A method for drying photovoltaic silicon wafers

Abstract

This application relates to a method for drying photovoltaic silicon wafers, belonging to the field of semiconductor manufacturing technology. The photovoltaic silicon wafer drying method of this application involves flipping and laying down the photovoltaic basket before drying, so that the two rows of photovoltaic silicon wafers are arranged horizontally. Then, a blowing device continuously blows air onto the photovoltaic basket and photovoltaic silicon wafers at the drying station for drying, eliminating the need to place them in a drying tank. This method has the advantages of fast drying speed and high drying efficiency.

Description

Technical Field

[0001] This application belongs to the field of semiconductor manufacturing technology, and in particular relates to a method for drying photovoltaic silicon wafers. Background Technology

[0002] With the increasing efficiency of photovoltaic production equipment, the number of photovoltaic silicon wafers that a single photovoltaic basket can hold is also increasing. A single photovoltaic basket can hold two sets of photovoltaic silicon wafers, greatly improving the efficiency of a single production run. During the process cleaning, in order to reduce the width of the tank, the photovoltaic basket is placed vertically into the process cleaning tank. However, during drying, when the air vent is at the top, in order to improve the drying effect, the photovoltaic basket needs to be laid down so that the two sets of photovoltaic silicon wafers are in a horizontal position.

[0003] Meanwhile, existing photovoltaic silicon wafers are dried by placing them in a separate drying tank, which has low drying efficiency and cannot meet the needs of large-scale drying of photovoltaic silicon wafers. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to provide a photovoltaic silicon wafer drying device with high drying efficiency in order to overcome the shortcomings of low drying efficiency in the prior art.

[0005] The technical solution adopted by this invention to solve its technical problem is:

[0006] A method for drying photovoltaic silicon wafers includes the following steps:

[0007] S1: Flip the photovoltaic basket so that the two rows of photovoltaic silicon wafers arranged in the height direction become arranged in the horizontal direction;

[0008] S2: Place the photovoltaic basket carrying two rows of photovoltaic silicon wafers into the loading station;

[0009] S3: The photovoltaic basket is transported from the loading station to the drying station by the transport device;

[0010] S4: The photovoltaic basket and photovoltaic silicon wafer are dried by blowing air at the drying station;

[0011] S5: After drying, the photovoltaic basket is transported from the drying station to the unloading station by the transport device;

[0012] The loading station, drying station, and unloading station in steps S2-S5 are set up sequentially along the workbench, and the photovoltaic basket is placed on the loading station, drying station, or unloading station.

[0013] Preferably, in the photovoltaic silicon wafer drying method of the present invention, after the photovoltaic silicon wafer is flipped over in step S1, air is blown onto the photovoltaic basket for pre-drying.

[0014] Preferably, in step S of the photovoltaic silicon wafer drying method of the present invention, after the photovoltaic silicon wafer is flipped over, the photovoltaic silicon wafer in the photovoltaic basket is lifted by the lifting component, so that the bottom of the photovoltaic silicon wafer is separated from the photovoltaic basket.

[0015] Preferably, in the photovoltaic silicon wafer drying method of the present invention, the loading station, drying station and unloading station are arranged along the workbench, and the workbench is provided with a transport trough. In step S, a transport mechanism, a slide rail provided below the workbench, and a drive component for driving the transport mechanism to move on the slide rail are provided. The transport mechanism passes through the transport trough and is provided with a transport platform for carrying photovoltaic baskets at the top. The transport platform is located above the workbench. The transport mechanism can also drive the transport platform to lift and lower to place the photovoltaic baskets on the transport platform onto the basket fixing seat or remove the photovoltaic baskets from the basket fixing seat.

