Alignment method and system and coating equipment

Abstract

The invention discloses an alignment method and system and coating equipment. The alignment method comprises the steps that a first substrate is placed on a first carrier, and a second substrate is placed on a second carrier; a first positioning assembly and a second positioning assembly are arranged on the two sides of the bearing table in the X-axis direction, a third positioning assembly and a fourth positioning assembly are arranged on the two sides of the bearing table in the Y-axis direction, and a third positioning block and a fourth positioning block both face the reserved gap; obtaining an initial station of a positioning column of each positioning assembly, and determining a target station of each positioning column according to the initial station; and the third positioning column is moved to a third target station, the third positioning block is inserted into the reserved gap, the fourth positioning column is moved to a fourth target station, the fourth positioning block is inserted into the reserved gap, the first positioning assembly is moved to the first target station, and the second positioning assembly is moved to the second target station. According to the invention, the relative positions of each substrate and the corresponding carrier can be the same.

Description

Technical Field

[0001] The present invention relates to the technical field of film coating equipment alignment, and in particular to an alignment method, system and coating equipment. Background Art

[0002] In the field of slot coating technology, precise positioning between the coating substrate and the suction cup carrier is a key factor in ensuring coating quality and production efficiency. However, due to the special design of the slot coating equipment, it is difficult to directly form a stable positioning structure between the coating substrate and the suction cup carrier itself. This technical difficulty limits the stability and accuracy of the coating process, especially in high-speed and high-precision coating operations.

[0003] In order to overcome this problem, the industry usually adopts the method of setting movable positioning blocks on the suction cup carrier to assist positioning. Although this approach improves the accuracy of positioning to a certain extent, it also brings new problems. The addition of movable positioning blocks not only makes the structure of the suction cup carrier more complicated, but also significantly increases its weight, which undoubtedly increases the difficulty of operation and energy consumption for coating equipment that needs to be frequently moved and adjusted. In addition, the movable positioning blocks may also introduce additional error sources, affecting the relative position accuracy between the coated substrate and the suction cup carrier.

[0004] Therefore, it is necessary to achieve accurate alignment between the coated substrate and the suction cup carrier without increasing the complexity and weight of the suction cup carrier. That is, it is possible to perform secondary positioning outside the suction cup carrier to ensure that the positional relationship between the substrate and the suction cup carrier is relatively fixed, thereby improving the stability and accuracy of the coating operation. Summary of the invention

[0005] The object of the present invention is to provide a positioning method, system and coating equipment, which can make the relative position of each substrate and the corresponding carrier the same.

[0006] The purpose of the present invention is achieved by the following technical solutions:

[0007] In a first aspect, the present invention introduces a positioning method, wherein the positioning device includes a carrier platform, the carrier platform includes a first carrier and a second carrier arranged in parallel along an X-axis direction, and a reserved gap is provided between the two carriers;

[0008] The alignment method comprises the following steps:

[0009] placing a first substrate on a first carrier and placing a second substrate on a second carrier;

[0010] The first positioning assembly and the second positioning assembly are arranged on both sides of the carrier platform in the X-axis direction, and the third positioning assembly and the fourth positioning assembly are arranged on both sides of the carrier platform in the Y-axis direction, and the third positioning block and the fourth positioning block are both oriented toward the reserved gap;

[0011] Acquire the initial position of the positioning column of each positioning assembly, and determine the target position of each positioning column according to the initial position;

[0012] Move the third positioning column to the third target station and insert the third positioning block into the reserved gap, move the fourth positioning column to the fourth target station and insert the fourth positioning block into the reserved gap, move the first positioning assembly to the first target station, and move the second positioning assembly to the second target station, so that the relative position of each substrate and the corresponding carrier is the same.

[0013] Furthermore, the thickness of the third positioning block and the fourth positioning block are both less than or equal to the spacing of the reserved gap;

[0014] The heights of the third positioning block and the fourth positioning block are both greater than the sum of the thicknesses of the carrier and the substrate.

[0015] Furthermore, the step of obtaining the initial position of the positioning column of each positioning assembly includes:

[0016] Get the current coordinates of the positioning columns of each positioning component;

[0017] Adjusting the initial position of each positioning column according to the current coordinates of the positioning column of each positioning assembly;

[0018] The positions of the first carrier and the second carrier are adjusted according to the initial positions of the positioning columns so that the midpoints of the two carriers coincide with the midpoints of the four positioning components.

