A MEMS angular velocity sensor

Abstract

The application discloses a MEMS angular velocity sensor, which comprises a first driving mass, a second driving mass, a first detecting mass and a second detecting mass, wherein the first detecting mass is located in the first driving mass and is coupled with the first driving mass, the second detecting mass is located in the second driving mass and is coupled with the second driving mass, a torsion mass is coupled with the first detecting mass and the second detecting mass, the first detecting mass, the second detecting mass and the torsion mass form a detecting structure for detecting angular velocity in a first axis direction, and the first axis is perpendicular to a plane where the first detecting mass and the second detecting mass are located. The structure of the MEMS angular velocity sensor can effectively improve the stability of the MEMS angular velocity sensor.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor, in particular to a MEMS angular velocity sensor. BACKGROUND

[0002] MEMS angular velocity sensors are widely used in the fields of consumer electronics, automotive electronics, industrial electronics, etc. In the fields of automotive electronics and industrial electronics, etc., the stability of the MEMS angular velocity sensor is required to be high, and a low Q value (quality factor) is usually required to achieve high stability. SUMMARY

[0003] In view of the above problems, the purpose of the present application is to provide a MEMS angular velocity sensor with high stability.

[0004] According to an aspect of the present application, a MEMS angular velocity sensor is provided, comprising:

[0005] a first driving mass and a second driving mass with the same structure;

[0006] a first detection mass and a second detection mass with the same structure, the first detection mass being located in and coupled to the first driving mass, and the second detection mass being located in and coupled to the second driving mass;

[0007] a torsional pendulum mass coupled to the first detection mass and the second detection mass;

[0008] the first detection mass, the second detection mass, and the torsional pendulum mass form a detection structure for detecting angular velocity in a first axis direction, the first axis being perpendicular to the plane in which the first detection mass and the second detection mass are located.

[0009] Optionally, the torsional pendulum mass is provided with different numbers of damping comb teeth.

[0010] Optionally, the first detection mass, the second detection mass, and the torsional pendulum mass are symmetric about a second axis, the second axis being perpendicular to the first axis.

[0011] Optionally, the center line of symmetry of the torsional pendulum mass coincides with the second axis.

[0012] Optionally, the damping comb teeth in the torsional pendulum mass are symmetric about the second axis as a whole.

[0013] Optionally, the first driving mass and the second driving mass are symmetric about the second axis as a whole.

[0014] Optionally, the first proof mass and the second proof mass are symmetric about the second axis as a whole.

[0015] Optionally, the torsional pendulum mass comprises:

[0016] a first cavity and a second cavity, the first cavity and the second cavity are symmetric about the second axis as a whole, and the damping comb teeth are arranged in the first cavity and the second cavity.

[0017] Optionally, the detection structure further comprises:

[0018] a first coupling beam coupling the torsional pendulum mass and the first proof mass;

[0019] a second coupling beam coupling the torsional pendulum mass and the second proof mass;

[0020] a first anchor point located in the recessed area of the torsional pendulum mass and symmetric about the center line of symmetry of the torsional pendulum mass; and

[0021] a torsional pendulum beam coupling the torsional pendulum mass and the first anchor point.

[0022] Optionally, the detection structure further comprises:

[0023] a plurality of detection beams, the first proof mass is coupled to the first drive mass via a corresponding detection beam, and the second proof mass is coupled to the second drive mass via a corresponding detection beam.

[0024] Optionally, each of the first proof mass and the second proof mass comprises:

[0025] a third cavity;

[0026] a plurality of connecting beams located in the third cavity, dividing the third cavity into a plurality of spaces;

[0027] a first plate located in the third cavity and forming a first detection capacitor with the connecting beams;

[0028] a second plate located in the third cavity and forming a second detection capacitor with the connecting beams,

[0029] wherein one first plate and one second plate are arranged in each space, and the first plate and the second plate in each space are oppositely arranged.

[0030] Optionally, further comprising:

[0031] a plurality of drive beams;

[0032] two groups of anchor points, each group of anchor points comprising a second anchor point and a third anchor point arranged side by side along a third axis direction, each drive mass being coupled with a group of anchor points via a corresponding drive beam, wherein the second anchor point and the third anchor point in each group of anchor points are respectively located on two sides opposite to the drive mass coupled therewith, the third axis being perpendicular to the second axis, and the first axis being perpendicular to the plane formed by the third axis and the second axis.

