A cleaning machine with an independent mounting structure for a built-in film cassette sealing ring and a method of using the same

Abstract

The present invention relates to a cleaning machine with an independent mounting structure for a film box sealing ring and a method for using the same, comprising a rotating loading frame that rotates along a vertical central axis, a plurality of hanging frames that are spaced apart and used to hang film boxes are installed around the rotating loading frame, the hanging frame comprises a frame body that is vertically extended and a plurality of hanging rods that are vertically distributed on the frame body, a sealing ring fixing device is provided on the outer wall of the frame body, the sealing ring fixing device comprises upper and lower limiting parts that are fixed on the outer wall of the frame body at relative intervals, and an intermediate limiting part that is arranged between the upper and lower limiting parts and fixed on the outer wall of the frame body; the upper and lower limiting parts tighten the sealing ring up and down and lock the sealing ring through the intermediate limiting part.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor wafers, and in particular to a cleaning machine with a built-in wafer cassette sealing ring independent mounting structure and a use method thereof. Background Art

[0002] Silicon polished wafers and silicon epitaxial wafers need to be cleaned in a series of chemical liquid tanks in the cleaning machine to remove particles and impurities. During cleaning, they are loaded into a wafer box made of Teflon material that is resistant to acid and alkali corrosion. Since the wafer box needs to be used to transport and place wafers and the structure inside the wafer box itself is complex, it is necessary to ensure that the wafer box is sufficiently clean when using it.

[0003] The prior art lacks a special fixing device for the film box sealing ring in the washing machine when cleaning the various parts of the film box. The film box sealing ring in the prior art is only suspended on two fixed fulcrums inside the washing machine, which makes the suspension of the film box sealing ring unstable. Since the cleaning principle of the washing machine is to clean by high-speed rotation with pure water and nitrogen, the film box sealing ring is easily thrown off inside the washing machine when the washing machine is rotating for cleaning, which causes the film box sealing ring to be stuck inside the washing machine, causing the equipment to be stuck and forced to stop for maintenance, seriously affecting the cleaning efficiency and cleaning quality. Summary of the Invention

[0004] The present invention aims to solve the above problems in the prior art and provides a cleaning machine with a built-in independent mounting structure for a film box sealing ring, which is provided with a fixing structure dedicated to the film box sealing ring and ensures that the film box sealing ring is effectively cleaned.

[0005] The invention solves its technical problems by adopting a technical solution: this cleaning machine with a built-in film box sealing ring independent installation structure comprises a rotating loading frame that rotates along a vertical central axis, and a plurality of hanging frames arranged at intervals and used to hang film boxes are installed around the rotating loading frame, and the hanging frame comprises a frame body extending vertically and a plurality of hanging rods vertically distributed on the frame body, and a sealing ring fixing device is provided on the outer wall of the frame body, the sealing ring fixing device comprises upper and lower limit parts fixed at relative intervals on the outer wall of the frame body, and an intermediate limit part arranged between the upper and lower limit parts and fixed on the outer wall of the frame body; the upper and lower limit parts tighten the sealing ring up and down and lock the sealing ring through the intermediate limit part, and the upper and lower limit parts are provided on the outer wall of the frame body, so that the film box sealing ring can be tightened and fixed between the upper and lower limit parts to ensure that the rotating loading frame is not thrown off during operation. At the same time, the film box sealing ring is arranged at the side wall position and will not form an obstruction with other components or devices on the hanging frame, so that the cleaning effect of the film box sealing ring can be fully guaranteed.

[0006] Preferably, the upper and lower limit parts include a first connection part fixedly connected to the outer side wall of the frame, a limit block provided on the first connection part and protruding outward, and a limit slot provided on the limit block relatively away from the upper and lower limit parts on the other side.

[0007] Preferably, the middle limiting portion includes a second connecting portion fixedly connected to the outer side wall of the frame body, a pair of limiting plates extending outward and spaced apart to form an accommodating space, and blocking blocks respectively arranged on the inner sides of the limiting plates and extending toward the accommodating space. The limiting plates pull the sealing ring inward and limit the sealing ring to the inner side of the accommodating space through the blocking blocks. The accommodating space and the blocking blocks are provided to further prevent the sealing ring from detaching from the sealing ring fixing device, and at the same time make the limiting plates pull the sealing ring inward to ensure that the sealing ring will not detach from the upper and lower limiting portions.

