Valve element assembly, gate valve and coating equipment

Abstract

The invention relates to the field of coating technical equipment, in particular to a valve element assembly, a gate valve and coating equipment. The valve element assembly comprises a valve plate set, a connecting assembly and a guiding piece. The valve plate group is in transmission connection with the connecting assembly and is movably matched with the guide piece; the guiding piece is used for guiding the valve plate set to move in the first direction or the second direction when the connecting assembly drives the valve plate set to move. Wherein the movement tracks of the valve plate group along the first direction and the second direction are continuous, and an angle is formed between the first direction and the second direction. According to the valve element assembly, the operation smoothness of the valve plate set can be improved, the operation sensitivity and action efficiency of the valve plate set can be improved, friction between the valve plate set and the valve body in the operation process can be reduced, operation abrasion of the valve plate set can be reduced, operation noise can be lowered, and the sealing performance of the valve plate set can be improved; therefore, when the valve core assembly forms the gate valve and is applied to the coating equipment, the indoor pressure in the coating equipment can be controlled, so that the coating quality is prevented from being influenced.

Description

Technical Field

[0001] The present invention relates to the field of coating technology equipment, and in particular to a valve core component, a plug valve and coating equipment. Background Art

[0002] The gate valve in the coating equipment is usually used to control the gas flow during the vacuum coating process, thereby controlling the gas pressure in the vacuum chamber. However, the existing gate valve has a complex structure, the flipping movement of the valve plate requires a large space for movement, and there are cases where the movement is slow or not smooth, which leads to its insensitive response. In addition, the opening and closing of the valve plate may take a long time, affecting the overall operating efficiency; and in the case of frequent operation, its complex movement will cause the valve plate or related parts to wear more, and then the sealing of the gate valve will decrease rapidly with the increase of use time, which makes it difficult to control the gas pressure in the chamber, thereby affecting the coating quality. Summary of the invention

[0003] The objects of the present invention include, for example, providing a valve core assembly, a gate valve and a coating device, which have a simple structure, are easy to operate, do not require a large space for movement, can improve the running smoothness of the valve plate assembly, and improve its operating sensitivity and efficiency, and can also reduce the friction between the valve plate assembly and the valve body during operation, thereby reducing its operating wear, reducing operating noise, and improving its sealing; therefore, when the valve core assembly constitutes a gate valve and is used in a coating device, it can be beneficial to control the indoor pressure in the coating device, thereby avoiding the coating quality being affected.

[0004] The embodiments of the present invention can be implemented as follows:

[0005] In a first aspect, the present invention provides a valve core assembly, the valve core assembly comprising a valve plate assembly, a connecting assembly and a guide member;

[0006] The valve plate assembly is drivingly connected to the connecting assembly and is movably matched with the guide member; the guide member is used to guide the valve plate assembly to move in the first direction or the second direction when the connecting assembly drives the valve plate assembly to move;

[0007] The movement trajectory of the valve plate assembly along the first direction and the second direction is continuous, and the first direction and the second direction form an angle.

[0008] In an optional embodiment, the motion trajectory of the valve plate assembly is a straight line, a broken line, an arc or a curve, and all motion trajectories of the valve plate assembly have motion components along the first direction and / or the second direction;

[0009] The first direction is perpendicular to the second direction.

[0010] In an optional embodiment, the valve core assembly further includes a valve body, and the valve plate assembly, the connecting assembly and the guide member are all arranged in the valve body;

[0011] Valve ports are provided on opposite sides of the valve body; the connecting component is used for transmission connection with an external driving component, and the connecting component is used to drive the valve plate group to move along a first direction to approach or move away from the valve port of the valve body, or, to move along a second direction opposite to the valve port, to close or open the valve port under the driving action of the driving component.

[0012] In an optional embodiment, the connection assembly includes a support member and a movable connection unit;

[0013] The support member is movably arranged in the valve body, and the valve plate assembly is movably connected to the support member through a movable connection unit;

[0014] The guide member is connected to the valve body and is provided with a guide portion cooperating with the movable connection unit or the valve plate group, wherein the guide portion is used to guide the valve plate group to move along the first direction or the second direction.

[0015] In an optional embodiment, the guide portion includes a first guide groove and a second guide groove that are continuous; the first guide groove extends along the first direction, and the second guide groove extends along the second direction;

[0016] The movable connection unit or the valve plate assembly is provided with a sliding member matched with the first guide groove and the second guide groove.

[0017] In an optional embodiment, the first direction is perpendicular to the opening direction of the valve port, and the second direction is parallel to the opening direction of the valve port.