[0033] Optionally, each of the first drive mass and the second drive mass comprises, internally:

[0034] a fourth cavity;

[0035] a drive push-pull comb finger, located in the fourth cavity, two groups of drive push-pull comb fingers arranged adjacently and oppositely forming a group of push-pull drive capacitors;

[0036] a drive feedback comb finger, located in the fourth cavity, two groups of drive feedback comb fingers arranged adjacently and oppositely forming a group of drive feedback capacitors.

[0037] Optionally, the push-pull drive capacitors in the first drive mass and the second drive mass are symmetrical about the first axis and the second axis as a whole.

[0038] Optionally, the drive feedback capacitors in the first drive mass and the second drive mass are symmetrical about the first axis and the second axis as a whole.

[0039] Optionally, in the drive mode, each of the first drive mass and the second drive mass moves linearly along the third axis direction;

[0040] the first detection mass moves linearly following the first drive mass, and the second detection mass moves linearly following the second drive mass;

[0041] the torsional pendulum mass does not move due to force balance and the constraint of the first anchor point,

[0042] wherein the first drive mass and the second drive mass move in opposite directions.

[0043] Optionally, in the detection mode of angular velocity in the first axis direction, the first detection mass and the second detection mass move linearly along the second axis direction, and the first detection mass and the second detection mass move in opposite directions.

[0044] The first driving mass is not moved due to the constraints of the two side anchors and the decoupling with the first detection mass, and the second driving mass is not moved due to the constraints of the two side anchors and the decoupling with the second detection mass.

[0045] The torsional mass rotates with the first and second detection masses coupled thereto in a plane defined by the second and third axes.

[0046] Optionally, the MEMS angular velocity sensor is symmetrical about the second axis.

[0047] Optionally, the MEMS angular velocity sensor is a single-axis angular velocity sensor for detecting angular velocity in the X-axis direction, or detecting angular velocity in the Y-axis direction, or detecting angular velocity in the Z-axis direction.

[0048] The MEMS angular velocity sensor provided by the application comprises a first driving mass, a second driving mass, a first detection mass, a second detection mass, and a torsional mass. The first detection mass is located in and coupled to the first driving mass, the second detection mass is located in and coupled to the second driving mass, and the torsional mass is coupled to the first and second detection masses. This effectively improves the stability of the MEMS angular velocity sensor.

[0049] Further, the MEMS angular velocity sensor provided by the application can quantitatively and independently reduce the Q value in the detection mode without affecting the Q value in the driving mode by arranging different numbers of damping comb teeth in the torsional mass, thereby effectively improving the stability of the MEMS angular velocity sensor.

[0050] Further, the Q value in the driving mode of the MEMS angular velocity sensor provided by the application is quantitatively and independently adjusted by air pressure, and the Q value in the detection mode is quantitatively and independently adjusted by the number of arranged damping comb teeth, thereby realizing quantitative and independent adjustment of the Q values in the driving and detection modes and improving the flexibility and controllability of the design of the MEMS angular velocity sensor. BRIEF DESCRIPTION OF DRAWINGS

[0051] The above and other objects, features and advantages of the present application will become more apparent from the following description of embodiments of the present application, taken in conjunction with the accompanying drawings, in which:

[0052] Figure 1 Fig. 1 shows a top view of the structure of a MEMS angular velocity sensor according to an embodiment of the present application;

[0053] Figure 2A motion schematic diagram of a driving mode of the MEMS angular velocity sensor provided by the embodiment of the application is shown.

[0054] Figure 3 A motion mode schematic diagram of the MEMS angular velocity sensor provided by the embodiment of the application when having Z-axis direction angular velocity input is shown. DETAILED DESCRIPTION

[0055] Various embodiments of the application will be described in more detail with reference to the drawings. In the various drawings, the same elements are denoted by the same or similar reference numerals. For the sake of clarity, each portion in the drawings is not drawn to scale.

[0056] The specific embodiments of the application will be further described in detail below with reference to the drawings and embodiments.

[0057] In the present application, unless specifically defined and limited otherwise, the terms "mounting", "connected", "connection", "fixed", "coupling" and the like should be interpreted broadly; for example, can be fixed connection, can also be detachable connection, or integrated; can be mechanical connection, can also be electrical connection; can be direct connection, can also be indirectly connected through an intermediate medium, can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0058] Figure 1 A top view structural schematic diagram of the MEMS angular velocity sensor provided by the embodiment of the application is shown.

