Vacuum manipulator with unequal arm lengths

Abstract

The invention discloses a vacuum manipulator with unequal arm lengths, which relates to the technical field of semiconductor equipment and comprises a mounting main body, at least one mechanical arm component and a transmission component, the mechanical arm assembly comprises a first arm, a second arm and an end effector. The first arm is provided with a driving end and a first transmission end; the second arm is provided with a second transmission end and an execution end, and the length of the second arm is different from that of the first arm; the end effector is rotationally arranged at the execution end, and the end effector is provided with a finger part; the transmission assembly at least comprises a driving belt wheel and an execution belt wheel; and at least one of the driving belt wheel and the execution belt wheel is a variable-diameter wheel, and the variable-diameter wheel is used for enabling a finger part of the end effector to move linearly. The end effector is mainly used for the wafer carrying process, and at least the problems that in the prior art, movement of the end effector is in a nonlinear state, path planning of a mechanical arm is limited, and the space occupancy rate is large can be solved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and in particular to a vacuum manipulator with unequal arm lengths. Background Art

[0002] Vacuum manipulators are widely used in semiconductor manufacturing, wafer processing and other fields. They are mainly used to transport, position and clamp thin sheets of materials such as wafers.

[0003] In the prior art, the SCARA (Selective Compliance Assembly Robot Arm) manipulator used for wafer transfer in the industry has a structural feature of equal arm length. This equal arm length SCARA manipulator is widely used in semiconductor automated transfer equipment, such as the atmospheric manipulator integrated in the EFEM (Equipment Front Module) equipment and the vacuum manipulator integrated in the TM (Transfer Module) vacuum transfer equipment. The vacuum manipulator in the prior art currently has at least the following problems: large Z-axis space occupancy rate of the equal-arm manipulator and limited path planning.

[0004] Therefore, it is necessary to provide a new type of vacuum manipulator to solve the above problems in the prior art. Summary of the Invention

[0005] The purpose of the present invention is to provide a vacuum manipulator with unequal arm lengths, which at least solves the following technical problems: 1. The Z-axis space occupancy rate of the medium-arm manipulator in the existing technology is large; 2. The path planning of the robot in the existing technology is limited.

[0006] To achieve the above object, the technical solution of the present invention is as follows: A vacuum manipulator with unequal arm lengths, characterized by comprising a mounting body, at least one manipulator arm assembly and a transmission assembly; The robotic arm assembly includes a first arm, a second arm, and an end effector; The first arm has a driving end and a first transmission end, the driving end is rotatably arranged on the mounting body, and the driving end and the first transmission end both have a joint center; The second arm has a second transmission end and an execution end, the second transmission end is rotatably arranged on the first transmission end, and the second transmission end and the execution end both have a joint center; The length of the distance between the centers of the two joints of the second arm is different from the length of the distance between the centers of the two joints of the first arm; The end effector is rotatably disposed at the execution end, and the end effector has a finger portion; The transmission assembly is arranged in the mechanical arm assembly, and the transmission assembly is used to make the finger portion of the end effector move linearly when extending or retracting.

[0007] By adopting the above technical solution, the first arm and the second arm have different effective lengths. Compared with the case with the same effective lengths, different effective lengths can provide a longer reach under the same accommodation volume, thereby increasing the stroke of the end effector and reducing the space occupancy rate. The variable wheel is used to compensate for the influence of the different effective lengths of the first arm and the second arm, so that when the first arm is extended or retracted, the end effector moves linearly relative to the body, so that the end effector can clamp the wafer through a shorter path.

[0008] Optionally, the transmission assembly includes a driving pulley, an execution pulley and a transmission component, the driving pulley is rotatably arranged at the driving end, the execution pulley is rotatably arranged at the execution end, and the driving pulley and the execution pulley are both transmission-connected to the transmission component; at least one of the driving pulley and the execution pulley is a variable diameter pulley.

[0009] By adopting the above technical solution, at least one of the driving pulley and the execution pulley is a reducing pulley, which is used to compensate for the unequal lengths of the first arm and the second arm, so that the finger on the end effector can move linearly when extending or retracting.

[0010] Optionally, the transmission component includes a first transmission wheel and a second transmission wheel arranged coaxially, the first transmission wheel is rotatably arranged at the first transmission end, the second transmission wheel is fixedly arranged at the first transmission end and extends to the second transmission end, the driving pulley is in transmission connection with the first transmission wheel, the execution pulley is in transmission connection with the second transmission wheel, and the end effector is fixedly connected to the execution pulley; In the working state, the driving pulley is stationary, the first arm rotates, causing the first transmission wheel to rotate and drive the second arm to rotate; the second transmission wheel is stationary, the second arm rotates and drives the execution pulley to rotate, so as to drive the finger of the end effector to move linearly when extending or retracting.

[0011] By adopting the above technical solution, the first arm rotates, and the second arm is driven to rotate through the first transmission wheel, which makes it easier to control the movement process of the end effector.

[0012] Optionally, a first transmission belt is provided on the first arm, and at least one end of the first transmission belt is wound around the side wall of the driving pulley or the side wall of the first transmission pulley; a second transmission belt is provided on the second arm, and at least one end of the second transmission belt is wound around the side wall of the second transmission pulley or the side wall of the execution pulley.

[0013] By adopting the above technical solution, the first transmission belt and the second transmission belt play a transmission role. The first transmission belt is convenient for converting the rotation of the driving pulley into the rotation of the first transmission wheel, and the second transmission belt is convenient for converting the rotation of the second transmission wheel into the rotation of the execution pulley.

[0014] Optionally, at least part of the side wall of the variable diameter wheel is a variable diameter portion, and the variable diameter portion is the side wall of the variable diameter wheel in contact with the first transmission belt or the second transmission belt in a stationary or moving state; The calculation formula of the variable diameter wheel is: When the driving pulley is the variable diameter pulley, the radius r1 of the variable diameter pulley is:

[0015] Where G1 is the first arm transmission ratio, R1 is the first transmission wheel radius; When the actuator pulley is the variable diameter pulley, the radius r2 of the variable diameter pulley is:

[0016] Where G2 is the second arm transmission ratio, and R2 is the radius of the second transmission wheel.

[0017] By adopting the above technical solution, the radius of the variable wheel when it is a driving pulley can be calculated through the transmission ratio of the first arm; the radius of the variable wheel when it is an execution pulley can be calculated through the transmission ratio of the second arm.

[0018] Optionally, a direction connecting the mounting body and the wafer is defined as a first direction, a direction perpendicular to the first direction is defined as a second direction, a first angle between the first arm and the second direction is defined as θ, and a second angle between the second arm and the second direction is defined as β; The transmission ratio calculation formula is: The transmission ratio G1 of the first arm is:

[0019] The transmission ratio G2 of the second arm is:

[0020] By adopting the above technical solution, the transmission ratio of the first arm and the transmission ratio of the second arm can be calculated based on the corresponding relationship between the second included angle β and the first included angle θ.

[0021] Optionally, the corresponding relationship between the second angle β and the first angle θ is: β=arc =arc

[0022] Where l is the length of the second arm; L is the length of the first arm; a is the difference in length between the first arm and the second arm in the horizontal direction.

[0023] By adopting the above technical solution, the length l of the second arm and the length L of the first arm are fixed values, which facilitates the calculation of the corresponding relationship between the second angle β and the first angle θ based on the length l of the second arm and the length L of the first arm.

[0024] Optionally, a rotor assembly is further included, which includes at least a first rotating shaft and a second rotating shaft arranged coaxially, and the second rotating shaft is passed through the first rotating shaft; the driving end is fixedly arranged on the first rotating shaft, and the driving pulley is fixedly arranged on the second rotating shaft.

[0025] By adopting the above technical solution, the first rotating shaft and the second rotating shaft are used to control the rotation of the first arm and the driving pulley respectively, that is, the first arm and the end effector can work independently, which facilitates the wafer processing process.

[0026] Optionally, the execution pulley or the driving pulley is the variable diameter pulley, at least two groups of the robotic arm assemblies are provided, and the joint centers of the driving ends of the two robotic arm assemblies are coaxially arranged; In the working state, the two first arms rotate independently to drive the corresponding execution pulleys to rotate independently.

[0027] By adopting the above technical solution, the two first arms move independently of each other, and the two driving pulleys move independently of each other. During operation, different combination states can be selected to meet the needs of different working conditions.

