A large flow diaphragm compressor

Abstract

The present invention discloses a large-flow diaphragm compressor, comprising a primary cylinder assembly, a secondary cylinder assembly, a tertiary cylinder assembly, a crank-connecting rod assembly, a first three-way assembly and a second three-way assembly; the first three-way assembly and the second three-way assembly are connected on both sides of the crank-connecting rod assembly; the primary cylinder assembly is connected to the oil chamber of the first three-way assembly; the oil chambers of the secondary cylinder assembly and the tertiary cylinder assembly are connected to the oil chamber of the second three-way assembly; the exhaust port of the primary cylinder assembly is connected to the air inlet of the secondary cylinder assembly; the exhaust port of the secondary cylinder assembly is connected to the air inlet of the tertiary cylinder assembly. The present invention increases the air intake of the secondary cylinder assembly, ensures that the crankshaft can make two diaphragm compressors work in sequence within one cycle of operation, and effectively increases the reverse angle of the diaphragm compressor; the present invention has the advantages of stable operation and large exhaust volume.

Description

Technical Field

[0001] The invention relates to the technical field of diaphragm compressors, in particular to a large-flow diaphragm compressor. Background Art

[0002] The diaphragm compressor is a positive displacement compressor, which relies on the deformation of the diaphragm in the diaphragm head to change the volume to achieve gas compression, which determines its absolute oil-free and good sealing, and is most suitable for compressing high-purity gases that require no pollution.

[0003] However, due to the constraints and influences of the existing compressor's own structural characteristics, such as small air cavity stroke volume, low rotation speed, and low volumetric efficiency, the gas processing capacity of a single machine is relatively small and the reverse angle is small. Summary of the invention

[0004] The present invention solves the above-mentioned problems existing in the diaphragm compressor in the prior art by providing a large-flow diaphragm compressor.

[0005] In order to solve the above technical problems, the present invention provides a large flow diaphragm compressor, comprising: a primary cylinder assembly, a secondary cylinder assembly, a tertiary cylinder assembly, a crank connecting rod assembly, a first three-way assembly and a second three-way assembly;

[0006] The first three-way assembly and the second three-way assembly are located on both sides of the crank-connecting rod assembly and are connected to the crankshaft of the crank-connecting rod assembly;

[0007] The first-stage cylinder assembly comprises a first first-stage cylinder assembly and a second first-stage cylinder assembly; the oil chambers of the first first-stage cylinder assembly and the second first-stage cylinder assembly are respectively connected to the oil chamber of the first three-way assembly;

[0008] The oil chambers of the second-stage cylinder assembly and the third-stage cylinder assembly are respectively connected to the oil chamber of the second three-way assembly;

[0009] The exhaust port of the first-stage cylinder assembly is connected to the air inlet of the second-stage cylinder assembly through a gas pipeline; the exhaust port of the second-stage cylinder assembly is connected to the air inlet of the third-stage cylinder assembly through a gas pipeline.

[0010] In a preferred embodiment of the present invention, a primary gas cooler and a primary gas storage tank are installed on the pipeline between the exhaust port of the primary cylinder assembly and the air inlet of the secondary cylinder assembly.

[0011] In a preferred embodiment of the present invention, a secondary gas cooler and a secondary gas storage tank are installed on the pipeline between the exhaust port of the secondary cylinder assembly and the air inlet of the tertiary cylinder assembly.

[0012] In a preferred embodiment of the present invention, the first three-way assembly includes a first three-way body, a first three-way sleeve and a first piston;

[0013] The first tee comprises a first tee left oil chamber, a first tee right oil chamber and a first tee lower oil chamber;

[0014] The first tee sleeve is installed at the left port of the first tee body;

[0015] One end of the first piston extends into the first tee body and is movable along the left oil chamber and the right oil chamber of the first tee body, and the other end of the first piston passes through the first tee sleeve and is connected to the crankshaft of the crank-connecting rod assembly;

[0016] The oil chamber of the first-stage cylinder assembly is communicated with the lower oil chamber of the first three-piece body; the oil chamber of the second-stage cylinder assembly is communicated with the right oil chamber of the first three-piece body.

[0017] In a preferred embodiment of the present invention, the first piston and the lower oil chamber of the first three-way body satisfy the relationship: ;

[0018] Among them, D 1 is the piston head diameter of the first piston, D 2 is the piston rod diameter of the first piston, D 3 is the diameter of the lower oil chamber of the first tee.