[0059] The MEMS angular velocity sensor provided by the present application is a single-axis angular velocity sensor, which is used to detect the angular velocity in the X-axis direction, or detect the angular velocity in the Y-axis direction, or detect the angular velocity in the Z-axis direction.

[0060] Exemplarily, the single-axis angular velocity sensor for detecting the angular velocity in the Z-axis direction is taken as an example for description. As shown in Figure 1 The MEMS angular velocity sensor includes a first driving mass 101, a second driving mass 102, a first detection mass 401, a second detection mass 402, and a torsion pendulum mass 501.

[0061] The first driving mass 101 and the second driving mass 102 have the same structure.

[0062] The first detection mass 401 and the second detection mass 402 have the same structure, the first detection mass 401 is located in and coupled to the first drive mass 101, and the second detection mass 402 is located in and coupled to the second drive mass 102. For example, the first detection mass 401 is located in the first opening 115 of the first drive mass 101. The second detection mass 402 is located in the first opening 125 of the second drive mass 102.

[0063] The torsional pendulum mass 501 is coupled to the first detection mass 401 and the second detection mass 402.

[0064] The first detection mass 401, the second detection mass 402, and the torsional pendulum mass 501 form a detection structure for detecting an angular velocity in the direction of the first axis (for example, the direction of the Z axis). The first axis is perpendicular to the plane (for example, the XOY plane) in which the first detection mass 401 and the second detection mass 402 are located.

[0065] Further, the torsional pendulum mass 501 is provided with different numbers of damping combs 502.

[0066] Further, the first detection mass 401, the second detection mass 402, and the torsional pendulum mass 501 are symmetrical as a whole about the second axis (for example, the Y axis), and the second axis is perpendicular to the first axis.

[0067] Further, the center line of symmetry of the torsional pendulum mass 501 coincides with the second axis.

[0068] Further, the damping combs 502 in the torsional pendulum mass 501 are symmetrical as a whole about the second axis.

[0069] Further, the first drive mass 101 and the second drive mass 102 are symmetrical as a whole about the second axis.

[0070] Further, the first detection mass 401 and the second detection mass 402 are symmetrical as a whole about the second axis.

[0071] Further, the MEMS angular velocity sensor is symmetrical about the second axis.

[0072] Further, the torsional pendulum mass 501 includes a first cavity 505 and a second cavity 506, the first cavity 505 and the second cavity 506 are symmetrical as a whole about the second axis, and the first cavity 505 and the second cavity 506 are each provided with the damping combs 502.

[0073] Further, the detection structure further comprises a first coupling beam 415, a second coupling beam 425, a first anchor point 503, and a torsional beam 504. The first coupling beam 415 couples the torsional mass 501 with the first detection mass 401. The second coupling beam 425 couples the torsional mass 501 with the second detection mass 402. The first anchor point 503 is located in the recessed region of the torsional mass 501 and is symmetric about the center line of symmetry of the torsional mass 501. The torsional beam 504 couples the torsional mass 501 with the first anchor point 503.

[0074] Further, the detection structure further comprises a plurality of detection beams. The first detection mass 401 is coupled with the first drive mass 101 via corresponding detection beams 411, 412, 413, and 414. The second detection mass 402 is coupled with the second drive mass 102 via corresponding detection beams 421, 422, 423, and 424.

[0075] Further, a third cavity 416 is formed in the first detection mass 401. A plurality of connecting beams 417 are disposed in the third cavity 416, dividing the third cavity 416 into a plurality of spaces. A first plate 419 and a second plate 418 are disposed in each space, and the first plate 419 and the second plate 418 in each space are oppositely arranged. The first plate 419 and the connecting beam 417 form a first detection capacitor, and the second plate 418 and the connecting beam 417 form a second detection capacitor.

[0076] A third cavity 426 is formed in the second detection mass 402. A plurality of connecting beams 427 are disposed in the third cavity 426, dividing the third cavity 426 into a plurality of spaces. A first plate 429 and a second plate 428 are disposed in each space, and the first plate 429 and the second plate 428 in each space are oppositely arranged. The first plate 429 and the connecting beam 427 form a first detection capacitor, and the second plate 428 and the connecting beam 427 form a second detection capacitor.