[0028] Optionally, the invention further includes a rotor assembly, the rotor assembly including a first rotating shaft, a second rotating shaft, a fourth rotating shaft and a fifth rotating shaft arranged coaxially, the fifth rotating shaft passing through the fourth rotating shaft, the fourth rotating shaft passing through the second rotating shaft, the second rotating shaft passing through the first rotating shaft, the two first arms being fixedly provided on the first rotating shaft and the fourth rotating shaft respectively, and the two driving pulleys being fixedly provided on the second rotating shaft and the fifth rotating shaft respectively; In the working state, the first rotating shaft or the fourth rotating shaft rotates to drive the corresponding end effector to move; the first rotating shaft and the second rotating shaft rotate simultaneously to drive the corresponding robotic arm assembly to rotate as a whole; the fourth rotating shaft and the fifth rotating shaft rotate simultaneously to drive the corresponding robotic arm assembly to rotate as a whole.

[0029] By adopting the above technical solution, when the first rotating shaft rotates, the second rotating shaft does not move. At this time, one of the first arms moves, driving the corresponding end effector to perform rotational motion; when the first rotating shaft and the second rotating shaft rotate at the same time, the corresponding robotic arm assembly performs rotational motion as a whole; when the fourth rotating shaft rotates, the fifth rotating shaft does not move. At this time, the other first arm moves, driving the corresponding end effector to perform rotational motion; when the fourth rotating shaft and the fifth rotating shaft rotate at the same time, the corresponding robotic arm assembly performs rotational motion as a whole.

[0030] Optionally, the execution pulley and the execution pulley are both the variable diameter pulleys, the unequal arm length vacuum manipulator includes a group of transfer assemblies or at least two groups of transfer assemblies, each of the transfer assemblies includes two of the manipulator arm assemblies, the joint centers of the two driving ends are coaxially arranged, and the two driving pulleys are connected to each other and coaxially arranged; Among them, in each group of the transfer components, the two first arms rotate alternately or simultaneously, and the driving pulley remains stationary, driving the corresponding end effector to move linearly when extending or retracting, or driving the two end effectors to extend or retract simultaneously.

[0031] By adopting the above technical solution, the two first arms in the same transfer assembly move alternately or simultaneously, and the two end effectors move separately or simultaneously. Different movement modes can be selected according to needs to facilitate the processing process.

[0032] Optionally, the invention further includes a rotor assembly, wherein the rotor assembly includes a first rotating shaft, a second rotating shaft, and a third rotating shaft arranged coaxially, the second rotating shaft is passed through the first rotating shaft, and the third rotating shaft is passed through the second rotating shaft. In each group of the transfer assemblies, the two first arms are fixedly arranged on the first rotating shaft and the third rotating shaft respectively, and the two driving pulleys are both coaxially arranged with the second rotating shaft and fixedly arranged on the side wall of the second rotating shaft. In the working state, one of the first rotating shaft or the third rotating shaft rotates, the other does not move, and the second rotating shaft does not move, so as to drive the corresponding end effector to move; the rotation of the second rotating shaft drives the two driving pulleys to rotate synchronously; the first rotating shaft and the third rotating shaft rotate at the same time, driving the two end effectors to move at the same time.

[0033] By adopting the above technical solution, when the first rotating shaft rotates, the second rotating shaft and the third rotating shaft do not rotate. At this time, the first arm fixed on the first rotating shaft moves and drives the corresponding end effector to perform rotational motion; when the third rotating shaft rotates, the first rotating shaft and the second rotating shaft do not rotate. At this time, the first arm fixed on the second rotating shaft moves and drives the corresponding end effector to perform rotational motion; when the first rotating shaft and the third rotating shaft rotate at the same time, the directions can be in the same direction or in opposite directions, and the two first arms can be extended or retracted at the same time; or one can be extended and the other retracted.

[0034] The beneficial effects of the unequal arm length vacuum manipulator provided by the present invention include at least: 1. The first arm and the second arm are of unequal length, and the overall structure is relatively compact, which reduces space occupancy. At the same time, the first arm and the end effector can work independently, which is convenient for adapting to different working conditions and can have more path planning methods; 2. At least one of the drive pulley and the actuator pulley is a reducing pulley. The reducing pulley is mainly used to compensate for the different effective lengths of the first arm and the second arm. When the first arm is extended or retracted, the end effector moves linearly relative to the mounting body. During operation, the path for clamping the wafer is shortened, thereby improving wafer clamping efficiency. 3. Based on the correspondence between the second angle β and the first angle θ, the radius of the variable wheel can be calculated when the first angle θ is at different angle values, further ensuring the linear motion of the end effector relative to the mounting body when the first arm is extended or retracted. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 Schematic diagram of the connection between the first arm, the second arm and the end effector in the present invention; Figure 2 Schematic diagram of the connection between the driving pulley, the actuator pulley and the transmission component in the present invention; Figure 3 Schematic diagram of the connection between the rotor assembly and the robotic arm assembly in Example 1 of the present invention; Figure 4 This is a simplified schematic diagram of the connection method of a single robotic arm component of the present invention; Figure 5 This is a schematic diagram of the angles of various components when a single robotic arm assembly of the present invention moves; Figure 6 This is a schematic diagram of the main structure of the robotic arm assembly in Example 2 of the present invention; Figure 7 Schematic diagram of the positions of the rotor assembly and the lifting assembly in Example 2 of the present invention; Figure 8 This is a schematic diagram of the main structure of the robotic arm assembly in Example 3 of the present invention; Figure 9 Schematic diagram of the connection between the rotor assembly and the robotic arm assembly in Example 3 of the present invention; Figure 10 Schematic diagram of the position distribution of multiple robotic arm assemblies and transmission assemblies in the robotic arm assemblies in Example 4 of the present invention; Figure 11 Schematic diagram of the positions of the rotor assembly and the lifting assembly in Example 4 of the present invention; Figure 12Schematic diagram of the position of the screw rod and nut in Example 4 of the present invention; Figure 13 Schematic diagram of the working states of the robotic arm assembly in Example 4 of the present invention in the same-direction HOME position, 90° HOME position, and reverse HOME position; Figure 14 Schematic diagram of the working state of the robot arm assembly in Example 4 of the present invention at the same direction zero position and the reverse direction zero position; Figure 15 Schematic diagram of some working states of the robot arm assembly in Example 4 of the present invention when it moves at any angle; Figure 16 Schematic diagram of other working states of the robotic arm assembly in embodiment 4 of the present invention when it moves at any angle.

[0036] Reference numerals: 100. Robot arm assembly; 200. First arm; 210. Drive end; 220. First transmission end; 300. Second arm; 310. Second transmission end; 320. Execution end; 400. End effector; 500. Transmission assembly; 510. Drive pulley; 520. Execution pulley; 530. First transmission wheel; 540. Second transmission wheel; 550. First transmission belt; 560. Second transmission belt; 600. Rotor assembly; 610. First control group; 611. First rotating shaft; 612. Second rotating shaft; 620. Second control group; 621. Fourth rotating shaft; 622. Fifth rotating shaft; 700. Lifting assembly; 710. Linear guide rail; 720. Screw rod; 721. Nut; 730. Lifting motor; 800. Direct drive motor; 900. Control assembly. DETAILED DESCRIPTION

[0037] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein should be the common meanings understood by people with ordinary skills in the field to which the invention belongs. The words "including" and similar words used in this article mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0038] The specific embodiments of the present invention will be further described in detail below with reference to the accompanying drawings.

[0039] An embodiment of the present invention provides a vacuum manipulator with unequal arm lengths, which at least solves the problems in the prior art of large space occupancy of the manipulator, non-linear movement of the end effector, and limited path planning of the manipulator, as described below.