[0008] Preferably, the rotating loading frame includes a cylindrical frame body, the cylindrical frame body includes a pair of upper and lower outer frame plates relatively spaced apart and a connecting column connected between the upper and lower outer frame plates, and the suspension frame is rotatably connected between the upper and lower outer frame plates.

[0009] Preferably, the frame body includes a pair of upper and lower connecting plates respectively arranged on the edges of the upper and lower outer frame plates and a support plate connected between the upper and lower connecting plates to form a side wall. The cross-section of the support plate on the horizontal plane is arranged along the diameter direction of the vertical center axis of the rotating loading frame, and the sealing ring fixing device is arranged on the outer surface of the support plate.

[0010] Preferably, a blocking and reflecting surface is provided on the end of the outer side surface of the support plate away from the central axis, which is located on the outside of the sealing ring fixing device and protrudes outward. A blocking and reflecting surface is provided on the outer side surface of the support plate, so that the cleaning liquid that is not sprayed onto the sealing ring is rebounded onto the sealing ring to further enhance the cleaning quality of the sealing ring. At the same time, the side of the sealing ring away from the internal cleaning nozzle can also be flushed with the cleaning liquid.

[0011] The cleaning mechanism is configured to move the cleaning member to a desired position, the cleaning member being affixed to the support frame, the cleaning member being rotatably connected to the support frame and extending horizontally along the diameter direction of the vertical center axis of the rotating loading frame. The extended traction rod comprises an extension plate fixed to the outside of the cleaning shaft, a rotating portion rotatably connected to the outside of the extension plate for limiting the sealing ring, the rotation plane of the extension plate being coincident with the diameter direction of the vertical center axis of the rotating loading frame, a rotating driving surface being provided on the outside of the extension plate and gradually tilted to the left or right from top to bottom, a channel space being provided between the extension plate and the support plate and being higher than the upper and lower limit portions; an extension plate with a rotating driving surface is provided, so that when the rotating loading frame rotates, the extension plate can be rotated around the cleaning shaft by wind force, and then one side edge of the sealing ring is pulled outward by the extension plate and the rotating portion, thereby avoiding that part of the inner side surface of the sealing ring contacts and fits with the outer surface of the sealing ring fixing device for a long time, thereby affecting the cleaning effect of the sealing ring.

[0012] Preferably, an auxiliary balancing plate is provided on the cleaning shaft, which is arranged opposite to the extension plate and extends in the opposite direction of the extension plate. The auxiliary balancing plate is provided with an auxiliary rotating plate. The auxiliary rotating plate is provided with an auxiliary driving surface which is arranged opposite to the rotating driving surface. A rotation gap is provided between the auxiliary driving surface and the outer side of the support plate in the vertical direction. The auxiliary rotating plate and the auxiliary driving surface are provided, which are used to balance and stabilize the extension plate while assisting in driving the rotation of the extension plate.

[0013] Preferably, the rotating part includes an outer side cleaning roller rotatably connected to the outer end of the extension plate, a pair of supporting rollers rotatably connected to the extension plate, and an inner side cleaning roller rotatably connected to the extension plate and located between the support rollers. An installation space for accommodating the sealing ring is provided between the outer side cleaning roller and the support roller, and the inner side cleaning roller is arranged away from the sealing ring relative to the support roller. Cleaning bristles are provided on the outer side of the supporting roller and the inner side cleaning roller. A limiting table is provided on the outer side of the supporting roller, which is limited to the outer side of the sealing ring. The outer side of the limiting table is in contact with the inner side cleaning roller and drives the inner side cleaning roller to rotate. When the extension plate rotates, an inner side cleaning roller is provided which is driven to rotate by the support roller, thereby realizing brushing the inner contact extrusion surface of the sealing ring to ensure the cleaning quality of the inner extrusion surface of the sealing ring.

