Double-independent vacuum manipulator

Abstract

The invention discloses a double-independent vacuum manipulator, which relates to the technical field of semiconductor equipment and comprises a mounting main body and at least two mechanical arm components, each mechanical arm assembly comprises a first arm, a second arm and an end effector; the first arm is provided with a driving end and a first transmission end which are respectively provided with a joint center; the second arm is provided with a second transmission end and an execution end which are respectively provided with a joint center; the end effector is rotationally arranged at the execution end, and the end effector is provided with a finger part; the distance between the centers of the two joints of the second arm is different from the distance between the centers of the two joints of the first arm in length. The joint centers of the driving ends of the first arms are coaxially arranged; the multiple first arms rotate independently to drive the corresponding end executors to move independently, and the finger parts of the end executors move linearly when stretching out or retracting back. The wafer carrying device is used for carrying wafers. At least the problem that in the prior art, most mechanical arms are mostly provided with one mechanical arm, and the multi-station requirement is not met can be solved.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor integrated circuit technology, and in particular to a dual independent vacuum manipulator. Background Art

[0002] Wafer refers to the silicon chip used in the manufacture of silicon semiconductor integrated circuits. It is called a wafer because of its round shape. Silicon will be instantly oxidized by air. A vacuum environment can ensure the quality of the wafer and minimize the falling of dust particles in a vacuum environment. Therefore, the wafer manufacturing process is often operated in a vacuum environment.

[0003] With the rapid development of the semiconductor industry, front-end and back-end process equipment manufacturers have put forward higher and more complex requirements for semiconductor automated transmission technology, especially for the diversity of transmission functions and high production capacity of the semiconductor equipment front-end module (Equipment Front End Module, referred to as EFEM) and vacuum transfer platform (Vacuum Transfer Module, referred to as VTM) used in conjunction with various process equipment. EFEM is a transition module that realizes the transfer of wafers from the atmospheric state to the vacuum process chamber, and VTM is a unit that realizes the transfer of wafers from the vacuum transfer chamber to the process reaction chamber.

[0004] The diversity of transmission functions and high productivity of semiconductor automated transmission equipment often depend on the handling capabilities of its internal wafer transfer robot. The existing technology has problems such as synchronous pick-and-place of different positions of multiple stations in special-shaped cavities, less robot path planning, and large space occupancy.

[0005] Therefore, it is necessary to provide a new dual independent vacuum manipulator to solve the above problems existing in the prior art. Summary of the invention

[0006] The purpose of the present invention is to provide a dual independent vacuum manipulator, which can at least solve the following technical problems: 1. Solve the technical problem of synchronous pick-and-place at different positions of multiple stations of special-shaped cavities in the prior art; 2. Solve the problem of less robot path planning and large space occupancy in the existing technology.

[0007] To achieve the above object, the technical solution of the present invention is as follows: A dual independent vacuum manipulator comprises a mounting body and at least two manipulator arm assemblies; Each of the mechanical arm assemblies includes a first arm, a second arm, and an end effector; The first arm has a driving end and a first transmission end, the driving end is rotatably arranged on the mounting body, and the driving end and the first transmission end both have a joint center; the second arm has a second transmission end and an execution end, the second transmission end is rotatably arranged on the first transmission end, and the second transmission end and the execution end both have a joint center; the end effector is rotatably arranged on the execution end, and the end effector has a finger portion; The distance between the centers of the two joints of the second arm is different in length from the distance between the centers of the two joints of the first arm; The joint centers of the driving ends of the plurality of first arms are coaxially arranged; Wherein, the plurality of first arms rotate independently, driving the corresponding end effectors to move independently, and the fingers of the end effectors move in a straight line when extending or retracting.

[0008] By adopting the above technical solution, two robot arm assemblies are used to achieve multi-station setting with more degrees of freedom. At the same time, the two robot arm assemblies are within the same horizontal space range, making the overall structure of the robot compact and improving space utilization.

[0009] Optionally, it further includes a transmission assembly and a rotor assembly; the transmission assembly is arranged in the mechanical arm assembly, and the transmission assembly is used to make the finger portion of the end effector move in a straight line when extending or retracting; The rotor assembly includes a first control group and a second control group, and the first control group and the second control group are respectively connected to the two first arms, so that the two mechanical arm assemblies move independently and the joint centers of the two driving ends are coaxially arranged.

[0010] By adopting the above technical solution, the rotor assembly controls the movement of the two robotic arms and enables the two robotic arms to move independently without interference between the two. At the same time, the transmission assembly plays a transmission role, so that the rotation of the first arm can drive the finger of the end effector to move in a straight line when extending or retracting, thereby facilitating the wafer clamping process.

[0011] Optionally, the transmission assembly includes a driving pulley, an execution pulley and a transmission component, the driving pulley is rotatably arranged at the driving end, the execution pulley is rotatably arranged at the execution end, and the driving pulley and the execution pulley are both transmission-connected to the transmission component; the driving pulley or the execution pulley is a variable diameter pulley.

[0012] By adopting the above technical solution, the driving pulley or the execution pulley is a reducing pulley, which can compensate for the unequal lengths of the first arm and the second arm, so that when the first arm and the second arm are of unequal lengths, the finger part of the end effector can still maintain linear motion when extending or retracting.