[0018] In an optional embodiment, the movable connection unit includes a first connection block and a movable connecting rod, the first connection block is connected to the valve plate assembly; two ends of the movable connecting rod are respectively hinged to the first connection block and the support member.

[0019] In an optional embodiment, the movable connection unit includes four movable connecting rods, and the four movable connecting rods are evenly distributed on two opposite sides of the first connecting block along a third direction; the third direction is perpendicular to the first direction and the second direction.

[0020] In an optional embodiment, the support member is provided with a second connecting block, and one end of the four movable connecting rods for being hinged to the support member is hinged to the second connecting block and is distributed on two opposite sides of the second connecting block along the third direction.

[0021] In an optional embodiment, the connection assembly includes a plurality of movable connection units, and the plurality of movable connection units are sequentially spaced apart along the third direction;

[0022] Along the third direction, the sliding member is connected to the first connecting blocks located at both ends of the valve plate assembly; the supporting member is provided with supporting wheels which are in rolling contact with the guiding member.

[0023] In an optional embodiment, the guide member is provided with a third guide groove cooperating with the support wheel, and an extension direction of the third guide groove is parallel to the first direction.

[0024] In an optional embodiment, the valve plate assembly includes a first valve plate and a second valve plate, and the first valve plate and the second valve plate are distributed on both sides of the support member; both sides of the support member are connected with at least one movable connection unit;

[0025] The first valve plate and the second valve plate are movably connected to the support member through movable connection units on the same side.

[0026] In an optional embodiment, the connection assembly further includes a transition piece, which is connected to the first valve plate and to the movable connection unit on the same side;

[0027] Among them, the areas of the first valve plate and the second valve plate used to abut against the valve body are both equipped with sealing rings; the connection between the adapter and the first valve plate is equipped with multiple elastic parts, which are used to make the first valve plate have a tendency to move toward the valve port.

[0028] In a second aspect, the present invention provides a gate valve, the gate valve comprising a drive assembly and the valve core assembly described above;

[0029] The driving assembly is connected to the valve body and is drivingly connected to the connecting assembly.

[0030] In an optional embodiment, the driving assembly includes a driving cylinder, a driving plate, a driving rod and a bellows;

[0031] The driving cylinder is connected to the valve body, and its movable end is connected to the transmission plate; the two ends of the transmission rod are respectively connected to the transmission plate and the supporting member of the connecting assembly;

[0032] The two ends of the bellows are respectively connected to the valve body and the transmission plate through sealing flanges, and are sleeved on the part of the transmission rod located outside the valve body.

[0033] In an optional embodiment, the gate valve further includes a support frame, a movable guide rail and a hoisting assembly;

[0034] The support frame is connected to the valve body, the movable guide rail extends along the first direction and is connected to the support frame, and is located above the valve body and the drive assembly; the lifting assembly is used to lift the valve plate group, the connecting assembly and the drive assembly, and the lifting assembly can be slidably connected to the movable guide rail.

[0035] In a third aspect, the present invention provides a coating device, the coating device comprising a process chamber and a plurality of functional chambers;

[0036] The process chamber and the plurality of functional chambers are arranged in sequence along a preset direction, and the above-mentioned gate valve is arranged between adjacent process chambers and functional chambers or between two adjacent functional chambers.

[0037] The beneficial effects of the embodiments of the present invention include:

[0038] The valve core assembly includes a valve plate assembly, a connecting assembly and a guide; the valve plate assembly is connected to the connecting assembly by transmission and can be movably matched with the guide; the guide is used to guide the valve plate assembly to move in the first direction or the second direction when the connecting assembly drives the valve plate assembly to move; wherein the trajectory of the valve plate assembly moving in the first direction and the second direction is continuous, and the first direction is at an angle to the second direction. The valve core assembly has a simple structure, is easy to operate, does not require a large activity space, can improve the running smoothness of the valve plate assembly, and improve its operating sensitivity and action efficiency, and can also reduce the friction between the valve plate assembly and the valve body during operation, thereby reducing its running wear, reducing running noise, and improving its sealing; therefore, when the valve core assembly forms a plug valve and is used in a coating device, it can be beneficial to control the indoor pressure in the coating device, thereby avoiding the coating quality being affected. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0040] Figure 1 It is a structural schematic diagram of the valve core assembly in an embodiment of the present invention;

[0041] Figure 2 It is a structural schematic diagram of a valve core assembly assembled in a gate valve in an embodiment of the present invention;

[0042] Figure 3 Schematic diagram of the installation of the valve plate assembly and the connecting assembly in the embodiment of the present invention;

[0043] Figure 4 It is a schematic diagram of the valve plate assembly moving to the end of the stroke along the first direction in an embodiment of the present invention;

