A micro-motion stage based on patch ultrasonic motor drive

Abstract

The invention discloses a micro-motion table driven by a patch ultrasonic motor, relates to the field of micro-motion platforms, solves the problem that the existing micro-motion table easily causes lateral displacement between a magnetic adsorption strip and a working surface driven by a slider, comprises: a base and an ultrasonic driving seat fixedly installed on the top of the base, a working table is arranged above the ultrasonic driving seat, a magnetic adsorption guide rail matched with the ultrasonic driving seat is fixedly installed at the bottom of the working table, two symmetrically distributed U-shaped frames are fixedly installed at the bottom of the base, a sliding bar is fixedly installed between the two ends of the U-shaped frame; further comprises: a self-locking mechanism for positioning and locking the working table, the self-locking mechanism is installed on the top of the base; the invention can perform multi-point vacuum adsorption on the bottom of the sliding bar through the self-locking mechanism when the ultrasonic driving seat is powered off, quickly fix the sliding bar, realize automatic locking of the working table, solve the problem that the staff is prone to offset when touching the working table, and thus achieve the effect of quick locking.

Description

Technical Field

[0001] The invention relates to the field of micro-motion platforms, in particular to a micro-motion platform driven by a patch ultrasonic motor. Background Art

[0002] Ultrasonic motor technology is a new technology that combines vibration, wave mechanics, tribology, dynamic design, power electronics, automatic control, new materials and new processes. It uses the inverse piezoelectric effect and ultrasonic vibration of piezoelectric ceramics to obtain its motion and torque, and converts the microscopic deformation of the material into the macroscopic motion of the rotor through mechanical resonance amplification and friction coupling. In this new type of motor, piezoelectric ceramic material disks replace numerous copper coils.

[0003] The micro-motion stage is a platform that uses an ultrasonic motor to utilize the inverse piezoelectric effect of piezoelectric materials and friction transmission to achieve high-precision, high-response speed micro-displacement operations. The existing Chinese public patent document: CN118413128A discloses a micro-motion stage driven by a patch ultrasonic motor. When the piezoelectric ceramic is no longer powered, the pre-tightening hinge will lock the motor position, and its pre-tightening force can offset the unstable vibration of the air-floating guide rail. The power-off self-locking function can improve the repeatability of the air-floating guide mechanism. When the slider stops moving, it needs to use a magnetic adsorption iron bar to position and adsorb the working surface on the convex bar. However, when the staff accidentally touches the slider, it is easy to cause the slider to drive the magnetic adsorption bar and the working surface to produce a lateral displacement, causing an error in the position between the slider and the convex bar. Summary of the invention

[0004] The purpose of the present invention is to provide a micro-motion stage driven by a patch ultrasonic motor to solve the problems raised in the above background technology.

[0005] To achieve the above object, the present invention provides the following technical solutions:

[0006] A micro-motion table driven by a patch ultrasonic motor comprises: a base and an ultrasonic drive seat fixedly mounted on the top of the base, a workbench is arranged above the ultrasonic drive seat, a magnetic guide rail matched with the ultrasonic drive seat is fixedly mounted on the bottom of the workbench, the ultrasonic drive seat cooperates with the magnetic guide rail to make the workbench move linearly, two symmetrically distributed U-shaped frames are fixedly mounted on the bottom of the base, a sliding rod is fixedly mounted between the two ends of the U-shaped frame; it also comprises: a self-locking mechanism for positioning and locking the workbench, the self-locking mechanism is mounted on the top of the base; a pressure rod mechanism for improving the stability of locking the workbench, the pressure rod mechanism is mounted between the sliding rod and the base; a dustproof mechanism for providing protection for the ultrasonic drive seat, the dustproof mechanism is mounted on the bottom of the workbench.