[0019] Further, each positioning assembly includes a plurality of positioning posts arranged at equal intervals;

[0020] The step of adjusting the initial position of each positioning column according to the current coordinates of the positioning columns of each positioning assembly comprises:

[0021] Determine the average value of the first coordinate according to the three-dimensional coordinates of the first positioning column of the first positioning assembly, determine the average value of the second coordinate according to the three-dimensional coordinates of the second positioning column of the second positioning assembly, determine the average value of the third coordinate according to the three-dimensional coordinates of the third positioning column of the third positioning assembly, and determine the average value of the fourth coordinate according to the three-dimensional coordinates of the fourth positioning column of the fourth positioning assembly;

[0022] According to the average value of the four sets of coordinates, the coordinates of each positioning component are adjusted in the XYZ axis direction so that the four sets of positioning components satisfy the following formula to obtain the initial position of each positioning column:

[0023] Z11=Z12=Z13=Z14;

[0024] X13=X14, and X12-X11=X0;

[0025] Y11=Y12, and Y13-Y14=Y0;

[0026] Y11+1 / 2·A<Y13, and Y11-1 / 2·A>Y14;

[0027] X13+1 / 2·B<Y12, and X13-1 / 2·B>Y11;

[0028] In the formula, X0 is the X-axis threshold, Y0 is the Y-axis threshold, X11, Y11 and Z11 are the average values ​​of the XYZ axes in the first coordinate average value, X12, Y12 and Z12 are the average values ​​of the XYZ axes in the second coordinate average value, X13, Y13 and Z13 are the average values ​​of the XYZ axes in the third coordinate average value, X14, Y14 and Z14 are the average values ​​of the XYZ axes in the fourth coordinate average value, A is the total length of the first positioning component, and the first positioning component and the second positioning component are the same size, B is the total length of the third positioning component, and the third positioning component and the fourth positioning component are the same size.

[0029] Further, each positioning assembly includes a plurality of positioning posts arranged at equal intervals;

[0030] The adjusting the positions of the first carrier and the second carrier according to the initial positions of the positioning columns comprises:

[0031] Obtaining the initial position of each positioning column, determining the average value of the first position according to the first initial position of the first positioning column, determining the average value of the second position according to the second initial position of the second positioning column, determining the average value of the third position according to the third initial position of the third positioning column, and determining the average value of the fourth position according to the fourth initial position of the fourth positioning column;

[0032] Acquire the current coordinates of the two vehicles, determine the first center coordinates of the first vehicle according to the current coordinates of the first vehicle, and determine the second center coordinates of the second vehicle according to the current coordinates of the second vehicle;

[0033] According to the current coordinates of the two carriers and the average values ​​of the four workstations, the coordinates of the first carrier and the second carrier are adjusted in the XYZ axis direction so that the first carrier and the second carrier satisfy the following formula to obtain the first alignment coordinate of the first carrier and the second alignment coordinate of the second carrier:

[0034] Z21=Z22=Z111=Z112=Z113=Z114, and Y21=Y22=Y111=Y112, and 1 / 2·(X21+X22)=X113=X114;

[0035] F=(X22+1 / 2·C2)-(X21+1 / 2·C1), and F>E;

[0036] 2·C+E<X0, and 2·D<Y0;

[0037] Wherein, X0 is the X-axis threshold, Y0 is the Y-axis threshold, X21, Y21 and Z21 are the values ​​of the XYZ axis in the first center coordinate, X22, Y22 and Z22 are the values ​​of the XYZ axis in the second center coordinate, Y111 and Z111 are the values ​​of the YZ axis in the first station average value, Y112 and Z112 are the values ​​of the YZ axis in the second station average value, X113 and Z113 are the values ​​of the XZ axis in the third station average value, X114 and Z114 are the values ​​of the XZ axis in the fourth station average value, E is the thickness of the fourth positioning block, and the thickness of the fourth positioning block = the thickness of the third positioning block, F is the spacing of the reserved gap, C is the length of the first carrier or the second carrier in the X-axis direction, D is the length of the first carrier or the second carrier in the Y-axis direction, and the first carrier and the second carrier have the same size.

[0038] Further, determining the target position of each positioning column according to the initial position includes:

[0039] Determine a third target position of the third positioning column and a fourth target position of the fourth positioning column according to the third initial position and the fourth initial position;

[0040] According to the size of the positioning block, the first initial position and the second initial position, a first target position of the first positioning column and a second target position of the second positioning column are determined.

[0041] Further, the third initial position and the fourth initial position, determining the third target position of the third positioning column and the fourth target position of the fourth positioning column comprises:

[0042] The third initial station is moved L1 along the Y-axis direction toward the substrate to obtain a third target station, and the fourth initial station is moved L1 along the Y-axis direction toward the substrate to obtain a fourth target station;

[0043] Where, L1 = 1 / 2 (Y0-G);

[0044] Wherein, L1 is the distance of Y-axis displacement, Y0 is the Y-axis threshold, G is the length of the first substrate or the second substrate in the Y-axis direction, and the first substrate and the second substrate have the same size.

[0045] Further, determining the first target position of the first positioning column and the second target position of the second positioning column according to the size of the positioning block, the first initial position and the second initial position includes:

[0046] The first initial station is moved L2 toward the substrate along the X-axis direction to obtain a first target station, and the second initial station is moved L2 toward the substrate along the X-axis direction to obtain a second target station;

[0047] Wherein, L2 = 1 / 2·{X0-F-1 / 2·(CH)};

[0048] Wherein, L2 is the distance of X-axis displacement, X0 is the X-axis threshold, F is the spacing of the reserved gap, C is the length of the first carrier or the second carrier in the X-axis direction, and the first carrier and the second carrier have the same size, and H is the length of the first substrate or the second substrate in the X-axis direction, and the first substrate and the second substrate have the same size.