[0016] Preferably, in the photovoltaic silicon wafer drying method of the present invention, the transport device further includes a sealing mechanism for sealing the transport trough. The sealing mechanism includes: a pulley assembly located inside the bottom frame of the loading station and the drying station; a shielding belt that can move on the pulley assembly; the shielding belt has an upper shielding part and a lower shielding part located above and below the pulley assembly, respectively; the upper shielding part can move together with the transport mechanism and is always located below the transport trough.

[0017] Preferably, in the photovoltaic silicon wafer drying method of the present invention, the transport mechanism includes a slide table disposed on a slide rail, a lifting drive component disposed on the slide table, a horizontal mounting plate disposed on the lifting drive component, a vertical mounting plate disposed on the horizontal mounting plate and passing through a transport groove, a transport table disposed on the vertical mounting plate and located above the worktable, wherein the vertical mounting plate is provided with a sliding member that can slide freely and is located below the worktable, and the upper shielding part is connected to both ends of the sliding member.

[0018] Preferably, in the photovoltaic silicon wafer drying method of the present invention, in step S4, a circulating fan generates drying air, which enters above the workbench through the upper outer cover to dry the photovoltaic basket placed on the workbench, and then enters the lower outer cover through the air vent on the workbench and flows back to the circulating fan to form circulating air.

[0019] The beneficial effects of this invention are:

[0020] The photovoltaic silicon wafer drying method of the present invention involves flipping and laying down the photovoltaic basket before drying so that the two rows of photovoltaic silicon wafers are arranged in a horizontal direction. Then, the photovoltaic basket and photovoltaic silicon wafers are continuously dried by a blower at the drying station. It does not require placing them in a drying tank and has the advantages of fast drying speed and high drying efficiency. Attached Figure Description

[0021] The technical solution of this application will be further described below with reference to the accompanying drawings and embodiments.

[0022] Figure 1 This is a perspective view of a photovoltaic silicon wafer pre-drying tank with a flipping function according to an embodiment of this application;

[0023] Figure 2 It is hidden Figure 1 A 3D view of a photovoltaic silicon wafer pre-drying tank with a flipping function behind the two tank walls;

[0024] Figure 3 This is a perspective view of the flipping mechanism according to an embodiment of this application;

[0025] Figure 4 This is a perspective view of the air blowing mechanism according to an embodiment of this application;

[0026] Figure 5 This is a perspective view of the photovoltaic silicon wafer drying equipment according to an embodiment of this application (arrows indicate the direction of internal hot air flow);

[0027] Figure 6 This is a perspective view of the workbench according to an embodiment of this application;

[0028] Figure 7 This is a schematic diagram of the structure of the shielding component according to an embodiment of this application;

[0029] Figure 8 This is a perspective view of the transportation mechanism according to an embodiment of this application;

[0030] Figure 9 This is a perspective view of the pulley assembly according to an embodiment of this application;

[0031] Figure 10 This is a three-dimensional enlarged view of the workbench at the drying station in an embodiment of this application;

[0032] Figure 11 This is a schematic diagram of a common photovoltaic hanging basket.

[0033] The attached figures are labeled as follows:

[0034] 1. Tank body;

[0035] 2. Tilting mechanism;

[0036] 4. Blowering device;

[0037] 5. Transport equipment;

[0038] 6. Basket mounting base;

[0039] 9. Photovoltaic hanging baskets;

[0040] 11. Tank body;

[0041] 12. Tilting mechanism;

[0042] 13. Air blowing mechanism;

[0043] 21. Material loading station;

[0044] 22. Drying station;

[0045] 23. Material unloading station;

[0046] 30 workbenches;

[0047] 31. Transport trough;

[0048] 32. Air vent;

[0049] 36 crossbars;

[0050] 40. Outer cover;

[0051] 41. Lifting door;

[0052] 42 vias;

[0053] 43. Lower outer cover;

[0054] 51. Transportation agencies;

[0055] 52. Slide rail;

[0056] 53. Drive components;

[0057] 54. Pulley assembly;

[0058] 55. Barrier strip;

[0059] 56. Support plate;

