drawings and embodiments:

[0012] Figure 1 It is a three-dimensional structural schematic diagram of the present invention;

[0013] Figure 2 It is a schematic diagram of the fixed cylinder structure of the present invention;

[0014] Figure 3It is a schematic diagram of the installation base plate structure of the present invention;

[0015] Figure 4 It is a schematic diagram of the closed rotating column structure of the present invention;

[0016] Figure 5 It is a schematic diagram of the cooling inner cylinder structure of the present invention;

[0017] Figure 6 It is a schematic diagram of the fixed abutment structure of the present invention;

[0018] Figure 7 It is a schematic diagram of the heating assembly structure of the present invention;

[0019] Figure 8 It is a schematic diagram of the protective cushion structure of the present invention;

[0020] Fig. 9 It is a schematic diagram of the structure of the adjustment rack of the present invention;

[0021] Fig.10 It is a schematic diagram of the guide inclined plate structure of the present invention.

[0022] Description of reference numerals:

[0023] 1. Supporting bottom plate; 2. Supporting side plate; 3. Mounting bottom plate; 4. Jet cylinder; 5. Jet head; 6. Rotating cylinder; 7. Fixed cylinder; 8. Fixed cover; 9. Gas injection port; 10. Rotating gear; 11. Adjusting rod; 12. Cooling inner cylinder; 13. Closed rotating column; 14. Fixed abutment plate; 15. Inner clamping ring; 16. Movable mounting plate; 17. Mounting clamping block; 18. Mounting clamping shaft; 19. Rotating plate; 20. Heating assembly; 21. Connecting roller; 22. Fixed mounting plate; 23. Positioning guide column; 24. Outer telescopic cylinder; 25. Inner telescopic cylinder; 26. Protective cushion; 27. Buffer spring; 28. Outer bottom plate; 29. ​​Outer side plate; 30. Outer top plate; 31. Guide mounting plate; 32. Adjustment rack; 33. Adjustment plate; 34. Guide clamp; 35. Guide shaft; 36. Guide rotating cylinder; 37. Torsion spring; 38. Guide buffer frame; 39. Guide telescopic plate; 40. Adaptive spring; 41. Guide inclined plate; 42. Cylinder bottom plate; 43. Telescopic electric cylinder; 44. Cylinder connecting plate. DETAILED DESCRIPTION

[0024] The present invention is described in detail below, and the technical solutions in the embodiments of the present invention are clearly and completely described. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0025] The present invention provides a substrate non-contact conveying and drying integrated device through improvement. The technical solution of the present invention is:

[0026] like Figure 1-Figure 10As shown, a non-contact conveying and drying integrated device for substrates comprises a supporting bottom plate 1, supporting side plates 2 are fixedly connected to both sides of the supporting bottom plate 1, a mounting bottom plate 3 is fixedly connected to the top of the supporting bottom plate 1, a jet tube 4 is fixedly connected to the top of the mounting bottom plate 3, a jet head 5 is fixedly connected to the top of the jet tube 4, the jet head 5 has three rows, a closed rotating column 13 is rotatably connected inside the jet tube 4, a rotating cylinder 6 is fixedly connected to both ends of the closed rotating column 13, a fixed cylinder 7 is rotatably connected to one end of the rotating cylinder 6 away from the cooling inner cylinder 12, a gas injection port 9 is fixedly connected to the outer side of the fixed cylinder 7, and the fixed cylinder 7 is away from the rotating cylinder 12. One end of the cylinder 6 is fixedly connected with a fixed cover 8, the shape of the closed rotating column 13 is fan-shaped, the interior of the closed rotating column 13 is fixedly connected with a cooling inner cylinder 12, the side of the supporting side plate 2 away from the supporting bottom plate 1 is fixedly connected with an outer bottom plate 28, the top of the outer bottom plate 28 is fixedly connected with an outer plate 29, the top of the outer bottom plate 28 is slidably connected with an adjustment rack 32, the adjustment rack 32 is slidably connected between the supporting side plate 2 and the outer plate 29, the outer side of the rotating cylinder 6 is fixedly connected with a rotating gear 10, the rotating cylinder 6 is rotatably connected to the inner side of the supporting side plate 2, the rotating gear 10 is meshed with the top of the adjustment rack 32, and the adjustment gear One end of the strip 32 is fixedly connected with an adjustment plate 33, the interior of the fixed cover 8 is slidably connected with an adjustment rod 11, the inner wall of the rotating cylinder 6 is fixedly connected with an inner clamping ring 15, the inner side of the inner clamping ring 15 is fixedly connected with a fixed abutment plate 14, the outer side of the adjustment rod 11 is fixedly connected with a fixed mounting plate 22, the outer side of the adjustment rod 11 is slidably connected with a movable mounting plate 16, the movable mounting plate 16 and the adjacent side of the fixed mounting plate 22 are fixedly connected with a mounting clamping block 17, the interior of the mounting clamping block 17 is fixedly connected with a mounting clamping shaft 18, the outer side of the mounting clamping shaft 18 is rotatably connected with a rotating plate 19, the movable mounting plate 16 and the mounting The two rotating plates 19 on the adjacent side of the clamping shaft 18 are rotatably connected by a connecting roller 21, the interior of the rotating plates 19 is fixedly connected with a heating assembly 20, the fixed mounting plate 22 is slidably clamped in the interior of the cooling inner cylinder 12, the top of the adjusting rod 11 is fixedly connected with a positioning guide column 23, the positioning guide column 23 is slidably clamped in the interior of the cooling inner cylinder 12, the end of the adjusting rod 11 away from the positioning guide column 23 is fixedly connected with a cylinder connecting plate 44, the end of the cylinder connecting plate 44 away from the adjusting rod 11 is fixedly connected with a telescopic electric cylinder 43, and the end of the telescopic electric cylinder 43 away from the cylinder connecting plate 44 is fixedly connected with a cylinder body bottom plate 42;When in use: connect with the gas delivery device through the gas injection port 9, the gas is injected into the fixed cylinder 7 through the gas injection port 9, and then injected into the inner side of the nozzle 5 through the rotating cylinder 6. By pulling the adjustment plate 33 and the adjustment rack 32, the adjustment rack 32 drives the rotating gear 10 to rotate, drives the rotating cylinder 6 to rotate, and drives the closed rotating column 13 to rotate. The closed rotating column 13 is fan-shaped, so that the closed rotating column 13 can conduct all the nozzles 5 at the same time, or conduct the nozzles 5 in the middle and any one column, or only one side of the nozzle column 5 is conducted, or it is fully closed. The high-pressure gas enters the nozzle 5 through the unclosed fan-shaped ring of the closed rotating column 13, and then sprays out. By The substrate is placed between the devices, and the conduction mode of the nozzle 5 at the top of the nozzle cylinder 4 is changed to move the substrate in one direction for transportation. When drying is required, the telescopic electric cylinder 43 is contracted, the cylinder connecting plate 44 is pulled, and the adjustment rod 11 is pulled to move, so that the movable mounting plate 16 and the fixed mounting plate 22 are separated from the cooling inner cylinder 12, and at the same time, the fixed plate 14 is pressed against the movable mounting plate 16 to bring the movable mounting plate 16 and the fixed mounting plate 22 closer, so that the two sets of rotating plates 19 are gradually folded outward, and the heating assembly 20 is gradually moved in the direction perpendicular to the center of the circle, so that the heating assembly 20 heats the gas passing through the rotating cylinder 6, and the hot gas ejected from the nozzle 5 dries the substrate. ;