[0007] Preferably, the self-locking mechanism includes two mounting plates symmetrically fixedly mounted on the top of the base, a mounting box is fixedly mounted on the top of the mounting plate, a groove is provided on the top of the mounting box for the sliding bar to limit the sliding, a plurality of vacuum suction cups equidistantly distributed are provided at the bottom of the sliding bar, and the suction and locking of the sliding bar are achieved by the vacuum suction cups, a movable plate is fixedly mounted on the outer side of the vacuum suction cup, a bottom plate fixedly mounted on the bottom inner wall of the mounting box is provided below the movable plate, and two support rods symmetrically sliding through the movable plate are fixedly mounted on the top of the bottom plate to provide the movable plate with a plurality of support rods symmetrically sliding through the movable ... The movement provides guidance, a positioning frame is fixedly installed at the bottom of the movable plate, a push block is fixedly installed at the bottom of the positioning frame, and a plurality of electric push rods equidistantly distributed are fixedly installed on both sides of the ultrasonic drive seat, the number of the electric push rods is the same as the number of the push blocks, and a push plate that slides through the installation box is fixedly installed at the output end of the electric push rod, the push plate is located below the positioning frame, one side of the push block is a slope structure, and a groove for limiting the insertion of the push block is provided on the top of the push plate, so that the push plate can push the push block to move upward when moving, thereby realizing the adsorption of the sliding rod by the vacuum suction cup.

[0008] Preferably, the pressure rod mechanism includes a plurality of top plates equidistantly arranged directly above the sliding rod, the number of the top plates is the same as the number of the vacuum suction cups, each top plate is respectively located directly above each vacuum suction cup, two symmetrically distributed mounting rods are fixedly installed at the bottom of the top plate, a positioning cylinder is slidably installed on the outer side of the mounting rod, the positioning cylinder is fixedly installed on the inner side of the mounting box, so that the positioning cylinder provides guidance and positioning for the mounting rod, a U-shaped clip is fixedly installed at one end of the mounting rod away from the top plate, and two The mounting blocks are respectively located on the inner sides of the two U-shaped clamps, and two symmetrically distributed pull rods are fixedly installed on the outer sides of the mounting blocks. The outer sides of the U-shaped clamps are provided with oblique grooves for the pull rods to limit the sliding of the pull rods, so that when the push plate moves, it can move along the oblique grooves of the U-shaped clamps through the pull rods on the mounting blocks. A tension spring is provided on the outer side of the pull rods, and the tension spring is fixedly installed between the U-shaped clamps and the positioning cylinder. A pressure ball is provided under the top plate, and positioning blocks are rotatably installed at both ends of the pressure ball, and a spring is fixedly installed between the positioning block and the top plate.

[0009] Preferably, the dustproof mechanism includes a protective frame fixedly mounted on the bottom of the workbench, the size of the protective frame is smaller than the size of the workbench, a baffle frame is fixedly mounted on the inner side of the bottom of the protective frame, the ultrasonic drive seat and the mounting plate are both located on the inner side of the baffle frame, a rubber ring is provided at the bottom of the protective frame, an insertion strip is fixedly mounted on the top of the rubber ring, a slot for limiting the insertion of the insertion strip is opened at the bottom of the protective frame, a rubber strip is fixedly mounted on the bottom of the rubber ring, the outer side of the rubber strip is an arc-shaped structure, and the bottom of the rubber strip is in contact with the top of the base.

[0010] Preferably, U-shaped frames are fixedly mounted on both ends of the installation box, and the inner side of the U-shaped frame contacts the outer side of the slide bar to provide auxiliary support for the movement of the slide bar.

[0011] Preferably, a second spring is provided on the outer side of the support rod, and the second spring is fixedly installed between the bottom plate and the movable plate, and is used for pulling the movable plate to reset downward.

[0012] Preferably, a support tube is provided on the outer side of the second spring, and the support tube is fixedly installed on the top of the bottom plate to prevent the second spring from bending when rebounding, thereby providing positioning for the second spring.

[0013] Preferably, an arc-shaped groove matching with the pressure ball is provided at the bottom of the top plate, so that the pressure ball can contact with the arc-shaped groove of the top plate.

[0014] Preferably, a mounting strip is provided on the top of the top plate, and two guide rods sliding through the top plate are fixedly installed on the bottom of the mounting strip, and the bottom ends of the two guide rods are respectively fixedly connected to the tops of the two positioning blocks to provide guidance and support for the movement of the positioning blocks.

[0015] Preferably, a plurality of anti-slip strips symmetrically distributed in the center are fixedly installed on the outer side of the insert, and the anti-slip strips are made of rubber material to improve the convenience of installing the insert.