[0060] 61 Through hole;

[0061] 91 First hook groove;

[0062] 92 Second hook groove;

[0063] 93 Third hook groove;

[0064] 111. Bottom of the trough;

[0065] 112. Tank wall;

[0066] 113 Drainage outlet;

[0067] 114 Gas supply connector;

[0068] 115 First support block;

[0069] 116 Second support block;

[0070] 121 Tilting drive component;

[0071] 122 pivot;

[0072] 123 L-shaped support frame;

[0073] 131 Fixing plate;

[0074] 132. Movable board;

[0075] 133 Lifting drive component;

[0076] 134 guide rod;

[0077] 135 mounting plate;

[0078] 136 crossbars;

[0079] 137 Gas supply pipe;

[0080] 231 First support plate;

[0081] 513 Horizontal mounting plate;

[0082] 514 Vertical mounting plate;

[0083] 516 Sliding rod;

[0084] 530 slide;

[0085] 531 Transport Station;

[0086] 532 Lifting drive component;

[0087] 541 Mounting base;

[0088] 542 First pulley;

[0089] 543 Second pulley;

[0090] 551 Upper shielding part;

[0091] 552 Lower shielding part;

[0092] 553 Sliding component;

[0093] 1231 First support plate;

[0094] 1232 Second support plate

[0095] 1233 L-shaped fixing block;

[0096] 1234 Flexible layer;

[0097] 1361 Jet nozzle;

[0098] 5311 Fixing strip;

[0099] 5332 Positioning slot. Detailed Implementation

[0100] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other.

[0101] In the description of this application, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as limiting the scope of protection of this application. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0102] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art will understand the specific meaning of the above terms in this application based on the specific circumstances.

[0103] The technical solution of this application will now be described in detail with reference to the accompanying drawings and embodiments.

[0104] This embodiment provides a method for drying photovoltaic silicon wafers, including the following steps:

[0105] S1: Flip the photovoltaic basket 9 so that the two rows of photovoltaic silicon wafers arranged in the height direction become arranged in the horizontal direction;

[0106] S2: Place the photovoltaic basket 9, which carries two rows of photovoltaic silicon wafers, into the loading station 21;

[0107] S3: The photovoltaic basket 9 is transported from the loading station 21 to the drying station 22 by the transport device 5;

[0108] S4: The photovoltaic basket 9 and the photovoltaic silicon wafer are dried by the blowing device 4 at the drying station 22;

[0109] S5: After drying, the photovoltaic basket 9 is transported from the drying station 22 to the unloading station 23 by the transport device 5;

[0110] The loading station 21, drying station 22, and unloading station 23 in steps S2-S5 are arranged sequentially along the workbench 30, and the photovoltaic silicon wafers are placed at the corresponding stations.

[0111] In the photovoltaic silicon wafer drying method of this embodiment, the photovoltaic basket 9 is flipped and laid down before drying so that the two rows of photovoltaic silicon wafers are arranged in a horizontal direction. Then, the photovoltaic basket 9 and the photovoltaic silicon wafers are continuously dried by the blowing device 4 at the drying station 22. It does not need to be placed in the drying tank, which has the advantages of fast drying speed and high drying efficiency.

[0112] Furthermore, in step S1, after flipping the photovoltaic silicon wafer 9, air is blown onto the photovoltaic basket 9 for pre-drying (pre-drying refers to blowing room temperature gas to blow off water droplets on the basket 9 and the photovoltaic silicon wafer).

[0113] Furthermore, in step S1, after flipping the photovoltaic silicon wafer 9, the photovoltaic silicon wafer inside the photovoltaic basket 9 is lifted by the lifting component, so that the bottom of the photovoltaic silicon wafer is no longer in contact with the photovoltaic basket 9.