[0013] Optionally, the first control group includes a first rotating shaft and a second rotating shaft, and the second rotating shaft is disposed through the first rotating shaft; In one of the mechanical arm assemblies, the first is fixedly disposed on the first rotating shaft, and the driving pulley is fixedly disposed on the second rotating shaft; In the working state, the first rotating shaft rotates and the second rotating shaft remains stationary, driving the first arm to rotate, so as to drive the finger part of the end effector to move in a straight line when extending or retracting; the second rotating shaft drives the driving pulley to rotate, and when the first rotating shaft and the second rotating shaft rotate at the same time, the robotic arm assembly rotates as a whole.

[0014] By adopting the above technical solution, the first rotating shaft and the second rotating shaft respectively control the movement of the robotic arm assembly corresponding to the first control group, and by controlling the rotation of the first rotating shaft alone, or controlling the first rotating shaft and the second rotating shaft to rotate simultaneously, different motion states of the end effector can be controlled.

[0015] Optionally, the second control group includes a fourth rotating shaft and a fifth rotating shaft, and the fifth rotating shaft is disposed through the fourth rotating shaft; In another of the mechanical arm assemblies, the first arm is fixedly disposed on the fourth rotating shaft, and the driving pulley is fixedly disposed on the fifth rotating shaft; In the working state, the fourth rotating shaft rotates and the fifth rotating shaft remains stationary, driving the first arm to rotate, so as to drive the finger part of the end effector to move in a straight line when extending or retracting; the fifth rotating shaft drives the driving pulley to rotate, and when the fourth rotating shaft and the fifth rotating shaft rotate at the same time, the robotic arm assembly rotates as a whole.

[0016] By adopting the above technical solution, the fourth shaft and the fifth shaft respectively control the movement of the robot arm assembly corresponding to the second control group, and the different motion states of the end effector are controlled by controlling the rotation of the fourth shaft alone, or controlling the rotation of the fourth shaft and the fifth shaft at the same time; at the same time, the first control group and the second control group cooperate to control the movement of the two robot arm assemblies respectively, which can realize the work path planning and realize more wafer picking methods.

[0017] Optionally, a plurality of direct-drive motors are arranged in the installation body, and the fourth rotating shaft passes through the second rotating shaft, so that the first rotating shaft, the second rotating shaft, the fourth rotating shaft and the fifth rotating shaft are coaxially arranged and correspond one-to-one to the plurality of direct-drive motors.

[0018] By adopting the above technical solution, the first rotating shaft, the second rotating shaft, the fourth rotating shaft and the fifth rotating shaft are coaxially arranged, making the overall structure of the robot arm more compact. At the same time, multiple rotating shafts enable the two robot arm components to have more working modes, that is, they have multiple degrees of freedom and can realize multi-station picking and placing.

[0019] Optionally, a lifting drive is provided in the installation body, and the lifting drive is connected to the rotor assembly to drive the rotor assembly to move axially along the rotating shaft of the first arm.

[0020] By adopting the above technical solution, the lifting drive is started, driving the robot arm assembly to move in the vertical direction, so that the robot can adapt to different working heights and can be selected according to different working conditions.

[0021] Optionally, the transmission component includes a first transmission wheel and a second transmission wheel which are coaxially arranged, the first transmission wheel is rotatably arranged at the first transmission end, the second transmission wheel is fixedly arranged at the first transmission end and extends to the second transmission end, the driving pulley is transmission-connected to the first transmission wheel, the execution pulley is transmission-connected to the second transmission wheel, and the end effector is fixedly connected to the execution pulley; In the working state, the driving pulley is stationary, and the first arm rotates, so that the first transmission wheel rotates and drives the second arm to rotate; the second transmission wheel is stationary, and the second arm rotates to drive the execution pulley to rotate, so as to drive the finger part of the end actuator to move in a straight line when extending or retracting.

[0022] By adopting the above technical solution, the first transmission wheel and the second transmission wheel in the transmission component mainly play a transmission role, so that when the first arm rotates, it can drive the end effector to rotate, which facilitates the wafer clamping process.

[0023] Optionally, a first transmission belt is arranged on the first arm, and at least one end of the first transmission belt is wound around the side wall of the driving pulley or the side wall of the first transmission pulley; a second transmission belt is arranged on the second arm, and at least one end of the second transmission belt is wound around the side wall of the second transmission pulley or the side wall of the execution pulley.

[0024] By adopting the above technical solution, the first transmission belt and the second transmission belt play a transmission role. When the first arm rotates, since the driving pulley does not rotate, the total length of the first transmission belt remains unchanged. Therefore, when the first arm rotates and drives the position of the first transmission wheel to change, the first transmission wheel rotates, driving the second arm to rotate. At this time, the second transmission wheel does not rotate, and the execution pulley rotates, thereby driving the end effector to move, which facilitates the wafer clamping process.

[0025] Optionally, at least part of the side wall of the variable diameter wheel is a variable diameter portion, and the variable diameter portion is the side wall that contacts the first transmission belt or the second transmission belt when the variable diameter wheel is stationary or moving.

[0026] By adopting the above technical solution, the side wall of the variable diameter wheel in contact with the second transmission belt is configured with a variable diameter when the variable diameter wheel is stationary or moving, which can adapt to the different lengths of the first arm and the second arm, thereby ensuring that the finger of the end effector moves in a straight line when extending or retracting.