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] The present invention uses a self-locking mechanism to perform multi-point vacuum adsorption on the bottom of the slide bar when the ultrasonic drive base is powered off, so as to quickly fix the slide bar and realize automatic locking of the workbench, thereby solving the problem of easy deviation when the staff touches the workbench, thereby achieving the effect of rapid locking.

[0018] The present invention uses a pressure rod mechanism to elastically press the top of the sliding rod when the vacuum suction cup adsorbs the bottom of the sliding rod, so that each pressure ball corresponds to each vacuum suction cup one by one, thereby improving the adsorption efficiency of the vacuum suction cup on the sliding rod, thereby achieving the effect of stably locking the workbench.

[0019] The present invention can provide protection for the ultrasonic drive seat and the magnetic guide rail through the dustproof mechanism, prevent dust from entering between the workbench and the base, and maintain the sealing of the ultrasonic drive seat and the magnetic guide rail when the workbench moves, thereby achieving the effects of safety protection and dustproof. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0021] Figure 2 It is a schematic diagram of the structure of the workbench and the protection frame in the present invention;

[0022] Figure 3 It is a schematic diagram of the structure of the ultrasonic drive seat and the magnetic guide rail in the present invention;

[0023] Figure 4 It is a schematic diagram of the structure of the installation box and the installation plate in the present invention;

[0024] Figure 5 It is a schematic diagram of the structure of the vacuum suction cup and the sliding rod in the present invention;

[0025] Figure 6 It is a schematic diagram of the push plate and push block structure in the present invention;

[0026] Figure 7 It is a schematic diagram of the top plate and U-shaped clip structure in the present invention;

[0027] Figure 8 for Figure 2 Schematic diagram of the enlarged structure of area A in the middle.

[0028] In the figure: 1. base; 2. ultrasonic drive seat; 3. workbench; 4. magnetic guide rail; 5. U-shaped frame; 6. slide bar; 7. mounting plate; 8. mounting box; 9. vacuum suction cup; 10. push plate; 11. movable plate; 12. bottom plate; 13. support rod; 14. positioning frame; 15. push block; 16. electric push rod; 17. top plate; 18. mounting rod; 19. positioning cylinder; 20. U-shaped clip; 21. mounting block; 22. pull rod; 23. tension spring; 24. pressure ball; 25. positioning block; 26. spring one; 27. protective frame; 28. stop frame; 29. ​​rubber ring; 30. insert strip; 31. rubber strip; 32. U-shaped frame; 33. spring two; 34. support cylinder; 35. mounting strip; 36. guide rod; 37. anti-slip strip. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0030] Example 1: Please refer to Figure 1-Figure 7 The figure shows a micro-motion table driven by a patch ultrasonic motor, including a base 1 and an ultrasonic driving seat 2 fixedly installed on the top of the base 1, a workbench 3 is arranged above the ultrasonic driving seat 2, a magnetic guide rail 4 matched with the ultrasonic driving seat 2 is fixedly installed at the bottom of the workbench 3, the ultrasonic driving seat 2 cooperates with the magnetic guide rail 4 to make the workbench 3 move linearly, two symmetrically distributed U-shaped frames 5 are fixedly installed at the bottom of the base 1, and a slide bar 6 is fixedly installed between the two ends of the U-shaped frame 5; it also includes: a self-locking mechanism for positioning and locking the workbench 3, and the self-locking mechanism is installed at the top of the base 1; a pressure rod mechanism for improving the stability of locking the workbench 3, and the pressure rod mechanism is installed between the slide bar 6 and the base 1; a dustproof mechanism for providing protection for the ultrasonic driving seat 2, and the dustproof mechanism is installed at the bottom of the workbench 3.