[0114] Furthermore, a transport trough 31 is provided on the workbench 30. In step S3, a transport mechanism 51, a slide rail 52 provided below the workbench 30, and a drive component 53 for driving the transport mechanism 51 to move on the slide rail 52 are provided. The transport mechanism 51 passes through the transport trough 31 and is provided on top of a transport platform 531 for carrying the photovoltaic basket 9. The transport platform 531 is located above the workbench 30. The transport mechanism 51 can also drive the transport platform 531 to rise and fall to place the photovoltaic basket 9 on the transport platform 531 onto the basket fixing seat 6 or remove the photovoltaic basket 9 from the basket fixing seat 6.

[0115] Furthermore, the transport device 5 also includes a sealing mechanism for sealing the transport trough 31. The sealing mechanism includes: a pulley assembly 54 located inside the bottom frame of the loading station 21 and the drying station 22; and a shielding belt 55 that can move on the pulley assembly 54. The shielding belt 55 has an upper shielding part 551 and a lower shielding part 552 located above and below the pulley assembly 54, respectively. The upper shielding part 551 can move together with the transport mechanism 51 and is always located below the transport trough 31.

[0116] Further, the transport mechanism 51 includes a slide table 530 mounted on a slide rail 52, a lifting drive 532 mounted on the slide table 530, a horizontal mounting plate 513 mounted on the lifting drive 532, a vertical mounting plate 514 mounted on the horizontal mounting plate 513 and passing through the transport groove 31, a transport table 531 mounted on the vertical mounting plate 514 and located above the worktable 30, and a sliding member 553 that can slide freely and is located below the worktable 30 is provided on the vertical mounting plate 514, and the upper shielding part 551 is connected to both ends of the sliding member 553.

[0117] Furthermore, in step S4, the circulating fan generates drying air, which enters above the workbench 30 through the upper outer cover 40 to dry the photovoltaic hanging basket 9 placed on the workbench 30, and then enters the lower outer cover 43 through the air outlet 32 ​​on the workbench 30 and flows back to the circulating fan to form circulating air.

[0118] In step S1 of the drying method of this embodiment, a photovoltaic silicon wafer pre-drying tank with a flipping function is used, such as... Figure 1 As shown, it includes:

[0119] Tank 11, such as Figure 2 As shown, it consists of a tank bottom 111 and a tank wall 112, with an opening at the top. A drain outlet 113 is provided on the tank bottom 111, and water droplets blown off by the air blowing mechanism 13 can be discharged from the drain outlet 113.

[0120] Flipping mechanism 12, such as Figure 3 As shown, the photovoltaic basket 9 is used to drive the photovoltaic basket 9 to change between a first state and a second state. When the photovoltaic basket 9 is in the first state, the two sets of photovoltaic silicon wafers contained in the photovoltaic basket 9 are arranged side by side at an angle of less than 10° to the horizontal plane. When the photovoltaic basket 9 is in the second state, the two sets of photovoltaic silicon wafers contained in the photovoltaic basket 9 are arranged vertically. The flipping mechanism 12 includes: a flipping drive 121, a rotating shaft 122 driven by the flipping drive 121, and an L-shaped support frame 123 for fixing the photovoltaic basket 9 on the rotating shaft 122.

[0121] Air blowing mechanism 13, such as Figure 5 As shown, it includes a lifting assembly and a mounting plate 135 that can be raised and lowered by the lifting assembly. The top of the mounting plate 135 is provided with a plurality of crossbars 136. The crossbars 136 are provided with rows of air nozzles 1361. The crossbars 136 are hollow and connected to the air supply pipe 137. When the lifting assembly is raised, the crossbars 136 can lift the photovoltaic silicon wafers in the photovoltaic basket 9.