[0077] The first detection capacitor and the second detection capacitor are used to detect the angular velocity in the first axis direction.

[0078] Further, the MEMS angular velocity sensor further comprises a plurality of drive beams and two groups of anchor points. Each group of anchor points comprises a second anchor point and a third anchor point arranged side by side along a third axis (e.g., the X axis), and each drive mass is coupled with a group of anchor points via a corresponding drive beam, wherein the second anchor point and the third anchor point in each group of anchor points are respectively located on the opposite sides of the drive mass coupled therewith, the third axis is perpendicular to the second axis, and the first axis is perpendicular to the plane formed by the third axis and the second axis.

[0079] Exemplarily, two sides of the first drive mass 101 are provided with the second anchor point 111 and the third anchor point 112 arranged side by side along the third axis direction, the first drive mass 101 is coupled with the second anchor point 111 via the drive beam 113, and is coupled with the third anchor point 112 via the drive beam 114. Two sides of the second drive mass 102 are provided with the second anchor point 121 and the third anchor point 122 arranged side by side along the third axis direction, the second drive mass 102 is coupled with the second anchor point 121 via the drive beam 123, and is coupled with the third anchor point 122 via the drive beam 124.

[0080] Exemplarily, each drive mass includes three groups of push-pull drive capacitors and one group of drive feedback capacitors.

[0081] The first drive mass 101 is internally provided with the fourth cavity 116, the fourth cavity 116 contains the drive push-pull comb teeth 117 and the drive feedback comb teeth 118, the oppositely arranged drive push-pull comb teeth 117 form a push-pull drive capacitor, and the oppositely arranged drive feedback comb teeth 118 form a drive feedback capacitor.

[0082] The second drive mass 102 is internally provided with the fourth cavity 126, the fourth cavity 116 contains the drive push-pull comb teeth 117 and the drive feedback comb teeth 118, the oppositely arranged drive push-pull comb teeth 127 form a push-pull drive capacitor, and the oppositely arranged drive feedback comb teeth 128 form a drive feedback capacitor.

[0083] Further, the push-pull drive capacitors in the first drive mass 101 and the second drive mass 102 are symmetrical about the first axis and the second axis as a whole. The drive feedback capacitors in the first drive mass 101 and the second drive mass 102 are symmetrical about the first axis and the second axis as a whole.

[0084] The push-pull drive capacitors generate driving force under the action of alternating voltage, and the first drive mass 101 and the second drive mass 102 perform driving motion in the third axis direction with equal amplitude and opposite phase under the action of the driving force. When the angular velocity input in the first axis direction, the first detection mass 401 and the second detection mass 402 generate detection motion in the second axis direction with equal amplitude and opposite phase under the action of the Coriolis force, the first detection capacitor and the second detection capacitor generate differential output, and the output angular velocity can be detected.

[0085] Figure 2 A motion schematic diagram of a driving mode of a MEMS angular velocity sensor is shown.

[0086] As Figure 2As shown, under the action of electrostatic force, the first driving mass 101 and the second driving mass 102 perform linear motion within a plane (XOY plane) defined by the second and third axes, specifically linear motion along the direction of the third axis (e.g., the X-axis direction). The first driving mass 101 and the second driving mass 102 move in opposite directions. For example, the first driving mass 101 moves linearly along the positive direction of the first axis (e.g., the X-axis), and the second driving mass 102 moves linearly along the negative direction of the X-axis. In other embodiments, the second driving mass 102 may also move linearly along the positive direction of the third axis (e.g., the X-axis), and the first driving mass 101 may move linearly along the negative direction of the X-axis.

[0087] The first detection mass block 401 follows the first driving mass block 101 in linear motion along the same direction within the plane (XOY plane) defined by the first and second axes. The second detection mass block 402 follows the second driving mass block 102 in linear motion along the same direction within the plane (XOY plane) defined by the first and second axes. Exemplarily, the second detection mass block 402 moves linearly along the negative direction of a third axis (e.g., the X-axis), while the first detection mass block 401 moves linearly along the positive direction of the X-axis. In other embodiments, the second detection mass block 402 moves linearly along the positive direction of the third axis (e.g., the X-axis), while the first detection mass block 401 moves linearly along the negative direction of the X-axis.