[0031] The self-locking mechanism includes two mounting plates 7 symmetrically fixedly mounted on the top of the base 1, a mounting box 8 is fixedly mounted on the top of the mounting plate 7, a groove for limiting the sliding of the slide bar 6 is provided on the top of the mounting box 8, a plurality of vacuum suction cups 9 equidistantly distributed are provided at the bottom of the slide bar 6, the vacuum suction cups 9 are used to adsorb and lock the slide bar 6, a movable plate 11 is fixedly mounted on the outer side of the vacuum suction cup 9, a bottom plate 12 fixedly mounted on the bottom inner wall of the mounting box 8 is provided below the movable plate 11, two support rods 13 symmetrically sliding through the movable plate 11 are fixedly mounted on the top of the bottom plate 12, providing guidance for the movement of the movable plate 11, and the movable plate 11 is provided with a plurality of vacuum suction cups 9 equidistantly distributed at the bottom of the slide bar 6, and the vacuum suction cups 9 are used to adsorb and lock the slide bar 6, a movable plate 11 is fixedly mounted on the outer side of the vacuum suction cup 9, a bottom plate 12 fixedly mounted on the bottom inner wall of the mounting box 8 is provided below the movable plate 11, and two support rods 13 symmetrically sliding through the movable plate 11 are fixedly mounted on the top of the bottom plate 12, providing guidance for the movement of the movable plate 11, and the movable plate 11 is provided with a plurality of vacuum suction cups 9 equidistantly distributed at the bottom of the slide bar 6, and the vacuum suction cups 9 are used to adsorb and lock the slide bar 6 ... fixedly mounted on the outer side of the vacuum suction cup 9, and the A positioning frame 14 is fixedly installed at the bottom of the moving plate 11, and a push block 15 is fixedly installed at the bottom of the positioning frame 14. A plurality of electric push rods 16 are fixedly installed on both sides of the ultrasonic drive seat 2 and are distributed at equal distances. The number of the electric push rods 16 is the same as the number of the push blocks 15. A push plate 10 that slides through the installation box 8 is fixedly installed at the output end of the electric push rod 16. The push plate 10 is located below the positioning frame 14. One side of the push block 15 is a slope structure. A groove for limiting the insertion of the push block 15 is provided on the top of the push plate 10, so that the push plate 10 can push the push block 15 to move upward when moving, so as to realize the adsorption of the vacuum suction cup 9 on the slide bar 6;

[0032] When the ultrasonic drive seat 2 stops running, the electric push rod 16 pushes the push plate 10 to move along the bottom of the positioning frame 14, and the groove of the push plate 10 pushes the inclined surface of the push block 15, so that the push block 15 moves to the top of the push plate 10, and the push block 15 pushes the movable plate 11 to move along the outside of the support rod 13 through the positioning frame 14, so that the movable plate 11 attaches the vacuum suction cup 9 to the bottom of the sliding rod 6, and the sliding rod 6 is fixed at multiple points by multiple vacuum suction cups 9, so as to realize the locking of the workbench 3, solve the problem that the staff is prone to deviation when touching the workbench 3, thereby achieving the effect of quick locking.

[0033] The pressure rod mechanism includes a plurality of top plates 17 equidistantly arranged just above the slide bar 6. The number of the top plates 17 is the same as the number of the vacuum suction cups 9. Each top plate 17 is located just above each vacuum suction cup 9. Two symmetrically distributed mounting rods 18 are fixedly installed at the bottom of the top plate 17. A positioning cylinder 19 is slidably installed on the outer side of the mounting rod 18. The positioning cylinder 19 is fixedly installed on the inner side of the mounting box 8 so that the positioning cylinder 19 provides guidance and positioning for the mounting rod 18. A U-shaped clip 20 is fixedly installed at one end of the mounting rod 18 away from the top plate 17. Two mounting blocks 21 located on the inner sides of the two U-shaped clips 20 are fixedly installed on the top of the push plate 10. The mounting Two symmetrically distributed pull rods 22 are fixedly installed on the outer side of the block 21, and an oblique groove for the pull rod 22 to limit the sliding of the pull rod 22 is opened on the outer side of the U-shaped clip 20, so that when the push plate 10 moves, it can move along the oblique groove of the U-shaped clip 20 through the pull rod 22 on the mounting block 21, and a tension spring 23 is arranged on the outer side of the pull rod 22, and the tension spring 23 is fixedly installed between the U-shaped clip 20 and the positioning cylinder 19, so that when the U-shaped clip 20 moves, the tension spring 23 can be used to pull the U-shaped clip 20 to reset, and a pressure ball 24 is arranged under the top plate 17, and positioning blocks 25 are rotatably installed at both ends of the pressure ball 24, and a spring 26 is fixedly installed between the positioning block 25 and the top plate 17;

[0034] When the push plate 10 moves, it can drive the pull rod 22 on the mounting block 21 to move synchronously. The pull rod 22 moves along the inclined groove on the U-shaped clamp 20, so that the U-shaped clamp 20 moves downward along the outer side of the push plate 10. The U-shaped clamp 20 pulls the top plate 17 downward through the mounting rod 18, so that the top plate 17 drives the pressure ball 24 between the two positioning blocks 25 through the spring 26 to elastically press the top of the slide bar 6, and cooperates with the vacuum suction cup 9 to adsorb the bottom of the slide bar 6, so that each pressure ball 24 and each vacuum suction cup 9 respectively position the top and bottom of the slide bar 6, thereby achieving the effect of stably locking the workbench 3.