[0122] This embodiment of a photovoltaic silicon wafer pre-drying tank with a flipping function has both flipping and pre-drying functions for photovoltaic silicon wafers. The flipping function changes the photovoltaic basket 9 from a vertical to a horizontal state, transforming two vertically arranged sets of photovoltaic silicon wafers into two horizontally arranged sets. The pre-drying function is used to lift the photovoltaic silicon wafers when the photovoltaic basket 9 is in a horizontal state, causing the bottom of the photovoltaic silicon wafers to detach from contact with the photovoltaic basket 9 (water will accumulate at the contact point between the bottom of the photovoltaic silicon wafers and the photovoltaic basket 9, resulting in poor air drying effect). At the same time, the air jets on the crossbar 36 spray gas to blow off the water droplets on the photovoltaic basket 9 and the photovoltaic silicon wafers, achieving the pre-drying effect. The blown-off water droplets are collected by the tank body 1. This embodiment of a photovoltaic silicon wafer pre-drying tank with a flipping function simultaneously achieves the flipping and pre-drying effects, providing preliminary preparation for further drying.

[0123] The L-shaped support frame 123 includes a first support plate 1231 and a second support plate 1232 that are perpendicular to each other. An L-shaped fixing block 1233 is provided on the first support plate 1231, which can support the short side of the photovoltaic hanging basket 9. A flexible layer 1234 (made of PTFE material) is provided on the second support plate 1232, and the flexible layer 1234 contacts the bottom of the long side of the photovoltaic hanging basket 9 to achieve a buffering effect.

[0124] When the L-shaped support frame 123 supports the photovoltaic hanging basket 9 in the first state, the first support plate 1231 forms an angle of 3° to 10° with the horizontal plane, such as 3°, 5°, 8°, or 10°. That is, the first support plate 231 is slightly tilted to prevent the photovoltaic hanging basket 9 from tipping over. Of course, when a fixing block is set to prevent the photovoltaic hanging basket 9 from tipping over, or when the photovoltaic hanging basket 9 itself does not tip over, the angle can also be set to 0°, that is, horizontal.

[0125] When the L-shaped support frame 123 supports the photovoltaic hanging basket 9 in the first state, the first support plate 1231 is supported by the first support block 115 set on the bottom of the trough 111.

[0126] When the L-shaped support frame 123 supports the photovoltaic hanging basket 9 in the second state, the second support plate 1232 is supported by the second support block 116 set on the bottom of the trough 111.

[0127] The lifting assembly includes: a fixed plate 131 fixed in the groove 11, a movable plate 132 capable of being lifted and lowered, a lifting drive component 133 for driving the movable plate 132 to be lifted and lowered, and a mounting plate 135 connected to the movable plate 132 via a guide rod 134, the guide rod 134 passing through the fixed plate 131.

[0128] The crossbars 136 are in two groups, each group corresponding to a photovoltaic hanging basket 9, and each group has four crossbars. In each group, the air nozzles 1361 on every two crossbars 136 are arranged opposite each other, and every two crossbars 136 correspond to a set of photovoltaic silicon wafers.

[0129] The tilting drive 121 is located on the outside of the groove wall 112, and the drive shaft of the tilting drive 121 (motor) passes through the groove wall 112 and is connected to the rotating shaft 122. Both ends of the rotating shaft 122 are supported by bearings.

[0130] The tank wall 112 is also provided with an air supply connector 114, and all air supply pipes 137 are connected to the air supply connector 114, which is then connected to the external air supply equipment.

[0131] In this embodiment, the photovoltaic silicon wafer drying method uses a photovoltaic silicon wafer drying device in steps S2-S4, including:

[0132] Workbench 30, such as Figure 5 and Figure 6 As shown, the workbench 30 has a loading station 21, a drying station 22, and a unloading station 23 arranged sequentially. A transport trough 31 is provided on the workbench 30, connecting the loading station 21, drying station 22, and unloading station 23. Each of the loading station 21, drying station 22, and unloading station 23 on the workbench 30 is equipped with a hanging basket fixing seat 6, which is used to place the photovoltaic hanging basket 9. The workbench 30 is supported by a bottom frame, which is hollow inside.