[0014] A method for using a cleaning machine with a built-in cassette sealing ring independent mounting structure comprises the following steps:

[0015] Step 1: Remove the sealing ring from the film cassette, stretch the sealing ring in the vertical direction so that the two ends of the sealing ring are respectively clamped in the limit grooves of the upper and lower limit parts, and then stretch one side of the sealing ring and clamp it in the installation space between the support roller and the outer side cleaning roller, so that the sealing ring is tightened and set on the upper and lower limit parts and the outer side of the support roller;

[0016] Step 2: Start the cleaning machine so that the rotating loading frame is driven to rotate by the driving device; during the rotation process, the auxiliary driving surface and the rotating driving surface drive the extension plate and the rotating part to rotate under the drive of wind force; so that the extension plate can stretch the side of the corresponding sealing ring outward for spraying when it rotates to different positions, and at the same time, the supporting roller rotates under the action of the friction force of the sealing ring, and then drives the inner side cleaning roller to rotate through the limiting table, so that the inner side cleaning roller rotates relative to the inner side of the sealing ring to brush the inner side of the sealing ring.

[0017] The beneficial effects of the present invention are as follows: the present invention is provided with upper and lower limit parts located on the outer side wall of the frame body, so that the film box sealing ring can be tightened and fixed between the upper and lower limit parts, ensuring that the rotating loading frame is not thrown off when working, and at the same time, the film box sealing ring is arranged at the side wall position and will not be blocked by other parts or devices on the suspension frame, which can fully ensure the cleaning effect of the film box sealing ring; at the same time, an intermediate limit part is provided to further lock the sealing ring, so that the sealing ring is more firmly limited on the upper and lower limit parts, ensuring that the sealing ring is fixed more firmly, and avoiding the falling of the sealing ring to affect the cleaning efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of the present invention;

[0019] Figure 2 This is a schematic diagram of the installation of the suspension bracket;

[0020] Figure 3 is a structural diagram of the suspension frame;

[0021] Figure 4 for Figure 3 Enlarged view of part A;

[0022] Figure 5 It is a structural diagram of the upper and lower limit parts;

[0023] Figure 6 Schematic diagram of the structure of the middle limit part;

[0024] Figure 7 This is a schematic diagram of the installation of the sealing ring, upper and lower limit parts, and the middle limit part;

[0025] Figure 8 This is a schematic diagram of the structure of the suspension frame when an extended drawbar is provided;

[0026] Figure 9 This is a schematic diagram of the installation of the sealing ring, upper and lower limit parts, and the extended drawbar;

[0027] Figure 10 Schematic diagram of the installation of the cleaning shaft, extended traction rod and auxiliary rotating plate;

[0028] Figure 11 for Figure 10 Enlarged view of part B;

[0029] Figure 12 Schematic diagram of the installation of the inner side cleaning roller, support roller and outer side cleaning roller;

[0030] Description of reference numerals:

[0031] 1. Rotating loading frame, 2-1. Upper limit part, 2-2. Lower limit part, 3. Intermediate limit part, 3-1. Second connecting part, 3-2. Accommodating space, 3-3. Limiting plate, 3-4. Blocking block, 4. Cylindrical frame, 4-1. Upper outer frame plate, 4-2. Lower outer frame plate, 4-3. Connecting column, 5. Suspension frame, 5-1. Frame, 5-1-1. Connecting plate, 5-1-2. Support plate, 5-2. Hanging rod, 6. Cleaning the rotating shaft, 7. Extending the traction rod, 7-1. Extension plate, 7-2. Rotating part, 7-2-1. Support roller, 7-2-2 Inner side cleaning roller, 7-2-3. Outer side cleaning roller, 8. Rotating drive surface, 9. Auxiliary balancing plate, 10. Auxiliary rotating plate, 11. Auxiliary driving surface, 13. Limiting cone, 14. Blocking reflection surface, 15. First connecting part, 16. Limiting block, 17. Limiting slot. DETAILED DESCRIPTION

[0032] In order to further illustrate the technical means and effects adopted by the present invention to achieve the predetermined purpose of the invention, the specific implementation methods, structures, features and effects of the present invention are described in detail below in conjunction with the accompanying drawings and preferred embodiments.