[0044] Figure 5 It is a schematic diagram of the valve plate assembly moving to the end of the stroke along the second direction in an embodiment of the present invention;

[0045] Figure 6 Schematic diagram of the moving position of the sliding member relative to the guide member in an embodiment of the present invention;

[0046] Figure 7This is a schematic diagram of the structure of a connection component in an embodiment of the present invention;

[0047] Figure 8 Schematic diagram of the arrangement of the guide member and the support member in an embodiment of the present invention;

[0048] Fig. 9 for Figure 8 The local schematic diagram of point D in the middle;

[0049] Fig.10 Schematic diagram of the installation of the valve body, valve plate assembly and connecting components in an embodiment of the present invention;

[0050] Fig.11 for Fig.10 The local schematic diagram at E in the middle;

[0051] Fig.12 is an installation cross-sectional view of a movable connection unit in an embodiment of the present invention;

[0052] Fig.13 for Fig.12 The partial schematic diagram of the F in the middle;

[0053] Fig.14 It is a schematic diagram of the structure of the driving assembly, the supporting frame, the movable guide rail and the hanging assembly in the embodiment of the present invention;

[0054] Fig.15 It is a schematic diagram of the structure of the driving component in an embodiment of the present invention;

[0055] Fig.16 Schematic diagram of the structure of the coating equipment in the embodiment of the present invention.

[0056] Icons: 100-valve core assembly; 110-valve plate assembly; 111-first valve plate; 112-second valve plate; 113-elastic member; 114-sealing ring; 120-connecting assembly; 121-support member; 122-sliding member; 123-support wheel; 124-adapter; 125-support connecting block; 150-movable connecting unit; 151-first connecting block; 152-movable connecting rod; 153-second connecting block; 154-rotating connecting shaft; 130 -guide member; 131-guide part; 132-first guide groove; 133-second guide groove; 140-valve body; 141-valve port; 200-gate valve; 210-driving assembly; 211-driving cylinder; 212-transmission plate; 213-transmission rod; 220-bellows; 230-sealing flange; 241-support frame; 242-movable guide rail; 243-lifting assembly; 300-coating equipment; 310-process chamber; 320-functional chamber. DETAILED DESCRIPTION

[0057] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0058] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0059] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0060] In the description of the present invention, it should be noted that if the terms "upper", "lower", "inside", "outside", etc. appear to indicate an orientation or position relationship, they are based on the orientation or position relationship shown in the accompanying drawings, or are the orientation or position relationship in which the product of the invention is usually placed when used. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0061] In addition, the terms “first”, “second”, etc., if used, are merely used to distinguish between the descriptions and should not be understood as indicating or implying relative importance.

[0062] It should be noted that, in the absence of conflict, the features in the embodiments of the present invention may be combined with each other.

[0063] Please refer to Figure 1-Figure 5 , this embodiment provides a valve core assembly 100, the valve core assembly 100 includes a valve plate assembly 110, a connecting assembly 120 and a guide member 130;

[0064] The valve plate assembly 110 is drivingly connected to the connecting assembly 120 and is movably matched with the guide member 130; the guide member 130 is used to guide the valve plate assembly 110 to move in the first direction or the second direction when the connecting assembly 120 drives the valve plate assembly 110 to move;

[0065] The movement trajectory of the valve plate assembly 110 along the first direction and the second direction is continuous, and the first direction and the second direction form an angle.

[0066] It should be noted that, in this embodiment, the X direction indicated by the arrow in the drawings is the first direction, and the X direction indicated by the arrow is the second direction.

[0067] Please refer to Figure 1-Figure 5 , the working principle of the valve core assembly 100 is:

[0068] First, the valve core assembly 100 is used to form a gate valve 200 and is applied to a coating device 300. Its function is to change the connection state between the process chamber 310 and the functional chamber 320, or change the connection state between two adjacent functional chambers 320 through the action of the valve plate assembly 110.

[0069] When the valve plate assembly 110 is in motion, it moves under the driving action of the connecting assembly 120 and moves along the first direction or the second direction under the guidance of the guide member 130, thereby changing the connection state between the process chamber 310 and the functional chamber 320, or changing the connection state between two adjacent functional chambers 320;

[0070] In addition, when the valve plate assembly 110 moves along the first direction or the second direction driven by the connecting assembly 120, its movement form can be linear movement. Therefore, compared with the flip valve plate structure in the prior art, the improved valve plate assembly 110 in this embodiment requires a significantly smaller activity space during movement than the flip valve plate structure. Moreover, such a movement mode can also simplify the structure of the valve core assembly 100, simplify its operation, improve the running smoothness of the valve plate assembly 110, and improve its operation sensitivity and action efficiency.