[0040] Example 1: Reference Figure 1 、 Figure 2 and Figure 3 , a vacuum manipulator with unequal arm length includes a mounting body: the mounting body mainly plays a supporting role, at least one robot arm assembly 100 is arranged on the mounting body, and a driving structure is also arranged inside the mounting body, which is mainly used to drive the robot arm assembly 100 to move. In some embodiments, the robot arm assembly 100 can be selected to be set in one group, two groups or multiple groups. Specifically in this embodiment, only one group of the robot arm assembly 100 is selected, and the robot arm assembly 100 includes a first arm 200, a second arm 300 and an end effector 400; wherein the first arm 200 has a driving end 210 and a first transmission end 220, and the driving end 210 is rotatably arranged at the end of the mounting body through a rotating shaft and can be rotated on the mounting body; the second arm 300 has a second transmission end 310 and an execution end 320, wherein the second transmission end 310 is rotatably arranged at the first transmission end 220, and the end effector 400 is rotatably arranged at the execution end 320; wherein the first arm 200 has a driving end 210 and a first transmission end 220, and the driving end 210 is rotatably arranged at the end of the mounting body An arm 200 has a shell, a cover plate, a bearing and other components inside the first arm 200, and the other components involved are described in detail below; the second arm 300 also has a shell, a cover plate, a bearing and other components inside the second arm 300, and the other components involved are described in detail below; the end effector 400 includes components such as a transition plate, a finger adjustment plate, a finger pressure plate and a finger part, which are mainly used to clamp the wafer. During the movement of the robotic arm assembly 100, the first arm 200 rotates around the axis of the mounting body, the second arm 300 rotates around the rotating shaft at the first transmission end 220, and the end effector 400 rotates around the rotating shaft of the execution end 320, so that the fingers on the end effector 400 can move to the specified position to clamp the wafer. The axial direction of the rotating shaft of the execution end 320 is defined as the Z-axis direction. Therefore, the present invention at least solves the problem of large space occupancy in the Z-axis direction.

[0041] During the rotation of the first arm 200, the second arm 300 and the end effector 400, a transmission assembly 500 for transmission is required. Figure 1 、 Figure 2 and Figure 3The transmission assembly 500 is arranged inside the robot arm assembly 100, and is used to drive the robot arm assembly 100 to move, and make the finger part of the end effector 400 move linearly relative to the installation body when extending or retracting. The transmission assembly 500 includes at least a driving pulley 510, an execution pulley 520 and a transmission component. The driving pulley 510 is arranged on the driving end 210 through a rotating shaft, and the driving pulley 510 is placed in the housing of the first arm 200. The execution pulley 520 is arranged on the execution end 320 through a rotating shaft, and the execution pulley 520 is placed in the housing of the second arm 300, and the driving The pulley 510 and the execution pulley 520 are both connected to the transmission component in a transmission manner; the end effector 400 is fixed to the execution pulley 520, which can be fixed by snap connection, integral molding or bolt fixation. In this embodiment, the execution pulley 520 is fixed to the end effector 400 by bolt fixation; the transmission component includes a first transmission wheel 530 and a second transmission wheel 540, the first transmission wheel 530 and the second transmission wheel 540 are coaxially arranged, and the first transmission wheel 530 is rotatably arranged on the first transmission end 220 through a rotating shaft and is arranged inside the housing of the first arm 200, and the second transmission wheel 530 is fixed to the end effector 400 by bolt fixation. The wheel 540 is fixedly placed on the first transmission end 220 and extends to the interior of the housing of the second arm 300. Specifically, a fixed shaft is fixedly provided on the end face of the second transmission wheel 540, and the end of the fixed shaft is fixedly provided on the first transmission end 220. The first transmission wheel 530 is sleeved on the fixed shaft, and the radius of the first transmission wheel 530 is larger than the radius of the second transmission wheel 540. At the same time, the second arm 300 is fixedly connected to the first transmission wheel 530, so that when the first transmission wheel 530 rotates, it can drive the second arm 300 to rotate; wherein the driving pulley 510 is transmission-connected to the first transmission wheel 530, and the execution pulley 520 is transmission-connected to the second transmission wheel 530. The transmission wheel 540 is connected for transmission; during operation, the driving pulley 510 is stationary, the first arm 200 rotates, and the positions of the first transmission wheel 530 and the second transmission wheel 540 change with the rotation of the first arm 200. At the same time, the first transmission wheel 530 rotates, and when the first transmission wheel 530 rotates, it drives the second arm 300 to rotate. The second transmission wheel 540 remains relatively stationary and does not rotate. The position of the execution pulley 520 changes and rotates, that is, the rotation of the second arm 300 drives the execution pulley 520 to rotate, so as to drive the finger part of the end effector 400 to move in a straight line when extending or retracting.

[0042] Since there is a certain distance between the driving pulley 510 and the first transmission wheel 530, the second transmission wheel 540 and the execution pulley 520, a transmission member is required for transmission during the working process. Figure 1 、 Figure 2 and Figure 3, a first transmission belt 550 is provided on the first arm 200, and the two ends of the first transmission belt 550 are respectively connected to the driving pulley 510 and the first transmission pulley 530; a second transmission belt 560 is provided on the second arm 300, and the two ends of the second transmission belt 560 are respectively connected to the second transmission pulley 540 and the execution pulley 520; wherein the first transmission belt 550 and the second transmission belt 560 can be transmission belts connected end to end; or they can be transmission belts separated from the end; or wherein one of the first transmission belt 550 and the second transmission belt 560 is a transmission belt connected end to end, and the other is a transmission belt connected end to end. The transmission belt is separated at the head; when it is a transmission belt connected at the head and tail, one end of the first transmission belt 550 is sleeved on the side wall of the driving pulley 510, and the other end is sleeved on the side wall of the first transmission pulley 530. The second transmission belt 560 has one end sleeved on the side wall of the second transmission pulley 540, and the other end sleeved on the side wall of the execution pulley 520. When the driving pulley 510 rotates, the first transmission belt 550 drives the first transmission pulley 530 to rotate, and the second transmission pulley 540 rotates synchronously. The execution pulley 520 is not driven by the second transmission belt 560 to rotate, thereby driving the end effector 400 to rotate. When the transmission belt is separated at the head and tail, one or two first transmission belts 550 may be selected, and at least one end of the first transmission belt 550 is wound around the side wall of the driving pulley 510 or the side wall of the first transmission pulley 530. Alternatively, one end of the first transmission belt 550 may be wound around the side wall of the driving pulley 510, or one end of the first transmission belt 550 may be wound around the side wall of the first transmission pulley 530, or both ends of the first transmission belt 550 may be wound around the side walls of the driving pulley 510 and the first transmission pulley 530 respectively. One or two second transmission belts 560 may be provided, and at least one end of the second transmission belt 560 may be wound around the side wall of the execution pulley 520 or the side wall of the second transmission pulley 540. Alternatively, one end of the second transmission belt 560 may be wound around the side wall of the execution pulley 520, or one end of the second transmission belt 560 may be wound around the side wall of the second transmission pulley 540, or both ends of the second transmission belt 560 may be wound around the side wall of the execution pulley 520 and the side wall of the second transmission pulley 540 respectively. In this embodiment, two first transmission belts 550 and two second transmission belts 560 are used, and both are separated at the head and tail, which is suitable for the vacuum mode inside the manipulator; one end of the first transmission belt 550 is wound around the side wall of the driving pulley 510, and the other end is connected to the side wall of the first transmission pulley 530; one end of the other first transmission belt 550 is wound around the side wall of the first transmission pulley 530, and the other end is connected to the side wall of the driving pulley 510; one end of the second transmission belt 560 is wound around the side wall of the execution pulley 520, and the other end is connected to the side wall of the second transmission pulley 540; another end of the second transmission belt 560 is wound around the side wall of the second transmission pulley 540, and the other end is connected to the side wall of the execution pulley 520; In addition, the first transmission belt 550 and the second transmission belt 560 can be made of belts, or steel belts or other structures that can realize the transmission function. In this embodiment, the first transmission belt 550 and the second transmission belt 560 are both steel belts. During operation, the driving pulley 510 does not move, the first arm 200 rotates, and the positions of the first transmission wheel 530 and the second transmission wheel 540 change with the rotation of the first arm 200. Therefore, under the restriction of the first transmission belt 550, the first transmission wheel 530 rotates around its own axis. When the first transmission wheel 530 rotates, the belt The second arm 300 rotates, the second transmission wheel 540 remains relatively stationary and does not rotate, the position of the execution pulley 520 changes, and under the restriction of the second transmission belt 560, the execution pulley 520 rotates to drive the finger part of the end effector 400 to extend or retract in a straight line; the driving pulley 510, when the rotational speed of the first arm 200 and the driving pulley 510 are different, the finger part of the end effector 400 can be extended or retracted; when the rotational speed of the first arm 200 and the driving pulley 510 is the same, the robot arm assembly 100 as a whole rotates around the mounting body.