[0088] Since the two detection mass blocks (first detection mass block 401 and second detection mass block 402) move with equal amplitude and opposite phase, the coupling beams 415 and 425 coupled with the torsion mass block 501 undergo deformation with opposite phase. The torsion beam 504 and the torsion mass block 501 do not move due to force balance. Therefore, in the driving mode, the damping comb teeth 502 inside the torsion mass block 501 do not move, do not generate additional damping, and do not affect the Q value in the driving mode.

[0089] In the driving mode, a lower Q value is achieved by using the drive push-pull comb teeth and drive feedback comb teeth set in the drive mass block, as well as by regulating the internal air pressure.

[0090] Figure 3 This paper illustrates a schematic diagram of the motion modes of a MEMS angular velocity sensor provided in an embodiment of this application when it has an angular velocity input in the Z-axis direction.

[0091] like Figure 3 As shown, when there is an angular velocity input in the Z-axis direction, each of the first detection mass block 401 and the second detection mass block 402 moves linearly along the second axis direction, and the movement directions of the first detection mass block 401 and the second detection mass block 402 are opposite.

[0092] The first driving mass 101 does not move due to the constraints of the two side anchors and the decoupling between the first detection mass 401. The second driving mass 102 does not move due to the constraints of the two side anchors and the decoupling between the second detection mass 402.

[0093] The torsional pendulum mass 501 rotates with the first detection mass 401 and the second detection mass 402 coupled thereto in the plane defined by the second axis and the third axis.

[0094] When there is an angular velocity input in the Z-axis direction, the first detection capacitor and the second detection capacitor change. Therefore, the angular velocity in the Z-axis direction is obtained by calculating the change of the detection capacitors.

[0095] In the detection mode, the first detection mass 401 and the second detection mass 402 move vertically with equal amplitude and opposite phase, and the torsional pendulum mass 501 follows the movement of the first detection mass 401 and the second detection mass 402 to move in the plane. At this time, the gap of the damping comb teeth 502 inside the torsional pendulum mass 501 changes, and the increase or decrease of the gap causes a large film damping between the damping comb teeth 502, which can further increase the damping in the detection mode, thereby reducing the Q value of the detection mode and improving the stability.

[0096] The present application can produce quantitative film damping by arranging different numbers or gaps of damping comb teeth 502 to quantitatively control the Q value of the MEMS angular velocity sensor in the detection mode.

[0097] It should be noted that the Q value control of the MEMS angular velocity sensor of the present application can maintain the Q value in the driving mode unchanged and quantitatively reduce the Q value in the detection mode under the premise that the internal air pressure remains unchanged.

[0098] Further, the Q value in the driving mode is quantitatively controlled separately by air pressure adjustment, and the Q value in the detection mode is quantitatively controlled separately by the number of arranged damping comb teeth, thereby realizing the quantitative separate control of the Q values in the driving and detection modes and improving the flexibility and controllability of the design of the MEMS angular velocity sensor.

[0099] In accordance with the embodiments of the present application as described above, these embodiments do not exhaustively describe all the details and do not limit the present application to only the specific embodiments described. Obviously, many modifications and changes can be made according to the above description. The present application selects and specifically describes these embodiments in order to better explain the principles and practical applications of the present application, so that those skilled in the art can well utilize the present application and make modifications and uses based on the present application. The present application is limited only by the claims and their entire scope and equivalents.

Claims

1. A MEMS angular velocity sensor, wherein, include: The first driving mass block and the second driving mass block have the same structure; A first detection mass block and a second detection mass block with identical structures, wherein the first detection mass block is located within and coupled to the first driving mass block, and the second detection mass block is located within and coupled to the second driving mass block; A torsional mass block is coupled to the first detection mass block and the second detection mass block. The torsional mass block includes a first cavity and a second cavity, and damping comb teeth are provided in both the first cavity and the second cavity. The first detection mass block, the second detection mass block, and the torsional mass block constitute a detection structure for detecting the angular velocity along a first axis. The first axis is perpendicular to the plane containing the first and second detection mass blocks. The detection structure also includes: The first anchor point is symmetrical about the center line of the torsional mass block; as well as A torsion beam couples the torsion mass block to the first anchor point.

2. The MEMS angular velocity sensor according to claim 1, wherein, The torsional mass block is equipped with a different number of damping comb teeth.

3. The MEMS angular velocity sensor according to claim 1, wherein, The first detection mass block, the second detection mass block, and the torsional mass block are symmetrical about the second axis, which is perpendicular to the first axis.