[0019] In a preferred embodiment of the present invention, the second three-way assembly includes a second three-way body, a second three-way sleeve and a second piston;

[0020] The second tee is provided with a second tee upper oil chamber and a second tee lower oil chamber;

[0021] The second tee sleeve is built in the upper oil chamber of the second tee body and communicates with the lower oil chamber of the second tee body;

[0022] One end of the second piston is movably built into the second three-way sleeve, and the other end is connected to the crankshaft of the crank-connecting rod assembly;

[0023] The oil chamber of the second-stage cylinder assembly is communicated with the left port of the upper oil chamber of the second three-way body; the oil chamber of the third-stage cylinder assembly is communicated with the lower oil chamber of the second three-way body.

[0024] In a preferred embodiment of the present invention, the second piston and the lower oil chamber of the second three-way body satisfy the relationship: ;

[0025] Among them, D 4 is the piston head diameter of the second piston, D 5is the piston rod diameter of the second piston, D 6 is the diameter of the lower oil chamber of the second tee.

[0026] In a preferred embodiment of the present invention, the first-stage cylinder assembly and the second-stage cylinder assembly are respectively provided with two first-stage air inlets and one first-stage exhaust port, and the second-stage cylinder assembly is provided with one second-stage air inlet and one second-stage exhaust port; the third-stage cylinder assembly is provided with one third-stage air inlet and one third-stage exhaust port; the two first-stage exhaust ports are respectively connected to the second-stage air inlet of the second-stage cylinder assembly through pipelines.

[0027] In a preferred embodiment of the present invention, both ends of the membrane cavity of the first-stage cylinder assembly, the second-stage cylinder assembly, the second-stage cylinder assembly and the third-stage cylinder assembly are respectively provided with an oil replenishment valve port and a pressure regulating valve port.

[0028] In a preferred embodiment of the present invention, the pressure regulating valve port of the first-stage cylinder assembly is connected to the oil replenishing valve port of the second-stage cylinder assembly; the pressure regulating valve port of the third-stage cylinder assembly is connected to the oil replenishing valve port of the second-stage cylinder assembly.

[0029] The beneficial effects of the present invention are as follows: a large-flow diaphragm compressor of the present invention improves the air intake of the two-stage cylinder assembly through the combined design of the double-stage cylinder assembly; the operation of the multi-stage cylinder assembly is driven by the crankshaft, which ensures that the two diaphragm compressors can work in sequence within one cycle of the crankshaft, and effectively increases the reverse angle of the diaphragm compressor. The combined design of the multi-stage cylinder assembly of the present invention has the advantages of stable operation and large exhaust volume, and is highly practical. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 It is a three-dimensional structural schematic diagram of a preferred embodiment of a large flow diaphragm compressor of the present invention;

[0031] Figure 2 is a schematic structural diagram of the first stage cylinder assembly shown;

[0032] Figure 3 is a schematic structural diagram of the second first-stage cylinder assembly shown;

[0033] Figure 4 is a schematic diagram of the structure of the secondary cylinder assembly shown;

[0034] Figure 5 is a schematic diagram of the structure of the three-stage cylinder assembly shown;

[0035] Figure 6 is a schematic diagram of the structure of the first three-way assembly shown;

[0036] Figure 7 Schematic diagram of the first three-way oil chamber;

[0037] Figure 8 is a schematic diagram of the dimensional relationship of the first three-way component shown;

[0038] Fig. 9 is a schematic diagram of the structure of the second three-way assembly shown;

[0039] Fig.10 Schematic diagram of the second three-piece oil chamber;

[0040] Fig.11 Schematic diagram of the oil chamber of the second three-way sleeve shown;

[0041] Fig.12 is a schematic diagram of the size relationship of the second three-way component shown;

[0042] The markings of the components in the accompanying drawings are as follows:

[0043] 10. first stage cylinder assembly, 11. first stage air inlet, 12. first stage exhaust port, 13. first oil chamber interface, 14. first oil replenishment valve port, 15. first pressure regulating valve port;

[0044] 20. second-stage cylinder assembly, 21. second-stage air inlet, 22. second-stage exhaust port, 23. second oil chamber interface, 24. second oil replenishment valve port, 25. second pressure regulating valve port;