[0027] Optionally, the radius r2 of the variable diameter wheel is calculated by the following steps: The connection direction between the mounting body and the wafer is defined as a first direction, a direction perpendicular to the first direction is defined as a second direction, a first angle between the first arm and the second direction is defined as θ, and a second angle between the second arm and the second direction is defined as β; The corresponding relationship between the second angle β and the first angle θ is: β=arc =arc

[0028] The transmission ratio G2 of the second arm is:

[0029] The radius r2 of the variable diameter wheel:

[0030] Wherein G2 is the transmission ratio of the second arm, R2 is the radius of the second transmission wheel; l is the length of the second arm; L is the length of the first arm; a is the difference in length between the first arm and the second arm in the horizontal direction.

[0031] By adopting the above technical solution and calculating the diameter of the variable diameter wheel by the above formula, it is convenient to manufacture a variable diameter wheel adapted to different lengths of the first arm and the second arm, thereby satisfying the requirement that the finger of the end effector moves in a straight line when extending or retracting.

[0032] The beneficial effects of the dual independent vacuum manipulators provided by the present invention include at least: 1. The first arm and the second arm are of unequal length, which effectively solves the problem of large space occupancy of traditional manipulators; 2. Use multiple robot arm components to work together, so that the robot has more path planning options, realizes multi-station setting, and has more degrees of freedom; 3. The driving ends of the multiple robot arm assemblies are coaxially arranged with different heights, that is, the two robot arm assemblies are within the same horizontal space range, so that the overall structure of the robot is compact and the space utilization rate is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 This is a schematic diagram of the main structure of the mechanical arm assembly in an embodiment of the present invention; Figure 2It is a schematic diagram of the positions of the rotor assembly and the lifting assembly in an embodiment of the present invention; Figure 3 This is a schematic diagram of the structure of a single mechanical arm assembly in an embodiment of the present invention; Figure 4 Schematic diagram of the connection between the transmission assembly and the first transmission belt and the second transmission belt in an embodiment of the present invention; Figure 5 It is a simplified schematic diagram of a single mechanical arm assembly in an embodiment of the present invention; Figure 6 Schematic diagram of the angles of the components in a single robotic arm assembly in an embodiment of the present invention.

[0034] Reference numerals: 100, robot arm assembly; 200, first arm; 210, driving end; 220, first transmission end; 300, second arm; 310, second transmission end; 320, execution end; 400, end effector; 500, transmission assembly; 510, driving pulley; 520, execution pulley; 530, first transmission wheel; 540, second transmission wheel; 550, first transmission belt; 560, second transmission belt; 600, rotor assembly; 610, first control group; 611, first rotating shaft; 612, second rotating shaft; 620, second control group; 621, fourth rotating shaft; 622, fifth rotating shaft; 700, lifting assembly; 710, linear guide rail; 720, lead screw; 721, nut; 730, lifting motor; 800, direct drive motor; 900, control assembly. DETAILED DESCRIPTION

[0035] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with general skills in the field to which the present invention belongs. "Including" and similar words used in this article mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0036] The specific implementation modes of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0037] Reference Figure 1 , Figure 2 and Figure 3The embodiment of the present invention provides a dual independent vacuum manipulator, comprising: a mounting body, at least two mechanical arm assemblies 100 are arranged on the mounting body, and a driving structure is also arranged inside the mounting body, which is mainly used to drive the mechanical arm assembly 100 to move; the mechanical arm assembly 100 comprises a first arm 200, a second arm 300 and an end effector 400; wherein the first arm 200 has a driving end 210 and a first transmission end 220, and the driving end 210 is rotatably arranged at the end of the mounting body through a rotating shaft and can be rotated on the mounting body; the second arm 300 has a second transmission end 310 and an execution end 320, wherein the second transmission end 310 is rotatably arranged at the first transmission end 220, and the end effector 400 is rotatably arranged at the execution end 320; wherein the first arm 200 has a second transmission end 310 and an execution end 320 There are a shell, a cover plate, a bearing and other components inside the first arm 200, and the other components involved are described in detail below; the second arm 300 also has a shell, a cover plate, a bearing and other components inside the second arm 300, and the other components involved are described in detail below; the end effector 400 includes components such as a transition plate, a finger adjustment plate, a finger pressure plate and a finger part, which are mainly used to clamp the wafer. During the movement of the robot arm assembly 100, the first arm 200 rotates around the axis of the installation body, the second arm 300 rotates around the rotation axis at the first transmission end 220, and the end effector 400 rotates around the rotation axis of the execution end 320, so that the finger part on the end effector 400 can move to a specified position to clamp the wafer; The length relationship between the second arm 300 and the first arm 200 is that the length of the first arm 200 can be selected to be greater than the length of the second arm 300, or the length of the first arm 200 can be selected to be equal to the length of the second arm 300, or the length of the first arm 200 can be selected to be less than the length of the second arm 300. In this embodiment, the length of the first arm 200 is greater than the length of the second arm 300; at the same time, the driving end 210, the first transmission end 220, the second transmission end 310 and the execution end 320 all have joint centers. In this embodiment, the joint centers of multiple driving ends 210 are coaxially arranged, so that the rotating shafts of multiple first arms 200 are coaxially arranged; the length of the first arm 200 is less than the length of the second arm 300, which means that the length of the distance between the two joint centers of the first arm 200 is less than the length of the two joint centers of the second arm 300, that is, the length of the distance between the two joint centers of the second arm 300 is different from the length of the distance between the two joint centers of the first arm 200, the length of the distance between the two joint centers of the first arm 200 is the effective length of the first arm 200, and the length of the distance between the two joint centers of the second arm 300 is the effective length of the second arm 300; At the same time, since at least two robot arm assemblies 100 are arranged on the mounting body, during operation, the multiple first arms 200 rotate independently to drive the corresponding end effectors 400 to rotate independently, and the movements of the multiple end effectors 400 will not interfere with each other, so that the fingers of the multiple end effectors 400 move in a straight line when extending or retracting.

