Optimization method and system of opc model, device and storage medium

By combining global and local search algorithms to optimize the nonlinear parameters of the OPC model, the problem of insufficient parameter optimization in the OPC model is solved, the accuracy and reliability of the model are improved, and the effect of optical proximity correction is optimized.

CN119200316BActive Publication Date: 2026-06-30SEMICON MFG INT (SHANGHAI) CORP
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SEMICON MFG INT (SHANGHAI) CORP
Filing Date
2023-06-26
Publication Date
2026-06-30

AI Technical Summary

Technical Problem

In the existing technology, the methods for obtaining OPC model parameters still need to be optimized, which leads to a decrease in the accuracy and reliability of the OPC model.

Method used

A global search algorithm is used to perform the first search process on the nonlinear parameter, generating multiple first candidate values. A smaller second search range is then set based on these candidate values. A local search algorithm is then used for the second search process. The global and local search algorithms are combined to avoid getting trapped in local optima.

Benefits of technology

It improves the accuracy and reliability of the OPC model, reduces the amount of computation and shortens the running time, and optimizes the effect of optical proximity correction.

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Abstract

An optimization method, system, device, and storage medium for an OPC model are disclosed. The OPC model includes nonlinear parameters. The optimization method includes: performing a first initialization process on the nonlinear parameters to determine a first search range; based on the first search range, performing a first search process on the nonlinear parameters using a global search algorithm to generate multiple first candidate values ​​corresponding to each nonlinear parameter; setting a second search range based on the multiple first candidate values, wherein the second search range is smaller than the first search range; and performing a second search process on the nonlinear parameters using a local search algorithm based on the second search range to obtain final candidate values. This invention improves the optimization effect of the OPC model, enhancing its accuracy and reliability.
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