Multifunctional dust collector for cleaning chamber of thin film deposition equipment

Abstract

The invention provides a multifunctional dust collector for cleaning a film deposition equipment cavity, and relates to the field of dust collectors, the multifunctional dust collector comprises a dust collector body, a water filter pipe is fixedly installed in the dust collector body, and a water filter device is installed above the end, located in the dust collector body, of the water filter pipe; the dust collector body is filled with clean water, and a dry-wet motor is installed on the inner top wall of the dust collector body. According to the device, through cooperation of the dust collector body, the water filtering pipe, the water filtering device, clean water, the polymer sponge filtering device, the dry-wet motor, the air outlet, the blow-down valve, the magnetic attraction mechanism and the ultrasonic dust collection mechanism, the magnetic attraction mechanism and the ultrasonic dust collection mechanism can be used for cleaning film particles adhered to a cavity in a targeted mode; the water circulation filtering device is used for dedusting and filtering, the device is easy to manufacture and low in cost, fine filtering and multi-layer filtering can be achieved, and secondary pollution is avoided.

Description

Technical Field

[0001] The invention relates to a multifunctional vacuum cleaner, in particular to a multifunctional vacuum cleaner for cleaning a chamber of a thin film deposition device, and belongs to the technical field of vacuum cleaners. Background Art

[0002] At present, the chambers of thin film deposition equipment are cleaned with ordinary industrial vacuum cleaners. However, as the film continues to accumulate, the condensed film on the side wall of the chamber cannot be completely adsorbed. Especially for metal-plated chambers, the adsorption force between the film and the chamber is stronger, and ordinary vacuum cleaners cannot adsorb it at all. This makes it difficult to clean the chamber and also affects the quality of the film.

[0003] Nowadays, vacuum cleaner filter devices generally use bag-type microporous filtration, which has the problem of low initial filtration effect and is easy to cause "secondary pollution". As the dirt increases, the pores are blocked, causing the suction force to decrease and the motor suction power to be reduced. When removing the dirt, it is easy to cause "secondary pollution" again and the process is inconvenient and unhygienic. Moreover, during the entire process of cleaning the chamber, we noticed that the brightness inside the chamber was not ideal and the light was very dim, which brought great inconvenience to the cleaning work and may lead to some potential problems. Summary of the invention

[0004] 1. Technical issues to be resolved

[0005] The purpose of the present invention is to provide a multifunctional vacuum cleaner for cleaning the chamber of a thin film deposition device in order to solve the above-mentioned problem, so as to solve the problem that the bag-type microporous filtration commonly used in the prior art has low initial filtration effect and is prone to cause "secondary pollution".

[0006] (II) Technical solution

[0007] The present invention is implemented through the following technical scheme: a multifunctional vacuum cleaner for cleaning the chamber of a thin film deposition equipment, comprising a vacuum cleaner body, a water filter tube is fixedly installed inside the vacuum cleaner body, a water filter device is installed above one end of the water filter tube inside the vacuum cleaner body, the interior of the vacuum cleaner body is filled with clean water, a dry-wet motor is installed on the inner top wall of the vacuum cleaner body, a polymer sponge filter device is fixedly installed outside the dry-wet motor, two air outlets are installed on the upper end of the vacuum cleaner body, a connecting pipe is detachably installed on one end of the water filter tube located outside the vacuum cleaner body, a magnetic suction mechanism and an ultrasonic suction mechanism are provided on one end of the connecting pipe away from the vacuum cleaner body, a lighting mechanism is installed on one end of the connecting pipe away from the vacuum cleaner body, and a power switch is installed above the vacuum cleaner body.

[0008] Preferably, the magnetic suction mechanism comprises a magnetic suction dust suction head, and a magnet, a magnetic suction device and an iron core are fixedly installed inside the magnetic suction dust suction head.

[0009] Preferably, the ultrasonic vacuum cleaner mechanism includes an ultrasonic vacuum cleaner head, an ultrasonic transducer and a radiation plate are fixedly installed inside the ultrasonic vacuum cleaner head, a control device is fixedly installed on the outer surface of the ultrasonic vacuum cleaner head, the ultrasonic transducer is electrically connected to the control device, and a battery device is fixedly installed inside the ultrasonic vacuum cleaner head.

[0010] Preferably, the lighting mechanism comprises a fixing device, which can be fixed at a position of the connecting pipe away from one end of the vacuum cleaner body, and a fixing rod is fixedly connected to the fixing device, and a battery is fixedly connected to the interior of the fixing rod.

[0011] Preferably, a control button is installed on the outer surface of the fixing rod, one end of the fixing rod is fixedly connected to a rotating device, one end of the rotating device is fixedly connected to the outer surface of the lighting lamp, and a magnifying glass is fixedly connected to the inner circumference of the lighting lamp.

[0012] Preferably, a sewage discharge valve is fixedly mounted on the bottom surface of the vacuum cleaner body, and a water inlet valve is fixedly mounted on the side surface of the vacuum cleaner body.