[0038] During the rotation of the first arm 200, the second arm 300 and the end effector 400, a transmission assembly 500 for transmission needs to be provided. Figure 2 , Figure 3 and Figure 4 The transmission assembly 500 is arranged inside the robot arm assembly 100, and is used to drive the robot arm assembly 100 to move, and make the finger part of the end effector 400 move linearly relative to the installation body when extending or retracting. The transmission assembly 500 at least includes a driving pulley 510, an execution pulley 520 and a transmission component. The driving pulley 510 is rotatably arranged at the driving end 210 through a rotating shaft, and the driving pulley 510 is placed in the housing of the first arm 200, and the execution pulley 520 is rotatably arranged at the execution end 320 through a rotating shaft, and the execution pulley 520 is placed in the housing of the second arm 300, and the driving pulley 510 and the execution pulley 520 are both connected to the transmission component; the end effector 400 is fixedly arranged with the execution pulley 520, which can be fixed by snap connection, integral molding or bolt fixing, etc. In this embodiment, the execution pulley 520 is fixedly arranged on the end effector 400 by a rigid connection; the transmission component includes a first transmission wheel 530 and a second transmission wheel 540, the first transmission wheel 530 and the second transmission wheel 540 are coaxially arranged, and the first transmission wheel The first transmission wheel 530 is rotatably arranged at the first transmission end 220 through a rotating shaft, and is arranged inside the housing of the first arm 200. The second transmission wheel 540 is fixedly arranged at the first transmission end 220 and extends to the inside of the housing of the second arm 300. Specifically, a fixed shaft is fixedly arranged at the end surface of the second transmission wheel 540, and the end of the fixed shaft is fixedly arranged at the first transmission end 220. The first transmission wheel 530 is sleeved on the fixed shaft, and the radius of the first transmission wheel 530 is greater than the radius of the second transmission wheel 540. At the same time, the second arm 300 is fixed to the first transmission wheel 530. The first transmission wheel 530 is connected so that when the first transmission wheel 530 rotates, it can drive the second arm 300 to rotate; wherein the driving pulley 510 is connected to the first transmission wheel 530, and the execution pulley 520 is connected to the second transmission wheel 540. In the working state, the driving pulley 510 is stationary, the first arm 200 rotates, and the rotation of the first transmission wheel 530 drives the second arm 300 to rotate; the second transmission wheel 540 is stationary, and the rotation of the second arm 300 drives the execution pulley 520 to rotate, so as to drive the finger part of the end effector 400 to move in a straight line when extending or retracting.

[0039] Since there is a certain distance between the driving pulley 510 and the first transmission wheel 530, the second transmission wheel 540 and the execution pulley 520, a transmission member is required for transmission during the working process, referring to Figure 2 , Figure 3 and Figure 4 The first arm 200 is provided with a first transmission belt 550, and the two ends of the first transmission belt 550 are respectively connected to the driving pulley 510 and the first transmission pulley 530; the second arm 300 is provided with a second transmission belt 560, and the two ends of the second transmission belt 560 are respectively connected to the second transmission pulley 540 and the execution pulley 520; wherein the first transmission belt 550 and the second transmission belt 560 can be transmission belts connected end to end; or they can be transmission belts separated from the end; or wherein one of the first transmission belt 550 and the second transmission belt 560 is a transmission belt connected end to end, and the other is a transmission belt connected end to end. The transmission belt is separated from the head; when it is a transmission belt connected from head to tail, one end of the first transmission belt 550 is sleeved on the side wall of the driving pulley 510, and the other end is sleeved on the side wall of the first transmission wheel 530. One end of the second transmission belt 560 is sleeved on the side wall of the second transmission wheel 540, and the other end is sleeved on the side wall of the execution pulley 520. The driving pulley 510 rotates, and the first transmission belt 550 drives the first transmission wheel 530 to rotate, and the second transmission wheel 540 rotates synchronously, and the execution pulley 520 is not driven to rotate by the second transmission belt 560, thereby driving the end effector 400 to rotate; When it is a transmission belt with its head and tail separated, one or two first transmission belts 550 may be selected, and at least one end of the first transmission belt 550 is wound around the side wall of the driving pulley 510 or the side wall of the first transmission wheel 530. One end of the first transmission belt 550 may be wound around the side wall of the driving pulley 510, or one end of the first transmission belt 550 may be wound around the side wall of the first transmission wheel 530, or both ends of the first transmission belt 550 may be wound around the side wall of the driving pulley 510 and the side wall of the first transmission wheel 530 respectively. The second transmission belt 560 may be provided with one or two, and at least one end of the second transmission belt 560 is wound around the side wall of the execution pulley 520 or the side wall of the second transmission pulley 540. One end of the second transmission belt 560 may be wound around the side wall of the execution pulley 520, or one end of the second transmission belt 560 may be wound around the side wall of the second transmission pulley 540, or both ends of the second transmission belt 560 may be wound around the side wall of the execution pulley 520 and the side wall of the second transmission pulley 540 respectively. In the present embodiment, two first transmission belts 550 and two second transmission belts 560 are used, and both are transmission belts separated at the head and tail, which are suitable for the internal vacuum mode of the manipulator; one end of the first transmission belt 550 is wound around the side wall of the driving pulley 510, and the other end is connected to the side wall of the first transmission wheel 530, and the other end of the first transmission belt 550 is wound around the side wall of the first transmission wheel 530, and the other end is connected to the side wall of the driving pulley 510; one end of the second transmission belt 560 is wound around the side wall of the execution pulley 520, and the other end is connected to the side wall of the second transmission wheel 540; another end of the second transmission belt 560 is wound around the side wall of the second transmission wheel 540, and the other end is connected to the side wall of the execution pulley 520; in addition, the first transmission belt 550 and the second transmission belt 560 can be made of belts, or steel belts or other structures that can realize the transmission function. In the present embodiment, the first transmission belt 550 and the second transmission belt 560 are both steel belts.