[0133] The transport device 5 is capable of transporting the photovoltaic basket 9 between the loading station 21, the drying station 22 and the unloading station 23;

[0134] A blower 4 is installed at the drying station 22. The blower 4 is used to provide drying air to the drying station 22. An air vent 32 is also provided on the workbench 30 at the drying station 22. The air vent 32 is located between two hanging basket fixing seats 6 that fix the same photovoltaic hanging basket 9. The presence of the air vent 32 allows the drying airflow to flow from above to below the workbench 30, or from below to above the workbench 30.

[0135] The transport device 5, such as Figure 7The system includes a transport mechanism 51, a slide rail 52 disposed below the workbench 30, a drive component 53 for driving the transport mechanism 51 to move on the slide rail 52, and a sealing mechanism for sealing the transport trough 31. The transport mechanism 51 passes through the transport trough 31 and is provided with a transport platform 531 for carrying the photovoltaic basket 9 at the top. The transport platform 531 is located above the workbench 30. The transport mechanism 51 can also drive the transport platform 531 to rise and fall to place the photovoltaic basket 9 on the transport platform 531 onto the basket fixing seat 6 or remove the photovoltaic basket 9 from the basket fixing seat 6.

[0136] The sealing mechanism includes: a pulley assembly 54 located inside the bottom frame of the loading station 21 and the drying station 22; and a shielding belt 55 movable on the pulley assembly 54. The shielding belt 55 has an upper shielding part 551 and a lower shielding part 552 located above and below the pulley assembly 54, respectively. The upper shielding part 551 can move together with the transport mechanism 51 and is always located below the transport trough 31. The sealing mechanism seals the bottom of the transport trough 31, which can reduce the amount of drying air passing through the transport trough 31, improve the utilization rate of drying air, and reduce energy consumption. Note that the sealing mechanism cannot completely seal the transport trough 31.

[0137] In this embodiment of the photovoltaic silicon wafer drying equipment, the workbench 30 is divided into a loading station 21, a drying station 22, and a unloading station 23. The transport device 5 transports the photovoltaic basket 9 between the loading station 21, the drying station 22, and the unloading station 23. The transport device 5 is located at the bottom of the workbench 30 and is isolated from the top of the workbench 30, avoiding contamination of the top by the transport device 5 (some debris is inevitably generated when the transport device 5 moves). However, this requires the provision of a transport trough 31 for the support mechanism to pass through and support the movement of the photovoltaic basket 9. Therefore, a blocking strip 55 of the sealing mechanism is required to block the bottom of the transport trough 31, reducing the outflow of drying gas from the transport trough 31, reducing the amount of hot air loss, and improving the drying effect.

[0138] Furthermore, a support plate 56 is provided at the bottom of the upper blocking part 551 and / or the lower blocking part 552 to support the upper blocking part 551 and / or the lower blocking part 552 and prevent the upper blocking part 551 and the lower blocking part 552 from sag due to gravity. Especially when the length is long, the sag effect in the middle area of ​​the upper blocking part 551 and the lower blocking part 552 is obvious, and the support plate 56 can effectively improve the sag effect.

[0139] Furthermore, the transport mechanism 51, such as Figure 8As shown, it includes a slide table 530 mounted on a slide rail 52, a lifting drive 532 mounted on the slide table 530, a horizontal mounting plate 513 mounted on the lifting drive 532, a vertical mounting plate 514 mounted on the horizontal mounting plate 513 and passing through the transport groove 31, and a transport table 531 mounted on the vertical mounting plate 514 and located above the worktable 30. The vertical mounting plate 514 is provided with a sliding member 553 that can slide freely and is located below the worktable 30. The upper blocking part 551 is connected to both ends of the sliding member 553. The upper blocking part 551 pulls the sliding member 553 tight so that the sliding member 553 is at a stable height and is not affected by the lifting of the transport table 531.