[0035] Working principle: First, the user starts the ultrasonic drive seat 2, and the ultrasonic drive seat 2 cooperates with the magnetic guide rail 4 to make the workbench 3 move longitudinally. When the ultrasonic drive seat 2 stops running, the ultrasonic drive seat 2 drives multiple electric push rods 16 to run immediately. The electric push rods 16 push the corresponding push plate 10 to move along the bottom of the positioning frame 14. The groove of the push plate 10 pushes the inclined surface of the push block 15 to move, so that the push block 15 moves to the top of the push plate 10. At the same time, the push block 15 pushes the positioning frame 14 to move upward, so that the positioning frame 14 pushes the movable plate 11 to move along the outer side of the support rod 13. The movable plate 11 attaches the vacuum suction cup 9 upward to the bottom of the slide bar 6, and the slide bar 6 can be moved by multiple vacuum suction cups 9. Multi-point fixation, at the same time, the push plate 10 drives the two mounting blocks 21 to move synchronously, so that the mounting block 21 drives the pull rod 22 to move along the inclined groove on the U-shaped clamp 20, and pushes the U-shaped clamp 20 to move downward along the outer side of the push plate 10. The U-shaped clamp 20 pulls the top plate 17 downward through the mounting rod 18, so that the top plate 17 drives the corresponding positioning blocks 25 to move synchronously through two springs 26. The two positioning blocks 25 drive the pressure ball 24 to contact the slide bar 6, realizing multi-point elastic pressing on the top of the slide bar 6. With the cooperation of the pressure ball 24 and the vacuum suction cup 9, the slide bar 6 is quickly locked, thereby achieving the effect of quickly and smoothly locking the workbench 3, ensuring the accuracy of the workbench 3 when it moves longitudinally again.

[0036] Example 2: Please refer to Figure 1 , Figure 2 and Figure 8 , this embodiment further explains the first embodiment, the dustproof mechanism in the figure includes a protective frame 27 fixedly installed at the bottom of the workbench 3, the size of the protective frame 27 is smaller than the size of the workbench 3, a baffle frame 28 is fixedly installed on the inner side of the bottom of the protective frame 27, the ultrasonic driving seat 2 and the mounting plate 7 are both located on the inner side of the baffle frame 28, a rubber ring 29 is provided at the bottom of the protective frame 27, a plug-in strip 30 is fixedly installed on the top of the rubber ring 29, a slot for limiting the insertion of the plug-in strip 30 is provided at the bottom of the protective frame 27, a rubber strip 31 is fixedly installed at the bottom of the rubber ring 29, the outer side of the rubber strip 31 is an arc-shaped structure, the bottom of the rubber strip 31 is in contact with the top of the base 1, and a plurality of anti-slip strips 37 symmetrically distributed in the center are fixedly installed on the outer side of the plug-in strip 30, and the anti-slip strip 37 is made of rubber material to improve the convenience of installing the plug-in strip 30.

[0037] In this embodiment: when the workbench 3 moves, it can drive the protective frame 27 to move synchronously, so that the protective frame 27 drives the rubber ring 29 and the baffle frame 28 to move synchronously, and the rubber ring 29 drives the rubber strip 31 to move along the top of the base 1, providing protection for the ultrasonic drive seat 2 and the magnetic guide rail 4, preventing dust from entering between the workbench 3 and the base 1, and improving the safety of the micro-motion table. When installing the rubber ring 29, the insertion strip 30 can be inserted into the slot at the bottom of the protective frame 27, and the insertion strip 30 is fixed in the slot through the anti-slip strip 37 on the outside of the insertion strip 30, which is convenient for quick installation and easy disassembly and replacement at a later time.