[0033] Example 1

[0034] Refer to the attached Figure 1-Figure 7: The present embodiment discloses a cleaning machine with a built-in film box sealing ring independent installation structure, comprising a rotating loading frame 1 that rotates along a vertical central axis, and a plurality of suspension frames 5 arranged at intervals and used to hang film boxes are installed around the rotating loading frame 1, and the suspension frame 5 comprises a frame body 5-1 extending vertically and a plurality of hanging rods 5-2 distributed vertically on the frame body 5-1; during use, the film box and other materials in the Shin-Etsu film box composition can be fixed and installed through the existing hanging rods 5-2, and then firmly fixed inside the cleaning machine, and the cleaning machine is provided with a spray pipe fixedly installed relative to the rotating loading frame 1 at the center position of the rotating loading frame 1, and then cleaning liquid is sprayed outward through the spray pipe to clean the film box in a rotating state; in this embodiment, for the fixing and cleaning of the film box sealing ring, in order to prevent the sealing ring from falling into the cleaning machine and causing the sealing ring to be stuck inside the cleaning machine, causing the equipment to be stuck and forced to stop for maintenance, a sealing ring fixing device is provided on the outer wall of the frame body 5-1, and the sealing ring is fixed by the sealing ring fixing device while ensuring the effective cleaning of the sealing ring; specifically, Figure 1 As shown, the sealing ring fixing device in this embodiment includes upper and lower limit parts 2-1, 2-2 fixed at relative intervals on the outer wall of the frame 5-1, and an intermediate limit part 3 arranged between the upper and lower limit parts 2-1, 2-2 and fixed on the outer wall of the frame 5-1; the sealing ring is tightened and fixed on the upper and lower limit parts 2-1, 2-2 by the upper and lower limit parts 2-1, 2-2, and the sealing ring is further locked by the intermediate limit part 3, thereby further improving the installation stability of the sealing ring.

[0035] Furthermore, Figure 2 As shown, the rotating loading frame 1 in this embodiment includes a cylindrical frame body 4, which includes a pair of upper and lower outer frame plates 4-1 and 4-2 arranged relatively spaced apart and a connecting column 4-3 connected between the upper and lower outer frame plates 4-1 and 4-2, and a plurality of suspension frames 5 surrounding the cylindrical frame body 4 and rotatably connected between the upper and lower outer frame plates 4-1 and 4-2; wherein, as shown in FIG. Figure 2 and Figure 3 As shown, the frame 5-1 in this embodiment includes a pair of upper and lower connecting plates 5-1-1 respectively arranged on the edges of the upper and lower outer frame plates 4-1 and 4-2, and a support plate 5-1-2 connected between the upper and lower connecting plates 5-1-1 to form a side wall. In this embodiment, a rotating shaft rotatably connected to the outer frame plates 4-1 and 4-2 is provided on the outer side of the connecting plate 5-1-1, so that the hanging frame 5 can be rotated before cleaning to hang other components such as the film box on the inside of the hanging frame 5. At the same time, in order to avoid the rotation of the hanging frame 5 during the rotation and cleaning process of the rotating loading frame 1, a fixed pin can be installed between the hanging frame 5 and the rotating loading frame 1.

[0036] Furthermore, Figure 5As shown, the upper and lower limit parts 2-1, 2-2 in this embodiment include a first connection part 15 fixedly connected to the outer wall of the frame body 5-1, a limit block 16 provided on the first connection part 15 and protruding outward, and a limit slot 17 provided on the limit block 16 relatively away from the upper and lower limit parts 2-1, 2-2 on the other side; wherein, the first connection part 15 in this embodiment is a flat plate structure, and the first connection part 15 is fixed to the outer wall of the frame body 5-1 by screws, that is, fixed to the outer surface of the support plate 5-1-2, and the first connection part 15 in this embodiment is fixed to the outer wall of the frame body 5-1, that is, fixed to the outer surface of the support plate 5-1-2, and the first connection part 15 in this embodiment is fixed to the outer wall of the frame body 5-1, that is, fixed to the outer surface of the support plate 5-1-2. The connecting portion 15 and the limit block 16 are made of plastic and are integrally injection molded. The upper limit portion 2-1 and the lower limit portion 2-2 are vertically opposite to each other, and the limit slots 17 on the limit portions are opened on the side away from each other. When the sealing ring is installed, the sealing ring is straightened up and down, and the upper end of the sealing ring is inserted into the limit slot 17 of the upper limit portion 2-1, and the lower end of the sealing ring is inserted into the limit slot of the lower limit portion 2-2, so that the sealing rings installed on the upper limit portion 2-1 and the lower limit portion 2-2 are in a fixed state of being tightened up and down.