[0071] Moreover, the movement of the valve plate assembly 110 can also reduce the friction between the valve plate assembly 110 and the valve body 140 during operation, thereby reducing its operating wear, reducing operating noise, and improving its sealing performance;

[0072] Therefore, when the valve core assembly 100 forms a gate valve 200 and is used in a coating device 300, it can be helpful to control the indoor pressure in the coating device 300, thereby avoiding the coating quality being affected.

[0073] It should be noted that when the connecting component 120 drives the valve plate assembly 110 to move, it can be used as an intermediate transmission element or a direct drive element. This embodiment is described by taking the connecting component 120 as an intermediate transmission element as an example.

[0074] Furthermore, it can be seen from the above content that in the present embodiment, when the valve plate group 110 moves along the first direction or the second direction driven by the connecting component 120, its movement form can be linear movement, and the movement trajectory of the valve plate group 110 is a straight line, a broken line, an arc or a curve, and all movement trajectories of the valve plate group 110 have movement components along the first direction and / or the second direction. Such a movement trajectory form enables the valve plate group 110 to have movement components in at least two directions during the movement, thereby reducing the friction with other structures during the movement; and in the present embodiment, a method of perpendicularity between the first direction and the second direction is adopted.

[0075] Please refer to Figure 1-Figure 5 When configuring the valve core assembly 100, the valve core assembly 100 further includes a valve body 140, and the valve plate assembly 110, the connecting assembly 120 and the guide member 130 are all disposed in the valve body 140;

[0076] A valve port 141 is provided on opposite sides of the valve body 140; the connecting component 120 is used for transmission connection with an external driving component 210, and the connecting component 120 is used for driving the valve plate assembly 110 to move along a first direction to approach or move away from the valve port 141 of the valve body 140 under the driving action of the driving component 210, or, to move along a second direction opposite to the valve port 141 to close or open the valve port 141.

[0077] Based on this, when the valve plate assembly 110 moves in the first direction or the second direction, its purpose is to close or open the valve port 141 of the valve body 140; specifically, the movement of the valve plate assembly 110 in the first direction can approach or move away from the valve port 141 of the valve body 140, and the movement of the valve plate assembly 110 in the second direction directly opposite to the valve port 141 can close or open the valve port 141;

[0078] In combination with the above content, take the case where the movement trajectory of the valve plate group 110 is a straight line and the first direction is perpendicular to the second direction when the valve plate group 110 moves in the first direction or the second direction; since the movement of the valve plate group 110 in the second direction is directly opposite to the valve port 141, it can be seen that the first direction is perpendicular to the opening direction of the valve port 141, and the second direction is parallel to the opening direction of the valve port 141. Therefore, when the valve plate group 110 moves in the first direction, it can be close to or away from the valve port 141 of the valve body 140, and no contact friction with the valve body 140 is generated in the process. When it moves to the position directly opposite to the valve port 141, it can move in the second direction, and then move toward the direction of the valve port 141 with the valve plate group 110 flush with the valve port 141. In this way, the valve plate group 110 can move smoothly and smoothly, and its wear during movement can be reduced.

[0079] Please note that, please refer to Figure 1-Figure 6 It can be seen from the above content that the motion trajectory of the valve plate group 110 during the movement can be a straight line, a broken line, an arc or a curve, and the present embodiment describes the way in which its trajectory is a straight line. In other embodiments of the present invention, if the valve plate group 110 adopts a broken line, an arc or a curve motion form, it can also achieve the effect of making the valve plate group 110 move smoothly and stably, and can reduce the wear during the movement.

[0080] From the above content, please refer to Figure 1-Figure 13 In the present embodiment, the function of the connecting component 120 is to drive the valve plate group 110 to move along the first direction and the second direction relative to the guide member 130. Therefore, when configuring the connecting component 120, in order to improve its stability and smoothness during the movement, the connecting component 120 includes a support member 121 and a movable connection unit 150; the support member 121 is movably arranged in the valve body 140, and the valve plate group 110 is movably connected to the support member 121 through the movable connection unit 150; the guide member 130 is connected to the valve body 140, and is provided with a guide portion 131 cooperating with the movable connection unit 150 or the valve plate group 110, and the guide portion 131 is used to guide the valve plate group 110 to move along the first direction or the second direction.

[0081] Therefore, when the support member 121 moves in the valve body 140, the valve plate group 110 can be driven to move in the valve body 140 through the movable connection unit 150, and a guide member 130 is also provided in the valve body 140. Therefore, the valve plate group 110 can be guided by the guide member 130 to move in the first direction or the second direction, and in this way, the stability and smoothness of the valve plate group 110 during the movement can be improved.