[0027] Furthermore, an outer telescopic cylinder 24 is fixedly connected to the top of the jet tube 4, and the outer telescopic cylinder 24 is fixedly sleeved on the outer side of the jet head 5 at the top of the jet tube 4. A buffer spring 27 is installed between the outer telescopic cylinder 24 and the jet head 5. The top height of the buffer spring 27 is connected to the inner telescopic cylinder 25. The inner telescopic cylinder 25 is fixedly connected to the top with a protective cushion 26. The inner telescopic cylinder 25 is slidably connected to the inner side of the outer telescopic cylinder 24. The top of the outer plate 29 is fixedly connected to the outer top plate 30. The top of the outer top plate 30 is fixedly connected to the guide mounting plate 31. One side of the guide mounting plate 31 is fixedly connected to a guide clamping block 34. The inner side of the guide clamping block 34 is rotatably connected to a guide shaft 35. The outer side of the guide shaft 35 is rotatably connected to a guide rotating cylinder 36. Torsion springs 37 are installed at both ends of the guide rotating cylinder 36. The torsion spring 37 is installed on the inner side of the guide clamping block 34. A guide buffer frame 38 is fixedly connected, an adaptive spring 40 is installed on the inner side of the guide buffer frame 38, a guide telescopic plate 39 is fixedly connected to the top of the adaptive spring 40, the guide telescopic plate 39 is slidably engaged with the inner side of the guide buffer frame 38, and a guide inclined plate 41 is fixedly connected to the top of the guide telescopic plate 39; when in use: by setting the inner telescopic cylinder 25 and the protective cushion 26, and by the buffer spring 27 for buffering, it can prevent the occurrence of gas failure, reduce the direct collision force between the substrate and the device, so as to prevent damage to the substrate, the guide inclined plate 41 is maintained in one position by the adaptive spring 40 and the torsion spring 37, and each time the substrate rotates, it collides with the guide inclined plate 41, which can be buffered and corrected by the guide inclined plate 41, and the guide inclined plate 41 is reset by the torsion spring 37 and the adaptive spring 40, and the position of the guide mounting plate 31 can be adjusted to suit substrates of different sizes.

[0028] Working principle: When in use: connect with the gas delivery device through the gas injection port 9, the gas is injected into the fixed cylinder 7 through the gas injection port 9, through the rotating cylinder 6, and injected into the inner side of the nozzle 5. By pulling the adjustment plate 33, the adjustment rack 32 is pulled to make the adjustment rack 32 drive the rotating gear 10 to rotate, drive the rotating cylinder 6 to rotate, and drive the closed rotating column 13 to rotate. The closed rotating column 13 is fan-shaped, so that the closed rotating column 13 can conduct all nozzles 5 at the same time, or conduct the nozzles 5 in the middle and any column, or only one side of the nozzle head 5 is conducted, or fully closed. The high-pressure gas enters the nozzle 5 through the unclosed fan-shaped ring of the closed rotating column 13, and then sprays out. By placing the substrate between the devices and changing the conduction mode of the nozzle 5 at the top of the nozzle cylinder 4, the substrate is moved in one direction for transportation. When drying is required, the telescopic electric cylinder 43 is contracted, the cylinder connecting plate 44 is pulled, and the adjustment rod 11 is pulled to move, so that the movable mounting plate 16 and The fixed mounting plate 22 is separated from the cooling inner cylinder 12, and at the same time, the fixed abutment plate 14 abuts against the movable mounting plate 16 to bring the movable mounting plate 16 and the fixed mounting plate 22 closer, so that the two groups of rotating plates 19 are gradually folded outward, and the heating component 20 is gradually moved in the direction perpendicular to the center of the circle, so that the heating component 20 heats the gas passing through the rotating cylinder 6, and the hot gas ejected from the nozzle 5 dries the substrate. By setting the inner telescopic cylinder 25 and the protective cushion 26, and buffering by the buffer spring 27, it can prevent the occurrence of gas cut-off and reduce the direct collision force between the substrate and the device to prevent damage to the substrate. The guide inclined plate 41 is maintained in one position by the adaptive spring 40 and the torsion spring 37. Every time the substrate rotates, it collides with the guide inclined plate 41, which can be buffered and corrected by the guide inclined plate 41. The guide inclined plate 41 is reset by the torsion spring 37 and the adaptive spring 40, and the position of the guide mounting plate 31 can be adjusted to suit substrates of different sizes.

[0029] The above description enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest range consistent with the principles and novel features disclosed herein.