[0043] In order to solve the problem of limited path planning during the movement of the robot arm assembly 100, refer to Figure 1 、 Figure 4 and Figure 5, the length relationship between the second arm 300 and the first arm 200 is that the length of the first arm 200 can be selected to be greater than the length of the second arm 300, or the length of the first arm 200 can be selected to be equal to the length of the second arm 300, or the length of the first arm 200 can be selected to be less than the length of the second arm 300. In this embodiment, the length of the first arm 200 is greater than the length of the second arm 300; at the same time, the driving end 210, the first transmission end 220, the second transmission end 310 and the execution end 320 all have joint centers. In this embodiment, the length of the first arm 200 is less than the length of the second arm 300, which means that the length of the distance between the two joint centers of the first arm 200 is less than the length of the two joint centers of the second arm 300, that is, the length of the distance between the two joint centers of the second arm 300 is different from the length of the distance between the two joint centers of the first arm 200, the length of the distance between the two joint centers of the first arm 200 is the effective length of the first arm 200, and the length of the distance between the two joint centers of the second arm 300 is the effective length of the first arm 200. The length is the effective length of the second arm 300; in addition, at least one of the driving pulley 510 and the executing pulley 520 is a reducing wheel, and at least part of the side wall of the reducing wheel is a reducing portion, which is the side wall of the reducing wheel in contact with the first transmission belt 550 or the second transmission belt 560 in a stationary or moving state; the reducing wheel is used to compensate for the problem that the path planning is affected by the different lengths of the first arm 200 and the second arm 300, so that when the first arm 200 is extended or retracted, the finger of the end effector 400 can perform linear motion relative to the mounting body; wherein, the radius of the reducing wheel is related to the effective length of the first arm 200 and the effective length of the second arm 300; when the effective length of the first arm 200 and the effective length of the second arm 300 change, the shape and radius of the reducing wheel also change. Specifically, according to the difference between the effective length of the first arm 200 and the effective length of the second arm 300, the radius of the reducing wheel can be calculated according to the following content: In this embodiment, the effective length of the first arm 200 is L, and the effective length of the second arm 300 is l. During operation, the effective length L of the first arm 200 and the effective length l of the second arm 300 are fixed values. The direction of the line connecting the mounting body and the wafer is defined as the first direction, the direction perpendicular to the first direction is defined as the second direction, the first angle between the first arm 200 and the second direction is θ, the second angle between the second arm 300 and the second direction is β, and a is the length difference between the first arm 200 and the second arm 300 in the horizontal direction. Among them, when the first angle θ changes, the second angle β changes accordingly, and the relevant change relationship is: l▪ =L▪ -

[0044] =

[0045] β=arc =arc

[0046] According to the correlation between the first angle θ and the second angle β, the transmission ratio G1 of the first arm 200 and the transmission ratio G2 of the second arm 300 can be obtained: Transmission ratio G1 of the first arm 200:

[0047] The transmission ratio G2 of the second arm 300 is:

[0048] The radius r1 of the reducing pulley when the reducing pulley is the driving pulley 510 or the radius r2 of the reducing pulley when the reducing pulley is the execution pulley 520 can be calculated by using the transmission ratio G1 of the first arm 200 and the transmission ratio G2 of the second arm 300. When the driving pulley 510 is a variable diameter pulley, the radius of the variable diameter pulley r1 is:

[0049] When the executive pulley 520 is a variable diameter pulley, the radius of the variable diameter pulley r2 is:

[0050] Wherein, R1 and R2 are the radius of the first transmission wheel 530 and the radius of the second transmission wheel 540 respectively; When the driving pulley 510 or the executing pulley 520 is used as a variable diameter pulley, the radius of the variable diameter pulley can be calculated according to the above algorithm to make it suitable for different working conditions.

[0051] During the operation of the robot arm assembly 100, the first arm 200 and the driving pulley 510 need to be able to rotate independently. In order to meet the requirements that the first arm 200 and the driving pulley 510 can rotate independently, refer to Figure 1 、 Figure 2 and Figure 3The unequal arm length vacuum manipulator further includes a rotor assembly 600, which is arranged inside the installation body, wherein the rotor assembly 600 at least includes a first rotating shaft 611 and a second rotating shaft 612, the first rotating shaft 611 and the second rotating shaft 612 are arranged as a through-axis, and the second rotating shaft 612 is passed through the first rotating shaft 611, the first rotating shaft 611 and the second rotating shaft 612 can both rotate around their own axes, and the rotation of the first rotating shaft 611 and the rotation of the second rotating shaft 612 will not interfere with each other, the driving end 210 of the first arm 200 is fixedly arranged on the first rotating shaft 611, and its fixing method can be The first arm 200 can be driven to rotate by driving the first rotating shaft 611 to rotate; the driving pulley 510 and the second rotating shaft 612 are coaxially arranged and fixedly arranged on the second rotating shaft 612. The fixing method can be clamped, integrally formed or rigidly connected, etc. In this embodiment, the fixing method of the two being rigidly connected is preferably selected, and the rotation of the second rotating shaft 612 can drive the driving pulley 510 to rotate; at the same time, the first transmission end 220 is also provided with a second transmission shaft, and the second transmission shaft is connected to the first rotating shaft 611. It is coaxially arranged and sleeved on the outer arm of the first rotating shaft 611. At the same time, the second arm 300 is fixedly arranged on the second transmission shaft. The fixing method can be clamping, integral molding or rigid connection, etc. In this embodiment, the fixing method of the two being rigidly connected is preferably used. Controlling the rotation of the second transmission shaft can drive the second arm 300 to rotate, which is convenient for controlling the position of the end effector 400; a control component 900 is also arranged inside the installation body. The control component 900 includes a main board, an ARM board, an IO board, a power supply board, an interface board, cables and a fan, etc. A driver is also arranged inside the installation body. The control component 900 is used to control The driver starts and stops; the number of drivers corresponds to the number of rotating shafts within the rotor assembly 600. In this embodiment, the driver is a direct-drive motor 800, which is primarily used to drive the rotating shafts within the rotor assembly 600. The driver and the rotating shaft can be directly or indirectly connected, as long as they can drive the rotating shafts. Each direct-drive motor 800 includes a motor housing, an output shaft, an adapter shaft, a bearing cover, a readhead adjustment plate, bearings, a motor, a code disk, a readhead, and an aviation plug interface board. The code disk is an absolute value code disk with an angular resolution of 0.00030 arc seconds. Accurate feedback of the angle and position of shaft rotation is provided. A lifting assembly 700 is also provided within the mounting body. The lifting assembly 700 is connected to the rotor assembly 600 and is used to drive the rotor assembly 600 along the axial direction of the rotating shaft of the first arm 200. The axial direction of the rotating shaft of the first arm 200 is the axial direction of the joint center of the first arm 200.

[0052] The implementation principle of Example 1 of the present application is that, when the first arm 200 and the second arm 300 are of different lengths, different reducing wheels are selected to compensate for the influence of the different lengths of the first arm 200 and the second arm 300, so that the fingers at the end of the end effector 400 in each robot arm assembly 100 can move in a straight line relative to the mounting body, which can better plan the path, save the wafer grasping time, and improve the grasping efficiency. At the same time, the fingers on the first arm 200 and the end effector 400 can work independently, further improving the wafer grasping efficiency. In addition, the overall structure of the robot arm assembly 100 is compact and has better freedom. The first arm 200 and the second arm 300 of unequal lengths are used. Compared with the structure of equal length, a longer reach can be obtained under the same accommodation volume.

[0053] Example 2, There are some differences between Example 2 of this application and Example 1. Figure 6 and Figure 7 The difference between implementation 2 of the present application and implementation 1 is that: at least two robotic arm assemblies 100 are set on the installation body. During operation, multiple first arms 200 rotate independently to drive the corresponding end effectors 400 to rotate independently. The movement between the multiple end effectors 400 will not interfere with each other, so that the fingers of the multiple end effectors 400 move in a straight line when extending or retracting.