[0082] When the guide portion 131 is configured, the guide portion 131 includes a continuous first guide groove 132 and a second guide groove 133; the first guide groove 132 extends along the first direction, and the second guide groove 133 extends along the second direction; the movable connection unit 150 or the valve plate assembly 110 is configured with a sliding member 122 that cooperates with the first guide groove 132 and the second guide groove 133. That is, by setting the first guide groove 132 and the second guide groove 133, that is, in a groove-type matching manner, it can play a role in guiding the movement of the valve plate assembly 110, and it can be known from the above content that in this embodiment, the manner in which the valve plate assembly 110 moves along a straight track is used as an example for explanation, therefore, when the first guide groove 132 and the second guide groove 133 are configured, they can both be set as straight grooves, but at their intersection, an arc-shaped transition groove can be set, the purpose of which is to improve the smoothness of their movement. When configuring the movable connection unit 150, since its function is to flexibly connect the valve plate group 110 and the support member 121, on this basis, in order to improve the stability of its connection, the movable connection unit 150 includes a first connection block 151 and a movable connecting rod 152, the first connection block 151 is connected to the valve plate group 110; the two ends of the movable connecting rod 152 are respectively hinged to the first connection block 151 and the support member 121. That is, through the above-mentioned structural setting, when the support member 121 moves, the valve plate group 110 can be driven to move through the first connection block 151 and the movable connecting rod 152, and at this time, the two ends of the movable connecting rod 152 are respectively hinged to the first connection block 151 and the support member 121, so that the movement position of the valve plate group 110 can be adjusted, that is, the movement of the valve plate group 110 in the first direction and the second direction can be realized.

[0083] On the basis of the structure of the above-mentioned movable connection unit 150, in order to improve the stability of its movement, the movable connection unit 150 includes four movable connecting rods 152, and the four movable connecting rods 152 are evenly distributed on the opposite sides of the first connection block 151 along the third direction; the third direction is perpendicular to the first direction and the second direction. In addition, the support member 121 is provided with a second connection block 153, and one end of the four movable connecting rods 152 used for hinged connection with the support member 121 is hinged with the second connection block 153, and is distributed on the opposite sides of the second connection block 153 along the third direction. In addition, when the movable connecting rod 152 is hinged with the second connection block 153, a rotating connecting shaft 154 is configured on the second connection block 153 to realize the hinge of the movable connecting rod 152 and the second connection block 153.

[0084] In addition, the connecting assembly 120 includes a plurality of movable connecting units 150, which are arranged in sequence along the third direction; along the third direction, the sliding member 122 is connected to the first connecting block 151 located at both ends of the valve plate group 110; the supporting member 121 is provided with a supporting wheel 123 which is in rolling contact with the guide member 130.

[0085] On the basis of the above-mentioned structure equipped with a sliding member 122 and a movable connection unit 150, a support connection block 125 can also be provided, which is relatively located at the two ends of the support member 121 and is connected to the movable connection units 150 distributed at the two ends of the support member 121. Its function is to install the sliding member 122, and the sliding member 122 can be set as a roller; and when connecting the support connection block 125 with the movable connection unit 150, the method of connecting the support connection block 125 with the first connection block 151 is adopted, and its purpose is to improve the stability during the activity.

[0086] It should be noted that, in this embodiment, the Z direction indicated by the arrow in the drawings is the third direction.

[0087] Based on this, it can be known from the above content that the connecting unit includes a plurality of movable connecting units 150, and the plurality of movable connecting units 150 are arranged in sequence along the third direction at intervals to improve the connection stability between the valve plate group 110 and the support member 121. When the support member 121 moves and drives the valve plate group 110 to move, since each movable connecting unit 150 includes four movable connecting rods 152, and the four movable connecting rods 152 are distributed on the opposite sides of the first connecting block 151 and the second connecting block 153 along the third direction, and the two ends of the four movable connecting rods 152 are respectively hinged to the first connecting block 151 and the second connecting block 153. Therefore, through the aforementioned structural setting, the stability of its movement can be improved by setting a plurality of movable connecting units 150.

[0088] In order to guide the support member 121 during its movement, the guide member 130 is provided with a third guide groove cooperating with the support wheel 123 , and the extension direction of the third guide groove is parallel to the first direction.

[0089] On the basis of the above structure, since valve ports 141 are provided on opposite sides of the valve body 140, the present embodiment adopts a method adapted thereto when configuring the valve plate assembly 110. Specifically, the valve plate assembly 110 includes a first valve plate 111 and a second valve plate 112, and the first valve plate 111 and the second valve plate 112 are distributed on both sides of the support member 121, that is, they correspond to the two valve ports 141 respectively.