[0049] On the other hand, the present invention provides an alignment system, which is applied to an alignment device, wherein the alignment device includes a carrier, the carrier includes a first carrier and a second carrier arranged in parallel along an X-axis direction, and a reserved gap is provided between the two carriers;

[0050] The alignment system comprises:

[0051] A carrying module, used for placing the first substrate on the first carrier and placing the second substrate on the second carrier;

[0052] A component setting module, used to set the first positioning component and the second positioning component on both sides of the carrier platform in the X-axis direction, and set the third positioning component and the fourth positioning component on both sides of the carrier platform in the Y-axis direction, and make the third positioning block and the fourth positioning block face the reserved gap;

[0053] A target position determination module, used to obtain the initial position of the positioning column of each positioning component, and determine the target position of each positioning column according to the initial position;

[0054] The alignment module is used to move the third positioning column to the third target station and insert the third positioning block into the reserved gap, move the fourth positioning column to the fourth target station and insert the fourth positioning block into the reserved gap, move the first positioning component to the first target station, and move the second positioning component to the second target station, so that the relative position of each substrate and the corresponding carrier is the same.

[0055] In a third aspect, the present invention provides a coating device for an alignment system, wherein the alignment system is the alignment system described above;

[0056] The coating device includes a processor, a memory, and a coating control program stored in the memory, and the processor executes the coating control program to implement the steps of the above-mentioned alignment method.

[0057] Compared with the prior art, the beneficial effects of the present invention include at least:

[0058] The alignment method of the present invention can realize simultaneous alignment of two substrates by precisely controlling the positions of the positioning components and the carrier, thereby improving production efficiency. Furthermore, by setting four groups of positioning components (two groups in the X-axis direction and two groups in the Y-axis direction) and using positioning blocks for auxiliary positioning at the reserved gaps, the consistency of the relative positions of the two substrates and their respective carriers can be ensured, thereby improving the accuracy of alignment. Furthermore, by precise measurement and calculation, the initial position and target position of each positioning column are determined, thereby improving the accuracy of substrate alignment. BRIEF DESCRIPTION OF THE DRAWINGS

[0059] Figure 1 It is a flow chart of the alignment method according to an embodiment of the present invention.

[0060] Figure 2 It is a structural schematic diagram of an alignment device according to an embodiment of the present invention.

[0061] In the figure: 21, first carrier; 22, second carrier; 23 reserved gap; 11, first positioning assembly; 12, second positioning assembly; 13, third positioning assembly; 14, fourth positioning assembly; 101, electric push rod; 102, positioning mounting plate; 103, positioning column; 104, positioning block. DETAILED DESCRIPTION

[0062] Example embodiments will now be described more fully with reference to the accompanying drawings. However, example embodiments can be implemented in a variety of forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided to make the present invention more comprehensive and complete and to fully convey the concepts of example embodiments to those skilled in the art. The same reference numerals in the figures represent the same or similar structures, and thus their repeated description will be omitted.

[0063] The words expressing positions and directions described in the present invention are all explained with reference to the accompanying drawings as examples, but they can be changed as needed, and all such changes are included in the protection scope of the present invention.

[0064] The alignment method of the present invention is applied to an alignment device. Figure 2 The alignment device includes four positioning components and a carrier platform. The carrier platform includes a first carrier 21 and a second carrier 22 arranged in parallel along the X-axis direction, and a reserved gap 23 is provided between the two carriers.

[0065] refer to Figure 1 The alignment method of the present invention includes steps S1 to S4.

[0066] Step S1 : placing a first substrate on a first carrier 21 , and placing a second substrate on a second carrier 22 .

[0067] Placing the first substrate on the first carrier 21 and the second substrate on the second carrier 22 realizes the simultaneous carrying and processing of the two substrates, that is, the two substrates can be aligned and subsequently operated, such as coating and cutting, at the same time within one working cycle, thereby improving production efficiency. When applied, the first substrate and the second substrate both include a first side and a second side relative to each other, a third side and a fourth side relative to each other, the first side and the second side are two sides in the X-axis direction of the carrier, and the third side and the fourth side are two sides in the Y-axis direction of the carrier. The first carrier 21 and the second carrier 22 both include a first side and a second side relative to each other, a third side and a fourth side relative to each other, the first side and the second side are two sides in the X-axis direction of the carrier, and the third side and the fourth side are two sides in the Y-axis direction of the carrier. In addition, the first carrier 21 and the second carrier 22 both include: a hollow carrier. The upper surface of the hollow carrier is used to carry the substrate, and at least one adsorption hole is provided on the upper surface of the hollow carrier, and a vacuum hole for connecting an external vacuum pumping device is provided on the side of the hollow carrier. In application, before alignment, the first carrier 21 and the second carrier 22 are not vacuumed, and at this time, the substrates on the first carrier 21 and the second carrier 22 can be moved. After alignment, the first carrier 21 and the second carrier 22 are vacuumed, and at this time, the aligned first substrate and the second substrate cannot be moved, and the relative position of the first substrate and the first carrier 21, and the relative position of the second substrate and the second carrier 22 are fixed.