[0040] Specifically in this embodiment, in each robot arm assembly 100, when the first arm 200 rotates and the driving pulley 510 is stationary, the finger portion on the end effector 400 is driven to extend or retract and perform linear motion; when the first arm 200 and the driving pulley 510 rotate at the same time, the corresponding robot arm assembly 100 is driven to perform rotational motion as a whole. At the same time, the two robot arm assemblies 100 in this embodiment are independently controlled to achieve more film taking actions. At the same time, the transmission ratio of the driving pulley 510 to the first transmission wheel 530 is 2:1, and the transmission ratio of the second transmission wheel 540 to the execution pulley 520 is 1:1. :2, that is, the transmission ratio of the three positions is 2:1:2. At the same time, at least one of the driving pulley 510 and the executing pulley 520 is a variable diameter wheel. The executing pulley 520 can be selected as a variable diameter wheel, or the driving pulley 510 can be selected as a variable diameter wheel, or the executing pulley 520 and the driving pulley 510 can be selected as variable diameter wheels. In this embodiment, the driving pulley 510 or the executing pulley 520 is selected as a variable diameter wheel, so as to adapt to the different effective lengths of the first arm 200 and the second arm 300, and ensure that the finger of the end effector 400 moves in a straight line when extending or retracting; in addition, the variable diameter wheel is A small part of the side wall is a variable diameter portion. When the driving pulley 510 is a variable diameter wheel, the variable diameter portion is the side wall that contacts the first transmission belt 550 when the variable diameter wheel is stationary or moving; when the execution pulley 520 is a variable diameter wheel, the variable diameter portion is the side wall that contacts the second transmission belt 560 when the variable diameter wheel is stationary or moving. During operation, the driving pulley 510 is stationary, the first arm 200 rotates, and the positions of the first transmission wheel 530 and the second transmission wheel 540 change with the rotation of the first arm 200. Therefore, under the restriction of the first transmission belt 550, the first transmission wheel 530 rotates around its own axis. When the first arm 200 and the driving pulley 510 rotate, the second arm 300 is driven to rotate, the second transmission wheel 540 remains relatively stationary and does not rotate, the position of the execution pulley 520 changes, and under the limiting action of the second transmission belt 560, the execution pulley 520 rotates to drive the finger part of the end effector 400 to extend or retract in a straight line; the driving pulley 510, when the rotation speeds of the first arm 200 and the driving pulley 510 are different, the finger part of the end effector 400 can be extended or retracted; when the rotation speeds of the first arm 200 and the driving pulley 510 are the same, the robot arm assembly 100 as a whole rotates around the mounting body.

[0041] In order to solve the problem of limited path planning during the movement of the robot arm assembly 100, refer to Figure 2 , Figure 5 and Figure 6, the radius of the variable wheel is related to the effective length of the first arm 200 and the effective length of the second arm 300; when the effective length of the first arm 200 and the effective length of the second arm 300 change, the shape and radius of the variable wheel also change. Specifically, according to the difference between the effective length of the first arm 200 and the effective length of the second arm 300, the radius of the variable wheel can be calculated according to the following content: In this embodiment, the effective length of the first arm 200 is L, and the effective length of the second arm 300 is l. During operation, the effective length L of the first arm 200 and the effective length l of the second arm 300 are fixed values; the direction of the connection between the mounting body and the wafer is defined as the first direction, the direction perpendicular to the first direction is defined as the second direction, the first angle between the first arm 200 and the second direction is θ, the second angle between the second arm 300 and the second direction is β, and a is the length difference between the first arm 200 and the second arm 300 in the horizontal direction; When the first angle θ changes, the second angle β changes accordingly, and the related change relationship is: ▪ =L▪ -

[0042] =

[0043] β=arc =arc

[0044] According to the correlation between the first angle θ and the second angle β, the transmission ratio G1 of the first arm 200 and the transmission ratio G2 of the second arm 300 can be obtained: Transmission ratio G1 of the first arm 200:

[0045] The transmission ratio G2 of the second arm 300 is:

[0046] By using the transmission ratio G1 of the first arm 200 and the transmission ratio G2 of the second arm 300, the radius r1 of the variable diameter wheel when the variable diameter wheel is the driving pulley 510 or the radius r2 of the variable diameter wheel when the variable diameter wheel is the execution pulley 520 can be calculated; When the driving pulley 510 is a variable diameter pulley, the radius of the variable diameter pulley r1 is:

[0047] When the executing pulley 520 is a variable diameter pulley, the radius of the variable diameter pulley r2 is:

[0048] Wherein, R1 and R2 are the radius of the first transmission wheel 530 and the radius of the second transmission wheel 540 respectively; When the driving pulley 510 or the executing pulley 520 is a variable diameter pulley, the radius of the variable diameter pulley can be calculated according to the above algorithm to make it suitable for different working conditions.