[0090] In order to enable both the first valve plate 111 and the second valve plate 112 to be movably connected to the support member 121, at least one movable connection unit 150 is connected to both sides of the support member 121; the first valve plate 111 and the second valve plate 112 are movably connected to the support member 121 through the movable connection units 150 on the same side. It should be noted that the present embodiment adopts a method in which both the first valve plate 111 and the second valve plate 112 are connected to the support member 121 through multiple movable connection units 150. The structural arrangement of the multiple movable connection units 150 is referred to the above content and will not be repeated here.

[0091] Further, on the basis of configuring the first valve plate 111 and the second valve plate 112, in the case where the spacing between the support member 121 and the valve ports 141 on both sides is inconsistent or there is an assembly error, the connection assembly 120 may further include an adapter 124, the adapter 124 is connected to the first valve plate 111, and is connected to the movable connection unit 150 on the same side, so that the spacing between the first valve plate 111 and the valve port 141 can be adapted through the setting of the adapter 124, thereby eliminating the error caused by processing and assembly;

[0092] In order to improve the sealing performance and play a role of shock absorption and noise reduction when the first valve plate 111 and the second valve plate 112 contact the valve body 140 to close the valve port 141, sealing rings 114 are provided in the areas where the first valve plate 111 and the second valve plate 112 abut against the valve body 140. Since the pressures of the process chamber 310 and the functional chamber 320 corresponding to the two sides of the valve body 140 are different, on the basis of the above-mentioned adapter 124, a plurality of elastic members 113 may be provided at the connection between the adapter 124 and the first valve plate 111. The elastic members 113 are used to make the first valve plate 111 have a tendency to move toward the valve port 141. The elastic members 113 are used to improve the sealing performance and play a role of buffering through the arrangement of the elastic members 113. In addition, on the basis of the above-mentioned adapter 124, the sliding member 122 may be connected to the adapter 124.

[0093] Based on the above, please refer to Figure 1-Figure 15 The present invention provides a gate valve 200 , which includes a drive assembly 210 and the valve core assembly 100 ; the drive assembly 210 is connected to the valve body 140 , and is transmission-connected to the connecting assembly 120 .

[0094] Specifically, the driving assembly 210 includes a driving cylinder 211, a transmission plate 212, a transmission rod 213 and a bellows 220; the driving cylinder 211 is connected to the valve body 140, and its movable end is connected to the transmission plate 212; the two ends of the transmission rod 213 are respectively connected to the transmission plate 212 and the support member 121 of the connecting assembly 120; the two ends of the bellows 220 are respectively connected to the valve body 140 and the transmission plate 212 through a sealing flange 230, and are sleeved on the part of the transmission rod 213 located outside the valve body 140.

[0095] Therefore, based on the above-mentioned structural setting, when the driving cylinder 211 drives the transmission plate 212 to move, the transmission rod 213 connected to the transmission plate 212 can be driven to move. When the transmission rod 213 moves, it will move relative to the valve body 140 along the first direction, and during its movement, the length of the part located outside the valve body 140 will change. In this process, since the bellows 220 is sleeved on the part of the transmission rod 213 located outside the valve body 140, the bellows 220 can be set to maintain the sealing of the valve body 140 during the movement of the transmission rod 213.

[0096] The following is an example of the movement process of the valve plate assembly 110 closing the valve port 141:

[0097] First, the driving cylinder 211 drives the transmission plate 212 and the transmission rod 213 connected to the transmission plate 212 to move toward the inside of the valve body 140 along the first direction. During the movement of the transmission rod 213, since the transmission rod 213 is connected to the support member 121, the support member 121 is driven to move synchronously along the first direction. When the support member 121 moves, the support wheel 123 moves along the third guide groove, thereby playing a guiding role.