[0045] 30. Secondary cylinder assembly, 31. Secondary air inlet, 32. Secondary exhaust port, 33. Third oil chamber interface, 34. Third oil replenishment valve port, 35. Third pressure regulating valve port;

[0046] 40. three-stage cylinder assembly, 41. three-stage air inlet, 42. three-stage exhaust port, 43. fourth oil chamber interface, 44. fourth oil replenishment valve port, 45. fourth pressure regulating valve port;

[0047] 50. Crank connecting rod assembly;

[0048] 60. first three-way assembly, 61. first three-way body, 62. first three-way sleeve, 63. first piston, 611. left oil chamber of the first three-way body, 612. right oil chamber of the first three-way body, 613. lower oil chamber of the first three-way body;

[0049] 70. second three-way assembly, 71. second three-way body, 72. second three-way sleeve, 73. second piston, 711. second three-way body upper oil chamber, 712. second three-way body lower oil chamber, 721. second three-way sleeve left oil chamber, 722. second three-way sleeve right oil chamber, 723. through hole;

[0050] 80. Primary gas cooler; 90. Primary gas storage tank; 100. Secondary gas cooler; 110. Secondary gas storage tank. DETAILED DESCRIPTION

[0051] The preferred embodiments of the present invention are described in detail below in conjunction with the accompanying drawings so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the protection scope of the present invention.

[0052] See also Figure 1-12 , the embodiment of the present invention includes: Example 1

[0053] The present invention discloses a large-flow diaphragm compressor, comprising: a first-stage cylinder assembly 10, a second-stage cylinder assembly 20, a second-stage cylinder assembly 30, a third-stage cylinder assembly 40, a crank-connecting rod assembly 50, a first three-way assembly 60 and a second three-way assembly 70.

[0054] Specifically, the first three-way assembly 60 and the second three-way assembly 70 are located on both sides of the crank-connecting rod assembly 50 and are connected to the crankshaft of the crank-connecting rod assembly 50 .

[0055] The first three-way assembly 60 includes a first three-way body 61, a first three-way sleeve 62 and a first piston 63. The first three-way body 61 includes a first three-way body left oil chamber 611 and a first three-way body right oil chamber 612 in the horizontal direction, and also includes a first three-way body lower oil chamber 613 in the vertical direction. The first three-way sleeve 62 is installed at the left end of the first three-way body 61. One end of the first piston 63 extends into the first three-way body 61 and can move along the first three-way body left oil chamber 611 and the first three-way body right oil chamber 612. The other end of the first piston 63 passes through the first three-way sleeve 62 and is connected to the crankshaft of the crank-connecting rod assembly 50. A guide ring and a sealing ring are provided on the first piston 63 to play the role of movement guide and sealing.

[0056] The first piston 63 and the first three-way lower oil chamber 613 satisfy the relationship: , wherein D1 is the piston head diameter of the first piston, D2 is the piston rod diameter of the first piston, and D3 is the diameter of the lower oil chamber of the first three-way body.

[0057] By designing the size relationship between the first piston rod 63 and the first three-piece lower oil chamber 613, it is ensured that the volume change of the oil chamber when compressing the first primary cylinder assembly 10 with the bottom of the piston is consistent with that when compressing with the head of the piston.

[0058] The second three-way assembly 70 includes a second three-way body 71, a second three-way sleeve 72, and a second piston 73. The second three-way body 71 has a second three-way body upper oil chamber 711 and a second three-way body lower oil chamber 712; the second three-way sleeve 72 is built in the second three-way body upper oil chamber 711. The second three-way sleeve 72 is a cylindrical structure, including a second three-way sleeve left oil chamber 721 and a second three-way sleeve right oil chamber 722. The second three-way sleeve 72 is located below the right end of the second three-way sleeve right oil chamber 722 and is also provided with a through hole 723. The second three-way sleeve 72 is connected to the second three-way body lower oil chamber 712 through the through hole 723.

[0059] One end of the second piston 73 is built into the second three-way sleeve 72 and can move back and forth along the second three-way sleeve 72, and the other end is connected to the crankshaft of the crank connecting rod assembly 50. The guide ring and the sealing ring provided on the second piston 73 play the role of movement guide and sealing.