[0054] Specifically in this embodiment, in each robotic arm assembly 100, the first arm 200 rotates, and when the driving pulley 510 is stationary, the finger portion on the end effector 400 is driven to extend or retract. In this embodiment, the driving pulley 510 or the execution pulley 520 is selected as the variable diameter pulley. The variable diameter pulley can be selected as the driving pulley 510 or the execution pulley 520 according to the actual working conditions. At least part of the side wall of the variable diameter pulley is the variable diameter portion. When the driving pulley 510 is the variable diameter pulley, the variable diameter portion is the side wall that contacts the first transmission belt 550 when the variable diameter pulley is stationary and in motion; when the execution pulley 520 is the variable diameter pulley, the variable diameter portion is the side wall that contacts the second transmission belt 560 when the variable diameter pulley is stationary and in motion. During operation, the driving pulley 510 is stationary, the first arm 200 rotates, and the first transmission pulley 530 and the second transmission belt 560 are The position of the second transmission wheel 540 changes with the rotation of the first arm 200. Therefore, under the restriction of the first transmission belt 550, the first transmission wheel 530 rotates around its own axis, and when the first transmission wheel 530 rotates, it drives the second arm 300 to rotate. The second transmission wheel 540 remains relatively stationary and does not rotate. The position of the execution pulley 520 changes. Under the restriction of the second transmission belt 560, the execution pulley 520 rotates to drive the finger part of the end effector 400 to extend or retract in a linear motion; the driving pulley 510, when the rotation speeds of the first arm 200 and the driving pulley 510 are different, the finger part of the end effector 400 can be extended or retracted; when the rotation speeds of the first arm 200 and the driving pulley 510 are the same, the robot arm assembly 100 as a whole rotates around the mounting body.

[0055] During the operation of the robot arm assembly 100, the first arm 200 and the driving pulley 510 in the transfer assembly need to be able to rotate independently. In order to meet the requirements that the first arm 200 and the driving pulley 510 can rotate independently, refer to Figure 1 、 Figure 2 and Figure 7 The rotor assembly 600 includes a first control group 610 and a second control group 620. The first control group 610 and the second control group 620 are respectively connected to the two first arms 200, so that the two robot arm assemblies 100 can move independently without interference. At the same time, the joint centers of the two driving ends 210 are coaxially arranged, so that the two robot arm assemblies 100 are integrated into the same horizontal space range, thereby improving space utilization. The first control group 610 includes a first rotating shaft 611 and a second rotating shaft 612, the first rotating shaft 611 and the second rotating shaft 612 are coaxially arranged, and the second rotating shaft 612 is passed through the first rotating shaft 611. In one of the robot arm assemblies 100, that is, in the robot arm assembly 100 corresponding to the first control group 610, the first arm 200 is fixedly arranged at the end of the first rotating shaft 611, and its fixing method can be selected from clamping, bolting or rigid connection, etc. In this embodiment, the rigid connection of the two is preferably used; the driving pulley 510 is fixedly arranged on the second rotating shaft 612, and its fixing method can be selected from clamping, bolting or rigid connection. Fixed or rigid connection, etc., in this embodiment, the preferred fixing method of rigid connection between the two is selected; wherein the first rotating shaft 611 is used to drive the first arm 200 to rotate, and the second rotating shaft 612 is used to drive the driving pulley 510 to rotate. In the working state, the first rotating shaft 611 rotates, and the second rotating shaft 612 is stationary, driving the first arm 200 to rotate, and the driving pulley 510 is stationary, so as to drive the finger part of the end effector 400 to move in a straight line when extending or retracting; the first rotating shaft 611 and the second rotating shaft 612 rotate at the same time, driving the first arm 200 and the driving pulley 510 to rotate at the same time, so that the robot arm assembly 100 performs a rotational motion as a whole.

[0056] The second control group 620 includes a fourth rotating shaft 621 and a fifth rotating shaft 622. The fourth rotating shaft 621 and the fifth rotating shaft 622 are coaxially arranged, and the fifth rotating shaft 622 is passed through the fourth rotating shaft 621. In another robot arm assembly 100, that is, in the robot arm assembly 100 corresponding to the second control group 620, the first arm 200 is fixedly arranged at the end of the fourth rotating shaft 621, and its fixing method can be selected from clamping, bolting or rigid connection. In this embodiment, the rigid connection of the two is preferably selected; the driving pulley 510 is fixedly arranged on the fifth rotating shaft 622, and its fixing method can be selected from clamping, bolting or rigid connection. Rigid connection, etc. In this embodiment, a rigid connection fixing method is preferably used; the fourth shaft 621 is used to drive the first arm 200 to rotate, and the fifth shaft 622 is used to drive the drive pulley 510 to rotate. In the working state, the fourth shaft 621 rotates, and the fifth shaft 622 is stationary, driving the first arm 200 to rotate, and the drive pulley 510 is stationary, so as to drive the finger part of the end effector 400 to move in a straight line when extending or retracting; the fourth shaft 621 and the fifth shaft 622 rotate at the same time, driving the first arm 200 and the drive pulley 510 to rotate at the same time, so that the robot arm assembly 100 performs a rotational motion as a whole.

[0057] In the process of the rotor assembly 600 driving the robot arm assembly 100 to rotate, it is necessary to control the rotation of the rotating shaft in the rotor assembly 600. Figure 1 、 Figure 2 and Figure 7A control component 900 is also provided inside the installation body, and the control component 900 includes a main board, an ARM board, an IO board, a power supply board, an interface board, cables and a fan, etc. A driver is also provided inside the installation body, and the control component 900 is used to control the start and stop of the driver; at the same time, the number of the driver corresponds to the number of the rotating shafts in the rotor assembly 600. In this embodiment, the driver is a direct-drive motor 800, which is mainly used to drive the rotating shaft in the rotor assembly 600 to rotate. The driver and the rotating shaft can be directly connected or indirectly connected, as long as they can drive the rotating shaft to rotate; at the same time, each direct-drive motor 800 includes a motor housing, an output shaft, a transfer shaft, a bearing cover, a reading head adjustment plate, a bearing, a motor, a code disk, a reading head and an aviation plug interface board; the code disk is an absolute value code disk, and the angular resolution of the code disk is 0.00030 arc seconds.Accurately feedback the angle and position information of the shaft rotation; that is, a plurality of direct-drive motors 800 are arranged in the installation body, and the fourth rotating shaft 621 is penetrated by the second rotating shaft 612, so that the first rotating shaft 611, the second rotating shaft 612, the fourth rotating shaft 621 and the fifth rotating shaft 622 are coaxially arranged, and correspond one to one with the number of the plurality of direct-drive motors 800. In addition, the plurality of direct-drive motors 800 are coaxially arranged to facilitate the control of the rotation of the corresponding rotating shafts; a lifting assembly 700 is also provided in the installation body, and the lifting assembly 700 is connected to the rotor assembly 600, and the lifting assembly 700 is used to drive the rotor assembly 600 to move axially along the rotating shaft of the first arm 200, The axial direction of the rotating shaft of the first arm 200 is the axial direction of the joint center of the first arm 200; the lifting assembly 700 includes at least one linear guide rail 710, a lifting drive and a screw rod 720, wherein the lifting drive is selected as a lifting motor 730, wherein the axis of the linear guide rail 710 is parallel to the axis of the rotating shaft of the first arm 200, and the rotor assembly 600 is slidingly set on the linear guide rail 710, and the nut 721 is fixedly set on the rotor assembly 600, and the nut 721 is threadedly connected to the screw rod 720. The screw rod 720 drives the rotor assembly 600 to move along the linear guide rail 710 by driving the nut 721. Specifically in this embodiment, the rotor assembly The direct drive motor 800 in the component 600 is slidably set on the linear guide rail 710, so that multiple direct drive motors 800 can move along the axial direction of the linear guide rail 710 to drive the transfer component to rise and fall. The axis of the screw rod 720 is parallel to the axis of the linear guide rail 710, and the end of the screw rod 720 is fixedly set at the rotating shaft of the lifting motor 730 of the lifting component 700. The fixing method can be bolt fixing, clamping or rigid connection, etc. In this embodiment, the rigid connection between the two is preferred. At the same time, the rotor component 600 is threadedly connected to the screw rod 720. Specifically in this embodiment, the screw rod 720 is threadedly connected to the direct drive motor 800 in the rotor component 600. In the working state, the lifting motor 730 is started to drive the screw rod 720 to rotate. Since the screw rod 720 is threadedly connected to the direct-drive motor 800 in the rotor assembly 600, and the direct-drive motor 800 in the rotor assembly 600 is slidably set on the linear guide rail 710, it can drive the rotor assembly 600 to move axially along the linear guide rail 710, thereby completing the control of the lifting and lowering of the robotic arm assembly 100. In addition, in this embodiment, two robotic arm assemblies 100 are used, and the two robotic arm assemblies 100 are distributed in the vertical direction. The two robotic arm assemblies 100 can be independently extended or rotated without interfering with each other.