[0098] During the movement of the support member 121, since the first valve plate 111 and the second valve plate 112 distributed on both sides of the support member 121 are movably connected to the support member 121 through a plurality of movable connection units 150, the movement of the support member 121 may drive the first valve plate 111 and the second valve plate 112 to move through the plurality of movable connection units 150;

[0099] Since the valve plate assembly 110 is provided with a sliding member 122 that cooperates with the first guide groove 132 and the second guide groove 133, the first guide groove 132 extends along the first direction, and the second guide groove 133 extends along the second direction; that is, the first valve plate 111 and the second valve plate 112 are provided with a sliding member 122 that cooperates with the first guide groove 132 and the second guide groove 133, and the sliding member 122 may be a sliding wheel. Therefore, when the support member 121 moves, under the premise that the sliding member 122 cooperates with the first guide groove 132 and the second guide groove 133, in the case of support movement, the first valve plate 111 and the second valve plate 112 will be driven to move in the direction in which the first guide groove 132 and the second guide groove 133 extend, and their movement trajectories are continuous;

[0100] When the valve plate assembly 110 of the present embodiment moves in the first direction or the second direction, the movement trajectory of the valve plate assembly 110 is a straight line, the first direction is perpendicular to the second direction, and the first direction is perpendicular to the opening direction of the valve port 141, and the second direction is parallel to the opening direction of the valve port 141. Therefore, when the first valve plate 111 and the second valve plate 112 move in the first direction, they are spaced apart from the corresponding valve port 141 in the second direction, thereby avoiding contact friction between them and the valve body 140. When they move to the end of the first guide groove 132, they are located directly opposite to the valve port 141. Subsequently, in the aforementioned movable Based on the structure of the movable connection unit 150, the valve plate assembly 110 can be relatively rotated between the movable connecting rod 152 in the movable connection unit 150 and the first connection block 151 and the second connection block 153, so that the first connection block 151 and the second connection block 153 can be offset, so that the valve plate assembly 110 can smoothly transform to move along the second guide groove 133 after moving to the end of the first guide groove 132, that is, through the structural setting of the movable connection unit 150, the valve plate assembly 110 can smoothly transform from moving along the first direction to moving along the second direction during the movement;

[0101] Thus, after the valve plate assembly 110 moves to the end of the first guide groove 132, it can move along the second direction and move toward the valve port 141 in a posture facing the valve port 141, thereby contacting the valve body 140 and closing the valve port 141.

[0102] Therefore, based on the above process, it can be known that the gate valve 200 can avoid contact friction between its valve plate group 110 and the valve body 140 during operation by adopting the above-mentioned valve core assembly 100, and the smooth movement process of its valve core assembly 100 can reduce its operating wear, reduce operating noise, and improve its sealing.

[0103] The movement process of the valve plate assembly 110 to open the valve port 141 is opposite to the above process, which will not be described again.

[0104] Furthermore, in the present embodiment, in order to facilitate the inspection and maintenance of the gate valve 200, the gate valve 200 further includes a support frame 241, a movable guide rail 242 and a hoisting assembly 243; wherein the support frame 241 is connected to the valve body 140, the movable guide rail 242 extends along the first direction and is connected to the support frame 241, and is located above the valve body 140 and the drive assembly 210; and the hoisting assembly 243 is used to hoist the valve plate assembly 110, the connecting assembly 120 and the drive assembly 210, and the hoisting assembly 243 is slidably connected to the movable guide rail 242. Therefore, when the gate valve 200 needs to be inspected or maintained, one or more of the valve plate assembly 110, the connecting assembly 120 and the drive assembly 210 can be hoisted by the hoisting assembly 243, so as to facilitate its removal, removal or installation from the valve body 140.

[0105] Based on the above, please refer to Figure 1-Figure 16 The present embodiment further provides a coating device 300, which includes a process chamber 310 and a plurality of functional chambers 320; the process chamber 310 and the plurality of functional chambers 320 are arranged in sequence along a preset direction, and the above-mentioned gate valve 200 is arranged between adjacent process chambers 310 and functional chambers 320 or between two adjacent functional chambers 320.

[0106] It should be noted that when configuring the gate valve 200 in the coating equipment 300, the gate valve 200 can be set according to actual conditions, and the technical effects can be achieved with the above-mentioned valve core assembly 100 and the gate valve 200.

[0107] The above are only specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed by the present invention should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims

1. A valve core assembly, characterized in that: The valve core assembly includes a valve plate assembly, a connecting assembly and a guide member; The valve plate assembly is drivingly connected to the connecting assembly and movably cooperates with the guide member; the guide member is used to guide the valve plate assembly to move in the first direction or the second direction when the connecting assembly drives the valve plate assembly to move; The movement trajectory of the valve plate assembly along the first direction and the second direction is continuous, and the first direction forms an angle with the second direction.

2. The valve core assembly according to claim 1, characterized in that: The motion trajectory of the valve plate assembly is a straight line, a broken line, an arc or a curve, and all motion trajectories of the valve plate assembly have motion components along the first direction and / or the second direction; The first direction is perpendicular to the second direction.