[0037] Furthermore, Figure 6 and 7 As shown, the middle limiting portion 3 in this embodiment includes a second connecting portion 3-1 fixedly connected to the outer wall of the frame body 5-1, a pair of limiting plates 3-3 extending outward and spaced to form an accommodating space 3-2, and blocking blocks 3-4 respectively arranged on the inner sides of the limiting plates 3-3 and extending toward the accommodating space 3-2; specifically, the second connecting portion 3-1 in this embodiment is also a flat plate structure and is also fixedly connected to the outer wall of the frame body 5-1 by screws. The second connecting portion 3-1, the limiting plates 3-3 and the blocking blocks 3-4 in this embodiment are also It is made of plastic and is molded in one piece by injection molding; wherein, the distance between the limit plates 3-3 is smaller than the width of the upper limit portion 2-1, and thus when in use, a pair of limit plates 3-3 are respectively located at the left and right ends of the vertical sealing ring, and at the same time, the limit plates 3-3 and the single side of the sealing ring are stuck on the inner side of the blocking block 3-4, while contacting and tightening the sealing ring, thereby locking the sealing ring and further tightening and fixing the sealing ring in the accommodating space 3-2, thereby further preventing the sealing ring from detaching from the upper and lower limit portions 2-1, 2-2.

[0038] Furthermore, Figure 3 and Figure 4As shown, the cross-section of the support plate 5-1-2 in the horizontal plane in this embodiment is arranged along the diameter direction of the vertical central axis of the rotating loading frame 1; the sealing ring fixing device in this embodiment is arranged on the outer surface of the support plate 5-1-2, so that the sealing ring set on the sealing ring fixing device will not block other cleaning parts when the rotating loading frame 1 rotates and cleans. At the same time, the sealing ring can be fully sprayed with the cleaning liquid without being blocked; on this basis, in order to further improve the cleaning effect of the sealing ring in this embodiment, a blocking reflective surface 14 is provided on the end of the outer side of the support plate 5-1-2 away from the central axis, which is located outside the sealing ring fixing device and protrudes outward. The blocking reflective surface 14 in this embodiment is arranged on the outer surface of the support plate 5-1-2 and is located on the outside of the sealing ring after installation, so that part of the cleaning liquid that has not hit the sealing ring can be splashed onto the sealing ring by the corresponding splashing of the blocking reflective surface 14, so that more cleaning liquid can be sprayed on the sealing ring during cleaning. At the same time, the outer side of the sealing ring can also be sprayed with the cleaning liquid, thereby ensuring the cleaning effect of the sealing ring.