[0140] Furthermore, a vertical mounting plate 514 is provided above one side of the horizontal mounting plate 513, and a lower blocking part 552 passes through the lower side. The lower side of the other side is slidably connected to the slide table 530 via a slide rod 516. A linear bearing is provided on the slide table 530, and the top end of the slide rod 516 is fixed to the lower part of the vertical mounting plate 514 and extends into the linear bearing. Because installation space needs to be left for the lower blocking part 552, the horizontal mounting plate 513 needs to extend to one side, which leads to an imbalance of forces. Therefore, a slide rod 516 is provided on the other side to balance the forces and improve the stability of the movement of the transport table 531.

[0141] Furthermore, such as Figure 9 As shown, the pulley assembly 54 includes a mounting base 541, a first pulley 542 and a second pulley 543 arranged along the height direction on the mounting base 541. The first pulley 542 and the second pulley 543 are arranged such that a certain distance is formed between the upper blocking part 551 and the lower blocking part 552, so that necessary mechanical parts can be placed between the upper blocking part 551 and the lower blocking part 552.

[0142] Furthermore, fixing strips 5311 are respectively provided on both sides of the transport platform 531, and positioning grooves 5332 are provided on the fixing strips 5311. The connecting rods on the photovoltaic hanging basket 9 can be put into the positioning grooves 5332 to fix the fixing strips 5311. The number of positioning grooves 5332 is affected by the crossbars on the photovoltaic hanging basket 9.

[0143] Furthermore, the top of the hanging basket fixing seat 6 is wavy to reduce the contact area with the bottom of the photovoltaic hanging basket 9.

[0144] Furthermore, such as Figure 10 As shown, the hanging basket fixing seat 6 on the drying station 22 has a through hole 61 to form a channel for gas circulation, so that the airflow can flow from the outside of the hanging basket fixing seat 6 to the inside and enter and flow out from the air outlet 32, preventing water accumulation at the hanging basket fixing seat 6.

[0145] Furthermore, the drying station 22 has an upper outer cover 40, and lifting doors 41 are provided at both ends of the upper outer cover 40 along the transport direction of the transport device 5. When the photovoltaic basket 9 is transported by the transport device 5 and passes through the upper outer cover 40, the lifting doors 41 are opened. During the drying process, the lifting doors 41 are closed to prevent the drying air from being lost.

[0146] Furthermore, the lifting door 41 is also provided with a through hole 42 for the transport platform 531 to pass through. A curtain is provided at the through hole 42. The curtain is flexible. When the transport platform 531 is not transporting the photovoltaic basket 9, it can pass directly through the through hole 42 without opening the lifting door 41, thereby improving the transmission efficiency.

[0147] Specifically, the blowing device 4 includes an upper outer cover 40 disposed above the workbench 30, a lower outer cover 43 disposed below the workbench 30, and a circulating fan. The drying air generated by the circulating fan enters the workbench 30 through the upper outer cover 40, then passes through the air outlet 32 ​​on the workbench into the lower outer cover 43 and flows back to the circulating fan to form circulating air (a heating device can also be provided to heat the circulating air and maintain it at a certain temperature). The blowing device 4 includes a fan, a heating device, etc., and uses this circulating hot air to dry the photovoltaic basket 9 and the photovoltaic silicon wafers it loads. Since this is existing technology, it will not be described in detail here.

[0148] It is worth noting that, Figure 10 The unit has two drying stations 22, each divided into left and right sections. Each section can hold two photovoltaic baskets 9, one in front of the other. Therefore, there are two transport devices 5, each capable of transporting two photovoltaic baskets 9. The photovoltaic silicon wafers inside the baskets 9 are in a vertical position. Each drying station 22 is topped with an outer cover. Each drying station 22's workbench 30 has four air vents 32. The two middle air vents 32 are considered to be the same due to their proximity. Therefore, three air ducts within the bottom frame connect the four air vents 32. The airflow above the outer cover 40 passes through the photovoltaic baskets 9 on the workbench 30, flows through the air vents 32, and then converges through the bottom air ducts.