[0013] The present invention provides a multifunctional vacuum cleaner for cleaning the chamber of a thin film deposition device, which has the following beneficial effects:

[0014] 1. The multifunctional vacuum cleaner for cleaning the chamber of the thin film deposition equipment is equipped with a vacuum cleaner body, a water filter tube, a water filter device, clean water, a polymer sponge filter device, a dry and wet motor, an air outlet, a drain valve, a magnetic suction mechanism and an ultrasonic suction mechanism. The magnetic suction mechanism and the ultrasonic suction mechanism can be used to clean the thin film particles adhered to the chamber in a targeted manner, and a water circulation filter device is used for dust removal and filtration. Not only is the device simple to manufacture and low in cost, but it can also perform fine filtration and multi-layer filtration to avoid secondary pollution.

[0015] 2. The multifunctional vacuum cleaner for cleaning the chamber of the thin film deposition equipment is designed with a lighting lamp, a magnifying glass, a rotating device, a control button, a fixing device and a fixing rod. The lighting lamp and the magnifying glass are installed to clearly observe tiny debris and improve work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic cross-sectional view of the overall structure of the present invention;

[0017] Figure 2 It is a cross-sectional view of the magnetic attraction mechanism of the present invention;

[0018] Figure 3 It is a cross-sectional view of the ultrasonic dust collection mechanism of the present invention;

[0019] Figure 4 It is a schematic diagram of the lighting mechanism of the present invention.

[0020]

Main component symbol description

[0021] 1. Vacuum cleaner body; 2. Water filter tube; 3. Water filter device; 4. Clean water; 5. Polymer sponge filter device; 6. Wet and dry motor; 7. Air outlet; 8. Drain valve; 9. Water inlet valve; 10. Power switch; 11. Connecting pipe; 12. Magnetic suction head; 13. Magnet; 14. Magnetic device; 15. Iron core; 16. Ultrasonic transducer; 17. Radiant plate; 18. Control device; 19. Battery device; 20. Light; 21. Magnifying glass; 22. Rotating device; 23. Control button; 24. Fixing device; 25. Fixing rod; 26. Ultrasonic suction head. DETAILED DESCRIPTION

[0022] An embodiment of the present invention provides a multifunctional vacuum cleaner for cleaning a chamber of a thin film deposition device.

[0023] See also Figure 1 , including a vacuum cleaner body 1, a power switch 10 is installed above the vacuum cleaner body 1, a water filter tube 2 is fixedly installed inside the vacuum cleaner body 1, water filtering can be performed through the water filter tube 2, the water filter tube 2 is located above one end of the vacuum cleaner body 1 and a water filter device 3 is installed, the water filter device 3 can use existing water filter materials for filtering, which is the prior art and this application will not go into details, and can filter dust and dirt, the vacuum cleaner body 1 is filled with clean water 4, and the clean water 4 can filter the dirt entering from the outside.

[0024] A dry-wet motor 6 is installed on the inner top wall of the vacuum cleaner body 1, and a polymer sponge filter device 5 is fixedly arranged on the outside of the dry-wet motor 6 to filter the air and facilitate the discharge of the filtered clean air. Two air outlets 7 are installed on the upper end of the vacuum cleaner body 1, and the filtered clean gas can be discharged from the air outlets 7. The water filter tube 2 is located on the outside of the vacuum cleaner body 1. One end is detachably installed with a connecting pipe 11, and the connecting pipe 11 and the vacuum cleaner body 1 can be disassembled using conventional disassembly methods, such as snap-on, threaded connection and other connection methods.

[0025] See also Figure 2 A magnetic suction mechanism and an ultrasonic suction mechanism are provided at one end of the connecting pipe 11 away from the vacuum cleaner body 1. The magnetic suction mechanism includes a magnetic suction head 12. A magnet 13, a magnetic suction device 14 and an iron core 15 are fixedly installed inside the magnetic suction head 12. The ferrous metal particles passing through the magnetic suction head 12 can be adsorbed to prevent these substances from splashing around during the cleaning process. Dust or other debris are sucked into the vacuum cleaner body 1 for water filtration and cleaning.

[0026] See also Figure 3 The ultrasonic vacuuming mechanism includes an ultrasonic vacuuming head 26, an ultrasonic transducer 16 and a radiation plate 17 are fixedly installed inside the ultrasonic vacuuming head 26, a control device 18 is fixedly installed on the outer surface of the ultrasonic vacuuming head 26, the ultrasonic transducer 16 is electrically connected to the control device 18, a battery device 19 is fixedly installed inside the ultrasonic vacuuming head 26, the ultrasonic transducer 16 is used to convert electrical energy into ultrasonic energy, the radiation plate 17 is used to transfer ultrasonic energy to the surface to be cleaned, the control device 18 is used to control the operation of the ultrasonic transducer 16 to achieve automatic control, and a plurality of micropores are provided on the surface of the radiation plate 17, the micropores are used to increase the propagation area of ​​ultrasonic waves and improve the cleaning effect.