[0060] The second piston 73 and the second three-piece lower oil chamber 712 satisfy the relationship: , wherein D4 is the piston head diameter of the second piston, D5 is the piston rod diameter of the second piston, and D6 is the diameter of the lower oil chamber of the second tee.

[0061] By designing the size relationship between the second piston 73 and the second three-piece lower oil chamber 712, it is ensured that the change in the oil chamber volume when the three-stage cylinder assembly 40 is compressed by the bottom of the piston is consistent with that when it is compressed by the head of the piston.

[0062] The first-stage cylinder assembly 10 is a diaphragm compressor, one side of which is provided with two first-stage air inlets 11 and one first-stage exhaust port 12 connected to its diaphragm cavity; the other side of which is provided with a first oil chamber interface 13 connected to its oil chamber, and the two ends of its oil chamber are respectively provided with a first oil replenishing valve port 14 and a first pressure regulating valve port 15.

[0063] The second-stage cylinder assembly 20 is a diaphragm compressor, one side of which is provided with two second-stage air inlets 21 and one second-stage exhaust port 22 connected to its diaphragm cavity; the other side of which is provided with a second oil chamber interface 23 connected to its oil chamber, and the two ends of its oil chamber are respectively provided with a second oil replenishing valve port 24 and a second pressure regulating valve port 25.

[0064] The first pressure regulating valve port 15 of the first-stage cylinder assembly 10 is connected to the second oil replenishing valve port 24 of the second-stage cylinder assembly 20 .

[0065] The two-stage cylinder assembly 30 is a diaphragm compressor, one side of which is provided with a two-stage air inlet 31 and a two-stage exhaust port 32 connected to its diaphragm cavity; the other side of the two-stage cylinder assembly 30 is provided with a third oil chamber interface 33 connected to its oil chamber, and the two ends of the oil chamber are respectively provided with a third oil replenishing valve port 34 and a third pressure regulating valve port 35.

[0066] The three-stage cylinder assembly 40 is a diaphragm compressor, one side of which is provided with a three-stage air inlet 41 and a three-stage exhaust port 42 connected to its diaphragm cavity; the other side of the compressor is provided with a fourth oil chamber interface 43 connected to its oil chamber, and both ends of the oil chamber are provided with a fourth oil replenishing valve port 44 and a fourth pressure regulating valve port 45 respectively.

[0067] The third pressure regulating valve port 35 of the second-stage cylinder assembly 30 is connected to the fourth oil replenishing valve port 44 of the third-stage cylinder assembly 40 .

[0068] The first-stage cylinder assembly 10, the second-stage cylinder assembly 20, the second-stage cylinder assembly 30 and the third-stage cylinder assembly 40 are arranged in a counterclockwise direction. Through the design of the four cylinder assemblies, multi-stage compression is achieved, the final exhaust pressure is effectively increased, and the compression effect is guaranteed.

[0069] Specifically, the first oil chamber interface 13 of the first-stage cylinder assembly 10 is in communication with the first three-piece lower oil chamber 613; the second oil chamber interface 23 of the second-stage cylinder assembly 20 is in communication with the first three-piece right oil chamber 612. The third oil chamber interface 33 of the second-stage cylinder assembly 30 is in communication with the second three-way sleeve left oil chamber 721, and the fourth oil chamber interface 43 of the third-stage cylinder assembly 40 is in communication with the second three-piece lower oil chamber 712.

[0070] Furthermore, the first-stage exhaust port 12 of the first-stage cylinder assembly 10 and the second-stage exhaust port 22 of the second-stage cylinder assembly 20 are both connected to the secondary air inlet 31 of the secondary cylinder assembly 30 through a gas pipeline, and a first-stage gas cooler 80 and a first-stage gas storage tank 90 are also installed on the gas pipeline, which are respectively used to cool and store the compressed gas discharged from the first-stage cylinder assembly.

[0071] The first-stage cylinder assembly 10 and the second-stage cylinder assembly 20 constitute a double-stage cylinder assembly, which work together in sequence within 360 degrees of crank rotation, 180 degrees forward and backward, to supply air to the second-stage cylinder assembly 30. The double-stage cylinder assembly jointly supplies air to the air inlet of the second-stage compressor, thereby ensuring the air intake volume of the second-stage compressor, ensuring the air intake volume and exhaust pressure of the subsequent third-stage compressor, thereby improving the final exhaust pressure.