3. The valve core assembly according to claim 1, characterized in that: The valve core assembly also includes a valve body, and the valve plate assembly, the connecting assembly and the guide member are all arranged in the valve body; The valve body is provided with valve openings on opposite sides; the connecting component is used for transmission connection with an external driving component, and the connecting component is used for driving the valve plate group to move along the first direction to approach or move away from the valve opening of the valve body, or, to move along the second direction opposite to the valve opening, to close or open the valve opening, under the driving action of the driving component.

4. The valve core assembly according to claim 3, characterized in that: The connection assembly includes a support member and a movable connection unit; The support member is movably disposed in the valve body, and the valve plate assembly is movably connected to the support member via the movable connection unit; The guide member is connected to the valve body and is provided with a guide portion cooperating with the movable connection unit or the valve plate assembly, wherein the guide portion is used to guide the valve plate assembly to move along the first direction or the second direction.

5. The valve core assembly according to claim 4, characterized in that: The guide portion includes a first guide groove and a second guide groove that are continuous; the first guide groove extends along the first direction, and the second guide groove extends along the second direction; The movable connection unit or the valve plate assembly is provided with a sliding member matched with the first guide groove and the second guide groove.

6. The valve core assembly according to claim 5, characterized in that: The first direction is perpendicular to the opening direction of the valve port, and the second direction is parallel to the opening direction of the valve port.

7. The valve core assembly according to claim 5, characterized in that: The movable connection unit comprises a first connection block and a movable connecting rod, wherein the first connection block is connected to the valve plate assembly; and two ends of the movable connecting rod are respectively hinged to the first connection block and the supporting member.

8. The valve core assembly according to claim 7, characterized in that: The movable connection unit includes four movable connecting rods, and the four movable connecting rods are evenly distributed on two opposite sides of the first connecting block along a third direction; the third direction is perpendicular to the first direction and the second direction.

9. The valve core assembly according to claim 8, characterized in that: The support member is provided with a second connection block, and one end of the four movable connecting rods used for being hinged to the support member is hinged to the second connection block and is distributed on two opposite sides of the second connection block along the third direction.

10. The valve core assembly according to claim 8, characterized in that: The connection assembly includes a plurality of movable connection units, and the plurality of movable connection units are sequentially spaced along the third direction; Along the third direction, the sliding member is connected to the first connecting blocks located at both ends of the valve plate assembly; and the supporting member is provided with supporting wheels that are in rolling contact with the guiding member.

11. The valve core assembly according to claim 10, characterized in that: The guide member is provided with a third guide groove matched with the support wheel, and the extension direction of the third guide groove is parallel to the first direction.

12. The valve core assembly according to any one of claims 4 to 11, characterized in that: The valve plate assembly includes a first valve plate and a second valve plate, and the first valve plate and the second valve plate are distributed on both sides of the support member; both sides of the support member are connected with at least one of the movable connection units; Wherein, the first valve plate and the second valve plate are movably connected to the support member through the movable connection units on the same side respectively.

13. The valve core assembly according to claim 12, characterized in that: The connection assembly further includes a transition piece, the transition piece is connected to the first valve plate and is connected to the movable connection unit on the same side; Among them, the areas of the first valve plate and the second valve plate used to abut against the valve body are both equipped with sealing rings; the connection between the adapter and the first valve plate is equipped with multiple elastic parts, and the elastic parts are used to make the first valve plate have a tendency to move toward the valve port.

14. A gate valve, characterized in that: The gate valve comprises a drive assembly and a valve core assembly as claimed in any one of claims 1 to 13; The driving assembly is connected to the valve body and is drivingly connected to the connecting assembly.

15. The gate valve according to claim 14, characterized in that: The driving assembly comprises a driving cylinder, a transmission plate, a transmission rod and a bellows; The driving cylinder is connected to the valve body, and its movable end is connected to the transmission plate; the two ends of the transmission rod are respectively connected to the transmission plate and the supporting member of the connecting assembly; Both ends of the bellows are connected to the valve body and the transmission plate through sealing flanges, and are sleeved on the portion of the transmission rod outside the valve body.

16. The gate valve according to claim 15, characterized in that: The gate valve also includes a support frame, a movable guide rail and a lifting assembly; The support frame is connected to the valve body, the movable guide rail extends along the first direction and is connected to the support frame, and is located above the valve body and the driving assembly; the lifting assembly is used to lift the valve plate group, the connecting assembly and the driving assembly, and the lifting assembly is slidably connected to the movable guide rail.

17. A coating device, characterized in that: The coating equipment includes a process chamber and a plurality of functional chambers; The process chamber and the plurality of functional chambers are arranged in sequence along a preset direction, and a gate valve as described in any one of claims 14 to 16 is arranged between adjacent process chambers and functional chambers or between two adjacent functional chambers.

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