[0068] Step S2: Arrange the first positioning assembly 11 and the second positioning assembly 12 on both sides of the support platform in the X-axis direction, arrange the third positioning assembly 13 and the fourth positioning assembly 14 on both sides of the support platform in the Y-axis direction, and make the third positioning block and the fourth positioning block face the reserved gap 23.

[0069] In some preferred embodiments, the first positioning assembly 11 is arranged on one side of the first side of the first carrier 21; the second positioning assembly 12 is arranged on one side of the second side of the second carrier 22; the third positioning assembly 13 is arranged on one side of the third side of the two carriers; and the fourth positioning assembly 14 is arranged on one side of the fourth side of the two carriers. Further, the first positioning assembly 11, the second positioning assembly 12, the third positioning assembly 13 and the fourth positioning assembly 14 all include: a plurality of equally spaced positioning columns 103, a positioning mounting plate 102 and an electric push rod 101. The electric push rod 101 drives and connects the positioning mounting plate 102 so that the positioning columns 103 on the positioning mounting plate 102 abut against or away from the substrate. Further, the third positioning mounting plate and the fourth positioning mounting plate are both provided with positioning blocks 104. Specifically, the third positioning mounting plate is provided with a third positioning block, and the third positioning block is arranged between two adjacent third positioning columns, and the plurality of third positioning columns are equally divided into a first group of third positioning columns and a second group of third positioning columns. The first group of third positioning posts are all oriented toward the third side of the first substrate, and the second group of third positioning posts are all oriented toward the third side of the second substrate. A fourth positioning block is provided on the fourth positioning mounting plate, and the fourth positioning block is arranged between two adjacent fourth positioning posts, and the plurality of fourth positioning posts are equally divided into a first group of fourth positioning posts and a second group of fourth positioning posts. The first group of fourth positioning posts are all oriented toward the fourth side of the first substrate, and the second group of fourth positioning posts are all oriented toward the fourth side of the second substrate.

[0070] In some preferred embodiments, the thickness of the third positioning block and the fourth positioning block is less than or equal to the spacing of the reserved gap 23, and the height of the third positioning block and the fourth positioning block is greater than the sum of the thickness of the carrier and the substrate. Further, both sides of the third positioning block and the fourth positioning block are provided with limiting beams, and the limiting beams are connected to the upper surface of the corresponding carrier. Specifically, two symmetrical third limiting beams are provided on both sides of the third positioning plate, and two symmetrical fourth limiting beams are provided on both sides of the fourth positioning plate. The size of each limiting beam is the same, and the length of each limiting beam along the X-axis direction is less than or equal to 1 / 2 · {F + (CH)}, wherein F is the spacing of the reserved gap 23, C is the length of the first carrier 21 or the second carrier 22 in the X-axis direction, and the size of the first carrier 21 and the second carrier 22 is the same, and H is the length of the first substrate or the second substrate in the X-axis direction, and the size of the first substrate and the second substrate is the same. When applied, when the third positioning block is inserted into the reserved gap 23, two symmetrical third limiting beams are respectively connected to the upper surfaces of the first carrier 21 and the second carrier 22; when the fourth positioning block is inserted into the reserved gap 23, two symmetrical fourth limiting beams are respectively connected to the upper surfaces of the first carrier 21 and the second carrier 22. When the first positioning component 11 pushes the first substrate on the first carrier 21 to move, the distance between the fourth edge of the first substrate and the fourth side of the first carrier 21 can be greater than or equal to the first threshold value (the first threshold value is less than or equal to 1 / 2·(CH)); when the second positioning component 12 pushes the second substrate on the second carrier 22 to move, the distance between the third edge of the second substrate and the third side of the first carrier 21 can be greater than or equal to the first threshold value. After each alignment, not only can the relative positions of the first substrate and the first carrier 21, and the relative positions of the second substrate and the second carrier 22 be the same, but also the first substrate and the first carrier 21, and the second substrate and the second carrier 22 can be coaxial.

[0071] Step S3: acquiring the initial position of the positioning column 103 of each positioning assembly, and determining the target position of each positioning column 103 according to the initial position.

[0072] When applied, step S3 includes: step S31-step S33. Further, step S3 also includes: step S34-step S35.

[0073] Step S31: obtaining the current coordinates of the positioning columns 103 of each positioning assembly.

[0074] When applied, the current coordinates of the positioning column 103 are the three-dimensional coordinates of the midpoint of the positioning column 103 .