[0039] Example 2

[0040] like Figures 8-12As shown, in order to further increase the cleaning effect of the sealing ring, the difference between this embodiment and the first embodiment is that the structure of the intermediate limiting part 3 is different, and at the same time, the outer side of the support plate 5-1-2 in this application is not provided with a blocking reflective surface 14; the intermediate limiting part 3 in this embodiment includes a cleaning shaft 6 arranged on the support plate 5-1-2 and an extended traction rod 7 arranged outside the cleaning shaft 6 and pulling one side of the sealing ring outward, the cleaning shaft 6 is rotatably connected to the support plate 5-1-2 and extends horizontally along the diameter direction of the vertical center axis of the rotating loading frame 1, the extended traction rod 7 includes an extension plate 7-1 fixed to the outer side of the cleaning shaft 6, and a rotating part 7-2 rotatably connected to the outer side of the extension plate 7-1 for limiting the sealing ring. The rotation plane of the extension plate 7-1 coincides with the diameter direction of the vertical center axis of the rotating loading frame 1, and the outer side of the extension plate 7-1 is provided with a gradually leftward extension from top to bottom. Or a rotating drive surface 8 tilted to the right, a channel space higher than the upper and lower limit parts 2-1 and 2-2 is provided between the extension plate 7-1 and the support plate 5-1-2; wherein, the extension plate 7-1 in this embodiment extends outward and is tightened and limited on the rotating part 7-2 by the rotating part 7-2 and one side of the sealing ring, and then when the cleaning machine drives the rotating loading frame 1 to rotate during operation, the intermediate limit part 3 installed on the rotating loading frame 1 rotates accordingly, so that the extension plate 7-1 rotates around the cleaning shaft 6 under the action of the inclined rotating drive surface 8, so that the sealing rings at different positions are tightened and extended outward when the extension plate 7-1 rotates, thereby avoiding long-term contact between some positions on the sealing ring and the sealing ring fixing device during cleaning, so that all parts of the sealing ring can be effectively rinsed, ensuring the cleaning quality of the sealing ring; further, as Figure 10-12As shown, in order to further improve the cleaning quality of the sealing ring while ensuring the firm fixation of the sealing ring in this embodiment, the rotating part 7-2 in this embodiment includes an outer side cleaning roller 7-2-3 rotatably connected to the outer end of the extension plate 7-1, a pair of support rollers 7-2-1 rotatably connected to the extension plate 7-1 and an inner side cleaning roller 7-2-2 rotatably connected to the extension plate 7-1 and located between the support rollers 7-2-1, an installation space for accommodating the sealing ring is provided between the outer side cleaning roller 7-2-3 and the support rollers 7-2-1, the inner side cleaning roller 7-2-2 is arranged away from the sealing ring relative to the support rollers 7-2-1, cleaning bristles are provided on the outer side cleaning roller 7-2-3 and the inner side cleaning roller 7-2-2, and a limiting table 13 is provided on the outer side of the support roller 7-2-1, and the outer side of the limiting table 13 is positioned with respect to the inner side cleaning roller The roller 7-2-2 contacts and drives the inner side cleaning roller 7-2-2 to rotate; one side edge corresponding to the sealing ring is stuck in the installation space, and the inner side of the sealing ring is tightened and limited on the outer surface of the support roller 7-2-1, and then when the extension plate 7-1 rotates, the support roller 7-2-1 rotates under the action of the friction force of the sealing ring, and then drives the inner side cleaning roller 7-2-2 to rotate through the limiting table 13 on the support roller 7-2-1, thereby brushing the squeezed contact surface on the inner side of the sealing ring; because the sealing ring is tightened and limited by the upper and lower limit parts 2-1 and 2-2 when it is tightened, part of the inner surface of the sealing ring is squeezed and contacted with the upper and lower limit parts 2-1 and 2-2, making it more difficult to rinse the stains on the corresponding surface, and then it can be effectively brushed by the above-mentioned self-driven inner side cleaning roller 7-2-2, thereby ensuring the cleaning quality of the sealing ring.

[0041] At the same time, further, Figure 9 and Figure 10 As shown, the cleaning shaft 6 in this embodiment is provided with an auxiliary balancing plate 9 which is arranged opposite to the extension plate 7-1 and extends in the opposite direction to the extension plate 7-1. The auxiliary balancing plate 9 is provided with an auxiliary rotating plate 10. The auxiliary rotating plate 10 is provided with an auxiliary driving surface 11 which is arranged opposite to the rotating driving surface 8. A rotation gap is provided between the auxiliary driving surface 11 and the outer side of the support plate 5-1-2 in the vertical direction. In this application, an auxiliary rotating plate 10 is provided, which can counterweight the extension plate 7-1 and further assist the rotation of the extension plate 7-1 through the auxiliary driving surface 11.

[0042] Correspondingly, this embodiment also discloses a method for using a cleaning machine with a built-in cassette sealing ring independent mounting structure, comprising the following steps:

[0043] Step 1: Remove the sealing ring from the film cassette, stretch the sealing ring in the vertical direction so that the two ends of the sealing ring are respectively clamped in the limit clamping grooves 17 of the upper and lower limit parts 2-1 and 2-2, and then stretch one side of the sealing ring and clamp it in the installation space between the support roller 7-2-1 and the outer side cleaning roller 7-2-3, so that the sealing ring is tightened as a whole and set outside the upper and lower limit parts 2-1, 2-2 and the support roller 7-2-1;