[0038] Example 3: Please refer to Figure 2-Figure 6 , this embodiment further explains other embodiments. Both ends of the installation box 8 in the figure are fixedly installed with U-shaped frames 32. The inner side of the U-shaped frame 32 contacts the outer side of the slide bar 6 to provide auxiliary support for the movement of the slide bar 6. A spring 2 33 is provided on the outer side of the support rod 13. The spring 2 33 is fixedly installed between the bottom plate 12 and the movable plate 11, and is used to pull the movable plate 11 downward to reset. A support tube 34 is provided on the outer side of the spring 2 33. The support tube 34 is fixedly installed on the top of the bottom plate 12 to prevent the spring 2 33 from bending when rebounding, and provide positioning for the spring 2 33.

[0039] In this embodiment: when the slide bar 6 moves, it can move along the slide groove of the installation box 8 and the inner side of the U-shaped frame 32. The U-shaped frame 32 can improve the stability of the slide bar 6 when it moves. When the movable plate 11 moves, it can pull the two springs 2 33 to stretch, and when the groove of the push plate 10 is aligned with the push block 15, the rebound force of the spring 2 33 is used to reset the movable plate 11, so as to close the vacuum suction cup 9. The two support tubes 34 on the bottom plate 12 can provide guidance for the extension and retraction of the spring 2 33, and cooperate with the support rod 13 to prevent the spring 2 33 from bending when extending and retracting, thereby ensuring the normal operation of the vacuum suction cup 9.

[0040] Example 4: Please refer to Figure 5 and Figure 7 This embodiment further illustrates other embodiments. The bottom of the top plate 17 shown in the figure is provided with an arc groove that matches the pressure ball 24, so that the pressure ball 24 can contact the arc groove of the top plate 17. A mounting strip 35 is provided on the top of the top plate 17. Two guide rods 36 that slide through the top plate 17 are fixedly installed at the bottom of the mounting strip 35. The bottom ends of the two guide rods 36 are respectively fixedly connected to the tops of the two positioning blocks 25 to provide guidance and support for the movement of the positioning blocks 25.

[0041] In this embodiment: when the top plate 17 moves downward, the top of the pressure ball 24 can be pressed through the arc groove, so that the pressure ball 24 is locked, and the pressure force of the pressure ball 24 on the slide bar 6 is increased, and the pressure ball 24 can drive the guide rod 36 to move along the inner side of the top plate 17 through the positioning block 25, so that the mounting bar 35 is away from the top plate 17, thereby improving the stability of the movement of the pressure ball 24, thereby achieving rapid pressing of the slide bar 6 by the pressure ball 24.

[0042] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0043] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A micro-motion stage driven by a patch ultrasonic motor, characterized in that: include: A base (1) and an ultrasonic drive seat (2) fixedly mounted on the top of the base (1); a workbench (3) is arranged above the ultrasonic drive seat (2); a magnetic guide rail (4) matching the ultrasonic drive seat (2) is fixedly mounted on the bottom of the workbench (3); two symmetrically distributed U-shaped frames (5) are fixedly mounted on the bottom of the base (1); a sliding rod (6) is fixedly mounted between the two ends of the U-shaped frame (5); Also includes: A self-locking mechanism, used for positioning and locking the workbench (3), the self-locking mechanism being mounted on the top of the base (1); A pressure rod mechanism, used for improving the stability of locking the workbench (3), the pressure rod mechanism being installed between the slide bar (6) and the base (1); A dustproof mechanism, used for providing protection for the ultrasonic drive seat (2), the dustproof mechanism being installed at the bottom of the workbench (3); The self-locking mechanism comprises two mounting plates (7) symmetrically fixedly mounted on the top of the base (1); a mounting box (8) is fixedly mounted on the top of the mounting plate (7); a groove for limiting the sliding of the slide bar (6) is provided on the top of the mounting box (8); a plurality of vacuum suction cups (9) distributed at equal intervals are provided at the bottom of the slide bar (6); a movable plate (11) is fixedly mounted on the outer side of the vacuum suction cup (9); a bottom plate (12) fixedly mounted on the inner wall of the bottom of the mounting box (8) is provided below the movable plate (11); two symmetrical sliding plates (13) are fixedly mounted on the top of the bottom plate (12) and penetrate the movable plate. The movable plate (11) is provided with a support rod (13), a positioning frame (14) is fixedly mounted at the bottom of the movable plate (11), a push block (15) is fixedly mounted at the bottom of the positioning frame (14), a plurality of electric push rods (16) are fixedly mounted at both sides of the ultrasonic drive seat (2) and are distributed at equal distances, the number of the electric push rods (16) is the same as the number of the push blocks (15), a push plate (10) which slides through the installation box (8) is fixedly mounted at the output end of the electric push rod (16), one side of the push block (15) is a slope structure, and a groove is provided on the top of the push plate (10) for limiting and plugging the push block (15).