[0027] The battery device 19 is used for ultrasonic power supply. In actual use, the ultrasonic cleaner head 26 is installed at the air inlet of the dust collector, the control device 18 is started, the ultrasonic transducer 16 starts to work, generates ultrasonic energy, and transmits it to the surface to be cleaned through the radiation plate 17. The ultrasonic vibration causes dust and particulate matter to fall off the surface and be sucked in and filtered by the vacuum cleaner body 1. A lighting mechanism is installed at the end of the connecting pipe 11 away from the vacuum cleaner body 1.

[0028] See also Figure 4 The lighting mechanism includes a fixing device 24, which can be fixed at a position away from one end of the connecting pipe 11 of the vacuum cleaner body 1. A fixing rod 25 is fixedly connected to the fixing device 24, and a battery is fixedly connected to the inside of the fixing rod 25. A control button 23 is installed on the outer surface of the fixing rod 25. One end of the fixing rod 25 is fixedly connected to a rotating device 22, and one end of the rotating device 22 is fixedly connected to the outer surface of the illuminating lamp 20. The rotating device 22 can be rotated by a pin shaft. During use, the fixing device 24 is used to fix it at the position of the vacuum cleaner head. The control button 23 can be used to adjust the brightness of the lighting mode. The position can be adjusted by the rotating device 22 according to actual needs during use, making the dust removal process more convenient. A magnifying glass 21 is fixedly connected to the inner circumference of the illuminating lamp 20, which can clearly observe tiny debris and improve work efficiency.

[0029] Working principle: When in use, turn on the power switch 10, the vacuum cleaner body 1 starts to work, and the dust-laden air passes through the suction head ( Figure 2 or Figure 3), enters the connecting pipe 11, and then enters the water filter tube 2 inside the vacuum cleaner body 1, in the water filter tube 2, dust and debris are separated out, through strong water filtration, and the filtered clean air is discharged through the air outlet 7 after passing through the polymer sponge filter device 5. When the dust and dirt on the water filter device 3 accumulate to a certain extent, the drain valve 8 is opened to discharge the filtered sewage, and the water inlet valve 9 is opened to replenish the clean water 4 to achieve the effect of recycling. The ultrasonic and magnetic dust collector heads can be used to clean the film particles adhered to the chamber in a targeted manner. The water circulation filtration method can effectively avoid the secondary pollution caused by debris. The combined use can greatly improve the cleanliness of the chamber film and save manpower and financial resources.

[0030] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention to be protected. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A multifunctional vacuum cleaner for cleaning a chamber of a thin film deposition device, comprising a vacuum cleaner body (1), characterized in that: A water filter tube (2) is fixedly installed inside the vacuum cleaner body (1); a water filter device (3) is installed above one end of the water filter tube (2) located inside the vacuum cleaner body (1); clean water (4) is installed inside the vacuum cleaner body (1); a dry-wet motor (6) is installed on the inner top wall of the vacuum cleaner body (1); a polymer sponge filter device (5) is fixedly installed outside the dry-wet motor (6); two air outlets (7) are installed at the upper end of the vacuum cleaner body (1); a connecting pipe (11) is detachably installed at one end of the water filter tube (2) located outside the vacuum cleaner body (1); a magnetic suction mechanism and an ultrasonic suction mechanism are installed at one end of the connecting pipe (11) away from the vacuum cleaner body (1); the magnetic suction mechanism The structure comprises a magnetic suction dust suction head (12), wherein a magnet (13), a magnetic suction device (14) and an iron core (15) are fixedly installed inside the magnetic suction dust suction head (12); the ultrasonic dust suction mechanism comprises an ultrasonic dust suction head (26), wherein an ultrasonic transducer (16) and a radiation plate (17) are fixedly installed inside the ultrasonic dust suction head (26); a control device (18) is fixedly installed on the outer surface of the ultrasonic dust suction head (26), wherein the ultrasonic transducer (16) is electrically connected to the control device (18); a battery device (19) is fixedly installed inside the ultrasonic dust suction head (26); a lighting mechanism is installed at one end of the connecting pipe (11) away from the vacuum cleaner body (1); and a power switch (10) is installed above the vacuum cleaner body (1).

2. A multifunctional vacuum cleaner for cleaning a chamber of a thin film deposition device according to claim 1, characterized in that: The lighting mechanism comprises a fixing device (24), the fixing device (24) can be fixed at a position of the connecting pipe (11) away from one end of the vacuum cleaner body (1), a fixing rod (25) is fixedly connected to the fixing device (24), and a battery is fixedly connected inside the fixing rod (25).

3. A multifunctional vacuum cleaner for cleaning a chamber of a thin film deposition device according to claim 2, characterized in that: A control button (23) is installed on the outer surface of the fixing rod (25), one end of the fixing rod (25) is fixedly connected to a rotating device (22), one end of the rotating device (22) is fixedly connected to the outer surface of the illuminating lamp (20), and a magnifying glass (21) is fixedly connected to the inner circumferential surface of the illuminating lamp (20).

4. A multifunctional vacuum cleaner for cleaning a chamber of a thin film deposition device according to claim 1, characterized in that: A sewage discharge valve (8) is fixedly mounted on the bottom surface of the vacuum cleaner body (1), and a water inlet valve (9) is fixedly mounted on the side surface of the vacuum cleaner body (1).

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