[0149] In this embodiment, the lifting drive 532 is a cylinder and the drive 53 is a motor, but other types of drive components can also be used.

[0150] like Figure 11As shown, it is worth noting that the photovoltaic basket 9 (with limit rods on three sides) has a first hook groove 91, a second hook groove 92, and a third hook groove 93 on its side plate. When the photovoltaic basket 9 is vertical, the robot arm hooks the first hook groove 91 and the second hook groove 92 to place the photovoltaic basket 9 onto the flipping mechanism 2. After the flipping mechanism 2 flips the photovoltaic basket 9 at a certain angle (the specific value of the angle can generally be 90°), the robot arm then hooks the photovoltaic basket 9 up through the second hook groove 92 and the third hook groove 93 to transport it away.

[0151] Based on the above-described preferred embodiments according to this application, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this application. The technical scope of this application is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A method for drying photovoltaic silicon wafers, characterized in that, Includes the following steps: S1: Flip the photovoltaic basket so that the two rows of photovoltaic silicon wafers arranged in the height direction become arranged in the horizontal direction; S2: Place the photovoltaic basket carrying two rows of photovoltaic silicon wafers into the loading station; S3: The photovoltaic basket is transported from the loading station to the drying station by the transport device; S4: The photovoltaic basket and photovoltaic silicon wafer are dried by blowing air at the drying station; S5: After drying, the photovoltaic basket is transported from the drying station to the unloading station by the transport device; The loading station, drying station, and unloading station in steps S2-S5 are set up sequentially along the workbench, and the photovoltaic basket is placed on the loading station, drying station, or unloading station. The loading station, drying station, and unloading station are arranged along the workbench. The workbench is equipped with a transport trough, a transport device, a slide rail located below the workbench, and a drive unit for driving the transport device to move on the slide rail. The transport device passes through the transport trough and is equipped with a transport platform at the top for carrying the photovoltaic basket. The transport platform is located above the workbench. The transport device can also drive the transport platform to lift and lower to place the photovoltaic basket on the transport platform onto the basket fixing seat or remove the photovoltaic basket from the basket fixing seat. The transport device also includes a blocking mechanism for sealing the transport trough. The blocking mechanism includes: a pulley assembly located inside the bottom frame of the loading station and the drying station; a shielding belt that can move on the pulley assembly; the shielding belt has an upper shielding part and a lower shielding part located above and below the pulley assembly, respectively; the upper shielding part can move together with the transport device and is always located below the transport trough. The transport device includes a slide table mounted on a slide rail, a lifting drive unit mounted on the slide table, a horizontal mounting plate mounted on the lifting drive unit, a vertical mounting plate mounted on the horizontal mounting plate and passing through a transport groove, a transport platform mounted on the vertical mounting plate and located above the worktable, a sliding member that can slide freely and is located below the worktable is provided on the vertical mounting plate, and the upper shielding part is connected to both ends of the sliding member.

2. The photovoltaic silicon wafer drying method according to claim 1, characterized in that, In step S1, after the photovoltaic silicon wafer is flipped over, air is blown onto the photovoltaic basket for pre-drying.

3. The photovoltaic silicon wafer drying method according to claim 2, characterized in that, In step S1, after the photovoltaic silicon wafer is flipped over, the photovoltaic silicon wafer inside the photovoltaic basket is lifted by the lifting component, so that the bottom of the photovoltaic silicon wafer is separated from the photovoltaic basket.

4. The photovoltaic silicon wafer drying method according to claim 1, characterized in that, In step S4, the circulating fan generates drying air, which enters the workbench through the upper outer cover to dry the photovoltaic basket placed on the workbench. The drying air then passes through the air vents on the workbench into the lower outer cover and flows back to the circulating fan to form circulating air.

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