2. According to claim 1, a micro-motion stage driven by a patch ultrasonic motor is characterized in that: The pressure rod mechanism comprises a plurality of top plates (17) equidistantly arranged directly above the sliding rod (6), the number of the top plates (17) being the same as the number of the vacuum suction cups (9), two symmetrically distributed mounting rods (18) being fixedly mounted on the bottom of the top plate (17), a positioning cylinder (19) being slidably mounted on the outer side of the mounting rod (18), the positioning cylinder (19) being fixedly mounted on the inner side of the mounting box (8), a U-shaped clip (20) being fixedly mounted on one end of the mounting rod (18) away from the top plate (17), and two U-shaped clips (20) being respectively located on the top of the push plate (10). ) is provided with a mounting block (21) on the inner side, two symmetrically distributed pull rods (22) are fixedly installed on the outer side of the mounting block (21), an oblique groove for limiting the sliding of the pull rod (22) is provided on the outer side of the U-shaped clamp (20), a tension spring (23) is provided on the outer side of the pull rod (22), and the tension spring (23) is fixedly installed between the U-shaped clamp (20) and the positioning cylinder (19), a pressure ball (24) is provided below the top plate (17), positioning blocks (25) are rotatably installed at both ends of the pressure ball (24), and a spring (26) is fixedly installed between the positioning block (25) and the top plate (17).

3. According to claim 2, a micro-motion stage driven by a patch ultrasonic motor is characterized in that: The dustproof mechanism comprises a protective frame (27) fixedly mounted on the bottom of the workbench (3); the size of the protective frame (27) is smaller than the size of the workbench (3); a baffle frame (28) is fixedly mounted on the inner side of the bottom of the protective frame (27); the ultrasonic drive seat (2) and the mounting plate (7) are both located on the inner side of the baffle frame (28); a rubber ring (29) is arranged at the bottom of the protective frame (27); an insert strip (30) is fixedly mounted on the top of the rubber ring (29); a slot for limiting insertion of the insert strip (30) is provided at the bottom of the protective frame (27); a rubber strip (31) is fixedly mounted on the bottom of the rubber ring (29); the outer side of the rubber strip (31) is in an arc-shaped structure; the bottom of the rubber strip (31) contacts the top of the base (1).

4. The micro-motion stage driven by a patch ultrasonic motor according to claim 1, characterized in that: U-shaped frames (32) are fixedly mounted on both ends of the installation box (8), and the inner side of the U-shaped frame (32) is in contact with the outer side of the sliding rod (6).

5. The micro-motion stage driven by a patch ultrasonic motor according to claim 1, characterized in that: A second spring (33) is provided on the outer side of the support rod (13), and the second spring (33) is fixedly installed between the bottom plate (12) and the movable plate (11).

6. The micro-motion stage driven by a patch ultrasonic motor according to claim 5, characterized in that: A support tube (34) is provided on the outer side of the second spring (33), and the support tube (34) is fixedly mounted on the top of the bottom plate (12).

7. The micro-motion stage driven by a patch ultrasonic motor according to claim 2, characterized in that: The bottom of the top plate (17) is provided with an arc-shaped groove which matches the pressure ball (24).

8. The micro-motion stage driven by a patch ultrasonic motor according to claim 2, characterized in that: A mounting bar (35) is provided at the top of the top plate (17), and two guide rods (36) that slide through the top plate (17) are fixedly mounted at the bottom of the mounting bar (35), and the bottom ends of the two guide rods (36) are respectively fixedly connected to the tops of the two positioning blocks (25).

9. The micro-motion stage driven by a patch ultrasonic motor according to claim 3, characterized in that: A plurality of anti-slip strips (37) distributed symmetrically around the center are fixedly mounted on the outer side of the insert strip (30), and the anti-slip strips (37) are made of rubber.

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