[0075] Step S32: adjusting the initial position of each positioning column 103 according to the current coordinates of the positioning column 103 of each positioning assembly.

[0076] When applied, step S32 includes: step S321-step S322.

[0077] Step S321: Determine the average value of the first coordinate according to the three-dimensional coordinates of the first positioning column of the first positioning component 11, determine the average value of the second coordinate according to the three-dimensional coordinates of the second positioning column of the second positioning component 12, determine the average value of the third coordinate according to the three-dimensional coordinates of the third positioning column of the third positioning component 13, and determine the average value of the fourth coordinate according to the three-dimensional coordinates of the fourth positioning column of the fourth positioning component 14.

[0078] When applied, the three-dimensional coordinates of four groups of positioning columns are used to determine the average value of the four groups of coordinates according to the average sum method.

[0079] Step S322: According to the average value of the four sets of coordinates, the coordinates of each positioning component are adjusted in the XYZ axis direction so that the four sets of positioning components satisfy the following formula to obtain the initial position of each positioning column 103:

[0080] Z11=Z12=Z13=Z14;

[0081] X13=X14, and X12-X11=X0;

[0082] Y11=Y12, and Y13-Y14=Y0;

[0083] Y11+1 / 2·A<Y13, and Y11-1 / 2·A>Y14;

[0084] X13+1 / 2·B<Y12, and X13-1 / 2·B>Y11;

[0085] In the formula, X0 is the X-axis threshold, Y0 is the Y-axis threshold, X11, Y11 and Z11 are the average values ​​of the XYZ axes in the first coordinate average value, X12, Y12 and Z12 are the average values ​​of the XYZ axes in the second coordinate average value, X13, Y13 and Z13 are the average values ​​of the XYZ axes in the third coordinate average value, X14, Y14 and Z14 are the average values ​​of the XYZ axes in the fourth coordinate average value, A is the total length of the first positioning component 11, and the first positioning component 11 and the second positioning component 12 have the same size, and B is the total length of the third positioning component 13, and the third positioning component 13 and the fourth positioning component 14 have the same size.

[0086] When applied, the values ​​of the XYZ-axis directions of the coordinate average values ​​of the group positioning components are adjusted so that the four groups of positioning components satisfy the above formula to obtain the coordinate average value after leveling, and the coordinates of each positioning column 103 after leveling are determined according to the design parameters of the positioning components and the coordinate average value after leveling. The coordinates of each positioning column 103 after leveling are the initial positions of the corresponding positioning columns 103, and the coordinate average value of each positioning component after leveling is the initial position of the corresponding positioning component.

[0087] Step S33 : adjusting the positions of the first carrier 21 and the second carrier 22 according to the initial positions of the positioning posts 103 , so that the midpoints of the two carriers coincide with the midpoints of the four positioning components.

[0088] When applied, the midpoints of the four groups of positioning components are determined by using the average value of the coordinates of the four groups of positioning components after leveling according to the method of finding the average sum.

[0089] Step S33 includes: step S331-step S333.

[0090] Step S331: Obtain the initial position of each positioning column 103, determine the average value of the first position according to the first initial position of the first positioning column, determine the average value of the second position according to the second initial position of the second positioning column, determine the average value of the third position according to the third initial position of the third positioning column, and determine the average value of the fourth position according to the fourth initial position of the fourth positioning column.

[0091] When applied, use the initial workstation and determine the workstation average value based on the average sum method.

[0092] Step S332 : acquiring the current coordinates of the two vehicles, determining the first center coordinates of the first vehicle 21 according to the current coordinates of the first vehicle 21 , and determining the second center coordinates of the second vehicle 22 according to the current coordinates of the second vehicle 22 .

[0093] When applied, the coordinates of the four vertices on the upper surface of the vehicle and the coordinates of the four vertices on the lower surface of the vehicle are obtained, and then the center coordinates of the vehicle are determined according to the average sum method.

[0094] Step S333: According to the current coordinates of the two carriers and the average values ​​of the four groups of workstations, the coordinates of the first carrier 21 and the second carrier 22 are adjusted in the XYZ axis direction so that the first carrier 21 and the second carrier 22 satisfy the following formula to obtain the first alignment coordinates of the first carrier 21 and the second alignment coordinates of the second carrier 22:

[0095] Z21=Z22=Z111=Z112=Z113=Z114, and Y21=Y22=Y111=Y112, and 1 / 2·(X21+X22)=X113=X114;

[0096] F=(X22+1 / 2·C2)-(X21+1 / 2·C1), and F>E;

[0097] 2·C+E<X0, and 2·D<Y0;

[0098] In the formula, X0 is the X-axis threshold, Y0 is the Y-axis threshold, X21, Y21 and Z21 are the values ​​of the XYZ axis in the first center coordinate, X22, Y22 and Z22 are the values ​​of the XYZ axis in the second center coordinate, Y111 and Z111 are the values ​​of the YZ axis in the first station average value, Y112 and Z112 are the values ​​of the YZ axis in the second station average value, X113 and Z113 are the values ​​of the XZ axis in the third station average value, X114 and Z114 are the values ​​of the XZ axis in the fourth station average value, E is the thickness of the fourth positioning block, and the thickness of the fourth positioning block = the thickness of the third positioning block, F is the spacing of the reserved gap 23, C is the length of the first carrier 21 or the second carrier 22 in the X-axis direction, D is the length of the first carrier 21 or the second carrier 22 in the Y-axis direction, and the first carrier 21 and the second carrier 22 have the same size.