[0049] During the operation of the robot arm assembly 100, the first arm 200 and the driving pulley 510 in the transfer assembly need to be able to rotate independently. In order to meet the requirement that the first arm 200 and the driving pulley 510 can rotate independently, refer to Figure 2 , Figure 3 and Figure 4 The vacuum manipulator also includes a rotor assembly 600, which is arranged inside the installation body and is used to drive the first arm 200, the second arm 300 and the end effector 400 to rotate; wherein the rotor assembly 600 includes a first control group 610 and a second control group 620, and the first control group 610 and the second control group 620 are respectively connected to the two first arms 200, so that the two robot arm assemblies 100 can move independently, and there will be no interference between the two robot arm assemblies 100, and at the same time, the joint centers of the two driving ends 210 are coaxially arranged, so that the two robot arm assemblies 100 are integrated into the same horizontal space range, thereby improving space utilization; The first control group 610 includes a first rotating shaft 611 and a second rotating shaft 612, the first rotating shaft 611 and the second rotating shaft 612 are coaxially arranged, and the second rotating shaft 612 is passed through the first rotating shaft 611. In one of the mechanical arm assemblies 100, that is, in the mechanical arm assembly 100 corresponding to the first control group 610, the first arm 200 is fixedly arranged at the end of the first rotating shaft 611, and the fixing method thereof can be selected from clamping, bolting or rigid connection, etc. In this embodiment, the fixing method of the two being rigidly connected is preferably selected; the driving pulley 510 is fixedly arranged on the second rotating shaft 612, and the fixing method thereof can be selected from clamping, bolting or rigid connection. Fixed or rigid connection, in this embodiment, the fixing method of rigid connection between the two is preferably used; wherein the first rotating shaft 611 is used to drive the first arm 200 to rotate, and the second rotating shaft 612 is used to drive the driving pulley 510 to rotate. In the working state, the first rotating shaft 611 rotates, and the second rotating shaft 612 is stationary, driving the first arm 200 to rotate, and the driving pulley 510 is stationary, so as to drive the finger part of the end effector 400 to move in a straight line when extending or retracting; the first rotating shaft 611 and the second rotating shaft 612 rotate at the same time, driving the first arm 200 and the driving pulley 510 to rotate at the same time, so that the robot arm assembly 100 performs a rotational motion as a whole.

[0050] The second control group 620 includes a fourth rotating shaft 621 and a fifth rotating shaft 622, the fourth rotating shaft 621 and the fifth rotating shaft 622 are coaxially arranged, and the fifth rotating shaft 622 is penetrated by the fourth rotating shaft 621. In another robot arm assembly 100, that is, in the robot arm assembly 100 corresponding to the second control group 620, the first arm 200 is fixedly arranged at the end of the fourth rotating shaft 621, and its fixing method can be selected from clamping, bolting or rigid connection, etc. In this embodiment, the fixing method of rigid connection between the two is preferably selected; the driving pulley 510 is fixedly arranged on the fifth rotating shaft 622, and its fixing method can be selected from clamping, bolting or rigid connection. Rigid connection, etc., in this embodiment, the preferred fixing method of the two being rigidly connected is selected; wherein the fourth rotating shaft 621 is used to drive the first arm 200 to rotate, and the fifth rotating shaft 622 is used to drive the driving pulley 510 to rotate. In the working state, the fourth rotating shaft 621 rotates, and the fifth rotating shaft 622 does not move, driving the first arm 200 to rotate, and the driving pulley 510 does not move, so as to drive the finger part of the end effector 400 to move in a straight line when extending or retracting; the fourth rotating shaft 621 and the fifth rotating shaft 622 rotate simultaneously, driving the first arm 200 and the driving pulley 510 to rotate simultaneously, so that the robot arm assembly 100 performs a rotational motion as a whole.