Claims

1. A substrate non-contact conveying and drying integrated device, comprising a supporting base plate (1), characterized in that: The two sides of the support base plate (1) are fixedly connected to support side plates (2), the top of the support base plate (1) is fixedly connected to a mounting base plate (3), the top of the mounting base plate (3) is fixedly connected to a jet tube (4), the top of the jet tube (4) is fixedly connected to a jet head (5), the jet heads (5) have three rows, the inside of the jet tube (4) is rotatably connected to a closed rotating column (13), both ends of the closed rotating column (13) are fixedly connected to a rotating cylinder (6), the end of the rotating cylinder (6) away from the cooling inner cylinder (12) is rotatably connected to a fixed cylinder (7), the outer side of the fixed cylinder (7) is fixedly connected to an air injection port (9), the end of the fixed cylinder (7) away from the rotating cylinder (6) is fixedly connected to a fixed cover (8), the closed rotating column (13) is fan-shaped, and the inside of the closed rotating column (13) is fixedly connected to the cooling inner cylinder (12); The side of the supporting side plate (2) away from the supporting bottom plate (1) is fixedly connected to an outer bottom plate (28); the top of the outer bottom plate (28) is fixedly connected to an outer side plate (29); the top of the outer bottom plate (28) is slidably connected to an adjustment rack (32); the adjustment rack (32) is slidably connected between the supporting side plate (2) and the outer side plate (29); the outer side of the rotating cylinder (6) is fixedly connected to a rotating gear (10); the rotating cylinder (6) is rotatably connected to the inner side of the supporting side plate (2); the rotating gear (10) is meshed with the top of the adjustment rack (32); and one end of the adjustment rack (32) is fixedly connected to an adjustment plate (33); The fixed cover (8) is internally slidably engaged with an adjusting rod (11), the inner wall of the rotating cylinder (6) is fixedly connected with an inner clamping ring (15), the inner side of the inner clamping ring (15) is fixedly connected with a fixed abutment plate (14), the outer side of the adjusting rod (11) is fixedly connected with a fixed mounting plate (22), the outer side of the adjusting rod (11) is slidably engaged with a movable mounting plate (16), the movable mounting plate (16) and the fixed mounting plate (22) are both fixedly connected with a mounting clamping block (17) on one side, the mounting clamping shaft (18) is fixedly connected inside the mounting clamping block (17), the outer side of the mounting clamping shaft (18) is rotatably connected with a rotating plate (19), the two rotating plates (19) on one side of the movable mounting plate (16) and the mounting clamping shaft (18) are rotatably connected by a connecting roller (21), and the interior of the rotating plate (19) is fixedly connected with a heating component (20).

2. The substrate non-contact conveying and drying integrated device according to claim 1, characterized in that: The fixed mounting plate (22) is slidably engaged with the interior of the cooling inner cylinder (12); the top end of the adjustment rod (11) is fixedly connected with a positioning guide column (23); and the positioning guide column (23) is slidably engaged with the interior of the cooling inner cylinder (12).

3. The substrate non-contact conveying and drying integrated device according to claim 2, characterized in that: The top of the jet cylinder (4) is fixedly connected to an outer telescopic cylinder (24), the outer telescopic cylinder (24) is fixedly sleeved on the outer side of a jet head (5) at the top of the jet cylinder (4), a buffer spring (27) is installed between the outer telescopic cylinder (24) and the jet head (5), the top of the buffer spring (27) is highly connected to an inner telescopic cylinder (25), the top of the inner telescopic cylinder (25) is fixedly connected to a protective cushion (26), and the inner telescopic cylinder (25) is slidably clamped on the inner side of the outer telescopic cylinder (24).

4. The substrate non-contact conveying and drying integrated device according to claim 3, characterized in that: The top of the outer plate (29) is fixedly connected to an outer top plate (30), the top of the outer top plate (30) is fixedly connected to a guide mounting plate (31), one side of the guide mounting plate (31) is fixedly connected to a guide clamping block (34), the inner side of the guide clamping block (34) is rotatably connected to a guide shaft (35), the outer side of the guide shaft (35) is rotatably connected to a guide rotating cylinder (36), both ends of the guide rotating cylinder (36) are mounted with torsion springs (37), the torsion spring (37) is mounted on the inner side of the guide clamping block (34), the outer side of the guide rotating cylinder (36) is fixedly connected to a guide buffer frame (38), the inner side of the guide buffer frame (38) is mounted with an adaptive spring (40), the top of the adaptive spring (40) is fixedly connected to a guide telescopic plate (39), the guide telescopic plate (39) is slidably clamped to the inner side of the guide buffer frame (38), and the top of the guide telescopic plate (39) is fixedly connected to a guide inclined plate (41).

5. The substrate non-contact conveying and drying integrated device according to claim 4, characterized in that: One end of the adjustment rod (11) away from the positioning guide column (23) is fixedly connected to a cylinder connecting plate (44), one end of the cylinder connecting plate (44) away from the adjustment rod (11) is fixedly connected to a telescopic electric cylinder (43), and one end of the telescopic electric cylinder (43) away from the cylinder connecting plate (44) is fixedly connected to a cylinder body bottom plate (42).

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