[0099] When applied, the coordinates of each carrier are adjusted in the XYZ axis direction according to the current coordinates of the two carriers and the average values ​​of the four workstations, so that the two carriers satisfy the above formula to obtain the coordinates of the two carriers after leveling. The center coordinates of each carrier after leveling are determined by the average sum method. The coordinates of the carrier after leveling and the center coordinates are the alignment coordinates of the corresponding carrier.

[0100] Step S34: determining a third target position of the third positioning column and a fourth target position of the fourth positioning column according to the third initial position and the fourth initial position.

[0101] When used, the third initial station is moved L1 toward the substrate along the Y-axis direction to obtain the third target station, and the fourth initial station is moved L1 toward the substrate along the Y-axis direction to obtain the fourth target station.

[0102] Where, L1 = 1 / 2 (Y0-G);

[0103] Wherein, L1 is the distance of Y-axis displacement, Y0 is the Y-axis threshold, G is the length of the first substrate or the second substrate in the Y-axis direction, and the first substrate and the second substrate have the same size.

[0104] Step S35: Determine the first target position of the first positioning column and the second target position of the second positioning column according to the size of the positioning block 104 , the first initial position and the second initial position.

[0105] When used, the first initial station is moved L2 toward the substrate along the X-axis direction to obtain the first target station, and the second initial station is moved L2 toward the substrate along the X-axis direction to obtain the second target station.

[0106] Among them, L2 = 1 / 2·{X0-F-1 / 2·(CH)}.

[0107] In the formula, L2 is the distance of X-axis displacement, X0 is the X-axis threshold, F is the spacing of the reserved gap 23, C is the length of the first carrier 21 or the second carrier 22 in the X-axis direction, and the first carrier 21 and the second carrier 22 have the same size, and H is the length of the first substrate or the second substrate in the X-axis direction, and the first substrate and the second substrate have the same size.

[0108] Step S4: Move the third positioning column to the third target station and insert the third positioning block into the reserved gap 23, move the fourth positioning column to the fourth target station and insert the fourth positioning block into the reserved gap 23, move the first positioning component 11 to the first target station, and move the second positioning component 12 to the second target station, so that the relative position of each substrate and the corresponding carrier is the same.

[0109] When applied, when the third positioning block is inserted into the reserved gap 23, two symmetrical third limiting beams are respectively connected to the upper surfaces of the first carrier 21 and the second carrier 22; when the fourth positioning block is inserted into the reserved gap 23, two symmetrical fourth limiting beams are respectively connected to the upper surfaces of the first carrier 21 and the second carrier 22. When the first positioning component 11 pushes the first substrate on the first carrier 21 to move, the distance between the fourth edge of the first substrate and the fourth side of the first carrier 21 can be greater than or equal to the first threshold value (the first threshold value is less than or equal to 1 / 2·(CH)); when the second positioning component 12 pushes the second substrate on the second carrier 22 to move, the distance between the third edge of the second substrate and the third side of the first carrier 21 can be greater than or equal to the first threshold value. After each alignment, not only can the relative positions of the first substrate and the first carrier 21, and the relative positions of the second substrate and the second carrier 22 be the same, but also the first substrate and the first carrier 21, and the second substrate and the second carrier 22 can be coaxial.

[0110] The invention also introduces a positioning system.

[0111] The alignment system of the present invention is applied to an alignment device. The alignment device comprises a carrier platform, and the carrier platform comprises a first carrier 21 and a second carrier 22 arranged in parallel along the X-axis direction, and a reserved gap 23 is provided between the two carriers.

[0112] The alignment system includes: a carrying module, a component setting module, a target station determination module and an alignment module.

[0113] The carrying module is used to place the first substrate on the first carrier 21, and the second substrate on the second carrier 22. The component setting module is used to set the first positioning component 11 and the second positioning component 12 on both sides of the carrier in the X-axis direction, and set the third positioning component 13 and the fourth positioning component 14 on both sides of the carrier in the Y-axis direction, and make the third positioning block and the fourth positioning block face the reserved gap 23. The target position determination module is used to obtain the initial position of the positioning column 103 of each positioning component, and determine the target position of each positioning column 103 according to the initial position. The alignment module is used to move the third positioning column to the third target position, and insert the third positioning block into the reserved gap 23, move the fourth positioning column to the fourth target position, and insert the fourth positioning block into the reserved gap 23, move the first positioning component 11 to the first target position, and move the second positioning component 12 to the second target position, so that the relative position of each substrate and the corresponding carrier is the same.