[0051] In the process of the rotor assembly 600 driving the robot arm assembly 100 to rotate, it is necessary to control the rotation of the rotating shaft in the rotor assembly 600. Figure 2 , Figure 3 and Figure 4A control component 900 is also arranged inside the installation body, and the control component 900 includes a main board, an ARM board, an IO board, a power supply board, an interface board, cables and a fan, etc. A driver is also arranged inside the installation body, and the control component 900 is used to control the start and stop of the driver; at the same time, the number of the driver corresponds to the number of the rotating shafts in the rotor assembly 600. In the present embodiment, the driver is a direct-drive motor 800, which is mainly used to drive the rotating shaft in the rotor assembly 600 to rotate. The driver and the rotating shaft can be directly connected or indirectly connected, as long as they can drive the rotating shaft to rotate; at the same time, each direct-drive motor 800 includes a motor housing, an output shaft, a transfer shaft, a bearing cover, a reading head adjustment plate, a bearing, a motor, a code disc, a reading head and an aviation plug interface board; the code disc is an absolute value code disc, and the angular resolution of the code disc is 0.00030 arc seconds.Accurately feedback the angle and position information of the shaft rotation; that is, a plurality of direct-drive motors 800 are arranged in the installation body, and the fourth rotating shaft 621 is penetrated through the second rotating shaft 612, so that the first rotating shaft 611, the second rotating shaft 612, the fourth rotating shaft 621 and the fifth rotating shaft 622 are coaxially arranged, and correspond to the number of the plurality of direct-drive motors 800 one by one. In addition, the plurality of direct-drive motors 800 are coaxially arranged to facilitate the control of the corresponding rotation of the rotating shaft; a lifting assembly 700 is also arranged in the installation body, and the lifting assembly 700 is connected to the rotor assembly 600, and the lifting assembly 700 is used to drive the rotor assembly 600 to move axially along the rotating shaft of the first arm 200, The axial direction of the rotating shaft of the first arm 200 is the axial direction of the joint center of the first arm 200; the lifting assembly 700 includes at least one linear guide 710, a lifting drive and a screw 720, wherein the lifting drive is selected as a lifting motor 730, wherein the axis of the linear guide 710 is parallel to the axis of the rotating shaft of the first arm 200, and the rotor assembly 600 is slidably set on the linear guide 710, and a nut 721 is fixedly set on the rotor assembly 600, and the nut 721 is threadedly connected to the screw 720, and the screw 720 drives the rotor assembly 600 to move along the linear guide 710 by driving the nut 721. Specifically in this embodiment, the rotor assembly The direct drive motor 800 in the component 600 is slidably arranged on the linear guide rail 710, so that multiple direct drive motors 800 can move along the axial direction of the linear guide rail 710 to drive the transfer component to rise and fall. The axis of the screw rod 720 is parallel to the axis of the linear guide rail 710, and the end of the screw rod 720 is fixedly arranged at the rotating shaft of the lifting motor 730 of the lifting component 700. The fixing method can be bolt fixing, clamping or rigid connection, etc. In this embodiment, the rigid connection between the two is preferably used. At the same time, the rotor component 600 is threadedly connected to the screw rod 720. Specifically in this embodiment, the screw rod 720 is threadedly connected to the direct drive motor 800 in the rotor component 600. In the working state, the lifting motor 730 is started to drive the screw rod 720 to rotate. Since the screw rod 720 is threadedly connected to the direct-drive motor 800 in the rotor assembly 600, and the direct-drive motor 800 in the rotor assembly 600 is slidably set on the linear guide rail 710, it can drive the rotor assembly 600 to move axially along the linear guide rail 710, thereby completing the control of the lifting and lowering of the robot arm assembly 100. In addition, in this embodiment, two robot arm assemblies 100 are used, and the two robot arm assemblies 100 are distributed in the vertical direction. The two robot arm assemblies 100 can be independently extended or rotated without interfering with each other.

[0052] The implementation principle of the dual independent vacuum manipulators in the embodiment of the present application is that the first rotating shaft 611 and the second rotating shaft 612 drive one of the robot arm assemblies 100 to move, and the fourth rotating shaft 621 and the fifth rotating shaft 622 drive the other robot arm assembly 100 to move; during operation, the two robot arm assemblies 100 move independently, so that the wafer transfer efficiency is improved when the wafer is transferred to multiple stations. At the same time, in the case of multiple robot arm assemblies 100, the space occupancy rate is relatively small. In addition, more wafer picking actions can be realized.

[0053] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways.

Claims

1. A dual independent vacuum manipulator, characterized in that: It comprises a mounting body and at least two mechanical arm assemblies (100); Each of the mechanical arm assemblies (100) comprises a first arm (200), a second arm (300), and an end effector (400); The first arm (200) has a driving end (210) and a first transmission end (220), the driving end (210) is rotatably disposed on the mounting body, and the driving end (210) and the first transmission end (220) both have a joint center; the second arm (300) has a second transmission end (310) and an execution end (320), the second transmission end (310) is rotatably disposed on the first transmission end (220), and the second transmission end (310) and the execution end (320) both have a joint center; the end effector (400) is rotatably disposed on the execution end (320), and the end effector (400) has a finger portion; The distance between the centers of the two joints of the second arm (300) is different from the distance between the centers of the two joints of the first arm (200); The joint centers of the driving ends (210) of the plurality of first arms (200) are coaxially arranged; Wherein, the plurality of first arms (200) rotate independently, driving the corresponding end effectors (400) to move independently, and the fingers of the end effectors (400) move in a straight line when extending or retracting.

2. The dual independent vacuum manipulator according to claim 1, characterized in that: It also includes a transmission assembly (500) and a rotor assembly (600); the transmission assembly (500) is arranged in the mechanical arm assembly (100), and the transmission assembly (500) is used to make the finger portion of the end effector (400) move in a straight line when extending or retracting; The rotor assembly (600) comprises a first control group (610) and a second control group (620), wherein the first control group (610) and the second control group (620) are respectively connected to the two first arms (200), so that the two mechanical arm assemblies (100) move independently of each other and the joint centers of the two driving ends (210) are coaxially arranged.