[0044] Step 2: Start the cleaning machine so that the rotating loading frame 1 is driven to rotate by the driving device; during the rotation process, the auxiliary driving surface 11 and the rotating driving surface 8 drive the extension plate 7-1 and the rotating part 7-2 to rotate under the drive of wind force; so that the extension plate 7-1 can stretch the side of the corresponding sealing ring outward for spraying when it rotates to different positions, and at the same time, the supporting roller 7-2-1 rotates under the action of the friction force of the sealing ring, and then drives the inner side cleaning roller 7-2-2 to rotate through the limiting table 13, so that the inner side cleaning roller 7-2-2 rotates relative to the inner side of the sealing ring to brush the inner side of the sealing ring.

[0045] The above description is merely a preferred embodiment of the present invention and does not constitute any form of limitation to the present invention. Although the present invention has been disclosed as above in terms of a preferred embodiment, it is not intended to limit the present invention. Any person skilled in the art can, without departing from the scope of the technical solution of the present invention, make some changes or modifications to equivalent embodiments using the technical contents disclosed above. However, any brief modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention are still within the scope of the technical solution of the present invention.

Claims

1. A cleaning machine with a built-in film cassette sealing ring independent mounting structure, comprising a rotating loading frame (1) rotating along a vertical central axis, a plurality of spaced-apart hanging frames (5) mounted around the rotating loading frame (1) for hanging film cassettes, the hanging frames (5) comprising a frame body (5-1) extending vertically and a plurality of hanging rods (5-2) vertically distributed on the frame body (5-1), and characterized by: A sealing ring fixing device is provided on the outer wall of the frame (5-1), and the sealing ring fixing device comprises upper and lower limiting parts (2-1, 2-2) fixed to the outer wall of the frame (5-1) at relative intervals, and an intermediate limiting part (3) arranged between the upper and lower limiting parts (2-1, 2-2) and fixed to the outer wall of the frame (5-1); the upper and lower limiting parts (2-1, 2-2) tighten the sealing ring up and down and lock the sealing ring through the intermediate limiting part (3); The intermediate limiting portion (3) includes a cleaning shaft (6) arranged on the support plate (5-1-2) and an extended traction rod (7) arranged outside the cleaning shaft (6) and stretching and pulling one side of the sealing ring outward, the cleaning shaft (6) is rotatably connected to the support plate (5-1-2) and horizontally extended along the diameter direction of the vertical center axis of the rotating loading frame (1), the extended traction rod (7) includes an extension plate (7-1) fixed on the outside of the cleaning shaft (6), and a rotating portion (7-2) rotatably connected to the outside of the extension plate (7-1) for limiting the sealing ring, the rotation plane of the extension plate (7-1) is coincident with the diameter direction of the vertical center axis of the rotating loading frame (1), the outside of the extension plate (7-1) is provided with a rotating driving surface (8) arranged to be gradually inclined to the left or right from top to bottom, and a channel space higher than the upper and lower limiting portions (2-1, 2-2) is provided between the extension plate (7-1) and the support plate (5-1-2); The rotating portion (7-2) comprises an outer side cleaning roller (7-2-3) rotatably connected to the outer end of the extension plate (7-1), a pair of support rollers (7-2-1) rotatably connected to the extension plate (7-1), and an inner side cleaning roller (7-2-2) rotatably connected to the extension plate (7-1) and located between the support rollers (7-2-1), and a mounting plate for accommodating a sealing ring is provided between the outer side cleaning roller (7-2-3) and the support rollers (7-2-1). The inner side cleaning roller (7-2-2) is arranged relative to the supporting roller (7-2-1) away from the sealing ring, the outer side cleaning roller (7-2-3) and the inner side cleaning roller (7-2-2) are both provided with cleaning bristles, and the outer side of the supporting roller (7-2-1) is provided with a limiting truncated cone (13) limited on the outer side of the sealing ring, and the outer side of the limiting truncated cone (13) contacts the inner side cleaning roller (7-2-2) and drives the inner side cleaning roller (7-2-2) to rotate.