4. The MEMS angular velocity sensor according to claim 1, wherein, The center line of symmetry of the torsional mass block coincides with the second axis.

5. The MEMS angular velocity sensor according to claim 2, wherein, The damping comb teeth in the torsional mass block are symmetrical about the second axis.

6. The MEMS angular velocity sensor according to claim 1, wherein, The first driving mass block and the second driving mass block are symmetrical about the second axis.

7. The MEMS angular velocity sensor according to claim 1, wherein, The first detection mass block and the second detection mass block are symmetrical about the second axis.

8. The MEMS angular velocity sensor according to claim 5, wherein, The first cavity and the second cavity are symmetrical about the second axis.

9. The MEMS angular velocity sensor according to claim 1, wherein, The detection structure also includes: The first coupling beam couples the torsional mass block to the first detection mass block; The second coupling beam couples the torsional mass block to the second detection mass block. The first anchor point is located within the recessed area of ​​the torsional mass block.

10. The MEMS angular velocity sensor according to claim 1, wherein, The detection structure also includes: Multiple detection beams are provided, wherein the first detection mass block is coupled to the first driving mass block via a corresponding detection beam, and the second detection mass block is coupled to the second driving mass block via a corresponding detection beam.

11. The MEMS angular velocity sensor according to claim 1, wherein, Each of the first and second detection quality blocks includes: The third cavity; Multiple connecting beams are located within the third cavity, dividing the third cavity into multiple spaces; A first plate is located inside the third cavity and forms a first detection capacitor with the connecting beam; The second plate, located within the third cavity, forms a second detection capacitor with the connecting beam. Each space contains a first plate and a second plate, with the first plate and the second plate in each space positioned opposite each other.

12. The MEMS angular velocity sensor according to claim 1, wherein, Also includes: Multiple drive beams; Two sets of anchor points, each set including a second anchor point and a third anchor point arranged side by side along the third axis, each driving mass block being coupled to a set of anchor points via a corresponding driving beam, wherein the second anchor point and the third anchor point in each set are located on opposite sides of the driving mass block coupled thereto, the third axis being perpendicular to the second axis, and the first axis being perpendicular to the plane formed by the third axis and the second axis.

13. The MEMS angular velocity sensor according to claim 1, wherein, Each of the first and second drive mass blocks includes: Fourth cavity; The push-pull comb teeth are located in the fourth cavity, and two sets of push-pull comb teeth arranged adjacently and oppositely form a push-pull drive capacitor. The drive feedback comb teeth are located in the fourth cavity, and two sets of drive feedback comb teeth arranged adjacent to each other form a set of drive feedback capacitors.

14. The MEMS angular velocity sensor according to claim 13, wherein, The push-pull drive capacitors in the first drive mass block and the second drive mass block are symmetrical about the first axis and the second axis.

15. The MEMS angular velocity sensor according to claim 13, wherein, The drive feedback capacitors in the first drive mass block and the second drive mass block are symmetrical about the first axis and the second axis.

16. The MEMS angular velocity sensor according to claim 9, wherein, In the driving mode, each of the first driving mass block and the second driving mass block moves linearly along the third axis. The first detection mass block follows the first driving mass block in a linear motion, and the second detection mass block follows the second driving mass block in a linear motion. The torsional mass block does not move due to force balance and the constraint of the first anchor point. The first driving mass block moves in the opposite direction to the second driving mass block.

17. The MEMS angular velocity sensor according to claim 12, wherein, During the detection mode of angular velocity along the first axis, the first detection mass block and the second detection mass block move linearly about the direction along the second axis, with the directions of motion of the first detection mass block and the second detection mass block being opposite. The first driving mass block does not move due to the constraints of the anchor points on both sides and the decoupling from the first detection mass block; the second driving mass block does not move due to the constraints of the anchor points on both sides and the decoupling from the second detection mass block. The torsional mass block rotates within a plane defined by the second and third axes, along with the first and second detection mass blocks coupled thereto.

18. The MEMS angular velocity sensor according to claim 1, wherein, The MEMS angular velocity sensor is symmetrical about the second axis.

19. The MEMS angular velocity sensor according to claim 1, wherein, The MEMS angular velocity sensor is a single-axis angular velocity sensor used to detect angular velocity in the X-axis direction, or angular velocity in the Y-axis direction, or angular velocity in the Z-axis direction.

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