3. The dual independent vacuum manipulator according to claim 2, characterized in that: The transmission assembly (500) comprises a driving pulley (510), an execution pulley (520) and a transmission component; the driving pulley (510) is rotatably disposed at the driving end (210); the execution pulley (520) is rotatably disposed at the execution end (320); the driving pulley (510) and the execution pulley (520) are both transmission-connected to the transmission component; the driving pulley (510) or the execution pulley (520) is a variable diameter pulley.

4. The dual independent vacuum manipulator according to claim 3, characterized in that: The first control group (610) comprises a first rotating shaft (611) and a second rotating shaft (612), wherein the second rotating shaft (612) passes through the first rotating shaft (611); In one of the mechanical arm assemblies (100), the first arm (200) is fixedly disposed on the first rotating shaft (611), and the driving pulley (510) is fixedly disposed on the second rotating shaft (612); In a working state, the first rotating shaft (611) rotates, and the second rotating shaft (612) remains stationary, driving the first arm (200) to rotate, so as to drive the finger portion of the end effector (400) to move in a straight line when extending or retracting; the second rotating shaft (612) drives the driving pulley (510) to rotate, and when the first rotating shaft (611) and the second rotating shaft (612) rotate simultaneously, the robot arm assembly (100) rotates as a whole.

5. The dual independent vacuum manipulator according to claim 4, characterized in that: The second control group (620) comprises a fourth rotating shaft (621) and a fifth rotating shaft (622), wherein the fifth rotating shaft (622) passes through the fourth rotating shaft (621); In another of the mechanical arm components (100), the first arm (200) is fixedly disposed on the fourth rotating shaft (621), and the driving pulley (510) is fixedly disposed on the fifth rotating shaft (622); In a working state, the fourth rotating shaft (621) rotates, and the fifth rotating shaft (622) remains stationary, driving the first arm (200) to rotate, so as to drive the finger portion of the end effector (400) to move in a straight line when extending or retracting; the fifth rotating shaft (622) drives the driving pulley (510) to rotate, and when the fourth rotating shaft (621) and the fifth rotating shaft (622) rotate simultaneously, the robot arm assembly (100) rotates as a whole.

6. The dual independent vacuum manipulator according to claim 5, characterized in that: A plurality of direct-drive motors (800) are arranged in the installation body, and the fourth rotating shaft (621) is passed through the second rotating shaft (612), so that the first rotating shaft (611), the second rotating shaft (612), the fourth rotating shaft (621) and the fifth rotating shaft are coaxially arranged and correspond one-to-one to the plurality of direct-drive motors (800).

7. The dual independent vacuum manipulator according to claim 5, characterized in that: A lifting drive is arranged in the installation body, and the lifting drive is connected to the rotor assembly (600) and is used to drive the rotor assembly (600) to move axially along the rotating shaft of the first arm (200).

8. The dual independent vacuum manipulator according to claim 3, characterized in that: The transmission component comprises a first transmission wheel (530) and a second transmission wheel (540) which are coaxially arranged, the first transmission wheel (530) being rotatably arranged at the first transmission end (220), the second transmission wheel (540) being fixedly arranged at the first transmission end (220) and extending to the second transmission end (310), the driving pulley (510) being transmission-connected to the first transmission wheel (530), the execution pulley (520) being transmission-connected to the second transmission wheel (540), and the end effector (400) being fixedly connected to the execution pulley (520); In the working state, the driving pulley (510) is stationary, and the first arm (200) rotates, so that the first transmission wheel (530) rotates and drives the second arm (300) to rotate; the second transmission wheel (540) is stationary, and the second arm (300) rotates and drives the execution pulley (520) to rotate, so as to drive the finger part of the end effector (400) to move in a straight line when extending or retracting.

9. The dual independent vacuum manipulator according to claim 8, characterized in that: A first transmission belt (550) is arranged on the first arm (200), and at least one end of the first transmission belt (550) is wound around the side wall of the driving pulley (510) or the side wall of the first transmission pulley (530); a second transmission belt (560) is arranged on the second arm (300), and at least one end of the second transmission belt (560) is wound around the side wall of the second transmission pulley (540) or the side wall of the execution pulley (520).

10. The dual independent vacuum manipulator according to claim 9, characterized in that: At least part of the side wall of the diameter-changing wheel is a diameter-changing portion, and the diameter-changing portion is the side wall that contacts the first transmission belt (550) or the second transmission belt (560) when the diameter-changing wheel is stationary or moving.

11. The dual independent vacuum manipulator according to claim 10, characterized in that: The radius r2 of the variable diameter wheel is calculated by the following steps: The connection direction between the mounting body and the wafer is defined as a first direction, a direction perpendicular to the first direction is defined as a second direction, a first angle between the first arm (200) and the second direction is defined as θ, and a second angle between the second arm (300) and the second direction is defined as β; The corresponding relationship between the second angle β and the first angle θ is: β=arc =arc The transmission ratio G2 of the second arm (300) is: The radius r2 of the variable diameter wheel: Wherein G2 is the transmission ratio of the second arm (300), R2 is the radius of the second transmission wheel (540); l is the length of the second arm (300); L is the length of the first arm (200); and a is the length difference between the first arm (200) and the second arm (300) in the horizontal direction.

Images