2. The cleaning machine with a built-in cassette sealing ring independent mounting structure according to claim 1, characterized in that: The upper and lower limiting parts (2-1, 2-2) include a first connecting part (15) fixedly connected to the outer side wall of the frame (5-1), a limiting block (16) provided on the first connecting part (15) and protruding outward, and a limiting slot (17) provided on the limiting block (16) relatively away from the upper and lower limiting parts (2-1, 2-2) on the other side.

3. A cleaning machine with a built-in cassette sealing ring independent mounting structure according to claim 1 or 2, characterized in that: The intermediate limiting portion (3) comprises a second connecting portion (3-1) fixedly connected to the outer wall of the frame (5-1), a pair of limiting plates (3-3) extending outward and spaced apart to form an accommodating space (3-2), and blocking blocks (3-4) respectively arranged on the inner sides of the limiting plates (3-3) and extending toward the accommodating space (3-2). The limiting plates (3-3) tighten the sealing ring inward and limit the sealing ring inside the accommodating space (3-2) through the blocking blocks (3-4).

4. The cleaning machine with a built-in cassette sealing ring independent mounting structure according to claim 3, characterized in that: The rotating loading frame (1) comprises a cylindrical frame body (4), the cylindrical frame body (4) comprises a pair of upper and lower outer frame plates (4-1, 4-2) arranged relatively spaced apart and a connecting column (4-3) connected between the upper and lower outer frame plates (4-1, 4-2), and the suspension frame (5) is rotatably connected between the upper and lower outer frame plates (4-1, 4-2).

5. The cleaning machine with a built-in cassette sealing ring independent mounting structure according to claim 4, characterized in that: The frame body (5-1) comprises a pair of upper and lower connecting plates (5-1-1) respectively arranged at the edges of the upper and lower outer frame plates (4-1, 4-2), and a support plate (5-1-2) connected between the upper and lower connecting plates (5-1-1) to form a side wall, wherein the cross section of the support plate (5-1-2) on the horizontal plane is arranged along the diameter direction of the vertical central axis of the rotating loading frame (1), and the sealing ring fixing device is arranged on the outer side surface of the support plate (5-1-2).

6. The cleaning machine with a built-in cassette sealing ring independent mounting structure according to claim 5, characterized in that: An end of the outer side surface of the support plate (5-1-2) away from the central axis is provided with a blocking reflection surface (14) located outside the sealing ring fixing device and extending outwardly.

7. The cleaning machine with a built-in cassette sealing ring independent mounting structure according to claim 1, characterized in that: The cleaning shaft (6) is provided with an auxiliary balancing plate (9) which is arranged opposite to the extension plate (7-1) and extends in the opposite direction to the extension plate (7-1). The auxiliary balancing plate (9) is provided with an auxiliary rotating plate (10). The auxiliary rotating plate (10) is provided with an auxiliary driving surface (11) which is arranged opposite to the rotating driving surface (8). A rotating gap is provided between the auxiliary driving surface (11) and the outer side of the support plate (5-1-2) in the vertical direction.

8. A method for using a cleaning machine with a built-in cassette sealing ring independent mounting structure according to claim 7, comprising the following steps: Step 1: Remove the sealing ring from the film box, stretch the sealing ring in the vertical direction and make the two ends of the sealing ring respectively clamped in the limit clamping grooves (17) of the upper and lower limit parts (2-1, 2-2), and then stretch one side of the sealing ring and clamp it in the installation space between the support roller (7-2-1) and the outer side cleaning roller (7-2-3), so that the sealing ring is tightened as a whole and set on the outer side of the upper and lower limit parts (2-1, 2-2) and the support roller (7-2-1); Step 2: Start the cleaning machine so that the rotating loading frame (1) is driven to rotate by the driving device; during the rotation process, the auxiliary driving surface (11) and the rotating driving surface (8) drive the extension plate (7-1) and the rotating part (7-2) to rotate under the drive of wind; so that when the extension plate (7-1) rotates to different positions, the side of the corresponding sealing ring is stretched outward for spraying, and at the same time, the supporting roller (7-2-1) rotates under the action of the friction force of the sealing ring, and then drives the inner side cleaning roller (7-2-2) to rotate through the limiting circular table (13), so that the inner side cleaning roller (7-2-2) rotates relative to the inner side of the sealing ring to brush the inner side of the sealing ring.

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