[0072] The secondary exhaust port 32 of the secondary cylinder assembly 30 is connected to the tertiary air inlet 41 of the tertiary cylinder assembly 40 through a gas pipeline, and a secondary gas cooler 100 and a secondary gas storage tank 110 are also installed on the gas pipeline, which are respectively used to cool and store the compressed gas discharged from the secondary cylinder assembly.

[0073] The gas compression method or principle of the large flow diaphragm compressor disclosed in this embodiment is as follows:

[0074] The first piston 63 of the first three-way assembly 60 and the second piston 73 of the second three-way assembly 70 are respectively connected to the crankshaft of the crank-connecting rod assembly 50 and are driven by the crankshaft to perform periodic reciprocating linear motion.

[0075] As the first piston 63 moves to the left, the volume of the left oil chamber 611 of the first three-piece on its left side is gradually compressed, the first-stage cylinder assembly 10 starts the compression process, and finally discharges the high-pressure gas through the first-stage exhaust port 12; at the same time, the volume of the right oil chamber 612 of the first three-piece on the right side of the first piston 63 gradually increases, the second-stage cylinder assembly 20 starts the expansion process, and finally inhales gas.

[0076] Similarly, when the first piston 63 moves to the right, the volume of the first three-body left oil chamber 611 on its left side gradually increases, and the first-stage cylinder assembly 10 begins the expansion process and eventually inhales gas; at the same time, the first three-body right oil chamber 612 on the right side of the first piston 63 is gradually compressed, and the second-stage cylinder assembly 20 begins the compression process and eventually discharges the high-pressure gas through the second-stage exhaust port 22.

[0077] As the first piston 63 moves to the right, the second piston 73 moves to the left, the left oil chamber 721 of the second three-way sleeve on the left side of the second piston 73 is compressed, the secondary cylinder assembly 30 starts the compression process, and finally discharges the high-pressure gas through the secondary exhaust port 32; at the same time, the volume of the right oil chamber 722 of the second three-way sleeve on the right side of the second piston 73 gradually increases, the third-stage cylinder assembly 40 starts the expansion process, and finally inhales gas.

[0078] When the first piston 63 moves to the left, the second piston 73 moves to the right, and the volume of the left oil chamber 721 of the second three-way sleeve on the left side of the second piston 73 gradually increases, and the secondary cylinder assembly 30 begins the expansion process and eventually inhales gas; at the same time, the right oil chamber 722 of the second three-way sleeve on the right side of the second piston 73 is gradually compressed, and the third-stage cylinder assembly 40 begins the compression process, and finally the third-stage exhaust port 42 discharges high-pressure gas.

[0079] The oil filling method or principle of the oil chamber of the large flow diaphragm compressor disclosed in this embodiment is as follows:

[0080] When the first-stage cylinder assembly 10 ends in the intake stage, the oil replenishment pump injects an appropriate amount of oil into its oil chamber through the first oil replenishment valve port 14. When the compression process of the first-stage cylinder assembly 10 ends, the excess oil will be discharged through the first pressure regulating valve port 15, and the excess oil will be replenished into the oil chamber of the second-stage cylinder assembly 20 which is in the intake stage.

[0081] Likewise, during the compression process of the second-stage cylinder assembly 20 , excess oil will be discharged to the oil tank through the second pressure regulating valve port 25 .

[0082] When the secondary cylinder assembly 30 ends in the intake stage, the oil replenishment pump injects an appropriate amount of oil into its oil chamber through the third oil replenishment valve port 34. When the compression process of the secondary cylinder assembly 30 ends, the excess oil will be discharged through the third pressure regulating valve port 35, and the excess oil will be replenished into the oil chamber of the tertiary cylinder assembly 40 which is in the intake stage.

[0083] Likewise, during the compression process of the three-stage cylinder assembly 40 , excess oil will be discharged into the oil tank through the fourth pressure regulating valve port 45 .

[0084] The above-mentioned large flow diaphragm compressor has been tested and found that its flow rate is 1850Nm under the condition of inlet pressure (gauge pressure) of 1MPa. 3 / h.