[0058] The implementation principle of Example 2 of the present application is that the first rotating shaft 611 and the second rotating shaft 612 drive one of the robot arm assemblies 100 to move, and the fourth rotating shaft 621 and the fifth rotating shaft 622 drive the other robot arm assembly 100 to move; during the working process, the two robot arm assemblies 100 move independently, so that the wafer transfer efficiency is improved when the wafer is transferred to multiple stations. At the same time, in the case of multiple robot arm assemblies 100, the space occupancy rate is relatively small. In addition, more wafer picking actions can be realized.

[0059] Example 3, There are some differences between Example 3 of the present application and Example 1. Figure 8 and Figure 9 , the difference between the embodiment 3 of the present application and the embodiment 1 is that: the driving pulley 510 and the execution pulley 520 are selected as the variable diameter pulleys, at least part of the side wall of the variable diameter pulley is the variable diameter portion, when the driving pulley 510 is the variable diameter pulley, the variable diameter portion is the side wall that contacts the first transmission belt 550 when the variable diameter pulley is stationary and in motion; when the execution pulley 520 is the variable diameter pulley, the variable diameter portion is the side wall that contacts the second transmission belt 560 when the variable diameter pulley is stationary and in motion; the unequal arm length vacuum manipulator includes a group of transfer components, the transfer component includes two robot arm components 100, the rotating shafts of the driving ends 210 of the two first arms 200 are coaxially arranged, the driving pulleys 510 of the two robot arm components 100 are coaxially arranged, and the two driving pulleys 510 are connected, and the connection method of the two driving pulleys 510 can be a fixed connection or a detachable connection. In this embodiment, two driving pulleys 510 are selected for fixed connection, and the two driving pulleys 510 can rotate synchronously. During operation, one of the two first arms 200 rotates and the other does not move. The driving pulleys 510 drive the fingers on the corresponding end effector 400 to perform linear motion when extending or retracting. Both first arms 200 rotate, and the driving pulleys 510 do not move. The fingers of the two end effectors 400 are extended or retracted at the same time, or one extends and the other retracts. Both first arms 200 rotate, and the driving pulleys 510 rotate. At the same time, the transmission ratio of the driving pulley 510 to the first transmission wheel 530 is 2:1, and the transmission ratio of the second transmission wheel 540 to the execution pulley 520 is 1:2. That is, when the transmission ratio of the three positions is 2:1:2, the transfer assembly performs an overall rotational motion around the mounting body.

[0060] During the operation of the robot arm assembly 100, the first arm 200 and the driving pulley 510 need to be able to rotate independently. In order to meet the requirements that the first arm 200 and the driving pulley 510 can rotate independently, refer to Figure 8 and Figure 9The unequal arm length vacuum manipulator further includes a rotor assembly 600, which is arranged inside the installation body. The rotor assembly 600 includes at least a first rotating shaft 611, a second rotating shaft 612 and a third rotating shaft 613. At the same time, the first rotating shaft 611, the second rotating shaft 612 and the third rotating shaft 613 are coaxially arranged, the third rotating shaft 613 passes through the second rotating shaft 612, and the second rotating shaft 612 passes through the first rotating shaft 611. The two first arms 200 are respectively fixedly arranged at the ends of the first rotating shaft 611 and the third rotating shaft 613. The fixing method can be clamping, integral molding or rigid connection, etc. In this embodiment, a fixing method in which the two are rigidly connected is preferably used; the two driving pulleys 510 are coaxially arranged with the second rotating shaft 612 and are fixed to the side wall of the second rotating shaft 612. The fixing method can be snap-fit, integrally formed or rigidly connected. In this embodiment, a fixing method in which the two are rigidly connected is preferably used. When the second rotating shaft 612 rotates, the two driving pulleys 510 are driven to move synchronously. The number of drivers inside the installation body corresponds to the number of rotating shafts, that is, in this embodiment, there are three drivers and they are used to control the rotation of the first rotating shaft 611, the second rotating shaft 612 and the third rotating shaft 613 respectively. When the driver corresponding to the first rotating shaft 611 is started, the driver corresponding to the second rotating shaft 612 and the driver corresponding to the third rotating shaft 613 do not move. At this time, the first arm 200 fixedly provided on the first rotating shaft 611 moves and drives the corresponding finger portion of the end effector 400 to move; when the driver corresponding to the third rotating shaft 613 is started, the driver corresponding to the first rotating shaft 611 and the driver corresponding to the second rotating shaft 612 do not move. At this time, the first arm 200 fixedly provided on the second rotating shaft 612 moves and drives the corresponding finger portion of the end effector 400 to move; The driver corresponding to the first rotating shaft 611 and the driver corresponding to the third rotating shaft 613 rotate simultaneously. When the driver corresponding to the second rotating shaft 612 is different, the rotation directions of the first rotating shaft 611 and the third rotating shaft 613 can be in the same direction or in opposite directions, and the fingers of the two end effectors 400 can be extended or retracted at the same time, or one can be extended and the other retracted; when the driver corresponding to the first rotating shaft 611, the driver corresponding to the second rotating shaft 612, and the driver corresponding to the third rotating shaft 613 rotate simultaneously and in the same direction, and the speed ratio is 1:2:1, the robot arm as a whole performs rotational motion.

[0061] The implementation principle of Example 3 of the present application is that, when the first arm 200 and the second arm 300 are of different lengths, by setting the execution pulley 520 as a reducing wheel, the influence of the different lengths of the first arm 200 and the second arm 300 can be compensated, so that the two first arms 200 can move independently, and the two end effectors 400 move synchronously. At the same time, the fingers of the end effectors 400 move in a straight line relative to the mounting body, which can better plan the path, save the wafer grasping time, and improve the grasping efficiency. At the same time, the fingers on the first arm 200 and the end effector 400 can work independently, further improving the wafer grasping efficiency. In addition, the overall structure of the robot arm assembly 100 is compact and has better freedom. The first arm 200 and the second arm 300 of unequal length can obtain a longer reach under the same accommodation volume compared to the structure of equal length. In addition, within the limit of the same horizontal space, a larger number of robot arm assemblies 100 can be set, and the space utilization rate is improved.

[0062] Example 4: There are some differences between Example 4 of the present application and Example 1. Figure 10 and Figure 11 , the difference between implementation 4 of the present application and implementation 1 is that: at least two transfer assemblies are arranged on the mounting body, and therefore at least four robotic arm assemblies 100 are included. In this embodiment, the driving pulley 510 and the execution pulley 520 are selected as variable diameter wheels, and at least part of the side wall of the variable diameter wheel is a variable diameter portion. When the driving pulley 510 is a variable diameter wheel, the variable diameter portion is the side wall that contacts the first transmission belt 550 when the variable diameter wheel is stationary and moving; when the execution pulley 520 is a variable diameter wheel, the variable diameter portion is the side wall that contacts the second transmission belt 560 when the variable diameter wheel is stationary and moving; in each transfer assembly, the two first arms 200 rotate alternately, and the driving pulley 510 does not move, driving the finger portion of the corresponding end effector 400 to perform linear motion when extending or retracting, or the two first arms 200 move simultaneously, driving the finger portion of the corresponding end effector 400 to extend or retract simultaneously.