[0114] The implementation of the specific functions of the above functional modules refers to the specific steps of the above alignment method.

[0115] In addition, the present invention also introduces a coating device used for the above alignment system.

[0116] The coating device of the present invention comprises a processor, a memory and a coating control program stored in the memory, and the processor executes the coating control program to implement the steps of the above-mentioned alignment method.

[0117] In summary, the alignment method of the present invention can achieve simultaneous alignment of two substrates by accurately controlling the positions of the positioning components and the carrier, thereby improving production efficiency. Further, by setting four groups of positioning components (two groups in the X-axis direction and two groups in the Y-axis direction) and using positioning blocks for auxiliary positioning at the reserved gap 23, the consistency of the relative positions of the two substrates and their respective carriers can be ensured, thereby improving the accuracy of alignment. Furthermore, by accurately measuring and calculating, the initial position and target position of each positioning column are determined, thereby improving the accuracy of substrate alignment.

[0118] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations on the present invention. A person skilled in the art may change, modify, substitute and modify the above embodiments within the scope of the invention without departing from the principles and purpose of the present invention. All such changes should fall within the scope of protection of the claims of the present invention.

Claims

1. A positioning method, characterized in that: The alignment device includes a carrier platform, and the carrier platform includes a first carrier and a second carrier arranged in parallel along the X-axis direction, and a reserved gap is provided between the two carriers; The alignment method comprises the following steps: placing a first substrate on a first carrier and placing a second substrate on a second carrier; The first positioning assembly and the second positioning assembly are arranged on both sides of the carrier platform in the X-axis direction, and the third positioning assembly and the fourth positioning assembly are arranged on both sides of the carrier platform in the Y-axis direction, and the third positioning block and the fourth positioning block are both oriented toward the reserved gap; Acquire the initial position of the positioning column of each positioning assembly, and determine the target position of each positioning column according to the initial position; Move the third positioning column to the third target station and insert the third positioning block into the reserved gap, move the fourth positioning column to the fourth target station and insert the fourth positioning block into the reserved gap, move the first positioning assembly to the first target station, and move the second positioning assembly to the second target station, so that the relative position of each substrate and the corresponding carrier is the same.

2. The alignment method according to claim 1, characterized in that: The thickness of the third positioning block and the fourth positioning block are both less than or equal to the spacing of the reserved gap; The heights of the third positioning block and the fourth positioning block are both greater than the sum of the thicknesses of the carrier and the substrate.

3. The alignment method according to claim 1, characterized in that: The step of obtaining the initial position of the positioning column of each positioning component comprises: Get the current coordinates of the positioning columns of each positioning component; Adjusting the initial position of each positioning column according to the current coordinates of the positioning column of each positioning assembly; The positions of the first carrier and the second carrier are adjusted according to the initial positions of the positioning columns so that the midpoints of the two carriers coincide with the midpoints of the four positioning components.

4. The alignment method according to claim 3, characterized in that: Each positioning assembly includes a plurality of positioning posts arranged at equal intervals; The step of adjusting the initial position of each positioning column according to the current coordinates of the positioning columns of each positioning assembly comprises: Determine the average value of the first coordinate according to the three-dimensional coordinates of the first positioning column of the first positioning assembly, determine the average value of the second coordinate according to the three-dimensional coordinates of the second positioning column of the second positioning assembly, determine the average value of the third coordinate according to the three-dimensional coordinates of the third positioning column of the third positioning assembly, and determine the average value of the fourth coordinate according to the three-dimensional coordinates of the fourth positioning column of the fourth positioning assembly; According to the average value of the four sets of coordinates, the coordinates of each positioning component are adjusted in the XYZ axis direction so that the four sets of positioning components satisfy the following formula to obtain the initial position of each positioning column: Z11=Z12=Z13=Z14; X13=X14, and X12-X11=X0; Y11=Y12, and Y13-Y14=Y0; Y11+1 / 2·A<Y13, and Y11-1 / 2·A>Y14; X13+1 / 2·B<Y12, and X13-1 / 2·B>Y11; In the formula, X0 is the X-axis threshold, Y0 is the Y-axis threshold, X11, Y11 and Z11 are the average values ​​of the XYZ axes in the first coordinate average value, X12, Y12 and Z12 are the average values ​​of the XYZ axes in the second coordinate average value, X13, Y13 and Z13 are the average values ​​of the XYZ axes in the third coordinate average value, X14, Y14 and Z14 are the average values ​​of the XYZ axes in the fourth coordinate average value, A is the total length of the first positioning component, and the first positioning component and the second positioning component are the same size, B is the total length of the third positioning component, and the third positioning component and the fourth positioning component are the same size.