[0085] The above descriptions are merely embodiments of the present invention and are not intended to limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made using the contents of the present invention specification and drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A large flow diaphragm compressor, characterized in that: include: A primary cylinder assembly, a secondary cylinder assembly, a tertiary cylinder assembly, a crank-connecting rod assembly, a first three-way assembly and a second three-way assembly; the first three-way assembly and the second three-way assembly are located on both sides of the crank-connecting rod assembly and are connected to the crankshaft of the crank-connecting rod assembly; the primary cylinder assembly includes a first primary cylinder assembly and a second primary cylinder assembly; the oil chambers of the first primary cylinder assembly and the second primary cylinder assembly are respectively connected to the oil chamber of the first three-way assembly; the oil chambers of the secondary cylinder assembly and the three-stage cylinder assembly are respectively connected to the oil chamber of the second three-way assembly; the exhaust port of the primary cylinder assembly is connected to the air inlet of the secondary cylinder assembly through a gas pipeline; the exhaust port of the secondary cylinder assembly is connected to the air inlet of the three-stage cylinder assembly through a gas pipeline; The first three-way assembly includes a first three-way body, a first three-way sleeve and a first piston; the first three-way body includes a first three-way body left oil chamber, a first three-way body right oil chamber and a first three-way body lower oil chamber; the first three-way sleeve is installed at the left port of the first three-way body; one end of the first piston extends into the first three-way body and can move along the first three-way body left oil chamber and the first three-way body right oil chamber, and the other end thereof passes through the first three-way sleeve and is connected to the crankshaft of the crank-connecting rod assembly; the oil chamber of the first-stage cylinder assembly is connected to the first three-way body lower oil chamber; the oil chamber of the second-stage cylinder assembly is connected to the first three-way body right oil chamber; the first piston and the first three-way body lower oil chamber satisfy the relationship: D1 2 -D2 2 =D3 2 ; Wherein, D1 is the piston head diameter of the first piston, D2 is the piston rod diameter of the first piston, and D3 is the diameter of the lower oil chamber of the first three-way body; The second three-way assembly comprises a second three-way body, a second three-way sleeve and a second piston; the second three-way body has a second three-way body upper oil chamber and a second three-way body lower oil chamber; the second three-way sleeve is built in the second three-way body upper oil chamber and communicated with the second three-way body lower oil chamber; one end of the second piston is movably built in the second three-way sleeve, and the other end thereof is connected to the crankshaft of the crank-connecting rod assembly; The oil chamber of the second-stage cylinder assembly is in communication with the left port of the upper oil chamber of the second three-piece body; the oil chamber of the third-stage cylinder assembly is in communication with the lower oil chamber of the second three-piece body; The second piston and the lower oil chamber of the second three-way body satisfy the relationship: D4 2 -D5 2 =D6 2 ; Wherein, D4 is the piston head diameter of the second piston, D5 is the piston rod diameter of the second piston, and D6 is the diameter of the lower oil chamber of the second tee body.

2. A large flow diaphragm compressor according to claim 1, characterized in that: A first-stage gas cooler and a first-stage gas storage tank are installed on the pipeline between the exhaust port of the first-stage cylinder assembly and the air inlet of the second-stage cylinder assembly.

3. A large flow diaphragm compressor according to claim 1, characterized in that: A secondary gas cooler and a secondary gas storage tank are installed on the pipeline between the exhaust port of the secondary cylinder assembly and the air inlet of the tertiary cylinder assembly.

4. A large flow diaphragm compressor according to claim 1, characterized in that: The first-stage cylinder assembly and the second-stage cylinder assembly are respectively provided with two first-stage air inlets and one first-stage exhaust port, and the second-stage cylinder assembly is provided with one second-stage air inlet and one second-stage exhaust port; the third-stage cylinder assembly is provided with one third-stage air inlet and one third-stage exhaust port; the two first-stage exhaust ports are respectively connected to the second-stage air inlet of the second-stage cylinder assembly through pipes.

5. A large flow diaphragm compressor according to claim 1, characterized in that: Both ends of the membrane cavity of the first-stage cylinder assembly, the second-stage cylinder assembly, the second-stage cylinder assembly and the third-stage cylinder assembly are respectively provided with an oil replenishment valve port and a pressure regulating valve port.

6. A large flow diaphragm compressor according to claim 5, characterized in that: The pressure regulating valve port of the first-stage cylinder assembly is connected to the oil replenishing valve port of the second-stage cylinder assembly; the pressure regulating valve port of the third-stage cylinder assembly is connected to the oil replenishing valve port of the second-stage cylinder assembly.

Images