[0063] During the operation of the robot arm assembly 100, the first arm 200 and the driving pulley 510 in the transfer assembly need to be able to rotate independently. In order to meet the requirements that the first arm 200 and the driving pulley 510 can rotate independently, refer to Figure 1 、 Figure 2 and Figure 11The rotor assembly 600 includes a first control group 610 and a second control group 620, wherein the first control group 610 includes a first rotating shaft 611, a second rotating shaft 612 and a third rotating shaft 613, the second rotating shaft 612 is passed through the first rotating shaft 611, and the third rotating shaft 613 is passed through the second rotating shaft 612. In one group of transfer assemblies, that is, the transfer assembly corresponding to the first control group 610, the two first arms 200 in the transfer assembly are respectively fixed on the first rotating shaft 611 and the third rotating shaft 613, and the fixing method thereof can be bolt fixing, integral molding or rigid connection, etc. In this embodiment, the rigid connection fixing method is preferably adopted; the two driving pulleys 510 are both coaxially arranged with the second rotating shaft 612 and fixedly arranged on the side wall of the second rotating shaft 612, and the fixing method thereof can be bolt fixing, integral molding or rigid connection, etc. In this embodiment, the rigid connection fixing method is preferably adopted. The fixing mode of the sexual connection is that when the second rotating shaft 612 rotates, it can drive the two driving pulleys 510 to rotate synchronously. During the operation of the transfer assembly corresponding to the first control group 610, one of the first rotating shaft 611 and the third rotating shaft 613 rotates, and the other does not rotate. The second rotating shaft 612 does not rotate, driving the first arm 200 corresponding to the first rotating shaft 611 or the third rotating shaft 613 to rotate, so as to drive the corresponding finger part on the end effector 400 to move; the first rotating shaft 611 and the third rotating shaft 613 rotate simultaneously, which can drive the fingers of the two end effectors 400 to extend or retract at the same time, or one to extend and the other to retract. The first rotating shaft 611, the second rotating shaft 612 and the third rotating shaft 613 rotate in the same direction at the same time, and when the speed ratio of the first rotating shaft 611, the second rotating shaft 612 and the third rotating shaft 613 is 1:2:1, the robot arm performs rotational motion as a whole; The second control group 620 includes a fourth rotating shaft 621, a fifth rotating shaft 622 and a sixth rotating shaft 623, the fifth rotating shaft 622 is provided on the fourth rotating shaft 621, and the sixth rotating shaft 623 is provided on the fifth rotating shaft 622. In another group of transfer components, that is, the transfer component corresponding to the second control group 620, the two first arms 200 in the transfer component are respectively fixed on the fourth rotating shaft 621 and the sixth rotating shaft 623, and the fixing method thereof can be bolt fixing, integral molding or rigid connection, etc. In this embodiment, the rigid connection fixing method is preferably adopted; the two driving pulleys 510 are both coaxially arranged with the fifth rotating shaft 622 and fixedly arranged on the side wall of the fifth rotating shaft 622, and the fixing method thereof can be bolt fixing, integral molding or rigid connection, etc. In this embodiment, the rigid connection fixing method is preferably adopted. 2 rotates, it can drive the two driving pulleys 510 to rotate synchronously. During the operation of the transfer assembly corresponding to the second control group 620, one of the fourth rotating shaft 621 and the sixth rotating shaft 623 rotates, the other does not rotate, and the fifth rotating shaft 622 does not rotate, driving the first arm 200 corresponding to the fourth rotating shaft 621 or the sixth rotating shaft 623 to rotate, thereby driving the corresponding finger part on the end effector 400 to move; the fourth rotating shaft 621 and the sixth rotating shaft 623 rotate simultaneously, which can drive the fingers of the two end effectors 400 to extend or retract simultaneously, or one to extend and the other to retract. When the fourth rotating shaft 621, the fifth rotating shaft 622 and the sixth rotating shaft 623 rotate simultaneously in the same direction, and the speed ratio of the fourth rotating shaft 621, the fifth rotating shaft 622 and the sixth rotating shaft 623 is 1:2:1, the robot arm as a whole performs rotational motion.

[0064] In the process of the rotor assembly 600 driving the robot arm assembly 100 to rotate, it is necessary to control the rotation of the rotating shaft in the rotor assembly 600. Figure 10 、 Figure 11 and Figure 12A control component 900 is also provided inside the installation body, and the control component 900 includes a main board, an ARM board, an IO board, a power supply board, an interface board, cables and a fan, etc. A driver is also provided inside the installation body, and the control component 900 is used to control the start and stop of the driver; at the same time, the number of the driver corresponds to the number of the rotating shafts in the rotor assembly 600. In this embodiment, the driver is a direct-drive motor 800, which is mainly used to drive the rotating shaft in the rotor assembly 600 to rotate. The driver and the rotating shaft can be directly connected or indirectly connected, as long as they can drive the rotating shaft to rotate; at the same time, each direct-drive motor 800 includes a motor housing, an output shaft, a transfer shaft, a bearing cover, a reading head adjustment plate, a bearing, a motor, a code disk, a reading head and an aviation plug interface board; the code disk is an absolute value code disk, and the angular resolution of the code disk is 0.00030 arc seconds. Accurately feedback the angle and position information of the shaft rotation; that is, a plurality of direct-drive motors 800 are arranged in the installation body, and the fifth rotating shaft 622 is passed through the fourth rotating shaft 621, so that the first rotating shaft 611, the second rotating shaft 612, the third rotating shaft 613, the fourth rotating shaft 621, the fifth rotating shaft 622 and the sixth rotating shaft 623 are coaxially arranged, and correspond one to one with the number of the plurality of direct-drive motors 800. In addition, the plurality of direct-drive motors 800 are coaxially arranged to facilitate the control of the rotation of the corresponding rotating shaft; a lifting assembly 700 is also provided in the installation body, and the lifting assembly 700 is connected to the rotor assembly 600, and the lifting assembly 700 is used to drive the rotor assembly 600 to move along the axial direction of the rotating shaft of the first arm 200, and the axial direction of the rotating shaft of the first arm 200 is the axial direction of the joint center of the first arm 200.

[0065] In order to facilitate the movement of the lifting assembly 700 to drive the rotor assembly 600, refer to Figure 10 、 Figure 11 and Figure 12The lifting assembly 700 includes at least one linear guide 710, a lifting motor 730 and a screw rod 720, wherein the axis of the linear guide 710 is parallel to the axis of the rotating shaft of the first arm 200, and the rotor assembly 600 is slidingly set on the linear guide 710. Specifically, in this embodiment, the lifting motor 730 in the rotor assembly 600 is slidingly set on the linear guide 710, so that multiple direct-drive motors 800 can move along the axial direction of the linear guide 710 to drive the transfer assembly to lift and lower, the axis of the screw rod 720 is parallel to the axis of the linear guide 710, and the end of the screw rod 720 is fixedly set at the rotating shaft of the lifting motor 730 of the lifting assembly 700, and the fixing method can be bolt fixing, clamping or rigid connection, etc. In this embodiment, the rigid connection of the two is preferred, and a nut 721 is fixedly set on the rotor assembly 600, and the nut 721 is threadedly connected Connected to the screw rod 720, the screw rod 720 drives the rotor assembly 600 to move along the linear guide rail 710 by driving the nut 721. Specifically in this embodiment, the screw rod 720 is threadedly connected to the direct drive motor 800 in the rotor assembly 600. In the working state, the lifting motor 730 is started to drive the screw rod 720 to rotate. Since the screw rod 720 is threadedly connected to the direct drive motor 800 in the rotor assembly 600, and the direct drive motor 800 in the rotor assembly 600 is slidably set on the linear guide rail 710, it can drive the rotor assembly 600 to move axially along the linear guide rail 710, thereby completing the control of the lifting and lowering of the transfer assembly. In addition, in this embodiment, two transfer assemblies are used, and the two transfer assemblies are distributed in the vertical direction. The robotic arm assemblies 100 in the two transfer assemblies can be independently extended or rotated, and the two do not interfere with each other.

[0066] In addition, refer to Figure 13 、 Figure 14 、 Figure 15 and Figure 16 The two transfer components have four robotic arm components, which can realize more wafer picking actions and adapt to different working conditions, such as double picking and single placing, three picking and double placing, three picking and single placing, four picking and three placing, four picking and double placing, etc. Different wafer picking and placing modes can be selected according to different working conditions to realize multi-station work and improve wafer processing efficiency.

[0067] The implementation principle of Example 4 of the present application is that the lifting assembly 700 in the installation body controls the height position of the transfer assembly in the vertical direction, and the rotor assembly 600 in the installation body controls the rotation of the robot arm assembly 100, wherein the first rotating shaft 611, the second rotating shaft 612 and the third rotating shaft 613 control the movement of one of the transfer assemblies, and the fourth rotating shaft 621, the fifth rotating shaft 622 and the sixth rotating shaft 623 control the movement of another transfer assembly, so that the wafer transfer efficiency is improved when the wafer is transferred at multiple stations. At the same time, in the case of multiple robot arm assemblies 100, the space occupancy rate is relatively small. In addition, more wafer picking actions can be realized.