5. The alignment method according to claim 3, characterized in that: Each positioning assembly includes a plurality of positioning posts arranged at equal intervals; The adjusting the positions of the first carrier and the second carrier according to the initial positions of the positioning columns comprises: Obtaining the initial position of each positioning column, determining the average value of the first position according to the first initial position of the first positioning column, determining the average value of the second position according to the second initial position of the second positioning column, determining the average value of the third position according to the third initial position of the third positioning column, and determining the average value of the fourth position according to the fourth initial position of the fourth positioning column; Acquire the current coordinates of the two vehicles, determine the first center coordinates of the first vehicle according to the current coordinates of the first vehicle, and determine the second center coordinates of the second vehicle according to the current coordinates of the second vehicle; According to the current coordinates of the two carriers and the average values ​​of the four workstations, the coordinates of the first carrier and the second carrier are adjusted in the XYZ axis direction so that the first carrier and the second carrier satisfy the following formula to obtain the first alignment coordinate of the first carrier and the second alignment coordinate of the second carrier: Z21=Z22=Z111=Z112=Z113=Z114, and Y21=Y22=Y111=Y112, and 1 / 2·(X21+X22)=X113=X114; F=(X22+1 / 2·C2)-(X21+1 / 2·C1), and F>E; 2·C+E<X0, and 2·D<Y0; Wherein, X0 is the X-axis threshold, Y0 is the Y-axis threshold, X21, Y21 and Z21 are the values ​​of the XYZ axis in the first center coordinate, X22, Y22 and Z22 are the values ​​of the XYZ axis in the second center coordinate, Y111 and Z111 are the values ​​of the YZ axis in the first station average value, Y112 and Z112 are the values ​​of the YZ axis in the second station average value, X113 and Z113 are the values ​​of the XZ axis in the third station average value, X114 and Z114 are the values ​​of the XZ axis in the fourth station average value, E is the thickness of the fourth positioning block, and the thickness of the fourth positioning block = the thickness of the third positioning block, F is the spacing of the reserved gap, C is the length of the first carrier or the second carrier in the X-axis direction, D is the length of the first carrier or the second carrier in the Y-axis direction, and the first carrier and the second carrier have the same size.

6. The alignment method according to claim 3, characterized in that: Determining the target position of each positioning column according to the initial position includes: Determine a third target position of the third positioning column and a fourth target position of the fourth positioning column according to the third initial position and the fourth initial position; According to the size of the positioning block, the first initial position and the second initial position, a first target position of the first positioning column and a second target position of the second positioning column are determined.

7. The alignment method according to claim 6, characterized in that: The third initial position and the fourth initial position, determining the third target position of the third positioning column and the fourth target position of the fourth positioning column comprises: The third initial station is moved L1 along the Y-axis direction toward the substrate to obtain a third target station, and the fourth initial station is moved L1 along the Y-axis direction toward the substrate to obtain a fourth target station; Where, L1 = 1 / 2 (Y0-G); Wherein, L1 is the distance of Y-axis displacement, Y0 is the Y-axis threshold, G is the length of the first substrate or the second substrate in the Y-axis direction, and the first substrate and the second substrate have the same size.

8. The alignment method according to claim 6, characterized in that: Determining the first target position of the first positioning column and the second target position of the second positioning column according to the size of the positioning block, the first initial position and the second initial position includes: The first initial station is moved L2 toward the substrate along the X-axis direction to obtain a first target station, and the second initial station is moved L2 toward the substrate along the X-axis direction to obtain a second target station; Wherein, L2 = 1 / 2·{X0-F-1 / 2·(CH)}; Wherein, L2 is the distance of X-axis displacement, X0 is the X-axis threshold, F is the spacing of the reserved gap, C is the length of the first carrier or the second carrier in the X-axis direction, and the first carrier and the second carrier have the same size, and H is the length of the first substrate or the second substrate in the X-axis direction, and the first substrate and the second substrate have the same size.

9. A positioning system, characterized in that: Applied to an alignment device, the alignment device comprises a carrier platform, the carrier platform comprises a first carrier and a second carrier arranged in parallel along an X-axis direction, and a reserved gap is provided between the two carriers; The alignment system comprises: A carrying module, used for placing the first substrate on the first carrier and placing the second substrate on the second carrier; A component setting module, used to set the first positioning component and the second positioning component on both sides of the carrier platform in the X-axis direction, and set the third positioning component and the fourth positioning component on both sides of the carrier platform in the Y-axis direction, and make the third positioning block and the fourth positioning block face the reserved gap; A target position determination module, used to obtain the initial position of the positioning column of each positioning component, and determine the target position of each positioning column according to the initial position; The alignment module is used to move the third positioning column to the third target station and insert the third positioning block into the reserved gap, move the fourth positioning column to the fourth target station and insert the fourth positioning block into the reserved gap, move the first positioning component to the first target station, and move the second positioning component to the second target station, so that the relative position of each substrate and the corresponding carrier is the same.

10. A coating device for a positioning system, characterized in that: The alignment system is the alignment system according to claim 9; The coating device comprises a processor, a memory and a coating control program stored in the memory, and the processor executes the coating control program to implement the steps of the alignment method according to any one of claims 1 to 8.

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