[0068] While the embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations of these embodiments are possible. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as set forth in the claims. Furthermore, the invention described herein is susceptible to other embodiments and may be practiced or implemented in a variety of ways.

Claims

1. A vacuum manipulator with unequal arm length, characterized in that: It comprises a mounting body, at least one mechanical arm assembly (100) and a transmission assembly (500); The mechanical arm assembly (100) comprises a first arm (200), a second arm (300), and an end effector (400); The first arm (200) has a driving end (210) and a first transmission end (220), the driving end (210) is rotatably disposed on the mounting body, and both the driving end (210) and the first transmission end (220) have a joint center; The second arm (300) has a second transmission end (310) and an execution end (320), the second transmission end (310) is rotatably disposed on the first transmission end (220), and the second transmission end (310) and the execution end (320) both have a joint center; The length of the distance between the centers of the two joints of the second arm (300) is different from the length of the distance between the centers of the two joints of the first arm (200); The end effector (400) is rotatably disposed at the execution end (320), and the end effector (400) has a finger portion; The transmission assembly (500) is arranged in the mechanical arm assembly (100), and the transmission assembly (500) is used to make the finger portion of the end effector (400) move in a straight line when extending or retracting.

2. The unequal arm length vacuum manipulator according to claim 1, characterized in that: The transmission assembly (500) comprises a driving pulley (510), an execution pulley (520) and a transmission component. The driving pulley (510) is rotatably arranged at the driving end (210), and the execution pulley (520) is rotatably arranged at the execution end (320). Both the driving pulley (510) and the execution pulley (520) are transmission-connected to the transmission component. At least one of the driving pulley (510) and the execution pulley (520) is a variable diameter pulley.

3. The unequal arm length vacuum manipulator according to claim 2, characterized in that: The transmission component comprises a first transmission wheel (530) and a second transmission wheel (540) which are coaxially arranged, the first transmission wheel (530) being rotatably arranged at the first transmission end (220), the second transmission wheel (540) being fixedly arranged at the first transmission end (220) and extending to the second transmission end (310), the driving pulley (510) being transmission-connected to the first transmission wheel (530), the execution pulley (520) being transmission-connected to the second transmission wheel (540), and the end effector (400) being fixedly connected to the execution pulley (520); In the working state, the driving pulley (510) is stationary, and the first arm (200) rotates, so that the first transmission wheel (530) rotates and drives the second arm (300) to rotate; the second transmission wheel (540) is stationary, and the second arm (300) rotates and drives the execution pulley (520) to rotate, so as to drive the finger part of the end effector (400) to move in a straight line when extending or retracting.

4. The unequal arm length vacuum manipulator according to claim 3, characterized in that: A first transmission belt (550) is arranged on the first arm (200), and at least one end of the first transmission belt (550) is wound around the side wall of the driving pulley (510) or the side wall of the first transmission pulley (530); a second transmission belt (560) is arranged on the second arm (300), and at least one end of the second transmission belt (560) is wound around the side wall of the second transmission pulley (540) or the side wall of the execution pulley (520).

5. The unequal arm length vacuum manipulator according to claim 4, characterized in that: At least part of the side wall of the variable diameter wheel is a variable diameter portion, and the variable diameter portion is the side wall of the variable diameter wheel that contacts the first transmission belt (550) or the second transmission belt (560) in a stationary or moving state; The calculation formula of the variable diameter wheel is: When the driving pulley (510) is the variable diameter wheel, the radius r1 of the variable diameter wheel is: Wherein G1 is the transmission ratio of the first arm (200), and R1 is the radius of the first transmission wheel (530); When the execution pulley (520) is the variable diameter wheel, the radius r2 of the variable diameter wheel is: Wherein G2 is the transmission ratio of the second arm (300), and R2 is the radius of the second transmission wheel (540).

6. The unequal arm length vacuum manipulator according to claim 5, characterized in that: The connection direction between the mounting body and the wafer is defined as a first direction, a direction perpendicular to the first direction is defined as a second direction, a first angle between the first arm (200) and the second direction is defined as θ, and a second angle between the second arm (300) and the second direction is defined as β; The transmission ratio calculation formula is: The transmission ratio G1 of the first arm (200) is: The transmission ratio G2 of the second arm (300) is:

7. The unequal arm length vacuum manipulator according to claim 6, characterized in that: The corresponding relationship between the second angle β and the first angle θ is: β=arc =arc Wherein l is the length of the second arm (300); L is the length of the first arm (200); and a is the difference in length between the first arm (200) and the second arm (300) in the horizontal direction.

8. The unequal arm length vacuum manipulator according to claim 2, characterized in that: The invention also comprises a rotor assembly (600), wherein the rotor assembly (600) comprises at least a first rotating shaft (611) and a second rotating shaft (612) which are coaxially arranged, wherein the second rotating shaft (612) passes through the first rotating shaft (611); the driving end (210) is fixedly arranged on the first rotating shaft (611), and the driving pulley (510) is fixedly arranged on the second rotating shaft (612).

9. The unequal arm length vacuum manipulator according to any one of claims 1 to 7, characterized in that: The execution pulley (520) or the driving pulley (510) is the variable diameter pulley, at least two groups of the mechanical arm assemblies (100) are provided, and the joint centers of the driving ends (210) of the two mechanical arm assemblies (100) are coaxially arranged; In the working state, the two first arms (200) rotate independently to drive the corresponding execution pulleys (520) to rotate independently.

10. The unequal arm length vacuum manipulator according to claim 9, characterized in that: The invention also comprises a rotor assembly (600), wherein the rotor assembly (600) comprises a first rotating shaft (611), a second rotating shaft (612), a fourth rotating shaft (621) and a fifth rotating shaft (622) which are coaxially arranged, wherein the fifth rotating shaft (622) is passed through the fourth rotating shaft (621), the fourth rotating shaft (621) is passed through the second rotating shaft (612), the second rotating shaft (612) is passed through the first rotating shaft (611), the two first arms (200) are respectively fixedly arranged on the first rotating shaft (611) and the fourth rotating shaft (621), and the two driving pulleys (510) are respectively fixedly arranged on the second rotating shaft (612) and the fifth rotating shaft (622); In the working state, the first rotating shaft (611) or the fourth rotating shaft (621) rotates to drive the corresponding end effector (400) to move; the first rotating shaft (611) and the second rotating shaft (612) rotate simultaneously to drive the corresponding robotic arm assembly (100) to rotate as a whole; the fourth rotating shaft (621) and the fifth rotating shaft (622) rotate simultaneously to drive the corresponding robotic arm assembly (100) to rotate as a whole.

11. The unequal arm length vacuum manipulator according to any one of claims 1 to 7, characterized in that: The execution pulley (520) and the execution pulley (520) are both the variable diameter wheels, the unequal arm length vacuum manipulator comprises a group of transfer components or at least two groups of transfer components, each of the transfer components comprises two robot arm components (100), the joint centers of the two driving ends (210) are coaxially arranged, and the two driving pulleys (510) are connected to each other and coaxially arranged; Wherein, in each group of the transfer components, the two first arms (200) rotate alternately or simultaneously, and the driving pulley (510) remains stationary, driving the corresponding end effector (400) to move in a straight line when extending or retracting, or driving the two end effectors (400) to extend or retract simultaneously.

12. The unequal arm length vacuum manipulator according to claim 11, characterized in that: It also includes a rotor assembly (600), wherein the rotor assembly (600) includes a first rotating shaft (611), a second rotating shaft (612) and a third rotating shaft (613) which are coaxially arranged, wherein the second rotating shaft (612) is passed through the first rotating shaft (611), and the third rotating shaft (613) is passed through the second rotating shaft (612); in each group of the transfer assemblies, the two first arms (200) are respectively fixedly arranged on the first rotating shaft (611) and the third rotating shaft (613), and the two driving pulleys (510) are both coaxially arranged with the second rotating shaft (612) and fixedly arranged on the side wall of the second rotating shaft (612); In a working state, one of the first rotating shaft (611) or the third rotating shaft (613) rotates, the other does not move, and the second rotating shaft (612) does not move, so as to drive the corresponding end effector (400) to move; the rotation of the second rotating shaft (612) drives the two driving pulleys (510) to rotate synchronously; the first rotating shaft (611) and the third rotating shaft (613) rotate simultaneously, so as to drive the two end effectors (400) to move simultaneously.

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